CN108550636A - Flexible solar battery back electrode production equipment - Google Patents
Flexible solar battery back electrode production equipment Download PDFInfo
- Publication number
- CN108550636A CN108550636A CN201810614166.0A CN201810614166A CN108550636A CN 108550636 A CN108550636 A CN 108550636A CN 201810614166 A CN201810614166 A CN 201810614166A CN 108550636 A CN108550636 A CN 108550636A
- Authority
- CN
- China
- Prior art keywords
- back electrode
- solar battery
- battery back
- flexible solar
- production equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052802 copper Inorganic materials 0.000 claims abstract description 27
- 239000010949 copper Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 20
- 238000004544 sputter deposition Methods 0.000 claims abstract description 17
- 238000001816 cooling Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 238000005457 optimization Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 1
- 238000012864 cross contamination Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a kind of flexible solar battery back electrode production equipments.The flexible solar battery back electrode production equipment is isolated using copper cover, each sputtering of materials room is independently arranged in copper cover, when it can be allowed to use different materials sputter coating in this way, disposable a variety of different materials sputter coatings simultaneously are realized in the cross contamination that storeroom will not be caused mutual.
Description
Technical field
The present invention relates to technical field of solar batteries more particularly to a kind of production of flexible solar battery back electrode to set
It is standby.
Background technology
With the shortage of global warming, the deterioration of the ecological environment and conventional energy resource, it is sustainable that solar energy has become various countries
The grand strategy decision of development.Solar cell is exactly a kind of device converting solar energy into electric energy, is had more than electric energy, wind
The energy of the resources such as energy, and promise to be the mainstay of future electrical energy industry.Wherein, flexible solar battery is even more and has
Vast market prospect.
Flexible solar battery is mainly made of Window layer, buffer layer, absorbed layer, back electrode and substrate.Flexible solar
It needs to carry out sputtering of materials plated film on flexible solar battery volume when battery back electrode produces, the existing flexible solar battery back of the body
Electrode production is sputtered using one, the use material identical integrally sputtered, and selectivity is few, can not realize that different materials sputter simultaneously
Plated film.
Invention content
In order to solve the above technical problems, the present invention devises a kind of flexible solar battery back electrode production equipment.
The present invention adopts the following technical scheme that：
A kind of flexible solar battery back electrode production equipment, including cavity, be disposed in cavity let off roll, oil temperature drum,
Cooling shaft and wind-up roll are connected with live-roller, let off roll, live-roller, oil temperature between let off roll, oil temperature drum, cooling shaft and wind-up roll
Drum, cooling shaft and wind-up roll form transfer passage, and copper cover A and multiple copper cover B, copper cover A and multiple copper is distributed on transfer passage
Sputtering of materials room is respectively arranged in cover B, multiple copper cover B are provided with vacuum system in oil temperature drum distribution, cavity.
Preferably, the vacuum system includes roughing vacuum pump group, molecular pump, fore pump and cold pump.
Preferably, being connected to recirculated cooling water pipeline in the cooling shaft, circulating hot oil pipeline is connected in oil temperature drum.
Preferably, being provided with infrared heat lamp in the cavity.
Preferably, being provided with jockey pulley and deviation-rectifying system on the transfer passage.
Preferably, installation settings has camera in the cavity.
Preferably, being provided with steering shaft on the transfer passage.
Preferably, the let off roll and wind-up roll are fixedly connected with synchronous motor.
Preferably, independent isolating setting sputtering of materials room in the copper cover A and multiple copper cover B, is realized disposable simultaneously
Use a variety of different materials sputter coatings.
Compared with prior art, the advantageous effect of the flexible solar battery back electrode production equipment is：
1, it is isolated using copper cover, each sputtering of materials room is independently arranged in copper cover, it can be allowed to use so different
When sputtering of materials plated film, the cross contamination that storeroom will not be caused mutual realizes that disposable a variety of different materials splash simultaneously
Penetrate plated film；2, it is vacuumized using multistage, extracts the particle of water vapor adsorption out when vacuumizing, ensure the cleaning of cavity；3、
Oil temperature is roused in production process and is heated, ensures that the production temperature of solar panel substrate is consistent, is passed through after the completion of production sputtering
Contact cooling shaft surface is quickly cooled down；4, pass through the temperature feedback to the thermocouple on infrared heat lamp, control heating
The output power of lamp, the steam adsorbed in the solar panel substrate before process for producing；5, tension and deviation-rectifying system are combined
Together, ensure the smooth of volume face or so, the bending because of volume is prevented to be manufactured into the damage of wound membrane layer；6, by the installation of camera,
The condition of production in real-time feedback cavity body, the position of retractable volume and volume surface appearance；7, increase steering shaft, film can carry out
The plated film of positive and negative discharges stress, improves production efficiency, optimization production.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of the present invention；
In figure：1, cavity, 2, let off roll, 3, wind-up roll, 4, live-roller, 5, jockey pulley, 6, deviation-rectifying system, 7, infrared heat lamp,
8, oil temperature is roused, and 9, cooling shaft, 10, copper cover A, 11, copper cover B, 12, molecular pump, 13, cold pump, 14, fore pump, 15, roughing vacuum pump group.
Specific implementation mode
Below by specific embodiment, and in conjunction with attached drawing, technical scheme of the present invention is further described：
Embodiment：As shown in Fig. 1, a kind of flexible solar battery back electrode production equipment, including cavity 1, in cavity successively
It is provided with let off roll 2, oil temperature drum 8, cooling shaft 9 and wind-up roll 3, biography is connected between let off roll, oil temperature drum, cooling shaft and wind-up roll
Dynamic roller 4, let off roll, live-roller, oil temperature drum, cooling shaft and wind-up roll form transfer passage, copper cover A10 are distributed on transfer passage
Be respectively arranged with sputtering of materials room in four copper cover B11, copper cover A and four copper cover B, four copper cover B around oil temperature drum distribution,
Vacuum system is provided on cavity, vacuum system includes roughing vacuum pump group 15, molecular pump 12, fore pump 14 and cold pump 13, cooling shaft
Interior connection recirculated cooling water pipeline, oil temperature drum is interior to be connected to circulating hot oil pipeline, infrared heat lamp 7 is provided in cavity, conveying is logical
Jockey pulley 5 and deviation-rectifying system 6 are provided on road, installation settings has camera in cavity, is provided with steering shaft on transfer passage, puts
Winding up roller and wind-up roll are fixedly connected with synchronous motor.
The flexible solar battery back electrode production equipment uses copper cover in use, cavity is divided into 5 different regions
It is isolated, it can be allowed to use different materials such as copper, silver, molybdenum when raw material sputtering, the friendship that material will not be caused mutual
Fork pollution, the speed of volume when adjustment produces（0-5m/min）, improve production efficiency；Increase steering shaft, film can carry out just
The plated film of reverse side discharges stress when using flexible material, ensures the smooth of volume, optimization production；Tension and deviation-rectifying system are combined
Together, ensure the smooth of flexible material volume face or so, the bending because of volume is prevented to be manufactured into the damage of wound membrane layer；Pass through camera
Installation feeds back the condition of production between each area, the position of retractable volume and volume surface appearance, passes through the control of controller in real time
The timely situations such as feedback power, electric current, it is convenient to understand process condition in time；To infrared heat lamp heating temperature in 100-300
Between DEG C, by the temperature feedback of thermocouple, the output power of heating lamp is controlled, the solar panel substrate before process for producing
The steam of upper absorption ensures solar panel substrate to 50-200 DEG C of the oil temperature drum heating of volume synchronous operation in production process
Production temperature it is consistent, production sputtering after the completion of pass through contact cooling shaft（20-25 DEG C of recirculated cooling water）Surface carries out quick
Cooling.
Above-mentioned embodiment is only a preferred solution of the present invention, not the present invention is made in any form
Limitation, on the premise of not exceeding the technical scheme recorded in the claims also other variations and modifications.
Claims (9)
1. a kind of flexible solar battery back electrode production equipment, including cavity, characterized in that be once provided in the cavity
Let off roll, oil temperature drum, cooling shaft and wind-up roll are connected with live-roller between let off roll, oil temperature drum, cooling shaft and wind-up roll, unreel
Roller, live-roller, oil temperature drum, cooling shaft and wind-up roll form transfer passage, and copper cover A and multiple copper cover B is distributed on transfer passage,
Sputtering of materials room is respectively arranged in copper cover A and multiple copper cover B, multiple copper cover B are provided with true in oil temperature drum distribution, cavity
Empty set is united.
2. flexible solar battery back electrode production equipment according to claim 1, characterized in that the vacuum system
Including roughing vacuum pump group, molecular pump, fore pump and cold pump, vacuumized using multistage, when vacuumizing by the particle of water vapor adsorption into
Row extraction, ensures the cleaning of cavity.
3. flexible solar battery back electrode production equipment according to claim 1, characterized in that connect in the cooling shaft
Logical recirculated cooling water pipeline, oil temperature drum is interior to be connected to circulating hot oil pipeline, rouses and heats to oil temperature in production process, ensures solar energy
The production temperature of solar panel substrate is consistent, is quickly cooled down by contacting cooling shaft surface after the completion of production sputtering.
4. flexible solar battery back electrode production equipment according to claim 1, characterized in that setting in the cavity
There is infrared heat lamp, by the temperature feedback to the thermocouple on infrared heat lamp, control the output power of heating lamp, handles
The steam adsorbed in solar panel substrate before production.
5. flexible solar battery back electrode production equipment according to claim 1, characterized in that on the transfer passage
It is provided with jockey pulley and deviation-rectifying system, tension and deviation-rectifying system are combined together, ensure the smooth of volume face or so, is prevented because of volume
Bending be manufactured into the damage of wound membrane layer.
6. flexible solar battery back electrode production equipment according to claim 1, characterized in that installation in the cavity
It is provided with camera, by the installation of camera, the condition of production in real-time feedback cavity body, position and the volume table of retractable volume
Planar condition.
7. flexible solar battery back electrode production equipment according to claim 1, characterized in that on the transfer passage
It is provided with steering shaft, increases steering shaft, film can carry out the plated film of positive and negative, discharge stress, improve production efficiency, optimization
Production.
8. flexible solar battery back electrode production equipment according to claim 1, characterized in that the let off roll and receipts
Winding up roller is fixedly connected with synchronous motor.
9. flexible solar battery back electrode production equipment according to claim 1, characterized in that the copper cover A and more
Independent isolating setting sputtering of materials room in a copper cover B, realizes disposable a variety of different materials sputter coatings simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810614166.0A CN108550636A (en) | 2018-06-14 | 2018-06-14 | Flexible solar battery back electrode production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810614166.0A CN108550636A (en) | 2018-06-14 | 2018-06-14 | Flexible solar battery back electrode production equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108550636A true CN108550636A (en) | 2018-09-18 |
Family
ID=63493682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810614166.0A Pending CN108550636A (en) | 2018-06-14 | 2018-06-14 | Flexible solar battery back electrode production equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108550636A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2433262Y (en) * | 2000-07-18 | 2001-06-06 | 湖南三才科技有限公司 | Multi-targat magnetic-control sputtering coiling film coating machine |
| DE202014006417U1 (en) * | 2014-08-11 | 2014-08-20 | Grenzebach Maschinenbau Gmbh | Device for saving energy and at the same time increasing the throughput speed in vacuum coating systems |
| CN104651792A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate |
| CN204898063U (en) * | 2015-09-16 | 2015-12-23 | 中国工程物理研究院激光聚变研究中心 | Niobium sputter pump and vacuum system |
| CN206279263U (en) * | 2016-12-30 | 2017-06-27 | 浙江尚越新能源开发有限公司 | A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating |
| CN107460446A (en) * | 2017-10-11 | 2017-12-12 | 肇庆兆达光电科技有限公司 | A kind of flexible copper-clad plate winding film plating system of carrying magnetic electrode device |
| CN208173602U (en) * | 2018-06-14 | 2018-11-30 | 浙江尚越新能源开发有限公司 | Flexible solar battery back electrode production equipment |
-
2018
- 2018-06-14 CN CN201810614166.0A patent/CN108550636A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2433262Y (en) * | 2000-07-18 | 2001-06-06 | 湖南三才科技有限公司 | Multi-targat magnetic-control sputtering coiling film coating machine |
| DE202014006417U1 (en) * | 2014-08-11 | 2014-08-20 | Grenzebach Maschinenbau Gmbh | Device for saving energy and at the same time increasing the throughput speed in vacuum coating systems |
| CN104651792A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate |
| CN204898063U (en) * | 2015-09-16 | 2015-12-23 | 中国工程物理研究院激光聚变研究中心 | Niobium sputter pump and vacuum system |
| CN206279263U (en) * | 2016-12-30 | 2017-06-27 | 浙江尚越新能源开发有限公司 | A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating |
| CN107460446A (en) * | 2017-10-11 | 2017-12-12 | 肇庆兆达光电科技有限公司 | A kind of flexible copper-clad plate winding film plating system of carrying magnetic electrode device |
| CN208173602U (en) * | 2018-06-14 | 2018-11-30 | 浙江尚越新能源开发有限公司 | Flexible solar battery back electrode production equipment |
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