CN108728826B - Fixed structure, rotary lifting device and semiconductor processing equipment - Google Patents
Fixed structure, rotary lifting device and semiconductor processing equipment Download PDFInfo
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- CN108728826B CN108728826B CN201710252593.4A CN201710252593A CN108728826B CN 108728826 B CN108728826 B CN 108728826B CN 201710252593 A CN201710252593 A CN 201710252593A CN 108728826 B CN108728826 B CN 108728826B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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Abstract
The invention provides a fixed structural member, a rotary lifting device and a semiconductor processing device. This fixed knot constructs includes first loop configuration, second loop configuration and connecting piece, and first loop configuration and second loop configuration laminate mutually and form loop configuration, and the connecting piece activity sets up in first loop configuration, and second loop configuration can rotate first loop configuration relatively to promote the connecting piece and swing at certain angle within range, fix or release fixedly to realizing being fixed by the fixture. This fixed structure spare does not form fine bearing to slewing lifting mechanism before the release of slewing lifting mechanism is fixed at the connecting piece to the artificial support of slewing lifting mechanism carries the time when having shortened installation and dismantlement, and then has reduced slewing lifting mechanism's the installation and the dismantlement degree of difficulty, and has reduced slewing lifting mechanism when installation and dismantlement damage risk to fragile article.
Description
Technical Field
The invention relates to the technical field of magnetron sputtering, in particular to a fixed structural part, a rotary lifting device and semiconductor processing equipment.
Background
The CVD (Chemical Vapor Deposition) method is a method of preparing an epitaxial thin film layer by reacting different gases with each other at a high temperature. The thin film epitaxial growth can be carried out by a CVD apparatus, that is, a single crystal layer having the same crystal orientation as the substrate and meeting certain requirements is grown on a single crystal substrate (substrate). Taking silicon epitaxy as an example, chemical vapor deposition epitaxy for silicon epitaxy grows on the principle of transporting a silicon compound (SiHCl) on a substrate at high temperature (> 1000 ℃ C.)3Or SiCl4Or SiH2Cl2Etc.), with hydrogen (H)2) A method for precipitating silicon on a substrate by a reduction reaction.
The central component of a CVD apparatus is the reaction chamber subsystem, whose design has a decisive influence on the quality of the epitaxial layers and the throughput of the apparatus. The reaction chamber subsystem mainly comprises a tray, a quartz cavity, a rotary lifting device, a heating device and an air inlet device on the hardware. The tray can keep the rotation of a certain angular velocity in the technological process, and meanwhile, in order to realize the function of taking and placing the sheets by the manipulator, a rotary lifting mechanism is required to be designed below the tray to drive the tray to rotate and lift. Generally, the rotary lifting device is hung below the outer cover of the quartz chamber so as to drive the tray to rotate and lift, so that the uniformity of a temperature field and the uniformity of airflow in the quartz chamber can be improved.
The structure of a reaction chamber subsystem in the prior art is shown in fig. 1 and 2, and comprises a rotary hanging flange 5, a rotary lifting mechanism 7, mounting screws 8, a flange support rod 9, a tray 6 and a chamber housing 10. In the subsystem, a rotary hoisting flange 5 is fixed on a chamber housing 10 through a flange support rod 9, 6 screw holes 18 are formed in the end part of one end, connected with the rotary hoisting flange 5, of a rotary lifting mechanism 7, the rotary lifting mechanism 7 is fixed on the rotary hoisting flange 5 through 6 mounting screws, so that the rotary lifting mechanism 7 is suspended below the chamber housing 10, and a rotary shaft of the rotary lifting mechanism 7 penetrates through a round hole below the chamber housing 10 to enter a chamber so as to drive a tray 6 to realize the functions of rotation and lifting.
In the reaction chamber subsystem structure of the first prior art, when the rotary lifting mechanism 7 is installed, firstly, the rotary lifting mechanism 7 needs to be forcibly pressed against the lower surface of the rotary hanging flange 5, and the screw hole 18 at the end of the rotary lifting mechanism 7 is aligned with the screw installation hole on the rotary hanging flange 5; and then both are fastened with screws 8. When the screws 8 are installed, in order to keep the installation balance, firstly, three symmetrical screws 8 are installed, and then the three screws 8 are tightened, the rotary lifting mechanism 7 is always supported and cannot be loosened, so that the screws 8 can be smoothly screwed into the screw holes 18. Similarly, during the disassembly process, the symmetrical three screws 8 are disassembled first, and when the other three screws 8 are disassembled, the rotary lifting mechanism 7 is supported against the lower surface of the rotary hanging flange 5 with force until the disassembly of the other three screws 8 is completed.
The first prior art reaction chamber subsystem suffers from the following drawbacks: when the rotary lifting mechanism 7 is assembled and disassembled, the rotary lifting mechanism 7 needs to be pushed against the rotary lifting mechanism 7 with long time force, and the rotary lifting mechanism 7 is often heavier, which causes great difficulty in assembly and disassembly; meanwhile, once the force is loosened, the rotary lifting mechanism 7 falls down or touches fragile materials, so that the fragile materials are easily damaged.
Disclosure of Invention
The invention provides a fixed structural part, a rotary lifting device and semiconductor processing equipment aiming at the technical problems in the prior art. This fixed knot constructs through setting up on the flange, can be when rotatory elevating system installs and dismantles, does not form fine bearing to rotatory elevating system before the release of rotatory elevating system is fixed at the connecting piece to the artificial support of rotatory elevating system carries the time when having shortened the installation and having dismantled, and then has reduced the installation and the dismantlement degree of difficulty of rotatory elevating system, and has reduced the damage risk of rotatory elevating system to fragile article when installation and dismantlement.
The invention provides a fixed structural part which comprises a first annular structure, a second annular structure and a connecting piece, wherein the first annular structure and the second annular structure are attached to form an annular structural part; the connecting piece is movably arranged in the first annular structure, and the second annular structure can rotate relative to the first annular structure so as to push the connecting piece to swing within a certain angle range, so that a fixed object is fixed or released to be fixed.
Preferably, a plurality of first through holes are formed in a first annular side wall of the first annular structure, which is parallel to the axis of the first annular structure; and a second through hole is formed between any two adjacent first through holes, and the second through hole extends from the first annular side wall to a second annular side wall, perpendicular to the axis of the first annular structure, of the first annular structure.
Preferably, the connecting member includes a connecting column and a first fixing rod; the connecting column is provided with a third through hole penetrating through the connecting column in the radial direction, and the connecting column penetrates through two adjacent first through holes and is arranged in the first annular structure; the position of the third through hole corresponds to the position of the second through hole; the first fixing rod penetrates through the third through hole;
the connecting column can rotate in the first through hole, so that the third through hole can swing in a reciprocating mode in the second through hole along the circumferential direction of the connecting column, and the first fixing rod is driven to swing in a reciprocating mode in the circumferential direction of the connecting column.
Preferably, the outer ring edge of the second annular structure comprises a plurality of first raised rims and a plurality of recessed rims; the first raised edge is raised in a direction away from the axis of the second annular structure; said recessed rim being recessed in a direction proximate to said second ring structure axis; the first convex edges and the concave edges are sequentially and alternately arranged along the edge of the outer ring;
the edge of the outer ring is in contact with the first fixing rod; the second annular structure is attached to the second annular side wall of the first annular structure, and the second annular structure can rotate relative to the first annular structure by taking the axis of the second annular structure as a rotating shaft; when the first annular structure rotates to the position that the concave edge is contacted with the first fixing rod, the first fixing rod is positioned in the concave edge and is parallel to the axis of the first annular structure, and the fixed object is fixed;
when the first annular structure rotates to the position that the first protruding edge is in contact with the first fixing rod, the first protruding edge pushes the first fixing rod to swing, so that an included angle larger than zero is formed between the first protruding edge and the axis of the first annular structure, and releasing and fixing of a fixed object are achieved.
Preferably, a fourth hole is formed in the second annular side wall of the first annular structure; the second annular structure is provided with an arc-shaped hole at a position corresponding to the fourth hole, the extending direction of the arc-shaped hole is along the circumferential direction of the second annular structure, and the rotating direction of the second annular structure relative to the first annular structure is the same as the rotating direction of the second annular structure relative to the first annular structure; and
the fixed structure further comprises a second fixed rod, the second fixed rod penetrates through the arc-shaped hole and is fixed in the fourth hole and used for connecting the first annular structure and the second annular structure, and when the second annular structure rotates relative to the first annular structure, the position of the second fixed rod in the arc-shaped hole changes correspondingly.
Preferably, the inner rings of the first annular structure and the second annular structure have the same size and shape and are correspondingly overlapped; and a second bulge edge is arranged on the inner ring edge of the third annular side wall of the first annular structure, the third annular side wall is opposite to and parallel to the second annular side wall, and the second bulge edge bulges towards the direction close to the axis of the first annular structure.
Preferably, the first through hole and the third through hole are both cylindrical, and the connecting column and the first fixing rod are both cylindrical.
Preferably, the edges of the first convex edge and the concave edge are both arc-shaped.
Preferably, the first fixing rod and the second fixing rod are both screws.
The invention also provides a rotary lifting device, which comprises a rotary lifting mechanism, a flange and the fixed structural part, wherein the fixed structural part is arranged on the flange and used for fixing, releasing and fixing the rotary lifting mechanism.
Preferably, a plurality of fifth through holes are formed in an end edge of the rotary lifting mechanism, which is used for being attached to the lower surface of the flange, which faces away from the bottom of the chamber, and the fifth through holes are not closed at the end edge;
the fifth through hole corresponds to the second through hole in position, and when the first fixing rod is parallel to the axis of the annular structural member, the first fixing rod penetrates through the second through hole and the fifth through hole so as to fix the rotary lifting mechanism; when the first fixing rod and the axis of the annular structural member form a set included angle larger than zero, the first fixing rod penetrates through the second through hole and is separated from the fifth through hole so as to release and fix the rotary lifting mechanism.
Preferably, the annular structural member is sleeved on the periphery of the edge of the flange, and the flange is embedded in an inner ring of the annular structural member;
the second protruding edge is attached to the upper surface, facing the bottom of the cavity, of the flange, so that the fixed structural part is hung on the flange.
The invention also provides semiconductor processing equipment which comprises a cavity, wherein the bottom of the cavity is provided with a tray, the semiconductor processing equipment also comprises the rotary lifting device, a flange of the rotary lifting device is fixed at the bottom of the cavity through a support rod, a rotary lifting mechanism of the rotary lifting device is fixed on the flange through a fixed structural part, and a shaft of the rotary lifting mechanism, which is used for driving the tray to rotate and lift, penetrates through an inner ring of the fixed structural part to enter the cavity and is in contact with the tray.
The invention has the beneficial effects that: the fixed structural part provided by the invention is arranged on the flange, so that when the rotary lifting mechanism is installed and disassembled, the rotary lifting mechanism can be well supported before the connecting piece releases and fixes the rotary lifting mechanism, the supporting time of the manual rotary lifting mechanism during installation and disassembly is shortened, the installation and disassembly difficulty of the rotary lifting mechanism is further reduced, and the damage risk of the rotary lifting mechanism to fragile articles during installation and disassembly is reduced.
By adopting the fixed structural part, the rotary lifting device provided by the invention shortens the mounting and dismounting time of the rotary lifting device, reduces the mounting and dismounting difficulty of the rotary lifting device and accelerates the mounting and dismounting speed of the rotary lifting device.
According to the semiconductor processing equipment provided by the invention, the rotary lifting device is adopted, so that the mounting and dismounting speed of the semiconductor processing equipment is increased, and the maintenance efficiency of the semiconductor processing equipment is improved.
Drawings
FIG. 1 is a schematic diagram of a prior art CVD reaction subsystem;
FIG. 2 is a schematic view of the end of a rotary lifting mechanism coupled to a rotary drop flange according to the prior art;
fig. 3 is a schematic structural view of a first ring structure in the fixed structural member in embodiment 1 of the present invention;
fig. 4 is a schematic structural view of a connecting column in a fixed structural member in embodiment 1 of the present invention;
fig. 5 is a schematic structural view of a fixing structure for fixing a rotary lifting mechanism in embodiment 1 of the present invention;
fig. 6 is a schematic structural view of a second loop structure in the fixed structural member in embodiment 1 of the present invention;
fig. 7 is a schematic structural view of the fixing structure releasing the fixing of the rotating elevating mechanism in embodiment 1 of the present invention;
FIG. 8 is a cross-sectional view of the fixed structure shown in FIG. 5 for fixing the rotary lifting mechanism;
FIG. 9 is a cross-sectional view of the fixed structure shown in FIG. 7 when the rotating lift mechanism is released from its fixed position;
fig. 10 is a structural cross-sectional view of a fixed structure hung on a flange at the bottom of a chamber to fix a rotating lifting mechanism in embodiment 2 of the present invention;
fig. 11 is a schematic structural view of an end portion of the rotary lifting mechanism connected to the flange in embodiment 2 of the present invention.
Wherein the reference numerals are:
1. a first annular structure; 11. a first annular sidewall; 12. a first through hole; 13. a second through hole; 14. a second annular sidewall; 15. a fourth aperture; 16. a third annular sidewall; 17. a second raised edge; 2. a second annular structure; 21. a first raised edge; 22. a recessed rim; 23. an arc-shaped hole; 3. a connecting member; 31. connecting columns; 32. a first fixing lever; 33. a third through hole; 34. a second fixing bar; 4. a chamber; 5. a flange; 6. a tray; 7. a rotary lifting mechanism; 71. a fifth through hole; 8. a screw; 9. a flange support bar; 10. a chamber housing; 18. a screw hole; 19. and fixing the structural part.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, a fixed structure, a rotary lifting device and a semiconductor processing apparatus according to the present invention will be described in further detail with reference to the accompanying drawings and detailed description.
Example 1
The present embodiment provides a fixing structural member, as shown in fig. 3 to 9, including a first annular structure 1, a second annular structure 2 and a connecting member 3, wherein the first annular structure 1 and the second annular structure 2 are attached to form an annular structural member; the connecting piece 3 activity sets up in first ring structure 1, and second ring structure 2 can rotate relative first ring structure 1 to promote connecting piece 3 and swing at certain angular range, fix or release fixedly to the realization by the fixed thing.
In this embodiment, the fixing structure is configured to be disposed on a flange 5 suspended at the bottom of the chamber 4 to fix or release and fix a rotary lifting mechanism 7 that drives the tray 6 to rotate and lift, wherein the connecting member 3 swings within a certain angle range to fix or release and fix the rotary lifting mechanism 7. This fixed structure spare can be through setting up on flange 5, when rotatory elevating system 7 installation and dismantlement, does not form fine bearing to rotatory elevating system 7 before rotatory elevating system 7 release is fixed at connecting piece 3 to the artificial support of rotatory elevating system 7 carries the time when having shortened the installation and having dismantled, and then has reduced the installation and the dismantlement degree of difficulty of rotatory elevating system 7, and reduced the damage risk of rotatory elevating system 7 to fragile article when installation and dismantlement.
In this embodiment, as shown in fig. 3, a plurality of first through holes 12 are formed on a first annular sidewall 11 of the first annular structure 1 parallel to the axis thereof; a second through hole 13 is formed between any two adjacent first through holes 12, and the second through hole 13 extends from the first annular side wall 11 to a second annular side wall 14, perpendicular to the axis, of the first annular structure 1. As shown in fig. 4 and 5, the connecting member 3 includes a connecting column 31 and a first fixing lever 32; a third through hole 33 penetrating through the connecting column 31 in the radial direction is formed in the connecting column 31, and the connecting column 31 penetrates through two adjacent first through holes 12 and is arranged in the first annular structure 1; and the position of the third through hole 33 corresponds to the position of the second through hole 13; the first fixing lever 32 penetrates the third through hole 33. The connecting column 31 can rotate in the first through hole 12, so that the third through hole 33 can swing back and forth in the second through hole 13 along the circumferential direction of the connecting column 31, and the first fixing rod 32 is driven to swing back and forth along the circumferential direction of the connecting column 31.
In the present embodiment, as shown in fig. 6, the outer ring edge of the second annular structure 2 comprises a plurality of first raised rims 21 and a plurality of recessed rims 22; the first bead 21 is convex away from the axis of the second annular structure 2; the recessed rim 22 is recessed towards the axis of the second annular structure 2; the first raised rims 21 and the recessed rims 22 are alternately arranged in sequence along the outer ring edge. As shown in fig. 7, the outer circumferential edge is in contact with the first fixing lever 32; the second annular structure 2 is attached to the second annular side wall 14 of the first annular structure 1, and the second annular structure 2 can rotate relative to the first annular structure 1 by taking the axis of the second annular structure as a rotating shaft; when the first ring-shaped structure 1 rotates until the recessed edge 22 contacts with the first fixing rod 32, the first fixing rod 32 is positioned in the recessed edge 22 and is parallel to the axis of the first ring-shaped structure 1, so as to realize the fixation of a fixed object (as shown in fig. 5 and 8); when the first ring structure 1 rotates until the first protruding edge 21 contacts with the first fixing rod 32, the first protruding edge 21 pushes the first fixing rod 32 to swing, so that an included angle greater than zero is formed between the first protruding edge and the axis of the first ring structure 1, and releasing and fixing of a fixed object is achieved (as shown in fig. 7 and 9).
In this embodiment, as shown in fig. 3 and fig. 6, a fourth hole 15 is formed on the second annular sidewall 14 of the first annular structure 1; the second annular structure 2 is provided with an arc-shaped hole 23 at a position corresponding to the fourth hole 15, and the extending direction of the arc-shaped hole 23 is along the circumferential direction of the second annular structure 2 and is the same as the rotating direction of the second annular structure 2 relative to the first annular structure 1. As shown in fig. 5 and 7, the fixing structure further includes a second fixing rod 34, the second fixing rod 34 passes through the arc-shaped hole 23 and is fixed in the fourth hole 15 for connecting the first ring structure 1 and the second ring structure 2, and when the second ring structure 2 rotates relative to the first ring structure 1, the position of the second fixing rod 34 in the arc-shaped hole 23 changes accordingly.
In the present embodiment, as shown in fig. 8-9, the inner rings of the first ring structure 1 and the second ring structure 2 have the same size and shape and are correspondingly overlapped; as shown in fig. 3, 5 and 7, a second raised edge 17 is provided on the inner annular edge of the third annular side wall 16 of the first annular structure 1, the third annular side wall 16 is opposite and parallel to the second annular side wall 14, and the second raised edge 17 is raised in a direction approaching the axis of the first annular structure 1.
The annular structural member is used for being sleeved on the periphery of the edge of the flange 5, and the flange 5 is embedded in an inner ring of the annular structural member. The second flange 17 is intended to engage the upper surface of the flange 5 facing the bottom of the chamber 4, so that the fixing structure is suspended from the flange 5.
The second raised edge 17 of the first annular structure 1 is arranged to enable the fixed structure to be hung on the flange 5, and since the flange 5 is hung at the bottom of the chamber 4, the flange rotates with the second annular structure 2 relative to the first annular structure 1, and when the first fixing rod 32 is located at the recessed edge 22 of the second annular structure 2, the first fixing rod 32 can fix the rotary lifting mechanism 7, so that the rotary lifting mechanism 7 is fixed on the flange 5; when the first fixing lever 32 is located at the first flange 21 of the second ring structure 2, the first fixing lever 32 is pushed away from its fixing position by the first flange 21, and at this time, the first fixing lever 32 releases the fixing of the rotary elevating mechanism 7. The whole fixing and releasing fixing process of the rotary lifting mechanism 7 is simple and quick, the supporting and carrying time of the rotary lifting mechanism 7 is greatly shortened, the mounting and dismounting difficulty of the rotary lifting mechanism 7 is further reduced, and the damage risk of the rotary lifting mechanism 7 to fragile objects during mounting and dismounting is reduced.
Preferably, in the present embodiment, the first through hole 12 and the third through hole 33 are both cylindrical, and the connecting column 31 and the first fixing rod 32 are both cylindrical. Wherein the connecting post 31 is freely rotatable about its axis in the first through hole 12. The first fixing rod 32 is a screw, the inner wall of the third through hole 33 is provided with a thread, and the first fixing rod 32 and the third through hole 33 are firmly connected through the screw and the thread.
Further preferably, the edges of the first raised edge 21 and the recessed edge 22 are both arc-shaped. The arrangement is such that when the second annular structure 2 rotates relative to the first annular structure 1, the first fixing rod 32 can smoothly move to the fixing position and release the fixing position along the arc-shaped edges of the first raised edge 21 and the recessed edge 22 under the pushing of the first raised edge 21, and the material loss caused by the relative sliding friction between the edges of the first raised edge 21 and the recessed edge 22 and the first fixing rod 32 is avoided.
In addition, in this embodiment, the second fixing rod 34 is also a screw, a thread is provided in the fourth hole 15 formed in the first ring structure 1, and the second fixing rod 34 and the fourth hole 15 are firmly connected by the screw and the thread. It should be noted that, when the second annular structure 2 needs to rotate relative to the first annular structure 1, the second fixing rod 34 needs to be unscrewed, so that the first annular structure 1 and the second annular structure 2 are not tightly buckled, at this time, the second annular structure 2 rotates relative to the first annular structure 1, and the second fixing rod 34 can change its position in the arc-shaped hole 23 to match the relative rotation between the second annular structure 2 and the first annular structure 1. When the second annular structure 2 is not rotated with respect to the first annular structure 1, the second fixing rod 34 can be tightened so as to achieve a tight snap-fit between the first annular structure 1 and the second annular structure 2.
Based on the above-mentioned structural arrangement of the fixed structural member, the specific operation process in the installation and removal process of the rotary lifting mechanism 7 is as follows:
when the rotary lifting mechanism 7 is installed on the flange 5, firstly, a fixed structural part is sleeved on the flange 5 and hung on the flange 5 through a second raised edge 17 arranged on the first annular structure 1; simultaneously aligning the fifth through hole 71 at the end of the rotary lifting mechanism 7 with the second through hole 13 on the first annular structure 1, and attaching the end of the rotary lifting mechanism 7 to the lower surface of the flange 5, which is opposite to the chamber 4; then, unscrewing the second fixing rod 34, rotating the second annular structure 2 with respect to the first annular structure 1 until the first fixing rod 32 is in the recessed edge 22 of the second annular structure 2; at this time, the first fixing rod 32 is parallel to the axis of the ring structure, and the first fixing rod 32 simultaneously penetrates the second through hole 13 of the first ring structure 1 and the fifth through hole 71 of the end of the rotary lifting mechanism 7, thereby firmly fixing the rotary lifting mechanism 7 to the flange 5. At this time, the second fixing rod 34 is tightened, and the tray 6 is driven by the rotary lifting mechanism 7 to perform normal rotary lifting movement.
When the rotary lifting mechanism 7 is detached from the flange 5, first, the second fixing lever 34 is unscrewed; then, the second annular structure 2 is rotated so as to rotate with respect to the first annular structure 1; in the process, the first fixing rod 32 moves along the outer ring edge position of the second annular structure 2, i.e. the first fixing rod 32 starts to slide out of the concave edge 22 of the second annular structure 2 and slides towards the first convex edge 21; under the pushing of the first raised edge 21, the first fixing rod 32 moves along the extending direction of the second through hole 13 at the same time, so that the first fixing rod 32 forms an included angle larger than zero with the axis of the annular structural member; when the included angle reaches the set included angle, the first fixing lever 32 is disengaged from the fifth through hole 71 in the rotary lifting mechanism 7, thereby releasing the fixing of the rotary lifting mechanism 7; at this time, the rotary elevating mechanism 7 can be removed from the flange 5, and the detachment thereof is realized.
Compared with the mode that the rotary lifting mechanism 7 and the rotary hoisting flange are fixed and released and fixed by screws in the prior art, the rotary lifting mechanism 7 is fixed in an auxiliary manner by the aid of the fixed structural part in the embodiment, the rotary lifting mechanism 7 does not need to be pushed against the rotary lifting mechanism 7 in a long time during disassembly and assembly, and the rotary lifting mechanism 7 can be rapidly assembled and disassembled only by rotating the second annular structure 2; therefore, the supporting and carrying time of the rotating lifting mechanism 7 is greatly shortened during installation and disassembly, the difficulty in installation and disassembly of the rotating lifting mechanism 7 is further reduced, and the risk of damage to fragile articles during installation and disassembly of the rotating lifting mechanism 7 is reduced.
Beneficial effects of example 1: the fixed structure that provides in embodiment 1 through setting up on the flange, can be when rotatory elevating system installs and dismantles, does not form fine bearing to rotatory elevating system before the release of connecting piece to rotatory elevating system is fixed to shorten the artificial support of rotatory elevating system carries the time when installing and dismantling, and then has reduced the installation and the dismantlement degree of difficulty of rotatory elevating system, and reduced the damage risk of rotatory elevating system to fragile article when installation and dismantlement.
Example 2
The present embodiment provides a rotary lifting device, as shown in fig. 10 and 11, including a rotary lifting mechanism 7 and a flange 5, and further including a fixing structural member 19 in embodiment 1, where the fixing structural member 19 is provided on the flange 5, and is used for fixing and releasing the fixing of the rotary lifting mechanism 7.
As shown in fig. 11, a plurality of fifth through holes 71 are formed in the edge of the end portion of the rotary lifting mechanism 7, which is used for being attached to the lower surface of the flange 5, which faces away from the bottom of the chamber 4, and the fifth through holes 71 are not closed at the edge of the end portion; the fifth through hole 71 corresponds to the position of the second through hole 13, and when the first fixing rod 32 is parallel to the axis of the annular structural member, it penetrates through the second through hole 13 and the fifth through hole 71 to fix the rotary elevating mechanism 7. When the first fixing rod 32 forms a set angle larger than zero with the axis of the annular structural member, it penetrates through the second through hole 13 and is separated from the fifth through hole 71, so as to release the fixation to the rotary lifting mechanism 7. The fifth through hole 71 of the rotary lifting mechanism 7 is provided to facilitate the first fixing rod 32 to fix and release the first fixing rod.
In this embodiment, the annular structural member is sleeved on the periphery of the edge of the flange 5, and the flange 5 is embedded in the inner ring of the annular structural member; the second flange 17 engages the upper surface of the flange 5 facing the bottom of the chamber 4, so that the fixing structure 19 is suspended from the flange 5.
By adopting the fixing structural member in the embodiment 1, the mounting and dismounting time of the rotary lifting device is shortened, the mounting and dismounting difficulty of the rotary lifting device is reduced, and the mounting and dismounting speed of the rotary lifting device is accelerated.
Example 3
The embodiment provides a semiconductor processing device, including the cavity, the bottom of cavity is provided with the tray, still includes the rotatory elevating gear in embodiment 2, and rotatory elevating gear's flange passes through the bracing piece to be fixed in the bottom of cavity, and rotatory elevating gear's rotatory elevating gear passes through fixed structure to be fixed on the flange, and the inner ring that is used for driving the rotatory lift of tray of rotatory elevating gear passes fixed structure gets into the cavity to contact with the tray.
By adopting the rotary lifting device in embodiment 2, the mounting and dismounting speed of the semiconductor processing apparatus is increased, thereby improving the maintenance efficiency of the semiconductor processing apparatus.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (11)
1. A fixed structure, comprising a first annular structure, a second annular structure and a connector, wherein,
the first annular structure and the second annular structure are attached to form an annular structural part;
the connecting piece is movably arranged in the first annular structure;
the second annular structure can rotate relative to the first annular structure to push the connecting piece to swing within a certain angle range so as to fix or release a fixed object;
a plurality of first through holes are formed in a first annular side wall, parallel to the axis, of the first annular structure;
a second through hole is formed between any two adjacent first through holes, and the second through hole extends from the first annular side wall to a second annular side wall, perpendicular to the axis of the first annular structure, of the first annular structure;
the connecting piece comprises a connecting column and a first fixing rod;
the connecting column is provided with a third through hole penetrating through the connecting column in the radial direction, and the connecting column penetrates through two adjacent first through holes and is arranged in the first annular structure;
the position of the third through hole corresponds to the position of the second through hole;
the first fixing rod penetrates through the third through hole;
the connecting column can rotate in the first through hole, so that the third through hole can swing in a reciprocating mode in the second through hole along the circumferential direction of the connecting column, and the first fixing rod is driven to swing in a reciprocating mode in the circumferential direction of the connecting column.
2. The fixation structure as claimed in claim 1, wherein the outer ring edge of the second annular structure comprises a plurality of first raised rims and a plurality of recessed rims;
the first raised edge is raised in a direction away from the axis of the second annular structure;
said recessed rim being recessed in a direction proximate to said second ring structure axis;
the first convex edges and the concave edges are sequentially and alternately arranged along the edge of the outer ring;
the edge of the outer ring is in contact with the first fixing rod; wherein the content of the first and second substances,
the second annular structure is attached to the second annular side wall of the first annular structure, and the second annular structure can rotate relative to the first annular structure by taking the axis of the second annular structure as a rotating shaft;
when the first annular structure rotates to the position that the concave edge is contacted with the first fixing rod, the first fixing rod is positioned in the concave edge and is parallel to the axis of the first annular structure, and the fixed object is fixed;
when the first annular structure rotates to the position that the first protruding edge is in contact with the first fixing rod, the first protruding edge pushes the first fixing rod to swing, so that an included angle larger than zero is formed between the first protruding edge and the axis of the first annular structure, and releasing and fixing of a fixed object are achieved.
3. The fixed structure of claim 2, wherein a fourth hole is formed in the second annular sidewall of the first annular structure;
the second annular structure is provided with an arc-shaped hole at a position corresponding to the fourth hole, the extending direction of the arc-shaped hole is along the circumferential direction of the second annular structure, and the rotating direction of the second annular structure relative to the first annular structure is the same as the rotating direction of the second annular structure relative to the first annular structure; and
the fixed structure further comprises a second fixed rod, the second fixed rod penetrates through the arc-shaped hole and is fixed in the fourth hole and used for connecting the first annular structure and the second annular structure, and when the second annular structure rotates relative to the first annular structure, the position of the second fixed rod in the arc-shaped hole changes correspondingly.
4. The fixed structure of claim 1, wherein the inner rings of the first and second ring structures are the same size and shape and are correspondingly coincident;
and a second bulge edge is arranged on the inner ring edge of the third annular side wall of the first annular structure, the third annular side wall is opposite to and parallel to the second annular side wall, and the second bulge edge bulges towards the direction close to the axis of the first annular structure.
5. The fixation structure as claimed in claim 1, wherein the first and third through holes are both cylindrical in shape, and the connection column and the first fixation rod are both cylindrical in shape.
6. The fixation structure as claimed in claim 2, wherein the edges of the first raised rim and the recessed rim are each arcuate.
7. The fixation structure as claimed in claim 3, wherein the first and second fixation bars are each a screw.
8. A rotary lifting device comprising a rotary lifting mechanism and a flange, characterized by further comprising a fixing structure according to any one of claims 1 to 7, the fixing structure being provided on the flange for fixing and releasing the fixing of the rotary lifting mechanism.
9. The rotary lifting device according to claim 8, wherein a plurality of fifth through holes are formed in an end edge of the rotary lifting mechanism for fitting with a lower surface of the flange facing away from the bottom of the chamber, and the fifth through holes are not closed at the end edge;
the fifth through hole corresponds to the second through hole in position, and when the first fixing rod is parallel to the axis of the annular structural member, the first fixing rod penetrates through the second through hole and the fifth through hole so as to fix the rotary lifting mechanism; when the first fixing rod and the axis of the annular structural member form a set included angle larger than zero, the first fixing rod penetrates through the second through hole and is separated from the fifth through hole so as to release and fix the rotary lifting mechanism.
10. A rotary lifting device according to claim 9, wherein when the fixed structure is the fixed structure of claim 4,
the annular structural part is sleeved on the periphery of the edge of the flange, and the flange is embedded in an inner ring of the annular structural part;
the second protruding edge is attached to the upper surface, facing the bottom of the cavity, of the flange, so that the fixed structural part is hung on the flange.
11. A semiconductor processing apparatus comprising a chamber provided with a tray at a bottom thereof, characterized by further comprising the rotary elevating device according to any one of claims 8 to 10,
the flange of the rotary lifting device is fixed at the bottom of the cavity through a supporting rod, the rotary lifting mechanism of the rotary lifting device is fixed on the flange through a fixed structural part, and a shaft of the rotary lifting mechanism, which is used for driving the tray to rotate and lift, penetrates through an inner ring of the fixed structural part to enter the cavity and is in contact with the tray.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201710252593.4A CN108728826B (en) | 2017-04-18 | 2017-04-18 | Fixed structure, rotary lifting device and semiconductor processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710252593.4A CN108728826B (en) | 2017-04-18 | 2017-04-18 | Fixed structure, rotary lifting device and semiconductor processing equipment |
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| Publication Number | Publication Date |
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| CN108728826A CN108728826A (en) | 2018-11-02 |
| CN108728826B true CN108728826B (en) | 2020-07-17 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201562059U (en) * | 2009-11-20 | 2010-08-25 | 深圳市大族激光科技股份有限公司 | Clamping fixing device and optical fiber clamping fixing device |
| CN102878217A (en) * | 2012-10-15 | 2013-01-16 | 浙江恒友机电有限公司 | Rapid clamping structure |
| CN105990209A (en) * | 2015-02-02 | 2016-10-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Clamping device and semiconductor processing device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016048323A (en) * | 2014-08-28 | 2016-04-07 | キヤノン株式会社 | Fixation rotor and fixation device |
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2017
- 2017-04-18 CN CN201710252593.4A patent/CN108728826B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201562059U (en) * | 2009-11-20 | 2010-08-25 | 深圳市大族激光科技股份有限公司 | Clamping fixing device and optical fiber clamping fixing device |
| CN102878217A (en) * | 2012-10-15 | 2013-01-16 | 浙江恒友机电有限公司 | Rapid clamping structure |
| CN105990209A (en) * | 2015-02-02 | 2016-10-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Clamping device and semiconductor processing device |
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