TW576903B - Regulable vacuum valve - Google Patents

Abstract

A regulable vacuum valve mainly comprises a valve body, an adjusting mechanism, a door driving mechanism and a valve door. The door driving mechanism includes a piston rod in linear movement for driving the door inside the valve body. An aerated actuator with a push flange and an airtight ring are fixed at an outer end of the piston rod. The valve door has an axle hole assembled between the push flange and the airtight ring. During process of opening the valve door, the push flange of the aerated actuator is driven by the piston rod to push the valve door under an aerated condition of the axle hole of the valve door, so that pressure difference of the valve door is released to be easy to open the valve door. The adjusting mechanism comprises a piston disc and a slotting clamp pressed by the piston disc. The slotting clamp sleeves the piston rod for vising the piston rod which pass through the adjusting mechanism, so that the valve door driven the piston rod enable to stop at a predetermined and unlimited location to achieve multi-point adjustment of the valve door.

Description

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[Technical field to which the invention belongs J. The present invention relates to a vacuum valve for controlling the flow of gas, a special cavity exhaust, a vacuum control or a vacuum valve. Connected between the processing chamber and the vacuum pump. It is used to adjust a specific gas flow rate for processing. [Previous technology] General semiconductor processes such as epitaxy, ion implantation, sputtering, evaporation, Dry-contact engraving processes and chemical vapor deposition processes such as CVD, LPCVD, PECVD, etc., need to be performed in a vacuum environment with reduced pressure or glow discharge, so these process processing equipment needs to be added to a vacuum system (vacuum systems) 'Use a vacuum pump such as a roUghing pump or a high vacuum pump to evacuate and process the process chamber, and adjust or control the vacuum degree of the process chamber. Maintain a proper low-to-medium vacuum or high-vacuum, ultra-high vacuum, and other vacuum operating environments. In order to control the gas exhaustion or evacuation of the processing chamber, a vacuum valve is installed between the processing chamber and the vacuum chamber. To facilitate the separation of two sections with different pressures. Chinese Patent Bulletin No. 429291 "Vacuum valve body structure" discloses a vacuum valve, the valve system of which has a three-way tubular shape, a cylinder is connected to the upper opening of the valve body, and the valve is driven by the piston rod of the cylinder to close the valve body The lower port, conventionally, the side port of the valve body is connected to the processing chamber, and the lower port is connected to a vacuum pump. When the vacuum pump is used to exhaust the processing chamber during use, the valve needs to be opened , And the valve that closes the lower port due to the lower

There is a pressure difference between the port and the side port, so that the cylinder opens the valve

Page 6 576903 V. Description of the invention (2) The initial stage of the door requires a larger driving force to overcome the pressure difference of the valve. Therefore, a cylinder with greater power should be installed in the valve body, and when the After the valve is opened, the pressure difference is balanced, and different resistance changes cause the piston rod to move from slow to sudden, which can easily damage the cylinder. The conventional vacuum valve can only move the piston rod up and down in two stages. The piston rod can only be fixed at the predetermined upper dead point and lower dead point. It cannot provide replaceable settings and control valve opening for different vacuum processing processes. Of regulation. In addition, U.S. Patent No. 4,977,91 No. 8 discloses another conventional vacuum valve, which uses an elongated cylinder provided at both ends of the valve, that is, the upper and lower ports of the valve body to ensure the valve. The linear movement & movement is sealed by the end member of the valve body by the end member connected to the cylinder, so the opening under the valve body should be drilled with another opening for the vacuum pump Connected or as a direct air inlet, the vacuum valve does not reveal how to overcome the pressure differential resistance when opening the valve, nor does it have the structure of a multi-stage regulating valve. [Summary of the Invention]

The main purpose of the present invention is to provide an adjustable vacuum valve. A vent pusher with a push-up flange and a gas-tight ring are installed at the outer end of a piston rod. During the opening of the valve, the piston pusher pushes the flange between the air-tight ring and the air-tight ring, and pushes the flange to touch the valve, so that the shaft hole of the valve forms a vented state, and the valve pressure is released. Poor, to achieve the effect of effortlessly opening the valve. ~ ^ A second object of the present invention is to provide an adjustable vacuum valve which utilizes an adjusting mechanism provided in a through hole on a valve body and a valve driving mechanism.

Page 7 ^ / 6903 is a piston rod with an upper through hole on the valve body which can be adjusted to the adjustment mechanism, and the pieces are respectively provided on the flange and at least the push door of the air pusher. A shaft hole is provided with a shaft hole to push the flange contact to adjust the mechanism between opening the valve, and the adjusting body, a body fixed to the cylinder plate, has a tapered opening according to the air tightness. The chuck clamps the adjustable position-adjustable vacuum valve, which mainly includes five and three (3) descriptions of the invention. The adjustment mechanism is used to stop the effect of a through-moving valve. According to the present invention, a valve driving mechanism and a tight valve driving mechanism are provided with a linear moving air ring and the ventilation pusher. The valve has a pusher, the air tight ring and the lower through hole. The groove of the ventilation pusher is connected to the pressure difference of the valve, and the labor-saving air valve system further includes a cylinder plug disc through which the rod of the valve driving mechanism penetrates and moves, and the piston disc cavity makes the piston body and the piston disc system slot lose head. The slotted valve can be stopped at the slotted chuck that is pre-pressed by the piston disc, the piston rod, so that the piston rod has a position to achieve a multi-stage adjusting valve ring, a vent pusher through hole and a side through hole, The valve driving piston rod has a vent groove at the outer end of the piston rod, and between the flanges, it is used for the piston and the valve, and the ventilation is effective before the valve is opened. Preferably, the valve The adjusting mechanism is located in the joint mechanism, which contains the slot in the cylinder and separates the air pressure in the cylinder cavity. When the conical piston rod is opened, the multi-stage adjustment includes a valve and a valve. , Through-hole, The valve actuating mechanism is the outer end of the valve, and the valve is arranged in a sleeve which closes the valve body rod. The valve can be released when the valve is vented. The valve body and the piston chuck are adjustable. And a living body is two airtight movements in the cylinder mouth to push the open piston rod and the valve

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effect. [Embodiment] 4 J? Attached circle type, the present invention will be illustrated by the following examples. : An adjustable vacuum valve according to a specific embodiment of the invention, please refer to FIG. 3, and an adjustable vacuum valve 100 mainly includes a valve body 110, a valve driving mechanism 120, and an adjusting mechanism 13, An air-tight ring 140, a ventilation pusher 150, and a valve 160, wherein the valve body no is a metal two-way conduit, which has an upper through hole m, a lower through hole 112, and a side through hole 11 3 The upper through hole π 1 is used to install the valve driving mechanism 120 and the adjustment mechanism 130, the lower through hole 112 is used to connect to a vacuum pump, and the side through hole 113 is used to connect to a processing chamber. The valve driving mechanism 120 is used to drive the opening and closing of the valve 16 (), and is installed in the through hole 丨 丨 丨 on the valve body 110. In this embodiment, the upper through hole 111 is combined There is a connecting plate 180, which connects the adjusting mechanism 130 and the valve driving mechanism 20 with the connecting plate 18, so that the adjusting mechanism 130 is disposed between the valve body 11 and the valve driving mechanism 120. The door driving mechanism 120 can be a pneumatic cylinder or other driving device, and it includes a linearly moving piston rod 121. The piston rod 121 has an outer end 1 2 2 'retractable and movable on the valve body.丨 〇, in order to ensure the linear movement of the piston rod 丨 21, it is preferable to use a fixed plate 172 through the connecting plate 18 〇 bonder 丨 a guide shaft tube 170, the shaft hole of the guide shaft 70 It is used for the through movement of the piston rod 121. A bearing 171 is installed in the guide shaft tube 170 (see FIG. 2), so that the piston rod 1 2 1 can move more smoothly and linearly. The valve driving mechanism 1 2 0 is equipped with a plurality of sensors 1 2 3,

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124, 125, where the sensor 123 is used as the dead point sensing under the piston rod 121 'the sensor 1 2 4 is used as the dead point sensing above the piston rod 1 21, the sensor 1 2 5 is As an adjustable control point sensing of the piston rod 1 2 1 (ie multi-stage control). The valve 160 is used to close the lower through hole 2 and the valve 60 is provided with a shaft hole 161. The air-tight ring 140 and the ventilation pusher 50 are mounted on the outer end 122 of the piston rod 121. The air-tight ring 140 has a sealing surface provided with an O-shaped ring 141 for When the valve 160 abuts the closed position, the shaft hole 161 of the valve 160 is closed (see Figures 2 and 3). The ventilation pusher 15 has a pushing flange 151, a shaft 153 and at least one ventilation groove 152. Shaft _ 丨 body 153 is sleeved to the shaft hole 161 of the valve 160, and the length of the shaft body 153 is larger than the shaft hole 161 of the valve 160, and the thrust flange 151 is a shaft larger than the valve 160 The inner diameter of the hole 1 61 is such that the shaft hole 1 61 of the valve 160 is disposed between the airtight ring 140 and the pushing flange 15m of the ventilation pusher 150, and the ventilation groove 1 5 2 is along the The shaft body 1 5 3 extends axially and passes through the pushing flange 151. Therefore, please refer to FIG. 3, when the valve 160 closes the through hole 112 below the valve body 110, the valve driving mechanism 12 is used to drive the piston rod 121 to make it sink a further distance, The sealing surface of the air-tight ring 4o closes the shaft hole 161 of the valve 160. At this time, the sensor 123 detects that the piston rod 121 reaches the bottom dead point and stops the valve driving mechanism. 2o In the process of opening the valve, opening the valve 1 60, please refer to FIG. 4. In the initial opening state, the piston rod 1 21 moves a space distance that does not move the valve 丨 60, so that the air-tight ring 140 The shaft hole 161 of the valve 160 is not hermetically closed, but the pushing flange 15m of the ventilation pusher 150 is used to touch the valve 160. The ventilation pusher is used instead.

Page 10 576903 V. Description of the invention (6) The ventilation groove 152 of 150 makes the pressure difference between the side through hole 113 and the lower through hole 112 of the valve body 110 through the shaft hole 161 of the valve 160. The gas can effectively reduce the pressure difference in order to facilitate the subsequent opening of the valve 1 60. The conventional vacuum valve is subject to the pressure difference between the two sides of the valve. During the valve opening process, the pressure of the gas connected to the through hole of the processing chamber is greater than that of a vacuum pump. The pressure of the gas in the through hole leads to a drive mechanism that requires more power to force the pressure difference to be opened, and the conventional valve can be opened, and even an improper reaction force is generated. Therefore, the adjustable vacuum valve 100 of the present invention is labor-saving The effect of opening the valve 丨 6 〇, so the air tight ring 140 and the ventilation pusher 150 as the valve pressure difference release mechanism of the adjustable vacuum valve 100, the shaft 153 ^ ^ and the ventilation groove 152 of the ventilation pusher 150 Parts can also be changed to the air-tight ring 140. 'Furthermore, please refer to Figs. 1, 2 and 3, according to the adjustable vacuum valve 100 of the present invention, the adjusting mechanism 130 is provided in the through hole lu above the valve body 11 and the valve driving mechanism 12o. It is used to stop the piston rod. 21, to achieve the purpose of setting the piston rod 121 in multiple stages. The adjustment mechanism 30 includes a cylinder 131, a slotted chuck 133, and a piston disc 135. The body 131 allows the piston rod 121 to pass through and move. The slotted chuck 33 is fixed to the cylinder seat 132 of the cylinder body 131 and sleeves the piston rod 121. The slotted chuck 133 has a plurality of openings. The groove 134 makes the slotted chuck 133 elastic, so as to clamp the piston rod 121. The piston disc 135 is arranged in the cylinder 131 and separates the iris 131 into two air-tight chambers, each of which has a gas inlet and outlet. 137, 138 'Make the piston disc 135 move in the cylinder block 131 according to the different air pressure of the airtight chambers (see Figures 3 and 5). The piston disc 135 has a tapered opening 136 for pressing This slotted chuck 33 (see Figure 5),

Page 11 576903 V. Description of the invention (7) Please refer to Figure 3, when the upper gas inlet and outlet 137 is fed with a large gas pressure, the piston disk 1 3 5 will be lowered, so that the piston disk 1 3 5 has a tapered opening 1 3 6 is loose from the slotted chuck 1 3 3 of the slotted slot 1 3 4 so the piston rod 1 21 can move freely to expand and contract to lift the valve 160. Please refer to Figures 2 and 5 again. When the piston rod When 121 is moved and positioned and measured by the sensor 124 or 125, the lower gas inlet and outlet 138 is allowed to pass a larger gas pressure to raise the piston ^ 135. The tapered opening 136 of the piston disc 135 pushes the opening Slot chuck 133, so that the slotted chuck 133 clamps the piston rod 21 to stop the movement of the piston rod 1 2 1 and the valve 1 60, and the sensor 1 2 5 can be arranged in the Any position of the valve 2 driving mechanism 1 20 can be used to achieve the adjustment of the multi-stage valve. For example, the sensor 1 25 can be set at the position of the micro-open valve 丨 60, using the tapered opening of the piston disk 135 136 pushes the slotted collet 133 ^ to clamp the piston rod 121 that moves midway to achieve the valve's multi-stage adjustment of 160 And further controlling the vacuum valve Shu thousand and, where appropriate suction state. Therefore, the adjustable vacuum valve of the present invention has the effects of labor-saving opening and closing valves and multi-stage adjustment, and has achieved wide application. Please refer to FIG. 6 for a plurality of adjustable vacuum valves of the present invention. 〇 series can be installed in a continuous = vacuum processing equipment 200, such as multi-layer sputtering, vapor deposition, etc., true, processing equipment 20 0 series includes a plurality of connected processing chambers 21, each processing chamber The workpiece inlet and outlet of 210 is equipped with a vertical lifting vacuum chamber door, and a conveying track 21 2 is used to convey the work pieces to be processed to individual processing. 10, ❿ reaches a continuous vacuum processing process, and the invention can be adjusted. The vacuum valve 100 is installed at the side of each processing chamber 21, and the side through hole U 3

576903 V. Description of the invention (8) is connected to the processing chamber 2] ^ ii ^ t ^ and its lower through hole 112 is connected to a vacuum pump. During the f process, each vacuum chamber door 211 is opened and closed a number of times. With these adjustable vacuum valves 100, it is possible to open the valve 160 with little effort, and the effect of exhaust can be quickly performed. Furthermore, the adjustment mechanism 130 of these adjustable vacuum valves 100 has the effect of multi-stage adjustment and can be adjusted. The corresponding valve 160 is properly opened and evacuated at an appropriate micro-opening position, and the processing chamber 210 is maintained at an appropriate pressure without excessively evacuating the working gas. The scope of protection of the present invention is subject to the scope of the appended patent application. Any changes and modifications made by those skilled in the art without departing from the spirit and scope of the present invention shall belong to the cans of the present invention. Fan Tan consumes the garden.

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Brief description of the drawings [Simplified description of the drawings] Figure 1: An exploded view of the components of an adjustable vacuum valve according to a specific embodiment of the present invention; Figure 2 · According to the present invention-a specific embodiment, the Sectional schematic diagram of an adjustable vacuum valve; Figure 3: A cutaway schematic view of the adjustable vacuum valve in a closed state according to a specific embodiment of the present invention; Figure 4 ·· According to a specific embodiment of the present invention, the Sectional schematic diagram of the adjustable vacuum valve in the initial opening state; Figure 5 ... According to a specific embodiment of the present invention, the sectional view of the adjustable vacuum valve is adjusted to open in a predetermined position; and, Figure 6: The three-dimensional schematic diagram of the adjustable vacuum valve installed in the continuous vacuum cavity according to the present invention. 1 Element symbol is simply I 〇〇 Vacuum valve II 0 Valve body 11 3 side through holes 120 Valve drive mechanism 121 Piston guard 123 M24 > 125 '-" 1 3 0 Adjustment mechanism 133 Slotted chuck 1 3 6 Tapered Opening 1 4 0 Gas-tight ring 111 Upper through-hole sensor 131 Cylinder block 1 3 4 Slotted 11 2 Lower through-hole 1 2 2 Outer end ❸ 1 3 2 Cylinder block 1 3 5 Piston disc 1 38 Gas inlet and outlet 137 Gas outlet 1 4 1 〇 ring

Page 576903 Simple description of 圊 150 Air pusher 151 Push flange 152 Air groove 153 Shaft body 160 Valve 161 Shaft 孑 L 170 Guide shaft tube 171 Bearing 172 Fixing plate 180 Connecting plate 191 0 ring 200 Vacuum processing equipment 210 Processing Chamber 211 Vacuum chamber door 212 Conveying rail 220 Vacuum pump

Claims (1)

576903 6. Scope of patent application [Scope of patent application] 1. An adjustable vacuum valve, which includes: a valve body with an upper through hole, a lower through hole and a side through hole; a valve driving mechanism, located at A through hole in the valve body, the valve driving mechanism includes a linearly moving piston rod, the piston rod system has an outer end; a male and an air ring are provided at the outer end of the piston rod; At the outer end of the piston rod, the ventilation pusher has a pushing flange and at least one ventilation groove; and a valve is provided between the air-tight ring and the pushing flange of the ventilation pushing member. The through hole below the valve body is sealed, the valve has a shaft hole, which is used for the sleeve of the piston rod, and when the pushing flange of the ventilation pusher contacts the valve, the ventilation groove of the ventilation pusher is conductive The shaft hole of the valve. 2. The adjustable vacuum valve as described in item 1 of the scope of the patent application, wherein the vent groove penetrates the pushing flange of the vent pusher. 3: The adjustable vacuum valve according to item 丨 in the scope of the patent application, wherein «Hai Ventilation» has a shaft body which is sleeved on the shaft hole of the valve. 4: The adjustable vacuum pump described in item 3 of the patent scope, wherein the length of the shaft of the torso pusher is greater than the depth of the shaft hole of the valve. The adjustable vacuum valve according to item 丨 of the scope of the patent application, wherein the = π section mechanism is provided between the ± through hole and the driving mechanism to stop the piston rod. 6 The adjustable true space described in item 1 of the patent scope, which includes a guide shaft tube 3, which is fixed on the valve body and is used for the through hole. Page 16 In order to guide the linear movement of the piston rod, the adjustable vacuum valve described in item 1 of the scope of patent application, wherein the valve driving mechanism is a pneumatic cylinder. An adjustable vacuum valve includes: a valve body having an upper through hole, a lower through hole and a side through hole; a valve driving mechanism provided in the through hole above the valve body, and the valve drive The mechanism includes a linearly moving piston rod, the piston rod has an outer end, and a valve is opened and closed by the movement of the piston rod; and, an adjustment mechanism is provided on the valve body and the valve drive mechanism. The system includes: m a cylinder block for the piston rod to pass through and move; a slotted chuck fixed to the cylinder body; and a piston disc provided in the cylinder body and separating the cylinder body from two gases Cavity, so that the piston disk recognises the cylinder body according to the pressure difference of the airtight chambers. The piston disk has a tapered opening. Clamp the piston rod. Push | The adjustable vacuum valve as described in item 8 of the scope of patent application, further comprising a guide shaft tube, which is fixed on the valve body to guide the linear movement of the piston rod. The valve driving mechanism is a pneumatic cylinder. 11. According to the adjustable vacuum Πΐ described in item 8 of the scope of patent application, the outer end of the ϊ is equipped with a gas tight ring and-aeration pusher, wherein the through-thrust pusher has a push flange and at least Vapor phase 576903 When the pushing flange of the ventilation pusher contacts the valve, the ventilation groove of the ventilation pusher opens the valve. 1 2. The adjustable vacuum valve according to item ^ of the scope of the patent application, wherein the ventilation groove is a push-through flange of the ventilation pusher. 1 3. An adjustable vacuum valve, comprising: a valve body having an upper through hole, a lower through hole and a side through hole; a valve driving mechanism provided in the through hole above the valve body, the valve The driving mechanism includes a linearly moving piston rod, the piston rod system has an outer end; a valve for closing a through hole below the valve body, the valve has a shaft hole; and a valve differential pressure release mechanism, At the outer end of the piston rod, used to release the pressure difference of the valve before opening the valve, the valve pressure release mechanism has a shaft body, an abutment surface and a pushing flange, wherein the shaft body is sleeved on The shaft hole of the valve is such that the shaft hole of the valve is provided between the abutting surface and the thrust flange, and the distance between the abutting surface and the thrust flange is greater than the depth of the shaft hole of the valve. When the piston rod moves the valve differential pressure release mechanism so that the abutment surface is far away from the valve, and the valve is pressed against the valve by the pushing flange, the shaft hole of the valve is in a ventilated state for air pressure release. 14. The adjustable vacuum valve according to item 丨 3 of the scope of patent application, wherein the shaft body has at least one through-air vent groove. 15. The adjustable vacuum valve as described in item 13 of the scope of patent application, which further includes an adjustment mechanism, which is provided in the upper through hole and driven by the valve. 576903 6. Scope of patent application It is used to stop the piston rod between agencies. 16. The adjustable vacuum valve according to item 13 of the scope of patent application, which further includes a guide shaft tube, which is fixed in a through hole on the valve body to guide the piston rod. Move linearly. I ί Page 19