CN108628058A - Infrared super continuum source during a kind of on piece is integrated - Google Patents
Infrared super continuum source during a kind of on piece is integrated Download PDFInfo
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- CN108628058A CN108628058A CN201810304454.6A CN201810304454A CN108628058A CN 108628058 A CN108628058 A CN 108628058A CN 201810304454 A CN201810304454 A CN 201810304454A CN 108628058 A CN108628058 A CN 108628058A
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- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 16
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- 229910052761 rare earth metal Inorganic materials 0.000 claims description 7
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06754—Fibre amplifiers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10084—Frequency control by seeding
- H01S3/10092—Coherent seed, e.g. injection locking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
- H01S3/1112—Passive mode locking
- H01S3/1115—Passive mode locking using intracavity saturable absorbers
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Lasers (AREA)
Abstract
Infrared super continuum source in being integrated the invention discloses a kind of on piece, feature be include it is sequentially connected compose generation module for generating the pumping laser generation module of seed light, the pumping laser amplification module for generating high-peak power ultrashort pulse, the waveguide coupling module for realizing efficient coupling between dissimilar materials waveguide, the SC that composes for generating infrared SC in 25 μm laser, advantage be have at low cost, output beam quality is good, with it is wide, simple and compact for structure, be convenient for and other system compatibles.
Description
Technical field
The present invention relates to laser optoelectronic technical field, infrared super continuous spectrums light in being integrated more particularly, to a kind of on piece
Source.
Background technology
Light source technology edifies and leads the tool that the mankind move ahead as one, and weight is suffered from the every field of national economy
Will with special status, it be it is various test, metrical instrument energy source.Therefore, the expansion process of light source wave band and people
The class visual field and measurement means are from the visible constantly outwardly extending process in field of tradition.Middle infrared band（2~5μm）It can positioned at human eye
See vision long wave direction, is not only the minimum atmospheric window of decaying, and also cover the absorption peak of numerous atoms and molecule, is
Lightwave spectrum area corresponding to important " fingerprint " the identification area in detecting instrument field and high temp objects black body radiation.Therefore, in
The laser spread spectrum and instrument detection technique of infrared band have important application in terms of military and civilian.Current test equipment is just not
It is disconnected to develop towards broadband, visualization, intelligent, automation and integrated direction, develop the mid-infrared light source and instrument of high quality
Device becomes the research hotspot of various countries scientific research personnel.Traditional mid-infrared light source such as synchrotron radiation light source and hot pin, although the light generated
Broader bandwidth, but very poor brightness, and degree of coherence is extremely low, seriously restricts its application.Laser has high brightness and high degree of coherence
The characteristics of.However, due to the limitation of material, common lasers can not realize arbitrary wavelength laser output in middle infrared band.Amount
Qc laser（QCL）And optical parametric oscillator（OPO）Big, system complex, expensive and output bandwidth with volume
Small drawback.
Middle infrared excess is continuous（SC）Spectrum light source not only has the advantages that laser light source high brightness and high degree of coherence, has both simultaneously
There are the wide spectral characteristics of ordinary light source, it has also become the most potential light source of infrared band.It is infrared in the whole world early in 2013
The market share of SC spectrum light sources has had reached 500,000,000 dollars, and in infrared SC spectrum light sources national defense and military fields and biology,
The development of medicine, environment etc. application field, market are fast-developing with 20% annual growth, it is contemplated that the year two thousand twenty is reached, in
The market value of infrared SC spectrums light source will be more than 2,000,000,000 dollars.Infrared SC spectrums light source has very high market in it can be seen that
Value.
Integrated chip be it is current in infrared SC spectrums light source development important trend.In recent years, it is interconnected to cater to all things on earth
In the implementations such as special gas, toxic reagent, biological bacterium and medical pathology are monitored on-line and the demand of analysis, especially for
The industrial production safety accident that the whole world faces takes place frequently, environmental pollution exacerbation, public safety threaten and the severe situations such as increase, both at home and abroad
Related research institutes increase to it is small, low in energy consumption it is miniature in infrared SC compose the application and development of light source.Therefore, on piece is realized
Infrared SC spectrums light source has considerable economic implications and social effect in integrated.
Invention content
Technical problem to be solved by the invention is to provide it is a kind of it is at low cost, output beam quality is good, with wide, structure is simple
It is single it is compact, convenient for the on piece of other system compatibles it is integrated in infrared super continuum source.
Technical solution is used by the present invention solves above-mentioned technical problem：Infrared super continuous spectrums light during a kind of on piece is integrated
Source, including it is integrated on piece and sequentially connected for generating the pumping laser generation module of seed light, for generating peak value
The pumping laser amplification module of power ultrashort pulse, the waveguide coupling module for realizing efficient coupling between dissimilar materials waveguide
Generation module is composed with the SC for composing laser for generating infrared SC in 2-5 μm.
The pumping pulse laser generation module structure be for be integrated on piece and successively it is end to end be used for laser
The semiconductor saturable absorbing mirror of mode locking, the positive dispersion waveguide for compensating dispersion are answered for injecting the first wavelength-division of pump light
With device, the first gain waveguide for providing amplification and the wave guide ring mirror for exporting laser；First wavelength-division multiplex
Device, the positive dispersion waveguide and the wave guide ring mirror are all made of alumino-silicate as waveguide substrate material；Described
One gain waveguide, as waveguide substrate material, mixes rare earth ion using alumino-silicate by way of ion exchange；Described
The seed light of wave guide ring mirror output enters the pumping pulse laser amplifying module, and the pumping pulse laser generates mould
Block is using semiconductor laser as pumping source.By adjust the first gain fibre, positive dispersion waveguide and the first wavelength division multiplexer,
The dispersion of the devices such as wave guide ring mirror and length, while optimizing pumping light power, can effectively control mode locking output pulse pulsewidth,
The characteristic parameters such as repetition rate are so as to fit the seed light as pumping pulse laser amplifying module.
The pumping pulse laser amplifying module structure be integrated on piece and be sequentially connected be used for stretched pulse
Pulse stretcher, the second wavelength division multiplexer for injecting pump light, for provide amplification the second gain waveguide and for pressing
The pulse shortener of vena contracta punching, the pulse stretcher, second wavelength division multiplexer, the pulse shortener are adopted
Use alumino-silicate as waveguide substrate material；Second gain waveguide as waveguide substrate material and is led to using alumino-silicate
The mode for crossing ion exchange mixes rare earth ion；The waveguide dispersion of the pulse shortener is negative dispersion, the pulse exhibition
The waveguide dispersion of wide device is positive dispersion；The seed light of the described wave guide ring mirror output pass sequentially through the pulse stretcher and
It is entered after second wavelength division multiplexer in second gain fibre, the pumping pulse laser amplifying module is adopted
Use semiconductor laser as pumping source, pump light enters the second gain light by second wavelength division multiplexer
In fibre, the high-peak power ultrashort pulse of second gain fibre output is by entering institute after the waveguide coupling module
In the SC spectrum generation modules stated.Wave device, the second gain waveguide and pulse shortener dispersion and length are broadened by adjusting pulse, together
When pump power is optimized, can effectively control amplification output pulse generation process, make its export high-peak power it is ultrashort
Pulse is suitable as the pump light of SC spectrum generation modules.
The waveguide coupling module is optical waveguide coupled for realizing alumino-silicate optical waveguide and sulphur system, the waveguide coupling
Molding block takes evanescent wave vertical coupled or direct coupling system is realized.
The SC spectrum generation modules are the high non-linearity wave having in 2-5 mu m wavebands compared with low-loss and smaller dispersion
It leads；The high non-linearity waveguide prepares film using magnetron sputtering method or thermal evaporation, then on this basis using exposure
Coupled ion etches or stripping method is prepared.By being optimized to Chalcogenide films material component and waveguiding structure, Neng Goushi
Now to the flexible control of waveguide zero dispersion point, dispersion flattene range and dispersion values, the ultra-wide of infrared band in 2-5 μm of covering is generated
Band SC is composed.
The pumping pulse laser generation module uses 1.5 mum wavelengths, 2 mum wavelengths or 1 mum wavelength, the rare earth
Ion uses erbium, holmium, rubidium, samarium, thulium or ytterbium, and mode locking mode is used is revolved based on semiconductor saturable absorbing mirror, nonlinear polarization
Turn, nonlinear fiber loop mirror or novel saturable absorber mode realize high repetition frequency er-doped picosecond or the femtosecond arteries and veins of mode locking
Wash fibre laser off.
Pumping pulse laser generation module, the pumping pulse laser amplifying module and the SC spectrums generates
The waveguide that module is transmitted using basement membrane, high-order mode.
Before the pumping pulse laser generation module and the pumping pulse laser amplifying module pump mode use
Realized to, backward or two directional pump method, the pumping pulse laser amplifying module using single-stage amplification, two-stage amplification or
Person's multistage is amplified.
Compared with the prior art, the advantages of the present invention are as follows：Infrared super continuum source during a kind of on piece of the present invention is integrated,
Including pumping pulse laser generation module, pumping pulse laser amplifying module, waveguide coupling module, SC compose generation module.Advantage
It is as follows：
（1）In infrared super continuum source all modules be all made of waveguide device realization, whole system is integrated in one piece small
Size（It is, for example, less than 45 × 60mm）Commercial silicon chip on so that in infrared SC compose light source simultaneously at low cost, output light
Beam quality is good, with it is wide, simple and compact for structure, convenient for other system compatibles the advantages that, be advantageously implemented the commodity of light source
Change；
（2）Using picosecond or femtosecond ultrashort pulse on piece integrated waveguide laser as seed source, put using on piece integrated waveguide
Big device amplification, reduces the volume and complexity of whole system, is conducive to the integrated of mid and far infrared SC spectrum light sources；
（3）Height between alumino-silicate waveguide and high non-linearity sulphur system optical waveguide is realized using multistage taper perpendicular coupling structure
Effect coupling, pyramidal structure are advantageously implemented adiabatic coupling, lead to energy loss to avoid high-order mode is generated；
（4）SC spectrum generation modules prepare Chalcogenide films using magnetron sputtering method or thermal evaporation, then on this basis using exposure
Light+ion etching or stripping method kinds of processes are prepared, by being optimized to Chalcogenide films material component and waveguiding structure,
It can realize the flexible control to waveguide zero dispersion point, dispersion flattene range and dispersion values, generate infrared band in 2-5 μm of covering
Ultra wide band SC spectrum.
Description of the drawings
Fig. 1 is infrared super continuous spectrums light-source structure schematic diagram during on piece of the present invention is integrated.
Specific implementation mode
Below in conjunction with attached drawing embodiment, present invention is further described in detail.
Specific embodiment
A kind of all-fiber high power mid and far infrared super continuum source, as shown in Figure 1, including being integrated on piece and successively
The pumping pulse laser generation module 1 for generating seed light of connection, the pumping for generating high-peak power ultrashort pulse
Pulse laser amplification module 2, between dissimilar materials waveguide realize efficient coupling waveguide coupling module 3 and for generating 2-
The SC of infrared SC spectrums laser composes generation module 4 in 5 μm.
Above-mentioned pumping pulse laser generation module 1 is using based on semiconductor saturable absorbing mirror（SESAM）The 1.5 of mode locking
μm linear cavity mixes bait optical waveguide laser, as shown in Figure 1, its structure is：End to end partly leading for laser mode locking successively
Body saturable absorbing mirror 1-1, the positive dispersion waveguide 1-2 for compensating dispersion, the first wavelength division multiplexer for injecting pump light
1-3, the first gain waveguide 1-4 for providing amplification and the wave guide ring mirror 1-5 for exporting laser；Wave guide ring mirror 1-5
The seed light of output enters in pumping pulse laser amplifying module 2.Positive dispersion waveguide 1-2, the first wavelength division multiplexer 1-3 and waveguide
Annular mirror 1-5 is all made of alumino-silicate as waveguide substrate material；First wavelength division multiplexer 1-3, the first gain waveguide 1-4 and wave
The waveguide that annular mirror 1-5 is all made of basement membrane transmission is led, there is good beam quality to ensure to export pulse.First gain waveguide
1-4, as waveguide substrate material, mixes erbium ion using alumino-silicate by way of ion exchange；Positive dispersion waveguide 1-2 is logical
It crosses change alumino-silicate waveguiding structure or adulterates other materials in alumino-silicate waveguide, it is ensured that waveguide dispersion is positive dispersion,
Make laser work dispersion management mechanism.Pumping pulse laser generation module 1 is using 980nm semiconductor lasers as pumping source.
The chamber length of entire on piece optical waveguide laser, which controls, makes mode locking export the repetition rate of pulse in MHz or more magnitudes, waveguide ring
The seed light characteristic parameter of shape mirror 1-5 outputs disclosure satisfy that the requirement of pumping pulse laser amplifying module 2.
Above-mentioned pumping pulse laser amplification module 2 is amplified using single-stage, an actually simplified chirped pulse amplification
Device, pump mode use forward pumping.Its structure is：Be sequentially connected for the pulse stretcher 2-1 of stretched pulse, for noting
Enter the second wavelength division multiplexer 2-2, the second gain waveguide 2-3 for providing amplification and the pulse for compressing pulse of pump light
Compressor reducer 2-4.The seed light of wave guide ring mirror 1-5 outputs passes through direct after pulse stretcher 2-1 and the second wavelength division multiplexer 2-2
It enters in the second gain waveguide 2-3.Pulse stretcher 2-1, the second wavelength division multiplexer 2-2, pulse shortener 2-4 are all made of silicon
Aluminate is as waveguide substrate material；Second wavelength division multiplexer 2-2 and pulse shortener 2-4 is all made of the waveguide of basement membrane transmission,
Waveguide dimensions can ensure that output pulse has good beam quality, while ensure that pulse shortener 2-4 waveguide dispersions are negative color
It dissipates.Second gain waveguide 2-3, as waveguide substrate material, mixes erbium ion using alumino-silicate by way of ion exchange；
Pulse stretcher 2-1 ensures that waveguide dispersion is positive dispersion, and the seed light broadening for making wave guide ring mirror 1-5 export avoids subsequently putting
There is pulse division during big.Pumping pulse laser amplifying module 2 is swashed using the 980nm semiconductors with larger output power
Light device is entered by the second wavelength division multiplexer 2-2 in the second gain fibre 2-3 as pumping source, pump light.The laser of amplification
Into after pulse shortener 2-4, output high-peak power ultrashort pulse enters SC as pump light, by waveguide coupling module 3
It composes in generation module 4.
Above-mentioned waveguide coupling module 3 is optical waveguide coupled for realizing alumino-silicate optical waveguide and sulphur system, waveguide coupling module
The mode that the vertical coupled 3-1 of evanescent wave can be used is realized.
Above-mentioned SC spectrums generation module 4 is the high non-linearity waveguide having in 2-5 mu m wavebands compared with low-loss and smaller dispersion.
The present embodiment uses the sulphur system optical waveguide 4-1 of single layer structure.High non-linearity waveguide is prepared using magnetron sputtering method or thermal evaporation
Then film uses exposure+ion etching or stripping method kinds of processes to be prepared on this basis.
Above-mentioned pumping pulse laser generation module 1 can be used but be not limited to 1.5 mum wavelengths, 2 mum wavelengths and 1 mum wavelength,
Rare earth ion can be used but be not limited to erbium, holmium, rubidium, samarium, thulium and ytterbium etc., and mode locking mode can be used but be not limited to can based on semiconductor
Saturated absorption mirror, nonlinear polarization rotation, nonlinear fiber loop mirror and novel saturable absorber（Carbon nanotube, graphene
With sulfide etc.）Etc. modes realize high repetition frequency er-doped picosecond or the femtosecond-pulse fiber laser of mode locking.
Above-mentioned pumping pulse laser generation module 1, pumping pulse laser amplifying module 2 and SC spectrum generation modules 4 can be used
But it is not limited to basement membrane, the waveguide that high-order mode is transmitted.
Above-mentioned pumping pulse laser generation module 1 and 2 pump mode of pumping pulse laser amplifying module can be used but unlimited
It is realized in the methods of forward, backward or two directional pump.
Above-mentioned pumping pulse laser amplification module 2 can be used but be not limited to single-stage amplification, two-stage amplification and multistage amplification.
Above-mentioned waveguide coupling module 3 can be taken but be not limited to the modes such as the vertical coupled, direct-coupling of evanescent wave and realize.
Above-mentioned high non-linearity waveguide can be used but be not limited to silicon waveguide, fluoride optical waveguide, tellurate optical waveguide or sulphur system
Optical waveguide etc. can be used in structure but be not limited to single-layer or multi-layer waveguiding structure.
Compared with prior art, all modules of the present invention are all made of waveguide device realization, and whole system is integrated in one
On the commercial silicon chip of block small size so that in infrared SC compose light source simultaneously at low cost, output beam quality is good, bandwidth
It is wide, simple and compact for structure, convenient for other system compatibles the advantages that, be advantageously implemented the commercialization of light source.
Certainly, above description is not limitation of the present invention, and the present invention is also not limited to the example above.The art
The variations, modifications, additions or substitutions that those of ordinary skill makes in the essential scope of the present invention, should also belong to protection of the present invention
Range.
Claims (8)
- Infrared super continuum source during 1. a kind of on piece is integrated, it is characterised in that：Including being integrated on piece and sequentially connected use In generate the pumping laser generation module of seed light, the pumping laser amplification module for generating high-peak power ultrashort pulse, Laser is composed for the waveguide coupling module of realization efficient coupling between dissimilar materials waveguide and for generating infrared SC in 2-5 μm SC composes generation module.
- Infrared super continuum source during 2. a kind of on piece according to claim 1 is integrated, it is characterised in that：The pumping Pulse laser generation module structure is to be integrated on piece and the successively end to end semiconductor saturable suction for laser mode locking Receive mirror, the positive dispersion waveguide for compensating dispersion, the first wavelength division multiplexer for injecting pump light, for providing amplify the One gain waveguide and wave guide ring mirror for exporting laser；First wavelength division multiplexer, the positive dispersion waveguide and The wave guide ring mirror is all made of alumino-silicate as waveguide substrate material；First gain waveguide uses alumino-silicate Rare earth ion is mixed as waveguide substrate material and by way of ion exchange；The seed light of the wave guide ring mirror output Into the pumping pulse laser amplifying module, the pumping pulse laser generation module uses semiconductor laser conduct Pumping source.
- Infrared super continuum source during 3. a kind of on piece according to claim 2 is integrated, it is characterised in that：The pumping Pulse laser amplification module structure be integrated on piece and be sequentially connected for the pulse stretcher of stretched pulse, for injecting Second wavelength division multiplexer of pump light, the second gain waveguide for providing amplification and the pulse shortener for compressing pulse, The pulse stretcher, second wavelength division multiplexer, the pulse shortener are all made of alumino-silicate as waveguide Host material；Second gain waveguide is mixed in such a way that alumino-silicate is as waveguide substrate material and by ion exchange Enter rare earth ion；The waveguide dispersion of the pulse shortener is negative dispersion, and the waveguide dispersion of the pulse stretcher is just Dispersion；The seed light of the wave guide ring mirror output passes sequentially through the pulse stretcher and second wavelength-division multiplex It is entered after device in second gain fibre, the pumping pulse laser amplifying module uses semiconductor laser conduct Pumping source, pump light are entered by second wavelength division multiplexer in second gain fibre, and described second increases The high-peak power ultrashort pulse of beneficial optical fiber output composes generation module by entering the SC after the waveguide coupling module In.
- Infrared super continuum source during 4. a kind of on piece according to claim 1 is integrated, it is characterised in that：The waveguide Coupling module is optical waveguide coupled for realizing alumino-silicate optical waveguide and sulphur system, and the waveguide coupling module takes evanescent wave to hang down Straight coupling or direct coupling system are realized.
- Infrared super continuum source during 5. a kind of on piece according to claim 1 is integrated, it is characterised in that：The SC spectrums Generation module is the high non-linearity waveguide having in 2-5 mu m wavebands compared with low-loss and smaller dispersion, the high non-linearity wave It leads and film is prepared using magnetron sputtering method or thermal evaporation, then on this basis using exposure coupled ion etching or stripping method It is prepared.
- Infrared super continuum source during 6. a kind of on piece according to claim 1 is integrated, it is characterised in that：The pumping Pulse laser generation module use 1.5 mum wavelengths, 2 mum wavelengths or 1 mum wavelength, the rare earth ion using erbium, holmium, rubidium, Samarium, thulium or ytterbium, mode locking mode are used based on semiconductor saturable absorbing mirror, nonlinear polarization rotation, nonlinear fiber loop mirror Or novel saturable absorber mode realizes high repetition frequency er-doped picosecond or the femtosecond-pulse fiber laser of mode locking.
- Infrared super continuum source during 7. a kind of on piece according to claim 1 is integrated, it is characterised in that：The pumping Pulse laser generation module, the pumping pulse laser amplifying module and SC spectrum generation modules are using basement membrane, high-order The waveguide of mould transmission.
- Infrared super continuum source during 8. a kind of on piece according to claim 1 is integrated, it is characterised in that：The pumping Pulse laser generation module and the pumping pulse laser amplifying module pump mode use forward, backward or two directional pump Method realizes that the pumping pulse laser amplifying module is using single-stage amplification, two-stage amplification or multistage amplification.
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