CN108563042A - A kind of mach zhender type modulator based on photonic crystal and Nanowire Waveguides - Google Patents
A kind of mach zhender type modulator based on photonic crystal and Nanowire Waveguides Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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Abstract
The present invention relates to a kind of mach zhender type modulator based on photonic crystal and Nanowire Waveguides, multiplex module is coupled including photonic crystal multiple-mode interfence coupling partial wave module, photonic crystal slab waveguide phase modulation module and photonic crystal multiple-mode interfence, photonic crystal multiple-mode interfence coupling partial wave is connect with photonic crystal slab waveguide phase modulation module by Nanowire Waveguides, and photonic crystal multiple-mode interfence coupling multiplex module is connect with photonic crystal slab waveguide phase modulation module by Nanowire Waveguides；It includes photonic crystal multi-mode interference coupler that photonic crystal multiple-mode interfence, which couples partial wave module and photonic crystal multiple-mode interfence coupling multiplex module, photonic crystal slab waveguide phase modulation module includes photonic crystal slab waveguide, and multiple-mode interfence coupled zone is equipped in photonic crystal multi-mode interference coupler.Modulator in the present invention has transmission speed fast, and the high characteristic of modulation bandwidth, size is small, and is easy to highly integrated interconnection, has important practical value.
Description
Technical field
The present invention relates to a kind of modulator more particularly to a kind of mach zhenders based on photonic crystal and Nanowire Waveguides
Type modulator.
Background technology
With scientific and technological progress, economic development, the mankind have come into informationized society.Optical information processing technology is passed due to it
Defeated band is roomy, low advantage is lost.As the new lover of reply modern communication technology growth requirement.Wherein, photon integrated chip is made
Integrated chip for information processing is the most important thing of people's research, in order to reach highly integrated interconnection, by photonic device size
It is very crucial to be down to the micro-nano order of magnitude.Therefore, visual angle has been turned to photonic crystal by people.As a kind of completely new artificial micro-structure
Material has the advantages that many protrusions, such as photon band gap, slow light effect, photon local, auto-collimation effect so that design
Optic communication device with more high integration and more preferable performance is possibly realized, adapted to the development of current optic communication bring it is integrated
Spend increasingly higher demands.Photonic crystal fundamentally solves the problems, such as micro-nano optical device control light so that is based on photonic crystal
Photonic crystal slab waveguide, filter, modulator, beam splitter etc. be with a wide range of applications.Wherein, modulator is light letter
One of the core devices of transmission and processing system, application range is wide.In order to reach modern information technologies, light integrates interconnection system
And the growth requirement of optic communication, study the super-intensive with characteristics such as transmission speed are fast, transmission bandwidth is high and processing speed is fast
The electrooptic modulator of the type micro-nano order of magnitude is particularly necessary, and photon crystal material makes it possible this target.
By photonic crystal introducing optical device early have become hot spot, studied now produce it is various based entirely on
The device of photonic crystal, these devices generally have higher performance, and convenient for the integrated of photonic crystal chip.Therefore design one
Money is feasible based entirely on the microminiature mach zhender type modulator of photonic crystal chip, while being also very significant
, it is advantageous that, this modulator will be easy to promote the use of in integrated circuits with extra small size and excellent characteristic.
There is considerable document to study the mach zhender type modulator based on photonic crystal at present.But absolutely
Largely using common waveguide, such as Y type waveguiding structures on beam splitter, bundling device, the disadvantage is that device size can be caused
It is very big, and waveguide and the pattern mismatch of junction when photonic crystal slab waveguide cascade cause serious loss.Also it adopts
It is split conjunction beam with photonic crystal Y types, T-type line defect structure, but the disadvantage is that loss is higher.
Invention content
The present invention is in order to adapt to the development of highly integrated communicaton system, it is proposed that one kind being based on photonic crystal and nano wire wave
The mach zhender type modulator led, fast with transmission speed, the high characteristic of modulation bandwidth, size is small, and is easy to height and collects
At interconnection, there is important practical value.This patent creatively introduces photonic crystal multi-mode interference coupler, with nano wire
Waveguide and photonic crystal slab waveguide are combined, and have been done at the cascade of Nanowire Waveguides and photonic crystal and drawn the excellent of wimble structure
Change, device size is small, compact-sized, substantially reduces the insertion loss of modulator, and extinction ratio is also greatly improved.
The technical solution used in the present invention is：A kind of mach zhender type tune based on photonic crystal and Nanowire Waveguides
Device processed, including photonic crystal multiple-mode interfence coupling partial wave module, photonic crystal slab waveguide phase modulation module and photonic crystal multimode
Interference coupling multiplex module, the photonic crystal multiple-mode interfence coupling partial wave and the photonic crystal slab waveguide phase modulation module are logical
Cross Nanowire Waveguides connection, the photonic crystal multiple-mode interfence coupling multiplex module and the photonic crystal slab waveguide phase modulation mould
Block is connected by Nanowire Waveguides；
The photonic crystal multiple-mode interfence coupling partial wave module and photonic crystal multiple-mode interfence coupling multiplex module include
Photonic crystal multi-mode interference coupler, the photonic crystal slab waveguide phase modulation module includes photonic crystal slab waveguide, described
Photonic crystal multi-mode interference coupler and the photonic crystal slab waveguide are the air pass light along X-Y plane periodic distribution
Sub- crystal plate structure, the photonic crystal multi-mode interference coupler is interior to be equipped with multiple-mode interfence coupled zone.
Further, the multiple-mode interfence clutch range is to remove several airports among photonic crystal panel to be formed.
Further, the multiple-mode interfence coupled zone is by being moved among one piece of two-dimentional triangular crystal lattice photonic crystal panel
Except 5 × 7 airports are constituted.
Further, the multiple-mode interfence coupling section length is 3.31 μm.
Further, the photonic crystal multi-mode interference coupler is two-dimentional triangular crystal lattice photonic crystal multiple-mode interfence coupling
Device, the photonic crystal slab waveguide are two-dimentional triangular crystal lattice photonic crystal slab waveguide, air pass photonic crystal panel
Host material is silicon.
Further, the two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler and two-dimentional triangular crystal lattice photonic crystal
The lattice constant a of planar waveguide1=420nm, air pore radius r1=0.286a1。
Further, in the Nanowire Waveguides and photonic crystal multi-mode interference coupler contact-segment and the nano wire wave
It leads and is equipped with the areas photonic crystal La Zhui with photonic crystal slab waveguide contact-segment, the areas the photonic crystal La Zhui are built in photon crystalline substance
The airport of body line defect both sides forms a pyramidal structure.
Further, the areas the photonic crystal La Zhui are two airports of outermost layer by removing the contact-segment, and
By follow-up photon crystal linear defect both sides air pore radius according to 1：2：3 ratio setting makes the defeated of photonic crystal slab waveguide
Enter end and output end forms a pyramidal structure.
Further, photonic crystal slab waveguide width is W1=sqrt(3)/2×a1, Nanowire Waveguides width is W2=2W1
+2r1。
Further, the photonic crystal multi-mode interference coupler, photonic crystal slab waveguide and Nanowire Waveguides thickness
Degree is 220nm, and the thickness of substrate silicon is 2 μm.
The modulator approach of the modulator is：When light beam is input to from port 1 in photonic crystal multi-mode interference coupler a,
Be separately input to after beam splitting in two photonic crystal slab waveguides, two interelectrode photonic crystal slab waveguides as phase modulation arm,
So that its refractive index is changed under the effect of both ends modulation voltage, so as to cause by phase of light wave variation, and another piece
Photonic crystal slab waveguide, which is used as, refers to arm, and the light wave passed therethrough is not influenced by modulation voltage, and two-beam is finally in photon
It mutually converges in crystal multi-mode interference coupler, and is exported from output port port 2.If two beam phase differences are π, two smooth cancellations,
There is " disconnected " state, if two beam phase differences are 0, two light are added, and " logical " state occur, real by controlling the switching of light wave
Now in signal loading to light wave.
Advantageous effect caused by the present invention includes：The present invention proposes a kind of based on photonic crystal and Nanowire Waveguides
Two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler is introduced photonic crystal mach zhender type by MZ Mach-Zehnder
The constituted mode of modulator, it is different from common photonic crystal mach zhender type modulator structure, by two two-dimentional triangles
Lattice photonic crystal multi-mode interference coupler can make the whole ruler of modulator as partial wave and the modulator structure of wave multiplexer
It is very little to greatly reduce, reduce insertion loss.Two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler and two-dimentional triangular crystal lattice photon
Optimal way is bored in crystal plate waveguide and the drawing of Nanowire Waveguides junction, is different from and is not carried out drawing cone optimization Nanowire Waveguides,
Can make that smaller is lost caused by pattern match.Modulator in the present invention is reducing modulator size while reducing modulator
Insertion loss.Introduce the mode mismatch drawn between wimble structure optimization Nanowire Waveguides and photonic crystal slab waveguide, insertion loss
It down to 0.9dB, extinction ratio 14dB, is adjusted to functional, is adapted to the needs of optical information transmission and processing System Development.
Description of the drawings
Fig. 1 is the MZ Mach-Zehnder structure chart proposed by the present invention based on photonic crystal and Nanowire Waveguides；
Fig. 2（a）For wavelength be 1.55 μm light beam from input port input after " logical " state stable state field pattern.
Fig. 2（b）For wavelength be 1.55 μm light beam from input port input after " disconnected " state stable state field pattern.
Fig. 3 is under 1.5 μm to 1.6 μm of operation wavelength, the transmission spectrum of modulator " disconnected " state；
In figure：1, the first two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler, 2, multiple-mode interfence coupled zone, 3, nano wire wave
It leads, 4, two-dimentional triangular crystal lattice photonic crystal slab waveguide, 5, the areas photonic crystal La Zhui, the 6, second two-dimentional triangular crystal lattice photon is brilliant
Body multi-mode interference coupler.
Specific implementation mode
Further details of explanation is done to the present invention with reference to the accompanying drawings and detailed description, it should be appreciated that
Protection scope of the present invention is not restricted by specific implementation.
As shown in Figure 1, the present invention relates to a kind of mach zhender type modulator based on photonic crystal and Nanowire Waveguides
Include mainly sequentially connected photonic crystal multiple-mode interfence coupling partial wave module, photonic crystal slab waveguide phase modulation module and photon
Crystal multiple-mode interfence couples three parts of multiplex module, and it includes the first two-dimentional triangle that photonic crystal multiple-mode interfence, which couples partial wave module,
Lattice photonic crystal multi-mode interference coupler 1, it includes the second two-dimentional triangular crystal lattice that photonic crystal multiple-mode interfence, which couples multiplex module,
Photonic crystal multi-mode interference coupler 6, photonic crystal slab waveguide phase modulation module are two-dimentional triangular crystal lattice photonic crystal panel wave
Lead 4, the first two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler 1 and two-dimentional triangular crystal lattice photonic crystal slab waveguide 4 it
Between connected by Nanowire Waveguides 3, the second two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler 6 and two-dimentional triangular crystal lattice light
It is connected by Nanowire Waveguides 3 between sub- crystal plate waveguide 4.First two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler
1 and second is equipped with multiple-mode interfence coupled zone 2,3 He of Nanowire Waveguides in two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler 6
First two-dimentional 1 contact-segment of triangular crystal lattice photonic crystal multi-mode interference coupler, Nanowire Waveguides 3 and the second two-dimentional triangular crystal lattice light
Sub- 6 contact-segment of crystal multi-mode interference coupler, Nanowire Waveguides 3 and two-dimentional 4 contact-segment of triangular crystal lattice photonic crystal slab waveguide
It is equipped with the areas photonic crystal La Zhui 5.
Wherein, two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler and two-dimentional triangular crystal lattice photonic crystal slab waveguide
4 be the air pass photonic crystal panel structure along X-Y plane periodic distribution, and host material is silicon；Multiple-mode interfence couples
Area 2 is constituted by removing 5 × 7 airports among one piece of two-dimentional triangular crystal lattice photonic crystal panel.Photonic crystal draws cone
Area 5 is two airports of outermost layer by removing contact-segment, and follow-up photon crystal linear defect both sides air pore radius is pressed
According to 1：2：3 ratio setting makes the input terminal of photon crystal linear defect and output end form a pyramidal structure.
Design parameter is：Two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler and two-dimentional triangular crystal lattice photonic crystal
4 parameter of planar waveguide is：Lattice constant a1=420nm, air pore radius r1=0.286a1, photonic crystal slab waveguide width is W1
=sqrt(3)/2×a1, 3 width of Nanowire Waveguides is W2=2W1+2r1；Multiple-mode interfence coupled zone 2 is by removing 5 × 7 airports
It constitutes, coupled region length is 3.31 μm.The areas photonic crystal La Zhui 5 are by removing the airport of junction two, and by subsequent optical
Sub- crystal line defect both sides air pore radius is according to 1：2：3 ratio setting, ra=0.3r1、rb=0.6r1、rc=0.9r1,Make photon
The input terminal and output end of crystal line defect form a pyramidal structure.Photonic crystal multi-mode interference coupler, photonic crystal
The thickness of tablet and Nanowire Waveguides 3 is 220nm, and the thickness of substrate silica is 2 μm.Silicon is near 1550nm wavelength
Refractive index is 3.48, and the refractive index of silica is 1.44.
Fig. 2（a）When being not introduced into modulation voltage, wavelength is stable state field pattern when 1.55 μm of light beam is inputted from port 1,
Light beam is exported from port 2 at this time, and " logical " state is presented in modulator；By Fig. 2（a）It can be seen that：It is more by the 2 D photon crystal of input terminal
Mode interference coupler mean allocation is incident at the equal light of two beam intensities, phase in two photonic crystal slab waveguides respectively,
Modulation voltage is not introduced as the photonic crystal slab waveguide both ends of phase modulation arm at this time, two-beam will be with identical intensity, phase
It is mutually converged in the 2 D photon crystal multi-mode interference coupler of output end.Modulator at this time has light output in port 2, presents
" logical " state.The numerical value of transverse and longitudinal coordinate indicates the size of device on an x-y plane（Unit：Micron）.White area is bright in figure
Degree represents the size of light intensity, if white brightness greatly if light intensity it is high, the low light intensity of white brightness is low, and black region represents no light
By force.The white light path presented in figure be modulator when being not introduced into modulation voltage, after thang-kng in modulator " logical " state it is steady
State field distribution.
Fig. 2（b）When introducing modulation voltage, wavelength is stable state field pattern when 1.55 μm of light beam is inputted from port 1, this
When do not have light beam from port 2 export, modulator present " disconnected " state；By Fig. 2（b）It can be seen that：By the 2 D photon crystal of input terminal
Multi-mode interference coupler mean allocation is incident on two photonic crystal slab waveguides respectively at the equal light of two beam intensities, phase
In, modulation voltage is introduced as the photonic crystal slab waveguide both ends of phase modulation arm at this time, the light beam being incident in phase modulation arm will produce
Raw π phase changes, the phase by pi with another light beam, two-beam will be with identical intensity, different phases（Phase difference of pi）Defeated
Cancellation in the 2 D photon crystal multi-mode interference coupler of outlet.Modulator at this time does not have light output in port 2, presents " disconnected "
State.The numerical value of transverse and longitudinal coordinate indicates the size of device on an x-y plane（Unit：Micron）.The brightness generation of white area in figure
The strong size of mass color, if white brightness greatly if light intensity it is high, the low light intensity of white brightness is low, and black region represents no light intensity.Figure
Middle presented white light path be modulator when introducing modulation voltage, after thang-kng in modulator " disconnected " state stationary field divide
Cloth.
The modulator approach of the modulator is：It is done when light beam (1550nm) is input to the first photonic crystal multimode from port 1
It relates in coupler, is separately input to after beam splitting in two photonic crystal slab waveguides, two interelectrode photonic crystal slab waveguides
As phase modulation arm, so that its refractive index is changed under the effect of both ends modulation voltage, so as to cause by phase of light wave change
Change, and another photonic crystal slab waveguide be used as refer to arm, from reference arm by light wave not by the shadow of modulation voltage
It rings, two-beam finally mutually converges in the second photonic crystal multi-mode interference coupler, and is exported from port 2.If two beam phases are poor
It is 0, then two light are added, and the output end light intensity of modulator is about 0.8 at this time, insertion loss 0.9dB, " logical " state occur；If
Two beam phase differences are π, then two smooth cancellations, " disconnected " state occur, as shown in figure 3, the light intensity of modulator output end is about at this time
0.032, extinction ratio 14dB.By controlling the switching of light wave, the modulation of signal is realized.
The preferred embodiment of the present invention is above are only, the present invention is not limited in the content of embodiment.For in this field
Technical staff for, can have various change and change within the scope of technical scheme of the present invention, made by it is any variation and
Change, within the scope of the present invention.
Claims (10)
1. a kind of mach zhender type modulator based on photonic crystal and Nanowire Waveguides, it is characterised in that：Including photon crystalline substance
Body multiple-mode interfence couples partial wave module, photonic crystal slab waveguide phase modulation module and photonic crystal multiple-mode interfence and couples multiplex mould
Block, the photonic crystal multiple-mode interfence coupling partial wave are connected with the photonic crystal slab waveguide phase modulation module by Nanowire Waveguides
It connects, the photonic crystal multiple-mode interfence coupling multiplex module passes through nano wire wave with the photonic crystal slab waveguide phase modulation module
Lead connection；
The photonic crystal multiple-mode interfence coupling partial wave module and photonic crystal multiple-mode interfence coupling multiplex module include
Photonic crystal multi-mode interference coupler, the photonic crystal slab waveguide phase modulation module includes photonic crystal slab waveguide, described
Photonic crystal multi-mode interference coupler and the photonic crystal slab waveguide are the air pass light along X-Y plane periodic distribution
Sub- crystal plate structure, the photonic crystal multi-mode interference coupler is interior to be equipped with multiple-mode interfence coupled zone.
2. the mach zhender type modulator according to claim 1 based on photonic crystal and Nanowire Waveguides, feature
It is：The multiple-mode interfence clutch range is to remove several airports among photonic crystal panel to be formed.
3. the mach zhender type modulator according to claim 2 based on photonic crystal and Nanowire Waveguides, feature
It is：The multiple-mode interfence coupled zone is by removing 5 × 7 air among one piece of two-dimentional triangular crystal lattice photonic crystal panel
Hole is constituted.
4. the mach zhender type modulator according to claim 3 based on photonic crystal and Nanowire Waveguides, feature
It is：The multiple-mode interfence coupling section length is 3.31 μm.
5. the mach zhender type modulator according to claim 1 based on photonic crystal and Nanowire Waveguides, feature
It is：The photonic crystal multi-mode interference coupler is two-dimentional triangular crystal lattice photonic crystal multi-mode interference coupler, the photon
Crystal plate waveguide is two-dimentional triangular crystal lattice photonic crystal slab waveguide, and the host material of air pass photonic crystal panel is
Silicon.
6. the mach zhender type modulator according to claim 5 based on photonic crystal and Nanowire Waveguides, feature
It is：The crystalline substance of the two dimension triangular crystal lattice photonic crystal multi-mode interference coupler and two-dimentional triangular crystal lattice photonic crystal slab waveguide
Lattice constant a1=420nm, air pore radius r1=0.286a1。
7. the mach zhender type modulator according to claim 1 based on photonic crystal and Nanowire Waveguides, feature
It is：In the Nanowire Waveguides and photonic crystal multi-mode interference coupler contact-segment and the Nanowire Waveguides and photonic crystal
Planar waveguide contact-segment is equipped with the areas photonic crystal La Zhui, and the areas the photonic crystal La Zhui are built in photon crystal linear defect both sides
Airport formed a pyramidal structure.
8. the mach zhender type modulator according to claim 7 based on photonic crystal and Nanowire Waveguides, feature
It is：The areas the photonic crystal La Zhui are two airports of outermost layer by removing the contact-segment, and follow-up photon is brilliant
Body line defect both sides air pore radius is according to 1：2：3 ratio setting makes the input terminal and output end of photon crystal linear defect
Form a pyramidal structure.
9. the mach zhender type modulator according to claim 1 based on photonic crystal and Nanowire Waveguides, feature
It is：Photonic crystal slab waveguide width is W1=sqrt(3)/2×a1, Nanowire Waveguides width is W2=2W1+2r1。
10. the mach zhender type modulator according to claim 1 based on photonic crystal and Nanowire Waveguides, feature
It is：The thickness of the photonic crystal multi-mode interference coupler, photonic crystal slab waveguide and Nanowire Waveguides is 220nm,
The thickness of substrate silicon is 2 μm.
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| CN111443426A (en) * | 2020-04-08 | 2020-07-24 | 清华大学 | Slow wave matching structure film type electro-optical modulator |
| CN112462535A (en) * | 2020-11-18 | 2021-03-09 | 南京邮电大学 | Silicon-based electro-optical modulation and mode division multiplexing integrated device |
| CN113031316A (en) * | 2021-03-16 | 2021-06-25 | 电子科技大学 | Electro-optical modulator based on valley photonic crystal waveguide |
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| CN113031316A (en) * | 2021-03-16 | 2021-06-25 | 电子科技大学 | Electro-optical modulator based on valley photonic crystal waveguide |
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| CN108563042B (en) | 2021-02-12 |
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