summary of the inventionthe object of this invention is to provide a kind of microwave cylindrical coaxial cavity resonator plasma lamp, to solve prior art ceramic resonance cavity configuration complex process and the larger problem of dielectric loss.
In order to achieve the above object, the technical solution adopted in the present invention is:
Microwave cylindrical coaxial cavity resonator plasma lamp, it is characterized in that: include rosette base, resonant cavity outer conductor, circular metal shrouding disc, described resonant cavity outer conductor is the hollow cylindrical configuration that conductive metallic material is made, resonant cavity outer conductor is coaxially arranged on rosette base, resonant cavity outer conductor is closed by rosette base tube port position bottom resonant cavity outer conductor, described circular metal shrouding disc covers at resonant cavity outer conductor top tube port position, resonant cavity outer conductor is closed at resonant cavity outer conductor top tube port position by circular metal shrouding disc, inner wire is coaxially arranged with in resonant cavity outer conductor, inner wire bottom is closely vertically connected on rosette base, the short circuit syndeton between inner wire and resonant cavity outer conductor is formed by rosette base, described circular metal shrouding disc center has through hole, and inner wire top is stretched in circular metal shrouding disc central through hole, described inner wire top is provided with hemispherical groove, electrodeless cylindrical bulb is installed in hemispherical groove, and electrodeless cylindrical bulb exposes from circular metal shrouding disc, also comprise round ceramic ring, round ceramic ring is made up of the less epimere of external diameter and the larger hypomere of external diameter, and round ceramic ring epimere external diameter and circular metal shrouding disc central through hole diameter matches, vertical cavity is provided with in round ceramic ring, cavity diameter mates with inner conductor outer diameter, cavity top is set to reducing at round ceramic top surface of ring, the bore of reducing mates with electrodeless cylindrical bulb external diameter, the height of the hypomere of round ceramic ring is much smaller than the height of resonant cavity outer conductor cavity, round ceramic ring hypomere side has the blind hole of non-through round ceramic ring, described round ceramic ring is assemblied in inner wire top by cavity, round ceramic ring epimere to stretch in circular metal shrouding disc central through hole and exposes circular metal shrouding disc central through hole, and the reducing of round ceramic top surface of ring is enclosed within electrodeless cylindrical bulb, described resonant cavity outer conductor upper side is provided with square planar, coupling throughhole is had in the middle of square planar, square planar is provided with flange, the round tube hole with coupling throughhole coaxial communication is had in the middle of flange, coaxial type probe is inserted with in described flange round tube hole, and coaxial type probe to stretch in resonant cavity outer conductor and inserts in the blind hole of round ceramic ring side.
Described microwave cylindrical coaxial cavity resonator plasma lamp, is characterized in that: described rosette base, resonant cavity outer conductor material selection high conductivity metal material, can aluminium, or aluminium alloy, or copper, wherein preferred aluminium alloy.
Described microwave cylindrical coaxial cavity resonator plasma lamp, is characterized in that: described inner wire can be solid construction, or is hollow structure, or is the inner hollow structure being filled with high thermal conductivity material.
Described microwave cylindrical coaxial cavity resonator plasma lamp, is characterized in that: described round ceramic ring selects high heat conductance insulating material, can select aluminium oxide, or beryllium oxide, or zirconia, wherein preferential oxidation aluminium.
Described microwave cylindrical coaxial cavity resonator plasma lamp, it is characterized in that: the described electrodeless upper and lower two ends of column type bulb are hemispherical hollow structure, centre is cylindrical hollow configuration, electrodeless column type bulb bubble wall adopts quartz glass or ceramic material, inside comprises argon gas and metal halide element, or comprises mercury element.
Described microwave cylindrical coaxial cavity resonator plasma lamp, it is characterized in that: described round ceramic ring is made up of the less epimere of external diameter and the larger hypomere of external diameter, round ceramic ring hypomere external diameter mates with resonant cavity outer conductor intracavity diameter, or be less than resonant cavity outer conductor intracavity diameter, round ceramic ring hypomere height mates with resonant cavity outer conductor cavity heights, round ceramic ring epimere external diameter and circular metal shrouding disc central through hole diameter matches, round ceramic ring epimere height and circular metal shrouding disc central through hole matched, vertical cavity is provided with in round ceramic ring, cavity diameter mates with inner conductor outer diameter, round ceramic ring upper side has the blind hole of non-through round ceramic ring, described round ceramic ring by its cavity suit in the conductor, the bottom surface of round ceramic ring hypomere contacts with rosette base, annular ceramic ring epimere to stretch in circular metal shrouding disc central through hole and fills up circular metal shrouding disc central through hole, described coaxial type probe directly inserts in the blind hole of round ceramic ring side through after resonant cavity outer conductor upper side coupling throughhole.
Benefit of the present invention is, Multi-beam klystron plasma source can greatly reduce the consumption of pottery, and without the need to ceramic metallization, technique is simple, alleviates the weight of plasma lamp.And, because chamber in-vivo medium is mainly air, substantially reduce the dielectric loss of cavity, be conducive to the luminous efficiency improving plasma lamp.Meanwhile, as improvement, cavity medium also can adopt ceramic material, thus strengthens heat radiation and the job stability of plasma lamp, compared to the prior art, can also reduce volume and reduce weight simultaneously, thus having larger flexibility.
The present invention can be applied to the resonant cavity of various microwave excited plasma lamp, realizes the gathering to microwave energy, produces higher electric field strength, thus makes bulb gas ionization, forms the plasma source of high brightness.
Embodiment
As Figure 1-Figure 4.Microwave cylindrical coaxial cavity resonator plasma lamp, include rosette base 2, resonant cavity outer conductor 1, circular metal shrouding disc 5, the hollow cylindrical configuration that resonant cavity outer conductor 1 is made for conductive metallic material, resonant cavity outer conductor 1 is coaxially arranged on rosette base 2, resonant cavity outer conductor 1 is closed by rosette base 2 tube port position bottom resonant cavity outer conductor 1, circular metal shrouding disc 5 covers at resonant cavity outer conductor 1 top tube port position, resonant cavity outer conductor 1 is closed at resonant cavity outer conductor 1 top tube port position by circular metal shrouding disc 5, inner wire 8 is coaxially arranged with in resonant cavity outer conductor 1, inner wire 8 bottom is closely vertically connected on rosette base 2, the short circuit syndeton between inner wire 8 and resonant cavity outer conductor 1 is formed by rosette base 2, circular metal shrouding disc 5 center has through hole, and inner wire 8 top is stretched in circular metal shrouding disc 5 central through hole, inner wire 8 top is provided with hemispherical groove, electrodeless cylindrical bulb 6 is installed in hemispherical groove, and electrodeless cylindrical bulb 6 exposes from circular metal shrouding disc 5, also comprise round ceramic ring 7, round ceramic ring 7 is made up of the less epimere of external diameter and the larger hypomere of external diameter, and round ceramic ring 7 epimere external diameter and circular metal shrouding disc 5 central through hole diameter matches, vertical cavity is provided with in round ceramic ring 7, cavity diameter mates with inner wire 8 external diameter, cavity top is set to reducing at round ceramic ring 7 end face, the bore of reducing mates with electrodeless cylindrical bulb 6 external diameter, the height of round ceramic ring 7 hypomere is much smaller than the height of resonant cavity outer conductor cavity, round ceramic ring 7 hypomere side has the blind hole of non-through round ceramic ring 7, round ceramic ring 7 is assemblied in inner wire 8 top by cavity, round ceramic ring 7 epimere to stretch in circular metal shrouding disc 5 central through hole and exposes circular metal shrouding disc 5 central through hole, and the reducing of round ceramic ring 7 end face is enclosed within electrodeless cylindrical bulb 6, resonant cavity outer conductor 1 upper side is provided with square planar, coupling throughhole is had in the middle of square planar, square planar is provided with flange 3, the round tube hole with coupling throughhole coaxial communication is had in the middle of flange 3, coaxial type probe 4 is inserted with in flange 3 round tube hole, and coaxial type probe 4 to stretch in resonant cavity outer conductor 1 and inserts in the blind hole of round ceramic ring 7 side.
Rosette base 2, resonant cavity outer conductor 1 material selection high conductivity metal material, can aluminium, or aluminium alloy, or copper, wherein preferred aluminium alloy.
Inner wire 8 can be solid construction, or is hollow structure, or is the inner hollow structure being filled with high thermal conductivity material.
Round ceramic ring 7 selects high heat conductance insulating material, can select aluminium oxide, or beryllium oxide, or zirconia, wherein preferential oxidation aluminium.
Electrodeless column type bulb about 6 two ends are hemispherical hollow structure, and centre is cylindrical hollow configuration, and electrodeless column type bulb 6 steeps wall and adopts quartz glass or ceramic material, and inside comprises argon gas and metal halide element, or comprises mercury element.
As shown in Figure 5, Figure 6.Round ceramic ring 7 is made up of the less epimere of external diameter and the larger hypomere of external diameter, round ceramic ring 7 hypomere external diameter mates with resonant cavity outer conductor 1 intracavity diameter, or be less than resonant cavity outer conductor 1 intracavity diameter, round ceramic ring 7 hypomere height mates with resonant cavity outer conductor 1 cavity heights, round ceramic ring 7 epimere external diameter and circular metal shrouding disc 5 central through hole diameter matches, round ceramic ring 7 epimere height and circular metal shrouding disc 5 central through hole matched, vertical cavity is provided with in round ceramic ring 7, cavity diameter mates with inner wire 8 external diameter, round ceramic ring 7 upper side has the blind hole of non-through round ceramic ring 7, round ceramic ring 7 is sleeved on inner wire 8 by its cavity, the bottom surface of round ceramic ring hypomere contacts with rosette base 2, annular ceramic ring 7 epimere to stretch in circular metal shrouding disc 5 central through hole and fills up circular metal shrouding disc 5 central through hole, coaxial type probe 4 directly inserts in the blind hole of round ceramic ring 7 side through after resonant cavity outer conductor 1 upper side coupling throughhole.
The invention provides a kind of Multi-beam klystron for plasma source, structure is simple, reduces the dielectric loss of cavity, effectively can improve the luminous efficiency of plasma lamp.Its microwave operational frequencies of the present invention can be the optional frequency scope between 100MHz-3GHz, and the microwave power of injection is between 50W to 1500W.
The contour structures of the coaxial resonant cavity plasma source of the embodiment of the present invention as shown in Figure 1, wherein realizes short circuit by rosette base 2 and inner wire bottom circular metal coaxial resonant cavity outer conductor 1 and is connected and closes.Microwave energy enters resonant cavity by the probe coupling of outer conductor side.The first half of resonant cavity outer conductor 1 has a square planar, and plane opens coupling aperture, and flat outer is connected by screw flange 3, has circular hole in the middle of flange.Insert coaxial type probe 4 by this flange circular hole and outer conductor coupling aperture, coaxial type probe 4 inserts intra resonant cavity.Circular metal shrouding disc 5 is had on resonant cavity outer conductor 1 top, realize being connected with resonant cavity outer conductor 1 by screw, have a circular hole in the middle of circular metal shrouding disc 5, the upper part of electrodeless cylindrical bulb 6 and round ceramic ring 7 exposes circular metal shrouding disc 5 through this circular hole.Fig. 2 is the profile front view of coaxial cavity plasma lamp of the present invention.
The first embodiment of the present invention, resonant cavity mainly adopts air dielectric, and to reach extremely low conductor losses, meanwhile, when adopting a small amount of ceramic material to make microwave excited plasma luminous, bulb realizes good heat radiation.As shown in Figure 3, rosette base 2 realizes good conduction with resonant cavity outer conductor 1 by helicitic texture and is connected, inner wire 8 also compact siro spinning technology vertical with rosette base 2.Wherein, inner wire can be solid construction, also can be hollow structure, or the high thermal conductivity materials such as pottery are filled in inside.One square planar is arranged at resonant cavity outer conductor 1 top, and open coupling aperture in the middle of plane, flat outer is connected by screw flange 3, has circular hole in the middle of flange.Coaxial type probe 4 is inserted by this flange circular hole and outer conductor coupling aperture.On inner wire top, have a hemispheric groove, put into electrodeless cylindrical bulb 6 in groove, electrodeless cylindrical bulb 6 is connected by the bonding fixing compact that realizes with inner wire groove.
Around the top of inner wire, have round ceramic ring 7, as shown in Figure 4, round ceramic ring 7 epimere outer diameter D 1 is less, and reducing interior diameter d1 is identical with electrodeless cylindrical bulb 6 external diameter; Hypomere overall diameter D2 is comparatively large, and be greater than top outer diameter D 1, cavity diameter d 2 is identical with inner wire diameter, and the height of hypomere is much smaller than the height of resonant cavity outer conductor cavity.During installation, round ceramic ring 7 hypomere internal diameter directly inserts inner wire top, and the epimere of round ceramic ring 7 to be tightly looped around bottom electrodeless cylindrical bulb 6 around.Round ceramic ring 7 can adopt aluminium oxide, beryllium oxide, zirconia or other ceramic material sinter or process, and preferentially selects alumina material, also can select other high heat conductance insulating material.The side of round ceramic ring 7 bottom has a blind hole, and during assembling, the inner wire of coaxial type probe 4 inserts intra resonant cavity, and front end puts in the blind hole of round ceramic ring 7 side, and keeps certain distance with resonant cavity inner wire 8.
Have circular metal shrouding disc 5 on coaxial cavity top, realize being connected by screw and coaxial cavity outer conductor, have a circular hole in the middle of circular metal shrouding disc 5, the upper part of electrodeless cylindrical bulb 6 and inner circular ceramic ring 7 exposes circular metal shrouding disc 5 through this circular hole.
As above electrodeless column type bulb 6, two ends are hemispherical hollow structure, and centre is cylindrical hollow configuration, and bubble wall adopts quartz glass or ceramic material to make, inside comprises argon gas and metal halide element, also can comprise mercury element so that the startup of lamp.
The second embodiment of the present invention, intra resonant cavity mainly adopts ceramic material as medium, utilize the feature of ceramic material high heat conductance, thus the heat-sinking capability of plasma lamp can be strengthened, reduce working temperature when bulb runs continuously, thus improve the stability of a system, in addition, greatly can also reduce the size of whole resonant cavity, reduce the volume and weight of whole plasma lamp.As shown in Figure 5, be that the structure of inner circular ceramic ring is different with the difference of the first embodiment, especially length is longer for this intra resonant cavity structure.As Fig. 5, in the present embodiment, round ceramic ring is cylindrical ceramic ring, and hypomere height is longer, identical with resonant cavity outer conductor 1 cavity heights, and the bottom surface of ceramic ring hypomere contacts with rosette base 2.Round ceramic ring structure as shown in Figure 6, ceramic ring top outer diameter D 1 is less than lower outer diameter D2, upper height h1 is much smaller than lower height h2, ceramic ring inner hollow, interior diameter d is identical with resonant cavity inner conductor outer diameter, ceramic ring lower height h2 is identical with resonant cavity outer conductor 1 cavity heights and mate, and ceramic ring lower outer diameter D2 is less than or equal to the intracavity diameter of outer conductor 1.There is a blind hole ceramic ring side, and coaxial type probe is directly put in this blind hole of ceramic ring by the circular hole of flange hole and outer conductor side.
During use, microwave energy is the feed-in of probe place from the side, through frequency-selecting and the energy storage of resonant cavity, microwave energy is assembled at bulb place, form higher electric field strength, can puncture gas ionization in bulb and produce plasma, because bulb major part exposes, the light that thus plasma resonance produces just can as the light source of high brightness.
According to method and structure of the present invention, devise two Coaxial resonators exemplarily.Adopt the structure of first embodiment, devise the air resonance chamber that resonance frequency is 440MHz, test result is consistent with theory calculate, demonstrates the feasibility in the technology of the present invention.In addition, adopt the structure of second embodiment, devise an aluminium oxide ceramics dielectric resonant chamber, resonance frequency is 230MHz, and length is only 85mm, substantially reduces size and the weight of cavity.