CN108649789A - Radio-frequency power supply resistance to crosstalk method and device - Google Patents
Radio-frequency power supply resistance to crosstalk method and device Download PDFInfo
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- CN108649789A CN108649789A CN201810527521.0A CN201810527521A CN108649789A CN 108649789 A CN108649789 A CN 108649789A CN 201810527521 A CN201810527521 A CN 201810527521A CN 108649789 A CN108649789 A CN 108649789A
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- radio
- frequency
- frequency power
- power supply
- circuit
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/44—Circuits or arrangements for compensating for electromagnetic interference in converters or inverters
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Cable Transmission Systems, Equalization Of Radio And Reduction Of Echo (AREA)
Abstract
The invention discloses a kind of radio-frequency power supply resistance to crosstalk methods, resonance circuit is added on the radio-frequency power filtering netwok of radio-frequency power supply, resonance circuit is stopped high resonant frequency signal and is passed through, service frequency signal is allowed to pass through, by low resonant frequency signal or the target signal filter of external other radio-frequency power supplies.Resonance circuit one end connects the amplifying circuit of high resonant frequency radio-frequency power supply, other end ground connection；Resonance circuit includes the absorption resistance being sequentially connected in series, antiresonant circuit, series resonant circuit, and antiresonant circuit includes the first capacitance, the second capacitance, the first inductance being connected in parallel, and series resonant circuit includes the second inductance being connected in series with, third capacitance.The present invention can solve two radio-frequency power supplies simultaneously in use, crosstalk of the low resonant frequency radio-frequency power supply to high resonant frequency radio-frequency power supply, improves the comprehensive utilization ratio of product, and simple in structure, practicality and high efficiency is cost-effective.
Description
Technical field
The present invention relates to radio-frequency power supply technical field more particularly to a kind of radio-frequency power supply resistance to crosstalk method and devices.
Background technology
Radio-frequency power supply is the device for generating rf power signal, belongs to the core component of semiconductor manufacturing equipment, institute
There is the equipment for generating plasma progress material processing that radio-frequency power supply is required for provide energy.Radio-frequency power supply is generally by system control
System, radio-frequency signal generator, rf power amplifier circuit, supply line and radio frequency power detector composition.Wherein, system controls
Complete machine various pieces are controlled and protected, radio-frequency signal generator for generating and adjusting radiofrequency signal, put by radio-frequency power
Radiofrequency signal from radio-frequency signal generator is carried out power amplification by big circuit, and radio frequency power detector, which measures, comes from radio frequency work(
The rf power signal of rate amplifying circuit and rf power signal is exported, supply line provides electric power to each component.
In practical application, generally require in a specific load, while connecting two radio-frequency power supplies, and frequency is not
Together, such as：One 3000W 13.56MHz radio-frequency power supply, a 3000W 2MHz radio-frequency power supply be added in together one it is actual negative
It carries above.
The radio-frequency power supply of 13.56MHz, its radio-frequency power amplify network, are for 27.12MHz, 40.68 MHz, 68
What MHz, 80 MHz etc. frequency signal were filtered out, whole network can be considered as to a low-pass filter circuit；This low pass
Filter circuit is for these Frequency signals of 2 MHz, 4 MHz, without filtration result.Therefore, the radio-frequency power supply of 13.56MHz
It will be by low frequency signal in normal work（Such as：2MHz, 4MHz etc.）Interference causes the radio-frequency power supply of high frequency to work unstable
It is fixed.
Invention content
The purpose of the present invention is design a kind of method and device of radio-frequency power supply resistance to crosstalk.
For achieving the above object, the technical scheme is that：A kind of radio-frequency power supply resistance to crosstalk method, in high resonance
Resonance circuit is added on the radio-frequency power supply power amplification filtering netwok of frequency, it is logical that resonance circuit stops high resonant frequency signal
It crosses, service frequency signal is allowed to pass through, by low resonant frequency signal or the target signal filter of external other radio-frequency power supplies.
A kind of radio-frequency power supply resistance to crosstalk device, including resonance circuit, resonance circuit one end connect high resonant frequency radio frequency electrical
The amplifying circuit in source, other end ground connection；The resonance circuit includes the absorption resistance being sequentially connected in series, antiresonant circuit, series connection
Resonance circuit, the antiresonant circuit include the first capacitance, the second capacitance, the first inductance being connected in parallel, and the series connection is humorous
The circuit that shakes includes the second inductance being connected in series with, third capacitance；
The antiresonant circuit is identical as the resonant frequency of high resonant frequency radio-frequency power supply, series resonant circuit and low resonance frequency
Rate or the frequency of radiofrequency signal radio-frequency power supply from other radio-frequency power supplies are identical.
The beneficial effects of the invention are as follows：
The present invention can solve two radio-frequency power supplies simultaneously in use, low resonant frequency radio-frequency power supply is to high resonant frequency radio frequency electrical
The crosstalk in source, improves the comprehensive utilization ratio of product, and simple in structure, practicality and high efficiency is cost-effective.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Specific implementation mode
Below in conjunction with attached drawing, technical scheme in the embodiment of the invention is clearly and completely described.
A kind of radio-frequency power supply resistance to crosstalk method adds resonance electricity on the method circuit of the radio-frequency power supply of high resonant frequency
Road, resonance circuit stop high resonant frequency signal（Such as：27.12MHz, 40.68MHz, 60MHz, 80MHz etc.）Pass through, allows
Service frequency signal（Such as：13.56MHz）Pass through, by low resonant frequency signal（Such as：2MHz, 4MHz etc.）It filters out.
Device based on this method, as shown in Figure 1, including resonance circuit, resonance circuit one end connection high resonant frequency is penetrated
The amplifying circuit of frequency power, other end ground connection；The resonance circuit includes the absorption resistance R1 being sequentially connected in series, parallel resonance electricity
Road, series resonant circuit, the antiresonant circuit include the first capacitance C1, the second capacitance C2, the first inductance being connected in parallel
L1, the series resonant circuit include the second inductance L2 being connected in series with, third capacitance C3.
The antiresonant circuit is identical as the resonant frequency of high resonant frequency radio-frequency power supply, series resonant circuit with it is low humorous
Vibration frequency or other radio-frequency power supplies（Such as：2MHz, 4MHz etc.）Frequency is identical.
In the present embodiment, the resonant frequency of antiresonant circuit is 13.56MHz.The characteristics of according to parallel resonance：It is closer
The signal of resonant frequency, the impedance at antiresonant circuit both ends is bigger, and signal is less susceptible to pass through；Further away from resonant frequency
Signal, the impedance at antiresonant circuit both ends is smaller, and signal is easy to pass through.So this antiresonant circuit for
13.56MHz dominant frequency（Operating RF）Signal does not influence, but other signals is allowed to pass through.
The resonant frequency of series resonant circuit is 2MHz（Or 4MHz etc.）.The characteristics of according to series resonance：It is closer
The signal of resonant frequency, the impedance at series resonant circuit both ends is smaller, and signal is easier to be passed through；Further away from the letter of resonant frequency
Number, the impedance at series resonant circuit both ends is bigger, and signal is less susceptible to pass through.So this series circuit allows 2MHz's
Radiofrequency signal passes through.
So, the crosstalk radiofrequency signal of 2MHz is just intercepted, into the field-effect tube amplified less than radio-frequency power,
It cannot influence the normal work of that radio-frequency power supply of 13.56MHz.
If three or more radio-frequency power supplies act on a user load simultaneously, add electric as one or more
Road.Shunt circuit resonance is in working frequency, series loop resonance to corresponding low-frequency power frequency.
Described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention
In embodiment, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, shall fall within the protection scope of the present invention.
Claims (2)
1. a kind of radio-frequency power supply resistance to crosstalk method, which is characterized in that increase on the method circuit of the radio-frequency power supply of high resonant frequency
If resonance circuit, resonance circuit is stopped high resonant frequency signal and is passed through, and allows service frequency signal to pass through, low resonant frequency is believed
Number or external other radio-frequency power supplies target signal filter.
2. a kind of radio-frequency power supply resistance to crosstalk device, which is characterized in that including resonance circuit, resonance circuit one end connects high resonance frequency
The amplifying circuit of rate radio-frequency power supply, other end ground connection；The resonance circuit includes the absorption resistance being sequentially connected in series, parallel resonance electricity
Road, series resonant circuit, the antiresonant circuit includes the first capacitance, the second capacitance, the first inductance being connected in parallel, described
Series resonant circuit includes the second inductance being connected in series with, third capacitance；
The resonant frequency of the antiresonant circuit is identical as working frequency, the resonant frequency of series resonant circuit and low resonance frequency
The frequency of rate radio-frequency power supply or external other radio-frequency power supply working frequencies are identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810527521.0A CN108649789A (en) | 2018-05-29 | 2018-05-29 | Radio-frequency power supply resistance to crosstalk method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810527521.0A CN108649789A (en) | 2018-05-29 | 2018-05-29 | Radio-frequency power supply resistance to crosstalk method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108649789A true CN108649789A (en) | 2018-10-12 |
Family
ID=63758435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810527521.0A Pending CN108649789A (en) | 2018-05-29 | 2018-05-29 | Radio-frequency power supply resistance to crosstalk method and device |
Country Status (1)
| Country | Link |
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| CN (1) | CN108649789A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113315539A (en) * | 2021-06-29 | 2021-08-27 | 桂林航天工业学院 | Trap circuit for suppressing local oscillator leakage of frequency mixer |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5227962A (en) * | 1991-03-06 | 1993-07-13 | Constant Velocity Transmission Lines, Inc. | Filter and power factor compensation network |
| JPH09205765A (en) * | 1996-01-25 | 1997-08-05 | Meidensha Corp | Input filter of general purpose inverter |
| CN1377124A (en) * | 2002-04-24 | 2002-10-30 | 艾默生网络能源有限公司 | Switching power supply |
| CN201122954Y (en) * | 2007-11-30 | 2008-09-24 | 上海泰好电子科技有限公司 | High-frequency emission circuit of tire sensor |
| CN101361281A (en) * | 2006-10-27 | 2009-02-04 | 莱尔德技术股份有限公司 | Antenna device and portable radio communication device comprising such antenna device |
| CN203039568U (en) * | 2012-12-27 | 2013-07-03 | 孙明云 | Power supply harmonic wave and radio frequency interference suppressor |
| CN107196423A (en) * | 2017-07-27 | 2017-09-22 | 湖北工业大学 | Based on 13.56MHz magnet coupled resonant type wireless power transfers |
-
2018
- 2018-05-29 CN CN201810527521.0A patent/CN108649789A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5227962A (en) * | 1991-03-06 | 1993-07-13 | Constant Velocity Transmission Lines, Inc. | Filter and power factor compensation network |
| JPH09205765A (en) * | 1996-01-25 | 1997-08-05 | Meidensha Corp | Input filter of general purpose inverter |
| CN1377124A (en) * | 2002-04-24 | 2002-10-30 | 艾默生网络能源有限公司 | Switching power supply |
| CN101361281A (en) * | 2006-10-27 | 2009-02-04 | 莱尔德技术股份有限公司 | Antenna device and portable radio communication device comprising such antenna device |
| CN201122954Y (en) * | 2007-11-30 | 2008-09-24 | 上海泰好电子科技有限公司 | High-frequency emission circuit of tire sensor |
| CN203039568U (en) * | 2012-12-27 | 2013-07-03 | 孙明云 | Power supply harmonic wave and radio frequency interference suppressor |
| CN107196423A (en) * | 2017-07-27 | 2017-09-22 | 湖北工业大学 | Based on 13.56MHz magnet coupled resonant type wireless power transfers |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113315539A (en) * | 2021-06-29 | 2021-08-27 | 桂林航天工业学院 | Trap circuit for suppressing local oscillator leakage of frequency mixer |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200426 Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing, Daxing District Applicant after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 101318 No. 26, A District, Tianzhu Road, Tianzhu Airport Industrial Zone, Beijing, Shunyi District Applicant before: Beijing BBEF Science & Technology Co.,Ltd. |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181012 |