CN108666202B - A kind of microwave plasma device of non-rotating - Google Patents

A kind of microwave plasma device of non-rotating Download PDF

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Publication number
CN108666202B
CN108666202B CN201810462778.2A CN201810462778A CN108666202B CN 108666202 B CN108666202 B CN 108666202B CN 201810462778 A CN201810462778 A CN 201810462778A CN 108666202 B CN108666202 B CN 108666202B
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China
Prior art keywords
light bulb
microwave
cavity
shape
plasma device
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CN201810462778.2A
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CN108666202A (en
Inventor
阮存军
刘静
戴军
孔德胤
李仁杰
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Beijing University of Aeronautics and Astronautics
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Beijing University of Aeronautics and Astronautics
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/30Vessels; Containers
    • H01J61/302Vessels; Containers characterised by the material of the vessel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/52Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Abstract

The embodiment of the present invention provides a kind of microwave plasma device of non-rotating, and microwave cavity is hollow cavity, and light bulb is set in cavity;Light bulb is made of setting material, sets material as to the transparent high temperature of microwave and light, high conductivity material.The shape of light bulb is determined by the shape of microwave cavity, and when the shape of resonant cavity is cylinder, the shape of light bulb is ellipse or combination shape.The embodiment of the present invention, since light bulb is made of setting material, so that microwave plasma device does not need to radiate by rotating light bulb in the operating condition, while improving safety, the motor for driving light bulb to rotate is also eliminated, the composition component of microwave plasma device is simplified.And, the shape of light bulb can be determined according to the field distribution situation in different shape microwave cavity, match the bulb-shaped electrical field shape in resonant cavity, to increase the electric field strength of light bulb present position, biggish electric field strength improves the launching efficiency of plasma.

Description

A kind of microwave plasma device of non-rotating
Technical field
The present embodiments relate to lighting areas, more particularly, to a kind of microwave plasma device of non-rotating.
Background technique
Microwave plasma device is a kind of efficient Non-polarized lamp, can generate the very wide high-luminance light of spectrum.Wherein Without filament, electrodeless light bulb there is technical advantages, the luminous fluxes such as light efficiency strong, low energy consumption, long service life can almost hold it With perseverance, also, entire life span is basically no attenuation.But the quartz ball in microwave plasma lamp steeps extreme temperatures, needs Using motor to drive quartz ball bubble, quickly otherwise rotation is easy high temperature and bursts, safety is difficult to ensure to radiate in time.
Summary of the invention
To solve the above-mentioned problems, the embodiment of the present invention provides one kind and overcomes the above problem or at least be partially solved State the microwave plasma device of problem.
The embodiment of the present invention provides a kind of microwave plasma device, comprising: light bulb, support column and microwave cavity;It is micro- Wave resonance chamber is hollow cavity, and the light bulb is set in the cavity;The upper end of the support column and the lower end of light bulb are solid Fixed connection, the lower end of the support column is fixedly connected with the bottom surface of microwave cavity;The light bulb is made of setting material, described Material is set as to the transparent high temperature of microwave and light, high conductivity material.
Preferably, the material that sets is sapphire material.
Preferably, the shape of the light bulb is determined by the shape of the microwave cavity.
Preferably, the cross section of the microwave cavity is circle, and correspondingly, the longitudinal section of the light bulb is ellipse.
Preferably, the cross section of the microwave cavity is circle, and correspondingly, the longitudinal section of the light bulb is combination shape; The combination shape includes rectangle, the first semicircle and the second semicircle, the top of the rectangle and the first semicircular diameter weight It closes, the following of the rectangle is overlapped with the second semicircular diameter, and the rectangle is connected to the first semicircle and the second semicircle.
Preferably, microwave plasma device further includes waveguide;The bottom of the microwave cavity is provided with coupling aperture, institute Waveguide is stated to connect by coupling aperture with microwave cavity.
Preferably, the waveguide is internally provided with magnetron probe.
The microwave plasma device of non-rotating provided in an embodiment of the present invention, including light bulb, support column and microwave are humorous Shake chamber;Microwave cavity is hollow cavity, and light bulb is set in cavity;The fixed company in the upper end of support column and the lower end of light bulb It connects, the lower end of support column is fixedly connected with the bottom surface of microwave cavity;Light bulb is made of setting material, sets material as to microwave Transparent high temperature, high conductivity material with light.Since light bulb is made of setting material, so that microwave plasma device is in work Make not needing to radiate by rotating light bulb under state, while improving safety, also eliminate for driving light bulb to revolve The motor turned, simplifies the composition component of microwave plasma device, and reduce the power consumption in operational process.
It should be understood that above general description and following detailed description be it is exemplary and explanatory, can not Limit the embodiment of the present invention.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root Other attached drawings are obtained according to these attached drawings.
Fig. 1 is a kind of structural schematic diagram of microwave plasma device of the embodiment of the present invention;
Fig. 2 is a kind of schematic illustration of microwave plasma device of the embodiment of the present invention.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the embodiment of the present invention is described in further detail.With Lower embodiment is not limited to the range of the embodiment of the present invention for illustrating the embodiment of the present invention.
In the description of the embodiment of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", The orientation or positional relationship of the instructions such as "vertical", "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, It is merely for convenience of the description embodiment of the present invention and simplifies description, rather than the device or element of indication or suggestion meaning must have There is specific orientation, be constructed and operated in a specific orientation, therefore should not be understood as the limitation to the embodiment of the present invention.In addition, Term " first ", " second ", " third " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the embodiment of the present invention, it should be noted that unless otherwise clearly defined and limited, term " peace Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection;It can be mechanical connection, be also possible to be electrically connected;Can be directly connected, can also indirectly connected through an intermediary, It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition The concrete meaning of language in embodiments of the present invention.
Microwave plasma device generally comprises the quartz ball bubble of a size about 30mm, and quartz ball bubble is quartz material Manufactured globular bulb.Contain argon gas and other fillers in quartz ball bubble, for generating the light of different-waveband.Quartz ball bubble It is placed in a microwave cavity.To microwave cavity apply electric field when, electric field can ionize ball bubble in argon gas, excitation etc. from Daughter.And since sulphur can be chemically reacted with metal electrode, so quartz ball bubble can not use traditional electroded structure. When microwave excited plasma, the extreme temperatures of quartz ball bubble.For said circumstances, the embodiment of the present invention provides a kind of microwave Plasma device.Referring to Fig. 1, comprising:
Light bulb 2, support column 6 and microwave cavity 1;Microwave cavity 1 is hollow cavity, and light bulb 2 is set in cavity; The upper end of support column 6 is fixedly connected with the lower end of light bulb 2, and the lower end of support column 6 is fixedly connected with the bottom surface of microwave cavity 1; Light bulb 2 is made of setting material, and the material that sets is to the transparent high temperature of microwave and light, high conductivity material.
Due to setting material as high conductivity material, setting material does not include quartz.Since the height of setting material is led It is hot, so that setting material has better heat-resisting quantity relative to quartz material, therefore in the work of microwave plasma device When making state, light bulb 2 made of sapphire material is not needed by rotation heat dissipation as being steeped quartz ball, so as to cancel use In the motor of driving quartz ball bubble rotation, directly light bulb 2 is fixed in microwave cavity 1 by support column 6.
Microwave plasma device provided in an embodiment of the present invention, including light bulb, support column and microwave cavity;Microwave is humorous Vibration chamber is hollow cavity, and light bulb is set in cavity;The upper end of support column is fixedly connected with the lower end of light bulb, under support column End is fixedly connected with the bottom surface of microwave cavity;Light bulb is made of setting material, sets material to be transparent to microwave and light High temperature, high conductivity material.Since light bulb is made of setting material, so that microwave plasma device is not required in the operating condition It to be radiated by rotating light bulb, while improving safety, also eliminate the motor for driving light bulb to rotate, simplify The composition component of microwave plasma device, and reduce the power consumption in operational process.
Content based on the above embodiment sets material as sapphire material as a kind of alternative embodiment.Sapphire material Material has good thermal characteristics, fabulous electrical characteristic and dielectric property, and anti-chemical corrosion.Sapphire material also has resistance to High temperature, it is thermally conductive it is good, hardness is high, infrared and chemical stability good feature thoroughly.
Since the operation of microwave plasma device is by applying electric field to microwave cavity, electric field ionization is located at microwave Argon gas in resonant cavity in light bulb, to excite plasma.Therefore, in order to improve the launching efficiency of plasma, based on upper The content for stating embodiment, as a kind of alternative embodiment, the shape of light bulb is determined by the shape of microwave cavity.Due to having When the microwave cavity of different shape cavity applies electric field, the distribution situation of electric field is determined by the shape of microwave cavity.And it is micro- Wave resonance chamber may include the various shapes such as cylindrical body, cube, therefore can be according to the electric field in different shape microwave cavity Distribution situation rationally determines the shape of light bulb, matches the bulb-shaped electrical field shape in resonant cavity, to increase light bulb The electric field strength of present position, biggish electric field strength can be improved the launching efficiency of plasma.
When the cross section of microwave cavity is round, resonant cavity generally cylindrical body.For the microwave resonance to cylindrical body Chamber selects suitable bulb-shaped, content based on the above embodiment, as a kind of alternative embodiment, microwave cavity it is transversal Face is circle, and correspondingly, the longitudinal section of light bulb is ellipse.When the cross section of microwave cavity is round, the electric field of excitation It is distributed as elliposoidal.Therefore, in order to match the shape of light bulb with field distribution, light bulb equally may be configured as elliposoidal.Lamp The size of the ellipse of the longitudinal section of bubble specifically can precisely be determined by measuring field distribution situation.
Content based on the above embodiment, as a kind of alternative embodiment, the cross section of microwave cavity is circle, accordingly Ground, the longitudinal section of light bulb are combination shape;Combination shape includes rectangle, first semicircle and second is semicircle, the top of rectangle and the One semicircular diameter is overlapped, and the following of rectangle is overlapped with the second semicircular diameter, rectangle and the first semicircle and the second half Circle connection.Said combination shape can be found in the light bulb 2 in Fig. 1, as shown in Figure 1, rectangle and first semicircle and the second semicircle Connection refer to light bulb as a whole, inside be connection, do not separated by the top of rectangle and below, by group It closes shape and is divided into rectangle and the semicircle interface shape only for illustrating light bulb.Light bulb is made of sapphire material, due to sapphire Light bulb is made said combination shape with workability, meets production requirement by the particularity of material processing.
Content based on the above embodiment, as a kind of alternative embodiment, microwave plasma device further includes waveguide 4; The bottom of microwave cavity 1 is provided with coupling aperture 3, and waveguide 4 is connect by coupling aperture 3 with microwave cavity 1.Based on above-mentioned implementation The content of example, as a kind of alternative embodiment, waveguide 4 is internally provided with magnetron probe 5.Referring to fig. 2, microwave source (i.e. magnetic control Pipe probe) make the microwaves of 5 transmitting certain frequencies of magnetron probe, such as 2.45GHz.Microwave is coupled by waveguide 4 and coupling aperture 3 Into microwave cavity 1, so that the electric field strength of 2 present position of light bulb is reached maximum, to excite plasma, generate continuous light Spectrum realizes illumination.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations;Although Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features; And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and Range.

Claims (4)

1. a kind of microwave plasma device, which is characterized in that including light bulb, support column and microwave cavity;Microwave cavity For hollow cavity, the light bulb is set in the cavity;The upper end of the support column is fixedly connected with the lower end of light bulb, institute The lower end for stating support column is fixedly connected with the bottom surface of microwave cavity;The light bulb is made of setting material, the setting material For to the transparent high temperature of microwave and light, high conductivity material;
Wherein, the material that sets is sapphire material;
Wherein, the shape of the light bulb is determined by the shape of the microwave cavity;
The cross section of the microwave cavity is round, the microwave cavity generally cylindrical body, correspondingly, the light bulb Longitudinal section is combination shape;
The combination shape includes rectangle, first semicircle and the second semicircle, and the top of the rectangle is semicircular straight with first Diameter is overlapped, and the following of the rectangle is overlapped with the second semicircular diameter, the rectangle and first semicircle and the second semicircle Connection.
2. microwave plasma device according to claim 1, which is characterized in that the cross section of the microwave cavity is Circle, the microwave cavity generally cylindrical body, correspondingly, the longitudinal section of the light bulb are ellipse.
3. microwave plasma device according to claim 1, which is characterized in that further include waveguide;The microwave resonance The bottom of chamber is provided with coupling aperture, and the waveguide is connect by coupling aperture with microwave cavity.
4. microwave plasma device according to claim 3, which is characterized in that the waveguide is internally provided with magnetron Probe.
CN201810462778.2A 2018-05-15 2018-05-15 A kind of microwave plasma device of non-rotating Active CN108666202B (en)

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CN108666202B true CN108666202B (en) 2019-12-03

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Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5864210A (en) * 1995-08-24 1999-01-26 Matsushita Electric Industrial Co., Ltd. Electrodeless hid lamp and electrodeless hid lamp system using the same
CN1222248A (en) * 1996-05-31 1999-07-07 熔化照明股份有限公司 Multiple reflection electrodeless lamp with sulfur or sellenium filland method for providing radiation using such a lamp
JP2003249197A (en) * 2002-02-25 2003-09-05 Matsushita Electric Works Ltd Microwave electrodeless discharge lamp lighting device
JP2005259594A (en) * 2004-03-12 2005-09-22 Matsushita Electric Ind Co Ltd Electrodeless lamp device
CN1917138A (en) * 2005-08-18 2007-02-21 乐金电子(天津)电器有限公司 Microwave sulfur lamp with rised energy coupled field intensity
EP2721631B1 (en) * 2011-06-15 2016-08-24 Lumartix S.A. Electrodeless lamp
CN204216007U (en) * 2014-10-28 2015-03-18 李碧霞 Microwave excitation ultraviolet sulphur lamp
CN205069584U (en) * 2015-08-19 2016-03-02 常州玉宇电光器件有限公司 Microwave sulphur lamp bulb

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