CN108645338A - Signalling means self-calibrating method and device under vacuum based on PSD - Google Patents
Signalling means self-calibrating method and device under vacuum based on PSD Download PDFInfo
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- CN108645338A CN108645338A CN201810448550.8A CN201810448550A CN108645338A CN 108645338 A CN108645338 A CN 108645338A CN 201810448550 A CN201810448550 A CN 201810448550A CN 108645338 A CN108645338 A CN 108645338A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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Abstract
Signalling means self-calibrating method and device under vacuum based on PSD belong to optical alignment tracking and testing technical field, and in order to solve problems in the prior art, the first micro-adjusting mechanism connects He-Ne laser, and He-Ne laser transmitting light beam end is connect with collimating light pipe；Second micro-adjusting mechanism is located at the underface of the first micro-adjusting mechanism, second micro-adjusting mechanism is connect with electric cylinder, the piston rod front end of electric cylinder enters vacuum tank and is connected with the side for connecting thin plate, the other side of thin plate is connect with two-dimentional electronic control translation stage, two-dimentional electronic control translation stage is connect with L-shaped connecting plate, the upper surface of L-shaped connection is connect with electronically controlled rotary table, and electronically controlled rotary table nose circle face is connect with spectroscope；Quicksilver horizon is connect with quicksilver horizon installing mechanism, quicksilver horizon installing mechanism is connect with the pedestal of signal antenna III, the floor installation of signal antenna III is on lower guideway, and correspondence is connect with signal antenna I, signal antenna II, signal antenna III respectively for the first PSD targets, the 2nd PSD targets, the 3rd PSD targets.
Description
Technical field
The present invention relates to optical alignment tracking and testing technical fields, and in particular to signalling means under a kind of vacuum based on PSD
Self-calibrating method and device.
Background technology
With the rapid development of high and new technology, measuring technique is also more and more in industry, the application of military field, to measuring
The requirement of precision is also higher and higher.By adjusting PSD and integrating device, can just make based on the signal under vacuum plasma environment
Device movement support device is accurately positioned.Once adjustment kinematic mount structure may result in signalling means positioning inaccurately, need to demarcate
It can just be accurately positioned.Currently, being had much using the method and device of calibration, some positioning accuracy is low；Some positioning accuracy it is high but
Operability is poor, and professional technician is needed to operate；Positioning accuracy also is high, high degree of automation but is not suitable for vacuum ring
Border far can not meet requirement of experiment in this way, therefore urgently to be resolved hurrily to the positioning based on signalling means under vacuum plasma environment.
So-called calibration is exactly to identify signalling means kinematic mount machine using advanced measurement means and the parameter identification method based on model
The accurate parameter of structure model, to improve the pinpoint process of signalling means kinematic mount.Calibration result is exactly signalling means movement
Supporting mechanism is moved to the exact position of requirement of experiment, meets requirement of experiment.
In recent years, in order to improve the positioning accuracy of signalling means, some scaling methods, these methods are big in succession by domestic and foreign scholars
Cause can divide following three kinds：
First method is to realize being accurately positioned for signalling means using some high-precision measuring apparatus, as laser tracks
Instrument, electronic theodolite etc..These above-mentioned measuring instruments precision, cost, whether using be easy and whether can be under vacuum conditions
Use etc. has very big difference, but all have need technical professional operate, can not under vacuum conditions accurately
Work, there are the shortcomings of of high cost, measurement method is cumbersome.
Second method is calibrated using collimating telescope, in conjunction with level meter, by the rational position setting target on guide rail
The straightness of mapping amount guide rail, flatness, by adjusting the positioning datum obtained in vacuum tank.But since target position is difficult essence
Really installation, and since the contradiction between the visual field and resolution ratio causes to be difficult to obtain higher measurement accuracy.
The third method utilizes a kind of scaling method and device that Chinese invention patent number is disclosed in CN105423917A.
Its first by PSD adjust it is fixed with it is upper, single-shaft precision turntable is fixed on electronic control translation stage, semiconductor laser beam and PSD light
Quick face is vertical, and mobile electronic control translation stage records the coordinates measurements of PSD and the measured value of electronic control translation stage in different location, comes
It is accurately positioned.But its simple PSD photosurface is vertical with laser beam and laser mounting position accuracy is relatively low.
From the foregoing, it can be seen that research is suitble under vacuum plasma environment, is at low cost, positioning accuracy is high and operating efficiency is high
Scaling method and device, have become and needs be accurately positioned based on signalling means movement support device under vacuum plasma environment
The problem of solution.
Invention content
The present invention installs complicated, cost to solve the existing design existing for calibration mode under vacuum plasma environment
The problem high, operating efficiency is low and positioning accuracy is poor, provide under a kind of plasma environment signalling means PSD positioning and demarcating methods and
Device.
Solve the above problems used technical solution：
Signalling means self-calibration device under vacuum based on PSD, including it is cylindrical vacuum tank, He-Ne laser, first micro-
Regulating mechanism, collimating light pipe, the second micro-adjusting mechanism, electric cylinder, connection thin plate, two-dimentional electronic control translation stage, L-shaped connecting plate, automatically controlled rotation
Turntable, spectroscope, quicksilver horizon, quicksilver horizon installing mechanism, the first PSD targets, the 2nd PSD targets and the 3rd PSD targets；
First micro-adjusting mechanism is installed at the geometric center of one end of vacuum tank and is arranged on vacuum tank wall, first
Micro-adjusting mechanism connects He-Ne laser, and He-Ne laser transmitting light beam end is connect with collimating light pipe, and collimating light pipe can be such that He-Ne swashs
The laser alignment of light device transmitting；
Second micro-adjusting mechanism and the first micro-adjusting mechanism are installed on the same side of vacuum tank, and the second micro-adjusting mechanism is located at the
The underface of one micro-adjusting mechanism, the second micro-adjusting mechanism are connect with electric cylinder, and the piston rod front end of electric cylinder enters vacuum tank and company
The side connection of thin plate is connect, the other side of thin plate is connect with two-dimentional electronic control translation stage, and two-dimentional electronic control translation stage connects with L-shaped connecting plate
It connects, the upper surface of L-shaped connection is connect with electronically controlled rotary table, and electronically controlled rotary table nose circle face is connect with spectroscope；
Quicksilver horizon is connect with quicksilver horizon installing mechanism, and quicksilver horizon installing mechanism is connect with the pedestal of signal antenna III, signal
The floor installation of antenna III can arbitrarily move in the x-direction on lower guideway in lower guideway, and lower guideway is horizontally arranged at cylindrical true
The bottom of slack tank；
First PSD targets are connect with signal antenna I, and signal antenna I is installed on upper rail, and upper rail is horizontally arranged at very
The top of slack tank, signal antenna I can be arbitrary mobile in the x-direction on upper rail；2nd PSD targets are installed on signal antenna II
On, signal antenna II is installed at the inner surface geometric center of the other end of vacuum tank；3rd PSD targets are installed on signal antenna
On III, signal antenna III can arbitrarily move in the x-direction in lower guideway.
Signalling means self-calibrating method under vacuum based on PSD, characterized in that this approach includes the following steps：
First fine tuning structure is installed at the geometric center of one end of vacuum tank and is arranged in vacuum first by step 1
Outside tank, He-Ne laser is mounted on the first fine tuning structure, the first micro-adjusting mechanism can realize He-Ne laser in y and the side z
To fine tuning, ensure He-Ne laser installation site it is accurate；Then, collimating light pipe is installed on He-Ne laser transmitting light beam end
On, the laser beam datum for sending out He-Ne laser；Finally, electronic gyroscope is positioned on He-Ne laser, electricity consumption
Whether sub- gyroscope detection He-Ne laser and collimating light pipe installation are horizontal；
Second micro-adjusting mechanism is installed on the outside of vacuum tank by step 2, and the second micro-adjusting mechanism is located at the first fine tuning
The underface of mechanism, the second micro-adjusting mechanism are connect by bolt with electric cylinder, the piston rod front end of electric cylinder with connect thin plate
Side connects, and the other side of thin plate is connect with two-dimentional electronic control translation stage, two-dimentional electronic control translation stage and L-shaped connecting plate, L-shaped connecting plate
Upper surface is connect with electronically controlled rotary table, and electronically controlled rotary table nose circle face is connect with spectroscope, and spectroscope medium film surface and horizontal plane
It is installed in 45 °；
Quicksilver horizon 13 is mounted on quicksilver horizon installing mechanism, passes through the adjuster tune of quicksilver horizon installing mechanism by step 3
The levelness of water-saving silver plate, quicksilver horizon installing mechanism are connect with the pedestal of signal antenna III, the floor installation of signal antenna III in
On lower guideway, quicksilver horizon can be arbitrary mobile in the x-direction on lower guideway；
First PSD targets are installed on signal antenna I by step 4, can with signal antenna I on upper rail in the x-direction
It is arbitrary mobile；2nd PSD targets are installed on signal antenna II, and signal antenna II is installed on the inner surface of the other side of vacuum tank
At geometric center；3rd PSD targets are installed on signal antenna III, can be arbitrary in the x-direction in lower guideway with signal antenna III
It is mobile；
Step 5, after all are installed, whether detection spectroscope is installed accurately；He-Ne laser transmitting is sharp first
Light beam is irradiated to by collimating light pipe on spectroscope, and a part of light passes through spectroscope, if by signal antenna II second PSD targets
Tag splice is received, and vertically reflection is installed in the reception of the quicksilver horizon on lower guideway to another part light, if the Guang Yuanlu received by quicksilver horizon
Return, i.e., the light of quicksilver horizon reflection receivable is vertically reflected further through spectroscope, flare to He-Ne laser emission port
It receives, then spectroscope installation site is accurate；
Step 6 removes quicksilver horizon, quicksilver horizon installing mechanism and electronic gyroscope, demarcation signal antenna I and signal antenna
II perpendicular quadrature is calibrated；The laser beam of He-Ne laser transmitting is irradiated to by collimating light pipe on spectroscope, and a part of light passes through
Spectroscope, if being received by the 2nd PSD targets on signal antenna II；Another part light is reflected perpendicular to spectroscope, if by signal
The first PSD targets on antenna I receive；Then signal antenna I and II perpendicular quadrature of signal antenna；Signal antenna I can be in upper rail
On it is arbitrary mobile in the x-direction, when signal antenna I is moved to any position, spectroscope, which then follows, is moved to corresponding position, all may be used
It is calibrated with II perpendicular quadrature of signal antenna with carrying out signal antenna I；
Step 7, signal antenna III and the perpendicular quadrature of signal antenna II are calibrated, with electronically controlled rotary table by spectroscope in xz
Face rotates 180 °, and then proving operation step repeats step 6.
Advantages of the present invention：
1) caliberating device of the invention needs a laser, electronically controlled rotary table, electronic control translation stage, electric cylinder, 5 PSD
Device and connector, it is simple in structure, it is at low cost.
2) laser installation micro-adjusting mechanism of the present invention and electronic gyroscope ensure that laser is accurately installed, then pass through mercury
Disk light path self calibration principle ensures that spectroscopical accurate installation, mark timing position are more accurate.
3) component structure that the present invention uses is simple, and design installation is simple, and operability is high, therefore use is more square
Just.
Description of the drawings
Signalling means self-calibration apparatus structure schematic diagram under the vacuum based on PSD of Fig. 1 present invention.
Fig. 2 is the structural schematic diagram for the micro-adjusting mechanism for installing laser.
Fig. 3 is the structural schematic diagram of quicksilver horizon installing mechanism.
Fig. 4 is the schematic diagram of signalling means self-calibrating method under the vacuum based on PSD.
Wherein：1, vacuum tank, 2, He-Ne laser, the 3, first micro-adjusting mechanism, 3-1, tuning plate, 3-2, fixed plate, 3-3,
Trimming bolt, 4, collimating light pipe, 5, electronic gyroscope, the 6, second micro-adjusting mechanism, 7, electric cylinder, 8, connection thin plate, 9, two dimension electricity
Control translation stage, 10, L-shaped connecting plate, 11, electronically controlled rotary table, 12, spectroscope, 13, quicksilver horizon, 14, quicksilver horizon installing mechanism, 14-
1, quicksilver horizon support plate, 14-2, adjuster, 14-3, irregular connecting plate, the 15, the first PSD targets, the 16, the 2nd PSD targets,
17, the 3rd PSD targets, 18, signal antenna I, 19, signal antenna II, 20, signal antenna III, 21, lower guideway, 22, upper rail.
Specific implementation mode
The present invention is described in further details below in conjunction with the accompanying drawings.
As shown in Figure 1, signalling means self-calibration device under the vacuum based on PSD, including cylindrical vacuum tank 1, for giving
PSD targets emit He-Ne laser 2, the first micro-adjusting mechanism 3, collimating light pipe 4, electronic gyroscope 5, the second micro-adjusting mechanism of light beam
6, electric cylinder 7, connection thin plate 8, two-dimentional electronic control translation stage 9, L-shaped connecting plate 10, electronically controlled rotary table 11, spectroscope 12, quicksilver horizon
(mercury formula standard level station meter) 13, quicksilver horizon installing mechanism 14, the first PSD targets 15, the 2nd PSD targets 16 and third
PSD targets 17.
First micro-adjusting mechanism 3, the second micro-adjusting mechanism 6 and electric cylinder 7 are installed on the outside of cylinder vacuum tank 1, remaining part
Part is installed on the inside of vacuum tank 1, and vacuum tank 1 provides vacuum environment for it.
At the geometric center of one end that the first micro-adjusting mechanism 3 is installed on vacuum tank 1 and it is arranged on 1 outer wall of vacuum tank,
He-Ne laser 2 is bolted in first micro-adjusting mechanism 3, and He-Ne laser 2 emits light beam end and connect with collimating light pipe 4, accurate
Straight collimator 4 can make the laser alignment that He-Ne laser 1 emits.In 2 upper ends electronic gyroscope 5 of He-Ne laser, for surveying
Whether horizontal try the installation of He-Ne laser 2.
As shown in Fig. 2, the first micro-adjusting mechanism 3 is made of tuning plate 3-1, fixed plate 3-2, trimming bolt 3-3.It is wherein micro-
Tuned plate 3-1 is connect with fixed plate 3-2, and tetra- sides tuning plate 3-1 are equipped with adjustable trimming bolt 3-3, pass through trimming bolt 3-3
Realize that (horizontal is to the right x positive directions, is straight up z positive directions, vertical paper for displacement of the He-Ne laser 2 in the directions z and y
It is y positive directions outward).
Second micro-adjusting mechanism 6 and the first micro-adjusting mechanism 3 are installed on the same side of vacuum tank 1, and the second micro-adjusting mechanism 6
In the underface of the first micro-adjusting mechanism 3, the second micro-adjusting mechanism 6 is connect by bolt with electric cylinder 7, before the piston rod of electric cylinder 7
End enters vacuum tank 1 and is connected with the side for connecting thin plate 8, and the other side of thin plate 8 is connect with two-dimentional electronic control translation stage 9, two dimension electricity
Control translation stage 9 is connect with L-shaped connecting plate 10, and the upper surface of L-shaped connecting plate 10 is connect with electronically controlled rotary table 11, electronically controlled rotary table 11
Nose circle face is connect with spectroscope 12.Wherein, the second micro-adjusting mechanism 6 is mainly used for after 12 Position Approximate of spectroscope determines, slightly
Adjust displacement of the spectroscope 12 in the directions z and y；7 piston rod of electric cylinder can stretch in the x direction, realize spectroscope 12 in the directions x
Significantly move；Two-dimentional electronic control translation stage 9 is mainly used for realizing in spectroscope 12 significantly moving in the directions z and y；It is automatically controlled
Turntable 11 is mainly used for rotation of the spectroscope 12 in the faces xz.
Quicksilver horizon 13 is connect with quicksilver horizon installing mechanism 14, and quicksilver horizon installing mechanism 14 and the pedestal of signal antenna III 20 connect
It connects, the floor installation of signal antenna III 20 can arbitrarily move, 21 water of lower guideway in the x-direction on lower guideway 21 in lower guideway 21
Safety is mounted in the bottom of cylinder vacuum tank 1.
As shown in figure 3, quicksilver horizon installing mechanism 14 includes quicksilver horizon support plate 14-1, adjuster 14-2 and irregular connection
Plate 14-3.The quicksilver horizon upper surfaces support plate 14-1 are connect with quicksilver horizon 13, the angles of lower face four quicksilver horizon support plate 14-1 and tune
Device 14-2 connections are saved, the levelness for adjusting quicksilver horizon 13, the bottom ends adjuster 14-2 are connect with irregular connecting plate 14-3.No
Regular connecting plate 14-3 is connect with the pedestal of signal antenna III 20.
First PSD targets 15 are connect with signal antenna I 18, and signal antenna I 18 is installed on upper rail 22,22 water of upper rail
Safety is mounted in the top of vacuum tank 1, and signal antenna I 18 can be arbitrary mobile in the x-direction on upper rail 22.2nd PSD targets 16
It is installed on signal antenna II 19, signal antenna II 19 is installed at the inner surface geometric center of the other end of vacuum tank 1.Third
PSD targets 17 are installed on signal antenna III 20, and signal antenna III 20 is installed on lower guideway 21, and signal antenna III 20 can be under
Guide rail 21 is arbitrary mobile in the x-direction.
Signalling means self-calibrating method, includes the following steps under vacuum based on PSD：
Step 1 at the geometric center of one end that the first fine tuning structure 3 is installed on vacuum tank 1 and is arranged true first
1 outside of slack tank, He-Ne laser 2 is mounted on the first fine tuning structure 3, the first micro-adjusting mechanism 3 can realize that He-Ne laser 2 exists
The fine tuning in the directions y and z ensures that 2 installation site of He-Ne laser is accurate；Then, collimating light pipe 4 is installed on He-Ne laser 2
Emit on light beam end, the laser beam datum for sending out He-Ne laser 2；Finally, electronic gyroscope 5 He-Ne is positioned over to swash
On light device 2, it is whether horizontal with the installation of collimating light pipe 4 to detect He-Ne laser 2 with electronic gyroscope 5.
Second micro-adjusting mechanism 6 is installed on the outside of vacuum tank 1 by step 2, and the second micro-adjusting mechanism 6 is micro- positioned at first
The underface of regulating mechanism 3, the second micro-adjusting mechanism 6 are connect by bolt with electric cylinder 7, the piston rod front end of electric cylinder 7 with connect
The side of thin plate 8 connects, and the other side of thin plate 8 is connect with two-dimentional electronic control translation stage 9, two-dimentional electronic control translation stage 9 and L-shaped connecting plate
10,10 upper surface of L-shaped connecting plate is connect with electronically controlled rotary table 11, and 11 nose circle face of electronically controlled rotary table is connect with spectroscope 12, and point
12 medium film surface of light microscopic is installed horizontal by 45 °.Wherein, the second micro-adjusting mechanism 6 is mainly used for working as 12 Position Approximate of spectroscope
After determination, the slight displacement for adjusting spectroscope 12 in the directions z and y；7 piston rod of electric cylinder can stretch in the x direction, realize light splitting
Mirror 12 is significantly moved the directions x；Two-dimentional electronic control translation stage 9 be mainly used for realizing spectroscope 12 the directions z and y substantially
Degree movement.
Quicksilver horizon 13 is mounted on quicksilver horizon installing mechanism 14, passes through the adjusting of quicksilver horizon installing mechanism 14 by step 3
Device 14-2 adjusts the levelness of quicksilver horizon 13, and quicksilver horizon installing mechanism 14 is connect with the pedestal of signal antenna III 20, signal antenna
III 20 floor installation is on lower guideway 21, and quicksilver horizon 13 can be arbitrary mobile in the x-direction on lower guideway 21, as shown in Figure 1.
First PSD targets 15 are installed on signal antenna I 18 by step 4, can be as signal antenna I 18 is on upper rail 22
It is arbitrary mobile in the x-direction；2nd PSD targets 16 are installed on signal antenna II 19, and signal antenna II 19 is installed on vacuum tank 1
At the inner surface geometric center of the other side；3rd PSD targets 17 are installed on signal antenna III 20, can be with signal antenna III 20
It is arbitrary mobile in the x-direction in lower guideway 21.
Step 5, after all are installed, whether detection spectroscope 12 is installed accurately.He-Ne laser 2 emits first
Laser beam be irradiated on spectroscope 12 by collimating light pipe 4, a part of light pass through spectroscope 12, if by signal antenna II 19
Second PSD targets 16 receive, and vertically reflection is installed in the reception of the quicksilver horizon 13 on lower guideway 21 to another part light, if by water
Light backtracking (i.e. the light of 13 reflection receivable of quicksilver horizon is vertically reflected further through spectroscope 12) flare that silver plate 13 receives
It is received to 2 emission port of He-Ne laser, then 12 installation site of spectroscope is accurate.
Step 6 removes quicksilver horizon 13, quicksilver horizon installing mechanism 14 and electronic gyroscope 5, demarcation signal antenna I 18 and letter
The calibration of number II 19 perpendicular quadrature of antenna.The laser beam that He-Ne laser 2 emits is irradiated to by collimating light pipe 4 on spectroscope 12,
A part of light passes through spectroscope 12, if being received by the 2nd PSD targets 16 on signal antenna II 19；Another part light perpendicular to point
Light microscopic 12 reflects, if being received by the first PSD targets 15 on signal antenna I 18；Then signal antenna I 18 hangs down with signal antenna II 19
It is straight orthogonal.Signal antenna I 18 can be arbitrary mobile in the x-direction on upper rail 22, when signal antenna I 18 is moved to any position
When, spectroscope 12, which then follows, is moved to corresponding position, can be carried out signal antenna I 18 and II 19 perpendicular quadrature school of signal antenna
Standard, as shown in Figure 4.
Step 7, perpendicular quadrature calibration and signal antenna I 18 and signal day of the signal antenna III 20 with signal antenna II 19
II 19 perpendicular quadrature calibrating principle of line is identical, it is only necessary to spectroscope 12 be rotated 180 ° in the faces xz with electronically controlled rotary table 11, then
Proving operation step repeats step 6.
Claims (5)
1. signalling means self-calibration device under the vacuum based on PSD, characterized in that the device includes vacuum tank (1), He-Ne laser
(2), the first micro-adjusting mechanism (3), collimating light pipe (4), the second micro-adjusting mechanism (6), electric cylinder (7), connection thin plate (8), two dimension electricity
Control translation stage (9), L-shaped connecting plate (10), electronically controlled rotary table (11), spectroscope (12), quicksilver horizon (13), quicksilver horizon installing mechanism
(14), the first PSD targets (15), the 2nd PSD targets (16) and the 3rd PSD targets (17)；
First micro-adjusting mechanism (3) is installed at the geometric center of the side of vacuum tank (1) and the outer wall in vacuum tank (1) is arranged
On, the first micro-adjusting mechanism (3) connects He-Ne laser (2), and He-Ne laser (2) transmitting light beam end is connect with collimating light pipe (4),
Collimating light pipe (4) can make the laser alignment that He-Ne laser (1) emits；
Second micro-adjusting mechanism (6) is installed on the same side of vacuum tank (1), and the second micro-adjusting mechanism with the first micro-adjusting mechanism (3)
(6) it is located at the underface of the first micro-adjusting mechanism (3), the second micro-adjusting mechanism (6) is connect with electric cylinder (7), the piston of electric cylinder (7)
Bar front end enters vacuum tank (1) and is connected with the side for connecting thin plate (8), the other side of thin plate (8) and two-dimentional electronic control translation stage (9)
Connection, two-dimentional electronic control translation stage (9) connect with L-shaped connecting plate (10), the upper surface of L-shaped connecting plate (10) and electronically controlled rotary table
(11) it connects, electronically controlled rotary table (11) nose circle face is connect with spectroscope (12)；
Quicksilver horizon (13) is connect with quicksilver horizon installing mechanism (14), the bottom of quicksilver horizon installing mechanism (14) and signal antenna III (20)
The floor installation of seat connection, signal antenna III (20) can arbitrarily move in the x-direction on lower guideway (21) in lower guideway (21),
Lower guideway (21) is horizontally arranged at the bottom of cylinder vacuum tank (1)；
First PSD targets (15) are connect with signal antenna I (18), and signal antenna I (18) is installed on upper rail (22), upper rail
(22) it is horizontally arranged at the top of vacuum tank (1), signal antenna I (18) can be arbitrary mobile in the x-direction on upper rail (22)；The
Two PSD targets (16) are installed on signal antenna II (19), and signal antenna II (19) is installed on the interior of the other end of vacuum tank (1)
At surface geometry center；3rd PSD targets (17) are installed on signal antenna III (20), and signal antenna III (20) can be in lower guideway
(21) arbitrary mobile in the x-direction.
2. signalling means self-calibration device under the vacuum according to claim 1 based on PSD, which is characterized in that the first fine tuning
Mechanism (3) is made of tuning plate (3-1), fixed plate (3-2), trimming bolt (3-3)；Wherein tuning plate (3-1) and fixed plate
(3-2) is connected, and four side of tuning plate (3-1) is equipped with adjustable trimming bolt (3-3), and helium is realized by trimming bolt (3-3)
Displacement of the neon laser (2) in the directions z and y.
3. signalling means self-calibration device under the vacuum according to claim 1 based on PSD, which is characterized in that quicksilver horizon is pacified
Mounting mechanism (14) includes quicksilver horizon support plate (14-1), adjuster (14-2) and irregular connecting plate (14-3)；Quicksilver horizon supports
The plate upper surface (14-1) is connect with quicksilver horizon (13), and the angle of lower face four quicksilver horizon support plate (14-1) connects with adjuster (14-2)
It connects, the levelness for adjusting quicksilver horizon (13), the adjuster bottom end (14-2) is connect with irregular connecting plate (14-3)；Irregularly
Connecting plate (14-3) is connect with the pedestal of signal antenna III (20).
4. signalling means self-calibration device under the vacuum according to claim 1 based on PSD, which is characterized in that swash in He-Ne
Light device (2) upper ends electronic gyroscope (5), it is whether horizontal for testing He-Ne laser (2) installation.
5. signalling means self-calibrating method under the vacuum based on PSD, characterized in that this approach includes the following steps：
First fine tuning structure (3) is installed at the geometric center of one end of vacuum tank (1) and is arranged true first by step 1
Outside slack tank (1), He-Ne laser (2) is mounted on the first fine tuning structure (3), He-Ne can be achieved in the first micro-adjusting mechanism (3)
Laser (2) ensures that He-Ne laser (2) installation site is accurate in the fine tuning in the directions y and z；Then, collimating light pipe (4) are pacified
Loaded on the laser beam datum on He-Ne laser (2) transmitting light beam end, being used to send out He-Ne laser (2)；Finally, by electronics
Gyroscope (5) is positioned on He-Ne laser (2), with electronic gyroscope (5) detection He-Ne laser (2) and collimating light pipe (4)
Whether installation is horizontal；
Second micro-adjusting mechanism (6) is installed on the outside of vacuum tank (1) by step 2, and the second micro-adjusting mechanism (6) is located at first
The underface of micro-adjusting mechanism (3), the second micro-adjusting mechanism (6) are connect by bolt with electric cylinder (7), the piston rod of electric cylinder (7)
Front end is connected with the side for connecting thin plate (8), and the other side of thin plate (8) is connect with two-dimentional electronic control translation stage (9), and two dimension is automatically controlled flat
Moving stage (9) and L-shaped connecting plate (10), L-shaped connecting plate (10) upper surface are connect with electronically controlled rotary table (11), electronically controlled rotary table (11)
Nose circle face is connect with spectroscope (12), and spectroscope (12) medium film surface is installed horizontal by 45 °；
Quicksilver horizon (13) is mounted on quicksilver horizon installing mechanism (14), passes through the tune of quicksilver horizon installing mechanism (14) by step 3
The levelness that device (14-2) adjusts quicksilver horizon (13) is saved, quicksilver horizon installing mechanism (14) and the pedestal of signal antenna III (20) connect
It connects, on lower guideway (21), quicksilver horizon (13) can in the x-direction appoint the floor installation of signal antenna III (20) on lower guideway (21)
Meaning movement；
First PSD targets (15) are installed on signal antenna I (18) by step 4, can be as signal antenna I (18) is in upper rail
(22) arbitrary mobile in the x-direction on；2nd PSD targets (16) are installed on signal antenna II (19), signal antenna II (19) peace
At the inner surface geometric center of the other side loaded on vacuum tank (1)；3rd PSD targets (17) are installed on signal antenna III (20)
On, it can be arbitrary mobile in the x-direction in lower guideway (21) with signal antenna III (20)；
Step 5, after all are installed, whether detection spectroscope (12) is installed accurately；He-Ne laser (2) emits first
Laser beam be irradiated on spectroscope (12) by collimating light pipe (4), a part of light pass through spectroscope (12), if by signal antenna
Second PSD targets (16) receive on II (19), and vertically reflection is installed in the quicksilver horizon on lower guideway (21) to another part light
(13) it receives, if the light backtracking received by quicksilver horizon (13), i.e., the light of quicksilver horizon (13) reflection receivable is further through spectroscope
(12) vertical reflection, flare are received by He-Ne laser (2) emission port, then spectroscope (12) installation site is accurate；
Step 6 removes quicksilver horizon (13), quicksilver horizon installing mechanism (14) and electronic gyroscope (5), demarcation signal antenna I (18)
It is calibrated with signal antenna II (19) perpendicular quadrature；The laser beam of He-Ne laser (2) transmitting is irradiated to point by collimating light pipe (4)
On light microscopic (12), a part of light passes through spectroscope (12), if being received by the 2nd PSD targets (16) on signal antenna II (19)；
Another part light is reflected perpendicular to spectroscope (12), if being received by the first PSD targets (15) on signal antenna I (18)；Then believe
Number antenna I (18) and signal antenna II (19) perpendicular quadrature；Signal antenna I (18) can be arbitrary in the x-direction on upper rail (22)
Mobile, when signal antenna I (18) is moved to any position, spectroscope (12), which then follows, is moved to corresponding position, can be into
Row signal antenna I (18) is calibrated with signal antenna II (19) perpendicular quadrature；
The perpendicular quadrature of step 7, signal antenna III (20) and signal antenna II (19) is calibrated, perpendicular quadrature calibrating principle with
Signal antenna I 18 is identical as the perpendicular quadrature calibrating principle of signal antenna II 19, with electronically controlled rotary table (11) by spectroscope (12)
180 ° are rotated in the faces xz, then proving operation step repeats step 6.
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