CN108655931A - Cutting apparatus - Google Patents

Cutting apparatus Download PDF

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Publication number
CN108655931A
CN108655931A CN201810251467.1A CN201810251467A CN108655931A CN 108655931 A CN108655931 A CN 108655931A CN 201810251467 A CN201810251467 A CN 201810251467A CN 108655931 A CN108655931 A CN 108655931A
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CN
China
Prior art keywords
cutting
cutting tool
unit
main shaft
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810251467.1A
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Chinese (zh)
Other versions
CN108655931B (en
Inventor
田中英明
宫田谕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN108655931A publication Critical patent/CN108655931A/en
Application granted granted Critical
Publication of CN108655931B publication Critical patent/CN108655931B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0076Other grinding machines or devices grinding machines comprising two or more grinding tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00Means for securing grinding wheels on rotary arbors
    • B24B45/006Quick mount and release means for disc-like wheels, e.g. on power tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00Arrangements for automatic control of a series of individual steps in grinding a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/04Protective covers for the grinding wheel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Dicing (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)

Abstract

Cutting apparatus is provided, the type for the cutting tool for being installed on main shaft will not be mistaken and cutting tool can be installed on main shaft.Cutting apparatus has:The first cutting unit with the cutter hood for being fixed on main shaft shell and the second cutting unit (20 1), (20 2);The chuck table (10) that machined object (201) is kept;And the control unit (100) including the tool-information register (101) registered comprising the kind to cutting tool.Cutter hood has the movable part that can be selectively positioned at approximated position and disengaged position.When being registered with the type of the first cutting tool, the movable part of the cutter hood of first cutting unit (20 1) is only set in disengaged position by control unit (100), when being registered with the type of the second cutting tool, the movable part of the cutter hood of the second cutting unit (20 2) is only set in disengaged position by control unit (100).

Description

Cutting apparatus
Technical field
The present invention relates to the cutting apparatus that machining is carried out to machined object.
Background technology
There is known the machined object progress using cutting tool to the various plates such as semiconductor wafer or resin-encapsulated substrate The cutting apparatus (scribing machine) of segmentation.There are two the cutting units being made of the main shaft of installation cutting tool using tool for cutting apparatus And the cutting apparatus for the biaxial type that two segmentation preset lines can be cut simultaneously.The cutting apparatus of the biaxial type is implemented with The cutting of effect.
The cutting apparatus of known biaxial type implements staged cutting, installs diverse cutting respectively on each main shaft Cutter, the cutting tool for being installed on a main shaft have thicker sword thick, are formed the positive metal of machined object or functional layer Half grooving of removal, the cutting tool for being installed on another main shaft have relatively thin sword thick, and the slot bottom of double of grooving is cut entirely It cuts and is divided into each chip (for example, referring to patent document 1 and patent document 2).
Patent document 1:No. 2892459 bulletins of Japanese Patent Publication No.
Patent document 2:Japanese Unexamined Patent Publication 2006-181700 bulletins
In the case where implementing staged cutting, when the cutting apparatus of biaxial type installs cutting for type mistake on each main shaft Cutting knife tool and when being processed, it is possible to cause chipping to become larger and the processing result of imagination made significantly to deteriorate.Therefore, it has studied not The method that the type for the cutting tool for being installed on main shaft can be mistaken and can cutting tool be installed on to main shaft.For example, it is contemplated that will It is installed on main shaft with the flange of cutting tool or the cutter container same color for storing cutting tool.In this case, when lasting When being processed, it is possible to flange can be cut bits pollution and become difficult to distinguish, or when the dispersion attention of operator, It is also possible to that the identification according to color can be ignored.
Invention content
The present invention is completed in view of the problem, and its purpose is to provide cutting apparatus, will not mistake and be installed on master The type of the cutting tool of axis and cutting tool can be installed on main shaft.
Realize that purpose, cutting apparatus of the invention have in order to solve the above problems:First cutting unit is being fixed on Clamping is equipped with the first cutting tool on the flange of the front end of first main shaft;Second cutting unit is being fixed on the second main shaft Front end flange on clamping the second cutting tool is installed;Chuck table is processed to what is processed by the cutting tool Object is kept;And control unit, the tool-information registered it includes the kind to the cutting tool to be mounted are stepped on Note portion, and each integral part is controlled, which is characterized in that, which has cutter hood, the cutter It is the main shaft shell rotated freely that cover, which is fixed on the main shaft supporting, covers the cutting tool and provides working fluid, the cutter hood Have:Fixed part, the fixed part are fixed on the main shaft shell;And movable part, the movable part are mounted to energy by nozzle for liquid is processed Enough to be opened and closed relative to the fixed part, which, which can be selectively positioned at, makes the processing nozzle for liquid close to the cutting tool Approximated position and the disengaged position that the cutting tool is detached and can loaded and unloaded for the flange with the cutting tool, will install this When the first cutting tool, if being registered with the kind of first cutting tool, the control unit is not by second cutting unit The movable part of the cutter hood be set in disengaged position, and the movable part of the cutter hood of first cutting unit is set in point It offs normal and sets, when to install second cutting tool, if being registered with the kind of second cutting tool, the control unit is not The movable part of the cutter hood of first cutting unit is set in disengaged position, and by the cutter hood of second cutting unit Movable part be set in disengaged position.
Can also be, in the cutting apparatus, have reading unit, the reading unit to be set to the cutting tool or The identification code for storing the kind information comprising the cutting tool on the container of the cutting tool is read out, in the tool-information The read kind information of the reading unit is registered in register.
Can also be that in the cutting apparatus, which has to the group comprising the cutting tool Yu the main shaft The processing conditions register that processing conditions including conjunction is registered, the control unit should according to the cutting tool registered The combination of kind and the main shaft determines that the movable part by the cutter hood is set in the cutting unit of disengaged position.
The cutting apparatus of the present application plays following effects:The type for the cutting tool for being installed on main shaft will not be mistaken and Cutting tool can be installed on main shaft.
Description of the drawings
Fig. 1 is the stereogram of the configuration example for the cutting apparatus for showing embodiment 1.
Fig. 2 is the stereogram of the main axle unit for the cutting unit for showing cutting apparatus shown in FIG. 1.
Fig. 3 is the stereogram of the main shaft and flange that show main axle unit shown in Fig. 2.
Fig. 4 is the stereogram of the main shaft and cutting tool that show main axle unit shown in Fig. 2.
Fig. 5 is the sectional view of the Y direction of main axle unit shown in Fig. 2.
Fig. 6 is the sectional view for the locked state of main shaft for showing main axle unit shown in fig. 5.
Fig. 7 is the front view of the cutting unit of cutting apparatus shown in FIG. 1.
Fig. 8 is to show that the movable part by the cutter hood of the cutting unit of cutting apparatus shown in Fig. 7 is positioned at disengaged position State front view.
Fig. 9 is the stereogram for showing the handling jig used when replacing the cutting tool of cutting apparatus shown in FIG. 1.
Figure 10 is the vertical view for showing the torsion screwdriver for making handling jig rotation shown in Fig. 9.
Figure 11 is the front view for showing to replace the state of the cutting tool of cutting apparatus shown in FIG. 1.
Figure 12 is the side view for showing to replace the state of the cutting tool of cutting apparatus shown in FIG. 1 in a manner of broken section Figure.
Figure 13 is to show that the decomposition when cutting tool by the replacement of cutting apparatus shown in FIG. 1 is accommodated in container is stood Body figure.
Figure 14 is the vertical view for the container that the cutting tool of the replacement to cutting apparatus shown in FIG. 1 is stored.
Figure 15 is the stereogram for the reading unit for showing cutting apparatus shown in FIG. 1.
Figure 16 is the functional flow diagram of the control unit of cutting apparatus shown in FIG. 1.
Figure 17 is the cutting tool of the cutting unit for the cutting apparatus for being shown mounted to embodiment 2 and the solid of container Figure.
Label declaration
1:Cutting apparatus;10:Chuck table;20:Cutting unit;20-1:First cutting unit;20-2:Second cutting Unit;21:Cutting tool;21-1:First cutting tool;21-2:Second cutting tool;22:Main shaft;22-1:First main shaft; 22-2:Second main shaft;23:Main shaft shell;29:Flange;30:Cutter hood;31:Fixed part;32:Movable part;60:Container;71:Item Shape code (identification code);80:Reading unit;100:Control unit;101:Tool-information register;102:Processing conditions register; 201:Machined object;321:Cut (operating) water nozzle (processing nozzle for liquid).
Specific implementation mode
Mode for carrying out the present invention (embodiment) is described in detail with reference to attached drawing.The present invention not by with Under embodiment record content limit.In addition, being easy to think comprising those skilled in the art in the inscape recorded below Content, substantially the same content arrived.In addition, the structure recorded below can be appropriately combined.Furthermore it is possible to not departing from this Various omissions, displacement or the change of structure are carried out in the range of the purport of invention.
[embodiment 1]
The cutting apparatus of embodiments of the present invention 1 is illustrated with reference to the accompanying drawings.Fig. 1 is to show cutting for embodiment 1 The stereogram of the configuration example of turning device.
The cutting apparatus 1 of embodiment 1 is the device that machining is carried out to machined object 201.In the embodiment 1, Machined object 201 is the disk-shaped semiconductor wafer or optical device wafer for base material with silicon, sapphire, gallium etc..Machined object 201 are formed with device on front 202 in the region of the 203 clathrate division of a plurality of segmentation preset lines by clathrate formation 204.The machined object 201 of the present invention can be central portion thinning and be formed with the so-called TAIKO chips of thick wall portion in peripheral part, Other than chip, machined object 201 can also be rectangular-shaped package substrate, pottery with multiple devices being sealed by resin Porcelain plate, glass plate etc..The splicing tape 206 as guard block is pasted on the back side of machined object 201 205.In splicing tape 206 periphery is equipped with ring-shaped frame 207.
Cutting apparatus 1 shown in FIG. 1 is to machined object 201 keep using chuck table 10 and utilize bite The device that 21 (shown in Fig. 2) of tool cut machined object 201 along segmentation preset lines 203.As shown in Figure 1, cutting apparatus 1 Have:Chuck table 10 has the retaining surface 11 that attracting holding is carried out to machined object 201;Cutting unit 20 utilizes The machined object 201 that the cutting tool 21 of main shaft 22 (shown in Fig. 2) keeps chuck table 10 is installed on to cut;With And control unit 100.
In addition, cutting apparatus 1 has:Processing feed unit (not shown), make chuck table 10 with retaining surface 11 It is moved in the parallel X-direction as processing direction of feed;Index feed unit (not shown), make cutting unit 20 with Retaining surface 11 is parallel and the Y direction as index feed direction vertical with X-direction on move;And incision (not shown) Feed unit makes cutting unit 20 in the Z axis side for being parallel to the vertical direction vertical with both X-direction and Y direction It moves up.In addition, cutting apparatus 1 has:Box elevator 110 is loaded and is carried out to the machined object 201 before and after multiple cuttings The box 111 of storage and box 111 is made to move in z-direction;And transport unit (not shown), relative to 111 carrying-in/carrying-out of box Machined object 201, and machined object 201 is transported.
In addition, as shown in Figure 1, cutting apparatus 1 is tool is configured each other in face there are two cutting unit 20 and cutting tool 21 To position cutting apparatus, i.e. two main shaft scribing machine, the so-called cutting apparatus in face of formula biaxial type.
Chuck table 10 is disc-shape, and the retaining surface 11 kept to machined object 201 is by shapes such as porous ceramics At.In addition, chuck table 10 be arranged to by process feed unit move freely and by rotary driving source (not shown) around The axle center parallel with Z-direction rotates freely.Chuck table 10 is connect with vacuum attraction source (not shown), by being attracted by vacuum The machined object 201 that source attracts and carries out machining to the cutting tool 21 by cutting unit 20 is attracted, is kept.Separately Outside, multiple clamping parts 12 are provided with around chuck table 10, they are by air actuator is driven to being added Ring-shaped frame 207 around work object 201 is clamped.
Then, cutting unit 20 is illustrated with reference to the accompanying drawings.Fig. 2 is the cutting list for showing cutting apparatus shown in FIG. 1 The stereogram of the main axle unit of member.Fig. 3 is the stereogram of the main shaft and flange that show main axle unit shown in Fig. 2.Fig. 4 is to show The main shaft of main axle unit shown in Fig. 2 and the stereogram of cutting tool.Fig. 5 is cuing open for the Y direction of main axle unit shown in Fig. 2 View.Fig. 6 is the sectional view for the locked state of main shaft for showing main axle unit shown in fig. 5.Fig. 7 is cutting shown in FIG. 1 The front view of the cutting unit of device.Fig. 8 is that the movable part of the cutter hood for the cutting unit for showing cutting apparatus shown in Fig. 7 is fixed The front view for the state being located at separation point position.
As shown in Fig. 2, in cutting unit 20, cutting tool 21 is fixed in the clamping of flange 29 of the front end of main shaft 22 and pacifies Dress.Cutting unit 20 is cut using the machined object 201 that cutting tool 21 keeps chuck table 10.Cutting unit 20 machined objects 201 for being arranged respectively to be kept relative to chuck table 10 by index feed unit in the Y-axis direction It moves freely and is arranged to move freely in the Z-axis direction by cutting feed unit.
Cutting unit 20 has main axle unit 27 shown in Fig. 2 and cutter hood shown in Fig. 7 30.Such as Fig. 2, Fig. 3 and Fig. 4 institute Show, main axle unit 27 has:Main shaft 22, main shaft shell 23, the first vibrating part 24 (Fig. 3 and Fig. 4 shown in), cutting tool 21 with And circular second vibrating part 25 (Fig. 2 and Fig. 7 shown in).
Main shaft 22 is rotated by Fig. 5 and spindle drive motor shown in fig. 6 223 around the axle center parallel with Y direction.Main shaft electricity Motivation 223 has:The rotor 224 linked with main shaft 22;And the stator 225 for making rotor 224 rotate.As shown in figure 3, in main shaft 22 front end is formed with:With towards the gradually smaller tapering of point diameter 221;And setting is leaning on front end than tapering 221 The external screw thread 222 of side.Main shaft shell 23 is shaped generally as cylindrical shape, is arranged to through index feed unit in the Y-axis direction It moves freely and is arranged to move freely in the Z-axis direction by cutting feed unit.Main shaft shell 23 is outer according to making to be formed with The state that the front end of screw thread 222 is exposed stores main shaft 22.Main shaft shell 23 rotates the bearing of main shaft 22 around axle center Freely.
First vibrating part 24 has:Cylindric cylindrical portion 241, is installed on the periphery of the front end of main shaft 22;With And flange part 242, from the peripheral surface of cylindrical portion 241 towards radially outwardly extending.It is forward in the ratio flange part 242 of cylindrical portion 241 End side is formed with external screw thread 243.The front end of main shaft 22 by being embedded in cylindrical portion 241 and making spiral shell by the first vibrating part 24 Mother 28 is screwed togather in the periphery of the external screw thread 222 of the front end of main shaft 22 and is fixed on main shaft 22 as shown in Figure 4 with being arranged.
Cutting tool 21 is so-called wheel hub cutter, has circular cutting blade 212, which is fixed on discoid Bearing base station 211 periphery, machined object 201 is cut.Cutting blade 212 is by diamond or CBN (Cubic Boron Nitride, cubic boron nitride) etc. abrasive grains and metal or resin etc. combine agent material (bond material) constitute, be formed as defined in Thickness.Alternatively, it is also possible to use the washer cutter being only made of cutting blade 212 as cutting tool 21.
Cutting tool 21 make the cylindrical portion 241 of the first vibrating part 24 inside by by overlap the table of flange part 242 On face, the periphery of the second vibrating part 25 and the external screw thread 243 for being formed in cylindrical portion 241 screws togather, to which cutting tool 21 is kept It is fixed on main shaft 22 between the first vibrating part 24 and the second vibrating part 25.First vibrating part 24 and the second flange part Part 25 is held in clamping cutting tool 21 between each other, and the first vibrating part 24 is fixed on an end of main shaft 22, Second vibrating part 25 is fixed on the first vibrating part 24, to constitute the flange 29 that cutting tool 21 is fixed on to main shaft 22. In this way, in the main axle unit 27 of cutting unit 20, the clamping installation bite on the flange 29 for be fixed on the front end of main shaft 22 Tool 21.
In addition, as shown in Figure 5 and Figure 6, main axle unit 27 has the locking mechanism limited the rotation of main shaft 22 271.The locking mechanism 271 is, for example, structure identical with locking device shown in Japanese Unexamined Patent Publication 2004-235250 bulletins , detailed construction is omitted.There is locking mechanism 271 axis locking pin 273, the axis locking pin 273 to be arranged in main shaft shell 23 upper edges radially slide freely, institute on the same circumference to engage/be detached from the defined position for being fastened on main shaft 22 freely In multiple (such as the 3) connecting holes 272 formed.
Axis locking pin 273 is exerted a force by helical spring 274 to the direction being detached from connecting hole 272.About locking mechanism 271, when as shown in Figure 6 via the switching valve 275 that controlled unit 100 controls and from gas-pressurized offer source 276 to axis Locking pin 273 provide pressurization after gas when, the active force of 273 dipscrews spring 274 of axis locking pin and slide, be fastened on card It closes in hole 272, the rotation of main shaft 22 is limited (that is, main shaft 22 is locked).About locking mechanism 271, when as shown in Figure 5 When providing the gas after source 276 pressurizes to the offer of axis locking pin 273 from gas-pressurized not via switching valve 275 like that, axis locking Pin 273 is detached from due to the active force of helical spring 274 out of connecting hole 272, allows the rotation of main shaft 22.
Cutter hood 30 is fixed on main shaft shell 23, covers the both sides of the top and X-direction of cutting tool 21, is cutting It will be provided to cutting tool 21 as the cutting water of working fluid in processing.As shown in Figure 7 and Figure 8, cutter hood 30 has fixed part 31 and movable part 32.
Fixed part 31 is fixed on main shaft shell 23.Fixed part 31 covers the side of the top and X-direction of cutting tool 21. Fixed part 31 is equipped with Tool Broken Detect device 50, and is provided with and provides cutting water to cutting tool 21 in the cutting process Cut water jet nozzle 311.Tool Broken Detect device 50 is in the rotation of cutting tool 21 to the breakage or abrasion of cutting tool 21 It is detected.Tool Broken Detect device 50 exports testing result to control unit 100.
Movable part 32 will be installed on fixed part as the cutting (operating) water nozzle 321 of processing nozzle for liquid in a manner of it can be opened and closed 31, which is installed on the other side of the X-direction of fixed part 31.Movable part 32 is fixed the bearing of portion 31 as in X-axis side It moves up freely.Bar 313 by being accommodated in the cylinder 312 of fixed part 31 stretches (shown in Fig. 8), to movable part 32 It is moved in the X-axis direction relative to fixed part 31.In addition, being equipped with cutting (operating) water nozzle 321 in the lower end of movable part 32.Cutting water Nozzle 321 extends from the lower end of movable part 32 towards cutting water jet nozzle 311, is provided on the cutting (operating) water nozzle 321 multiple The cutting parts of the machined object 201 cut in the cutting process cutting tool 21 and cutting tool 21 provide cutting water Cutting water provides hole (not shown).
It is stretched by the bar 313 of cylinder 312, makes cutting (operating) water nozzle to which movable part 32 can be selectively positioned at 321 detach close to the approximated position shown in Fig. 7 of cutting tool 21 and with cutting tool 21 and can be directed to the handling of main shaft 22 and cut The disengaged position shown in Fig. 8 of cutting knife tool 21.Approximated position is that cutting (operating) water nozzle 321 etc. limits cutting tool 21 to main shaft 22 The position of handling, disengaged position are to allow cutting tool 21 to the position of the handling of main shaft 22.
Then, the step of cutting tool 21 of replacement cutting unit 20, is illustrated with reference to the accompanying drawings.Fig. 9 is shown more Change the stereogram of handling jig used when the cutting tool of cutting apparatus shown in FIG. 1.Figure 10 is shown for making shown in Fig. 9 Handling jig rotation torsion screwdriver vertical view.Figure 11 is the cutting tool for showing to replace cutting apparatus shown in FIG. 1 The front view of state.Figure 12 is the state for showing to replace the cutting tool of cutting apparatus shown in FIG. 1 in a manner of broken section Side view.
When replacing the cutting tool 21 of cutting unit 20, the movable part 32 of cutter hood 30 is positioned at disengaged position, The second vibrating part of periphery pair 25 of the cylindrical portion 241 of first vibrating part 24 loads and unloads.40 He of handling jig shown in Fig. 9 Torsion screwdriver 41 shown in Fig. 10 is used to carry out in the second vibrating part of periphery pair 25 of the cylindrical portion 241 of the first vibrating part 24 Handling.
As shown in figure 9, handling jig 40 has circular recess 401, between circumferentially being waited on the inner peripheral surface of circular recess 401 Every being dividually equipped with 4 fixing nut grasping claw 402.Circular recess 401 can be covered in the cutting for being positioned at disengaged position The outside of second vibrating part 25 of unit 20.In addition, handling jig 40 can be contacted with cutting (operating) water nozzle 321 equal to round recessed Portion 401 can not be covered in the outside of the second vibrating part 25 of the cutting unit 20 for being positioned proximate to position.Fixing nut is held Pawl 402 be arranged to can flexible deformation in the radial direction, circular recess 401 can covered from outside between each other Second vibrating part 25 is held.It is formed with for the front end insertion for torsion screwdriver 41 in the central portion of circular recess 401 Through hole 403.The flat shape of through hole 403 is regular hexagon.
As shown in Figure 10, torsion screwdriver 41 has:Section is the holding section 411 of hexagon shape, is inserted into handling jig In 40 through hole 403;And the handle 412 of torsion screwdriver rotation.By the way that holding section 411 to be inserted into, to be covered in second convex The through hole 403 of the handling jig 40 in the outside of edge part 25 simultaneously makes handle 412 rotate, to which torsion screwdriver 41 makes the second flange Component 25 is rotated relative to the first vibrating part 24.
When replacing the cutting tool 21 of cutting unit 20, the movable part 32 of cutter hood 30 is positioned at disengaged position, and So that circular recess 401 is covered in the outside of the second vibrating part 25 as is illustrated by figs. 11 and 12 and makes the engaging of handle 412 Portion 411 is inserted into through hole 403.Handle 412 is set to rotate and the second vibrating part 25 is made to be revolved relative to the first vibrating part 24 Turn, to remove the second vibrating part 25 from the first vibrating part 24.Cutting tool 21 is replaced, it is then convex by second Edge part 25 is accommodated in the circular recess 401 of handling jig 40, and the second vibrating part 25 and the periphery of external screw thread 243 is made to screw togather And the holding section 411 of handle 412 is made to be inserted into through hole 403.Make handle 412 rotate and make the second vibrating part 25 relative to First vibrating part 24 rotates, to which the second vibrating part 25 is fixed on the first vibrating part 24, vibrating part 24,25 it Between clamping replace after cutting tool 21.In addition, circular recess 401 can not be covered in the cutting unit 20 for being positioned proximate to position The second vibrating part 25 outside, therefore load and unload jig 40 and torsion screwdriver 41 and can not make the cutting list for being positioned proximate to position Second vibrating part 25 of member 20 is rotated relative to the first vibrating part 24.
In addition, in the embodiment 1, the cutting tool 21 of replacement is accommodated in container 60 shown in Figure 13 and Figure 14. Figure 13 is the exploded perspective view shown when the cutting tool by the replacement of cutting apparatus shown in FIG. 1 is accommodated in container.Figure 14 be the vertical view of container stored of cutting tool of the replacement to cutting apparatus shown in FIG. 1.
It is preferred that container 60 is made of synthetic resin and is transparent.As shown in figure 13, container 60 includes:Main body container 61; And cover 63, main body container 61 is installed in a manner of it can be opened and closed by hinge 62.Hinge 62 is and main body container 61 compare thickness with cover 63 forms relatively thin and flexible so-called from pin hinge.Main body container 61 has to be cut for setting The circular protrusions 64 that the hole in the center of cutter 21 is fitted into.
Cover 63 is integrally formed with the hook 65 in the outside that can be engaging in main body container 61, by the way that hook 65 is engaging in main body Container 61 is formed by engaging protrusion 66, and cover 63 is carried out with the state being closed relative to main body container 61 as shown in Figure 14 It keeps.
The cover 63 of container 60 pastes (setting) at the defined position of outer surface the kind information of determining cutting tool 21 I.e. type can adhesive labeling 70.Can adhesive labeling 70 be printed with bar code 71, which is comprising for determining The identification code of the kind information of the type of cutting tool 21.In addition, in the embodiment 1, can adhesive labeling 70 be also printed with Indicate the text line 72 of the type of cutting tool 21.Bar code 71 indicates the type of cutting tool 21.
In addition, cutting apparatus 1 has the reading unit shown in figure 15 80 for reading bar code 71.Figure 15 is to show Fig. 1 institutes The stereogram of the reading unit of the cutting apparatus shown.In the embodiment 1, reading unit 80 is to read bar code optically 71 bar code reader.Reading unit 80 exports the type of the cutting tool 21 represented by read bar code 71 to control Unit 100 processed.
Above-mentioned cutting apparatus 1 is the device for carrying out so-called staged cutting, on the main shaft 22 of two cutting units 20 Type cutting tool 21 different from each other is installed, segmentation preset lines are cut to using the cutting tool 21 of a cutting unit 20 After the midway of 203 thickness direction, the segmentation of machined object 201 is grown up to be a useful person using the cutting tool 21 of another cutting unit 20 Part 204.
Hereinafter, a cutting unit 20 is denoted as the first cutting unit 20-1, by the main shaft 22 of the first cutting unit 20-1 It is denoted as the first main shaft 22-1, cutting tool 21 is denoted as the first cutting tool 21-1.In addition, another cutting unit 20 is denoted as The main shaft 22 of second cutting unit 20-2 is denoted as the second main shaft 22-2, cutting tool 21 is denoted as by the second cutting unit 20-2 Second cutting tool 21-2.In addition, without distinguishing the first cutting unit 20-1 and the second cutting unit 20-2, letter It is denoted as cutting unit 20, without distinguishing the first main shaft 22-1 and the second main shaft 22-2, main shaft 22 is abbreviated as, in nothing In the case of the first cutting tool 21-1 and the second cutting tool 21-2 need to be distinguished, it is abbreviated as cutting tool 21.Cutting apparatus 1 is Carry out so-called staged cutting predefines the first bite for the first main shaft 22-1 for being installed on the first cutting unit 20-1 Have the type of 21-1, and predefines the second cutting tool for the second main shaft 22-2 for being installed on the second cutting unit 20-2 The type of 21-2 and different from the type of the first cutting tool 21-1.
Control unit 100 respectively controls the above-mentioned each integral part of cutting apparatus 1, makes the implementation pair of cutting apparatus 1 In the processing action of machined object 201.In addition, control unit 100 is computer.Control unit 100 with by display processing action State or image etc. the display unit 200 of compositions such as liquid crystal display device and for operator in registration processing content information The input unit (not shown) connection used whens equal.Input unit is by being arranged in the touch panel of display unit 200 and keyboard etc. At least one of external input device is constituted.Figure 16 is the functional flow diagram of the control unit of cutting apparatus shown in FIG. 1.
In addition, as shown in Fig. 1 and Figure 16, control unit 100 has tool-information register 101, processing conditions register 102 and determining section 103.Tool-information register 101 is to being installed on main shaft 22-1,22-2 of each cutting unit 20-1,20-2 Kind, that is, type of cutting tool 21-1,21-2 registered.It is registered in tool-information register 101 and passes through reading unit The type of the 80 kind information, that is, cutting tools 21 read.
Processing conditions register 102 is to adding including the combination comprising cutting tool 21-1,21-2 and main shaft 22-1,22-2 Work condition 104 is registered.As shown in figure 16, processing conditions register 102 has:To the condition of the first cutting unit 20-1 into First machining condition register 104-1 of row registration;The second cutting item that the condition of second cutting unit 20-2 is registered Part register 104-2;And to machined object condition register 104-3 that the processing conditions of machined object 201 is registered.
First machining condition register 104-1 is registered with from input unit etc. is installed on the first of the first cutting unit 20-1 It the type of the first cutting tool 21-1 of main shaft 22-1, the quantity for the segmentation preset lines 203 that can be cut and can cut Length.Second machining condition register 104-2 is registered with the second master for being installed on the second cutting unit 20-2 from input unit etc. The type of the second cutting tool 21-2 of axis 22-2, the quantity for the segmentation preset lines 203 that can be cut and the length that can be cut Degree.
Machined object condition register 104-3 is registered with the outer diameter, thickness, bonding of machined object 201 from input unit etc. The height apart from retaining surface 11 of the first cutting tool 21-1 when with 206 thickness, machining, turn of the first main shaft 22-1 Speed, machining when the height apart from retaining surface 11 of the second cutting tool 21-2, the rotating speed of the second main shaft 22-2 and add Work feed speed.
The type for the cutting tool 21 that determining section 103 is registered according to tool-information register 101 is registered with processing conditions One in cutting unit 20-1,20-2 is determined as cutter hood by the combination for main shaft 22-1,22-2 that portion 102 is registered 30 movable part 32 is set in the cutting unit 20 of disengaged position.When being registered with reading unit 80 in tool-information register 101 When the type of read cutting tool 21, determining section 103 is with reference to the first machining condition register 104-1 and the second machining condition Register 104-2.
Determining section 103 determines the registration in the first machining condition register 104-1 and the second machining condition register 104-2 There is the machining condition of the type of cutting tool identical with the type for the cutting tool 21 that tool-information register 101 is registered 21 Register, and determine cutting unit 20-1,20-2 corresponding with identified machining condition register 104-1,104-2.It determines Portion 103 makes the spindle drive motor 223 of identified cutting unit 20-1,20-2 stop, to the axis locking pin of locking mechanism 271 273 provide the gas after pressurization, and locking mechanism 271 is made to limit the rotation of main shaft 22-1,22-2, that is, by main shaft 22- 1,22-2 is locked.Determining section 103 makes the bar 313 of the cylinder 312 in the cutter hood 30 of identified cutting unit 20-1,20-2 stretch It grows and movable part 32 is set in disengaged position, make the cylinder 312 in the cutter hood 30 of undetermined cutting unit 20-1,20-2 Bar 313 shorten and movable part 32 is maintained close to position.
In this way, when to install the first cutting tool 21-1, cut if being registered with first in tool-information register 101 The type of cutting knife tool 21-1, it is determined that the movable part 32 of the cutter hood 30 of the second cutting unit 20-2 is maintained close to by portion 103 Position locks the first main shaft 22-1 of the first cutting unit 20-1 without being set in disengaged position, by the first cutting unit The movable part 32 of the cutter hood 30 of 20-1 is set in disengaged position.In addition, when to install the second cutting tool 21-2, if The type of the second cutting tool 21-2 is registered in tool-information register 101, it is determined that portion 103 is by the first cutting unit 20-1 The movable part 32 of cutter hood 30 be maintained close to position without being set in disengaged position, and by the of the second cutting unit 20-2 Two main shaft 22-2 lockings, disengaged position is set in by the movable part 32 of the cutter hood 30 of the second cutting unit 20-2.
Then, the processing action of the cutting apparatus 1 of embodiment 1 is illustrated.Cutting apparatus about embodiment 1 Processing content information is registered in control unit 100, before operator will be accommodated with machining by 1 processing action by operator The box 111 of machined object 201 be placed in box elevator 110, when being indicated by operator when processing action, by control unit 100 start processing action.
In processing action, control unit 100 takes out machined object 201 to transport unit, across splicing tape 206 and incite somebody to action 201 attracting holding of machined object is in retaining surface 11.Control unit 100 makes the bat (not shown) for being installed on the second cutting unit 20-2 The image captured by unit is taken the photograph to execute for carrying out and the contraposition of cutting tool 21-1,21-2 of cutting unit 20-1,20-2 The image procossings such as pattern match, machined object 201 and cutting unit 20-1,20-2 to be kept to chuck table 10 Relative position is adjusted.
Also, control unit 100 is according to processing content information, by process feed unit, index feed unit, cut into Cutting tool 21-1,21-2 and machined object 201 is set relatively to be moved along segmentation preset lines 203 to unit and rotary driving source It is dynamic, to cut the segmentation preset lines 203 of machined object 201.
When control unit 100 cuts all segmentation preset lines 203 and machined object 201 is divided into each device When part 204, machined object 201 is moved in box 111, carrying out cutting to the machined object 201 being accommodated in box 111 successively adds Work terminates processing action when the machining of all machined objects 201 in box 111 is completed.
As described above, according to the cutting apparatus 1 of embodiment 1, when to install the first cutting tool 21-1, only first cuts The movable part 32 for cutting the cutter hood 30 of unit 20-1 is set in disengaged position, when to install the second cutting tool 21-2, only The movable part 32 of the cutter hood 30 of second cutting unit 20-2 is set in disengaged position.Therefore, cutting apparatus 1 can use dress Unload jig 40 to be positioned at cutting unit 20-1,20-2 of disengaged position main shaft 22-1,22-2 installation cutting tool 21-1, 21-2.In addition, in cutting apparatus 1, handling jig 40 etc. can not make the second flange of the cutting unit 20 for being positioned proximate to position Component 25 rotates, therefore even if wanting to install cutting tool 21 on the main shaft 22 for the cutting unit 20 for being positioned proximate to position, It can not also be installed in physics aspect.As a result, even if peace can not be mistaken if the dispersion attention of 1 operator of cutting apparatus Type loaded on the cutting tool 21 of main shaft 22 and cutting tool 21 is installed on main shaft 22.
In addition, cutting apparatus 1 has reading unit 80, the reading unit 80 is to being arranged the container in storage cutting tool 21 60 bar code 71 is read out, and 80 read cutting tool 21 of reading unit is registered in tool-information register 101 Type.Therefore, cutting apparatus 1 reads bar code 71 using reading unit 80, and cutting for main shaft 22 is installed on so as to not mistake The type of cutting knife tool 21 and cutting tool 21 is installed on main shaft 22.
In addition, cutting apparatus 1 the processing conditions register 102 of control unit 100 machining condition register 104-1, 104-2 is registered with the type of cutting tool 21-1,21-2 of main shaft 22-1,22-2 for being installed on each cutting unit 20-1,20-2. Therefore, cutting apparatus 1 can be to the type and machining condition register for the cutting tool 21 that tool-information register 101 is registered The type for cutting tool 21-1,21-2 that 104-1,104-2 are registered is compareed.As a result, cutter will can be installed only The movable part 32 of the cutter hood 30 of the cutting unit 20 of the cutting tool 21 for the type that information register 101 is registered is reliably fixed It is located at separation point position.
[embodiment 2]
The cutting apparatus of embodiments of the present invention 2 is illustrated with reference to the accompanying drawings.Figure 17 is to be shown mounted to embodiment party The cutting tool of the cutting unit of the cutting apparatus of formula 2 and the stereogram of container.In Figure 17, in portion same as embodiment 1 Minute mark remembers identical label, and explanation is omitted.
The cutting apparatus 1 of embodiment 2 pastes (setting) at the defined position of the bearing base station 211 of cutting tool 21 to be had Determine the type of cutting tool 21 can adhesive labeling 70, it is in addition to this, identical as embodiment 1.The cutting of embodiment 2 The reading unit 80 of device 1 to be arranged cutting tool 21 can the bar code 71 of adhesive labeling 70 be read out.
The cutting apparatus 1 of embodiment 2 is in the same manner as embodiment 1, in the cutting unit 20 for being positioned at disengaged position Cutting tool 21 is installed on main shaft 22, so as to do not mistake the type for the cutting tool 21 for being installed on main shaft 22 and by bite Tool 21 is installed on main shaft 22.
In addition, the cutting apparatus 1 of embodiment 2 is pasted at the defined position of the bearing base station 211 of cutting tool 21 Determine the type of cutting tool 21 can adhesive labeling 70, therefore even if by cutting tool 21 from container 60 take out and with when Between equal process, it is unclear that taken out the container 60 of cutting tool 21, can be also pasted onto on cutting tool 21 by reading Bar code 71 by cutting tool 21 without being installed on main shaft 22 with mistaking type.
The control unit 100 of the cutting apparatus 1 of above-mentioned embodiment 1 and embodiment 2 has:With CPU The arithmetic processing apparatus of microprocessor as (central processing unit, central processing unit) has ROM (read Only memory, read-only memory) or RAM (random access memory, random access memory) as memory Storage device and input/output interface device.What the arithmetic processing apparatus of control unit 100 was stored according to storage device Computer program implements calculation process, and the control signal for controlling cutting apparatus 1 is defeated by input/output interface device Go out to the above-mentioned inscape of cutting apparatus 1.In addition, the function of the tool-information register 101 of control unit 100 is to pass through fortune Processing unit is calculated to realize the type write storage device of 80 read cutting tool 21 of reading unit.Control unit The function of 100 processing conditions register 102 is realized processing conditions write storage device by arithmetic processing apparatus. That is, the tool-information register 101 of control unit 100 and the function of processing conditions register 102 are realities by storage device Existing.The function of the determining section 103 of control unit 100 is to execute the computer that storage device is stored by arithmetic processing apparatus Program and realize.
In addition, present invention is not limited to the embodiments described above.I.e., it is possible to without departing from the spirit and scope of the invention into Row various modifications are simultaneously implemented.In the cutting apparatus 1 shown in embodiment 1 and embodiment 2, reading unit 80 reads bar code 71, it is registered with the type of 80 read cutting tool 21-1,21-2 of reading unit in tool-information register 101, but at this In invention, input unit can also be operated by operator and register cutting tool 21- in tool-information register 101 1, the type of 21-2.

Claims (3)

1. a kind of cutting apparatus, has:
First cutting unit is clamped on the flange of front end for being fixed on the first main shaft and is equipped with the first cutting tool;
Second cutting unit is clamped on the flange of front end for being fixed on the second main shaft and is equipped with the second cutting tool;
Chuck table keeps the machined object processed by the cutting tool;And
Control unit, it includes the tool-information register that the kind to the cutting tool to be mounted is registered, the controls Unit controls each integral part,
The cutting apparatus is characterized in that,
The cutting unit has cutter hood, and it is the main shaft shell rotated freely which, which is fixed on the main shaft supporting, covering The cutting tool and working fluid is provided,
The cutter hood has:
Fixed part, the fixed part are fixed on the main shaft shell;And
Movable part, the movable part are mounted to be opened and closed relative to the fixed part by nozzle for liquid is processed, which can select Being positioned to property makes the processing nozzle for liquid close to the approximated position of the cutting tool and detaches and can be directed to the cutting tool The flange loads and unloads the disengaged position of the cutting tool,
When to install first cutting tool, if being registered with the kind of first cutting tool, which will not The movable part of the cutter hood of second cutting unit is set in disengaged position, and by the cutter hood of first cutting unit Movable part is set in disengaged position,
When to install second cutting tool, if being registered with the kind of second cutting tool, which will not The movable part of the cutter hood of first cutting unit is set in disengaged position, and by the cutter hood of second cutting unit Movable part is set in disengaged position.
2. cutting apparatus according to claim 1, which is characterized in that
The cutting apparatus has reading unit, and the reading unit is to being set to the cutting tool or storing the container of the cutting tool On the identification code of the kind information comprising the cutting tool be read out,
The read kind information of the reading unit is registered in the tool-information register.
3. cutting apparatus according to claim 1, wherein
The control unit has the processing registered to the processing conditions including the combination comprising the cutting tool and the main shaft Condition register, the control unit should to determine according to the combination of the kind for the cutting tool registered and the main shaft The movable part of cutter hood is set in the cutting unit of disengaged position.
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CN108655931B (en) 2021-11-23
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JP2018166178A (en) 2018-10-25
TW201836798A (en) 2018-10-16
KR102325710B1 (en) 2021-11-11
KR20180109698A (en) 2018-10-08

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