CN110643938B

CN110643938B - Mask plate assembly

Info

Publication number: CN110643938B
Application number: CN201911056615.5A
Authority: CN
Inventors: 吕守华; 李宝军
Original assignee: BOE Technology Group Co Ltd; Ordos Yuansheng Optoelectronics Co Ltd
Current assignee: BOE Technology Group Co Ltd; Ordos Yuansheng Optoelectronics Co Ltd
Priority date: 2019-10-31
Filing date: 2019-10-31
Publication date: 2022-07-05
Anticipated expiration: 2039-10-31
Also published as: CN110643938A

Abstract

The invention provides a mask plate assembly, belongs to the technical field of display, and can at least partially solve the problems of increased production cost and resource waste caused by low utilization rate of the existing mask plate assembly. The invention relates to a mask plate assembly, which comprises: a frame including an opening portion and a rim portion surrounding the opening portion; the supporting mask plate is arranged on one side of the frame and comprises at least one effective opening and at least one first testing hole corresponding to the opening part, and the precision of the supporting mask plate is 1-10 mu m; and the shielding strip is used for covering the first testing hole.

Description

Mask plate assembly

Technical Field

The invention belongs to the technical field of display, and particularly relates to a mask plate assembly.

Background

In the manufacturing process of the display panel, the evaporation material is accurately evaporated to a specific position of the glass substrate through the setting of the mask plate so as to form various structures in the display screen, such as a pixel structure and the like. There are many kinds of masks under different process requirements. One of the mask plates 91 is a common layer opening mask plate, as shown in fig. 1a, a plurality of openings 91 are provided, each opening 911 corresponds to a position of one display screen, and an evaporation material evaporated to a glass substrate through the common layer opening mask plate 91 needs to be fully distributed on the glass substrate corresponding to each display screen, so that the accuracy of the common layer opening mask plate 91 is low; another type is a light-emitting layer masking plate 92, as shown in fig. 1b, in which there are multiple effective openings, each of which can define the precise shape of a display screen, so that the precision with which the light-emitting layer masks the masking plate 92 is higher than that of a common layer opening masking plate.

Since the accuracy of the light-emitting layer shielding mask 92 is higher than that of the common layer opening mask 91, the used common layer opening mask 91 cannot be used as the light-emitting layer shielding mask 92; since the light-emitting layer shielding mask 92 has a plurality of test holes 921 and the common layer opening mask 91 does not have a test hole, the used light-emitting layer shielding mask 92 cannot be used as the common layer opening mask 91. This results in an increase in production cost and a waste of resources in the process of manufacturing the display screen.

Disclosure of Invention

The invention at least partially solves the problems of increased production cost and resource waste caused by low utilization rate of the existing mask plate component, and provides a mask plate component with high utilization rate.

The technical scheme adopted for solving the technical problem of the invention is a mask plate component, which comprises the following components:

a frame including an opening portion and a rim portion surrounding the opening portion;

the supporting mask plate is arranged on one side of the frame and comprises at least one effective opening and at least one first testing hole corresponding to the opening part, and the precision of the supporting mask plate is 1-10 microns;

at least one shielding strip for covering the first test hole.

Further preferably, the frame further comprises: set up in the frame part is towards support at least one mounting groove of one side of mask plate, the at least part that hides the strip is located in the mounting groove so that it fixes to hide the strip on the frame.

Further preferably, the frame further comprises: the mounting column is arranged in the mounting groove, the height of the mounting column is the same as the depth of the mounting groove, and the top surface of the mounting column is fixedly connected with the supporting mask plate; the shielding strip is provided with a mounting structure located at the edge, and the mounting structure is fixed in the mounting groove and a gap formed by the mounting column, so that the shielding strip is fixedly connected with the bottom surface of the mounting groove.

It is further preferred that the perpendicular to of erection column support mask plate and be on a parallel with the cross section of first direction be trapezoidal, trapezoidal minor face is close to the tank bottom of mounting groove, trapezoidal long limit is kept away from the tank bottom of mounting groove.

It is further preferred that the both ends of every shielding strip all have mounting structure, the quantity of mounting groove is a plurality of, in the direction that is on a parallel with the second direction, two liang of opposite settings of mounting groove to make arbitrary the mounting structure at the both ends of shielding strip set up respectively in relative two in the mounting groove, the second direction with the first direction is perpendicular, just the first direction with the second direction all with the plane at support mask plate place is parallel.

Further preferably, the number of the first test holes is multiple, and the first test holes are located on a line parallel to a connecting line of any two opposite mounting grooves.

It is further preferable that the number of the effective openings is plural, the effective openings are located between any two adjacent rows of the first test holes,

further preferably, the mask plate assembly further comprises: at least one metal mask strip capable of covering the effective opening, wherein when the shielding strip is not arranged on the frame, the metal mask strip is arranged on one side of the supporting mask plate far away from the frame.

Further preferably, the metal mask stripes include: the second test hole corresponding to the first test hole and the pixel effective opening corresponding to the effective opening.

Further preferably, the frame further comprises: the supporting part is arranged on one side, back to the mask supporting plate, of the frame part, is fixedly connected with the position, far away from the opening part, of the frame part, and is used for supporting the frame part.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

fig. 1a is a top view structural diagram of a conventional common layer opening mask;

FIG. 1b is a schematic view of a conventional light-emitting layer mask

Fig. 2a is a top view structural diagram of a mask plate assembly provided with a shielding strip according to an embodiment of the present invention;

FIG. 2b is a schematic cross-sectional view A-A of FIG. 2 a;

FIG. 3a is a top view of a mask blank assembly with metal mask strips according to an embodiment of the present invention;

FIG. 3B is a schematic cross-sectional view B-B of FIG. 3 a;

FIG. 3C is a schematic cross-sectional view of C-C of FIG. 3 a;

FIG. 4 is a partial top view of a masking strip of a masking plate assembly in accordance with an embodiment of the present invention;

FIG. 5a is a partial top view of a mounting slot of a mask plate assembly according to an embodiment of the present invention;

FIG. 5b is a schematic cross-sectional view of D-D of FIG. 5 a;

FIG. 6 is a partial top view of a masking strip and mounting groove of a masking plate assembly according to an embodiment of the present invention;

FIG. 7a is a partial top view of a masking strip, mounting slots, and supporting mask of a mask assembly according to an embodiment of the present invention;

FIG. 7b is a schematic cross-sectional view of E-E of FIG. 7 a;

wherein the reference numerals are: 1. a frame; 11. an opening portion; 12. a frame portion; 121. mounting grooves; 122. mounting a column; 13. a support portion; 2. supporting the mask plate; 21. an effective opening; 22. a first test well; 3. a masking strip; 31. a mounting structure; 4. a metal mask strip; 41. a second test well; 42. a pixel effective opening; 91. a common layer opening mask plate; 911. an opening; 92. the light-emitting layer shields the mask plate; 921. and (6) testing the holes.

Detailed Description

In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

The invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by like reference numerals. For purposes of clarity, the various features in the drawings are not drawn to scale. Moreover, certain well-known elements may not be shown in the figures.

In the following description, numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of components, are set forth in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details.

Example 1:

as shown in fig. 2a to 7a, the present embodiment provides a mask plate assembly, including:

a frame 1 including an opening portion 11 and a rim portion 12 surrounding the opening portion 11;

the supporting mask plate 2 is arranged on one side of the frame 1, the supporting mask plate 2 comprises at least one effective opening 21 and at least one first testing hole 22 corresponding to the opening part 11, and the precision of the supporting mask plate 2 is 1-10 microns;

at least one shielding strip 3, the shielding strip 3 being adapted to cover the first test hole 22.

Wherein, when the precision of supporting mask plate 2 is 1 ~ 10um, that is to say that the precision of supporting mask plate 2's effective opening 21 can be used to make the structure of each similar pixel size of display screen, specifically, supports mask plate 2's precision pixel precision level.

Specifically, during the evaporation process, the bottom surface of the frame 1 is supported on the evaporation stage, that is, the bottom surface of the frame portion 12 of the frame 1 is supported on the evaporation stage, and the opening portion 11 of the frame 1 allows the evaporation material to pass through from bottom to top. The supporting mask plate 2 is arranged on the frame 1, and the glass substrate to be subjected to evaporation is arranged on the supporting mask plate 2, so that evaporation materials pass through the opening part 11 of the frame 1 and finally reach the glass substrate through the supporting mask plate 2 to form specific patterns.

Two kinds of masks in the prior art: the light-emitting layer shields the mask plate and the common layer opening mask plate. The precision (the precision is 1-10 um) of the mask plate sheltered by the luminous layer is higher than that of the mask plate with the opening of the public layer (the precision is 30-200 um), so the used mask plate with the opening of the public layer can not be used as the mask plate sheltered by the luminous layer; and because the mask plate for shielding the light-emitting layer is provided with a plurality of test holes, and the mask plate with the opening of the public layer is not provided with the test holes, the used mask plate for shielding the light-emitting layer cannot be used as the mask plate with the opening of the public layer.

In the mask plate assembly of the present embodiment, since the precision of supporting the mask plate 2 is of a pixel precision level (that is, the precision of shielding the mask plate by the light emitting layer in the prior art), as shown in fig. 2a, when the shielding strip 3 shields the first test hole 22 of supporting the mask plate 2 and does not shield the effective opening 21, the formed mask plate assembly can be used as a common layer opening mask plate, so that the evaporation material from bottom to top does not pass through the first test hole 22; as shown in fig. 3a, when the shielding strip 3 is not disposed on the supporting mask 2, i.e. the shielding strip 3 neither shields the effective opening 21 nor the first testing hole 22, the mask formed by the frame 1 and the supporting mask 2 can be used as a light-emitting layer to shield the mask.

Further, the frame 1 may be formed of an indium tile or a nickel-iron alloy material; the shielding strip 3 can be made of indium tile alloy material, the thickness of the shielding strip can be 30-100 μm, and the width of the shielding strip can be 1.5-5 μm; the thickness of the mask supporting plate 2 can be 100-200 μm.

In the mask plate assembly of the embodiment, the mask plate assembly which is used as the mask plate and is shielded by the light-emitting layer is changed into the mask plate assembly which can be used as the common layer opening mask plate through the shielding strip 3, so that the cost of the mask plate (idle treatment for shielding the mask plate by the light-emitting layer) in the manufacturing of the display screen can be reduced, and the waste of resources is reduced.

Preferably, the frame 1 further comprises: at least one mounting groove 121 (a pre-welding groove) provided at a side of the frame part 12 facing the mask 2, and at least a portion of the barrier strip 3 is positioned in the mounting groove 121 to fix the barrier strip 3 on the frame 1.

Specifically, as shown in fig. 2b, the barrier strip 3 is disposed between the frame 1 and the bezel portion 12. And the screen bar 3 is fixed to the frame 1 through the mounting slots 121 of the rim portion 12, where the fixing may be welding or other forms of fixed connection.

In addition, the depth of the mounting groove 121 may be similar to the thickness of the shielding strip 3, that is, the depth of the mounting groove 121 is equal to the thickness of the shielding strip 3 ± 10 μm, and preferably, the depth of the mounting groove 121 is greater than or equal to the thickness of the shielding strip 3.

The mode that will shelter from strip 3 through mounting groove 121 fixes in frame part 12 can avoid sheltering from strip 3 to the influence of supporting mask plate 2 installation, and the frame part 12 surface of installation support mask plate 2 can not have bellied part promptly (if will shelter from strip 3 snap-on the surface of frame part 12, the setting that shelters from strip 3 can make installation support mask plate 2 have the arch).

Preferably, the frame 1 further comprises: at least one mounting column 122 arranged in the mounting groove 121, wherein the height of the mounting column 122 is the same as the depth of the mounting groove 121, and the top surface of the mounting column 122 is fixedly connected with the supporting mask plate 2; the shielding strip 3 is provided with a mounting structure 31 at an edge, and the mounting structure 31 is fixed in a gap formed by the mounting groove 121 and the mounting post 122 so that the shielding strip 3 is fixedly connected with the bottom surface of the mounting groove 121.

As shown in fig. 4 to 6, the groove bottom of the mounting groove 121 has a mounting pillar 122 protruding toward the notch, and the upper surface of the mounting pillar 122 and the edge of the notch of the mounting groove 121 are located on the same plane. As shown in fig. 4, the mounting structure 31 of the shielding bar 3 is specifically a thin strip that can be positioned in the gap between the mounting groove 121 and the mounting post 122.

It should be noted that there may be a plurality of mounting posts 122 for each mounting groove 121, so that the mounting structure 31 of the shielding strip 3 can be located in the gap formed by the mounting groove 121 and the mounting post 122 and in the gap formed by different mounting posts 122. The width of the mounting groove 121 is equal to the number of the strips multiplied by the width of the strips, and the width of the strips can be 0.4 to 1 μm.

Since the supporting mask 2 needs to be fixedly connected to the surface of the frame portion 12 of the frame 1, if the mounting groove 121 does not have the mounting post 122, the supporting mask 2 corresponding to the mounting groove 121 cannot be fixed to the frame portion 12 due to the recess of the mounting groove 121, which may cause unstable fixing of the supporting mask 2 or deformation, such as recess, of the supporting mask 2 at the mounting groove 121. As shown in fig. 7b, the fixing of the mask supporting plate 2 by the mounting posts 122 (the welding points of the mask supporting plate 2 can be continuous) can stabilize the fixing of the mask supporting plate 2 and prevent the mask supporting plate 2 from deforming in the mounting grooves 121.

Preferably, a cross section of the mounting post 122 perpendicular to the supporting mask 2 and parallel to the first direction (e.g., Y direction in fig. 2 a) is trapezoidal, a short side of the trapezoid is close to the bottom of the mounting groove 121, and a long side of the trapezoid is far away from the bottom of the mounting groove 121.

In other words, as shown in fig. 5b, the mounting post 122 is an inverted trapezoidal post in the mounting groove 121, a large area of the bottom surface is used for fixedly connecting with the supporting mask 2, and a small area of the bottom surface is connected with the bottom of the mounting groove 121.

Thus, the fixing area for supporting the mask 2 is ensured to be larger, and more space is left for the mounting structure 31 to ensure the fixing of the masking strip 3.

Preferably, both ends of each shielding strip 3 are provided with a plurality of mounting structures 31, the number of the mounting grooves 121 is multiple, and in a direction parallel to a second direction (such as an X direction in fig. 2 a), every two of the mounting grooves 121 are oppositely arranged, so that the mounting structures 31 at both ends of any one shielding strip 3 are respectively arranged in the two opposite mounting grooves 121, the second direction is perpendicular to the first direction, and the first direction and the second direction are parallel to a plane where the mask plate is supported.

In which, as shown in fig. 2a, one masking strip 3 is fixed to two opposite mounting grooves 121 so that the portion of the masking strip 3 passing through the opening portion 11 of the frame 1 just shields the first test hole 22 supporting the mask 2.

It should be noted that the number of the shielding strips 3 may be multiple, and each shielding strip 3 corresponds to two mounting grooves 121. And the shielding strips 3 may be arranged in the first direction so as to shield the first test holes 22 at more positions.

Preferably, the number of the first testing holes 22 is plural, and the first testing holes 22 are located on a line parallel to a connecting line of any two opposite mounting grooves 121.

In which the first test wells 22 are arranged in a plurality of rows, as shown in fig. 2 a.

When the first test hole 22 is located on a line parallel to a line connecting any two opposite mounting grooves 121, the opening portion 11 of the shielding strip 3 located on the frame 1 just shields the first test hole 22.

Preferably, the number of the effective openings 21 is plural, and the effective openings 21 are located between any adjacent two rows of the first test holes 22.

As shown in fig. 2a, the effective opening 21 is located between any two adjacent rows of the first test holes 22, so that the shielding strip 3 can avoid shielding the effective opening 21, and the structural performance of the mask plate assembly is ensured.

It should be noted that the arrangement of the effective openings 21 is not limited to the above arrangement, and the arrangement may be other suitable arrangements.

Preferably, the mask plate assembly of the present embodiment further includes: at least one metal mask strip 4 capable of covering the effective opening 21, wherein when the shielding strip 3 is not arranged on the frame 1, the metal mask strip 4 is arranged on one side of the supporting mask plate 2 far away from the frame 1.

That is, as shown in fig. 3a, if the shielding strip 3 is not fixed on the frame 1 and the metal mask strip 4 is fixed on the upper surface of the supporting mask 2, the mask assembly can be used for the light-emitting layer to shield the mask.

Specifically, the metal mask stripes 4 include: a second test hole 41 corresponding to the first test hole 22, and a pixel effective opening 42 corresponding to the effective opening 21.

Specifically, the first test hole 22 and the second test hole 41 are provided to detect whether the evaporation material can reach a predetermined position on the glass substrate during the evaporation process, so as to ensure the yield of the evaporation product. The pixel effective opening 42 is used to form a relatively high precision structure in the display screen, such as a pixel, a circuit, etc.

Preferably, the frame 1 further comprises: and a support part 13, which is arranged on the side of the frame part 12 opposite to the mask plate 2 and is fixedly connected with the position of the frame part 12 far away from the opening part 11, and is used for supporting the frame part 12.

As shown in fig. 2b, the supporting portion 13 may be located on a deposition table (not shown), that is, the lower surface of the supporting portion 13 may directly contact with the deposition table.

In order to evaporate an evaporation material located below a glass substrate to a lower surface of the glass substrate, the glass substrate needs to be supported on an evaporation table by a frame 1 so that the lower surface of the glass substrate is spaced from the evaporation table by a certain distance, thereby ensuring uniformity of evaporation.

The frame 1 further includes a clamping groove for providing a clamping tool for clamping the glass substrate.

Specifically, the glass substrate after evaporation can be used in a display device, for example, any product or component having a display function, such as a liquid crystal display panel, an Organic Light Emitting Diode (OLED) display panel, electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, and a navigator.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

While embodiments in accordance with the invention have been described above, these embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A mask plate assembly, comprising:

the shielding strip is not provided with an opening, the projection of the shielding strip on the surface of the supporting mask plate is rectangular, and the shielding strip is used for covering the first test hole; when the shielding strip covers all the first test holes and does not shield the effective opening, the mask plate assembly is used as a common layer opening mask plate; when the shielding strip does not cover the first test hole and does not shield the effective opening, the mask plate assembly is used as a light-emitting layer to shield the mask plate;

at least one metal mask strip capable of covering the effective opening, wherein when the shielding strip is not arranged on the frame, the metal mask strip is arranged on one side of the supporting mask plate far away from the frame.

2. The mask plate assembly of claim 1, wherein the frame further comprises: set up in the frame part is towards support at least one mounting groove of one side of mask plate, the at least part that hides the strip is located in the mounting groove so that it fixes to hide the strip on the frame.

3. The mask plate assembly of claim 2, wherein the frame further comprises: the mounting column is arranged in the mounting groove, the height of the mounting column is the same as the depth of the mounting groove, and the top surface of the mounting column is fixedly connected with the supporting mask plate;

the shielding strip is provided with a mounting structure located at the edge, and the mounting structure is fixed in the mounting groove and a gap formed by the mounting column, so that the shielding strip is fixedly connected with the bottom surface of the mounting groove.

4. The mask plate assembly of claim 3, wherein a cross section of the mounting post perpendicular to the support mask plate and parallel to the first direction is trapezoidal, a shorter side of the trapezoid being close to a bottom of the mounting groove, and a longer side of the trapezoid being far from the bottom of the mounting groove.

5. The mask plate assembly according to claim 4, wherein two ends of each shielding strip are provided with a plurality of mounting structures, the mounting grooves are arranged in pairs in a direction parallel to a second direction, so that the mounting structures at two ends of any one shielding strip are respectively arranged in the two opposite mounting grooves, the second direction is perpendicular to the first direction, and the first direction and the second direction are both parallel to a plane where the mask plate is supported.

6. The mask plate assembly according to claim 5, wherein the number of the first testing holes is plural, and the first testing holes are located on a line parallel to a connecting line of any two opposite mounting grooves.

7. The mask plate assembly of claim 6, wherein the number of said active openings is plural, and said active openings are located between any two adjacent rows of said first test wells.

8. The mask plate assembly of claim 1, wherein the metal mask strips comprise: the second test hole corresponding to the first test hole and the pixel effective opening corresponding to the effective opening.

9. The mask plate assembly of claim 1, wherein the frame further comprises: the supporting part is arranged on one side, back to the mask supporting plate, of the frame part, is fixedly connected with the position, far away from the opening part, of the frame part, and is used for supporting the frame part.