CN108561389B - Substrate adsorption jig and method for carrying out substrate adsorption by adopting same - Google Patents
Substrate adsorption jig and method for carrying out substrate adsorption by adopting same Download PDFInfo
- Publication number
- CN108561389B CN108561389B CN201810004102.9A CN201810004102A CN108561389B CN 108561389 B CN108561389 B CN 108561389B CN 201810004102 A CN201810004102 A CN 201810004102A CN 108561389 B CN108561389 B CN 108561389B
- Authority
- CN
- China
- Prior art keywords
- substrate
- supporting
- support
- adsorption
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 257
- 238000001179 sorption measurement Methods 0.000 title claims abstract description 126
- 238000000034 method Methods 0.000 title claims abstract description 40
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000010030 laminating Methods 0.000 abstract description 11
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 239000012790 adhesive layer Substances 0.000 description 5
- 230000000295 complement effect Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 210000003128 head Anatomy 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- 210000005252 bulbus oculi Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 208000003464 asthenopia Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B11/00—Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding
- F16B11/006—Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding by gluing
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a substrate adsorption jig and a method for carrying out substrate adsorption by adopting the same. This tool includes: a base station; the supporting columns are arranged on the base platform, and the surface of one end, far away from the base platform, of each supporting column forms a supporting surface; each support column is connected with one adsorption driving structure; through the adsorption driving structure, the height of each supporting column is adjustable, the distance between the supporting surfaces and the base table is changed, and the forming surface formed by combining the supporting surfaces corresponds to the shape of the substrate to be adsorbed and can adsorb the substrate arranged on the supporting surfaces. This tool is through setting up the support column that a plurality of heights can be adjusted, and the constitution face that the holding surface made up mutually on a plurality of support columns can correspond with the base plate shape, realizes the absorption of multiple different shape base plates, solves the laminating of prior art curved surface base plate, and curved surface base plate adsorbs fixed difficulty, must adopt artifical supplementary, causes laminating inefficiency, the yield is low, can't carry out the problem of laminating to complicated curved surface.
Description
Technical Field
The invention relates to the technical field of product manufacturing, in particular to a substrate adsorption jig and a method for adsorbing a substrate by using the same.
Background
At present, when the traditional flat display equipment is used for watching, the distance between a display screen and eyeballs is not uniform, the edge display effect is not ideal, and visual fatigue is easy to generate, while the curved display equipment has the advantages of uniform distance between the display screen and the eyeballs of the watcher, no loss of edge pictures, comfortable vision, excellent effect and the like, so that the flat display is increasingly replaced by the curved display, the market share of the curved display equipment is gradually improved, and the curved display equipment becomes the mainstream direction of the development of the future display equipment.
Curved surface display device on the current market includes curved surface TV, curved surface cell-phone and curved surface intelligence wearing equipment etc. wherein curved surface TV is gradually tending towards for jumbo size and irregular curved surface, and in manufacturing process, the shaping and the laminating requirement to the curved surface base plate are higher and higher.
In the prior art, when a curved substrate is formed and attached during manufacturing of a curved display device, due to the structural shape particularity of the curved substrate, the curved substrate is difficult to adsorb and fix, usually semi-automatic manual work is mainly adopted, but the mode of the prior art has the defects of low efficiency, low yield, incapability of attaching complex curved surfaces and the like, so that a jig is needed to be designed to solve the problems.
Disclosure of Invention
The technical scheme of the invention aims to provide a substrate adsorption jig and a method for adsorbing a substrate by using the same, which are used for solving the problems that the curved surface substrate is difficult to adsorb and fix, manual assistance is needed, the laminating efficiency is low, the yield is low, and the complex curved surface cannot be laminated in the prior art.
The invention provides a substrate adsorption jig, which comprises:
a base station;
the supporting columns are arranged on the base platform, and the surface of one end, away from the base platform, of each supporting column forms a supporting surface;
each support column is connected with one adsorption driving structure;
through the adsorption driving structure, the height of each supporting column is adjustable, the distance between the supporting surfaces and the base table is changed, and the forming surface formed by combining the supporting surfaces corresponds to the shape of the substrate to be adsorbed and can adsorb the substrate arranged on the supporting surfaces.
Preferably, the substrate adsorption jig, wherein the base table includes a first base table and a second base table, and the support columns include first support columns disposed on the first base table and second support columns disposed on the second base table; each first supporting column and each second supporting column are respectively connected with one adsorption driving structure;
through the adsorption driving structure, the height of each first supporting column is adjustable, the distance between the first supporting surface of each first supporting column and the first base table is changed, and the combined forming surface of the plurality of first supporting surfaces corresponds to the shape of a first substrate to be adsorbed and can adsorb the first substrate arranged on the first supporting surface; through the adsorption driving structure, the height of each second supporting column is adjustable, the distance between the second supporting surfaces of the second supporting columns is changed compared with that of the second base platform, and the combined forming surface of the second supporting surfaces corresponds to the shape of a second substrate to be adsorbed and can adsorb the second substrate arranged on the second supporting surfaces.
Preferably, the substrate adsorption jig further includes:
and the movement driving structure is used for driving the first base station and/or the second base station to move so that the first substrates adsorbed by the first supporting surfaces are opposite to the second substrates adsorbed by the second supporting surfaces.
Preferably, the substrate adsorption jig is arranged such that the first base and the second base are opposite to each other, the first support column extends toward the second base, and the second support column extends toward the first base;
the moving driving structure is connected with the second base station and used for driving the second base station to move towards or away from the first base station.
Preferably, the substrate adsorption jig, wherein the first base station is disposed below the second base station, and the moving driving structure is further configured to drive the second base station to move parallel to the first base station.
Preferably, the substrate adsorption jig, wherein the plurality of support columns are distributed on the base platform in an array.
Preferably, the substrate adsorption jig, wherein a suction cup is arranged at one end of each support column far away from the base station, and the adsorption surface of each suction cup forms the support surface.
Preferably, the substrate adsorption jig, wherein the support column is connected with the suction cup through a rotary ball head.
Preferably, the substrate adsorption jig, wherein the adsorption driving structure includes:
the height adjusting element group is connected with the supporting columns and is used for enabling the height of the connected supporting columns to be adjustable compared with the height of the base station;
and the vacuum suction element is communicated with the supporting surface of the supporting column through a connecting pipeline.
Preferably, the substrate adsorption jig, wherein the height adjusting element group includes:
a drive motor;
the screw is connected with an output shaft of the driving motor;
the nut is sleeved on the screw rod, and the support column is connected with the nut;
the screw rod is driven to rotate through the driving motor, the nut moves relative to the screw rod, and the height of the supporting column relative to the base platform changes.
Preferably, the substrate adsorption jig, wherein the adsorption driving structure includes a sensor for sensing whether the supporting surface is in adsorption connection with the substrate.
The invention also provides a method for adsorbing a substrate by adopting the substrate adsorption jig, which comprises the following steps:
disposing a substrate on the support surfaces of the plurality of support posts;
and starting the adsorption driving structure connected with each support column, adjusting the height of each support column to ensure that the support surface is attached and connected with the substrate, and adsorbing the substrate.
Preferably, in the method, the substrate is curved, and the step of activating the adsorption driving structure connected to each of the support columns, adjusting the height of each of the support columns to attach the support surface to the substrate, and adsorbing the substrate includes:
starting the adsorption driving structure connected with each supporting column, detecting the vertical distance between each supporting surface and the substrate, and adjusting the height of each supporting column according to the vertical distance;
and after the support surfaces are confirmed to be attached and connected with the substrate, detecting the adsorption force between each support surface and the substrate, and adjusting the height of the support columns according to the adsorption force until the adsorption forces between the support surfaces and the substrate are equal, wherein the combined forming surface of the support surfaces corresponds to the shape of the substrate.
Preferably, in the method, the substrate is a planar flexible substrate, the step of starting the adsorption driving structure connected to each of the support columns, adjusting the height of each of the support columns to attach the support surface to the substrate, and adsorbing the substrate includes:
starting the adsorption driving structure connected with each supporting column, detecting the vertical distance between each supporting surface and the substrate, and adjusting the height of each supporting column according to the vertical distance;
after the support surfaces are confirmed to be attached and connected with the substrate, detecting the adsorption force between each support surface and the substrate, and adjusting the height of the support columns according to the adsorption force until the adsorption forces between the support surfaces and the substrate are equal, wherein the combined formation surface of the support surfaces forms a plane;
and adjusting the height of a corresponding support column in the support columns to enable the corresponding support column to drive the adsorbed part of the substrate to move, wherein the combined forming surface of the support surfaces corresponds to the shape of the curved surface forming substrate of the substrate.
At least one of the above technical solutions of the specific embodiment of the present invention has the following beneficial effects:
according to the substrate adsorption jig and the method for adsorbing the substrate by using the same, provided by the embodiment of the invention, the plurality of support columns with adjustable heights are arranged, the combined forming surface of the support surfaces on the plurality of support columns can correspond to the shape of the substrate to be adsorbed, so that the adsorption of the substrates in various shapes is realized, the adsorption mode does not need manual assistance, the stable fixation of the substrate is ensured, the preparation is made for the further substrate laminating process, the accuracy of the laminating process is ensured, and the efficiency of the laminating process is improved, so that the problems of low laminating efficiency, low yield and incapability of laminating complex curved surfaces due to the difficult adsorption and fixation of the curved substrate and the manual assistance in the laminating process in the prior art are solved.
Drawings
Fig. 1 is a schematic structural view of a substrate adsorption jig according to an embodiment of the invention;
FIG. 2 is a schematic plan view of a supporting pillar disposed on a base platform according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a connection structure between the adsorption driving structure and the supporting pillar according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a substrate adsorption jig according to a second embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
The substrate adsorption jig provided by the embodiment of the invention is provided with the plurality of support columns with adjustable heights, and through the height adjustment of each support column, the forming surface formed by combining the support surfaces on the plurality of support columns can correspond to the shape of the substrate to be adsorbed, so that the adsorption of the substrates in various shapes is realized.
Fig. 1 is a schematic structural view of a substrate adsorption jig according to an embodiment of the present invention, and referring to fig. 1, the substrate adsorption jig according to the embodiment of the present invention includes:
a base station 100;
a plurality of supporting columns 200 arranged on the base 100, wherein a supporting surface is formed on the surface of one end of each supporting column 200 far away from the base 100;
an adsorption driving structure (not shown), each support column 200 is connected to one adsorption driving structure;
by the adsorption driving structure, the height of each supporting column 200 is adjustable, the distance between the supporting surfaces is changed compared with the base table 100, and the combined forming surface of the supporting surfaces corresponds to the shape of the substrate 10 to be adsorbed and can adsorb the substrate 10 arranged on the supporting surfaces.
Referring to fig. 2, in the embodiment of the invention, the plurality of supporting pillars 200 are distributed on the base platform 100 in an array, and preferably, the plurality of supporting pillars 200 are uniformly distributed on the base platform 100, and the distribution area on the base platform 100 is greater than or equal to the area of the substrate 10 to be adsorbed.
With the above arrangement structure, referring to fig. 1 and 2, when the substrate 10 to be adsorbed is a curved surface, the distance from the substrate 10 to the base 100 is different at different positions with respect to the base 100, and the height of the supporting columns 200 in the corresponding region can be adjusted to fit the curved surface shape of the substrate 10 by adjusting the height of the supporting columns 200 in the region, so as to adsorb the substrate 10. Based on this principle, the combined structure surface of the support surfaces of the plurality of support pillars 200 can correspond to the shape of the substrate 10, and the substrate 10 can be stably held in any complicated shape.
On the other hand, the initial shape of the substrate 10 to be sucked may be planar, the substrate 10 may be made of a flexible material, and after the substrate 10 is sucked by adjusting the height of each supporting column 200, the substrate 10 is deformed by further adjusting the height of the corresponding supporting column 200, and the combined formation surface of the supporting surfaces of the supporting columns 200 is formed into a predetermined curved shape and is stably sucked. Therefore, the substrate adsorption jig provided by the embodiment of the invention can realize the adsorption of the substrate with the curved surface shape, can further realize the curved surface molding and adsorption of the planar substrate, saves the curved surface molding process of the substrate, and further improves the bonding efficiency of bonding the substrate.
Referring to fig. 1, when the substrate is bonded, an adhesive layer 20 is further disposed above the substrate 10 for connecting the substrate 10 with another substrate during the bonding process.
By adopting the substrate adsorption jig provided by the embodiment of the invention, the adsorption driving structure comprises the sensor for sensing whether the supporting surface is in adsorption connection with the substrate or not, the accuracy of the adsorption connection between the supporting surface of the supporting column and the substrate is detected through the sensor, the uniform adsorption force between each supporting surface and the substrate can be ensured, and the uniform stress of the substrate is ensured.
Fig. 3 is a schematic cross-sectional view illustrating a cross-sectional structure of a substrate adsorption jig according to an embodiment of the invention, in which a support column 200 is connected to an adsorption driving structure.
Referring to fig. 3 in conjunction with fig. 1, in an embodiment of the present invention, the adsorption driving structure connected to each supporting pillar 200 includes:
the height adjusting element group is connected with the supporting columns 200 and is used for enabling the height of the connected supporting columns 200 to be adjustable compared with the height of the base platform;
the vacuum suction unit 600 is connected to the support surface of the support column 200 through a connection pipe.
Specifically, in conjunction with fig. 3, in an embodiment of the present invention, the height adjusting element group includes:
a driving motor 300;
a screw 400 connected to an output shaft of the driving motor 300;
a nut 500 sleeved on the screw 400, wherein the support column 200 is connected with the nut 500;
the screw 400 is driven to rotate by the driving motor 300, the nut 500 moves compared with the screw 400, and the height of the supporting column 200 is changed compared with that of the base 100.
Preferably, to ensure the accuracy of height adjustment of the supporting column 200, the driving motor 300 may be a servo motor. The screw 400 and the nut 500 are combined to form a screw structure, and the nut 500 can move along the screw 400 by using the servo motor to drive the screw 400 to rotate, so as to drive the supporting column 200 to move relative to the base 100.
In addition, according to fig. 3, the screw 400 and the nut 500 may be disposed inside the housing of the base 100, the supporting column 200 is partially disposed inside the housing of the base 100, the driving motor 300 may be disposed at a lower position of the base 100, the output shaft and the screw 400 are coaxially disposed and connected through the bearing 410, and the supporting column 200 is driven by the nut 500 to move relative to the base 100 by the rotation of the driving motor 300, so that the height of the portion extending out of the base 100 varies.
It is to be understood that the height adjusting element set for driving the supporting column 200 relative to the base 100 is not limited to the above-mentioned structure, and the height adjusting element set may include a pneumatic adjusting member or a hydraulic adjusting member, and the height adjustment of the supporting column 200 may be achieved by a pneumatic or hydraulic adjusting means.
Referring to fig. 3, in the embodiment of the present invention, the vacuum sucking component 600 is connected to the supporting surface of the supporting column 200 through a connecting pipeline, wherein the vacuum sucking component 600 is used for providing pneumatic power, and may be a vacuum pump, for example. Preferably, an on-off control valve 610 and a pressure sensor 620 are provided on the connection line. The on-off control valve 610 is used for realizing on-off control of the substrate adsorption force by the vacuum suction element 600; the pressure sensor 620 is used to detect a pressure value inside the connecting line, to determine whether or not the suction between the support surface and the substrate 10 has been performed by the pressure value, and to determine the suction force.
Referring to fig. 3 in conjunction with fig. 1, in another aspect of the present embodiment, a suction cup 700 is disposed at an end of each supporting column 200 away from the base 100, and a suction surface of the suction cup 700 forms a supporting surface. In addition, preferably, the supporting column 200 is connected with the suction cup 700 by a rotating ball head 800.
The connection pipeline of the vacuum suction element 600 communicating with the supporting surface is connected to the passage 230 in the supporting column 200, and a gas circulation passage communicating the suction surface with the passage in the supporting column 200 is provided in the rotating ball head 800 to realize the communication between the suction surface and the connection pipeline.
With the above arrangement, the rotary ball 800 can drive the suction cup 700 to rotate within a certain angle range, so that the suction cup 700 and the curved surface portion of the substrate 10 can be fixed by suction.
Based on the above arrangement structure, when each supporting column 200 is connected to a height adjusting element group and a vacuum suction element respectively, which are constituted by a group of the above structure, it is possible to realize accurate adjustment of the height of the supporting column 200 with respect to the base 100, and it is possible to generate a suction force at the supporting surface formed by the suction surface of the suction cup 700 for sucking the substrate. The combination of the supporting columns 200 uniformly distributed on the base table 100 can realize the stable fixation of the substrates with various shapes.
In another aspect of the present invention, a substrate adsorption jig according to the second embodiment is further provided, as shown in fig. 4, in the second embodiment, the substrate adsorption jig includes:
a first base 110 and a second base 120 which are arranged oppositely;
a plurality of first supporting columns 210 are arranged on the first base platform 110, and a first supporting surface is formed on the surface of one end of each first supporting column 210, which is far away from the first base platform 110;
a plurality of second supporting columns 220 are arranged on the second base platform 120, and a second supporting surface is formed on the surface of one end, away from the second base platform 120, of each second supporting column 220; in addition, each first supporting column 210 and each second supporting column 220 are respectively connected with an adsorption driving structure;
by the adsorption driving structure, the height of each first support column 210 is adjustable, the distance of the first support surface is changed compared with that of the first base table 110, and the composition surface formed by combining a plurality of first support surfaces corresponds to the shape of the first substrate 11 to be adsorbed and can adsorb the first substrate 11 arranged on the first support surface; by the absorption driving structure, the height of each second supporting column 220 is adjustable, the distance between the second supporting surfaces is changed compared with the second base table 120, and the combined forming surface of the plurality of second supporting surfaces corresponds to the shape of the second substrate 12 to be absorbed, and can absorb the second substrate 12 disposed on the second supporting surfaces.
Specifically, as in the first embodiment, the first support columns 210 on the first base 110 and the second support columns 220 on the second base 120 can respectively absorb a substrate with any shape, and can absorb a planar substrate made of a flexible material to form a substrate with any curved surface shape, and ensure the stability of absorption.
Therefore, the substrate adsorption jig of the second embodiment is adopted, the two base stations are oppositely arranged, each base station is respectively provided with the plurality of supporting columns, the two base stations can be respectively used for adsorbing the two substrates to be oppositely attached, the two base stations are enabled to respectively keep the corresponding shapes when the two base stations are attached, preparation is made for the further attaching process, the accuracy of the attaching process is ensured, and the efficiency of the attaching process is improved.
In the second embodiment, the plurality of first supporting pillars 210 are preferably distributed on the first base platform 110 in an array, and the plurality of supporting pillars 210 are preferably uniformly distributed on the base platform 110, and the distribution area on the first base platform 110 is greater than or equal to the area of the first substrate 11 to be adsorbed; the plurality of second supporting pillars 220 are distributed on the second base platform 120 in an array, and preferably, the plurality of supporting pillars 220 are uniformly distributed on the second base platform 120, and the distribution area on the second base platform 120 is greater than or equal to the area of the second substrate 12 to be adsorbed.
In addition, like the first embodiment, each of the substrate adsorption jigs of the second embodiment further includes a transmitter for sensing whether the supporting surface is in adsorption connection with the substrate.
In addition, in the second embodiment, referring to fig. 3, the specific structure of the adsorption driving structure, and the connection manner between the first supporting column 210 and the second supporting column 220 and the adsorption driving structure may be the same as that of the first embodiment, and specifically, referring to fig. 3 and the detailed description of the part of the first embodiment, the detailed description is omitted here.
Preferably, in the second embodiment, the substrate adsorption jig further includes:
and a moving driving mechanism (not shown) for driving the first stage 110 and/or the second stage 120 to move so that the first substrate 11 adsorbed by the plurality of first supporting surfaces is aligned with the second substrate 12 adsorbed by the plurality of second supporting surfaces.
In the substrate adsorption jig according to the embodiment of the present invention, the provided movement driving structure is combined with the first base platform 110 provided with the first support column 210 and the second base platform 120 provided with the second support column 220 to form a substrate attaching jig, and the movement driving structure controls the first base platform 110 and/or the second base platform 120 to move, so as to attach the first substrate 11 adsorbed on the first support column 210 of the first base platform 110 and the second substrate 12 adsorbed on the second support column 220 of the second base platform 120.
Specifically, in the embodiment of the present invention, referring to fig. 4, the first base platform 110 is disposed opposite to the second base platform 120, the first supporting column 210 extends toward the second base platform 120, and the second supporting column 220 extends toward the first base platform 110;
the moving driving structure is connected to the second base 120, and is used for driving the second base 120 to move toward or away from the first base 110.
Specifically, when the first base 110 and the second base 120 are disposed opposite to each other, the moving driving structure only needs to drive the second base 120 to move.
Preferably, the first base 110 is disposed at a position below the second base 120, and the moving driving mechanism is further configured to drive the second base 120 to move parallel to the first base 110.
Based on the arrangement, when the first base platform 110 and the second base platform 120 are disposed opposite to each other, and the second base platform 120 is disposed above the first base platform 110, the moving driving structure can drive the second base platform 120 to move up and down, so that the second base platform 120 approaches the first base platform 110, and preferably, the second base platform 120 can be driven to move horizontally, so that when the second substrate to be adsorbed is horizontally placed on the working platform, the moving driving structure can drive the second base platform 120 to move to the position of the second substrate, so as to pick up the second substrate and then move to the position right above the first base platform 110, so that the adsorbed second substrate is opposite to the first substrate adsorbed by the first support column 210 on the first base platform 110, and further attachment can be achieved.
The moving driving structure is a structure generally used for driving the base to move, and a person skilled in the art should understand a specific embodiment of the moving driving structure according to the moving mode of the base in the present invention, and the structure is not a research focus of the present invention and will not be described in detail herein.
By using the substrate adsorption jig according to the embodiment of the present invention, when the first substrate and the second substrate are attached, referring to fig. 4, the first base table 110 and the second base table 120 are disposed in the sealed space, and the whole sealed space is vacuumized between the first substrate 11 adsorbed by the first support column 210 of the first base table 110 and the second substrate 12 adsorbed by the second support column 220 of the second base table 120, so that the first substrate 11 and the second substrate 12 are in a vacuum environment, and the attachment and curing are completed, thereby preventing bubbles from being generated after the first substrate 11 and the second substrate 12 are attached.
In addition, based on the adsorption principle that the supporting surfaces of the plurality of supporting columns adsorb the substrate in the substrate adsorption jig in the first embodiment, with reference to fig. 4, the substrate adsorption jig according to the first embodiment of the present invention can complete the following substrate bonding processes:
1) the initial states of the first substrate 11 and the second substrate 12 are both curved states and are two curved surfaces with complementary curved surface shapes, the first supporting surfaces of the plurality of first supporting columns 210 can realize the adsorption of the first substrate 11 formed in the curved state, the second supporting surfaces of the plurality of second supporting columns 220 can realize the adsorption of the second substrate 12 formed in the curved state, and after the adhesive layer 20 is arranged on the first substrate 11, the second base table 120 is moved, so that the bonding of the two substrates in the curved surface shapes can be realized, and the smooth and stable bonding of the curved surfaces can be ensured;
2) the initial states of the first substrate 11 and the second substrate 12 are both planar states, and when the first substrate 11 and the second substrate 12 need to be attached in a planar manner, the first substrate 11 in the planar state is adsorbed onto the first support columns 210 by respectively adjusting the heights of the first support columns 210 and the heights of the second support columns 220, and the first support surfaces of the plurality of first support columns 210 are combined to form a plane; the second substrate 12 in a planar state is adsorbed onto the second supporting columns 220, the second supporting surfaces of the plurality of second supporting columns 220 are combined to form a plane, after the adhesive layer 20 is arranged on the first substrate 11, the second base table 120 is moved, and thus the two substrates formed into the plane can be smoothly and stably attached;
the initial states of the first substrate 11 and the second substrate 12 are both in a planar state, when the first substrate 11 and the second substrate 12 are required to be attached to each other in a curved surface, after the planar first substrate 11 is adsorbed onto the first supporting pillars 210, the first supporting surfaces of the plurality of first supporting pillars 210 are combined to form a plane, and the planar second substrate 12 is adsorbed onto the second supporting pillars 220, and the second supporting surfaces of the plurality of second supporting pillars 220 are combined to form a plane, according to the curved surface shape which is preset to be formed by the first substrate 11 and the curved surface shape which is preset to be formed by the second substrate 12, while the first substrate 11 and the second substrate 12 are respectively adsorbed, the heights of the first supporting pillars 210 and the second supporting pillars 220 can be further adjusted, and the shape which is combined by the first supporting surfaces of the plurality of first supporting pillars 210 corresponds to the curved surface shape which is formed by the first substrate 11, the shape of the combination of the second supporting surfaces of the plurality of second supporting columns 220 corresponds to the curved surface shape formed by the second substrate 12, so that the first substrate 11 and the second substrate 12 respectively form two complementary curved surface shapes, and then after the adhesive layer 20 is arranged on the first substrate 11, the second base station 120 is moved, so that the two curved surface-shaped substrates can be attached, and the smooth and stable attachment of the curved surfaces is ensured;
3) the initial states of the first substrate 11 and the second substrate 12 may be a planar state and a curved state, and the substrate formed in the curved state may be adsorbed by the above method, and after the substrate formed in the planar state is adsorbed, the height of the supporting column may be further adjusted to form a curved shape complementary to the shape of the substrate in the curved state, and then the substrates in the two curved shapes may be bonded, and the smooth and stable bonding of the curved surfaces may be ensured.
Preferably, in the substrate adsorption jig according to the embodiment of the present invention, in order to adjust the planar substrate to the predetermined curved surface state by the adsorption method, the jig further includes a controller for calculating and generating height data of each support column when the predetermined curved surface state is generated, so as to control the adsorption driving structure to adjust the height of the support column according to the height data, and the substrate reaches the final predetermined curved surface molding state.
In addition, another aspect of the embodiments of the present invention further provides a method for performing substrate adsorption by using the substrate adsorption jig, wherein the method includes:
disposing a substrate on the support surfaces of the plurality of support posts;
and starting the adsorption driving structure connected with each support column, adjusting the height of each support column to ensure that the support surface is attached and connected with the substrate, and adsorbing the substrate.
Specifically, in the above method, the substrate is curved, wherein the step of activating the adsorption driving structure connected to each of the support columns, adjusting the height of each of the support columns to attach the support surface to the substrate, and adsorbing the substrate includes:
starting the adsorption driving structure connected with each supporting column, detecting the vertical distance between each supporting surface and the substrate, and adjusting the height of each supporting column according to the vertical distance;
and after the support surfaces are confirmed to be attached and connected with the substrate, detecting the adsorption force between each support surface and the substrate, and adjusting the height of the support columns according to the adsorption force until the adsorption forces between the support surfaces and the substrate are equal, wherein the combined forming surface of the support surfaces corresponds to the shape of the substrate.
Based on the process, the curved-surface-state substrate can be adsorbed and fixed on the supporting columns of the base station.
Specifically, in the above method, the step of starting the adsorption driving structure connected to each of the support pillars, adjusting the height of each of the support pillars to attach the support surface to the substrate, and adsorbing the substrate includes:
starting the adsorption driving structure connected with each supporting column, detecting the vertical distance between each supporting surface and the substrate, and adjusting the height of each supporting column according to the vertical distance;
after the support surfaces are confirmed to be attached and connected with the substrate, detecting the adsorption force between each support surface and the substrate, and adjusting the height of the support columns according to the adsorption force until the adsorption forces between the support surfaces and the substrate are equal, wherein the combined formation surface of the support surfaces forms a plane;
and adjusting the height of a corresponding support column in the support columns to enable the corresponding support column to drive the adsorbed part of the substrate to move, wherein the combined forming surface of the support surfaces corresponds to the curved surface forming state of the substrate.
Based on the above process, the substrate in a planar state can be formed in a curved state and fixed by suction on the support columns.
Preferably, the method according to the embodiment of the present invention further includes:
the two substrates to be attached are respectively adsorbed to the supporting columns of the two base stations in the mode;
arranging an adhesive layer on one substrate;
and relatively moving one base station towards the other base station under a vacuum environment to realize the alignment and the jointing of the two substrates.
On the basis of the substrate adsorption jig according to the embodiment of the present invention, those skilled in the art should understand that the alignment and bonding process after the substrate adsorption is performed by using the substrate adsorption jig, and will not be described in detail herein.
The substrate adsorption jig and the method thereof provided by the specific embodiment of the invention are provided with a plurality of support columns with adjustable heights, and through the height adjustment of each support column, the combined forming surface of the support surfaces on the plurality of support columns can correspond to the shape of a substrate to be adsorbed, so that the adsorption of the substrates with various shapes is realized; in addition, the supporting columns adsorb and fix the substrate in an array form, so that the shape of the formed curved substrate is smoother, the stress generated inside the curved substrate after the curved substrate is attached to another substrate is smaller, and the curved substrate is not easy to degum and restore to a plane.
While the preferred embodiments of the present invention have been described, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention.
Claims (7)
1. A method for adsorbing a substrate through a substrate adsorption jig is characterized in that the substrate adsorption jig comprises: a base station; the supporting columns are arranged on the base platform, and the surface of one end, away from the base platform, of each supporting column forms a supporting surface; each support column is connected with one adsorption driving structure; the adsorption driving structure comprises a pressure sensor used for sensing whether the supporting surface is in adsorption connection with the substrate; the method comprises the following steps:
disposing a substrate on the support surfaces of the plurality of support posts;
starting the adsorption driving structure connected with each supporting column, adjusting the height of each supporting column to enable the supporting surface to be attached and connected with the substrate, and adsorbing the substrate;
when the substrate is curved, the adsorption driving structure for each support column is started, the height of each support column is adjusted, the support surface is attached to the substrate, and the substrate is adsorbed by the adsorption driving structure, wherein:
starting the adsorption driving structure connected with each supporting column, detecting the vertical distance between each supporting surface and the substrate, and adjusting the height of each supporting column according to the vertical distance;
after the support surfaces are confirmed to be attached and connected with the substrate, the pressure sensor is used for detecting the adsorption force between each support surface and the substrate, the height of each support column is adjusted according to the adsorption force until the adsorption force between each support surface and the substrate is equal, and the combined forming surface of the support surfaces corresponds to the shape of the substrate;
when the substrate is a planar flexible substrate, the adsorption driving structure for each support column is started, the height of each support column is adjusted, the support surface is attached to the substrate, and the substrate is adsorbed by the adsorption driving structure, wherein the adsorption driving structure comprises:
starting the adsorption driving structure connected with each supporting column, detecting the vertical distance between each supporting surface and the substrate, and adjusting the height of each supporting column according to the vertical distance;
after the support surfaces are confirmed to be attached and connected with the substrate, the pressure sensor is used for detecting the adsorption force between each support surface and the substrate, the height of each support column is adjusted according to the adsorption force until the adsorption force between each support surface and the substrate is equal, and the combined formation surface of the support surfaces forms a plane;
and adjusting the height of a corresponding support column in the support columns to enable the corresponding support column to drive the adsorbed part of the substrate to move, wherein the combined forming surface of the support surfaces corresponds to the curved surface forming state of the substrate.
2. The method of claim 1, wherein the submount comprises a first submount and a second submount disposed opposite to each other, and the support columns comprise a first support column disposed on the first submount and a second support column disposed on the second submount; when each of the first support columns and each of the second support columns are respectively connected to one of the adsorption driving structures, the method further includes:
and respectively adsorbing the two substrates to be attached to the first support column of the first base station and the second support column of the second base station.
3. The method according to claim 2, wherein the substrate suction jig further comprises a movement driving mechanism for driving the first base and/or the second base to move so that the first substrate sucked by the first supporting surfaces of the plurality of first supporting columns is aligned with the second substrate sucked by the second supporting surfaces of the plurality of second supporting columns, and the method further comprises:
and in a vacuum environment, one of the first base station and the second base station is moved towards the other base station through the movement driving structure, and the first substrate and the second substrate are aligned and attached.
4. The method according to claim 1, wherein a suction cup is disposed on the substrate suction jig at an end of each of the support posts away from the base, and a suction surface of the suction cup forms the support surface.
5. The method of claim 4, wherein the support post and the suction cup are connected by a rotating ball head.
6. The method of claim 1, wherein the suction driving structure comprises, on the substrate suction jig:
the height adjusting element group is connected with the supporting columns and is used for enabling the height of the connected supporting columns to be adjustable compared with the height of the base station;
and the vacuum suction element is communicated with the supporting surface of the supporting column through a connecting pipeline.
7. The method of claim 6, wherein the set of height adjustment elements comprises:
a drive motor;
the screw is connected with an output shaft of the driving motor;
the nut is sleeved on the screw rod, and the support column is connected with the nut;
the screw rod is driven to rotate through the driving motor, the nut moves relative to the screw rod, and the height of the supporting column relative to the base platform changes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810004102.9A CN108561389B (en) | 2018-01-03 | 2018-01-03 | Substrate adsorption jig and method for carrying out substrate adsorption by adopting same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810004102.9A CN108561389B (en) | 2018-01-03 | 2018-01-03 | Substrate adsorption jig and method for carrying out substrate adsorption by adopting same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108561389A CN108561389A (en) | 2018-09-21 |
| CN108561389B true CN108561389B (en) | 2020-07-14 |
Family
ID=63529594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810004102.9A Expired - Fee Related CN108561389B (en) | 2018-01-03 | 2018-01-03 | Substrate adsorption jig and method for carrying out substrate adsorption by adopting same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108561389B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110410395A (en) * | 2019-07-24 | 2019-11-05 | 云谷（固安）科技有限公司 | A kind of display screen laminating apparatus and applying method |
| CN110605735A (en) * | 2019-09-27 | 2019-12-24 | 南京中电熊猫液晶材料科技有限公司 | Substrate grabbing device of vacuum sputtering coating equipment and working method thereof |
| CN111009193B (en) * | 2020-01-02 | 2020-08-18 | 涂旭平 | Flexible film laminating machine robot complete machine for flexible display screen |
| CN111894951B (en) * | 2020-07-14 | 2022-03-29 | 昆山国显光电有限公司 | Attaching jig and display screen attaching method |
| CN112460118B (en) * | 2020-10-28 | 2023-05-12 | 合肥维信诺科技有限公司 | Pressing jig and pressing method |
| CN112233557B (en) * | 2020-10-29 | 2022-06-24 | 厦门天马微电子有限公司 | Flexible display device and control method thereof |
| CN112331089B (en) * | 2020-11-03 | 2022-05-31 | Tcl华星光电技术有限公司 | Adsorption device, laminating equipment and laminating method of substrate |
| CN115057296B (en) * | 2022-08-18 | 2022-11-25 | 苏州奇达创机械有限公司 | Adhesive tape pasting equipment for automobile overlong curved surface display screen |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4526818A (en) * | 1982-12-23 | 1985-07-02 | Epson Corporation | Liquid crystal display panel and process for the production thereof |
| CN110625540B (en) * | 2014-05-03 | 2021-10-29 | 株式会社半导体能源研究所 | Film-like member supporting apparatus |
| CN105108674A (en) * | 2015-08-03 | 2015-12-02 | 合肥鑫晟光电科技有限公司 | Support adsorption component, support device and operation method thereof |
| CN105511127B (en) * | 2016-01-26 | 2020-11-06 | 深圳市华星光电技术有限公司 | Curved surface display screen laminating equipment |
| CN106292002A (en) * | 2016-08-12 | 2017-01-04 | 京东方科技集团股份有限公司 | Application of a surface device and method |
-
2018
- 2018-01-03 CN CN201810004102.9A patent/CN108561389B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN108561389A (en) | 2018-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108561389B (en) | Substrate adsorption jig and method for carrying out substrate adsorption by adopting same | |
| EP3332913B1 (en) | Supporting and absorbing assembly, supporting device and operating method of supporting device | |
| CN102765489B (en) | Method and device for folding and flexibly positioning body wallboard | |
| CN211916839U (en) | Foam laminating device based on visual positioning | |
| CN106292002A (en) | Application of a surface device and method | |
| CN205438388U (en) | Magnet equipment pressing fixture | |
| KR101765551B1 (en) | A apparatus for attaching a flexible sheet to a curved substrate | |
| CN112354795B (en) | Active alignment device for camera | |
| CN108882669A (en) | A kind of positioning of SPEED VISION and double-station flexibility mounting device and its attaching method | |
| CN103231617A (en) | Manipulator of engraving and milling machine | |
| CN110978738A (en) | Bonding equipment and bonding method thereof | |
| US10603843B2 (en) | Curved display bonding apparatus | |
| CN109333990B (en) | Laminating jig, laminating method and naked eye 3D mobile phone cover | |
| KR100509281B1 (en) | Bonding Equipment For Bonding Anisotropic Conductive Film And Drive Chip Of Flat Panel Display | |
| CN107461387B (en) | Dispensing and gluing equipment and dispensing and gluing method | |
| CN203884084U (en) | Reinforcing sheet adsorption mechanism | |
| CN116252468A (en) | Film sticking device | |
| CN216942217U (en) | Display screen laminating device and equipment | |
| CN114810764A (en) | Glass laminating device | |
| CN115405599A (en) | Automatic laminating system and method | |
| CN109366965A (en) | A kind of vacuum laminator | |
| TW201107139A (en) | Alignment device for multi-layer laminate bonding machine | |
| CN213231992U (en) | Curved surface pressing fixture and curved surface pressing device | |
| KR101444710B1 (en) | bonding device for bonding OLED window and board, bonding method using it | |
| CN105939575A (en) | Single-sided divisional ink alignment machine and alignment method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200714 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |