CN103197382A - Optical fiber derived type interferometer laser light source system - Google Patents
Optical fiber derived type interferometer laser light source system Download PDFInfo
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- CN103197382A CN103197382A CN2013100660030A CN201310066003A CN103197382A CN 103197382 A CN103197382 A CN 103197382A CN 2013100660030 A CN2013100660030 A CN 2013100660030A CN 201310066003 A CN201310066003 A CN 201310066003A CN 103197382 A CN103197382 A CN 103197382A
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Abstract
An optical fiber derived type interferometer laser light source system comprises a laser light source, a coupling lens, a coupling adjustment system, optical fibers, an optical fiber filtering system and a laser shooting port. Light beams coming out from a laser are incident to the coupling lens, generated gathered light beams are coupled and guided into the optical fibers, or the light beams pass through rotating frosted glass which is driven by a motor first and then is coupled and guided into the optical fibers. After being transmitted by the optical fiber filtering system, laser light forms a point light source on an optical fiber end face, coupling efficiency can be changed through the coupling adjustment system, and the luminance of emergent light is adjusted. The optical fiber derived type interferometer laser light source system can be used as an illuminating system of interferometers with different types, the uniformity of an interference pattern is improved, coherent noise is restrained, and the measurement accuracy of the interferometers at a mid-high frequency stage is improved.
Description
Technical field
The invention belongs to optical detection and instrument and optical technical field, a kind of optical fiber that is specifically related to is derived the interferometer laser source system of formula.
Background technology
Interferometer has certain requirement to the spatial coherence of system illumination light source and temporal coherence and output power.Interferometer used atomic spectrum lamp (sodium lamp, mercury vapor lamp etc.) to throw light on usually in the past, but this class light source can not better satisfy above requirement.The appearance of laser solves these problems, because spatial coherence and the temporal coherence of laser elevation, interferometer has had very wide spatial coherence zone and very long coherent length, and the light path of reference surface and test surfaces need not mate again; The concentrated energy density of laser elevation can make interference fringe that good brightness and contrast is arranged simultaneously, so laser has become the light source commonly used in interferometry field.
Yet these characteristics of laser have also been brought some problems to interferometer.The light source of common interferometer adopts the beam expander optical system of being made up of single wavelength helium neon laser and beam expander usually, because laser has time and the spatial coherence of height, flaw (scar, depression etc.) such as microdefect of optical element and surface contamination (dust etc.) all can cause the coherence stack of scattered light in light source beam expander and the interferometer, in interferogram, form Newton ring or target center, form coherent noise.In addition, the assembling of laser instrument and beam expander quality can produce very big influence to the homogeneity of shoot laser.For this reason, it is the interferometer illumination that some scholars adopt low-coherence light source, and the frosted glass that perhaps adds rotation in interferometer system is eliminated coherent noise.But these methods have also reduced the medium-high frequency surface information of measured piece when suppressing coherent noise, have reduced spatial frequency range and the resolution of interferometer measurement.In addition, will rotate frosted glass and be installed in the interferometer, its vibration also can influence measuring accuracy.Though annular light source can suppress coherent noise effectively, keep higher spatial resolution, its complex structure uses inconvenient.
Summary of the invention
The object of the present invention is to provide a kind of optical fiber to derive the interferometer laser source system of formula, it can improve the homogeneity of the illuminator of interferometer, suppresses coherent noise, improves spatial frequency measurement range and the precision of interferometer measurement.
The technical solution that realizes the object of the invention is: a kind of optical fiber is derived the interferometer laser source system of formula, is made up of LASER Light Source, coupled lens, optical fiber, disk, laser emitting port order successively; Converged to the front end face of optical fiber through coupled lens by LASER Light Source emitting laser light beam, optical fiber is fixed on the coupling adjustment rack, the edge of disk has a circle groove along the external diameter direction, optical fiber is at the groove interior circuit, from the outgoing of laser emitting port, form a pointolite through the laser after the Optical Fiber Transmission.Between coupled lens and optical fiber front end face, can insert a rotation frosted glass system, rotation frosted glass system is made up of frosted glass and drive motor, the frosted glass center has an aperture, the machine shaft of drive motor inserts in the above-mentioned aperture and fixes, the frosted glass one-sided smooth, another side is through frosted processing, and its shiny surface is relative with coupled lens.The coupled lens optical axis overlaps with laser beam axis; The front end face of optical fiber is perpendicular to optical axis and be positioned at and converge the focus place.
Described LASER Light Source adopts semiconductor laser.
Described coupling scheme adopt the dialyte lens coupling.
Described fiber-optic output adopts the FC standard interface, and convenient and dissimilar interferometers link to each other.Fiber end face can be selected UPC or APC type, can select dissimilar outgoing end faces according to the measurement requirement of interferometer.
The present invention compared with prior art, its remarkable advantage: (1) LASER Light Source of the present invention is separated with interferometer, can provide illumination for dissimilar interferometers by optical fiber.(2) the present invention does not have the beam-expanding system of conventional interference instrument light source, has eliminated the coherent noise that is brought by beam-expanding system, has improved homogeneity and the signal to noise ratio (S/N ratio) of interferogram.(3) the present invention can freely install rotation ground glass system as required, and because light source separates with interferometer, the vibration that motor produces can not exert an influence to measuring accuracy.
Description of drawings
Fig. 1 is the principle schematic of light-source system of the present invention.
Fig. 2 is that light source of the present invention is used for the principle schematic on the fizeau interferometer.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
As shown in Figure 1, a kind of interferometer laser source system of optical fiber derivation formula is made up of LASER Light Source 1, coupled lens 2, optical fiber 6, disk 7, laser emitting port 8 order successively.Converged to the front end face of optical fiber 6 through coupled lens 2 by LASER Light Source 1 emitting laser light beam.Wherein, guarantee that coupled lens 2 optical axises overlap with laser beam axis; The front end face of optical fiber 6 is perpendicular to optical axis and be positioned at and converge the focus place.Optical fiber 6 is fixed on the coupling adjustment rack 5 by the general-purpose interface on the coupling adjustment rack 5.By coupling adjustment rack 5, can carry out small movement to the position of the front end face of optical fiber 6, change coupling efficiency, making coupling import the laser energy maximum of optical fiber 6.Optical fiber 6 adopts single-mode fibers, owing to only transmit basic mode, can avoid modal dispersion, and fibre core is less, can guarantee that emerging wavefront is practised physiognomy in same position substantially on.Disk 7 diameters are 4 centimetres, and the edge of disk has a circle groove along the external diameter direction, by optical fiber 6 is enclosed the radio-frequency component in the filtering optical fiber, enhancing outgoing uniformity of light around 2 ~ 3 in groove.From 8 outgoing of laser emitting port, form a pointolite through the laser after the Optical Fiber Transmission.Fiber-optic output 8 adopts the FC standard interface, conveniently is fixed on dissimilar interferometer light source places, and its fiber end face can be selected UPC or APC type, reduces the end face reflection of laser; The UPC end face is smooth circular-arc, and shoot laser corrugated quality is better; The APC end face is then worn into certain angle, can prevent that laser that interferometer reflection returns the outgoing end face from entering interferometer again and causing interference, but the shoot laser corrugated is not as the UPC type, requires to select dissimilar outgoing end faces according to the measurement of interferometer.Can insert a rotation frosted glass system to reduce the coherence of light source between coupled lens 2 and optical fiber 6 end faces, suppress the coherent noise that interference system produces, this system is made up of a slice frosted glass 3 and a drive motor 4.Frosted glass 3 is that 60mm, thickness are the ground glass of 3mm for a slice diameter, and its center has the aperture that a diameter is 2mm, can insert the machine shaft as drive motor 4 just, thus frosted glass 3 and drive motor 4 is fixed together.Frosted glass 3 one-sided smooths, another side is through frosted processing, and its shiny surface is relative with coupled lens 2.At this moment, laser beam is penetrated by LASER Light Source 1, converges through coupled lens 2, drive motor 4 drives frosted glass 3 and rotates, light beam after converging passes shiny surface and the frosting of frosted glass 3, converges on the front end face of optical fiber 6 again, penetrates from laser emitting port 8 through disk 7 filtering.
Described optical fiber 6 adopts single-mode fiber, and external diameter is 125 μ m, and internal diameter is 4 μ m, its numerical aperture NA=0.15 ± 0.05.
The present invention can be used for polytype interferometer, is that example describes to be applied in the comparatively simple fizeau interferometer fizeau interferometer of structure, as shown in Figure 2.It is to separate independently with fizeau interferometer that optical fiber is derived formula interferometer laser source system, and its mode that imports by optical fiber is the interferometer illumination.Inciding collimating mirror 11 at fiber end face 8 emitting laser light beams through spectroscope 10 forms parallel beams and incides on the reference mirror 12 and test mirrors 13 that is placed on the back; The light that reference mirror rear surface and test mirrors front surface reflection are returned enters imaging mirror 14 by the reflection of collimating mirror 11 and spectroscope 10, finally is imaged on the detector 15, obtains interferogram.
Claims (5)
1. an optical fiber is derived the interferometer laser source system of formula, it is characterized in that: by LASER Light Source (1), coupled lens (2), optical fiber (6), disk 7, laser emitting port (8) order is successively formed, converged to the end face of optical fiber (6) one ends through coupled lens (2) by LASER Light Source (1) emitting laser light beam, optical fiber (6) other end connects laser emitting port (8), the edge of disk 7 has a circle groove along the external diameter direction, optical fiber (6) is at above-mentioned groove interior circuit, from laser emitting port (8) outgoing, form a pointolite through the laser after the Optical Fiber Transmission.
2. a kind of optical fiber according to claim 1 is derived the interferometer laser source system of formula, it is characterized in that: rotate the frosted glass system at coupled lens (2) and optical fiber (6) near inserting one between the end end face of coupled lens (2), rotation frosted glass system is made up of frosted glass (3) and drive motor (4), frosted glass (3) center has an aperture, the machine shaft of drive motor (4) inserts in the above-mentioned aperture and fixes, frosted glass (3) one-sided smooth, another side is through frosted processing, its shiny surface is relative with coupled lens (2), laser beam is penetrated by LASER Light Source (1), converge through coupled lens (2), drive motor (4) drives frosted glass (3) and rotates, converge shiny surface and the frosting that the back light beam passes frosted glass (3) through coupled lens (2), converge to again on the front end face of optical fiber (6), through penetrating from laser emitting port (8) after disk (7) filtering.
3. a kind of optical fiber according to claim 1 is derived the interferometer laser source system of formula, and it is characterized in that: coupled lens (2) optical axis overlaps with laser beam axis; Perpendicular to optical axis and be positioned at and converge the focus place, coupling scheme adopt the dialyte lens coupling to optical fiber (6) near the end face of coupled lens (2), and laser emitting port (8) adopts the FC standard interface.
4. a kind of optical fiber according to claim 1 is derived the interferometer laser source system of formula, it is characterized in that: described optical fiber (6) is fixed on the coupling adjustment rack (5) by the general-purpose interface on the coupling adjustment rack (5), optical fiber (6) adopts single-mode fiber, and LASER Light Source (1) is a semiconductor laser light resource.
5. a kind of optical fiber according to claim 1 is derived the interferometer laser source system of formula, it is characterized in that: optical fiber (6) can be selected UPC or APC type near the end face of coupled lens (2), reduces the end face reflection of laser; The UPC end face is smooth circular-arc, and shoot laser corrugated quality is better; The APC end face is then worn into certain angle, can prevent that laser that interferometer reflection returns the outgoing end face from entering interferometer again and causing interference, requires to select dissimilar outgoing end faces according to the measurement of interferometer.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019738A (en) * | 2014-04-18 | 2014-09-03 | 上海乾曜光学科技有限公司 | Interferometer free of diffraction spots |
| CN109283637A (en) * | 2018-11-13 | 2019-01-29 | 南京理工大学 | One kind being used for the homogenized fiber coupled laser of interference pattern background |
| CN113834421A (en) * | 2021-09-03 | 2021-12-24 | 南京理工大学 | Imaging lens group and interferometer using same |
| CN114754669A (en) * | 2022-03-22 | 2022-07-15 | 南京理工大学 | Method for suppressing coherent noise of interferometer by multimode fiber bundle extended light source |
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| CN101797149A (en) * | 2009-12-31 | 2010-08-11 | 中国科学院长春光学精密机械与物理研究所 | Liquid crystal adaptive aberration correction retinal imaging device with high-efficiency utilization of energy |
| CN102289076A (en) * | 2011-08-02 | 2011-12-21 | 北京航空航天大学 | Method for designing light source for restraining turbulence influence in atmospheric channel |
| CN102692315A (en) * | 2012-06-19 | 2012-09-26 | 南京烽火藤仓光通信有限公司 | Device and method for detecting microbending loss of optical fiber |
| CN203117457U (en) * | 2013-03-01 | 2013-08-07 | 南京理工大学 | Optical fiber leading-out type interferometer laser light source system |
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2013
- 2013-03-01 CN CN2013100660030A patent/CN103197382A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101797149A (en) * | 2009-12-31 | 2010-08-11 | 中国科学院长春光学精密机械与物理研究所 | Liquid crystal adaptive aberration correction retinal imaging device with high-efficiency utilization of energy |
| CN102289076A (en) * | 2011-08-02 | 2011-12-21 | 北京航空航天大学 | Method for designing light source for restraining turbulence influence in atmospheric channel |
| CN102692315A (en) * | 2012-06-19 | 2012-09-26 | 南京烽火藤仓光通信有限公司 | Device and method for detecting microbending loss of optical fiber |
| CN203117457U (en) * | 2013-03-01 | 2013-08-07 | 南京理工大学 | Optical fiber leading-out type interferometer laser light source system |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019738A (en) * | 2014-04-18 | 2014-09-03 | 上海乾曜光学科技有限公司 | Interferometer free of diffraction spots |
| CN109283637A (en) * | 2018-11-13 | 2019-01-29 | 南京理工大学 | One kind being used for the homogenized fiber coupled laser of interference pattern background |
| CN113834421A (en) * | 2021-09-03 | 2021-12-24 | 南京理工大学 | Imaging lens group and interferometer using same |
| CN113834421B (en) * | 2021-09-03 | 2024-04-09 | 南京理工大学 | Imaging lens group and interferometer using same |
| CN114754669A (en) * | 2022-03-22 | 2022-07-15 | 南京理工大学 | Method for suppressing coherent noise of interferometer by multimode fiber bundle extended light source |
| CN114754669B (en) * | 2022-03-22 | 2024-01-30 | 南京理工大学 | Method for inhibiting coherent noise of interferometer by multimode fiber bundle extended light source |
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Application publication date: 20130710 |