JP2003156171A - Initial exhaust valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the number of part items by integrally arranging an initial exhaust valve in a valve when discharging an inside fluid of a treating chamber to the outside via the valve. SOLUTION: This initial exhaust valve has: a first body 16 for forming a first port 12 and a second port 14; a second body 18 integrally connected to an upper part of the first body 16; a first piston 22 inserted inside the second body 18, and displaced in the axial direction under the action of pilot pressure supplied to the second body 18; and a valve element 20 for switching a communicating state and a noncommunicating state of the first port 12 and the second port 14 by integral displacement with the first piston 22.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an initial exhaust valve capable of adjusting the flow rate of a fluid flowing through a fluid passage such as a pressure fluid or gas by opening or closing the fluid passage.

[0002]

2. Description of the Related Art Conventionally, for example, in a processing apparatus for a semiconductor wafer, a liquid crystal substrate, etc., the semiconductor wafer, the liquid crystal substrate, etc. are put in a processing chamber for performing various processes, and an atmospheric pressure fluid acts as a vacuum pump. A process for forming a film on the surface of the semiconductor wafer is performed under a vacuum state. On the inner wall surface of the processing chamber, products and the like generated by gas and the like used when forming a film on a semiconductor wafer are attached.

After the processing step is completed, the fluid inside the processing chamber is sucked by a vacuum pump and discharged to the outside. At this time, an initial exhaust valve is provided separately from the gate valve that opens and closes the fluid passage leading to the processing chamber in order to prevent the product from peeling off from the inner wall surface due to a sudden pressure change during discharge. The fluid in the processing chamber is exhausted to the outside through the valve.

[0004]

However, in the prior art in which the initial exhaust valve is provided separately from the gate valve, the performance of the vacuum pump or the initial exhaust valve is adjusted according to the exhaust amount in the initial stage exhausted from the processing chamber. Since the vacuum pump or the initial exhaust valve needs to be changed, the work of exchanging the vacuum pump or the initial exhaust valve is complicated, and the management cost increases because it is necessary to prepare a plurality of vacuum pumps and initial exhaust valves according to the exhaust amount. There is.

Further, since a pipe, a pipe joint and the like connected to the initial exhaust valve provided separately from the gate valve are required, the number of parts is increased and the work of connecting the pipe and the like is complicated. .

The present invention has been made in consideration of the above problems. By integrally connecting with a gate valve, the management cost and the number of parts are reduced, and
It is an object of the present invention to provide an initial exhaust valve capable of performing flow control with higher accuracy.

[0007]

In order to achieve the above-mentioned object, the present invention provides an initial exhaust valve disposed between an upstream passage and a downstream passage of a fluid passage formed in a valve. A body portion having a first port and a second port respectively connected to the upstream side and the downstream side of the fluid passage, and axially displaced inside the body portion under the action of pilot pressure supplied. By freely adjusting the piston, the valve body integrally connected to the piston, and adjusting the valve opening degree of the valve body, the fluid flowing between the first port and the second port is adjusted. And an adjusting unit for adjusting the flow rate.

Further, a main body portion is provided integrally with a gate valve for opening and closing the fluid passage by a valve disc, and a main body portion is provided with a bypass passage for communicating the upstream passage and the downstream passage of the fluid passage, respectively. A piston provided displaceably in the main body portion along the axial direction under the action of a pilot pressure and a valve body integrally connected to the piston are provided.

Further, it is preferable to provide adjusting means for adjusting the flow rate of the fluid flowing through the bypass passage by adjusting the valve opening degree of the valve body.

Further, in the initial exhaust valve, the main body is integrally connected to the valve box of the gate valve, and the bypass passage for communicating the upstream passage and the downstream passage of the fluid passage formed in the valve casing. Is formed at a position facing the valve body, and at least when the valve disc closes the fluid passage, by separating the valve body from the valve box via the piston under the action of pilot pressure. The fluid may be circulated to the fluid passage via the bypass passage.

In the present invention, the valve body is displaced under the action of the pilot pressure, and the flow rate flowing between the first port and the second port is adjusted by the adjusting means. Therefore, the flow rate of the fluid communicating with the first port and the second port can be controlled with higher accuracy by the adjusting means.

Further, according to the present invention, the initial exhaust valve is provided integrally with the gate valve to form a bypass passage communicating the both, and the fluid passage of the gate valve is closed to close the valve body of the initial exhaust valve. Separated from the box, the upstream passage and the downstream passage of the fluid passage are communicated with each other via the bypass passage.
Therefore, since the fluid is discharged only by the initial exhaust valve with the gate valve closed, the exhaust amount in the initial stage can be suppressed.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the initial exhaust valve 10 according to the present invention will be described in detail below with reference to the accompanying drawings.

1 and 2, the initial exhaust valve 10
Is a first body 16 in which a first port 12 and a second port 14 are formed along a substantially orthogonal direction, a second body 18 integrally connected to an upper portion of the first body 16, and A valve body 20 disposed inside the first body 16 and a first piston (piston) integrally connected to the valve body 20.
22 and a spring member 24 that urges the valve body 20 toward the first body 16. The first body 16 and the second body 18 are integrally provided as a main body.

The first body 16 has a first body formed therein.
A chamber 26, a first port 12 communicating with the first chamber 26 and formed on the side surface, and a lower portion of the first chamber 26,
It has a second port 14 communicating with the first chamber 26.

Also, the first chamber 26 facing the second port 14
A ring-shaped plate member 28 is integrally fixed to this via a screw member (not shown). A seal member 30 is attached to the contact surface of the plate member 28 with the first body 16 via an annular groove, and maintains the airtightness between the second port 14 and the first chamber 26. A communication hole 32 is formed at a substantially central portion of the plate member 28, and a second hole is formed through the communication hole 32.
The port 14 and the first chamber 26 are provided so as to communicate with each other. The first body 1 joined to the second body 18
An annular recess is formed on the end face of 6, and a seal member 33 is attached. The seal member 33 allows the first chamber 2
The airtightness of 6 is maintained.

Inside the substantially cylindrical second body 18 integrally connected to the upper portion of the first body 16, a second chamber defined between the first piston 22 and one end surface side thereof is formed. 34
And the other end surface of the first piston 22 and a valve plug 78 described later.
And a third chamber 36 defined between the third chamber 36 and a shaft portion 50 described later.
And a guide hole 38 for guiding the through the bush 48. The diameter of the guide hole 38 is the same as that of the first chamber 2.
6 and smaller than the diameter of the second chamber 34.

An annular guide member 40 is mounted on the guide hole 38 side of the first chamber 26 via a screw member 42. A seal member 44 is mounted on the contact surface of the guide member 40 with the first body 16 via an annular groove, and a through hole 46 is formed at a substantially central portion.

The bush 4 inserted in the guide hole 38
Shaft portion 50 formed on one end side of the valve body 20 via 8
Is inserted so as to be displaceable along the axial direction of the guide hole 38. Further, the seal member 52 is attached to the annular groove formed in the upper part of the guide hole 38, and the first chamber 26 and the second chamber
The airtightness with the chamber 34 is maintained.

The valve body 20 includes a shaft portion 50 formed on one end side, and a flange portion 56 formed on the other end side and abutting on a first valve seat portion 54 on one end surface side of the plate member 28. Consists of. A seal member 58 is attached to one end surface of the flange portion 56 that abuts the first valve seat portion 54 via an annular groove.

The diameter of the seal member 58 is larger than the diameter of the communication hole 32 of the plate member 28.
That is, since the seal member 58 contacts the vicinity of the outer periphery of the communication hole 32, the communication hole 32 and the first chamber 26 can be kept airtight.

Further, the annular first piston 22 is inserted into the small-diameter shaft portion 60 which is formed on the upper portion of the shaft portion 50 with a reduced diameter so as to separate the second chamber 34 and the third chamber 36. , Is engaged with the stepped portion of the small diameter shaft portion 60. First piston 22
Is a snap ring 6 that is mounted in the groove of the small diameter shaft portion 60.
It is integrally connected to the valve body 20 via 2.

Further, the valve body 20 is integrally displaced by the displacement of the first piston 22 along the axial direction under the action of the pilot pressure supplied from the fluid port 64 formed on the side surface of the second body 18. To do. The first piston 2
The airtightness between the second chamber 34 and the third chamber 36 is maintained by the seal member 66 mounted on the inner peripheral surface of the second chamber 2 and the piston packing 68 mounted on the sliding surface.

The fluid port 64 has a communication passage 70.
Through the second chamber 34.

A first air bleed passage 72 is formed in the substantially central portion of the shaft portion 50 so as to extend to the substantially central portion along the axial direction of the shaft portion 50. The first air bleed passage 72 and the shaft portion are formed. Fifty
A second air bleed passage 74 is formed which is substantially orthogonal to the substantially central portion and communicates with the first air bleed passage 72.

The second air vent passage 74 communicates with the inside of the first bellows 76 surrounding the outer peripheral surface of the shaft portion 50. That is, when the valve body 20 is separated from the first valve seat portion 54 of the plate member 28, the fluid inside the first bellows 76 interposed between the valve body 20 and the guide member 40 causes the first and the first fluid to flow. 2 is introduced into the third chamber 36 through the air bleeding passages 72 and 74, and is discharged to the outside through a relief hole 94, which will be described later, formed in the valve plug 78 mounted in the opening 80 of the second body 18. It The first bellows 76 prevents dust or the like contained in the fluid flowing into the first chamber 26 from the first port 12 from entering the sliding surface of the shaft portion 50 and causing sliding resistance. There is.

The upper surface of the first piston 22 and the second body 18
The spring member 24 is interposed between the spring member 24 and the valve plug 78 mounted on the first plug 22 and biases the first piston 22 toward the first body 16 under the action of the spring force. That is, the seal member 58 mounted on the one end surface of the valve body 20 is urged in the direction to be seated on the first valve seat portion 54.

The valve plug 78 has a U-shaped cross section and is inserted into an opening 80 formed at the other end of the second body 18. The valve plug 78 is positioned by engaging with the stepped portion 82 formed on the inner peripheral surface of the opening 80, and is also attached to the annular recess of the opening 80 of the second body 18 in a C-shaped retaining ring 84. The valve plug 78 is prevented from being removed via the. The seal member 86 mounted on the outer peripheral surface of the valve plug 78 via an annular groove maintains airtightness in the third chamber 36.

Further, the screw hole 8 in the substantially central portion of the valve plug 78.
An adjusting screw (adjusting means) 90 is screwed onto the screw 8, and the amount of displacement (valve opening) of the valve body 20 is adjusted by screwing the adjusting screw 90 to displace it along the axial direction. be able to.

That is, the valve opening degree of the valve body 20 is
It is regulated by abutting the end portion of the adjusting screw 90 with the shaft portion 50 of 0 and locking it. Therefore, the adjusting screw 9
The amount of displacement of the valve element 20 can be adjusted by screwing 0 to displace the position of the tip of the adjusting screw 90. In addition, after the adjusting screw 90 is screwed to determine the position, the adjusting nut 9 screwed to the adjusting screw 90 is attached.
By tightening 2, the adjustment screw 90 is prevented from loosening and can be firmly fixed.

Further, a relief hole 94 is formed at a predetermined distance radially outward from the screw hole 88, and the third chamber 36 communicates with the outside through the relief hole 94. That is, when the first piston 22 is displaced downward under the action of the pilot pressure supplied to the fluid port 64, the third chamber 3
Since the fluid of No. 6 is discharged to the outside through the escape hole 94, the fluid of the inside of the third chamber 36 causes the first piston 2
The first piston 22 can be smoothly displaced without providing resistance when the second piston 2 is displaced.

Initial exhaust valve 10 according to the embodiment of the present invention
Is basically configured as described above. Next, its operation and action and effect will be described.

In the following description, as shown in FIG.
A processing chamber 95, a vacuum pump 96 for discharging the fluid inside the processing chamber 95, a fluid passage 97 connected between the processing chamber 95 and the vacuum pump 96, and a fluid passage 97 on the fluid passage 97. In the circuit including the valve 98 arranged, the first port 12 is connected to the processing chamber 95 side which is the upstream side on the fluid passage 97 of the circuit, and the second port 14 is connected to the vacuum pump 96 side which is the downstream side. The case will be described. The initial exhaust valve 10 is the valve 98.
The flow rate of the fluid is set to a smaller size.

Further, as shown in FIG. 1, the valve body 20 is pressed against the first valve seat portion 54 under the action of the spring force of the spring member 24, so that the communication between the first port 12 and the second port 14 is established. The state in which the valve 98 is blocked and the valve 98 blocks the communication of the fluid passage 97 will be described as an initial position.

First, when the vacuum pump 96 connected to the second port 14 side of the fluid passage 97 is driven, the valve 98 and the initial exhaust valve 10 block the communication with the processing chamber 95, so that the negative pressure fluid is generated. It is supplied to the inside of the valve 98 and the second port 14 of the initial exhaust valve 10. In detail,
The negative pressure fluid supplied to the second port 14 is in a state where the communication with the first chamber 26 is blocked by the seal member 58 attached to the valve body 20.

Next, a pilot pressure (for example, compressed air) is supplied from a pressure fluid supply source (not shown) to the fluid port 64 of the initial exhaust valve 10 via a tube not shown.

The pilot pressure supplied from the fluid port 64 is introduced into the second chamber 34 via the communication passage 70.

As shown in FIG. 2, the first piston 22 is pressed upward against the spring force of the spring member 24 under the action of the pilot pressure introduced into the second chamber 34, and the valve body 20 is pressed.
Move together upward. The tip of the small-diameter shaft portion 60 of the valve body 20 abuts on and locks one end surface of the adjusting screw 90, whereby the amount of displacement of the valve body 20 along the axial direction is regulated. That is, the valve opening of the valve body 20 can be adjusted by screwing the adjusting screw 90 to displace the position of the one end face, and the fluid flowing through the first chamber 26 to the second port 14 can be adjusted. The flow rate can be adjusted.

When the valve body 20 is displaced upward, the seal member 58 of the flange portion 56 is separated from the first valve seat portion 54, and the first chamber 26 and the second port 14 are connected via the communication hole 32. It will be in a state of communication. As a result, the fluid inside the processing chamber 95 is discharged through the first and second ports 12 and 14.

That is, the flow rate of the fluid discharged from the first port 12 to the second port 14 via the initial exhaust valve 10 is such that the valve 98 disposed in the fluid passage 97 is fully opened and the processing chamber 95 is opened. Since the amount of the fluid in the chamber is smaller than that in the case where the fluid is exhausted, there is no sudden pressure fluctuation inside the processing chamber 95. At this time, the fluid passage 97
Is in a closed state, the negative pressure fluid is discharged from the initial exhaust valve 1
0 through the first port 12 and the second port 14 only.

Next, when the supply of the pilot pressure is stopped via the fluid port 64 under the action of a controller (not shown), the pressing force that has pressed the first piston 22 upward is no longer urged, so that the first The piston 22 is the spring member 2
4 is pressed downward under the action of the spring force of 4, and the valve body 20 moves to the first position.
It is displaced downward together with the piston 22.

Then, the seal member 58 mounted on the valve body 20 abuts on the first valve seat portion 54, whereby the communication hole 3
2 is closed, and the communication between the first chamber 26 and the second port 14 is blocked. As a result, the seal member 58 is seated on the first valve seat portion 54 and the inside of the first chamber 26 is hermetically closed.

Finally, the valve 98 is opened to open the fluid passage 97, the communication of which was interrupted by the valve 98, almost simultaneously with or slightly earlier than the stop of the supply of the pilot pressure to the fluid port 64. The vacuum pump 96
The fluid in the processing chamber 95 is discharged under the suction action of.

At this time, since the pressure in the processing chamber 95 has been lowered in advance under the discharge action of the initial exhaust valve 10, a rapid pressure fluctuation may occur inside the processing chamber 95 even when the valve 98 is opened. There is no.

Further, the opening / closing operation of the valve body 20 of the valve 98 and the initial exhaust valve 10 and the opening / closing operation of the valve 98 can be easily performed in association with each other, and the discharge amount can be controlled with higher accuracy.

In the embodiment of the present invention, the processing chamber 9
It is described that the valve 98 is opened and the initial exhaust valve 10 is closed in a state where the pressure inside the valve 5 is reduced. However, the valve 98 and the valve body 20 of the initial exhaust valve 10 are simultaneously opened. Alternatively, the fluid may be discharged from both of them substantially at the same time.

As described above, in the embodiment of the present invention, the discharge amount from the processing chamber 95 by the vacuum pump 96 is set to the valve body 20.
It is not necessary to change the size of the initial exhaust valve 10 each time, depending on the size of the processing chamber 95 and the size of the vacuum pump 96, because it can be adjusted by the valve opening degree. Similarly, it is not necessary to simultaneously provide a plurality of vacuum pumps 96 according to the discharge amount.

Further, since the discharge amount can be adjusted by the initial exhaust valve 10, the complicated work of changing the size of the vacuum pump 96 according to the exhaust amount is unnecessary.

Further, by integrally providing the valve body 20 and the first piston 22, the number of parts can be simplified.

Next, FIGS. 4 to 11 show a gate valve 102 to which an initial exhaust valve 100 according to another embodiment of the present invention is applied. The same components as those of the initial exhaust valve 10 according to the embodiment of the present invention described above are designated by the same reference numerals, and detailed description thereof will be omitted.

This gate valve 102, as shown in FIGS. 4 and 5, is a cylinder 1 that functions as a drive source.
04, a drive conversion unit 106 that is displaced along the axis line under the drive action of the drive source, and a first port 108 and a second port 110 (for inputting and outputting fluid) to and from the lower side of the drive conversion unit 106. 6 to 11), the initial exhaust valve 100 integrally connected to the lower side of the valve box 112, and tilted by a predetermined angle in a direction substantially orthogonal to the axial direction. A valve rod 114 and a substantially circular valve disc 11 connected to one end of the valve rod 114.
6 and 6. The first port 108 and the second port 1
A passage 117 is formed between the passage 10 and the passage 10 (see FIGS. 9 to 11).

As shown in FIGS. 9 to 11, the initial exhaust valve 100 has a first body 16 having an integral shape.
a is integrally connected to the lower portion of the valve box 112 via a first bolt 118, and is connected to the first chamber 26 of the initial exhaust valve 100.
Communicates with a first bypass passage 119 formed in the lower portion of the first port 108 of the valve box 112 and a second bypass passage 120 formed in a substantially central portion of the lower portion of the valve box 112. The initial exhaust valve 100 is set to have a smaller flow rate than the gate valve 102.

Also, the valve box 112 of the first body 16a.
An annular recess is formed on the joint surface with the seal member 12 and
1 is installed. By the seal member 121,
The airtightness between the first chamber 26 and the outside is maintained.

As shown in FIGS. 6 and 9,
A second valve seat portion 122 formed on the inner wall surface of the valve box 112.
When the valve disc 116 is seated on the first port 108, the first port 108 is hermetically closed. The valve disc 1
A seal member 123 is attached to the groove 16 along the annular groove, and the seal member 123 maintains airtightness when the valve disc 116 is seated on the second valve seat portion 122.

Further, as shown in FIGS. 7 and 10, the second valve seat portion 122 formed on the inner wall surface of the valve box 112.
The valve disk 116 is separated from the valve disk 116 and is displaced upward after the first port 108 is opened, so that fluid is communicated through the first port 108.

As shown in FIGS. 4 and 5, the cylinder 104, which is the drive source, is fixed to the upper portion of a casing 128 described later via a screw member (not shown). The cylinder 104 is not limited to a single cylinder, and a plurality of cylinders 104 may be provided substantially in parallel.

The drive converting portion 106 is fixed to the upper surface of the valve box 112 via a second bolt 124, and the first cover member 126 is fixed to the upper surface of the first cover member 126 via a second bolt 124. Tubular casing 128
And a second cover member 132 fixed to the upper part of the casing 128 via a third bolt 130.

The first cover member 126 is formed with a substantially circular hole 134 for inserting the valve rod 114, and the diameter of the hole 134 is slightly larger than the diameter of the valve rod 114. It A first ring body 138 holding one end of a second bellows 136 that covers a predetermined portion of the valve rod 114 is fitted on the upper portion of the hole 134.

At the other end of the second bellows 136, the second ring body 14 is similarly provided so as to surround the valve rod 114.
0 is provided.

The second bellows 136 surrounding the outer peripheral surface of the valve rod 114, the first ring body 138, and the second ring body 140 maintain the airtightness of the interior of the valve box 112.

Guide grooves 142a and 142b having a constant width in the axial direction are formed inside both side surfaces of the casing 128 (see FIGS. 6 to 8).

As shown in FIGS. 4 and 5, the cylinder 104 includes a cylinder tube 144 fixed to the second cover member 132 via a screw member (not shown),
A second piston 148 that freely displaces the cylinder chamber 146 in the cylinder tube 144 along the axial direction;
A piston rod 150 connected to one end of the second piston 148, and an upper port 152 for supplying and discharging a pressure fluid to and from the cylinder chamber 146 are provided on the outer peripheral portion of the cylinder tube 144, similarly to the above. A lower port 154 for supplying and discharging pressurized fluid to the cylinder 104.

Further, the drive converting portion 106 is locked to one end of the valve rod 114 and a first displacing member 158 having a U-shaped cross section which is connected to the other end of the piston rod 150 via a fourth bolt 156. A second displacing member 162 having an H-shaped cross section, which is fixed via a nut 160, is linked with the first displacing member 158, and is integrally displaced in the axial direction;
The upper end surface of the first displacement member 158 and the second cover member 13
A first spring 164 that is disposed between the first displacement member 158 and the second cover member 132 and that biases the first displacement member 158 away from the second cover member 132; and the lock nut that fastens the first displacement member 158 and the valve rod 114. A second spring 166 that is arranged between the first displacement member 158 and the first displacement member 158 and biases the valve rod 114 in the direction of separating from each other;
It has first roller members 170a and 170b and second roller members 172a and 172b that are rotatably supported by the first displacement member 158 via a and 168b.

The first displacement member 158 and the second displacement member 162 are integrally connected via the first pin members 168a and 168b and the second roller members 172a and 172b.

The first roller members 170a, 170b and the second roller members 172a, 172b are provided coaxially with each other. The first roller members 170a, 170b are on the casing 128 side, and the second roller members 172a, 172b are on the first side. They are provided on the 1-displacement member 158 side, respectively.

Above the both side surfaces of the second displacement member 162, elongated holes 174 cut out in a substantially oval shape are formed (see FIGS. 6 to 8). The long hole 174 is provided so that the second roller members 172a and 172b engage with each other, and the second pin member 17 is provided below both side surfaces.
Third roller members 178a and 178b pivotally supported by the second displacement member 162 via 6a and 176b are provided, and the third roller members 178a and 178 are provided.
The displacement of b in the axial direction is regulated by contacting the lower ends of the guide grooves 142a and 142b.

Further, the first roller members 170a and 170b
And the third roller members 178a and 178b, the guide grooves 142a and 142 formed on both side surfaces of the casing 128.
It is engaged with b and is provided so as to be displaceable along the axial direction integrally with the second displacement member 162.

The gate valve 102 to which the initial exhaust valve 100 according to another embodiment of the present invention is applied is basically constructed as described above. Next, its operation and action and effect will be explained. To do. In the following explanation,
The pressure fluid is supplied to the upper port 152 of the cylinder 104, and the first roller members 170a and 170b are guided by the guide groove 1.
As shown in FIG. 6 and FIG. 9, the first port 108 formed in the valve box 112 is closed by the valve disc 116 and is in the initial position while being in contact with the lower end positions of 42a and 142b. As described below.

First, a pilot pressure (for example, compressed air) is supplied from a pressure fluid supply source (not shown) to the fluid port 64 of the initial exhaust valve 100 via a tube not shown.

The pilot pressure supplied from the fluid port 64 is introduced into the second chamber 34 via the communication passage 70.

As shown in FIG. 9, the first piston 22 is pressed downward against the spring force of the spring member 24 under the action of the pilot pressure introduced into the second chamber 34, and the valve body 20
Move together downward. The tip of the small-diameter shaft portion 60 of the valve body 20 abuts on and locks one end surface of the adjusting screw 90, whereby the amount of displacement of the valve body 20 along the axial direction is regulated.

That is, the valve opening of the valve body 20 can be adjusted by screwing the adjusting screw 90 to displace the position of the one end face, and the second bypass passage 120 via the first chamber 26 can be adjusted. The flow rate of the fluid flowing to the can be adjusted.

When the valve body 20 is displaced downward, the seal member 58 of the flange portion 56 is separated from the lower end surface of the valve box 112, and the first chamber 26 and the passage 117 of the valve box 112 are separated from each other by the second bypass passage. The communication is established via 120.
At that time, the flow rate of the fluid discharged from the first port 108 to the second port 110 via the initial exhaust valve 100 is smaller than that when the valve disc 116 is completely separated, and therefore is not shown. There is no sudden pressure fluctuation inside the processing chamber.

As a result, the first unit connected to the processing chamber or the like
The fluid from the port 108 flows from the first bypass passage 119 through the first chamber 26 and the second bypass passage 120 to the valve box 1
It flows into the twelve passages 117 and is discharged to the second port 110.

Further, a detection device (not shown) is provided to detect the pressure value inside the processing chamber and the like, and a detection signal is output to a controller (not shown).

As a result, when the pressure inside the processing chamber or the like decreases and reaches a pressure value preset by the operator via the controller, a signal is output from the controller to the pressure fluid supply source. The supply of pilot pressure is stopped and exhausted.

When the pilot pressure supplied from the fluid port 64 is stopped, the pressing force that presses the first piston 22 downward is no longer applied, so that the first piston 2
2 is pressed upward under the action of the spring force of the spring member 24,
The valve body 20 is displaced upward together with the first piston 22.

Then, the seal member 58 mounted on the valve body 20 comes into contact with the lower end surface of the valve box 112, so that the second
The bypass passage 120 is closed, and the communication between the first chamber 26 and the second bypass passage 120 is cut off.

A tube (not shown) is connected to the lower port 154 of the cylinder 104 from a pressure fluid supply source (not shown) at about the same time or a little earlier than when the supply of pilot pressure to the fluid port 64 is stopped and exhausted. A pressurized fluid (eg compressed air) is supplied via.

Then, the second piston 148 rises, the second displacement member 162 tilts under the engagement action of the second roller members 172a and 172b with respect to the elongated hole 174, and the valve disc 116 shown in FIGS. 7 and 10. The second valve seat 122
Is substantially horizontal in a predetermined distance. In addition,
In this case, the cylinder chamber 1 communicating with the upper port 152
46 is in an open state to the atmosphere.

At this time, the fluid remaining inside the processing chamber (not shown) connected to the first port 108 gradually moves toward the second port 110 from the clearance between the first port 108 and the valve disc 116. (See FIG. 10), the internal pressure of the processing chamber or the like is further increased as compared with when the fluid inside the processing chamber or the like is discharged by the initial exhaust valve 100 (see FIG. 9). It is falling.

The second piston 148 is further raised by continuously supplying the pressure fluid to the lower port 154, and the piston rod 150, the first displacement member 158 and the second displacement member 162 are further integrally raised. As a result, the first roller members 170a and 170b move into the guide groove 14
The state is in contact with the upper end positions of 2a and 142b.
Then, the valve disc 116 is displaced upward from the position facing the second valve seat portion 122, and the first port 108 formed in the valve box 112 is in an open state where it is not closed by the valve disc 116 (FIG. 8). And FIG. 11).

As a result, the valve disc 116 is separated upward from the facing position of the second valve seat portion 122, and the first port 10 is separated.
8, the passage 117 and the second port 110 are completely communicated with each other, so that the fluid inside the processing chamber or the like (not shown) connected to the first port 108 is appropriately discharged through the second port 110.

The valve disc 116 is connected to the second valve seat portion 12
Even if the fluid inside the processing chamber or the like is discharged from the first port 108 through the second port 110 while being separated from 2, the pressure of the fluid inside the processing chamber or the like has already dropped,
There is no sudden pressure fluctuation. Therefore, the product formed on the inner wall surface of the processing chamber (not shown) is not peeled off.

Further, the valve rod 114 has the third roller member 1
When tilting a predetermined angle with 78a and 178b as fulcrums,
Since the second bellows 136 and the second ring body 140 tilt together with the valve rod 114, the air tightness of the valve box 112 inside the chamber is reliably maintained even when tilted.

Further, in another embodiment of the present invention, the valve disc 116 is separated from the second valve seat portion 122, and the valve body 20 of the initial exhaust valve 100 is closed. However, the invention is not limited to this, and when the valve disc 116 is separated from the second valve seat portion 122, the valve body 20 of the initial exhaust valve 100 is opened at the same time as the main body of the gate valve 102 and the initial state. The fluid may be discharged from both the exhaust valve 100 and substantially the same time.

Next, the valve disc 116 is attached to the second valve seat portion 12
When the first port 108 is seated on the second port 108 and the first port 108 is closed, the pressure fluid is supplied to the upper port 152 under the switching action of the switching valve (not shown) to generate the second position.
The piston 148 descends, the piston rod 150, the first
When the displacement member 158 and the second displacement member 162 are integrally lowered, the displacement member 158 and the second displacement member 162 return to the initial positions shown in FIGS. 6 and 9. In this case, it is assumed that the cylinder chamber 146 communicating with the lower port 154 is open to the atmosphere (see FIG. 4).

That is, the second displacement member 162 has the long hole 17
4, the second roller members 172a and 172b are engaged with each other to tilt in a direction opposite to the above by a predetermined angle, and after the valve disc 116 and the second valve seat portion 122 are displaced to the opposite position, the piston The first displacing member 158 and the second displacing member 162 are integrally lowered with the rod 150 to return to the initial position shown in FIGS. 6 and 9.

At this time, in the second displacement member 162, the third roller members 178a and 178b are guided by the guide grooves 142a and 142.
Since it is in contact with the lower end portion of b, displacement in the axial direction is restricted.

As a result, the seal member 123 provided on the valve disc 116 is seated on the second valve seat portion 122, and the first port 108 is hermetically closed.

As described above, in another embodiment of the present invention, the initial exhaust valve 100, which is conventionally provided as a separate body, is integrally provided in the valve box 112 of the gate valve 102, so that the initial exhaust valve 100 is provided. Since pipes and pipe joints for connection are unnecessary, the number of parts can be reduced and the size of the entire device can be reduced.

Further, since piping, pipe joints and the like for connecting the initial exhaust valve 100 are not required, a complicated work for checking the airtightness between the connected parts is unnecessary, and the efficiency of the assembling work is improved. Can be improved.

Further, by providing the initial exhaust valve 100 integrally with the valve casing 112 of the gate valve 102, the opening / closing operations of the valve body 20 of the initial exhaust valve 100 and the valve disc 116 of the gate valve 102 are interlocked with each other. This makes it easier to control the discharge amount with higher accuracy.

Furthermore, since the discharge amount from the processing chamber due to the suction action of the vacuum pump can be adjusted by the valve opening degree of the valve body 20, the initial value is changed each time depending on the size of the processing chamber and the size of the vacuum pump. There is no need to change the size of the exhaust valve 100.

Further, since the exhaust amount can be adjusted by the initial exhaust valve 100, the complicated work of changing the size of the vacuum pump according to the exhaust amount is unnecessary.

Further, since the gas is discharged through the initial exhaust valve 100, which has a smaller flow rate than when the valve disc 116 is opened, the amount of discharge can be reduced and a rapid pressure fluctuation can occur inside the processing chamber. This can be suppressed. As a result, the product generated on the inner wall surface of the processing chamber is prevented from peeling off.

[0097]

According to the present invention, the following effects can be obtained.

That is, in the present invention, since the discharge amount from the processing chamber by the vacuum pump can be adjusted by the valve opening degree of the valve body, it is not necessary to change the size of the initial exhaust valve each time. As a result, the management cost of managing the initial exhaust valve of each size can be reduced.

Further, in the present invention, since the initial exhaust valve is integrally provided with the gate valve and the bypass passage is formed, a member for connecting the initial exhaust valve is not required, so that the number of parts is reduced. In addition, it is possible to reduce the size of the entire device.

Furthermore, the opening / closing operations of the valve body of the initial exhaust valve and the gate valve can be easily performed in conjunction with each other, and the flow rate can be controlled with higher accuracy.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view of an initial exhaust valve according to an embodiment of the present invention when a second port is closed.

FIG. 2 is a vertical sectional view of the initial exhaust valve according to the embodiment of the present invention when the second port is opened.

FIG. 3 is a circuit configuration diagram to which an initial exhaust valve according to an embodiment of the present invention is applied.

FIG. 4 is a partial vertical cross-sectional view of the gate valve to which the initial exhaust valve according to another embodiment of the present invention is applied when the first port is closed.

FIG. 5 is a partial vertical cross-sectional view showing a state in which a valve disc of a gate valve to which an initial exhaust valve according to another embodiment of the present invention is applied is separated from a valve seat above.

FIG. 6 is a partially omitted vertical cross-sectional view taken along line VI-VI of FIG.

FIG. 7 is a partially omitted vertical cross-sectional view of a gate valve to which an initial exhaust valve according to another embodiment of the present invention is applied, the state being separated from the first port.

8 is a partially omitted vertical cross-sectional view taken along the line VIII-VIII of FIG.

FIG. 9 is a partially enlarged vertical cross-sectional view of a gate valve to which an initial exhaust valve according to another embodiment of the present invention is applied when the valve disc is seated.

FIG. 10 is a partially enlarged vertical sectional view showing a state where a valve disc of a gate valve to which an initial exhaust valve according to another embodiment of the present invention is applied is separated from a first bypass passage.

FIG. 11 is a partially enlarged vertical sectional view showing a state where a valve disc of a gate valve to which an initial exhaust valve according to another embodiment of the present invention is applied is displaced upward.

[Explanation of symbols]

10, 100 ... Initial exhaust valve 12 ... First port 14 ... Second port 16, 16a ... First body 18 ... Second body 20 ... Valve body 22 ... First piston 24 ... Spring member 26 ... First chamber 28 ... Plate member 32 ... Communication hole 34 ... Second chamber 36 ... Third chamber 40 ... Guide member 46 ... Through hole 50 ... Shaft portion 54 ... First valve seat portion 64 ... Fluid port 78 ... Valve plug 90 ... Adjustment screw 95 ... Processing chamber 96 ... Vacuum pump 97 ... Fluid passage 102 ... Gate valve 104 ... Cylinder 106 ... Drive conversion unit 108 ... First port 110 ... Second port 112 ... Valve box 114 ... Valve rod 116 ... Valve disk 117 ... Passage 118 ... first bolt 119 ... first bypass passage 120 ... second bypass passage 144 ... cylinder tube 146 ... cylinder chamber 148 ... second piston 150 ... piston rod 1 2 ... upper-side port 154 ... lower-side port 158 ... first displacement member 160 ... locknut 162 ... second displacement member 164 ... first spring 166: second spring

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shogo Miyazaki             4-2-2 Kinnodai, Taniwahara Village, Tsukuba-gun, Ibaraki Prefecture             SMC Corporation Tsukuba Technology Center (72) Inventor Mitsuhiro Someya             4-2-2 Kinnodai, Taniwahara Village, Tsukuba-gun, Ibaraki Prefecture             SMC Corporation Tsukuba Technology Center F term (reference) 3H053 AA25 BA12 DA01 DA09                 3H056 AA01 BB32 CA01 CB03 EE10                       GG02 GG14                 3H066 AA03 BA17

Claims (4)

[Claims] 1. An initial exhaust valve arranged between an upstream side passage and a downstream side passage of a fluid passage formed in a valve, the first port being connected to the upstream side and the downstream side of the fluid passage, respectively. And a main body having the second port formed therein, a piston displaceably provided inside the main body along the axial direction under the action of the supplied pilot pressure, and a valve integrally connected to the piston. Body, and adjusting means for adjusting the flow rate of the fluid flowing between the first port and the second port by adjusting the valve opening degree of the valve body. valve. 2. A main body portion integrally provided with a gate valve for opening and closing a fluid passage by a valve disc, and a main body portion provided with a bypass passage for communicating an upstream passage and a downstream passage of the fluid passage, respectively. An initial exhaust valve, comprising: a piston that is displaceably provided in the main body portion along the axial direction under the action of a pilot pressure that is provided with the valve body; and a valve body that is integrally connected to the piston. 3. The initial exhaust valve according to claim 2, further comprising adjusting means for adjusting a flow rate of the fluid flowing through the bypass passage by adjusting a valve opening degree of the valve body. Initial exhaust valve. 4. The initial exhaust valve according to claim 3, wherein the main body of the initial exhaust valve is integrally connected to a valve box of a gate valve, and an upstream passage of a fluid passage formed in the valve box. A bypass passage communicating with the downstream passage is formed at a position facing the valve body, and at least when the valve disc closes the fluid passage, the valve passes through the piston under the action of pilot pressure. An initial exhaust valve, characterized in that fluid is circulated through a fluid passage through the bypass passage by separating a body from the valve box.