CN108645338B - PSD-based self-calibration method and device for annunciator under vacuum - Google Patents
PSD-based self-calibration method and device for annunciator under vacuum Download PDFInfo
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- CN108645338B CN108645338B CN201810448550.8A CN201810448550A CN108645338B CN 108645338 B CN108645338 B CN 108645338B CN 201810448550 A CN201810448550 A CN 201810448550A CN 108645338 B CN108645338 B CN 108645338B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Abstract
A PSD-based self-calibration method and device for a signaler under vacuum belong to the technical field of optical positioning tracking test, and in order to solve the problems in the prior art, a first fine tuning mechanism is connected with a helium-neon laser, and the end of a light beam emitted by the helium-neon laser is connected with a collimating light pipe; the second fine adjustment mechanism is positioned right below the first fine adjustment mechanism and connected with the electric cylinder, the front end of a piston rod of the electric cylinder enters the vacuum tank to be connected with one side of the connecting thin plate, the other side of the thin plate is connected with the two-dimensional electric control translation table, the two-dimensional electric control translation table is connected with the L-shaped connecting plate, the upper surface of the L-shaped connection is connected with the electric control rotating table, and the round end surface of the electric control rotating table is connected with the spectroscope; the mercury plate is connected with the mercury plate mounting mechanism, the mercury plate mounting mechanism is connected with a base of the signal antenna III, the base of the signal antenna III is mounted on the lower guide rail, and the first PSD target, the second PSD target and the third PSD target are correspondingly connected with the signal antenna I, the signal antenna II and the signal antenna III respectively.
Description
Technical Field
The invention relates to the technical field of optical positioning and tracking tests, in particular to a PSD-based self-calibration method and device for a signaler under vacuum.
Background
With the rapid development of high and new technologies, the measurement technology is applied more and more in the industrial and military fields, and the requirement on the measurement precision is higher and higher. The accurate positioning of the movement supporting mechanism of the annunciator based on the vacuum plasma environment can be realized by adjusting the PSD and the integrated device. Once the moving support structure is adjusted, the position of the annunciator is not accurate, and calibration is needed to accurately position the annunciator. At present, a plurality of methods and devices are adopted for calibration, and some positioning accuracy is low; some positioning devices have high positioning accuracy but poor operability, and need to be operated by professional technicians; the positioning accuracy is high, the automation degree is high, but the method is not suitable for a vacuum environment, so that the experimental requirements cannot be met far away, and therefore the positioning of the annunciator based on the vacuum plasma environment needs to be solved urgently. The calibration is a process of distinguishing accurate parameters of the signaler motion support mechanism model by using an advanced measurement means and a model-based parameter identification method so as to improve the accurate positioning of the signaler motion support. The calibration result is that the movement supporting mechanism of the annunciator moves to the accurate position required by the experiment, and the experiment requirement is met.
In recent years, in order to improve the positioning accuracy of the annunciator, domestic and foreign scholars have been provided with calibration methods, which can be roughly classified into the following three methods:
the first method is to use some high-precision measurement equipment to realize accurate positioning of the annunciator, such as a laser tracker, an electronic theodolite, and the like. The measuring instruments have great differences in precision, cost, easiness in use, availability in a vacuum environment and the like, but all have the defects of needing professional technicians to operate, incapability of accurately working in the vacuum environment, high cost, complicated measuring method and the like.
The second method is to use a collimating telescope to calibrate, combine a level meter, measure the straightness and flatness of a guide rail by arranging a target at a reasonable position on the guide rail, and obtain a positioning reference in a vacuum tank by adjustment. However, it is difficult to accurately install the target position, and it is difficult to obtain high measurement accuracy due to the contradiction between the field of view and the resolution.
The third method utilizes a calibration method and a calibration device disclosed in the Chinese invention patent No. CN 105423917A. Firstly, the PSD is well adjusted and fixed, the single-shaft precision rotary table is fixed on the electric control translation table, the semiconductor laser beam is vertical to the photosensitive surface of the PSD, the electric control translation table is moved to different positions, and the coordinate measurement value of the PSD and the measurement value of the electric control translation table are recorded to accurately position. But the pure PSD photosensitive surface is vertical to the laser beam and the accuracy of the laser installation position is lower.
Therefore, the research on the calibration method and the calibration device which are suitable for the vacuum plasma environment, low in cost, high in positioning accuracy and high in operation efficiency becomes a difficult problem to be solved based on the accurate positioning of the movement supporting mechanism of the annunciator in the vacuum plasma environment.
Disclosure of Invention
The invention provides a method and a device for positioning and calibrating a PSD (phase-sensitive detector) of a signaler in a plasma environment, aiming at solving the problems of complex design and installation, high cost, low operation efficiency and poor positioning accuracy in the conventional calibration mode in the vacuum plasma environment.
The technical scheme adopted for solving the problems is as follows:
the PSD-based self-calibration device for the annunciator under vacuum comprises a cylindrical vacuum tank, a helium-neon laser, a first fine adjustment mechanism, a collimating light tube, a second fine adjustment mechanism, an electric cylinder, a connecting thin plate, a two-dimensional electric control translation table, an L-shaped connecting plate, an electric control rotating table, a spectroscope, a mercury disc installing mechanism, a first PSD target, a second PSD target and a third PSD target;
the first fine tuning mechanism is arranged at the geometric center of one end of the vacuum tank and is arranged on the outer wall of the vacuum tank, the first fine tuning mechanism is connected with a helium-neon laser, the light beam end emitted by the helium-neon laser is connected with a collimator, and the collimator can collimate laser emitted by the helium-neon laser;
the second fine adjustment mechanism and the first fine adjustment mechanism are arranged on the same side of the vacuum tank, the second fine adjustment mechanism is located right below the first fine adjustment mechanism, the second fine adjustment mechanism is connected with the electric cylinder, the front end of a piston rod of the electric cylinder enters the vacuum tank and is connected with one side of the connecting thin plate, the other side of the connecting thin plate is connected with the two-dimensional electric control translation table, the two-dimensional electric control translation table is connected with the L-shaped connecting plate, the upper surface of the L-shaped connection is connected with the electric control rotary table, and the round end surface of the electric control rotary table is connected with the spectroscope;
the mercury disc is connected with the mercury disc mounting mechanism, the mercury disc mounting mechanism is connected with a base of the signal antenna III, the base of the signal antenna III is mounted on a lower guide rail and can move freely along the x direction on the lower guide rail, and the lower guide rail is horizontally mounted at the bottom of the cylindrical vacuum tank;
the first PSD target is connected with a signal antenna I, the signal antenna I is installed on an upper guide rail, the upper guide rail is horizontally installed at the top of the vacuum tank, and the signal antenna I can move freely on the upper guide rail along the x direction; the second PSD target is installed on a signal antenna II, and the signal antenna II is installed at the geometric center of the inner surface of the other end of the vacuum tank; the third PSD target is installed on a signal antenna III, and the signal antenna III can move freely along the x direction on a lower guide rail.
A PSD-based self-calibration method of a signaler in vacuum is characterized by comprising the following steps:
firstly, a first fine adjustment mechanism is arranged at the geometric center of one end of a vacuum tank and is arranged outside the vacuum tank, a helium-neon laser is arranged on the first fine adjustment mechanism, the first fine adjustment mechanism can realize fine adjustment of the helium-neon laser in the y direction and the z direction, and the accurate installation position of the helium-neon laser is ensured; then, a collimating light pipe is arranged at the end of the light beam emitted by the helium-neon laser and is used for collimating the laser beam emitted by the helium-neon laser; finally, placing the electronic gyroscope on the helium-neon laser, and detecting whether the helium-neon laser and the collimating tube are installed horizontally by using the electronic gyroscope;
step two, a second fine adjustment mechanism is arranged outside the vacuum tank and is positioned under the first fine adjustment mechanism, the second fine adjustment mechanism is connected with an electric cylinder through a bolt, the front end of a piston rod of the electric cylinder is connected with one side of a connecting thin plate, the other side of the connecting thin plate is connected with a two-dimensional electric control translation table, the two-dimensional electric control translation table is connected with an L-shaped connecting plate, the upper surface of the L-shaped connecting plate is connected with an electric control rotating table, the circular end surface of the electric control rotating table is connected with a spectroscope, and the medium film surface of the spectroscope and the horizontal surface form an angle of 45 degrees;
step three, installing the mercury disc 13 on a mercury disc installing mechanism, adjusting the levelness of the mercury disc through an adjuster of the mercury disc installing mechanism, connecting the mercury disc installing mechanism with a base of a signal antenna III, installing the base of the signal antenna III on a lower guide rail, and enabling the mercury disc to move freely on the lower guide rail along the x direction;
step four, mounting the first PSD target on a signal antenna I, and moving the first PSD target along the x direction on an upper guide rail along with the signal antenna I; the second PSD target is installed on a signal antenna II, and the signal antenna II is installed at the geometric center of the inner surface of the other side of the vacuum tank; the third PSD target is arranged on the signal antenna III and can move randomly along the x direction along with the signal antenna III on the lower guide rail;
step five, after all the spectroscopes are installed, detecting whether the spectroscopes are accurately installed; firstly, a laser beam emitted by a helium-neon laser irradiates a spectroscope through a collimating light pipe, one part of light passes through the spectroscope, if the light is received by a second PSD target on a signal antenna II, the other part of light is vertically reflected and received by a mercury disc arranged on a lower guide rail, if the light is returned by a light original path received by the mercury disc, the light received by the mercury disc in reflection is vertically reflected by the spectroscope, and the reflected light spot is received by an emitting port of the helium-neon laser, so that the installation position of the spectroscope is accurate;
removing the mercury plate, the mercury plate mounting mechanism and the electronic gyroscope, and calibrating the vertical orthogonal calibration of the signal antenna I and the signal antenna II; laser beams emitted by the helium-neon laser are irradiated onto the spectroscope through the collimating light pipe, and a part of light passes through the spectroscope and is received by a second PSD target on the signal antenna II; the other part of the light is reflected perpendicular to the spectroscope, and if the other part of the light is received by a first PSD target on the signal antenna I; the signal antenna I is vertically orthogonal to the signal antenna II; the signal antenna I can move freely on the upper guide rail along the x direction, and when the signal antenna I moves to any position, the spectroscope moves to the corresponding position along with the signal antenna I, so that the signal antenna I and the signal antenna II can be vertically and orthogonally calibrated;
and seventhly, performing vertical orthogonal calibration on the signal antenna III and the signal antenna II, rotating the spectroscope on an xz surface by 180 degrees by using an electric control rotating platform, and then repeating the step six in the calibration operation step.
The invention has the advantages that:
1) the calibration device of the invention needs a laser, an electric control rotating platform, an electric control translation platform, an electric cylinder, 5 PSD devices and connecting pieces, and has simple structure and low cost.
2) The fine adjustment mechanism for laser installation and the electronic gyroscope ensure accurate installation of the laser, and the accurate installation of the spectroscope is ensured by the principle of self-calibration of the light path of the mercury disk, so that the position is more accurate during calibration.
3) The components adopted by the invention have simple structure, simple design and installation and high operability, so the use is more convenient.
Drawings
FIG. 1 is a schematic structural diagram of a PSD-based self-calibration device for a signal under vacuum.
Fig. 2 is a schematic structural view of a fine adjustment mechanism for mounting a laser.
Fig. 3 is a schematic structural diagram of a mercury disk mounting mechanism.
FIG. 4 is a schematic diagram of a PSD-based under-vacuum annunciator self-calibration method.
Wherein: 1. the device comprises a vacuum tank, 2, a helium-neon laser, 3, a first fine adjustment mechanism, 3-1, a fine adjustment plate, 3-2, a fixing plate, 3-3, a fine adjustment bolt, 4, a collimating light pipe, 5, an electronic gyroscope, 6, a second fine adjustment mechanism, 7, an electric cylinder, 8, a connecting thin plate, 9, a two-dimensional electric control translation table, 10, an L-shaped connecting plate, 11, an electric control rotating table, 12, a spectroscope, 13, a mercury disk, 14, a mercury disk mounting mechanism, 14-1, a mercury disk supporting plate, 14-2, an adjuster, 14-3, an irregular connecting plate, 15, a first PSD target, 16, a second PSD target, 17, a third PSD target, 18, a signal antenna I, 19, a signal antenna II, 20, a signal antenna III, 21, a lower guide rail, 22 and an upper guide rail.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the PSD-based self-calibration device for an annunciator under vacuum includes a cylindrical vacuum tank 1, a he-ne laser 2 for emitting a light beam to a PSD target, a first fine tuning mechanism 3, a collimator 4, an electronic gyroscope 5, a second fine tuning mechanism 6, an electric cylinder 7, a connection sheet 8, a two-dimensional electric control translation stage 9, an L-shaped connection plate 10, an electric control rotation stage 11, a spectroscope 12, a mercury disc (mercury type standard level reference) 13, a mercury disc mounting mechanism 14, a first PSD target 15, a second PSD target 16, and a third PSD target 17.
The first fine adjustment mechanism 3, the second fine adjustment mechanism 6 and the electric cylinder 7 are installed outside the cylindrical vacuum tank 1, and the rest of the components are installed inside the vacuum tank 1, and the vacuum tank 1 provides a vacuum environment thereto.
First fine-tuning 3 installs in the geometric centre department of the one end of vacuum tank 1 and sets up on vacuum tank 1 outer wall, and first fine-tuning 3 passes through bolted connection helium neon laser 2, and helium neon laser 2 sends the beam end and is connected with collimator 4, and collimator 4 can make the laser collimation that helium neon laser 1 sent. An electronic gyroscope 5 is arranged at the upper end of the helium-neon laser 2 and used for testing whether the helium-neon laser 2 is installed horizontally.
As shown in fig. 2, the first fine adjustment mechanism 3 is composed of a fine adjustment plate 3-1, a fixing plate 3-2, and a fine adjustment bolt 3-3. The fine tuning plate 3-1 is connected with the fixing plate 3-2, adjustable fine tuning bolts 3-3 are mounted on four sides of the fine tuning plate 3-1, and displacement of the helium-neon laser 2 in the z direction and the y direction (the horizontal right direction is the positive x direction, the vertical upward direction is the positive z direction, and the vertical paper surface outward direction is the positive y direction) is achieved through the fine tuning bolts 3-3.
The second fine adjustment mechanism 6 and the first fine adjustment mechanism 3 are installed on the same side of the vacuum tank 1, the second fine adjustment mechanism 6 is located under the first fine adjustment mechanism 3, the second fine adjustment mechanism 6 is connected with the electric cylinder 7 through a bolt, the front end of a piston rod of the electric cylinder 7 enters the vacuum tank 1 and is connected with one side of the connecting thin plate 8, the other side of the connecting thin plate 8 is connected with the two-dimensional electric control translation table 9, the two-dimensional electric control translation table 9 is connected with the L-shaped connecting plate 10, the upper surface of the L-shaped connecting plate 10 is connected with the electric control rotating table 11, and the round end face of the electric control rotating table 11 is connected with the spectroscope 12. The second fine adjustment mechanism 6 is mainly used for slightly adjusting the displacement of the spectroscope 12 in the z and y directions after the approximate position of the spectroscope 12 is determined; the piston rod of the electric cylinder 7 can stretch in the x direction, so that the spectroscope 12 can move greatly in the x direction; the two-dimensional electric control translation stage 9 is mainly used for realizing large-amplitude movement of the spectroscope 12 in the z and y directions; the electrically controlled rotary stage 11 is mainly used for rotating the beam splitter 12 in the xz plane.
The mercury disc 13 is connected with the mercury disc mounting mechanism 14, the mercury disc mounting mechanism 14 is connected with a base of the signal antenna III 20, the base of the signal antenna III 20 is mounted on the lower guide rail 21 and can freely move along the x direction on the lower guide rail 21, and the lower guide rail 21 is horizontally mounted at the bottom of the cylindrical vacuum tank 1.
As shown in FIG. 3, the mercury-containing disc mounting mechanism 14 includes a mercury-containing disc support plate 14-1, an adjuster 14-2, and an irregular connection plate 14-3. The upper end face of the mercury disc support plate 14-1 is connected with the mercury disc 13, four corners of the lower end face of the mercury disc support plate 14-1 are connected with the regulator 14-2 and used for regulating the levelness of the mercury disc 13, and the bottom end of the regulator 14-2 is connected with the irregular connection plate 14-3. The irregular connecting plate 14-3 is connected with a base of the signal antenna III 20.
The first PSD target 15 is connected with a signal antenna I18, the signal antenna I18 is installed on an upper guide rail 22, the upper guide rail 22 is horizontally installed at the top of the vacuum tank 1, and the signal antenna I18 can move freely on the upper guide rail 22 along the x direction. The second PSD target 16 is mounted on a signal antenna II 19, and the signal antenna II 19 is mounted at the geometric center of the inner surface of the other end of the vacuum tank 1. The third PSD target 17 is mounted on a signal antenna iii 20, the signal antenna iii 20 is mounted on a lower rail 21, and the signal antenna iii 20 can be arbitrarily moved in the x direction on the lower rail 21.
A PSD-based self-calibration method of a signaler under vacuum comprises the following steps:
firstly, a first fine adjustment mechanism 3 is arranged at the geometric center of one end of a vacuum tank 1 and outside the vacuum tank 1, a helium-neon laser 2 is arranged on the first fine adjustment mechanism 3, the first fine adjustment mechanism 3 can realize fine adjustment of the helium-neon laser 2 in the y direction and the z direction, and the accurate installation position of the helium-neon laser 2 is ensured; then, the collimating tube 4 is arranged at the end of the light beam emitted by the helium-neon laser 2 and is used for collimating the laser beam emitted by the helium-neon laser 2; and finally, placing the electronic gyroscope 5 on the helium-neon laser 2, and detecting whether the helium-neon laser 2 and the collimator 4 are installed horizontally by using the electronic gyroscope 5.
And step two, installing a second fine adjustment mechanism 6 outside the vacuum tank 1, wherein the second fine adjustment mechanism 6 is positioned under the first fine adjustment mechanism 3, the second fine adjustment mechanism 6 is connected with an electric cylinder 7 through a bolt, the front end of a piston rod of the electric cylinder 7 is connected with one side of a connecting thin plate 8, the other side of the connecting thin plate 8 is connected with a two-dimensional electric control translation table 9, the two-dimensional electric control translation table 9 is connected with an L-shaped connecting plate 10, the upper surface of the L-shaped connecting plate 10 is connected with an electric control rotating table 11, the circular end face of the electric control rotating table 11 is connected with a spectroscope 12, and the medium film surface of the spectroscope 12 is installed at an angle of 45 degrees. The second fine adjustment mechanism 6 is mainly used for slightly adjusting the displacement of the spectroscope 12 in the z and y directions after the approximate position of the spectroscope 12 is determined; the piston rod of the electric cylinder 7 can stretch in the x direction, so that the spectroscope 12 can move greatly in the x direction; the two-dimensional electrically-controlled translation stage 9 is mainly used for realizing large-amplitude movement of the spectroscope 12 in the z and y directions.
Step three, the mercury disc 13 is installed on the mercury disc installation mechanism 14, the levelness of the mercury disc 13 is adjusted through the adjuster 14-2 of the mercury disc installation mechanism 14, the mercury disc installation mechanism 14 is connected with the base of the signal antenna III 20, the base of the signal antenna III 20 is installed on the lower guide rail 21, and the mercury disc 13 can freely move on the lower guide rail 21 along the x direction, as shown in fig. 1.
Step four, the first PSD target 15 is installed on the signal antenna I18 and can move freely along the x direction on the upper guide rail 22 along with the signal antenna I18; the second PSD target 16 is arranged on a signal antenna II 19, and the signal antenna II 19 is arranged at the geometric center of the inner surface of the other side of the vacuum tank 1; the third PSD target 17 is mounted on the signal antenna iii 20, and can be arbitrarily moved in the x direction along with the signal antenna iii 20 on the lower rail 21.
And step five, after all the parts are installed, detecting whether the spectroscope 12 is accurately installed. Firstly, a laser beam emitted by the helium-neon laser 2 irradiates a spectroscope 12 through a collimating tube 4, a part of light passes through the spectroscope 12, if the light is received by a second PSD target 16 on a signal antenna II 19, the other part of light is vertically reflected and received by a mercury disc 13 arranged on a lower guide rail 21, and if a light original path received by the mercury disc 13 returns (namely, the light received by the mercury disc 13 is vertically reflected through the spectroscope 12), a reflection light spot is received by an emitting port of the helium-neon laser 2, the mounting position of the spectroscope 12 is accurate.
And sixthly, removing the mercury disk 13, the mercury disk mounting mechanism 14 and the electronic gyroscope 5, and calibrating the vertical orthogonal calibration of the signal antenna I18 and the signal antenna II 19. A laser beam emitted by the helium-neon laser 2 is irradiated onto the spectroscope 12 through the collimating tube 4, and a part of light passes through the spectroscope 12 and is received by the second PSD target 16 on the signal antenna II 19; the other part of the light is reflected perpendicular to the spectroscope 12, and if the other part of the light is received by the first PSD target 15 on the signal antenna I18; the signal antenna i 18 is orthogonal to the signal antenna ii 19. The signal antenna I18 can be freely moved on the upper guide rail 22 along the x direction, and when the signal antenna I18 is moved to any position, the spectroscope 12 is moved to the corresponding position, so that the vertical orthogonal calibration of the signal antenna I18 and the signal antenna II 19 can be carried out, as shown in FIG. 4.
And seventhly, the vertical orthogonal calibration of the signal antenna III 20 and the signal antenna II 19 is the same as the vertical orthogonal calibration principle of the signal antenna I18 and the signal antenna II 19, the spectroscope 12 is rotated by 180 degrees on the xz plane only by using the electric control rotary table 11, and then the step six is repeated in the calibration operation step.
Claims (5)
1. The PSD-based self-calibration device for the annunciator under vacuum is characterized by comprising a vacuum tank (1), a helium-neon laser (2), a first fine adjustment mechanism (3), a collimator (4), a second fine adjustment mechanism (6), an electric cylinder (7), a connecting thin plate (8), a two-dimensional electric control translation table (9), an L-shaped connecting plate (10), an electric control rotating table (11), a spectroscope (12), a mercury disc (13), a mercury disc mounting mechanism (14), a first PSD target (15), a second PSD target (16) and a third PSD target (17);
the first fine tuning mechanism (3) is arranged at the geometric center of one side of the vacuum tank (1) and is arranged on the outer wall of the vacuum tank (1), the first fine tuning mechanism (3) is connected with the helium-neon laser (2), the end of a light beam emitted by the helium-neon laser (2) is connected with the collimator (4), and the collimator (4) can collimate the laser emitted by the helium-neon laser (1);
the second fine adjustment mechanism (6) and the first fine adjustment mechanism (3) are arranged on the same side of the vacuum tank (1), the second fine adjustment mechanism (6) is located right below the first fine adjustment mechanism (3), the second fine adjustment mechanism (6) is connected with the electric cylinder (7), the front end of a piston rod of the electric cylinder (7) enters the vacuum tank (1) to be connected with one side of the connecting thin plate (8), the other side of the connecting thin plate (8) is connected with the two-dimensional electric control translation table (9), the two-dimensional electric control translation table (9) is connected with the L-shaped connecting plate (10), the upper surface of the L-shaped connecting plate (10) is connected with the electric control rotating table (11), and the round end surface of the electric control rotating table (11) is connected with the spectroscope (12);
the mercury disc (13) is connected with a mercury disc mounting mechanism (14), the mercury disc mounting mechanism (14) is connected with a base of a signal antenna III (20), the base of the signal antenna III (20) is mounted on a lower guide rail (21) and can freely move along the x direction on the lower guide rail (21), and the lower guide rail (21) is horizontally mounted at the bottom of the cylindrical vacuum tank (1);
the first PSD target (15) is connected with a signal antenna I (18), the signal antenna I (18) is installed on an upper guide rail (22), the upper guide rail (22) is horizontally installed at the top of the vacuum tank (1), and the signal antenna I (18) can move freely on the upper guide rail (22) along the x direction; the second PSD target (16) is arranged on a signal antenna II (19), and the signal antenna II (19) is arranged at the geometric center of the inner surface of the other end of the vacuum tank (1); the third PSD target (17) is arranged on a signal antenna III (20), and the signal antenna III (20) can be freely moved along the x direction on a lower guide rail (21).
2. The PSD-based self-calibration device for the annunciator under vacuum as claimed in claim 1, wherein the first fine tuning mechanism (3) is composed of a fine tuning plate (3-1), a fixed plate (3-2) and a fine tuning bolt (3-3); the fine tuning plate (3-1) is connected with the fixing plate (3-2), adjustable fine tuning bolts (3-3) are mounted on four sides of the fine tuning plate (3-1), and displacement of the helium-neon laser (2) in the z direction and the y direction is achieved through the fine tuning bolts (3-3).
3. The PSD-based under-vacuum annunciator self-calibration device according to claim 1, wherein the mercury disc mounting mechanism (14) comprises a mercury disc support plate (14-1), a regulator (14-2) and an irregular connecting plate (14-3); the upper end face of the mercury disc support plate (14-1) is connected with the mercury disc (13), four corners of the lower end face of the mercury disc support plate (14-1) are connected with the regulator (14-2) and used for regulating the levelness of the mercury disc (13), and the bottom end of the regulator (14-2) is connected with the irregular connection plate (14-3); the irregular connecting plate (14-3) is connected with a base of the signal antenna III (20).
4. The PSD-based under-vacuum annunciator self-calibration device as claimed in claim 1, wherein an electronic gyroscope (5) is placed at the upper end of the helium-neon laser (2) for testing whether the helium-neon laser (2) is installed horizontally.
5. A PSD-based self-calibration method of a signaler in vacuum is characterized by comprising the following steps:
firstly, a first fine adjustment mechanism (3) is arranged at the geometric center of one end of a vacuum tank (1) and outside the vacuum tank (1), a helium-neon laser (2) is arranged on the first fine adjustment mechanism (3), and the first fine adjustment mechanism (3) can realize fine adjustment of the helium-neon laser (2) in the y direction and the z direction, so that the accurate installation position of the helium-neon laser (2) is ensured; then, the collimating light pipe (4) is arranged at the end of the light beam emitted by the helium-neon laser (2) and is used for collimating the laser beam emitted by the helium-neon laser (2); finally, an electronic gyroscope (5) is placed on the helium-neon laser (2), and the electronic gyroscope (5) is used for detecting whether the helium-neon laser (2) and the collimator (4) are installed horizontally;
secondly, a second fine adjustment mechanism (6) is installed outside the vacuum tank (1), the second fine adjustment mechanism (6) is located right below the first fine adjustment mechanism (3), the second fine adjustment mechanism (6) is connected with an electric cylinder (7) through a bolt, the front end of a piston rod of the electric cylinder (7) is connected with one side of a connecting thin plate (8), the other side of the connecting thin plate (8) is connected with a two-dimensional electric control translation table (9), the two-dimensional electric control translation table (9) is connected with an L-shaped connecting plate (10), the upper surface of the L-shaped connecting plate (10) is connected with an electric control rotating table (11), the circular end face of the electric control rotating table (11) is connected with a spectroscope (12), and the medium film face of the spectroscope (12) is installed at an angle of 45 degrees with the horizontal plane;
step three, installing the mercury disc (13) on the mercury disc installing mechanism (14), adjusting the levelness of the mercury disc (13) through an adjuster (14-2) of the mercury disc installing mechanism (14), connecting the mercury disc installing mechanism (14) with a base of a signal antenna III (20), installing the base of the signal antenna III (20) on a lower guide rail (21), and enabling the mercury disc (13) to move freely on the lower guide rail (21) along the x direction;
step four, the first PSD target (15) is arranged on a signal antenna I (18) and can move freely along the x direction on an upper guide rail (22) along with the signal antenna I (18); the second PSD target (16) is arranged on a signal antenna II (19), and the signal antenna II (19) is arranged at the geometric center of the inner surface of the other side of the vacuum tank (1); the third PSD target (17) is arranged on a signal antenna III (20) and can move freely along the x direction along with the signal antenna III (20) on a lower guide rail (21);
step five, after all the parts are installed, detecting whether the spectroscope (12) is accurately installed; firstly, a laser beam emitted by a helium-neon laser (2) irradiates a spectroscope (12) through a collimating light tube (4), one part of light passes through the spectroscope (12), if the light is received by a second PSD target (16) on a signal antenna II (19), the other part of light is vertically reflected and received by a mercury disc (13) arranged on a lower guide rail (21), if the original path of the light received by the mercury disc (13) returns, namely the light received by the mercury disc (13) is reflected and vertically reflected by the spectroscope (12), and a reflected light spot is received by an emitting port of the helium-neon laser (2), the mounting position of the spectroscope (12) is accurate;
removing the mercury disc (13), the mercury disc mounting mechanism (14) and the electronic gyroscope (5), and calibrating the vertical orthogonal calibration of the signal antenna I (18) and the signal antenna II (19); laser beams emitted by the helium-neon laser (2) are irradiated onto the spectroscope (12) through the collimating light tube (4), and a part of light passes through the spectroscope (12) and is received by a second PSD target (16) on the signal antenna II (19); another part of the light is reflected perpendicular to the spectroscope (12) and is received by a first PSD target (15) on a signal antenna I (18); the signal antenna I (18) is vertically orthogonal to the signal antenna II (19); the signal antenna I (18) can move freely along the x direction on the upper guide rail (22), and when the signal antenna I (18) moves to any position, the spectroscope (12) moves to the corresponding position along with the movement, so that the vertical orthogonal calibration of the signal antenna I (18) and the signal antenna II (19) can be carried out;
and seventhly, performing vertical orthogonal calibration on the signal antenna III (20) and the signal antenna II (19), wherein the vertical orthogonal calibration principle is the same as that of the signal antenna I (18) and the signal antenna II (19), rotating the spectroscope (12) on an xz plane by 180 degrees by using the electric control rotating platform (11), and then, calibrating and operating the steps and repeating the step six.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810448550.8A CN108645338B (en) | 2018-05-11 | 2018-05-11 | PSD-based self-calibration method and device for annunciator under vacuum |
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