CN108588715A - A kind of nano combined cutter coat and preparation method thereof containing cobalt titanium nitrogen aluminium - Google Patents

A kind of nano combined cutter coat and preparation method thereof containing cobalt titanium nitrogen aluminium Download PDF

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Publication number
CN108588715A
CN108588715A CN201810400518.2A CN201810400518A CN108588715A CN 108588715 A CN108588715 A CN 108588715A CN 201810400518 A CN201810400518 A CN 201810400518A CN 108588715 A CN108588715 A CN 108588715A
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containing cobalt
nano combined
cobalt titanium
combined cutter
titanium nitrogen
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黄帅
杨微
胡斌
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Jiujiang Vocational and Technical College
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Jiujiang Vocational and Technical College
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Priority to CN201810400518.2A priority Critical patent/CN108588715A/en
Publication of CN108588715A publication Critical patent/CN108588715A/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition

Abstract

The invention discloses a kind of nano combined cutter coats containing cobalt titanium nitrogen aluminium, transition zone and body layer including being sequentially deposited to tool matrix surface, wherein, the material of the transition zone is Ti TiN, and the body layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions.The invention also discloses the preparation methods of the nano combined cutter coat containing cobalt titanium nitrogen aluminium.Nano combined cutter coat containing cobalt titanium nitrogen aluminium prepared by the present invention has excellent wear-resisting property, while hardness substantially prolongs cutting-tool's used life up to 33GPa, and simple process and low cost has a vast market foreground.

Description

A kind of nano combined cutter coat and preparation method thereof containing cobalt titanium nitrogen aluminium
Technical field
The present invention relates to Cutting-Tool Coating Technology field, specifically a kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium and Preparation method.
Background technology
Cutter is referred to as " tooth " of equipment manufacture, and the promotion of cutting-tool engineering energy level is to promoting entire equipment manufacture Progress and horizontal raising it is most important.Cutting-tool engineering energy level is promoted, cutting ability is crucial, and Tool in Cutting performance is very big Cutter material is depended in degree.Common Use Tools material is divided into following a few classes:(1) high speed steel material；(2) cemented carbide material； (3) ceramic cutting tool material；(4) ultrahard cutting tool material.
In cutting process, cutter will bear high temperature, high pressure, friction and the effect of impact, and therefore, cutter must have high hard Degree and wearability, enough intensity and toughness, good heat resistance and thermal shock resistance properties.Wherein, hard alloy cutter is as normal Cutter is widely used in each production field, but the hardness of hard alloy cutter and wearability are not very high, Wu Faman Foot some need in the Cutting Process of high rigidity and high-wearing feature.In order to improve the performance of hard alloy cutter, in cutting tool Matrix on the excellent coating material of paintability become the method for common improvement cutting tool performance.The prior art is searched Suo Faxian:For improve coating performance, existing technology, such as United States Patent (USP) US6565957, US5766782 and Chinese patent 95108982.X etc. combines to form composite coating using TiN with the aluminium oxide of 0.1-0.8nm thickness, but due to the hardness of aluminium oxide Lead to being decreased obviously for coating material hardness and elastic modulus far below nitride, to limit answering for the coating material With.Therefore, a kind of overall performance that there is the cutter coat of high rigidity and excellent wear-resisting property to be used to improve cutter is researched and developed, is had Highly important meaning.
Invention content
The purpose of the present invention is to provide a kind of nano combined cutter coat and preparation method thereof containing cobalt titanium nitrogen aluminium, with Solve the problems mentioned above in the background art.
To achieve the above object, the present invention provides the following technical solutions：
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the transition zone be Ti-TiN, the body layer by it is multiple alternately superposition TiN coatings and AlON coatings are constituted.
As a further solution of the present invention：The material of the tool matrix is hard alloy, stainless steel, high-speed steel or mould Has one kind in steel.
As further scheme of the invention：The thickness of the transition zone is 100-500nm.
As further scheme of the invention：The thickness of the TiN coatings is 2-9nm, the thickness of the AlON coatings Degree is 1-8nm.
As further scheme of the invention：The overall thickness of the nano combined cutter coat containing cobalt titanium nitrogen aluminium is 1-5μm。
The preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment, time 8-20min, after sandblasting in absolute ethyl alcohol into Row is cleaned by ultrasonic, and then deionized water is cleaned 3-5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 5-40rpm, is evacuated down to 4 × 10-3It is passed through argon gas after Pa, adjusts vacuum Room is 0.4Pa, then opens heater and be warming up to 310 DEG C, matrix biasing 300V, opens Ti targets, depositing Ti-after sputter clean TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and alternately adjustment stops tool matrix Stay in Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, i.e., .
As further scheme of the invention：In step 1), the time of the ultrasonic cleaning is 10-15min.
As further scheme of the invention：In step 1), the grains of sand of micro- blasting treatment are 8-25 μm of granularity Aluminium oxide.
As further scheme of the invention：In step 2), the time of the sputter clean is 30-40min.
Purposes of the nano combined cutter coat containing cobalt titanium nitrogen aluminium in preparing cutter product.
Compared with prior art, the beneficial effects of the invention are as follows：
Nano combined cutter coat containing cobalt titanium nitrogen aluminium prepared by the present invention has excellent wear-resisting property, while hardness Up to 33GPa, cutting-tool's used life is substantially prolonged, simple process and low cost has a vast market foreground.
Specific implementation mode
Technical scheme of the present invention is described in more detail With reference to embodiment.
Embodiment 1
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 300nm, the TiN coatings Thickness is 2nm, and the thickness of the AlON coatings is 8nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 3 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Embodiment 2
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 300nm, the TiN coatings Thickness is 5nm, and the thickness of the AlON coatings is 5nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 3 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Embodiment 3
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 300nm, the TiN coatings Thickness is 9nm, and the thickness of the AlON coatings is 1nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 3 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Embodiment 4
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 300nm, the TiN coatings Thickness is 7nm, and the thickness of the AlON coatings is 3nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 3 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Embodiment 5
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 100nm, the TiN coatings Thickness is 7nm, and the thickness of the AlON coatings is 3nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 3 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Embodiment 6
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 500nm, the TiN coatings Thickness is 7nm, and the thickness of the AlON coatings is 3nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 3 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Embodiment 7
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 300nm, the TiN coatings Thickness is 7nm, and the thickness of the AlON coatings is 3nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 1 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Embodiment 8
A kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, including it is sequentially deposited to the transition zone on tool matrix surface And body layer, wherein the material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, the main body Layer is made of the TiN coatings and AlON coatings of multiple alternately superpositions, and the thickness of the transition zone is 300nm, the TiN coatings Thickness is 7nm, and the thickness of the AlON coatings is 3nm, the nano combined cutter coat containing cobalt titanium nitrogen aluminium it is total Thickness is 5 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, are then turned on Al2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and tool matrix is alternately adjusted It is whole to rest on Ti targets and Al2O3Before target, difference alternating deposit TiN coatings and AlON coatings, after coating deposits, natural cooling, Up to the nano combined cutter coat containing cobalt titanium nitrogen aluminium.
Comparative example 1
A kind of nano combined cutter coat, including it is sequentially deposited to the transition zone and body layer on tool matrix surface, wherein The material of the tool matrix is hard alloy, and the material of the transition zone is Ti-TiN, and the body layer is TiN coating structures At the thickness of the transition zone is 300nm, and the overall thickness of the nano combined cutter coat containing cobalt titanium nitrogen aluminium is 3 μm.
In the present embodiment, the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium, steps are as follows：
1) it pre-processes：Tool matrix is subjected to micro- blasting treatment 15min, the grains of sand of micro- blasting treatment are 18 μm of granularity Aluminium oxide, ultrasonic cleaning 12min is carried out after sandblasting in absolute ethyl alcohol, then deionized water is cleaned 5 times, and drying is for use；
2) depositing coating：It will be uniformly put on rack by pretreated tool matrix in step 1), be then charged into multi sphere In ion plating equipment, and make rack with the rotational speed of 15rpm, is evacuated down to 4 × 10-3It is passed through Ar gas after Pa, adjusts vacuum chamber It for 0.4Pa, then opens heater and is warming up to 310 DEG C, matrix biasing 300V, open Ti targets, deposited after sputter clean 35min Ti-TiN transition zones, then by controlling N2Flow valve makes operating pressure be 0.4Pa, before tool matrix rests on Ti targets, deposition TiN coatings, coating deposit after, natural cooling to get.
Performance detection is carried out to the nano combined cutter coat prepared by embodiment 4 and comparative example 1.Using nano-hardness tester Micro-hardness measurement is carried out, the single layer TiN coating hardness for measuring identical hard alloy cutter matrix surface deposition in comparative example 1 is 23GPa measures the nano combined cutter coat hardness containing cobalt titanium nitrogen aluminium prepared by embodiment 4 and reaches 33GPa, applied compared to TiN Its hardness of layer promotes about 0.5 times.
Life span comparison's experiment is carried out to the nano combined cutter coat prepared by embodiment 4 and comparative example 1, use is uncoated Hard alloy cutter as a comparison, in the life experiment of high-speed milling hardened steel, milling of materials be hardened steel SKD11, firmly Degree is 62HRC, cutting linear velocity 200m/s, and using 200 μm of wear of the tool flank as service life benchmark, the Tool in Cutting of non-coating is long Degree is 8.2m, and the hard alloy cutter milling length for being coated with single layer TiN coatings is 34m, its milling length of the cutter of embodiment 4 reaches 65m improves nearly 8 times compared to its service life of non-coated tool, and nearly 1 times is improved compared to single layer TiN coated cutting tools.
Nano combined cutter coat containing cobalt titanium nitrogen aluminium prepared by the present invention has excellent wear-resisting property, while hardness Up to 33GPa, cutting-tool's used life is substantially prolonged, simple process and low cost has a vast market foreground.
The better embodiment of the present invention is explained in detail above, but the present invention is not limited to above-mentioned embodiment party Formula, one skilled in the relevant art within the scope of knowledge, can also be without departing from the purpose of the present invention Various changes can be made.

Claims (10)

1. a kind of nano combined cutter coat containing cobalt titanium nitrogen aluminium, which is characterized in that including being sequentially deposited to tool matrix table The transition zone and body layer in face, wherein the material of the transition zone is Ti-TiN, and the body layer is by multiple alternately superpositions TiN coatings and AlON coatings are constituted.
2. the nano combined cutter coat according to claim 1 containing cobalt titanium nitrogen aluminium, which is characterized in that the cutter base The material of body is one kind in hard alloy, stainless steel, high-speed steel or mould steel.
3. the nano combined cutter coat according to claim 2 containing cobalt titanium nitrogen aluminium, which is characterized in that the transition zone Thickness be 100-500nm.
4. the nano combined cutter coat according to claim 3 containing cobalt titanium nitrogen aluminium, which is characterized in that the TiN is applied The thickness of layer is 2-9nm, and the thickness of the AlON coatings is 1-8nm.
5. the nano combined cutter coat containing cobalt titanium nitrogen aluminium according to Claims 2 or 3 or 4, which is characterized in that described The overall thickness of nano combined cutter coat containing cobalt titanium nitrogen aluminium is 1-5 μm.
6. a kind of preparation method of the nano combined cutter coat according to any one of claims 1 to 5 containing cobalt titanium nitrogen aluminium, It is characterized in that, steps are as follows：
1）Pretreatment：Tool matrix is subjected to micro- blasting treatment, time 8-20min is surpassed after sandblasting in absolute ethyl alcohol Sound cleans, and then deionized water is cleaned 3-5 times, and drying is for use；
2）Depositing coating：By step 1）It is middle to be uniformly put on rack by pretreated tool matrix, it is then charged into multi sphere ion In coating machine, and make rack with the rotational speed of 5-40rpm, is evacuated down to 4 × 10-3Argon gas is passed through after Pa, adjusting vacuum chamber is 0.4Pa, then open heater and be warming up to 310 DEG C, matrix biasing 300V, opens Ti targets, depositing Ti-TiN mistakes after sputter clean Layer is crossed, Al is then turned on2O3Target, by controlling N2Flow valve makes operating pressure be 0.4Pa, and alternately adjustment rests on tool matrix Ti targets and Al2O3Before target, alternating deposit TiN coatings and AlON coatings respectively, after coating deposits, natural cooling to get.
7. the preparation method of the nano combined cutter coat according to claim 6 containing cobalt titanium nitrogen aluminium, which is characterized in that Step 1）In, the time of the ultrasonic cleaning is 10-15min.
8. the preparation method of the nano combined cutter coat containing cobalt titanium nitrogen aluminium described according to claim 6 or 7, feature exist In step 1）In, the grains of sand of micro- blasting treatment are the aluminium oxide of 8-25 μm of granularity.
9. the preparation method of the nano combined cutter coat according to claim 8 containing cobalt titanium nitrogen aluminium, which is characterized in that Step 2）In, the time of the sputter clean is 30-40min.
10. a kind of nano combined cutter coat according to any one of claims 1 to 5 containing cobalt titanium nitrogen aluminium is preparing cutter production Purposes in product.
CN201810400518.2A 2018-04-28 2018-04-28 A kind of nano combined cutter coat and preparation method thereof containing cobalt titanium nitrogen aluminium Pending CN108588715A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295502A (en) * 1988-09-28 1990-04-06 Ngk Spark Plug Co Ltd High speed cutting chip
CN1923508A (en) * 2006-09-21 2007-03-07 上海交通大学 TiN/AlON nano multilayer coating for cutting tool
CN102605324A (en) * 2012-03-30 2012-07-25 马鞍山多晶金属材料科技有限公司 Multi-arc ion plating superlattice nanometer composite coating and preparation method of multi-arc ion plating superlattice nanometer composite coating
CN103317792A (en) * 2013-06-08 2013-09-25 武汉理工大学 Non-vacuum high-temperature solar selective absorption periodic coating and preparation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295502A (en) * 1988-09-28 1990-04-06 Ngk Spark Plug Co Ltd High speed cutting chip
CN1923508A (en) * 2006-09-21 2007-03-07 上海交通大学 TiN/AlON nano multilayer coating for cutting tool
CN102605324A (en) * 2012-03-30 2012-07-25 马鞍山多晶金属材料科技有限公司 Multi-arc ion plating superlattice nanometer composite coating and preparation method of multi-arc ion plating superlattice nanometer composite coating
CN103317792A (en) * 2013-06-08 2013-09-25 武汉理工大学 Non-vacuum high-temperature solar selective absorption periodic coating and preparation method thereof

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Application publication date: 20180928