CN108588639A - Mask assembly and mask system - Google Patents

Mask assembly and mask system Download PDF

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Publication number
CN108588639A
CN108588639A CN201810378719.7A CN201810378719A CN108588639A CN 108588639 A CN108588639 A CN 108588639A CN 201810378719 A CN201810378719 A CN 201810378719A CN 108588639 A CN108588639 A CN 108588639A
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China
Prior art keywords
barrier bed
frame
component
mask
block
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Granted
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CN201810378719.7A
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Chinese (zh)
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CN108588639B (en
Inventor
王震
黄俊杰
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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Priority to CN201810378719.7A priority Critical patent/CN108588639B/en
Publication of CN108588639A publication Critical patent/CN108588639A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12Organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

A kind of mask assembly of present invention offer and mask system, belong to mask technique field.A kind of mask assembly of the present invention, including frame, barrier bed, the wherein described barrier bed can be fixed on said frame, and the barrier bed is multigroup, each group of barrier bed includes that can be fixed on frame multiple block component, and arbitrary two adjacent described block the workspace that mask plate is limited between component;The size of the adjacent workspace for blocking the mask plate limited between component in the barrier bed of difference group is different.

Description

Mask assembly and mask system
Technical field
The invention belongs to mask technique fields, and in particular to a kind of mask assembly and mask system.
Background technology
It when preparing display screen, needs by the way of vapor deposition, OLED material is deposited by mask assembly to glass base Specific location on plate, to form multiple OLED device on the glass substrate, so that by the display made by the glass substrate Screen can normally be shown.
Wherein, as shown in Figure 1, mask assembly includes:Frame, barrier bed, mask plate;Specifically, according to each in display screen The position of OLED device, size, are provided with multiple grooves on frame, and there are one barrier beds, mask plate to set for welding in each groove It sets on two adjacent barrier beds.When completing the preparation to the first display screen, and being prepared to second of display screen, phase Compared with the position of each OLED device, size in the first display screen, the position of each OLED device in second of display screen, size It necessarily changes, at this point, being used to prepare the size of the mask plate of second of display screen can also be varied from, correspondingly, being used for The distance between two barrier beds of carrying mask plate will also change, also, since barrier bed in the prior art is straight Strip, and the barrier bed be weld in the trench by way of to be fixed on frame, therefore, each groove on frame Position also needs to change, namely needs a kind of new frame to prepare second of display screen.
It can thus be seen that when preparing different display screens, a kind of frame is only used for preparing a kind of display screen, when Prepared by a kind of display screen completes, and when being prepared to other display screens, prepares used in the first display screen that frame can only It scraps, to cause frame material to waste, cost improves.
Invention content
The present invention is directed at least solve one of the technical problems existing in the prior art, providing a kind of different display screen can be total to With the mask assembly and mask system of the same frame.
Technical solution is a kind of mask assembly, including frame, barrier bed used by solving present invention problem, described Barrier bed can be fixed on said frame, and the barrier bed is multigroup, and each group of barrier bed includes that can be fixed on frame It is multiple block component, and arbitrary two adjacent described block the workspace that mask plate is limited between component;
The size of the adjacent workspace for blocking the mask plate limited between component in the barrier bed of difference group It is different.
Preferably, the opposite both sides of the frame are provided with multiple grooves;
The component that blocks includes:The U-shaped part, connector of a pair of opposing;Wherein,
The two side being oppositely arranged in the U-shaped part is connect with the groove respectively;
The connector is connected between two U-shaped parts, and the company of component is blocked in the barrier bed of different groups Fitting, the position between two U-shaped parts are different.
Preferably, the two side being oppositely arranged in the U-shaped part is detachably connected with the groove.
Preferably, by the connector and two U-shaped parts form described in block component and be an integral molding structure.
Preferably, the barrier bed further includes:First be oppositely arranged blocks item, second blocks item;Wherein,
Described first blocks item, described second blocks item opposite with frame both sides connection respectively;
It is described block component be connected to described first block item and described second block item between, and the barrier bed of different group In it is described block component, block item described first and described second to block position between item different.
Preferably, described first item is blocked, described second the item both sides opposite with the frame is blocked and is detachably connected.
Preferably, it blocks item by described first, described second block item, the barrier bed for blocking component and forming It is an integral molding structure.
Preferably, the mask assembly further includes:It is compatible with the workspace of various sizes of mask plate multigroup to cover Diaphragm plate.
Preferably, the mask plate includes fine metal mask plate.
Technical solution is a kind of mask system used by solving present invention problem comprising any one of the above is covered Membrane module.
The present invention has the advantages that:
When mask assembly using the present invention prepares different display screens, due to each OLED device in each display screen Size it is different, therefore the size of mask plate also can be different, at this point, only needing to change corresponding with each display screen, and can fix One group of barrier bed on frame, without the frame for needing to change fixed barrier bed.So, a kind of frame can be used for making Standby different display screen, so as to avoid in the prior art, a kind of frame is only used for preparing caused by a kind of display screen, When having prepared the first display screen, and having been prepared to other display screens, frame used in the first display screen is prepared only The generation for the case where capable of scrapping, and then frame material is saved, reduction prepares the cost of display screen.
Description of the drawings
Fig. 1 is the structural schematic diagram of existing mask assembly;
Fig. 2 is the structural schematic diagram of the mask assembly of the embodiment of the present invention 2;
Fig. 3 is the structural schematic diagram of the mask assembly for being used to prepare smaller display screen of the embodiment of the present invention 2;
Fig. 4 is the structural schematic diagram of the mask assembly for being used to prepare larger display screen of the embodiment of the present invention 2;
Fig. 5 is the structural schematic diagram of the mask assembly of the embodiment of the present invention 3;
Fig. 6 is the structural schematic diagram of the mask assembly for being used to prepare larger display screen of the embodiment of the present invention 3;
Wherein reference numeral is:1, frame;2, component is blocked;21, connector;22, U-shaped part;23, first item is blocked;24、 Second blocks item;3, mask plate.
Specific implementation mode
To make those skilled in the art more fully understand technical scheme of the present invention, below in conjunction with the accompanying drawings and specific embodiment party Present invention is further described in detail for formula.
Embodiment 1:
As shown in Fig. 2, the present embodiment provides a kind of mask assembly, including frame 1, barrier bed, barrier bed can be fixed on On frame 1, and barrier bed is multigroup, and each group of barrier bed includes that can be fixed on frame 1 multiple block component 2, and appoint It anticipates and two adjacent blocks the workspace for limiting mask plate 3 between component 2;Adjacent in the barrier beds of difference group blocks component The size of the workspace of the mask plate 3 limited between 2 is different.
Specifically, when being prepared to display screen using the mask assembly of the present embodiment, if the display prepared for the first time The size of each OLED device is larger in screen, then the size for being used to prepare the mask plate 3 of the display screen is also big, at this time, it may be necessary in frame One group of barrier bed is fixed on frame 1, so that between adjacent in this group of barrier bed blocks component 2, the mask plate 3 that is limited The size of workspace is larger, in order to which large-sized mask plate 3 is placed in the workspace, to be prepared to display screen.When When preparing and complete to above-mentioned display screen, and preparing another display screen, if each OLED device in second of display screen prepared Size it is smaller, then the size of mask plate 3 will also become smaller, at this time, it may be necessary to when by preparing display screen for the first time, be fixed on frame One group of barrier bed on 1 is removed, and another group of barrier bed is retightened on the frame 1, so that adjacent in this group of barrier bed Block component 2 between, the size of the workspace of the mask plate 3 limited is smaller, in order to small size mask plate 3 place In the workspace, to be prepared to display screen.Certainly, the group number of barrier bed is not limited to above-mentioned two kinds, can be with It is numerous to list herein to be multigroup.
It can thus be seen that when being prepared to different display screens using the mask assembly of the present embodiment, due to each aobvious The size of each OLED device is different in display screen, therefore the size of mask plate 3 also can be different, at this point, only needing to change and each display screen phase One group of barrier bed that is corresponding, and being fixed on frame 1, without the frame 1 for needing to change fixed barrier bed.Such one Come, a kind of frame 1 can be used for preparing different display screens, and so as to avoid in the prior art, a kind of frame 1 is only used for It prepares caused by a kind of display screen, when having prepared the first display screen, and having been prepared to other display screens, prepares first The generation for the case where frame 1 used in kind display screen can only be scrapped, and then 1 material of frame is saved, reduction prepares display screen Cost.
Embodiment 2:
As shown in Fig. 2, the present embodiment provides a kind of mask assembly, including frame 1, barrier bed;Wherein, frame 1 is opposite Both sides are provided with multiple grooves;Barrier bed be it is multigroup, every group of barrier bed include it is multiple block component 2, and block component 2 and include: The U-shaped part 22, connector 21 of a pair of opposing;Wherein, the two side being oppositely arranged in U-shaped part 22 connects with groove respectively It connects;Connector 21 is connected between two U-shaped parts 22, and the connector 21 of component 2 is blocked in the barrier bed of different groups, at two Position between U-shaped part 22 is different, so that between arbitrary two adjacent connectors 21, the workspace of the mask plate 3 limited Size is different.
Specifically, as shown in Figure 3,4, being illustrated so that one group of barrier bed blocks component 2 including three as an example, wherein press According to sequence from left to right, be fixed on frame 1 first block component, second block component, third blocks component.
Specifically, as shown in figure 3, when being prepared to the first display screen using the mask assembly in the present embodiment, Assuming that the size of each OLED device is smaller in the first display screen, then the size of mask plate 3 is also small, at this point, in the groove of frame 1 The middle barrier bed for fixing one group, wherein the in this group of barrier bed second connector 21 blocked in component is located in U-shaped part 22 Between at position, first blocks component, third block the connector 21 in component two U-shaped parts 22 corresponding thereto it Between, and connector 21 in component all is blocked close to second, so that blocking the connector 21 and second in component by first It is smaller to block the workspace that the connector 21 in component is limited, to place first piece of mask plate, is blocked in component by second Connector 21 and third to block the workspace that the connector 21 in component is limited also small, to place second piece of mask plate. Certainly, first block component, second block component, third is blocked the position arrangement form of the connector 21 in component and is not limited to In above-mentioned arrangement form, as long as two adjacent connections 21 in this group of barrier bed can interact, to place mask plate 3 i.e. Can, details are not described herein.
When being completed when being prepared to above-mentioned the first display screen, and needing to prepare second of display screen, only need by One group of above-mentioned barrier bed is removed from the groove of frame 1, and resets another group and second of display screen in the groove Compatible barrier bed.
Specifically, as shown in figure 4, if the size of each OLED device is all higher than the first display screen in second of display screen In each OLED device size, then preparing the size of mask plate 3 can also become larger, at this point, when will prepare the first display screen, Gu One group of barrier bed being scheduled on frame 1 is removed, and another group of barrier bed is retightened on the frame 1, wherein this group of barrier bed In second block the middle position that the connector 21 in component is still located at U-shaped part 22, first blocks component, third blocks group Connector 21 in part all blocks the connector in component between two U-shaped parts 22 corresponding thereto far from second 21, so that blocking connector 21 in component and second by first blocks the work that the connector 21 in component limited Area is larger, to place first piece of mask plate, blocks connector 21 in component by second and third blocks connector in component 21 workspaces that are limited are also big, to place second piece of mask plate.Certainly, it first blocks component, second block component, third The position arrangement form for blocking the connector 21 in component is not limited to above-mentioned arrangement form, as long as in this group of barrier bed Two adjacent connections 21 can interact, and to place mask plate 3, details are not described herein.
It should be noted that the two side that U-shaped part 22 is oppositely arranged is connect with groove respectively, component is blocked by each 2 while be fixed on frame 1, and height and the frame 1 of each side wall in the U-shaped part 22 on each groove are highly kept Unanimously, for mask plate 3 a flat placement region is provided with this, prevents mask plate 3 from arching upward.
Wherein, the present embodiment is preferred, and the two side being oppositely arranged in U-shaped part 22 detachably connects with the groove in frame 1 It connects, so that being prepared to different display screens using the mask assembly in the present embodiment, needs replacing and be fixed on frame 1 On one group of barrier bed when, avoid fixing tension because of barrier bed and frame 1, it is caused that frame 1 is damaged in disassembly process The occurrence of, and then extend the service life of frame 1.
It should be noted that before being prepared to display screen using the mask assembly in the present embodiment, the mask set The two side that each of part blocks the U-shaped part 22 in component 2 be by welding it is fixed in the trench;Moreover, It is also to be fixed on by welding on frame 1 to be placed on the two adjacent mask plates 3 blocked on component 2.
Wherein, the present embodiment is preferred, and the component 2 that blocks being made of connector 21 and two U-shaped parts 22 is integrally formed Structure is completed in order to be prepared to a kind of display screen using the mask assembly in the present embodiment, and when preparing another display screen, Can quickly remove on frame 1 it is fixed, be used to prepare and block component 2 used in last display screen, meanwhile, also can be fast Fastly barrier bed to be used is needed to be fixed on frame 1 this.
To sum up, due to blocking the connector 21 of component 2, the position between two U-shaped parts 22 in different groups of barrier bed Difference, so that between arbitrary two adjacent connectors 21, the size of the workspace of the mask plate 3 limited is different, therefore uses this When mask assembly in embodiment prepares different display screens, be arranged in frame 1 one group of barrier bed need to be only changed to separately One group of barrier bed so that the one group of barrier bed re-replaced is adapted with the display screen of pending preparation, and nothing needs to change frame Frame 1 saves frame 1 to solve the problem of that a kind of frame 1 in the prior art is only used for preparing a kind of display screen Material reduces the cost for preparing display screen.
Embodiment 3:
As shown in figure 5, the present embodiment provides a kind of mask assembly, including frame 1, barrier bed;Wherein, barrier bed is more Group, every group of barrier bed include it is multiple block component 2, first be oppositely arranged blocks item 23, second blocks item 24;Wherein, first Item 23 is blocked, second item 24 is blocked both sides opposite with frame 1 is connect respectively;It blocks component 2 and is connected to first and block 23 He of item Between second blocks item 24, and component 2 is blocked in the barrier bed of different group, first block item 23 and second block item 24 it Between position it is different so that arbitrary two it is adjacent block component 2 between, the size of the workspace of the mask plate 3 limited is different.
Specifically, such as Fig. 6, illustrated so that one group of barrier bed blocks component 2 including three as an example.When using the present embodiment In mask assembly when being prepared to the first display screen, it is assumed that the size of each OLED device is larger in the first display screen, The size for then preparing the mask plate 3 of the display screen is also big, at this point, fixing one group of barrier bed on frame 1, wherein the group hides The component 2 that blocks of both sides blocks component 2 far from intermediate in barrier, so that the adjacent component 2 that blocks is limited two-by-two Mask plate 3 workspace it is larger, to place big mask plate 3.
It is completed when being prepared to the first display screen, and when needing to prepare second of display screen, it only need to will be above-mentioned One group of barrier bed is removed from frame 1, and is reset another group in the groove and compatible with second of display screen blocked Layer.Specifically, if the size of each OLED device is respectively less than each OLED devices in the first display screen in second of display screen The size of part, then preparing the size of mask plate 3 used in second of display screen can also become smaller, at this point, the first will be prepared When display screen, one group of barrier bed being fixed on frame 1 is removed, and another group of barrier bed is retightened on the frame 1, In, in this group of barrier bed both sides block component 2 be close to it is intermediate block component 2 so that adjacent two-by-two block group The workspace for the mask plate 3 that part 2 is limited is smaller, to place small mask plate 3.
It should be noted that three in the barrier bed position arrangement forms for blocking component 2 are not limited to above-mentioned row Cloth form, it is no longer superfluous herein to place mask plate 3 as long as the two adjacent components 2 that block after adjustment can interact It states.
Wherein, the present embodiment is preferred, and mask assembly further includes:It is adapted with the workspace of various sizes of mask plate 3 Multigroup mask plate 3;Wherein, which includes fine metal mask plate 3.
Wherein, the present embodiment is preferred, and first blocks that item 23, second to block the both sides opposite with frame 1 of item 24 detachable Connection, so that being prepared to another display screen using the mask assembly in the present embodiment, is needed replacing and is fixed on frame When one group of barrier bed on frame 1, avoid fixing tension because of barrier bed and frame 1, it is caused that frame 1 is damaged in disassembly process The case where generation, and then extend frame 1 service life.
It should be noted that before being prepared to display screen using the mask assembly in the present embodiment, the mask set First in part blocks item 23 and second to block item 24 be fixed on by welding on frame 1;Moreover, being placed on The two adjacent mask plates 3 blocked on component 2 are also by welding, to be fixed on first and block item 23 and second and block item On 24.
Wherein, the present embodiment is preferred, blocks item 23 by described first, described second blocks item 24, described blocks component 2 The barrier bed of composition is an integral molding structure, in order to be prepared to a kind of display screen using the mask assembly in the present embodiment Complete, and when preparing another display screen, can quickly remove on frame 1 it is fixed, be used to prepare last display screen and made Component 2 is blocked, meanwhile, also rapidly barrier bed to be used can be needed to be fixed on frame 1 this.
To sum up, component 2 is blocked in the barrier beds of different groups, blocking item 23 and second first blocks position between item 24 Set difference so that arbitrary two it is adjacent block component 2 between, the size of the workspace of the mask plate 3 limited is different, therefore uses When mask assembly in the present embodiment prepares different display screens, be arranged in frame 1 one group of barrier bed need to be only changed to Another group of barrier bed so that the one group of barrier bed re-replaced is adapted with the display screen of pending preparation, and nothing needs to change Frame 1 saves frame 1 to solve the problem of that a kind of frame 1 in the prior art is only used for preparing a kind of display screen Material, reduce the cost for preparing display screen.
Embodiment 4:
This implementation provides a kind of mask system comprising the mask assembly described in any one of embodiment 1 to 3.
Specifically, when preparing display screen using the mask system in the present embodiment, first, OLED materials are coated in substrate Material;Then, mask assembly, glass substrate are set above substrate successively;Finally, by the way of vapor deposition, OLED material is led to Mask assembly is crossed to be deposited to the specific location on glass substrate, to form multiple OLED device on the glass substrate, so that by Display screen made by the glass substrate can normally be shown.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, however the present invention is not limited thereto.For those skilled in the art, in the essence for not departing from the present invention In the case of refreshing and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.

Claims (10)

1. a kind of mask assembly, including frame, barrier bed, the barrier bed can be fixed on said frame, which is characterized in that The barrier bed is multigroup, and each group of barrier bed includes that can be fixed on frame multiple block component, and arbitrary two adjacent Described block the workspace that mask plate is limited between component;
The size of the adjacent workspace for blocking the mask plate limited between component in the barrier bed of difference group is different.
2. mask assembly according to claim 1, which is characterized in that the opposite both sides of the frame are provided with multiple ditches Slot;
The component that blocks includes:The U-shaped part, connector of a pair of opposing;Wherein,
The two side being oppositely arranged in the U-shaped part is connect with the groove respectively;
The connector is connected between two U-shaped parts, and the connector of component is blocked in the barrier bed of different groups, Position between two U-shaped parts is different.
3. mask assembly according to claim 2, which is characterized in that the two side being oppositely arranged in the U-shaped part and institute Groove is stated to be detachably connected.
4. mask assembly according to claim 2, which is characterized in that be made of the connector and two U-shaped parts Described block component and be an integral molding structure.
5. mask assembly according to claim 1, which is characterized in that the barrier bed further includes:First be oppositely arranged It blocks item, second block item;Wherein,
Described first blocks item, described second blocks item opposite with frame both sides connection respectively;
It is described block component be connected to described first block item and described second block item between, and in the barrier bed of different group It is described to block component, it blocks item described first and described second to block position between item different.
6. mask assembly according to claim 5, which is characterized in that described first block item, described second block item with The opposite both sides of the frame are detachably connected.
7. mask assembly according to claim 5, which is characterized in that by described first block item, described second block item, The barrier bed for blocking component composition is an integral molding structure.
8. mask assembly according to claim 1, which is characterized in that the mask assembly further includes:With it is various sizes of The compatible multigroup mask plate in workspace of mask plate.
9. mask assembly according to claim 1, which is characterized in that the mask plate includes fine metal mask plate.
10. a kind of mask system, which is characterized in that including the mask assembly described in any one of claim 1-9.
CN201810378719.7A 2018-04-25 2018-04-25 Mask assembly and mask system Active CN108588639B (en)

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CN104611668A (en) * 2015-01-29 2015-05-13 京东方科技集团股份有限公司 Mask plate frame and mask plate
CN105039907A (en) * 2015-09-22 2015-11-11 深圳市华星光电技术有限公司 Fixing assembly for mask plate
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CN207109081U (en) * 2017-08-31 2018-03-16 京东方科技集团股份有限公司 A kind of mask plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110643938A (en) * 2019-10-31 2020-01-03 京东方科技集团股份有限公司 Mask plate assembly
CN110643938B (en) * 2019-10-31 2022-07-05 京东方科技集团股份有限公司 Mask plate assembly

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