CN108548660A - Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method - Google Patents
Sampling splits the sampling rate of plate and samples uniformity interferometer measuration system and method Download PDFInfo
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- CN108548660A CN108548660A CN201810253356.4A CN201810253356A CN108548660A CN 108548660 A CN108548660 A CN 108548660A CN 201810253356 A CN201810253356 A CN 201810253356A CN 108548660 A CN108548660 A CN 108548660A
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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Abstract
The invention belongs to sample split plate sampling rate and sampling uniformity interferometer measuration system and method, system include the shrink beam telescope set gradually along light path and autocollimatic speculum；Sampling to be measured splits plate between shrink beam telescope and autocollimatic speculum；Shrink beam telescope exports parallel laser, is projected to the sampling reflecting surface sampling to be measured for sampling and splitting plate, and fraction of laser light splits the sampling reflective surface of plate to shrink beam telescope by be measured sample；The sampling to be measured of another part laser light splits plate and is incident to autocollimatic speculum, and splitting plate through sampling to be measured after the reflection of autocollimatic speculum enters shrink beam telescope.Solve the problems, such as that traditional measurement method is not easy to realize high measurement accuracy for small share sampling rate.
Description
Technical field
The present invention relates to a kind of samplings to split plate sampling rate and sampling homogeneity measuring systems and method.
Background technology
In high power laser system, in order to carry out the measurement of laser parameter, it is necessary first to the sampling of laser is carried out, wherein
A kind of common sampling method is to be split plate using sampling and be placed in laser optical path to carry out reflection sampling to laser, its main feature is that taking
Sample rate is small (general ＜ 1%), to reduce the loss exported to laser to the greatest extent, while having higher requirement to the uniformity of sampling,
Therefore the sampling rate of plate must being split to sampling and sampling uniformity accurately measuring, traditional measurement method is to use double light path
Optical spectroscopy measures, and influences and small share sampling rate (＜ 5%) is difficult to realize high there are the inconsistency of double light path
Measurement accuracy.
Invention content
It is an object of the present invention to provide a kind of sampling rate based on double light path principle of interference and sampling homogeneity measuring systems and
Method splits plate sampling rate and sampling uniformity, solution using shrink beam telescope+auto-collimation speculum+double light path principle of interference measurement
The problem of traditional measurement method of having determined is not easy to realize high measurement accuracy for small share sampling rate.
Technical solution of the invention is to provide a kind of sample and splits plate sampling rate and sampling uniformity interferometer measuration system,
It is characterized in that：Include the shrink beam telescope set gradually along light path and autocollimatic speculum；
Sampling to be measured splits plate between shrink beam telescope and autocollimatic speculum；
Above-mentioned shrink beam telescope exports parallel laser, is projected to the sampling reflecting surface sampling to be measured for sampling and splitting plate, part is swashed
Light splits the sampling reflective surface of plate to shrink beam telescope by be measured sample；Plate incidence is split in the sampling to be measured of another part laser light
To autocollimatic speculum, after the reflection of autocollimatic speculum splitting plate through sampling to be measured enters shrink beam telescope.
Preferably, for reduction system volume, which further includes between shrink beam telescope and sampling to be measured split plate
Amici prism or speculum；Above-mentioned Amici prism or speculum, which reflex to the parallel laser that shrink beam telescope is emitted, to be waited measuring
Sample splits plate, at this point, the movement that plate is split in sampling to be measured can carry out in the horizontal plane.
Preferably, above-mentioned shrink beam telescope includes optical fiber point source, the semi-transparent semi-reflecting rib in optical fiber point source emitting light path
It mirror, the first collimating mirror in semi-transparent semi-reflecting prismatic reflection light path and is sequentially located at small in semi-transparent semi-reflecting prism transmission light path
Orifice plate, the second collimating mirror and CCD camera, above-mentioned aperture plate are located at the position of focal plane of CCD camera, are split for filtering out sampling to be measured
The reflected light of plate non-reflecting surface passes through, and ensures to receive the clean of signal.
Preferably, 2 θ of aperture plate hole diameter d ＜ × f, wherein θ are to split plate angle degree, and f is the focal length of the telescope.
Preferably, in order to keep the two-way luminous intensity of interference close, increase the contrast of interference fringe, auto-collimation speculum is adopted
Your form is pinched with the phenanthrene of not plated film.
The method that the measurement sampling based on above system that the present invention also provides a kind of splitting plate sampling rate and samples uniformity, packet
Include following steps：
Step 1：Shrink beam telescope sends out parallel laser, is projected to sampling to be measured and splits plate, and splits plate sampling through sampling to be measured
Rear portion is back to shrink beam telescope, remembers that the fraction of laser light intensity is I1；Plate is split in the sampling to be measured of another part laser light, is remembered
The laser intensity of the part is I2, sampling rate ρ=I1/I2；
Step 2：Through the laser to be measured that split plate that samples through the reflection of autocollimatic speculum, the luminous intensity being reflected back is kI2,
Middle k is the reflectivity of autocollimatic speculum；
Step 3：Laser after the reflection of autocollimatic speculum is again passed through sampling to be measured and splits plate, transmitted intensity kI2
(1-ρ)；
Step 4：The laser for splitting plate reflection in step 1 through sampling to be measured splits swashing for plate transmission with step 3 through sampling to be measured
Light enters shrink beam telescope simultaneously, is received by CCD camera, and the interference of two directional lights is formed, and the spacing of wherein interference fringe is
Δ d,
Step 5：Interpretation image obtains the contrast γ of interference fringe；
Wherein ImaxAnd IminThe intensity value of bright rays and dark line respectively in image；
Step 6：The theoretical contrast of interference fringe is calculated by formula (2)：
The contrast γ for the interference fringe that step 5 obtains is combined with the theoretical contrast of interference fringe, is calculated and takes
Sample rate ρ；
Step 7：It controls sampling to be measured and splits plate and split plate in sampling to be measured and planar move n times, often mobile primary, repetition
Step 1 obtains the sampling rate ρ of n part to step 6i；
Step 8：Sampling uniformity is obtained by the statistics of sampling rate：Wherein ρiIt is local
Sampling rate,For the average value that spot sampling leads, spot sampling leads number n a little and is set as needed.
Preferably, in step 4 required fringe spacing Δ is obtained by adjusting orientation, the pitch angle of autocollimatic speculum
d。
The beneficial effects of the invention are as follows：
1, common sampling rate measurement is to use double light path method, the otherness of optical path each in this way that will introduce mistake
Difference, such as the inconsistency of detector is exactly an important error source, and the method for the present invention unifies light path, is visited using one
Device CCD is surveyed, there is no two light path nonuniformities to introduce to obtain error, and precision is high；
2, principle of this method based on interferometry, interferometry have its specific theoretical model, and there is no model is not true
Surely the error introduced, while transmission of quantity value need not be also carried out, therefore convenient for tracing to the source.Multiple interference items in image when measuring simultaneously
Line really passes through the I of multigroup interference fringemaxAnd IminAverage computation solves sampling rate, and precision is high；
3, the present invention only includes an optical path, and device is simple.
Description of the drawings
Fig. 1 is the system schematic of one embodiment of the invention；
Fig. 2 is interference fringe example；
Reference numeral is in figure：Plate is split in 1- samplings to be measured, and 2- is to be measured to sample the sampling reflecting surface for splitting plate, and 3- is from quasi-reflection
Mirror, 4- shrink beam telescopes, 5- Amici prisms, 6- aperture plates, 7-CCD cameras, 8- optical fiber point sources.
Specific implementation mode
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
It will be seen from figure 1 that system is made of autocollimatic speculum 3, shrink beam telescope 4, Amici prism 5 etc., sampling to be measured
Plate 1 is split between shrink beam telescope 4 and Amici prism 5；Sampling splits plate and is generally the plate wedge for having certain angle, waits measuring
Sample split plate sampling reflecting surface 2 be tested surface, sampling split plate can sampling split plate planar move with realize scan survey
Amount；Shrink beam telescope reflexes to sampling to be measured through Amici prism 5 by the transmitting of optical fiber point source 8 output parallel laser and splits plate 1；Light splitting
The effect of prism 5 is turnover light path, reduction system volume, while the movement turnover that will split plate can also be used complete in horizontal plane
Speculum substitutes；After the sampling of plate 1 is split in sampling to be measured, part light is returned, part light is penetrated to autocollimatic speculum 3, from quasi-reflection
Mirror 3 is used to will transmit through the reflected light shape to be measured for sampling and splitting sampling reflecting surface 2 of the light autocollimatic return of plate 1 to split plate with sampling to be measured
Interfere at double light path；The CCD camera 7 of shrink beam telescope receives the sampling reflecting surface and autocollimatic speculum 3 to be measured for sampling and splitting plate
Reflected light, and aperture plate 6 is set in its position of focal plane, 2 θ of hole diameter d ＜ × f, wherein θ are to split plate angle degree, and f is that telescope is burnt
Away from splitting the second face of plate reflected light to filter out sampling, ensure to receive signal clean；
It is measured especially by following methods：
1), shrink beam telescope 4 sends out parallel laser, and the sampling reflecting surface that plate is split in sampling to be measured is projected through Amici prism 5
2, and through its sampling, a part of laser returns to shrink beam telescope 4, remembers that the fraction of laser light intensity is I1；Another part laser light
Plate 1 is split in sampling to be measured, and transmitted light splits plate 1 (the non-sampling reflecting surface that plate is split in sampling to be measured is coated with anti-reflection film) by sampling to be measured,
Remember that its intensity is I2, sampling rate to be measured is ρ=I1/I2；
2), through the transmitted light to be measured that split plate 1 that samples through the reflection of autocollimatic speculum 3, wherein autocollimatic speculum is used and is not plated
The phenanthrene of film pinches your form (purpose is to keep the two-way luminous intensity of interference close, increases the contrast of interference fringe), and reflectivity k can
Your formula is pinched by phenanthrene and accurately calculates acquisition, then the luminous intensity being reflected back is kI2；
3), reflected light kI2It is kI to again pass by the transmitted intensity to be measured sampled after splitting plate 12(1-ρ)；
4), the reflective light intensity I to be measured for sampling the sampling reflecting surface 2 for splitting plate1The light intensity kI being reflected back with autocollimatic2(1- ρ) simultaneously
It into shrink beam telescope 1, is received by CCD camera 7, forms the interference of two directional lights, interference fringe such as Fig. 2 at this time；Interfere item
The spacing of line is：Wherein λ is optical maser wavelength, and θ is the angle of two-way laser, can be by adjusting autocollimatic speculum
3 orientation, pitch angle obtain suitable fringe spacing, general to require have 6~10 in whole image in favor of image interpretation
A striped is conducive to interpretation；
5), by interpretation image, fringe contrast can be obtained,Wherein ImaxAnd IminRespectively scheme
The intensity value (button goes the value after background noise) of bright rays and dark line as in, and the theoretical contrast of interference fringe is by participating in interference
Two-way luminous intensity determines that this example is：K pinches your formula by phenanthrene and accurately calculates acquisition,
Sampling rate ρ can be calculated using the formula；
6) it controls sampling to be measured and splits plate 1 and split plate in sampling to be measured and planar move n times, often mobile primary, repetition one
Secondary step 1) -5), repeatedly n times, obtain the sampling rate ρ of n part in totali；
7), sampling uniformity is obtained by the statistics of sampling rate：Wherein ρiFor the sampling of part
Rate,For the average value that spot sampling leads, spot sampling leads number n a little and is set as needed, general unilateral according to splitting board foot
It chooses very little 1/10.
Claims (7)
1. plate sampling rate and sampling uniformity interferometer measuration system are split in a kind of sampling, it is characterised in that：Including being set successively along light path
The shrink beam telescope and autocollimatic speculum set；
Sampling to be measured splits plate between shrink beam telescope and autocollimatic speculum；
The shrink beam telescope exports parallel laser, is projected to the sampling reflecting surface sampling to be measured for sampling and splitting plate, fraction of laser light quilt
To be measured sample splits the sampling reflective surface of plate to shrink beam telescope；The sampling to be measured of another part laser light is split plate and is incident to certainly
Quasi-reflection mirror splits plate and enters shrink beam telescope after the reflection of autocollimatic speculum through sampling to be measured.
2. plate sampling rate and sampling uniformity interferometer measuration system are split in sampling according to claim 1, it is characterised in that：Also
Include the Amici prism or speculum split positioned at shrink beam telescope and sampling to be measured between plate；The Amici prism or speculum will
The parallel laser of shrink beam telescope outgoing reflexes to sampling to be measured and splits plate.
3. plate sampling rate and sampling uniformity interferometer measuration system are split in sampling according to claim 2, it is characterised in that：Institute
Shrink beam telescope is stated to include optical fiber point source, the semi-transparent semi-reflecting prism in optical fiber point source emitting light path, be located at semi-transparent semi-reflecting rib
The first collimating mirror in mirror reflected light path and the aperture plate being sequentially located in semi-transparent semi-reflecting prism transmission light path, the second collimating mirror and
CCD camera, the aperture plate are located at the position of focal plane of CCD camera.
4. plate sampling rate and sampling uniformity interferometer measuration system are split in sampling according to claim 3, it is characterised in that：It is small
2 θ of orifice plate hole diameter d ＜ × f, wherein θ are to split plate angle degree, and f is the focal length of the telescope.
5. plate sampling rate and sampling uniformity interferometer measuration system are split in sampling according to claim 4, it is characterised in that：From
Collimating mirror pinches your form using the phenanthrene of not plated film.
6. a kind of method split plate sampling rate based on any systematic survey samplings of claim 1-5 and sample uniformity,
It is characterized by comprising the following steps：
Step 1：Shrink beam telescope sends out parallel laser, is projected to sampling to be measured and splits plate, and it is latter through sampling to be measured to split plate sampling
Part is back to shrink beam telescope, remembers that the fraction of laser light intensity is I1；Plate is split in the sampling to be measured of another part laser light, remembers the portion
The laser intensity divided is I2, sampling rate ρ=I1/I2；
Step 2：Through the laser to be measured that split plate that samples through the reflection of autocollimatic speculum, the luminous intensity being reflected back is kI2, wherein k is
The reflectivity of autocollimatic speculum；
Step 3：Laser after the reflection of autocollimatic speculum is again passed through sampling to be measured and splits plate, transmitted intensity kI2(1-ρ)；
Step 4：Splitting laser and the step 3 of plate reflection in step 1 through sampling to be measured, through sampling to be measured to split the laser that plate transmits same
When enter shrink beam telescope, received by CCD camera, formed two directional lights interference, wherein the spacing of interference fringe be Δ d,
Step 5：Interpretation image obtains the contrast γ of interference fringe；
Wherein ImaxAnd IminThe intensity value of bright rays and dark line respectively in image；
Step 6：The theoretical contrast of interference fringe is calculated by formula (2)：
The contrast γ for the interference fringe that step 5 obtains is combined with the theoretical contrast of interference fringe, sampling rate is calculated
ρ；
Step 7：Control sampling to be measured and split plate and split plate in sampling to be measured and planar move n times, it is often mobile once, be repeated once
Step 1 obtains the sampling rate ρ of n part to step 6i；
Step 8：Sampling uniformity is obtained by the statistics of sampling rate：Wherein ρiFor the sampling of part
Rate,For the average value that spot sampling leads, spot sampling leads number n a little and is set as needed.
7. according to the method for requiring the measurement sampling described in 6 to split plate sampling rate and sample uniformity in power, which is characterized in that step
By adjusting orientation, the pitch angle of autocollimatic speculum in four, required fringe spacing Δ d is obtained.
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