CN104133336A - On-chip integrated optical digital-to-analog converter based on silicon-based nanowire waveguide - Google Patents

On-chip integrated optical digital-to-analog converter based on silicon-based nanowire waveguide Download PDF

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CN104133336A
CN104133336A CN201410394851.9A CN201410394851A CN104133336A CN 104133336 A CN104133336 A CN 104133336A CN 201410394851 A CN201410394851 A CN 201410394851A CN 104133336 A CN104133336 A CN 104133336A
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waveguide
silica
micro
ring resonator
analog converter
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CN104133336B (en
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周平
杨林
丁建峰
张凡凡
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Institute of Semiconductors of CAS
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Abstract

The invention discloses an on-chip integrated optical digital-to-analog converter based on a silicon-based nanowire waveguide. The on-chip integrated optical digital-to-analog converter comprises N laser devices, a modulation multiplex integral structure and a photoelectric detector. The modulation multiplex integral structure comprises a trunk waveguide L0, N cascaded silicon-based nanowire waveguide micro-ring resonators (MRR1, MRR2...MRRN) and N bent waveguides (L1, L2...LN), the N laser devices are connected with the uploading ends of the N bent waveguides (L1, L2...LN) respectively, the photoelectric detector is connected with the straight-through end of the trunk waveguide L0, and N is a natural number. According to the on-chip integrated optical digital-to-analog converter, the advantages that the silicon-based waveguide is compact in structure, low in power consumption, compatible with the CMOS process and the like are fully achieved, the high speed and high resolution in the DAC process can be achieved, and the integration and miniaturization of the optical DAC can be achieved.

Description

Integrated optics digital to analog converter on sheet based on silica-based nanowire waveguide
Technical field
The invention belongs to optical information processing and high-bandwidth signals processing technology field, relate in particular to integrated optics digital to analog converter on a kind of sheet based on silica-based nanowire waveguide.
Background technology
In recent years, along with improving constantly of informatized life level, the information interaction between the people existing actual physics world and the virtual world of digital information processing and just merge towards variation, become more meticulous and the future development of high speed.Analog to digital converter (the Analog-to-digital Converter of hypervelocity, large resolution, and digital to analog converter (Digital-to-analog Converter ADC), DAC), as the bridge between simulated world and digital world, in the high-bandwidth signals process field such as radio communication, biologic medical, industrial automation, radar and sonar system, Aero-Space, satellite communication, play a part very important.
Traditional electricity digital-to-analogue and modulus conversion technique are subject to the impact of the factors such as quantum tunneling effect, sampling rate, Aperture Jitter, and its property development faces huge bottleneck.Consider that optical transition mode sampling rate is high, Aperture Jitter is little, be not subject to the advantages such as electromagnetic interference (EMI), people have launched a series of research for optics digital-to-analogue and modulus conversion technique, to breaking the technical limitation of electricity conversion regime, for new vitality is injected in the development of the high-bandwidth signals process field such as ultra-wideband communications, High-Speed Signal-Generator, all-optical information processing, sensing network.At optical mode number conversion technical elements, scientific research personnel has carried out research extensively and profoundly with regard to switch technologies such as optics auxiliary type, optical sampling electricity quantification type, electricity sampling optics quantification type, full Optical Sampling and quantification types, forms gradually the theory and technology system of system.
By contrast, the research of optics digital-to-analog conversion aspect is started late, people carry out some useful explorations since the eighties in last century, the early stage research about optics DAC is the method based on free space optical system that British scientist C.L.West proposes, on the basis of the optical system that Osaka, Japan university formed at designed post lens and globe lens afterwards, in conjunction with discrete optical elements such as grating, beam splitter, collimating apparatuss, realize and be spaced apart the full light digital to analog converter that 1.65ps, resolution are 4bit.Although the optical texture based on free space is bulky, and conversion accuracy is not good, and it is as the blank of transfer principle, for the development of high performance optics digital-to-analog conversion technology has indicated direction.
Along with the development of optoelectronic device and optoelectronic integrated technology, people are day by day deep to the research of optics digital-to-analog conversion technology.The basic thought of optics DAC is that every code of numeric field is realized to non-coherent addition according to weight in light territory.On the basis of this ultimate principle, in conjunction with technology such as high speed electro-optical modulation, wavelength-division multiplex, light delay, optical dispersion, derive many employing discrete devices and realize the scheme of optics digital-to-analog conversion.High-speed electro-optic modulator, as photoswitch, is the important prerequisite that realizes high sampling rate optics DAC.University of Illinois of the U.S. and Bell Laboratory (" 12.5GHz optically sampled interference-based photonic arbitrary waveform generator ", IEEE Photonics Technology Letters, Vol.17, Iss.12,2005, pp.2727-2729) for based on lithium niobate (LiNbO 3), high speed Mach Zeng De (Mach-Zehnder, the MZ) modulator of indium phosphide (InP) and their application starts aspect optics DAC research, the signal generator that to have obtained sample frequency be 4bit in 12.5GHz, figure place.In order to realize the π phase reversal of light signal between modulation arm under low-voltage condition, the length of modulator reaches 17mm, for the digital-to-analog conversion demand of n bit resolution, just need to adopt multiple modulators, add after the discrete device such as multiplexer, beam splitter, the volume of optics DAC can be very huge, is difficult to integrated.In addition, California, USA university and IPITEK company (" Digital-to-analog conversion using electrooptic modulators ", IEEE Photonics Technology Letters, Vol.15, Iss.1, 2003, pp.117-119), United States Naval Research Laboratory (Weighted, summing, photonic digital-to-analog converter, Electronics Letters, Vol.42, Iss.1, 2006, pp.54-55), Monash University (" Optical domain digital-to-analog converter for visible light communications using LED arrays ", Vol.1, Iss.2, 2013, pp.92-95 "), Tsing-Hua University of China (" Photonic arbitrary waveform generator based on dispersion ofmultiwavelength pulse sequence ", Optical Engineering, Vol.47, Iss.4, 2008, etc. pp.045004) research institution is for based on light shutter devices such as Mach-Zehnder modulators, multiplexer and demodulation multiplexer, optical dispersion assembly, the optics DAC structure of the discrete components such as LED designs and tests.The DAC experimental system sampling rate obtaining is between 80Msps to 2Gsps, and resolution is between 2bit to 4bit, but owing to being all the discrete devices that adopt, the volume of digital-to-analog conversion system is very huge.
Commercialization electrooptic modulator can be realized higher sampling rate, and researchist adopts discrete device structure He in principle, optics DAC to be proved.But the structure of optics DAC must possess extensibility, realize integrated and miniaturization, could in following high-bandwidth signals process field, bring into play its vital role.Therefore people are doing many effort aspect integrated optics DAC.
Document " All-optical digital-to-analog conversion using nonlinear optical loop mirrors " (IEEE Photonics Technology Letters, Vol.18, Iss.5,2006, pp.703-705) adopting fiber loop mirror to realize resolution is the full light integrated digital to analog converter that 2bit, switching rate are 1MHz, because length and the optical phase of optical fiber are difficult to accurate control, there is restriction in this technology therefore aspect conversion accuracy and extendability.Document " Integrated optical digital-to-analogue converter and its application to pulse pattern recognition " (Electronics Letters, Vol.37, Iss.20,2001, pp.1237-1238) reported the integrated digital-to-analog conversion structure based on silica-based optical waveguide lag line, but realize high-resolution DAC and must adopt longer waveguide, run counter to miniaturization target.In addition,, because the phase differential of light signal after transmission between each waveguide fixed, device can only be operated in a certain fixing sampling rate.
Summary of the invention
(1) technical matters that will solve
In view of this, fundamental purpose of the present invention is to provide integrated optics digital to analog converter on a kind of sheet based on silica-based nanowire waveguide, with give full play to silica-based waveguides compact conformation, low in energy consumption, with the advantage such as CMOS process compatible, solve high speed, the high resolution problems of DAC process, and solve the integrated and miniaturization issues of optics DAC.
(2) technical scheme
For achieving the above object, the invention provides integrated optics digital to analog converter on a kind of sheet based on silica-based nanowire waveguide, on this sheet, integrated optics digital to analog converter comprises N laser instrument, a modulation multiplex integrative-structure, an and photodetector, wherein, this modulation multiplex integrative-structure comprises a main line waveguide L0, the silica-based nanowire waveguide micro-ring resonator (MRR1 of N cascade, MRR2, ... MRRN) and N bar curved waveguide (L1, L2, ... LN), N laser instrument respectively with N curved waveguide (L1, L2, ... LN) upload end be connected, photodetector is connected with the straight-through end of main line waveguide L0, N is natural number.
In such scheme, continuous single wavelength light signal of N power invariability of described N laser instrument output, continuous single wavelength light signal of this N power invariability be coupled into respectively N bar curved waveguide (L1, L2 ... LN) upload end, wherein i road (i=1,2,3 ... N) output wavelength of laser instrument is λ i, power is P/2 n-i.
In such scheme, described wavelength is λ ilight signal be coupled into i silica-based nanowire waveguide micro-ring resonator MRRi, and by i silica-based nanowire waveguide micro-ring resonator MRRi modulation multiplex in main line waveguide L0.
In such scheme, on each silica-based nanowire waveguide micro-ring resonator, there is titanium nitride heat and adjust structure, binary electricity pulse signal (Electrical Pulse Signal, EPS) after amplifying and being biased signal, parallel by bit is carried in the titanium nitride heat tune structure of silica-based nanowire waveguide micro-ring resonator, and the light signal in silica-based nanowire waveguide micro-ring resonator is modulated.
In such scheme, N bit binary number signal step-by-step to be converted be carried in respectively N silica-based nanowire waveguide micro-ring resonator (MRR1, MRR2 ... MRRN) on, by thermo-optic effect or electrooptical effect, the resonance wavelength of micro-ring resonator is regulated, when micro-ring resonator MRRi is at operation wavelength λ iwhile locating not resonance, wavelength is λ ilight signal affected by micro-ring resonator, directly exported by downloading end; In the time of micro-ring resonator MRRi resonance, wavelength is λ ilight signal be coupled into disc waveguide, and then be coupled to after main line waveguide by straight-through end output.
In such scheme, the light signal of straight-through end output receives through photodetector and carries out after opto-electronic conversion, obtains inputting the simulating signal of digital quantity conversion gained.
In such scheme, each silica-based nanowire waveguide micro-ring resonator has wavelength selectivity, and i silica-based nanowire waveguide micro-ring resonator MRRi is only λ to wavelength ilight signal work.
(3) beneficial effect
Can find out from technique scheme, the present invention has following beneficial effect:
1) the present invention proposes integrated optics digital to analog converter on a kind of sheet based on silica-based nanowire waveguide, the correlation technique research that current existing document is reported all realizes based on discrete devices such as electrooptic modulator, multiplexer, fibre delay lines, systems bulky, is difficult to realize miniaturization.On the sheet based on silica-based nanowire waveguide that the present invention proposes, processing technology and the CMOS processing technology compatibility of integrated optics digital to analog converter, can realize integrated and miniaturization.
2) the present invention proposes integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide, wavelength restructural characteristic and the filtering characteristic of microring resonator array are given full play to, can realize the high-speed parallel modulation of multiple wavelength light signals simultaneously and upload multiplexing function, making the conversion figure place of integrated optics digital to analog converter there is extensibility.
Brief description of the drawings
Fig. 1 is the schematic diagram according to the modulated structure of the single silica-based nanowire optical waveguide micro-ring resonator formation of the embodiment of the present invention.
Fig. 2 is the sectional view according to the circumferential wave heat conduction preparer structure of the micro-ring resonator of the embodiment of the present invention.
Fig. 3 is the schematic diagram according to integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide of the embodiment of the present invention.
Fig. 4 is the curve map according to input digital quantity-output analog quantity of integrated digital to analog converter on the 3bit sheet of the embodiment of the present invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
It should be noted that, in accompanying drawing or instructions description, similar or identical part is all used identical figure number.The implementation that does not illustrate in accompanying drawing or describe is form known to a person of ordinary skill in the art in affiliated technical field.In addition, although the demonstration of the parameter that comprises particular value can be provided herein, should be appreciated that, parameter is without definitely equaling corresponding value, but can in acceptable error margin or design constraint, be similar to corresponding value.In addition, the direction term of mentioning in following examples, for example " on ", D score, 'fornt', 'back', " left side ", " right side " etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is to be not used for limiting the present invention for illustrating.
What the present invention adopted aspect materials processing is silicon-on-insulator (Silicon on Insulator, SOI) technology, and the Refractive Index of Material of SOI waveguide core layer silicon is 3.5, and covering is air or silicon dioxide, and the refractive index of the two is respectively 1 and 1.44.Because the refringence between covering and sandwich layer is very large, the Nanowire Waveguides structure based on SOI technology has very strong light field limitation capability and very low bending loss.
Fig. 1 is curved waveguide Li, micro-ring resonator (Micro-ring resonator, MRR) the single modulated structure that MRRi and main line waveguide L0 form, in input, load port is the light signal of a fixed wave length, firm power, light signal enters after waveguide Li, propagates forward along the direction of Li.Because SOI Nanowire Waveguides refringence is large, light field limitation capability is strong, only has a small amount of evanescent wave to permeate into outside waveguide.When light signal is during near disc waveguide, because light field can be to the high regional spread of refractive index, light field in waveguide Li is coupled into some in disc waveguide by evanscent field, and the signal in micro-ring resonator MRRi also can be coupled in main line waveguide L0 by evanscent field.If the wavelength of light signal meets condition of resonance (m* λ=n eff* 2 π * R, m is positive integer, n efffor the effective refractive index of waveguide, the radius that R is micro-ring resonator), light pulse is propagated after some circles in micro-ring resonator MRRi, and luminous energy will be almost all coupled in MRRi by waveguide Li, and is coupled in main line waveguide L0 by disc waveguide MRRi.The light signal that does not meet resonance wavelength can not be subject to the impact of micro-ring resonator MRRi, is directly exported by downloading end, and is dissipated in air by the grating coupler of downloading end.What more than analyze is the Static performance characteristic of micro-ring modulated structure, be by straight-through end output after MRRi uploads some wavelength signals (wavelength meets condition of resonance), some wavelength signals (wavelength does not meet condition of resonance) is not uploaded, not in straight-through end output.
When real work, the wavelength that enters the light signal of waveguide Li is fixing λ i.Need to make the resonance wavelength of MRRi rdynamically adjustable, make λ rvalue at λ irand λ i≠ λ rbetween switch.The radius of micro-ring resonator is just decided after technique completes, by condition of resonance formula m* λ=n eff* 2 π * R are known, regulate resonance wavelength to realize dynamic filter, can only change by the effective refractive index of adjusting disc waveguide the resonance wavelength of micro-ring resonator, and effective refractive index are relevant with Refractive Index of Material.The present invention can take two kinds of methods to change the refractive index of waveguide material: the one, realize by thermo-optic effect, by to waveguide material heating (concrete way be in silicon waveguide by MOCVD deposit layer of metal as heating electrode) to change the temperature of material, thereby change its refractive index.The 2nd, by carrier injection or extract and change the refractive index (electrooptical effect) of material, generally, in High Speed System, when integrated DAC needs high sampling rate, adopt electrooptical effect.
The embodiment of the present invention is utilized the principle of work of thermo-optic effect funerary objects part.When giving silicon-based micro ring optical waveguide when heating, the refractive index of silicon materials increases, as shown in Figure 1 single micro-ring resonator in the time not heating, the wavelength (λ of input optical signal i) be not equal to the resonance wavelength (λ of micro-ring resonator t), i.e. λ i≠ λ r, MRRi is in disresonance state (logical zero), not output optical signal of straight-through end.In the time that micro-ring resonator heats, harmonic peak produces mobile, makes λ ir, MRRi, in resonant condition (logical one), leads directly to end output optical signal.Like this, the electric logical signal being carried on MRRi has produced modulated light signal at straight-through end.
Fig. 2 is the sectional view according to the circumferential wave heat conduction preparer structure of the micro-ring resonator of the embodiment of the present invention, powers up rear metal electrode heating, and thermal field conducts to waveguide, and the temperature of waveguide is changed, the effective refractive index n of disc waveguide effchange, the resonance wavelength of micro-ring resonator rchange thereupon, thereby realize the dynamic filter of MRRi.Preferably, the material that metal electrode layer adopts is titanium nitride (TiN).
Fig. 3 is the schematic diagram according to integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide of the embodiment of the present invention, on this sheet, integrated optics digital to analog converter comprises N laser instrument (Laser Diode, LD), a modulation multiplex integrative-structure, an and photodetector, wherein, this modulation multiplex integrative-structure comprises a main line waveguide L0, the silica-based nanowire waveguide micro-ring resonator (MRR1 of N cascade, MRR2, ... MRRN) and N bar curved waveguide (L1, L2, ... LN), N laser instrument respectively with N curved waveguide (L1, L2, ... LN) upload end be connected, photodetector is connected with the straight-through end of main line waveguide L0, N is natural number.
Set forth the principle of work of this device below by thermo-optic effect.Continuous single wavelength light signal of N power invariability of N laser instrument output, continuous single wavelength light signal of this N power invariability be coupled into respectively N bar curved waveguide (L1, L2 ... LN) upload end, wherein i road (i=1,2,3 ... N) output wavelength of laser instrument is λ i, power is P/2 n-i.Wavelength is λ ilight signal be coupled into i silica-based nanowire waveguide micro-ring resonator MRRi, and by i silica-based nanowire waveguide micro-ring resonator MRRi modulation multiplex in main line waveguide L0.On each silica-based nanowire waveguide micro-ring resonator, there is titanium nitride heat and adjust structure, binary electricity pulse signal (Electrical Pulse Signal, EPS) after amplifying and being biased signal, parallel by bit is carried in the titanium nitride heat tune structure of silica-based nanowire waveguide micro-ring resonator, and the light signal in silica-based nanowire waveguide micro-ring resonator is modulated.
N bit binary number signal step-by-step to be converted be carried in respectively N silica-based nanowire waveguide micro-ring resonator (MRR1, MRR2 ... MRRN) on, by thermo-optic effect or electrooptical effect, the resonance wavelength of micro-ring resonator is regulated, when micro-ring resonator MRRi is at operation wavelength λ iwhile locating not resonance, wavelength is λ ilight signal affected by micro-ring resonator, directly exported by downloading end; In the time of micro-ring resonator MRRi resonance, wavelength is λ ilight signal be coupled into disc waveguide, and then be coupled to after main line waveguide by straight-through end output.The light signal of straight-through end output receives through photodetector and carries out after opto-electronic conversion, obtains inputting the simulating signal of digital quantity conversion gained.
In the present invention, the digital quantity figure place of input digital to analog converter is N position (bit), and bit (i-1) position is carried in the heat of i MRR and adjusts in structure.Each silica-based nanowire waveguide micro-ring resonator has wavelength selectivity, and for example i silica-based nanowire waveguide micro-ring resonator MRRi is only λ to wavelength ilight signal work.When micro-ring resonator MRRi is at operation wavelength λ iwhile locating not resonance, wavelength is λ ilight signal affected by micro-ring resonator, directly exported by downloading end; In the time of micro-ring resonator MRRi resonance, wavelength is λ ilight signal be coupled into disc waveguide, and then be coupled to after main line waveguide L0 by straight-through end output; The light signal of other wavelength is almost dissipated by the grating coupler terminal of downloading end insusceptibly.All light signals that occur to resonate with micro-ring resonator are realized non-coherent addition at straight-through end after being uploaded, and result is received by photodetector.Order, in the time of micro-ring resonator resonance, is carried in the digital quantity a on its modulated structure ibe 1, when it is not when resonance, the digital quantity a of loading ibe 0.Straight-through end output power is by shown in formula ().
Pout = ( Σ 1 N a 1 · 2 i - 1 ) · P / 2 N - 1 Formula (one)
Formula (one) is incoherent light and is weighted the algebraic expression of stack according to input digital quantity, and this structure can complete optics analog conversion function as seen.
More than for not considering the mode of operation under the ideal state of attenuation loss and coupling loss, before real system work, the modulating unit that need to form each micro-ring resonator is demarcated, and opens successively laser instrument LDi (i=1,2,3...N), and make corresponding input bit position, bit (i-1) is set to logical one, and MRRi is placed in to resonant condition, when laser instrument LDi is opened, the luminous power that detector receives is P 0/ 2 n-i, P 0value according to the dynamic range of detector determine, in the dynamic range of detector.
Fig. 4 is the curve map according to input digital quantity-output analog quantity of integrated digital to analog converter on the 3bit sheet of the embodiment of the present invention, in figure, B curve is the step signal producing according to input digital quantity, and A curve is the simulating signal that step signal obtains after low-pass filter is level and smooth.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.

Claims (7)

1. integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide, it is characterized in that, on this sheet, integrated optics digital to analog converter comprises N laser instrument, a modulation multiplex integrative-structure, an and photodetector, wherein, this modulation multiplex integrative-structure comprises a main line waveguide L0, the silica-based nanowire waveguide micro-ring resonator (MRR1 of N cascade, MRR2, ... MRRN) and N bar curved waveguide (L1, L2, ... LN), N laser instrument respectively with N curved waveguide (L1, L2, ... LN) upload end be connected, photodetector is connected with the straight-through end of main line waveguide L0, N is natural number.
2. integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide according to claim 1, it is characterized in that, continuous single wavelength light signal of N power invariability of described N laser instrument output, continuous single wavelength light signal of this N power invariability be coupled into respectively N bar curved waveguide (L1, L2 ... LN) upload end, wherein i road (i=1,2,3 ... N) output wavelength of laser instrument is λ i, power is P/2 n-i.
3. integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide according to claim 2, is characterized in that, described wavelength is λ ilight signal be coupled into i silica-based nanowire waveguide micro-ring resonator MRRi, and by i silica-based nanowire waveguide micro-ring resonator MRRi modulation multiplex in main line waveguide L0.
4. according to integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide described in claim 1 or 3, it is characterized in that, on each silica-based nanowire waveguide micro-ring resonator, there is titanium nitride heat and adjust structure, binary electricity pulse signal (Electrical Pulse Signal, EPS) after amplifying and being biased signal, parallel by bit is carried in the titanium nitride heat tune structure of silica-based nanowire waveguide micro-ring resonator, and the light signal in silica-based nanowire waveguide micro-ring resonator is modulated.
5. integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide according to claim 4, it is characterized in that, N bit binary number signal step-by-step to be converted be carried in respectively N silica-based nanowire waveguide micro-ring resonator (MRR1, MRR2 ... MRRN) on, by thermo-optic effect or electrooptical effect, the resonance wavelength of micro-ring resonator is regulated, when micro-ring resonator MRRi is at operation wavelength λ iwhile locating not resonance, wavelength is λ ilight signal affected by micro-ring resonator, directly exported by downloading end; In the time of micro-ring resonator MRRi resonance, wavelength is λ ilight signal be coupled into disc waveguide, and then be coupled to after main line waveguide by straight-through end output.
6. integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide according to claim 5, it is characterized in that, the light signal of straight-through end output receives through photodetector and carries out after opto-electronic conversion, obtains inputting the simulating signal of digital quantity conversion gained.
7. integrated optics digital to analog converter on the sheet based on silica-based nanowire waveguide according to claim 1, it is characterized in that, each silica-based nanowire waveguide micro-ring resonator has wavelength selectivity, and i silica-based nanowire waveguide micro-ring resonator MRRi is only λ to wavelength ilight signal work.
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