CN103506640A - Cutting tool with coating and manufacturing method of cutting tool - Google Patents

Cutting tool with coating and manufacturing method of cutting tool Download PDF

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Publication number
CN103506640A
CN103506640A CN201310301614.9A CN201310301614A CN103506640A CN 103506640 A CN103506640 A CN 103506640A CN 201310301614 A CN201310301614 A CN 201310301614A CN 103506640 A CN103506640 A CN 103506640A
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coating
layer
cutting element
tibcn
thickness
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CN201310301614.9A
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CN103506640B (en
Inventor
卢志红
陈龙腾
陈艺聪
郑清平
张守全
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Xiamen Golden Egret Special Alloy Co Ltd
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Xiamen Golden Egret Special Alloy Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

The invention discloses a cutting tool with a coating. The cutting tool with the coating comprises a substrate and one or more hard material coatings coating the substrate, wherein the hard material coating at least comprises a TiBCN layer deposited through a hot CVD method, the thickness of the TiBCN layer is at least 0.1 micrometer, and the boron content in the TiBCN layer is between 0.5at-% and 10at-%. At least one hard material coating containing the TiBCN layer is provided, the hardness of the coating is obviously improved due to the addition of boron. Meanwhile, the coating is better in abrasion resistance than TiCN. In addition, after surface postprocessing, the coating can provide excellent improved cutting performance for the tool.

Description

Cated cutting element of a kind of tool and preparation method thereof
Technical field
The present invention relates to a kind of coated cutting tool for metal processing, particularly relate to a kind of cutting element with high rigidity and wear-resisting coating and preparation method thereof.
Background technology
For improving the wearability of instrument, people prepare coating by CVD method, thereby apply and have high-wear resistance N-C hard material coating on its surface, as TiC, TiN, TiC xn yand Al 2o 3deng, the hardness of these coatings is generally 15GPa to 40GPa.Wearability N-C hard material coating is deposited in wearability substrate conventionally, and the wear-resisting material of substrate comprises carbide alloy, cermet, hard material and tool steel etc.
The physics of coating or chemical vapour deposition (CVD) can be prepared the wearability N-C hard material coating consisting of carbide, nitride, boride, silicide and oxide on suitable matrix.Physical gas-phase deposition is carried out physics ablation and is introduced reactant gas component by the coating source to suitable, thereby between 300 ℃ to 500 ℃, on base material to be coated, apply required hard material, can realize the extensive selection of N-C hard material coating chemical composition, but cannot realize thick film deposition, complicated geometrical shaped body be applied to uniform coating more difficult.
Chemical vapour deposition (CVD) typically refers to hot CVD method, finger is in the reaction cavity of 700 ℃ to 1050 ℃ of temperature ranges, under normal pressure or negative pressure, by means of the admixture of gas being formed by reactive component (this admixture of gas issues solution estranged in application temperature) by corresponding hard material blanket deposition on base material.The CVD technique of thermal activation is because its temperature high deposition shows unique technology characteristics, nitride, carbide, carbonitride and the carbon nitrogen oxide of DuiIVB family (particularly Ti element) are especially favourable, these N-C hard material coatings adopt single or multiple lift design conventionally, and can coordinate and be widely used in cutting element with alumina layer.These key characters that adopt CVD technique to prepare N-C hard material coating are to have obvious crystalline structure, conventionally be shown as obvious crystal face preferentially, and its columnar crystal structure is more sturdy than PVD, also therefore caused more coarse surface, by suitable surperficial aftertreatment technology, as used aluminium oxide can make this coarse smooth surface as the wet abrasive blasting of medium or polishing etc.The hard coating material that contains boron element by use, can improve the hardness of coating, thereby improves the wearability of coating.
Publication number is that the wearability profiled part that main body and hard material coating by hard Metal Substrate form has been described in the patent application of DE25 25 185, this hard material coating consists of mutual two stacked subgrades, skin in these two subgrades consists of aluminium oxide and/or zirconia, is positioned at inner subgrade and consists of the diboride of one or more borides, especially element titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum and tungsten.
Publication number is that a kind of hard metal object through applying with multi-layered hard material coating has been described in the patent application of EP0 015 451, the skin of this multi-layered hard material coating is that thickness is the boride of 5 μ m to 20 μ m, and this boride is selected from titanium boride, hafnium boride, zirconium boride and tantalum boride.
Publication number is that a kind of TiBN layer making by CVD technique has been described in the patent application of DE102 22 347, and in layer, the content of boron is more than or equal to 6 % by weight.
By existing public technology, can draw such conclusion: in coating, add boron element, can significantly improve hardness.In coating, the more high and thick degree of boron content is thicker, and the hardness of coating is higher, therefore more can improve the wearability of coating.But, adopt CVD method deposition Boron Containing Coating can make boron diffuse to cement carbide substrate, form fragility phase or the η phase of boracic, the service life of largely reducing sintered-carbide tool.Therefore the boron content, adding in coating is limited mutually not produce fragility.Except reducing the content of boron element, also can be by the design of laminated coating, adopt the N-C hard material coating of boracic not as diffusion impervious layer, can further reduce the risk of embrittlement.
Too high boron content, except having the risk that embrittlement occurs, when cutting element processing produces high temperature, also may cause boron and iron to react.
Summary of the invention
The object of the invention is to overcome the deficiency of prior art, cated cutting element of a kind of tool and preparation method thereof is provided, by the hard-coating layer of at least one TiBCN layer is set in coating, make this coating because the hardness that adds of boron element is promoted significantly, make this coating there is outstanding wearability than TiCN simultaneously, and coating is through surperficial post processing, can provide excellent improvement cutting ability for instrument.
The technical solution adopted for the present invention to solve the technical problems is: the cated cutting element of a kind of tool, comprise substrate and be coated in a suprabasil layer or the N-C hard material coating of a plurality of layers, described N-C hard material coating at least comprises that one deposits by hot CVD method, and thickness is at least the TiBCN layer of 0.1 μ m, in described TiBCN layer, boron content is 0.5at-% to 10at-%.
The crystal grain of described TiBCN layer is the granular to columnar configurations of < 2 μ m, and the crystal grain of preferred TiBCN layer is the thin columnar configurations of < 500nm.
The thickness of described TiBCN layer is 0.1 μ m to 15 μ m, and the thickness of preferred TiBCN layer is 1 μ m to 8 μ m.
More than described TiBCN layer micro-vickers hardness reaches 30Gpa.
A cated cutting element, forms by applying at least partly cated sintered-carbide, cermet or ceramic bases, described total coating thickness 1-25 μ m, and preferred 3-18 μ m, this coating at least comprises one deck TiB xc yn zlayer, TiB xc yn z(X > 0) layer is formed by MT-CVD process deposits.
The first coating, the second coating and the 3rd coating that described coating is outwards distributed successively by substrate form; Described the first coating comprises the one or more layers that are selected from titanium nitride or titanium carbonitride, the first coating layer thickness 0.1-3 μ m, and preferred thickness is 0.2-1.0 μ m; The TiB that described the second coating is thin column crystal xc yn zlayer, the second coating layer thickness 2 μ m to 10 μ m, the preferred thickness of the second coating is 2 μ m to 8 μ m; Described the 3rd coating is that thickness is the painted top layer of 0.1-3 μ m, and the preferred thickness of the 3rd coating is 0.3-1.5 μ m.
Described the 3rd coating is TiN, TiC, and TiCN, ZrN or HfN coating, adopt CVD or PVD method deposition to form, and preferably adopts CVD method deposition to form.
A preparation method for the cated cutting element of tool, is the N-C hard material coating that applies a layer or a plurality of layers in substrate, at least comprises a TiB who adopts MT-CVD method to be prepared from N-C hard material coating xc yn zlayer, its preparation temperature is 800-950 ℃, and adopts BCl 3as forming this Ceng Yongpeng source, described BCl 3account for the 0.1%-3% of total air flow, preferably account for the 0.3-2% of total air flow, in being total to, acetonitrile is as carbon/nitrogenous source.
In described preparation method, use hairbrush to carry out post processing scratch brushing to coating, at least at roughness Ra≤0.5 of rake face smear metal contact zone μ m.
The invention has the beneficial effects as follows:
Because its N-C hard material coating comprises one deck TiBCN layer, it has the advantages that to improve anti-wear performance.This N-C hard material coating can be produced economically, avoid occurring the risk of embrittlement, TiBCN layer wherein has high rigidity and thin columnar crystal structure, has improved wearability, there is more favourable frictional behaviour, and kept as much as possible high toughness and chemical-resistant.
Below in conjunction with drawings and Examples, the present invention is described in further detail; But cated cutting element of a kind of tool of the present invention and preparation method thereof is not limited to embodiment.
Accompanying drawing explanation
Fig. 1 is the scanning electron microscope (SEM) photograph of embodiment mono-coating surface of the present invention;
Fig. 2 is the scanning electron microscope (SEM) photograph of embodiment mono-coating section of the present invention;
Fig. 3 is the scanning electron microscope (SEM) photograph of embodiment bis-coating surfaces of the present invention;
Fig. 4 is the scanning electron microscope (SEM) photograph of embodiment bis-coating section of the present invention.
The specific embodiment
Embodiment
The cated cutting element of a kind of tool of the present invention, comprise substrate and be coated in a suprabasil layer or the N-C hard material coating of a plurality of layers, described N-C hard material coating at least comprises that one deposits by hot CVD method, and thickness is at least the TiBCN layer of 0.1 μ m, in described TiBCN layer, boron content is 0.5at-% to 10at-%.
The crystal grain of described TiBCN layer is the granular to columnar configurations of < 2 μ m, and the crystal grain of preferred TiBCN layer is the thin columnar configurations of < 500nm.
The thickness of described TiBCN layer is 0.1 μ m to 15 μ m, and the thickness of preferred TiBCN layer is 1 μ m to 8 μ m.
More than described TiBCN layer micro-vickers hardness reaches 30Gpa.
The cated cutting element of a kind of tool of the present invention, forms by applying at least partly cated sintered-carbide, cermet or ceramic bases, described total coating thickness 1-25 μ m, and preferred 3-18 μ m, this coating at least comprises one deck TiB xc yn zlayer, TiB xc yn z(X > 0) (x+y+z=1) layer formed by MT-CVD process deposits.
The first coating, the second coating and the 3rd coating that described coating is outwards distributed successively by substrate form; Described the first coating comprises the one or more layers that are selected from titanium nitride or titanium carbonitride, the first coating layer thickness 0.1-3 μ m, and preferred thickness is 0.2-1.0 μ m; The TiB that described the second coating is thin column crystal xc yn zlayer, the second coating layer thickness 2 μ m to 10 μ m, the preferred thickness of the second coating is 2 μ m to 8 μ m; Described the 3rd coating is that thickness is the painted top layer of 0.1-3 μ m, and the preferred thickness of the 3rd coating is 0.3-1.5 μ m.
Described the 3rd coating is TiN, TiC, and TiCN, ZrN or HfN coating, adopt CVD or PVD method deposition to form, and preferably adopts CVD method deposition to form.
The preparation method of the cated cutting element of a kind of tool of the present invention, is the N-C hard material coating that applies a layer or a plurality of layers in substrate, at least comprises a TiB who adopts MT-CVD method to be prepared from N-C hard material coating xc yn zlayer, its preparation temperature is 800-950 ℃, and adopts BCl 3as forming this Ceng Yongpeng source, described BCl 3account for the 0.1%-3% of total air flow, preferably account for the 0.3-2% of total air flow, in being total to, acetonitrile is as carbon/nitrogenous source.
In described preparation method, use hairbrush to carry out post processing scratch brushing to coating, at least at roughness Ra≤0.5 of rake face smear metal contact zone μ m.
Embodiment mono-
According to of the present invention, by CVD technology, on cemented carbide indexable insert CNMG120408-GM, apply 2 layers of coating, carbide alloy component is the WC of the Co of 9wt-%, the cubic carbide of 3wt-% (TaC+NbC) and surplus, this two layers of thickness is about 10 μ m, adjacent by TiN(and carbide alloy) and TiBCN formation.
Adopt MT-CVD technology to prepare TiBCN layer, at 700 ℃ to 900 ℃, under 100mbar pressure, use by the hydrogen of 2.5at-% to 50at-%, the CH of TiCl4, the 0.1at-% to 0.5at-% of 0.1at-% to 1at-% 3cN, the admixture of gas that the BCl3 of 0.5at-% to 2at-% and the inert gas of surplus form.
By known CVD method, deposit other layer.
Fig. 1 and Fig. 2 show surface and the cross-section morphology of embodiment mono-coating of the present invention, and recording boron content in TiBCN layer is 8at-%.
Embodiment bis-
According to of the present invention, by CVD technology, on cemented carbide indexable insert WNMG80408, apply 4 layers of coating, carbide alloy component is the WC of the Co of 9wt-%, the cubic carbide of 3wt-% (TaC+NbC) and surplus, and coating is adjacent with carbide alloy by 1 μ m TiN and TiCN(), 5 μ m TiBCN and 1 μ m TiN form.
Adopt MT-CVD technology to prepare TiBCN layer, at 700 ℃ to 900 ℃, under 50mbar pressure, use by the hydrogen of 2.5at-% to 50at-%, the CH of TiCl4, the 0.2at-% to 0.5at-% of 0.2at-% to 1at-% 3cN, the admixture of gas that the BCl3 of 0.2at-% to 1at-% and the inert gas of surplus form.
By known CVD method, deposit other layer.
Fig. 3 and Fig. 4 show surface and the cross-section morphology of embodiment bis-coatings of the present invention, and recording boron content in TiBCN layer is 3at-%.
Up to now, it is generally acknowledged because CVD technology has temperature high deposition, therefore cannot prepare by CVD technology the coating of nanostructured.But by the surprised discovery of the present invention, can prepare by CVD technology the coating of nanostructured.TiBCN coating of the present invention, when boron content is higher than 3at-%, can form very meticulous crystallinity layer structure, surface microstructure size can reach below 50nm, very smooth, the glittering surface of this crystallinity layer structure generation, this layer preferably has preferred orientation in (311) direction.As embodiment bis-, in addition referring to Fig. 3 and Fig. 4.
Aspect wearability, below, by stainless steel turning, the competition level (prior art) relevant with this application to the blade of embodiment bis-compares test.
Operation: cylindrical turning;
Workpiece: cylindrical rod;
Material: 304 stainless steels
Blade type: WNMG080408
Cutting speed: 150m/ minute
Feeding: 0.26mm/ turns
Cutting depth: 2mm
Note: dry turning is cut
Wear extent VB (mm of the unit) measurement result of cutting after 6 minutes, 14 minutes and 18 minutes is shown in following table 1.
The wear extent of table 1 cutting after 6,14 and 18 minutes
Figure BDA00003525603300061
According to grade of the present invention, greatly improved wearability and can observe more level and smooth wearing and tearing.
In the high-speed turning operation of steel alloy, it it is below the life-span of the blade of the test implementation example two competition level (prior art) relevant with this application.
Operation: cylindrical turning
Workpiece: cylindrical rod
Material: 4150(medium carbon alloy steel)
Blade type: WNMG080408
Cutting speed: 376.8m/ minute
Feeding: 0.25mm/ turns
Cutting depth: 1.5mm
Note: cooling fluid
The blade of embodiment bis-is shown in following table 2 in the life-span of above-mentioned processing conditions with competition level Y
Table 2 life tools
Sample Life tools (processing work quantity)
Example 2(the present invention) 45
Competition level Y(prior art) 30
For these two grades, when identical maximum flank wear, stop test.Compared to existing technology, according to grade of the present invention, greatly improve service life
Above-described embodiment is only used for further illustrating cated cutting element of a kind of tool of the present invention and preparation method thereof; but the present invention is not limited to embodiment; any simple modification, equivalent variations and modification that every foundation technical spirit of the present invention is done above embodiment, all fall in the protection domain of technical solution of the present invention.

Claims (9)

1. the cated cutting element of tool, it is characterized in that: comprise substrate and be coated in a suprabasil layer or the N-C hard material coating of a plurality of layers, described N-C hard material coating at least comprises that one deposits by hot CVD method, and thickness is at least the TiBCN layer of 0.1 μ m, in described TiBCN layer, boron content is 0.5at-% to 10at-%.
2. the cated cutting element of tool according to claim 1, it is characterized in that: the crystal grain of described TiBCN layer is the granular to columnar configurations of < 2 μ m, the crystal grain of preferred TiBCN layer is the thin columnar configurations of < 500nm.
3. the cated cutting element of tool according to claim 1 and 2, is characterized in that: the thickness of described TiBCN layer is 0.1 μ m to 15 μ m.
4. the cated cutting element of tool according to claim 3, is characterized in that: more than described TiBCN layer micro-vickers hardness reaches 30Gpa.
5. the cated cutting element of tool, is characterized in that: by applying at least partly cated sintered-carbide, cermet or ceramic bases, forms, and described total coating thickness 1-25 μ m, this coating at least comprises one deck TiB xc yn zlayer, TiB xc yn z(X > 0) layer is formed by MT-CVD process deposits.
6. the cated cutting element of tool according to claim 5, is characterized in that: the first coating, the second coating and the 3rd coating that described coating is outwards distributed successively by substrate form; Described the first coating comprises the one or more layers that are selected from titanium nitride or titanium carbonitride, the first coating layer thickness 0.1-3 μ m; The TiB that described the second coating is thin column crystal xc yn zlayer, the second coating layer thickness 2 μ m to 10 μ m; Described the 3rd coating is that thickness is the painted top layer of 0.1-3 μ m.
7. the cated cutting element of tool according to claim 6, is characterized in that: described the 3rd coating is TiN, TiC, and TiCN, ZrN or HfN coating, adopt CVD or PVD method deposition to form.
8. a preparation method for the cated cutting element of tool, is characterized in that: be the N-C hard material coating that applies a layer or a plurality of layers in substrate, at least comprise a TiB who adopts MT-CVD method to be prepared from N-C hard material coating xc yn zlayer, its preparation temperature is 800-950 ℃, and adopts BCl 3as forming this Ceng Yongpeng source, described BCl 3account for the 0.1%-3% of total air flow, in being total to, acetonitrile is as carbon/nitrogenous source.
9. the preparation method of the cated cutting element of tool according to claim 8, is characterized in that: in described preparation method, use hairbrush to carry out post processing scratch brushing to coating, at least at roughness Ra≤0.5 of rake face smear metal contact zone μ m.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105603387A (en) * 2016-02-11 2016-05-25 广东工业大学 Boron nitride composite coating, graded superfine hard alloy cutter provided with same and preparation method thereof
CN109837542A (en) * 2019-03-04 2019-06-04 长沙而道新能源科技有限公司 A kind of coated cutting tool and preparation method thereof
CN110072658A (en) * 2017-01-16 2019-07-30 Osg株式会社 Tool
CN113412344A (en) * 2019-02-08 2021-09-17 欧瑞康表面处理解决方案股份公司普费菲孔 Coating tool with coating comprising diffusion barrier layer containing boride

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JPH091404A (en) * 1995-06-19 1997-01-07 Sumitomo Electric Ind Ltd Surface coating slow away tip
JP2005103657A (en) * 2003-09-26 2005-04-21 Kyocera Corp Surface coated cutting tool
JP2006000970A (en) * 2004-06-17 2006-01-05 Mitsubishi Materials Corp Surface-coated cermet cutting tool with hard coating layer exerting excellent abrasion resistance in high-speed cutting
CN1905973A (en) * 2004-07-08 2007-01-31 住友电工硬质合金株式会社 Surface-coated cutting tool having film with compressive stress intensity distribution
CN102625737A (en) * 2010-11-10 2012-08-01 住友电工硬质合金株式会社 Surface-coated cutting tool

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH091404A (en) * 1995-06-19 1997-01-07 Sumitomo Electric Ind Ltd Surface coating slow away tip
JP2005103657A (en) * 2003-09-26 2005-04-21 Kyocera Corp Surface coated cutting tool
JP2006000970A (en) * 2004-06-17 2006-01-05 Mitsubishi Materials Corp Surface-coated cermet cutting tool with hard coating layer exerting excellent abrasion resistance in high-speed cutting
CN1905973A (en) * 2004-07-08 2007-01-31 住友电工硬质合金株式会社 Surface-coated cutting tool having film with compressive stress intensity distribution
CN102625737A (en) * 2010-11-10 2012-08-01 住友电工硬质合金株式会社 Surface-coated cutting tool

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105603387A (en) * 2016-02-11 2016-05-25 广东工业大学 Boron nitride composite coating, graded superfine hard alloy cutter provided with same and preparation method thereof
CN105603387B (en) * 2016-02-11 2018-04-03 广东工业大学 Boron nitride system composite coating, the gradient ultra-fine cemented carbide cutter with the composite coating and preparation method thereof
CN110072658A (en) * 2017-01-16 2019-07-30 Osg株式会社 Tool
US11292066B2 (en) 2017-01-16 2022-04-05 Osg Corporation Tool having a boron doped diamond coating
CN113412344A (en) * 2019-02-08 2021-09-17 欧瑞康表面处理解决方案股份公司普费菲孔 Coating tool with coating comprising diffusion barrier layer containing boride
CN109837542A (en) * 2019-03-04 2019-06-04 长沙而道新能源科技有限公司 A kind of coated cutting tool and preparation method thereof

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