CN108571616A - For the pressure adjusting with the optimization by vacuum valve - Google Patents

For the pressure adjusting with the optimization by vacuum valve Download PDF

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Publication number
CN108571616A
CN108571616A CN201810181662.1A CN201810181662A CN108571616A CN 108571616 A CN108571616 A CN 108571616A CN 201810181662 A CN201810181662 A CN 201810181662A CN 108571616 A CN108571616 A CN 108571616A
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CN
China
Prior art keywords
valve
adjusted
closure member
regulating
profile
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Granted
Application number
CN201810181662.1A
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Chinese (zh)
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CN108571616B (en
Inventor
W·梅德莱纳
L·马鲁格
H·松德雷格
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VAT Holding AG
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VAT Holding AG
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/202—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means actuated by an electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/32—Means for additional adjustment of the rate of flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/046—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/005—Electrical or magnetic means for measuring fluid parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/024—Controlling the inlet pressure, e.g. back-pressure regulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Fluid Pressure (AREA)
  • Details Of Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The present invention relates to for the pressure adjusting with the optimization by vacuum valve.Valve system has the vacuum valve and regulation unit, vacuum valve to include：Valve seat, with the valve opening for limiting opening axis and around the first sealing surfaces of valve opening；The valve closure member of closure valve opening, the second sealing surfaces of band；Driving unit, attachment valve closure member make valve closure member limit variable, provide closed position.It controls to adjust unit and executes regulating cycle, wherein in being pre-adjusted step, what valve closure member was moved to restriction is actually pre-adjusted position；Regulating step executes the specific change of closed position based on actually determined control variable and desired value.Regulation unit has more new function, in execution：Control variable at least is recorded in a part of regulating cycle, exports practical adjustments profile；Practical adjustments profile exports adjusting deviation compared with reference to profile is adjusted；Amendment is actually pre-adjusted position；It is modified be pre-adjusted that position is set as regulating cycle be actually pre-adjusted position.

Description

For the pressure adjusting with the optimization by vacuum valve
Technical field
The present invention relates to a kind of system, which includes vacuum breaker and for being treated under vacuum The control and regulation unit of the pressure regulating operation of journey.
Background technology
It is commonly used for adjusting volume flow or quality stream and being directed through for substantially air tight closure being formed in valve chest The vacuum valve of the flow path of opening is known in the various embodiments of the prior art, and being especially used for must be as far as possible Ground be happened at the vacuum chamber system in the integrated circuit in protected atmosphere, semiconductor or substrate manufacture field without Contaminated particle.It includes for receiving pending or manufacture semiconductor element or base that such vacuum chamber system, which is especially, At least one vacuum chamber evacuated of plate, having allows semiconductor element or other substrates to guide disengaging vacuum chamber At least one vacuum chamber opening and at least one vacuum pump for evacuating vacuum chamber.For example, for semiconductor In the production equipment of chip or crystal liquid substrate, highly sensitive semiconductor or liquid crystal cell pass sequentially through multiple processing vacuum chambers Room, wherein handling the part being located on the inside of processing vacuum chamber by processing unit in each case.In processing vacuum chamber During inside is also transported to chamber during being treated journey from chamber, highly sensitive semiconductor element or substrate must begin Final position is in protected atmosphere (especially without air environment).
For this purpose, on the other hand the peripheral valve for being on the one hand used to open and being closed gas supply or discharge is used to open It is used to introducing and removing part with the transmission valve for being closed vacuum chamber transmission opening.
The vacuum valve that semiconductor device extends there through is set to be also referred to as vacuum due to described application field and relating design Transmit valve, since its most of rectangular aperture cross section is referred to as rectangle valve, due to its common operation mode be referred to as guiding valve, Rectangular slide device or transmission guiding valve.
Peripheral valve is especially for controlling or regulating the gas stream between vacuum chamber and vacuum pump or another vacuum chamber. Peripheral valve is located at the pipeline for example handled between vacuum chamber or transmission chamber and vacuum pump, atmosphere or another processing vacuum chamber System memory.The case where open cross-section of this valve (also referred to as pump valve) is usually less than vacuum transmitting valve.Because using Peripheral valve is based on application field, not only to opening and closing opening and in order to via continuously adjusting complete open position completely The open cross-section between air tight closure position is set to control or regulate flowing, they are also referred to as regulating valve.For controlling Or it is oscillatory valve to adjust the feasible peripheral valve of gas stream.
It is in the first step, generally rounded for example from typical wiggle valve known to US 6,089,537 (Olmsted) Valve disc be revolvably pivoted past the opening being also generally circular in shape, from opening exposure position enter covering opening interposition It sets.In the case of the guiding valve that such as US 6,416,037 (Geiser) or US 6,056,266 (Blecha) is described, valve disc is also There is opening to be typically configured rectangular and is linearly pushed into covering opening from opening exposure position in the first step Between position.In the centre position, the valve disc of oscillatory valve or guiding valve is located at the position opened with the valve seat relative spacing around opening In.In the second step, the distance between valve disc and valve seat reduce so that valve disc and valve seat are uniformly pressed into over each other simultaneously And opening is closed in a manner of substantially airtight.Second movement is preferably substantially happened in the position vertical with valve seat.Example Such as, either via be arranged in valve disc be pressed into around opening extend valve seat on closed side on sealing ring or via Sealing ring against on the valve seat of valve disc closed side can be completed to seal.It is close since closing course in two steps occurs Seal ring, which is almost not subjected to, to destroy the shearing force of the sealing ring between valve disc and valve seat, because of the movement of valve disc in the second step Substantially straight line is vertically happened on valve seat.
Different seal process are known from the prior art, such as know from US 6,629,682B2 (Duelli).For example, true The suitable material of sealing ring and sealing element in empty valve is fluorubber (also referred to as FKM), especially with trade name " Viton " The fluoroelastomer and perfluoroelastomer (abbreviation FFKM) known.
For realizing the translational motion for being parallel to opening of rotary motion (in the case of the oscillatory valve) and valve disc of valve disc (in the case of guiding valve) and perpendicular to opening substantially translational motion this combination various drive systems for example from relating to And oscillatory valve US 6,089,537 (Olmstead) and be related in the US 6,416,037 (Geiser) of guiding valve known.
Valve disc is pressed on valve seat and must be completed in this way so that has both needed to ensure in entire pressure limit Air-tightness also avoids causing to sealing medium (sealing ring for especially taking the form of O-ring) since excessive pressure loads Any damage.In order to avoid this point, it is known that valve the valve disc adjusted based on the pressure difference that is present between valve disc both sides is provided Contact adjust.Especially in the case where pressure oscillation is big either when changing into positive pressure (or on the contrary) from negative pressure, However it cannot ensure that the power of the whole circumference along sealing ring is evenly distributed always.In general, try hard to by sealing ring with because being applied to Support force caused by the pressure of valve detaches.In US 6,629,682 (Duelli), for this purpose, such as propose to have close The vacuum valve for sealing medium, is made of so that the substantially unsupported power of sealing ring the support ring of sealing ring and adjacent positioned It influences.
In order to realize the air-tightness of needs, alternatively for both positive pressure and negative pressure, in addition to the second movement step or replace The second movement step of generation, some known oscillatory valves or guiding valve provide the valve collar around opening, can shift, press perpendicular to valve disc It is pressed onto on valve disc so that valve air tight closure.It can be relative to this kind of valve with valve collar that valve disc actively shifts for example from DE 1 264 191 B1, DE 34 47 008 are known in C2, US 3,145,969 (von Zweck) and 77 31 993 U of DE.US 5, 577,707 (Brida) describe a kind of oscillatory valve with valve shell, and valve shell, which has opening and can be parallel to opening, to be pivoted To control the valve disc of the flow by opening.The valve collar of closing opening is can be by multiple springs and compressed air cylinder in valve disc Direction actively vertically moves.2005/0067603 A1 of US (Lucas et al.) propose the possible further hair of the oscillatory valve Exhibition.
Because above-mentioned valve is used in particular for manufacturing highly sensitive semiconductor element, especially by valve actuating and pass through The mechanical load of valve closure member component and the free amounts of particles in the particle and valve chamber that generate should keep as small as possible. Particle generates mainly for example due to metal-metal contact and the result due to rubbing caused by abrasion.
As described above, vacuum breaker is used to adjust the restriction process environments in processing chamber housing.Usually herein by offer With the pressure signal of the information of chamber interior pressure correlation and by desired value (the expectation pressure that should be realized by adjusting Power) it completes to adjust.Then, change valve closure member position (valve disc) in adjustment process so that in specific time interval Realize desired pressure.
As the replacement of adjusting, vacuum breaker (such as, can also in the given time exist by known technological parameter The desired pressure realized in processing chamber housing) it operates in a controlled manner.For this purpose, such as the related of offer valve disc it is expected position It sets, and equally with scheduled number close to the position.
Above two method all has its specific merits and demerits.The desired pressure in processing chamber housing can be as a result, It is set by predetermined control in relatively short time, but due to normally devoid feedback (for example, current pressure information), The prediction of current main pressure can only be made with a grain of salt.Unexpected (such as, variation is influenced to any of production process The leakage of gas access or processing chamber housing) it is still completely unrecognized, then typically result in workmanship decline.
Compared with control, the pressure for adjusting processing chamber housing is more time-consuming.Feedback signal is (usually actually applied because measuring Chamber pressure pressure sensor and generate) with naturally postpone record and handle.Therefore prolonged with corresponding based on this adjusting It makes late and desired pressure is caused to correspond to later setting.On the other hand, the adjusting of desired pressure can even use processing chamber housing The gas access of middle variation or pressure oscillation are reliably set.Due in view of the more reliable of determining chamber interior pressure Safety is handled, the adjusting of valve is in most cases preferably used.
Invention content
Therefore, the purpose of the present invention is to provide a kind of modified vacuum for the adjuster for having and capable of avoiding disadvantages mentioned above Valve.
Improved (i.e. more rapidly and more reliable) adjusting row is presented in particular, having the object of the present invention is to provide one kind For adjuster modified vacuum valve.
The basic idea of the present invention is that the adjustment process of execution is divided into two part steps to realize that closure member positions Acceleration, to determine chamber pressure.In first part's step, the valve closure member is moved to predetermined in a controlled manner Be pre-adjusted position, and in second part step, then complete the adjusting of chamber pressure.In addition, supervising in each case It surveys and record is especially the regulating cycle being performed a plurality of times, so as to compared with corresponding reference value.It, then can needle based on this comparison Position is pre-adjusted to correct to the subsequent period.
As a result, on the one hand, can realize desired pressure more quickly, secondly can provide autonomous self-correction regulating system.
In order to optimize the adjustment of new operating point (such as new desired pressure in processing chamber housing) in time, by suitable Positioning sequence, which substitutes, to be adjusted to control the transition stage from an operating point to another operating point.Positioning sequence (is pre-adjusted Step) pressure time is most preferably taken near new operating point.After positioning sequence, closed loop mode is switched to so as to then smart Really adjust and maintain pressure.
Such as it is adjusted in advance used in being obtained from the reference cycle adjusted under closed loop mode or several reference cycles Section step and the opportunity for being pre-adjusted position.
It can be directed to next cycle optimum position sequential parameter after each regulating cycle, be especially pre-adjusted position Or it is pre-adjusted the time.
Preferably, positioning sequence is synchronous with flow controller control, that is, is pre-adjusted stopping or positioning sequence starts simultaneously And it determines and starts flow controller.
For being pre-positioned, for example, it is desired to following parameter：
For the closed position (for example, corresponding to position is pre-adjusted) of new pressure adjustment；
The current location of valve closure member；And
Standard makes change according to the standard from current location to adjustment position.
The current location of the valve closure member is especially used in previous cycle.For the latter period, such as in the last week Position or forming position average value (for example, in 100ms) are determined at the end of phase.
It is then stored at the predetermined last average value of next set point (operating point).It will also be it is possible that storage The position realized after the specific time under shaping modes.As a result, in current procedures, can eliminate due to variations of flux or It is influenced caused by plasma ignition occurs in chamber.
Selection is pre-adjusted position, such as so that chamber interior pressure is as quickly as possible close to new desired value.Another party Face, described approach occur too fast so that regulation unit can effectively realize adjustment.
Therefore, the present invention relates to a kind of valve system including at least one vacuum valve and regulation unit, it is described at least One vacuum valve is for adjusting volume flow or quality stream and being used for gas-tight seal processing volume.The vacuum valve includes：Valve seat, institute Stating valve seat has the valve opening for limiting opening axis and the first sealing surfaces extended around valve opening；Valve closure member, The valve closure member has the second sealing corresponding to first sealing surfaces for being substantially airtightly closed the valve opening Surface.
In addition, being provided with driving unit, the driving unit is connected to the valve closure member, is configured so that the valve Closure member：It can be changed in a limiting fashion and adjustable to provide corresponding closed position；And it can be adjusted to close from open position It closes in position, in the open position, the valve closure member exposes the valve opening at least partly, in the closed position In, first sealing surfaces are pressed against on second sealing surfaces and valve opening are made to be closed in a manner of substantially airtight It closes.
The unit that controls to adjust is configured to utilize being pre-adjusted step and then adjusting for the valve closure member Step executes regulating cycle.Such regulating cycle can be executed especially over and over again, wherein can be two such periods Between execute other process steps or period.
It when executing the regulating cycle, is pre-adjusted in step process described, the valve closure member passes through the drive Moving cell it is corresponding startup especially from the open position be moved to by the regulation unit control limited it is current It is pre-adjusted in position.Therefore it is pre-adjusted in step described, the real adjusting of valve position, but the valve closure member does not occur Specifically enter particular state by control, i.e., is currently pre-adjusted position into described.It is described scheduled to be pre-adjusted position It is the variable from period to period in principle to set, and the corresponding adjustment of the closed position is in each case by current limit It makes the fixed position that is pre-adjusted.
During the regulating step, by the currently determining control variable and desired value based on technological parameter come Start the driving unit, according to current specific change or the adjustment for being pre-adjusted position and executing the closed position.It is special It is not that the control variable can be close to the desired value.It can predict that the defined position because of the valve closure member becomes at least partly Change the influence caused by the control variable.In the later step, the closed position occur now really adjust (to close Ring) adjustment.
For example, in response to the measurement pressure of processing chamber housing, the open cross-section of the valve is adjusted in a particular direction, Middle expectation declines pressure with the increase of cross section and it is expected to make pressure rising (can be pre- in the case where cross section reduces The property surveyed).It, can be at least rough in addition to pressure change direction (increase and reduction of pressure) if processing structure is well known The amplitude of pressure change caused by knowing thus.
Due to the two benches property in adjustment period, such as utilize the specific time offset (valve closure occurred because before The controlled adjustment of part and generate) come start adjust, as a result, may access to the current pressure number from the processing volume According to and can thus directly initiate adjusting.
According to the present invention, the regulation unit has more new function, and the more new function, which is configured so that, to be held Between the departure date, the control variable is at least recorded during a part for the regulating cycle, and based on this export practical adjustments Profile (profile).By the practical adjustments profile compared with reference to profile is adjusted, and export adjusting deviation.Determine difference Especially difference degree.
According to the performance of the derived adjusting deviation and based on the shadow that can at least partly predict to the control variable It rings and described is currently pre-adjusted position to correct.In other words, which means that for example more than the determination deviation of specific threshold In the case of, can correct described in be pre-adjusted position and thus to offset deviation.
It is modified be pre-adjusted position and be set and/or be stored as the described of the regulating cycle be currently pre-adjusted position It sets.Therefore the current position that is pre-adjusted correspondingly is reset and is therefore set in next regulating cycle It is pre-adjusted the current of step and is pre-adjusted position.It can thus reduce or avoid completely the regulating cycle in next cycle In before occur deviation.
The regulation unit be additionally configured to so that especially during the production process with processing volume The more new function can be consecutively carried out in multiple regulating cycles.
In one embodiment, the more new function is configured so that：By executing the first regulating cycle or the It is described with reference to adjusting profile to generate and store that the control variable is recorded during one regulating step；And by executing second The control variable is recorded during regulating cycle or the second regulating step to export the practical adjustments profile.
In particular, executed after first regulating cycle or first regulating step second regulating cycle or Second regulating step.
The adjusting profile with reference in the period adjusted before profile is for example recorded on individually.Alternatively, the ginseng Examining adjusting profile can be generated based on multiple periods executed before or by specific learning process.
In other words, in one embodiment, the regulation unit can be configured so that by more in execution It is described with reference to profile is adjusted to generate and store that the control variable is recorded during a regulating cycle or multiple regulating steps, especially It is being averaged for the control variable for wherein completing to record for the specified time interval or particular point in time of regulating step.
This external enwergy of the regulation unit has described with reference to the learning functionality for adjusting profile for generating.The study Function is configured so that during execution：It is corresponding repeatedly roughly the same with the desired operation of the regulating cycle in order to carry out Regulating cycle, at least one period of corresponding regulating cycle record for the valve closure member corresponding expectation position It sets；And it with reference to the corresponding period of the regulating cycle, will be stored as the desired locations of the record of the valve closure member The reference adjusts profile.
The reference adjusts profile can be according to the desired value and for executing the regulating cycle or being pre-adjusted step The reliability time of rapid or regulating step (especially pending process steps) limits.
According to embodiment of the present invention, the regulation unit, which is configured so that, described is currently pre-adjusted Position is corrected so that is generated in terms of direction and/or amplitude in a limiting fashion using the modified position that is pre-adjusted Offset the influence to the control variable or technological parameter of the adjusting deviation.It is pre-adjusted position described in capable of thus adjusting, So that for example too low chamber pressure carrys out pre-compensation by the valve opening of reduction.
The pressure information that may, for example, be the processing volume by the technological parameter of the control variable record, wherein described Desired value can be desired pressure to be achieved in the processing volume, and currently determining control variable indicates the processing The current pressure of volume.Then this is related to adjusting for the pressure of processing volume.
In the modification of the present invention, the desired value can be desired pressure to be achieved in the processing volume, Wherein for example in addition to pressure information, the specified real medium for entering the processing volume of control variable currently determined flows into Amount, especially wherein currently determining control variable consider actual pressure entrance size.Additional information whereby, the expectation pressure Power can be adjusted with increased accuracy and efficiency.
In particular, outlet information can utilize, the currently determining control variable stores or current position is determined, wherein institute State that outlet information is specified to flow out how many quality or volume from the processing volume and based on the closed position per unit time Medium (such as processing gas).In this case, the outlet information can depend on most importantly is provided by vacuum pump Extractability.
In order to execute the regulating cycle, according to one embodiment, triggering or enabling signal are received.It therefore, can basis The reception of enabling signal starts or is pre-adjusted step described in executing.As long as the enabling signal is received and by the adjusting Control unit processing, is carried out the regulating cycle or described is pre-adjusted step.
Preferably, the enabling signal is generated by higher level's processing controller, wherein the processing controller is configured to needle Production process with the processing volume is controlled to the multiple product of same type；The regulating cycle indicates correspondingly more A part for the secondary production process repeated；And the enabling signal is correspondingly repeatedly exported in process of production.
In this context, the processing controller can also provide the synchronization of enabling signal output, such as processing gas Supply or supply variation.As a result, can matchingly start adjustment process with particular procedure step, and start in respective process step It is controllably adjusted to described when (such as together with introducing processing gas) and is pre-adjusted position.
For example, the regulation unit can connect to pressure sensor, wherein the output signal of the pressure sensor The currently determining control variable (current pressure in the processing chamber housing) is provided.Alternatively or in addition, the adjusting control Unit processed can connect to mass flowmenter or mass flow monitoring unit, and the mass flowmenter or mass flow prison The output signal for surveying unit provides the currently determining control variable (such as the relevant letter of influx with gas per treatment Breath).In the latter case, therefore, the control variable needs not be the chamber pressure, but can also indicate current gas stream Enter amount.
Preferably, the form with reference to adjustment curve is taken to record the practical adjustments profile and/or the reference adjusting exterior feature Line.
In one embodiment, the vacuum valve and the regulation unit are executed with unitary design.
Alternatively, the regulation unit can be configured to detach with the vacuum valve structure and connect with the vacuum valve It is logical, wherein there are radio connection or wired connections.
In another function, the regulation unit can be configured so that can according to the practical adjustments profile with It is described to generate processing information with reference to the comparison for adjusting profile.
The processing information can be generated according to the performance of derived adjusting deviation, especially wherein in the adjusting deviation The processing information is generated in the case of more than predetermined threshold.
This external enwergy of the processing information includes output signal, wherein generating the output signal from the sense of hearing or visual angle. In addition, the processing information can include providing the quality information of the regulating cycle quality, and by the quality information, can produce Raw user's output, especially control information or alarm signal.
Based on the processing information, unexpected process status can be in addition identified, it is especially non-during the regulating cycle Desired quality influx especially wherein can recognize that the presence of the processing volume leakage.
The invention additionally relates to a kind of regulation units for vacuum valve, wherein the vacuum valve is configured for Adjust volume flow or quality stream and/or for gas-tight seal processing volume and with adjustable valve closure member.
According to the present invention, the regulation unit is configured to especially be performed a plurality of times for the pre- of the valve closure member The regulating cycle of first regulating step and subsequent regulating step.When executing the regulating cycle, step mistake is pre-adjusted described Cheng Zhong, the valve closure member are especially moved to from the open position by the tune by the corresponding startup of the driving unit The current of restriction of section control unit control is pre-adjusted in position.During the regulating step, by being based on technique ginseng Several currently determining control variables and desired value start the driving unit, current be pre-adjusted position according to described and hold The specific change of the row closed position or adjustment, especially thus the control variable can be close to the desired value.It can be at least It partly predicts to influence caused by the defined position because of the valve closure member changes the control variable.
There is the regulation unit more new function, the more new function to be configured so that during execution, at least The control variable is recorded during a part for the regulating cycle, and based on this export practical adjustments profile.It will be described Practical adjustments profile exports adjusting deviation compared with reference to profile is adjusted.Export adjusting deviation further includes random establishes not There are deviations.
According to the performance of the derived adjusting deviation and based on the shadow that can at least partly predict to the control variable It rings and described is currently pre-adjusted position to correct；And the modified position that is pre-adjusted is set and/or is stored as the adjusting The described of period is currently pre-adjusted position.Correspondingly it should be understood that if deviation is zero, can also it be modified so that institute State it is current be pre-adjusted position and replace with roughly the same new be pre-adjusted position.
The regulation unit be configured so that especially during the production process with the processing volume The more new function can be consecutively carried out in multiple regulating cycles.
The invention further relates to a kind of methods carrying out the production cycle using vacuum valve, wherein the vacuum valve is configured Be arranged for adjusting volume flow or quality stream (especially from the volume flow or quality stream of processing volume) and for airtight Encapsulation process volume.The vacuum valve includes valve seat, and the valve seat has the valve opening for limiting opening axis and around described The first sealing surfaces that valve opening extends；In addition the vacuum valve has valve closure member, the valve closure member is for substantially airtight Ground is closed the valve opening, has the second sealing surfaces corresponding to first sealing surfaces.It is connected to the valve closure member Driving unit be configured so that the valve closure member：It can be changed in a limiting fashion and adjustable to provide corresponding closure position It sets；And it can be adjusted in closed position from open position, in the open position, the valve closure member is sudden and violent at least partly Reveal valve opening, in the closed position, first sealing surfaces be pressed against on second sealing surfaces and Valve opening is set to be closed in a manner of substantially airtight.
During the method, the regulating cycle of the valve closure member, and the adjusting is especially performed a plurality of times Period includes at least the adjusting variation or adjustment of the controlled motion and the closed position of the valve closure member.The valve is closed The controlled motion of part is to receive what enabling signal was completed according to the specific aim startup by the driving unit, especially from institute It states open position and is moved to the current of restriction and be pre-adjusted position；Then, the adjusting variation or adjustment of the closed position are bases Start the driving unit in the currently determining control variable and desired value of technological parameter, according to the current tune in advance Section sets realization, especially thus the control variable close to the desired value.Or it can be at least known in this case It partly predicts to influence caused by the defined position because of the valve closure member changes the control variable.
The control variable is at least recorded during a part of regulating cycle, and wide based on this export practical adjustments Line.By the practical adjustments profile compared with reference to profile is adjusted, and export adjusting deviation.It is inclined according to the derived adjusting The performance of difference and based on described being actually pre-adjusted position to the influence that can at least partly predict of the control variable to correct； And it is modified be pre-adjusted position and be set and/or be stored as the described of the regulating cycle be currently pre-adjusted position.
Subject of the present invention is further to a kind of computer program product being stored in machine-readable carrier, the meter Calculation machine program product is particularly stored in the storage unit of above-mentioned valve system or in the regulation unit, is had for holding The program code of at least particular step of row or the control above method.Steps are as follows：
Make valve closure member controlled motion；
The closed position is set to adjust variation or adjustment；
Export practical adjustments profile and compared with reference to profile is adjusted；
Export adjusting deviation；
According to the performance of the derived adjusting deviation and based on can at least partly predict the control variable It influences described to be pre-adjusted position to correct；And
By it is described it is modified be pre-adjusted position and be set as the described of the regulating cycle be currently pre-adjusted position.
In particular, program or program code are executed in electronic data processing division, especially in the adjusting control of valve system Program or program code are executed in unit or regulation unit processed.
The update of corresponding regulating cycle can be therefore completed by executing correspondence (computer-implemented) algorithm.
Description of the drawings
The specific exemplary embodiments hereinafter schematically shown in merely exemplary reference chart describe in detail Equipment according to the present invention and according to the method for the present invention, wherein also discussing the further advantage of the present invention.In figure in detail Explanation：
Fig. 1 shows the first embodiment party of the vacuum system of the control and regulation operation for processing chamber housing according to the present invention The schematic diagram of formula；
Fig. 2 a to Fig. 2 b respectively show the adjustment process of the vacuum valve for setting new operating point；
Fig. 3 a to Fig. 3 b respectively show the adjusting of the vacuum valve of the chamber pressure for adjusting or maintaining to have changeable flow Process；And
Fig. 4 a to Fig. 4 c show an embodiment of the adjustable vacuum valve according to the present invention as oscillatory valve.
Specific implementation mode
Fig. 1 schematically shows the knot for the system of processing object (for example, semiconductor wafer) under vacuum Structure.The structure include processing chamber housing 1 and enter processing chamber housing feeder, wherein feeder be provided with gas flowmeter or Adjuster 2, therefore a certain amount of gas for flowing into processing chamber housing or the gas flow that inflow can be adjusted accordingly can be measured. In addition, being provided with pressure sensor 3, allow to determine the pressure (chamber pressure) on the inside of processing chamber housing.
In the outlet side of processing chamber housing 1, vacuum pump 4 is connected to chamber 1 to be evacuated to it.For controlling or regulating stream The adjustable vacuum valve 10 of mass flow is arranged between vacuum pump 4 and chamber 1.(controlled) adjustability can be in this example Such as by valve it is electronic, pneumatically or hydraulically drive and realize.
According to the present invention, there is the system regulation unit 11, regulation unit 11 to be connected to valve 10 and borrow Help corresponding input quantity 12 and desired amount 13 or by for carrying out being pre-adjusted position known to valve closure member to vacuum valve 10 Adjusting control to provide valve 10 starts.Being pre-adjusted position can for example take the form of adjustment position to be stored in adjusting control In the internal storage of unit 11.
According to the present invention, regulation unit 11 provides the control (form for taking regulating cycle) to valve.Regulating cycle Include the stage of two continuous operations.In (being pre-adjusted step) in the first stage, valve closure member is by centre known before Desired locations (being pre-adjusted position) are placed in this position.Step is pre-adjusted to be started or triggered by enabling signal 5.Start letter Numbers 5 are usually exported by master controller, and wherein the controller provides the control to higher level's production process.
For example, main controller controls, which are processing chamber housing, is equipped with pending workpiece (for example, semiconductor wafer), then handling The atmosphere that restriction is generated in chamber, for such processing atmosphere, the processing gas generally defined is especially via gas flow Meter and is fed to by vacuum extraction and its using the adjusting of valve 10 in processing chamber housing 10 adjuster 2, and internal pressure reaches To scheduled level.Preferably, the generation and output of enabling signal 5 are synchronous with the processing of master controller control.For example, starting letter Numbers 5 export after outfit and together with the entrance of processing gas.
For (that is, quickly) process cycle of optimization, complete to be pre-adjusted step first.By this means, do not having Valve is set to be closed in the case of having adjusting and only by directly controlling and (being output to motor-driven valve 10 by the way that signal 14 will be adjusted herein) Part, which enters, is pre-adjusted position.For example, correspondence offset of the storage relative to valve closure member open position, can specifically connect Closely.It is such to be pre-adjusted or the advantages of location-based advance control is significantly faster to obtain desired extractability, As a result, when being observed in entire regulating cycle, this can be carried out with correspondence shorter cycle time.
For pure regulating system, the increase of speed is also caused by natural Setting signal postpones (delay).For example, pressure Sensor 3 need to establish current chamber pressure before specific time and induction signal is generated and is exported.That is, adjusting System also receives the control variable of the needs with this delay, and just this adjusting is caused to postpone and obtain desired pressure.
By being pre-adjusted, the first adjustment part of valve closure member can advance in the case of no feedback signal (when Preceding pressure), it is then communicated to regulating step, i.e. the adjusting campaign of valve closure member.By this means, above-mentioned delay can subtract It is small, because the signal of pressure sensor is for example already present on the subsequent adjusting stage when starting and then can be by adjuster directly Reason.
From step is pre-adjusted arrival is happened to the transition of regulating step (second stage for forming regulating cycle) in advance When adjusting position.Arrival is pre-adjusted position can be for example by the closed position currently continuously determined and by the position and in advance The fixed position that is pre-adjusted is compared to identify.Corresponding current closed position information 17 can be passed from valve 10 or valve actuator It is defeated to arrive regulation unit 11.In particular, the adjusting optimization module 15 to regulation unit 11 occurs for such information transmission (being indicated by the dotted line extended line of logic arrow 17).As long as arrival is pre-adjusted position, switch from the pattern that is pre-adjusted (control) To real shaping modes (regulating step).
Alternatively, it (can be exported) from the known startup behavior of valve in the predetermined lasting time for being pre-adjusted step Switch between two steps afterwards.Because automatically switching after in the past to be pre-adjusted the time that step provides, it is This does not need further feedback signal.
Since it is preset at that time be pre-adjusted position, pressure sensor 3 is continuously obtained in regulating step Current pressure signal 12 is used as input quantity 12, i.e., as currently determining control variable, as a result, working as in processing chamber housing 1 Preceding pressure state is known or ready.In addition regulation unit 11 is provided with the expectation for respective handling process Pressure or desired pressure distribution, as desired value or desired value 13.By these input quantities, it is single that adjustment signal 14 is conditioned control Member 11 generates and is output to motor-driven valve 10.
For the expectation internal pressure in setting processing chamber 1, during regulating cycle, therefore change vacuum valve 10 Valve is open so that gas flowing occurs from processing chamber housing so that current internal pressure can be close to goal pressure, in first step In be adjusted to be pre-adjusted position by the controlled disposable adjustment of valve closure member, and in the second step using continuous note The control variable of record is adjusted by the adjusting variation of closed position.Here especially it is possible to substantially predict to become because of control Effect caused by the defined position variation of valve closure member in amount, it is possible thereby to provide specific and effectively adjust.
For example, in the first time period of processing procedure, the opening degree of valve opening should be set to relatively large so that interior Portion's pressure declines as quickly as possible, and in another adjustment process, and the opening degree that valve is open should be set to smaller so that In subsequent time step, it is expected that internal pressure can set and keep by controlling outflow small amount gas per unit time, Wherein it is especially in the presence of the mixed form of laminar flow or molecular gas stream or the two.It is every in order to set for the two periods A desired pressure can be stored with the regulating cycle according to the present invention for controlling and then adjusting in advance.
By changing valve position, i.e., the position that valve closure member is open relative to valve changes the pressure of 1 inside of processing chamber housing Power, therefore for each regulating cycle, define and adjust profile (especially adjustment curve), i.e., it is corresponding in specified time interval The pressure and/or valve position at time point.According to the present invention, the First partial section for adjusting profile is defined as in each case It is pre-adjusted step.Processing procedure in processing chamber housing is usually repeated as many times in regulating cycle and (is performed a plurality of times and adjusts profile), Wherein then pressure should be executed according to corresponding periodic mode in an identical manner in each case to adjust.
According to the present invention, regulation unit 11 has more new function.By during regulating cycle or at least adjusting More new function is executed during section step.Here (such as the pressure sensor of control variable 12 being received at least intermittently is recorded Signal) and based on this export practical adjustments profile.Thus, for example, export pressure is distributed and/or is receiving closed position information Closed position profile when 17 part as control variable, i.e., about the value of the chamber interior pressure of regulating time point and closing Close the value of position.
During by update function renewal regulating cycle, the practical adjustments profile of record and reference are adjusted into profile Compare and exports adjusting deviation on this basis.In this case, pre-recorded tune can be indicated with reference to adjusting profile Save the period, or optionally in a particular manner and limit and it is controlled under conditions of execute the step of.For example, with reference to adjusting Profile takes the form of desired adjustment curve to store.
The performance of adjusting deviation derived from being then based on is simultaneously pre- to correct based on the basic predictable effect for controlling variable 12 First adjusting position.In other words, being pre-adjusted position can be reset so that practical to adjust in the frame for calculating deviation Profile is saved close to reference to profile.
It is pre-adjusted position in order to correct, same recordable closed position can also be considered in the regulating step of execution Information 17.As a result, in addition to regulating step, the additional information about valve position can be obtained, and can be adjusted partially derived Reference is made between difference and the closed position being associated.As a result, it is known that specific closed position is to the stress level in chamber 1 Effect can make targeted and effective amendment or correction during adjusting to the adjusting benchmark of particular point in time.
Regulation unit 11, which may be configured so that, to be connected especially during production process in multiple regulating cycles More new function is executed continuously.
On the one hand, the system shown in Fig. 1 therefore can rapidly adjust in processing chamber housing 1 desired pressure state (due to The two benches property of adjusting), be furthermore possible to continuously correct adjusting profile so that for example and it is expected adjust have any deviation In the case of, can for example position be pre-adjusted by readjusting or other adjustment parameters automatically correct regulating cycle.
For verification process integrality and/or quality, inspection or monitoring function can also be provided.By the adjusting with adjusting The adjusting profile of the relevant information of profile, current record can be compared with desired profile, and is based on this comparison, can export About the information that (for example whether in margin of tolerance) whether has been adjusted in the limit of setting.
Regulation unit 11 may further include learning functionality, by learning functionality, can create and refer to adjusting Relevant information.For this purpose, to set desired conditions (for example, it is desirable to the distribution of pressure, preferred temperature, pressure, temperature curve Deng) and the production cycle is performed a plurality of times using regulation unit 11, the pressure in chamber 1 is in a manner of adjusting via valve position To set to realize desired pressure.During undergoing these production cycles, the valve position in the independent period can be in regulating time It is stored.Then, then the expectation for combining independent data group (one data group of each regulating cycle) adjusts information from can be with Thus the data volume for example generated by compensation calculation or modeling exports.
Audit function can be further configured to the current adjusting profile based on record to execute to desired value to be achieved Amendment, for example to influence adjustment process so that the deviation established in adjusting is compensated in subsequent regulating cycle.It changes Sentence is talked about, and audit function, which can be especially in such a way that time dependence is constant, to be exported desired value and the desired value is introduced into this In the control circuit of kind form.
In a similar way, audit function can correspondingly act on the control variable currently measured (for example, measuring pressure Power) on.Higher pressure is measured than practical for example, can simulate, to reduce internal pressure more quickly.
The intervention of adjustment process can be especially by audit function and (such as passed through by being directly inputted in adjuster Correct adjustment parameter) it completes.
In addition regulation unit 11 has output channel 16.Whereby, can be with output signal, which includes and currently adjusts The relevant information of nodular state.As a result, such as user whether can be happened at identification process in its predetermined limits or with its whether There are deviations.Alternatively or in addition, signal can be supplied to processing unit or higher level's processing control apparatus, as a result, for example, can be with Carry out the automatic amendment of whole process.
By audit function, not only can therefore check whether in accordance with the adjustment process provided for valve 10, but also in addition may be used Whether it is happened in its limited boundary condition with prediction process itself.Such as, if it is determined that deviation is between current record Between adjustment curve and the expectation adjustment curve stored for the process, then by the deviation, such as processing chamber housing is can be inferred that It is middle exist leakage or to processing chamber housing charging and the process be characterized accordingly by it is defective, without correct regulating cycle. In the case of not having audit function according to the present invention, such leakage can simply " overregulate ", i.e., will correspondingly start Valve so that reach desired pressure in the given time, and do not have defect in the process distribution map that outside is established.
Fig. 2 a and Fig. 2 b respectively illustrate the adjustment process of the vacuum valve in order to set new operating point (i.e. new pressure set-point). Thus system is predefined is, it should change the internal pressure of vacuum chamber.This may for example be walked for executing specific process Suddenly it is necessary.In general, goal pressure to be achieved is predefined as the desired value of the step.
Curve 121,21 above corresponding indicates the pressure distribution in time t in vacuum chamber.In pressure curve 121,21 Second curve 122,22 as shown below indicates positioning or position of the valve closure member within the period shown.
Fig. 2 a are shown sets new pressure by the special adjusting of closed position.In principle, such to adjust from existing It is known in technology.
Here, time t0Define desired pressure variation.In response to this specification, change the position of valve closure member.In song In line 122, this passes through immediately in t0The horizontal of curve 122 later declines to illustrate.Due to the new position of valve closure member, chamber Pressure in room correspondingly quickly increases (t first0Curve 121 later) and the close stress level needed.As shown, Carry out the counter motion of trigger valve closure member by adjusting so that chamber interior pressure will not increase above desired pressure.
In the period Δ t shown1In, chamber pressure balances at aspiration level.This balance is the tune of valve closure member Save the result of movement.If pressure tends to increase, such as more than desired pressure, then " counter motion " is started by valve, i.e., usually set Surely exposed valve opening increases so that the negative pressure that vacuum pump is provided increases.The performance of this adjusting campaign based on closure member, Relative motion then occurs to offset the too low trend of any following internal pressure again.
In order to subsequent adjusting according to the present invention directly relatively, Fig. 2 b illustrate it is such then adjust, with by Control is pre-adjusted step (the first sequence) and subsequent regulating step (the second sequence) to realize identical desired pressure (as schemed 2a)。
Therefore, in time t0, the adjusting campaign of valve closure member do not start directly, will close in the first step herein Component is placed into predetermined valve position (curve 22).For the position, it can preferably be achieved in the inside pressure of (curve 21) Interrelating effect in power is it is known that and associate.It is internal if therefore valve closure member is pre-adjusted position into this Pressure is correspondingly rapidly and specifically close to the stress level finally to be realized.
The position can for example be determined by the learning process first carried out in advance to be controlled.Due to vacuum chamber In process steps that often period repeats, the pressure change described in chamber can be often in the specific production of multiple like products Period repeatedly carries out.It is pre-adjusted the introduction of position therefore is particularly advantageous herein.
Only start after closure member enters and is pre-adjusted the controlled adjustment of position for example, the active of closed position is adjusted. The controlled motion of valve closure member and the overlapping for adjusting movement are also possible.Therefore for example it can reach closed position or new phase It hopes shortly before pressure and starts adjusting.
Therefore subsequent regulating step can be seen in the context of the present invention, be not to be made exclusively for being kept completely separate in time The step of, but only start after being pre-adjusted.
As being clear that, the time Δ t for setting new pressure of the invention realized can be utilized2With Δ t1Than More significant reduction.Being reduced close to position is pre-adjusted due to controlled based on the pressure equalization process of adjusting near desired pressure Or it avoids significantly.Cause to obtain the phase more quickly in the controlled summation for being pre-adjusted step and following classical regulating step in this way Hope pressure.
In addition, the present invention provides the continuous updates for being pre-adjusted position.This is especially in such as particular substrate The adjustment process usually repeated in batch production process is particularly advantageous.Here, each regulating cycle is pre-adjusted Position can use the data obtained from front or several preceding cycles to set.
Preferably, the pressure profile 21 of current adjustment cycle can be recorded and with the pressure profile of front or another reference Profile compares.By this comparison, then correction or amendment that setting is pre-adjusted position can be carried out.Here two are based particularly on Determination deviation between a profile is completed to correct, i.e., if deviation is more than specified tolerances range, can be with utilization orientation and width Degree resets and is pre-adjusted position so that thus provides the reaction to deviation.In particular, may be thus (such as specific Regulating time point and per unit time) caused by the effect of the specific change for being pre-adjusted position of pressure change be known , i.e., it can correspondingly be predicted especially for known procedures system.Knowledge whereby, the update for being pre-adjusted position can be non- Often accurately and with the effect of optimization carry out.
Fig. 3 a and Fig. 3 b respectively illustrates the changeable flow in such as processing gas and adjusts or maintain chamber pressure Adjustment process at vacuum valve.Thus system is predefined is, the internal pressure of vacuum chamber should be kept constant.This is for example right It may be necessary in executing specific continuous process step, wherein different processing gas is used certainly, but the pressure in chamber Power should keep identical processing horizontal.
Fig. 3 a and Fig. 3 b show the processing sequence of the vacuum chamber in several process cycles.In the modification shown, hand over Alternately carry out two kinds of different disposals (for example, coating procedure).This passes through the sequence explanation of two sequences A and B.Each process steps Extend in a time quantum, respectively parameter occurs wherein sequence A with identical technique, and sequence B is also with identical work Skill parameter occurs, especially different from A (such as being different the inflow of processing gas).
Fig. 3 a are shown by the exclusive adjusting of classics for realizing chamber pressure to the adjusting setting of valve closure member position In the case of pressure profile 151 and position profile 152.
In the profile of chamber interior pressure, the switching between corresponding sequence A and B can be clearly identified.Almost immediately After handoff procedure (gas stream i.e. in chamber changes), curve 151 shows corresponding deflection.From process cycle A mistakes When crossing to period B, pressure relatively quickly increases, because for example more processing gas are fed to chamber in per unit time In room.
As measurement pressure rising directly in response to the position of valve closure member is changed in a manner of adjusting.It is transitioned into from A When B, the flow openings on vacuum valve increase for this purpose, i.e., the change in location of valve closure member shows in the positive direction.This can To be exported by position curve 152.Then, pressure declines and drops to desired pressure or less in short time interval again.Again Secondary response readjusts the position of closure member in degradation so that is directed to process cycle B, keeps former with the valve opening of change Beginning chamber pressure (desired pressure).
When being transitioned into period A from process cycle B, it is similar to the case where being transitioned into B from A in principle, pressure is relatively rapid Ground reduces and throttle position on (make valve flow opening degree reduce) in the opposite direction.
Correspondingly re-adjustments step is (here within the whole process duration：11 process cycles).
In these transition periods, the time before reaching desired pressure is relatively long.Here pass through equilibrium process Δ tA With Δ tBOccupy the major part of corresponding regulating cycle.Desired pressure substantially constant only in the relative small portion in period.
On the other hand, Fig. 3 b are shown is repeated with subsequent regulating step according to this hair using controlled being pre-adjusted Pressure profile 51 during bright regulating cycle and valve position profile 52.The frame parameter of process cycle A and B are similar in Fig. 3 a Process A and B.
It can clearly identify the increase of the uniformity for the pressure profile 51 realized in the whole process here.From one During regulating cycle is correspondingly transitioned into subsequent regulating cycle, the drastically increasing of the desired pressure in chamber is greatly reduced or avoided Add or reduces.By front be pre-adjusted step it is most important realize this improvement.
For example, if being transitioned into period A from a regulating cycle B, then received according to the regulation unit that the present invention configures Such as the correspondence trigger signal from processing controller.Trigger signal or its generation are especially dependent on the startup point of period A.Profit With the triggering period, start corresponding regulating cycle.In particular, trigger signal flows into system synchronization with gas so that regulating cycle For example each supply extra process gas or a greater amount of gases can be matched with.
Alternatively, in addition feasibly, regulation unit directly receives the signal from gas flowmeter or adjuster, and And it is based on the signal, start the corresponding of valve position and adjusts.
In one embodiment, execute regulating cycle data can be stored in such as regulation unit or with this list In the memory of member connection.Data generally include close to be in a controlled manner pre-adjusted position and from being pre-adjusted step It is transitioned into the parameter (such as time point) of regulating step.
Since happens is that being pre-adjusted step, therefore closed position is moved into herein waits for that pressure it is expected in setting first Power at least close to or substantially realize in the state of.Then, desired pressure is set and the regulating step by executing It keeps.
Until required desired pressure is realized again and keeps time utilization root in the chamber during flowing variation Method according to the present invention significantly shortens, i.e., desired pressure is balanced more quickly (with reference to Fig. 3 a).Segmentum intercalaris when this leads to corresponding It saves, therefore overall reduction and more effective process steps.This is used for example in the time Δ set in period B needed for desired pressure tBIt shows.When from the period, B was transitioned into A, control in advance is so accurate and suitable so that hardly there is desired pressure Any deviation and desired pressure substantially remains unchanged.
The bar 53 of description shows the Annual distribution of control stage 53a in advance, and wherein valve closure member is during regulating cycle It is placed in and is pre-adjusted in position and practical " real " adjusting stage 53b.The time lengthening of control stage 53a is in period A in advance It is different in B.
According to the present invention, the update of corresponding regulating cycle carries out within the whole process duration, that is, is executing 11 institutes It is carried out during describing the period.For two periods A and B, provide more new function here, i.e. the more new function of period A and period B More new function.As an example, describing more new function below for period B.
During executing period B for the first time, valve closure member is placed in a predetermined position in being pre-adjusted step.This is pre-adjusted position Setting can for example determining by the learning process of front or manual correction.It is later to continuously adjust setting to close to be pre-adjusted step Close position.For period B, record adjusts profile, i.e., pressure moves towards curve 51 and/or curve 52 is moved towards in position.Using thus The adjusting profile of expression compared with can adjusting profile with the expectation of period B, especially compared with it is expected to adjust, and is based on this Kind compares, it may be determined that and it is expected to adjust any deviation of profile.Based on derived deviation, can be directed to execute next time or under One executes period B and is pre-adjusted position to correct.It corrects and is especially subjected to the deviation bigger than the tolerance of permission.
Being pre-adjusted the amendment of position can carry out in this way, i.e., determination deviation when make start period B after pressure on Rise and more strongly limited than original offer, determine and store it is new be pre-adjusted position, amplification of the valve when entering period B is provided Open position.Rise as a result, excessive pressure can correspondingly be offset.In addition, can not only correct advance tune in the direction Section sets and can update amplitude of variation by the deviation of the degree of determination.
During second executes period B, i.e., after intercycle A, valve closure member moves in being pre-adjusted step It is pre-adjusted in position and (occurs in a controlled manner) to what is thus newly limited.Regulating step correspondingly occurs.For this second Record adjusts profile again for secondary execution.Now, the profile can optionally again with it is original it is scheduled with reference to adjust compared with or Compared with the profile of previous cycle B.In other words, it is desirable to adjust profile by predetermined reference adjusting or the profile table of previous cycle B Show.
If such as by adjust profile comparison determine, although pressure rise it is excessive, equilibrate to desired pressure it The preceding time is reduced, then is pre-adjusted the update of position and can also specifically mean and start to increase with reference to the deviation adjusted (such as the pressure oscillation more limited).By temporarily receiving larger adjusting deviation, shorter process time can be achieved in Number.
Furthermore it is possible to actively impact of the aforementioned variation due to being pre-adjusted to regulating cycle B be exported, it is possible thereby to determine The predictability influenced caused by being pre-adjusted position.
Fig. 4 a to Fig. 4 c show the embodiments possible of the valve according to the present invention for the form for taking oscillatory valve.Make flowing There is the valve of the substantially airtight interruption in path valve chest 31, valve chest 31 to have opening 33.Opening has circular cross section.In valve disc In the closed position of 38 (valve closure members), opening 33 is closed in a gas tight manner by valve disc 38.Fig. 4 b and Fig. 4 c illustrate valve The open position O of disk 38.
Opening 33 is closed by valve seat.The valve seat is formed by sealing surfaces 35, and sealing surfaces 35 are axially directed to the side of valve disc 38 Extend to and transverse to opening axis 34, which has annulus shape and be formed in valve chest 31.
In addition, valve, which has, can also be roughly parallel to the pivotable valve disc 38 that opening axis 34 adjusts.
Valve disc 38 is connected to electric drive 40 by the arm extended via lateral configuration on disk and perpendicular to opening axis 34 (motor).The arm 39 is located in the closed position of valve disc 38, opening 33 open cross-section on the outside of in size and geometry along The axis 34 that is open protrudes.
Electric drive 40 is configured by using corresponding speed changer so that valve disc 38 (as is common for oscillatory valve) energy By driver 40 transverse movement x (transverse to opening axis 34 and be roughly parallel to opening 33 cross section) pivot and it is vertical The form that pivot axis 41 moves pivotally between open position O and centre position, and energy are taken in opening axis 34 By the longitudinal movement y linear displacements for being parallel to opening axis 34 of driver 40.In the open position, valve disc 38, which is located in, stops It stays in section, laterally adjacent to 33 configuration of the first opening so that opening 33 and flow path are released.In centre position, valve disc 38 are located at the distance on the first opening 33 and cover the open cross-section of opening 33.In closed position, opening 33 It is closed in a gas tight manner and flow path is interrupted, thus between valve closure member 38 (valve disc) and the sealing surfaces 35 of valve seat There are air tight contacts.
In order to realize that the automatic and modulated opening and closing of valve, valve provide electrical adjustment control unit, electronics tune Section control unit is configured and is connected to driver 40 so that valve disc 38 is adjustable with correspondingly air tight closure in this way Processing volume or the internal pressure for adjusting the volume.Such adjusting unit forms valve system according to the present invention together with valve System.
As described above, valve disc 38 starts to be moved to being pre-adjusted in position of restriction in a controlled manner.Then by control Variable processed and the control variable of output are variably set the position of valve disc 38.Obtain and be connected to the current pressure of the processing volume of valve The relevant information of power state is as input signal.In addition, another input quantity (such as mass flow in volume) can be supplied to Adjuster.By this tittle and by the preset expected pressure that should be volume settings or realization, then regulating cycle when The interior adjusting setting that valve occurs so that the mass flow from volume can over time be adjusted by valve.Go out In the purpose, vacuum pump is arranged in the downstream of valve, i.e. valve is arranged between processing chamber housing and pump.Thus, it is possible to balance expectation pressure Power is distributed.
By setting valve closure member 38, for the 33 corresponding open cross-section of setting of valve opening, thus setting can be from processing The a certain amount of gas that volume evacuates per unit time.For this purpose, valve closure member 38, which can have, is different from circular shape, Especially realize the media flow of laminar flow as far as possible.
In order to set open cross-section, transverse movement x by driver 40 from open position O to centre position and borrow Help longitudinal movement y of the driver 40 from centre position to closed position, valve disc 38 that can be adjusted by regulation unit 11.In order to Open flow path completely, longitudinal movement y by driver 40 from from closed position to centre position and by driver 40 It can be adjusted by control unit from centre position to the transverse movement x of open position O, valve disc 38.
In this illustrative embodiments, driver 40 is configured as electro-motor, and wherein speed changer can switch so that The driving of driver 40 either causes transverse movement x or causes longitudinal movement y.Driver 40 and speed changer are electric by adjusting Son starts.It is especially known according to the prior art with this speed changer shifted gears.Several drivings can be further used Device realizes transverse movement x and longitudinal movement y, the wherein startup of control unit take over driver.
The accurate adjusting or setting of fluid are not only being beaten by valve disc 38 by transverse movement x using described oscillatory valve Pivot between open position O and centre position adjusts to realize, and mainly by valve disc 38 by longitudinal movement y along opening Serial regulation of the axis 34 between centre position and closed position is realized.The oscillatory valve of description can be used for accurately adjusting and appoint Business.
Valve disc 38 also has valve seat to all have sealing surfaces 35, i.e. the first sealing surfaces and the second sealing surfaces.First sealing In addition surface 35 has sealing element.The sealing element can be for example vulcanized to by vulcanization on valve seat as polymer.It substitutes Ground, sealing element can for example be designed as the O-ring in valve seat groove.Sealing material can also adhere on valve seat, be achieved in close Envelope.In an alternative embodiment, sealing element can be arranged on the side (especially the second sealing surfaces) of valve disc 38.These set The combination of meter is also feasible.
As the replacement of the oscillatory valve shown, vacuum valve system according to the present invention can use different types of vacuum valve reality It applies, such as clack valve, guiding valve or so-called butterfly regulating valve.In particular, the system with pressure-regulating valve is configured for vacuum Region.In addition it is also possible to using oscillatory valve, closure can be adjusted only in one direction.
It should be understood that discribed attached drawing only symbolically describes possible illustrative embodiments.It is various according to the present invention Method can also be combined with each other and be combined with the pressure controlled art methods and device for vacuum process.

Claims (15)

1. one kind including the valve system of vacuum valve (10) and regulation unit (11), the vacuum valve (10) is for adjusting volume Stream or quality stream and/or be used for gas-tight seal processing volume (1), wherein the vacuum valve (10) includes：
Valve seat, the valve seat have the valve opening (33) for limiting opening axis (34) and extend around valve opening (33) The first sealing surfaces (35)；
Valve closure member (38), the valve closure member (38) are closed for being substantially airtightly closed the valve opening (33), the valve Component has the second sealing surfaces corresponding to first sealing surfaces (35)；And
Driving unit (40), the driving unit (40) are connected to the valve closure member (38) and are configured so that described Valve closure member (38)：
O can change and adjust to provide corresponding closed position in a limiting fashion；And
O can be adjusted in closed position and can reversely adjust from open position (O), in the open position (O), the valve Closure member (38) discharges the valve opening (33), in the closed position, first sealing surfaces (35) at least partly It is pressed against on second sealing surfaces and valve opening (33) is made to be closed in a manner of substantially airtight,
It is characterized in that, the control and regulation unit (11) is configured to especially be performed a plurality of times with for the valve closure member (38) the regulating cycle for being pre-adjusted step (53a) and subsequent regulating step (53b), wherein when executing the regulating cycle When：
It is described be pre-adjusted step (53a) during, phase that the valve closure member (38) passes through the driving unit (40) It should start and move, especially (O) is moved to and is limited by the regulation unit (11) control from the open position Actually it is pre-adjusted in position；And
During subsequent regulating step (53b), pass through the actually determined control variable (12) based on technological parameter And desired value (13) starts the driving unit (40), and the closed position is executed according to the position that is actually pre-adjusted Specific change or adjustment, especially thus the control variable (12) can be close to the desired value (13), wherein can at least portion Ground prediction is divided to be influenced caused by the defined position of the valve closure member (38) changes on the control variable (12),
Wherein, there is the regulation unit (11) more new function, the more new function to be configured so that during execution：
The control variable (12) is at least recorded during a part for the regulating cycle, and based on the practical tune of this export Save profile (21,51)；
By the practical adjustments profile (21,51) compared with reference to profile is adjusted, and export adjusting deviation；
According to the performance of the derived adjusting deviation and based on can at least partly predict the control variable (12) It influences described to be actually pre-adjusted position to correct；And
It described be pre-adjusted position setting by modified and/or be stored as the described of the regulating cycle and be actually pre-adjusted position It sets,
Wherein, the regulation unit (11), which is configured so that, can be consecutively carried out the more new function, especially have The more new function can be consecutively carried out in multiple regulating cycles by having during the production process of the processing volume (1).
2. valve system according to claim 1, which is characterized in that the more new function is configured so that：
It generates and stores up by recording the control variable (12) during executing the first regulating cycle or the first regulating step It deposits described with reference to adjusting profile；And
It is exported by recording the control variable (12) during executing the second regulating cycle or the second regulating step described Practical adjustments profile (21,51),
Especially wherein, executed after first regulating cycle or first regulating step second regulating cycle or Second regulating step.
3. valve system according to claim 1 or 2, which is characterized in that the regulation unit (11) is configured to make It obtains and generates and store institute by recording the control variable (12) during executing multiple regulating cycles or multiple regulating steps It states with reference to profile is adjusted, especially wherein completes the control of specified time interval or the particular point in time record for regulating step Variable is averaged.
4. valve system according to any one of claims 1 to 3, which is characterized in that the regulation unit (11) With the learning functionality for adjusting profile for generating the reference, wherein the learning functionality was configured so that in the execution phase Between：
In order to carry out multiple roughly the same regulating cycle corresponding with the desired operation of the regulating cycle, accordingly adjusting The corresponding desired locations of the valve closure member (38) are recorded at least one period in period；And
With reference to the corresponding period of the regulating cycle, the desired locations conduct of the record of the valve closure member (38) will be used for It is described to be stored with reference to adjusting profile.
5. valve system according to any one of claims 1 to 4, which is characterized in that the regulation unit (11) It is configured so that the position that is actually pre-adjusted is corrected so that generate in side using the modified position that is pre-adjusted To and/or amplitude in terms of offset in a limiting fashion the adjusting deviation to it is described control variable (12) influence.
6. valve system according to any one of claims 1 to 5, which is characterized in that according to the reception of enabling signal (5) To start or be pre-adjusted step (53a) described in executing.
7. valve system according to claim 6, which is characterized in that generate the enabling signal by higher level's processing controller (5), wherein
The processing controller is configured to production of the multiple product control with the processing volume for same type Process；
The regulating cycle indicates the part that the production process of appearance is correspondingly repeated several times；And
The enabling signal (5) is correspondingly repeatedly exported in the production process.
8. valve system according to any one of claims 1 to 7, which is characterized in that
The form of adjustment curve is taken to record the practical adjustments profile (21,51) and/or the reference adjusting profile；With/ Or
It is pre-adjusted step (53a) or institute according to the desired value (13) and for the regulating cycle or for described It is described with reference to adjusting profile to limit to state the permission duration of subsequent regulating step (53b).
9. the valve system according to any one of claim 1 to 8, which is characterized in that
Technological parameter is embodied by the pressure information of the processing volume (1)；
The desired value (13) is desired pressure to be achieved in the processing volume (1)；And
The actually determined control variable (12) indicates the actual pressure of the processing volume (1).
10. the valve system according to any one of claim 1 to 9, which is characterized in that
The desired value (13) is desired pressure to be achieved in the processing volume (1)；And
The specified real medium influx for entering the processing volume (1) of actually determined control variable (12), especially It is that the wherein described actually determined control variable considers actual pressure entrance size.
11. the valve system according to any one of claims 1 to 10, which is characterized in that utilize described actually determined Variable (12) storage or practical determining outlet information are controlled, wherein the outlet information is specified to be based on the closure per unit time The medium of how many quality or volume is flowed out from the processing volume (1) in position.
12. the valve system according to any one of claim 1 to 11, which is characterized in that the regulation unit (11) it is connected to：
The output signal of pressure sensor (3) and the pressure sensor provides the actually determined control variable (12)；And/or
Mass flowmenter (2) or mass flow monitoring unit (2), and the mass flowmenter or mass flow monitoring The output signal of unit provides the actually determined control variable (12).
13. one kind being used for the regulation unit (11) of vacuum valve (10), wherein the vacuum valve (10) is configured for adjusting It saves volume flow or quality stream and/or is used for gas-tight seal processing volume (1) and there is adjustable valve closure member, feature to exist In the regulation unit (11) is configured to that the advance tune with for the valve closure member (38) is especially performed a plurality of times The regulating cycle for saving step (53a) and subsequent regulating step (53b), wherein when executing the regulating cycle：
It is described be pre-adjusted step (53a) during, the valve closure member (38) is opened by the corresponding of driving unit (40) It moves and moves, especially (O) is moved to the reality limited by the regulation unit (11) control in advance from open position In adjusting position；And
During subsequent regulating step (53b), pass through the actually determined control variable (12) based on technological parameter And desired value (13) starts the driving unit (40), and the closed position is executed according to the position that is actually pre-adjusted Specific change or adjustment, especially thus the control variable (12) can be close to the desired value (13), wherein can at least portion Ground prediction is divided to be influenced caused by the defined position of the valve closure member (38) changes on the control variable (12), and
Wherein, there is the regulation unit (11) more new function, the more new function to be configured so that during execution：
The control variable (12) is at least recorded during a part for the regulating cycle, and based on the practical tune of this export Save profile (21,51)；
By the practical adjustments profile (21,51) compared with reference to profile is adjusted, and export adjusting deviation；
According to the performance of the derived adjusting deviation and based on can at least partly predict the control variable (12) It influences described to be actually pre-adjusted position to correct；And
It described be pre-adjusted position setting by modified and/or be stored as the described of the regulating cycle and be actually pre-adjusted position It sets,
Wherein, the regulation unit (11), which is configured so that, can be consecutively carried out the more new function, especially have The more new function can be consecutively carried out in multiple regulating cycles by having during the production process of the processing volume (1).
14. a kind of method carrying out the production cycle using vacuum valve (10), wherein the vacuum valve (10) is configured for adjusting It saves volume flow or quality stream and/or is used for gas-tight seal processing volume (1) and includes：
Valve seat, the valve seat have the valve opening (33) for limiting opening axis (34) and extend around valve opening (33) The first sealing surfaces (35)；
Valve closure member (38), the valve closure member (38) are closed for being substantially airtightly closed the valve opening (33), the valve Component has the second sealing surfaces corresponding to first sealing surfaces (35)；And
Driving unit (40), the driving unit (40) are connected to the valve closure member (38) and are configured so that described Valve closure member (38)：
O can change and adjust to provide corresponding closed position in a limiting fashion；And
O can be adjusted in closed position and can reversely adjust from open position (O), in the open position (O), the valve Closure member (38) discharges the valve opening (33), in the closed position, first sealing surfaces (35) at least partly It is pressed against on second sealing surfaces and valve opening (33) is made to be closed in a manner of substantially airtight,
Wherein, during the method：
The regulating cycle of the valve closure member is especially performed a plurality of times, and the regulating cycle includes at least：
The controlled motion of valve closure member described in o, this is to be received to open according to the specific aim startup by the driving unit (40) What dynamic signal was realized, be especially moved to restriction from the open position is actually pre-adjusted position；Then
The adjusting of closed position described in o changes or adjustment, this be the actually determined control variable (12) based on technological parameter with And desired value (13) starts the driving unit (40), according to described being actually pre-adjusted position realization, especially thus The control variable (12) is close to the desired value (13), wherein the restriction position because of the valve closure member can be predicted at least partly Variation influence caused by the control variable is set,
The control variable (12) is at least recorded during a part for the regulating cycle, and based on the practical tune of this export Save profile (21,51)；
By the practical adjustments profile (21,51) compared with reference to profile is adjusted, and export adjusting deviation；
According to the performance of the derived adjusting deviation and based on can at least partly predict the control variable (12) It influences described to be actually pre-adjusted position to correct；And
It described be pre-adjusted position setting by modified and/or be stored as the described of the regulating cycle and be actually pre-adjusted position It sets.
15. a kind of computer program product being stored in machine-readable carrier, the computer program product especially store In the storage unit of the valve system according to any one of claim 1 to 12 or tune according to claim 13 It saves in control unit (11), and at least following steps for executing or controlling the method according to claim 11 Program code：
Make the valve closure member controlled motion；
The closed position is set to adjust variation or adjustment；
Export practical adjustments profile and compared with reference to profile is adjusted；
Export adjusting deviation；
According to the performance of the derived adjusting deviation and based on the influence that can at least partly predict to the control variable Described it is pre-adjusted position to correct；And
By it is modified it is described be pre-adjusted position and be set as the described of the regulating cycle be actually pre-adjusted position,
Especially wherein, described program is executed in electronic data processing division, especially according in claim 1 to 12 In the regulation unit (11) or regulation unit according to claim 13 (11) of any one of them valve system Execute described program.
CN201810181662.1A 2017-03-07 2018-03-06 For and by means of optimized pressure regulation of a vacuum valve Active CN108571616B (en)

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