CN107037437A - Measurer for thickness and method for measuring thickness - Google Patents
Measurer for thickness and method for measuring thickness Download PDFInfo
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- CN107037437A CN107037437A CN201710058139.5A CN201710058139A CN107037437A CN 107037437 A CN107037437 A CN 107037437A CN 201710058139 A CN201710058139 A CN 201710058139A CN 107037437 A CN107037437 A CN 107037437A
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- Prior art keywords
- light
- sample
- reference plane
- thickness
- distance
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness
- G01B13/06—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness for measuring thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
- G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Present invention offer is a kind of can to accurately measure the measurer for thickness and method for measuring thickness of sample thickness.Measurer for thickness has：First transmissive member, it has the first reference plane；Second transmissive member, it is oppositely arranged with the first transmissive member, with the second reference plane；First light-projecting portion, it irradiates the light from light source via first with reference to towards the sample being arranged between the first transmissive member and the second transmissive member；First light accepting part, it receives the reflected light from the first reference plane, and receives the reflected light from sample via the first reference plane；Second light-projecting portion, it irradiates the light from light source via second with reference to towards sample；Second light accepting part, it receives the reflected light from the second reference plane, and receives the reflected light from light sample via the second reference plane；Spectrum part, it is to the reflected light received by the first light accepting part and the reflected light progress light splitting by the reception of the second light accepting part.
Description
Technical field
Measured the present invention relates to a kind of measurer for thickness and method for measuring thickness, more particularly to one kind using reflected light
The measurer for thickness and method for measuring thickness of sample thickness.
Background technology
In recent years, the displacement measuring device come measurement distance using light is developed.For example, Japanese Unexamined Patent Publication 2009-270939
Following structure is disclosed in number publication (patent document 1).That is, optical displacement meter includes：Broadband light source device, it is used to give birth to
Into the broadband light as measurement detection light；Collector lens, it is used to assemble above-mentioned detection light, is projected to measurement object thing
Injection side end face is plane；Light-dividing device, its to be incident to above-mentioned collector lens by above-mentioned measurement object thing reflect reflection
Light and the reflected light progress light splitting by above-mentioned emitting side end face reflection, and the frequency of wavelength diffusion properties curve is obtained, thus count
Count in stating the distance between measurement object thing and above-mentioned injection side end face.Above-mentioned collector lens is a kind of transmitting with away from above-mentioned
Project the lens of side end face and above-mentioned detection light that point of irradiation broadens.
In addition, disclosing following structure in Japanese Unexamined Patent Publication 2014-115242 publications (patent document 2).That is, displacement is surveyed
Amount device includes：Point source of light, it is used to launch the light with the spectrum spread；Optical element, it is used to produce the light
Raw axial chromatic aberration, and the light for generating the axial chromatic aberration is gathered in measurement object thing；Opening, it makes by the optics
The light focused in the light of element aggregation in the measurement object thing passes through；Measurement portion, it obtains the light of the light by the opening
Spectrum, and the peak wavelength based on the spectrum obtains the distance between the optical element and the measurement object thing.It is described to survey
Amount portion obtains the dichroic reflection properties of the measurement object thing, and the dichroic reflection properties obtained described in, reduces the light splitting
Reflection characteristic brings the error of range measurement and obtains the distance.
In addition, disclosing following structure in Japanese Unexamined Patent Publication 2010-121977 publications (patent document 3).That is, optical profile type
Displacement meter includes：Detection light generation unit, it is used to generate detection light；Reference plane, it reflects a part for above-mentioned detection light, and
Another part of detection light is set to be penetrated to check object thing side；Spectrophotometric unit, its to interference light carry out light splitting, the interference light by
The reflected light reflected by said reference face and the reflected light composition reflected by above-mentioned check object thing；Light intensity distributions generation is single
Member, it receives the above-mentioned interference light after light splitting, and generates the light intensity distributions related to the wave number of interference light；Luminous intensity maximal point
Extraction unit, it is converted to the light intensity distributions related to above-mentioned wave number and the light intensity spatial frequency dependence for wave number
Light intensity distributions, repeat the extraction of the light intensity distributions maximal point related to above-mentioned spatial frequency with specific time interval；
Phase decision unit, it determines the corresponding frequency of the spatial frequency of the above-mentioned maximal point of the light intensity distributions related to above-mentioned wave number
The phase of rate composition；Displacement judging unit, it judges the displacement of above-mentioned check object thing based on above-mentioned phase.Above-mentioned phase
Determining means includes：Relative phase judging unit, it judges the relative phase of said frequencies composition in the range of 360 degree；Absolutely
To phase calculation unit, its judged result based on above-mentioned relative phase judging unit and past judged result combine above-mentioned phase
To phase, and obtain absolute phase；Phase reference updating block, it is based on resetting and indicated, to update the base of above-mentioned absolute phase
On schedule.Above-mentioned displacement judging unit judges displacement based on above-mentioned absolute phase.
Patent document 1：Japanese Unexamined Patent Publication 2009-270939 publications
Patent document 2：Japanese Unexamined Patent Publication 2014-115242 publications
Patent document 3：Japanese Unexamined Patent Publication 2010-121977 publications
When using the technology described in patent document 1 to 3 to measure sample thickness, such as it is contemplated that according to from ground connection
Sample distance measurement result and the method that measures the sample thickness from the measurement result with a distance from ground plane.
But, when there is concavo-convex or sample in specimen surface have deformed or bent, the contact surface side surface of sample and
Gap can be produced between contact surface.In this case, accurate measurement sample thickness can have difficulties.
The content of the invention
The present invention proposes that its object is to provide one kind to accurately measure sample thickness to solve the above problems
The measurer for thickness and method for measuring thickness of degree.
The technical scheme solved the problems, such as
(1) to solve the above problems, the measurer for thickness of an aspect of of the present present invention includes：
First transmissive member, it has the first reference plane；
Second transmissive member, it is oppositely arranged with first transmissive member, with the second reference plane；
First light-projecting portion, it is via described first with reference to towards being arranged on first transmissive member and second printing opacity
Light of the sample irradiation from light source between component；
First light accepting part, it receives the reflected light from first reference plane, and is connect via first reference plane
Receive the reflected light from the sample；
Second light-projecting portion, it irradiates the light from light source via described second with reference to towards the sample；
Second light accepting part, it receives the reflected light from second reference plane, and is connect via second reference plane
Receive the reflected light from the sample；
Spectrum part, it is to the reflected light received by first light accepting part and the reflection by excessively described second light accepting part reception
Light carries out light splitting.
So, by with reference to towards sample both sides irradiation light, and making respectively from sample both side surface via each
Reflected light interferes and carried out the structure of light splitting with the reflected light from corresponding reference plane, even if carrying out specimen surface presence
Concavo-convex or sample exist it is deformed or bent in the case of, also can respectively be calculated based on light splitting result sample both sides surface and
The distance between corresponding reference plane.Also, for example, can according between each distance and each reference plane calculated away from
From and calculate sample thickness exactly.Thus, it is possible to accurately measure sample thickness.
(2) preferably, the spectrum part includes an optical splitter, and the measurer for thickness further has optical system
System, the optical system be used for will the light that be received from first light accepting part and from second light accepting part reception light to described
Optical splitter is guided.
By using the structure of this optical system, the quantity of the optical splitter of costliness can be reduced, therefore, it is possible to reduce thickness
Spend the manufacturing cost of measurement apparatus.
(3) preferably, the light of the light irradiated from first light-projecting portion via first reference plane to the sample
The axle of beam, from second light-projecting portion via described second with reference to and towards the axle, described of the light beam of light that irradiates of the sample
The axle of the light beam for the reflected light from first reference plane that first light accepting part is received and the reflected light from the sample
Light beam axle and the axle of the light beam of the reflected light from second reference plane that is received of second light accepting part and come
Carried over each other (along) from the axle of the light beam of the reflected light of the sample.
According to this structure, even in each reference plane it is such as non-parallel configure or sample is not parallel relative to reference plane
In the case that ground is set, sample thickness can be also accurately measured.
(4) preferably, the spectrum part includes an optical splitter；The measurer for thickness further has optical system
System, the optical system be used for will the light that be received from first light accepting part and from second light accepting part reception light to described
Optical splitter is guided.It is set to, from the sample via first reference plane, first light accepting part and the optical system
And the optical distance in the path of the reflected light of the optical splitter is propagated to, and from the sample via second reference plane, institute
The optical distance in the path for the reflected light stated the second light accepting part and the optical system and propagate to the optical splitter is identical.
According to such structure, due to that can make respectively needed for the light that the surface of sample both sides is reflected reaches optical splitter
Time is almost identical, therefore, it is possible to make to be split device in the reflected light that each surface is reflected with almost identical time (timing)
Light splitting.Thus, even if sample is moved, also sample thickness can be accurately measured using easy structure.
(5) preferably, the measurer for thickness further has operational part, and the operational part is based on the spectrum part
Light splitting result, calculates the distance between first reference plane and the sample, i.e., the first distance and second reference plane
With the distance between the sample, i.e. second distance, the operational part is by from first reference plane and second reference
The distance between face subtracts first distance and the second distance to calculate the thickness of the sample.
So, sample thickness is calculated by the basis measurement result related to sample exterior space, i.e. each distance
Structure, it is that opaque material can also calculate the thickness of the sample to come even if sample.In addition, the refractive index without recognizing sample
Deng physics value, the thickness of the sample also can be easily calculated.
(6) to solve the above problems, the method for measuring thickness of an aspect of of the present present invention is the thickness using measurer for thickness
Measuring method is spent, the measurer for thickness includes：
First transmissive member, it has the first reference plane,
Second transmissive member, it is oppositely arranged with first transmissive member, with the second reference plane,
First light-projecting portion, it is via described first with reference to towards being arranged on first transmissive member and second printing opacity
Light of the sample irradiation from light source between component,
First light accepting part, it receives the reflected light from first reference plane, and is connect via first reference plane
The reflected light from the sample is received,
Second light-projecting portion, it irradiates the light from light source via described second with reference to towards the sample,
Second light accepting part, it receives the reflected light from second reference plane, and is connect via second reference plane
The reflected light from the sample is received,
Spectrum part, its reflected light received to the reflected light that is received by first light accepting part and by second light accepting part
Carry out light splitting,
The method for measuring thickness includes：
Light splitting result based on the spectrum part, calculates the distance between first reference plane and the sample, i.e. the
One distance and the distance between second reference plane and the sample, i.e. second distance the step of,
From the distance between first reference plane and second reference plane, i.e. distance between the surface subtract described first away from
The step of from the thickness of the sample is calculated with the second distance.
So, by with reference to towards sample both sides irradiation light, and making respectively from sample both side surface via each
Reflected light interferes and carried out the structure of light splitting with the reflected light from corresponding reference plane, even if carrying out specimen surface presence
Concavo-convex or sample exist it is deformed or bent in the case of, also can respectively be calculated based on light splitting result sample both sides surface and
The distance between corresponding reference plane.Further, it is possible to according to the distance between each distance and each reference plane calculated
Sample thickness is calculated exactly.Thus, it is possible to calculate sample thickness exactly.In addition, according to the survey for sample exterior space
Amount result, i.e. each distance and calculate the thickness of sample, even if so that sample is opaque material, can also calculate the sample
Thickness.In addition, the physics value such as refractive index without recognizing sample, also can easily calculate the thickness of the sample.
(7) preferably, in the state of the sample is not provided with, from first light-projecting portion via first reference plane
The light from light source is irradiated to second reference plane, the reflected light from first reference plane is connect by first light accepting part
Receive, and the reflected light from second reference plane is received via first reference plane by first light accepting part, it is described
Method for measuring thickness further comprises：In the state of the sample is not provided with, based on the spectrum part to by described first by
The step of reflected light that light portion is received carries out the light splitting result after light splitting and calculates the distance between the surface.
According to this structure, using the computational methods identical method with the first distance and second distance come being capable of computational chart
Distance between the surface, therefore, it is possible to carry out computational chart with the high computational accuracy with the first distance and the computational accuracy same degree of second distance
Distance between the surface.Thus, for example, can be more accurate compared with the other method poor using precision is come the situation of computational chart distance between the surface
Really calculate sample thickness.
In accordance with the invention it is possible to accurately measure the thickness of sample.
Brief description of the drawings
Fig. 1 is the figure of the structure for the measurer for thickness for representing embodiment of the present invention.
Fig. 2 is the figure of the enlarged drawing on probe (probe) periphery for the measurer for thickness for representing embodiment of the present invention.
Fig. 3 is for illustrating the joints of optical fibre of the measurer for thickness of embodiment of the present invention (fiber junction)
Function figure.
Fig. 4 is one of the power spectrum generated in the operational part for the measurer for thickness for representing embodiment of the present invention
Figure.
Fig. 5 is one of the power spectrum generated in the operational part for the measurer for thickness for representing embodiment of the present invention
Figure.
One progress of the step of Fig. 6 is the measuring method to having used the measurer for thickness of embodiment of the present invention
Defined flow chart.
Fig. 7 is the figure for the comparative example for representing probe.
Description of reference numerals
1st, the spectrum part of 2 probe 3
The optical system of 4 light source 5
The optical fiber of 6 operational part 31,32,33,34
The joint portion of 35 joints of optical fibre 36
The data generating section of 41 optical splitter 42
51st, the lens of 52 lens combination 55,56,57,58
61st, the surface of 62 transparent substrates 65,66,67,68
70 reference axis 71,72 light projector light beams
73rd, 74,75,76 the reflected beams 77,78 end faces
81st, the probe of 82 surface 91
The sample of 92 workbench 93
The measurer for thickness of 94 surface 101
151 samples
Embodiment
Hereinafter, embodiments of the present invention are illustrated referring to the drawings.In addition, to identical or equal in accompanying drawing
Part is using identical reference and omits its repeat specification.In addition, following described embodiment can be combined
At least partially.
Fig. 1 is the figure of the structure for the measurer for thickness for representing embodiment of the present invention.Fig. 2 is to represent embodiment party of the present invention
The figure of the enlarged drawing on the probe periphery of the measurer for thickness of formula.
Referring to Figures 1 and 2, measurer for thickness 101 includes probe 1,2, spectrum part 3, light source 4, optical system 5, computing
Portion 6.Probe 1 includes lens combination 51 and transparent substrates (the first transmissive member) 61.Lens combination 51 includes lens 55 and lens
(the first light-projecting portion and the first light accepting part) 57.Transparent substrates 61 have surface (the first reference plane) 65 and surface 67.Probe 2 includes
Lens combination 52 and transparent substrates (the second transmissive member) 62.Lens combination 52 include lens 56 and lens (the second light-projecting portion and
Second light accepting part) 58.Transparent substrates 62 have surface (the second reference plane) 66 and surface 68.Spectrum part 3 includes the He of optical splitter 41
Data generating section 42.Optical system 5 includes optical fiber 31,32,33,34 and the joints of optical fibre 35.
Light source 4 in measurer for thickness 101 is, for example, the laser of the big light of output band width.In addition, light source 4 is
LED (Light-Emitting Diode) or incandescent lamp etc..
Optical system 5 for example guides the light exported from light source 4 to probe 1,2.More specifically, the light of optical system 5
Fibre 34 is receiving the light from light source 4 with the input of the optical bond of light source 4, and the light received is sent into the joints of optical fibre
35。
Fig. 3 is the figure for illustrating the function of the joints of optical fibre of the measurer for thickness of embodiment of the present invention.
Reference picture 3, the joints of optical fibre 35 distribute the light received from optical fiber 34 to optical fiber 31,32.
Referring again to Fig. 1 and Fig. 2, the light from light source 4 distributed by the joints of optical fibre 35 is sent to probe 1 by optical fiber 31
Lens combination 51.In addition, the light from light source 4 distributed by the joints of optical fibre 35 is sent to the lens of probe 2 by optical fiber 32
System 52.
In measurer for thickness 101, for example, the light projector light beam of the light irradiated from lens 57 via surface 65 to sample 151
What 71 axle, the axle of the light projector light beam 72 of the light irradiated from lens 58 via surface 66 to sample 151, lens 57 were received comes from
The reflected beams 75 for the reflected light from sample 151 that the axle and lens 57 of the reflected beams 73 of the reflected light on surface 65 are received
Axle and coming from of being received of the axle of the reflected beams 74 of the reflected light from surface 66 that is received of lens 58 and lens 58
The axle of the reflected beams 76 of the reflected light of sample 151 is carried over each other.Herein, when light beam is collimated light beam, the axle of light beam is edge
The axle of light included in the collimated light beam, in addition, when light beam is divergent beams or focus on light beam, the axle of light beam is tool
There is a symmetry axis of the circular cone of side, the side is along the light included in the divergent beams or the focus on light beam.
More specifically, in lens combination 51, lens 55,57 are, for example, columnar convex lens, and are arranged to optical axis
Carry over each other.Herein, the imaginary axis along the optical axis of lens 55,57 is defined as reference axis 70.
Lens 57 are as the first light-projecting portion, via surface 65 to the sample between transparent substrates 61 and transparent substrates 62
151 light of the irradiation from light source 4.
Sample 151 is configured on workbench (not shown), can be along the face parallel to surface 65 and 66 in transparent substrates 61
Moved between transparent substrates 62.Herein, a part for sample 151 is located between transparent substrates 61 and transparent substrates 62.
In addition, the entirety of sample 151 can also be located between transparent substrates 61 and transparent substrates 62.
Lens 55 are opposite to the end face 77 with the optical fiber 31 of its optical bond, receive in the light beam of the light from end face 77 with
The optical axis of lens 55 is light beam, i.e. the light projector light beam 71, and be converted to collimated light beam from divergent beams of axle.So as to light projector light beam
71 axle carries over reference axis 70.
Lens 57 are arranged between lens 55 and transparent substrates 61, and the light projector light beam 71 from lens 55 is converted into focusing
Light beam, thus makes the light from light source 4 be gathered in the surface 81 of the face opposite with surface 65, i.e. sample 151 via surface 65
Near.
Transparent substrates 61 and transparent substrates 62 are oppositely arranged.Specifically, transparent substrates 61 and transparent substrates 62 just facing and
Set.More specifically, transparent substrates 61 and transparent substrates 62 are arranged as the surface 65 of the first reference plane and as second
The surface 66 of reference plane is just faced.
In addition, transparent substrates 61 and transparent substrates 62 are not limited to be arranged to the structure that surface 65 and surface 66 are just being faced,
It can be oppositely arranged.
Transparent substrates 61 are, for example, parallel planar substrates with transparent substrates 62, and the frequency with of the light in the output of light source 4
Upper is transparent or translucent.More specifically, the surface 65 and surface 67 of transparent substrates 61 are, for example, plane and are parallel to each other.
Transparent substrates 61 are configured to the normal on surface 65 along reference axis 70 and the surface 81 of surface 65 and surface 67 respectively with sample 151
It is opposite with lens 57.
In addition, the surface 66 and surface 68 of transparent substrates 62 are, for example, plane and are parallel to each other.Transparent substrates 62 are set
Into the normal on surface 66 is along reference axis 70 and surface 66 and surface 68 are opposite with the surface 82 of sample 151 and lens 58 respectively.
In addition, surface 65 and surface 67 can also be not parallel mutually.In addition, surface 66 and surface 68 can also be uneven mutually
OK.In addition, measurer for thickness 101 can also be to replace transparent substrates 61 and transparent substrates 62 to have the shape beyond tabular
Transmissive member structure.
The lens 57 of lens combination 51 receive the reflected light on the surface 65 from transparent substrates 61 as the first light accepting part,
And receive the reflected light from sample 151 via surface 65.
More specifically, surface 65 is the interface between transparent substrates 61 and air layer, therefore to the light from lens 57
Reflected.In addition, the surface 81 of sample 151 is the interface between sample 151 and air layer, therefore to via transparent substrates 61
The light received from lens 57 is reflected.
Lens 57 are received in the light beam of the light reflected by sample 151 via surface 65 using the optical axis of lens 57 as the light of axle
Beam, i.e. the reflected beams 75, and collimated light beam is converted to from divergent beams.So as to which the axle of the reflected beams 75 carries over reference axis 70.
In addition, lens 57 receive light beam, i.e. of the optical axis using lens 57 in the light beam of the light reflected by surface 65 as axle
The reflected beams 73, and be converted to collimated light beam from divergent beams.So as to which the axle of the reflected beams 73 carries over reference axis 70.The example
In, the distance between surface 65 and surface 81 are shorter than the distance between lens 57 and surface 81, therefore the reflected beams 73 almost by
Lens 57 are converted to collimated light beam.
The reflected beams 75 from lens 57 are converted to focus on light beam by lens 55, thus will come from examination via surface 65
The reflected light of sample 151 is gathered in the end face 77 of optical fiber 31, and the reflected beams 73 from lens 57 are converted into focus on light beam,
So as to which the reflected light from surface 65 is gathered in into end face 77.
On the one hand, in lens combination 52, lens 56,58 are, for example, columnar convex lens, and set suitable in each optical axis
Along reference axis 70.
Lens 58 irradiate the light from light source 4 via surface 66 as the second light-projecting portion to sample 151.
More specifically, lens 56 are opposite to the end face 78 with the optical fiber 32 of its optical bond, receive from end face 78
Using the optical axis of lens 56 as the light beam of axle, i.e. light projector light beam 72 in the light beam of light, and collimated light beam is converted to from divergent beams.From
And, the axle of light projector light beam 72 carries over reference axis 70.
Lens 58 are arranged between lens 56 and transparent substrates 62, and the light projector light beam 72 from lens 56 is converted into focusing
Light beam, thus makes the light from light source 4 be gathered in the face opposite with surface 66, the i.e. surface 82 of sample 151 via surface 66 attached
Closely.
The lens 58 of lens combination 52 receive the reflected light on the surface 66 from transparent substrates 62 as the second light accepting part,
And receive the reflected light from sample 151 via surface 66.
More specifically, surface 66 is the interface between transparent substrates 62 and air layer, therefore to the light from lens 58
Reflected.In addition, the surface 82 of sample 151 is the interface between sample 151 and air layer, therefore to via transparent substrates 62
The light received from lens 58 is reflected.
Lens 58 are received in the light beam of the light reflected by sample 151 via surface 66 using the optical axis of lens 58 as the light of axle
Beam, i.e. the reflected beams 76, and collimated light beam is converted to from divergent beams.So as to which the axle of the reflected beams 76 carries over reference axis 70.
In addition, lens 58 receive in the light beam of the light reflected by surface 66 using the optical axis of lens 58 as the light beam of axle, it is i.e. anti-
Irradiating light beam 74, and be converted to collimated light beam from divergent beams.So as to which the axle of the reflected beams 74 carries over reference axis 70.In the example,
The distance between surface 66 and surface 82 are short compared with the distance between lens 58 and surface 82, thus the reflected beams 74 almost by
Lens 58 are converted to collimated light beam.
The reflected beams 76 from lens 58 are converted to focus on light beam by lens 56, are thus made via surface 66 from examination
The reflected light of sample 151 is gathered in the end face 78 of optical fiber 32, and the reflected beams 74 from lens 58 are converted into focus on light beam,
So that the reflected light from surface 66 is gathered in end face 78.
Optical splitter 41 from the light that optical system 5 is received for example by the light received from lens 57 and from lens 58 to spectrum part 3
Guiding.
More specifically, the optical fiber 31 of optical system 5 transmits the reflected light received from lens 55 to the joints of optical fibre 35.
Optical fiber 32 transmits the reflected light received from lens 56 to the joints of optical fibre 35.
Referring again to Fig. 3, the joints of optical fibre 35 are mixed the reflected light received from optical fiber 31,32 in joint portion 36
Close, and mixed reflected light is exported to optical fiber 33.
Referring again to Fig. 1, optical fiber 33 by optical splitter from each reflected light being mixed with by the joints of optical fibre 35 to spectrum part 3
41 transmission.
For example, being set as passing via surface 65, lens 57 and optical system 5 from sample 151 in measurer for thickness 101
The optical distance in path of the reflected light of optical splitter 41 is cast to being passed from sample 151 via surface 66, lens 58 and optical system 5
The optical distance for casting to the path of the reflected light of optical splitter 41 is identical.
In other words, in measurer for thickness 101, it is set to from sample 151 via surface 65, lens 57 and optical system
System 5 propagates to the optical distance in the path of the reflected light of optical splitter 41 and from sample 151 via surface 66, lens 58 and optics
The optical distance that system 5 propagates to the path of the reflected light of optical splitter 41 is roughly the same.
More specifically, in measurer for thickness 101, distance and surface 66 and table between surface 65 and surface 81
In the case that the distance between face 82 is roughly the same, it is following as, set the size of probe 1,2 and the length of optical fiber 31,32.
That is, the size of setting probe 1,2 and the length of optical fiber 31,32 so that light is from surface 81 via surface 65, lens
57th, 55 and the time that propagates to needed for the joint portion 36 (reference picture 3) of the joints of optical fibre 35 of optical fiber 31 and light passed through from surface 82
It is roughly the same as the time needed for surface 66, lens 58,56 and optical fiber 32 propagate to the joint portion 36 of the joints of optical fibre 35.
In this example embodiment, it is set to, the distance between surface 65 and the end face 77 of optical fiber 31 and surface 66 and the end face of optical fiber 32
The distance between 78 is roughly the same, and from the length of the end face 77 of optical fiber 31 untill the joint portion 36 of the joints of optical fibre 35 with
From the same length of the end face 78 of optical fiber 32 untill joint portion 36.
Reflected light and light splitting is carried out by the reflected light that lens 58 are received that 3 pairs of spectrum part is received by lens 57.
More specifically, diffraction grating and one-dimensional image sensor are provided with the optical splitter 41 of spectrum part 3, are passed by optical fiber 33
Each reflected light sent is diffracted optical grating diffraction and exposes to one-dimensional image sensor.
One-dimensional image sensor carries out opto-electronic conversion to each reflected light for being diffracted optical grating diffraction, so as to save bit by bit and each
The corresponding electric charge of the intensity of each wavelength of reflected light.
Data generating section 42 obtains each wavelength for having been saved bit by bit in one-dimensional image sensor with the defined lock control time
Electric charge, thus generates the signal for representing each Wavelength strength, and the signal generated is for example marked according to RS232C communications
Accurate or Ethernet (registration mark) communication standard is exported to operational part 6.
It is when operational part 6 receives signal from data generating section 42, each wavelength represented by the signal received is strong
Degree is converted to the reflectivity of each wavelength.
More specifically, for example in the state of preventing light from entering optical splitter 41, operational part 6 will be from data generating section 42
Each Wavelength strength represented by the signal received is kept as with reference to spectroscopic data.
In addition, the object of reference such as setting aluminium sheet between transparent substrates 61 and transparent substrates 62 replaces sample 151
Under state, benchmark is individually subtracted in each Wavelength strength represented by the signal that operational part 6 will be received from data generating section 42
Each Wavelength strength after each Wavelength strength that spectroscopic data is included, keeps as with reference to spectroscopic data.
In the state of sample 151 is arranged between transparent substrates 61 and transparent substrates 62, operational part 6 is from data generating section
Each Wavelength strength that reference spectra data are included is individually subtracted in each Wavelength strength represented by 42 signals received
Afterwards, then divided by each Wavelength strength for being included with reference to spectroscopic data, so as to generate the anti-of the reflectivity containing each wavelength
Penetrate spectroscopic data.
Fig. 4 is one of the power spectrum generated in the operational part for the measurer for thickness for representing embodiment of the present invention
Figure.In addition, in Fig. 4, the longitudinal axis represents power spectral intensity, transverse axis represents thickness.
Reference picture 2 and Fig. 4, such as light splitting result based on spectrum part 3 of operational part 6, between gauging surface 65 and sample 151
Apart from d1 and the distance between surface 66 and sample 151 d2.
More specifically, operational part 6 is by the way that the reflected spectrum data generated progress Fourier transformation is used for calculate
Represent the power spectrum of the power spectral intensity of each spatial frequency.Also, operational part 6 by spatial frequency by being converted into thickness next life
Into the power spectrum shown in Fig. 4.
Operational part 6 is calculated according to peak P1 position apart from d1, and peak P1 is based on the reflected light from surface 81 and from table
The interference of the reflected light in face 65.In addition, operational part 6 is calculated according to peak P2 position apart from d2, peak P2 is based on coming from surface 82
Reflected light and reflected light from surface 66 interference.In the example, operational part 6 is calculated respectively is apart from d1 and d2
168.3 microns and 625.4 microns.
Fig. 5 is one of the power spectrum generated in the operational part for the measurer for thickness for representing embodiment of the present invention
Figure.In addition, in Fig. 5, the longitudinal axis represents power spectral intensity, transverse axis represents thickness.
Reference picture 2 and Fig. 5, operational part 6 are for example subtracted from the distance between surface 65 and surface 66, i.e. distance between the surface da
The thickness of sample 151 is calculated apart from d1 and d2.
For example, distance between the surface da is obtained by the following method.That is, do not set between transparent substrates 61 and transparent substrates 62
Have in the state of sample 151, the light from light source 4 irradiates from lens 57 via surface 65 to surface 66, from the anti-of surface 65
Penetrate light to be received by lens 57, and the reflected light from surface 66 is received via surface 65 by lens 57, the light from light source 4 from
Lens 58 are irradiated via surface 66 to surface 65, and the reflected light from surface 66 is received by lens 58, and from surface 65
Reflected light is received via surface 66 by lens 58.
In this state, each Wavelength strength represented by signal that 6 pairs of operational part is received from data generating section 42
Fourier transformation is carried out, power spectral intensity, the i.e. power spectrum of each spatial frequency is thus calculated.Also, operational part 6 by space frequency
Rate conversion is thickness, so as to generate the power spectrum shown in Fig. 5.
Operational part 6 for example in the above-described state, is based on from table according to peak Pa position come computational chart distance between the surface da, peak Pa
Reflected light of the face 65 towards lens 57, the interference from surface 66 towards the reflected light of lens 57 via surface 65, from surface 66
Towards lens 58 reflected light and via surface 66 from surface 65 towards the reflected light of lens 58 interference.In the example,
The computational chart distance between the surface da of operational part 6 is 2800.0 microns.So as to which operational part 6 passes through computing (2800.0-168.3-625.4)
To calculate 2006.3 microns of thickness of sample 151.
In addition, in measurer for thickness 101, although operational part 6 is the knot using above method computational chart distance between the surface da
Structure, but not limited to this.Operational part 6 can also be in advance between the surface that will be obtained using other method such as mechanical measuring means
The structure kept apart from da.Now, operational part 6 calculates the thickness of sample 151 using the distance between the surface da of holding.
[measuring method]
One of the step of Fig. 6 is the measuring method to the measurer for thickness using embodiment of the present invention enters professional etiquette
Fixed flow chart.
Reference picture 6, first, measurer for thickness 101 obtain 3 pairs of spectrum part by saturating in the state of sample 151 is not provided with
Reflected light that mirror 57 is received and the reflected light received by lens 58 carry out the light splitting result after light splitting.Specifically, thickness is surveyed
Measure the power spectrum (step S102) shown in the acquisition of device 101 Fig. 5.
Secondly, measurer for thickness 101 is based on the light splitting result computational chart distance between the surface da got.Specifically, thickness
The peak Pa positions of power spectrum of the measurement apparatus 101 according to Fig. 5 and computational chart distance between the surface da (step S104).
Secondly, sample 151 is arranged between transparent substrates 61 and transparent substrates 62 (step S106) by gauger.
Secondly, measurer for thickness 101 obtains the light splitting result of spectrum part 3, specifically in the state of provided with sample 151
Ground, obtains the power spectrum (step S108) shown in Fig. 4.
Then, measurer for thickness 101 is in the state of provided with sample 151, the light splitting result based on spectrum part 3 calculate away from
From d1 and d2.Specifically, the peak P1 and P2 of power spectrum of the measurer for thickness 101 according to Fig. 4 position and calculate respectively
Apart from d1 and d2 (step S110).
Secondly, measurer for thickness 101 is subtracted apart from d1 and d2 from distance between the surface da, thus calculates the thickness of sample 151
Spend (step S112).
In addition, above-mentioned steps S102~S104 and step S106~S110 order are not limited to above-mentioned example, interchangeable is suitable
Sequence.
In addition, measurer for thickness 101 calculates distance between the surface da in above-mentioned steps S102, S104, but it is not limited to
This.As described above, when measurer for thickness 101 maintains distance between the surface da in advance, can also be without gauging surface spacing
From da.
In addition, measurer for thickness 101 is in above-mentioned steps S102, in the case of both lens 57,58 irradiation lights, obtain
3 pairs of the spectrum part reflected light received by lens 57 and the reflected light received by lens 58 is taken to carry out the light splitting result after light splitting, but
It is not limited to this.Measurer for thickness 101 can also be in above-mentioned steps S102, and any one shines from lens 57 and lens 58
In the case of penetrating light, the light splitting result of the reflected light received by corresponding lens is obtained.
In addition, in the measurer for thickness of embodiment of the present invention, spectrum part 3 is the structure with an optical splitter 41,
But not limited to this.Spectrum part 3 can also be the structure with two optical splitters 41.Now, two optical splitters 41 are respectively to by saturating
Reflected light and light splitting is carried out by the reflected light that lens 58 are received that mirror 57 is received.Operational part 6 is based on two optical splitters 41
Each light splitting result and calculate apart from d1 and d2.
In addition, the measurer for thickness of embodiment of the present invention is the structure with a light source 4, but not limited to this.It is thick
It can also be the structure with two light sources 4 to spend measurement apparatus 101.In this case, lens 57 pass through the light from side light source 4
Irradiated from surface 65 to sample 151.Lens 58 irradiate the light from opposite side light source 4 via surface 66 to sample 151.
In addition, in the measurer for thickness of embodiment of the present invention, the first light-projecting portion and the first light accepting part are integrally formed, but
Not limited to this.In measurer for thickness 101, the first light-projecting portion and the first light accepting part can be provided separately.
Specifically, measurer for thickness 101 can be with the lens 57 as the first light-projecting portion function and conduct
The structure of the other lenses of first light accepting part function, or with the lens 57 as the first light accepting part function
With the structure of the other lenses as the first light-projecting portion function.
That is, the axle of the light projector light beam 71 of the light irradiated from lens 57 via surface 65 to sample 151, from lens 58 via table
The reflection for the reflected light from surface 65 that axle, the lens 57 of the light projector light beam 72 for the light that face 66 is irradiated to sample 151 are received
Axle, the lens 58 of the reflected beams 75 of the axle of light beam 73 and reflected light from sample 151 received from the anti-of surface 66
The axle for penetrating the reflected beams 76 of the axle of the reflected beams 74 of light and the reflected light from sample 151 is carried over each other.
In addition, measurer for thickness 101 can also be provided with semi-transparent between the transparent substrates 61 and lens 57 shown in Fig. 1
Semi-reflective mirror, the reflection thus reflected with the lens 57 as the first light-projecting portion function and as reception by semi-transparent semi-reflecting lens
The structure of the other lenses of first light accepting part function of light, or with as by the light from light source 4 via half
The other lenses for the first light-projecting portion function that saturating semi-reflective mirror and surface 65 irradiates to sample 151 and it is used as the first light accepting part hair
Wave the structure of the lens 57 of function.In these structures, light projector light beam 71 and the axle of the reflected beams 73,75 can be made on surface 65
Carried over each other with surface 81.
Equally, in the measurer for thickness of embodiment of the present invention, although the second light-projecting portion and the second light accepting part one
Formed, but not limited to this.In measurer for thickness 101, the second light-projecting portion and the second light accepting part can be provided separately.
Specifically, measurer for thickness 101 can be with the lens 58 as the second light-projecting portion function and conduct
The structure of the other lenses of second light accepting part function, or with the lens 58 as the second light accepting part function
With the structure of the other lenses as the second light-projecting portion function.
In addition, measurer for thickness 101 can also be provided with semi-transparent between the transparent substrates 62 and lens 58 shown in Fig. 1
Semi-reflective mirror, the reflection thus reflected with the lens 58 as the second light-projecting portion function and as reception by semi-transparent semi-reflecting lens
The structure of the other lenses of second light accepting part function of light, or with as by the light from light source 4 via half
The other lenses for the second light-projecting portion function that saturating semi-reflective mirror and surface 66 irradiates to sample 151 and it is used as the second light accepting part hair
Wave the structure of the lens 58 of function.In these structures, light projector light beam 72 and the axle of the reflected beams 74,76 can be made on surface 66
Carried over each other with surface 82.
In addition, in the measurer for thickness of embodiment of the present invention, transparent substrates 61 and sample 151 is opposite
Face, i.e. surface 65 are as the first reference plane, but not limited to this., can also be by transparent substrates 61 in measurer for thickness 101
Face, i.e. surface 67 with the opposite side of sample 151 is used as the first reference plane.
In addition, in the measurer for thickness of embodiment of the present invention, transparent substrates 62 and sample 151 is opposite
Face, i.e. surface 66 are as the second reference plane, but not limited to this., can also be by transparent substrates 62 in measurer for thickness 101
Face, i.e. surface 68 with the opposite side of sample 151 is used as the second reference plane.
In addition, the measurer for thickness of embodiment of the present invention is the knot with light source 4, optical system 5 and operational part 6
Structure, but not limited to this.Thickness measure dress can also be arranged on at least one in light source 4, optical system 5 and operational part 6
Put the structure outside 101.
In addition, in the measurer for thickness of embodiment of the present invention, spectrum part 3 is to include the knot of data generating section 42
Structure, but not limited to this.The structure outside measurer for thickness 101 can also be arranged on for data generating section 42.
However, when using the technology described in patent document 1~3 to measure sample thickness, such as it is contemplated that basis
The measurement result of spaced from the specimen and the method for measuring the sample thickness from the measurement result with a distance from contact surface.
But, when there is concavo-convex or sample in specimen surface have deformed or bent, the contact surface side surface of sample and
Gap can be produced between contact surface.In this case, accurate measurement sample thickness can have difficulties.
Fig. 7 is the figure for the comparative example for representing probe.Reference picture 7, for example, when using the light projector of probe 91 and the light of light come
Measurement is when being placed on the thickness of sample 93 of workbench 92, using from the surface 94 as reference plane and the contact surface of workbench 92 it
Between subtract being measured apart from dw as the thickness of sample 93 after the ds of the distance between surface 94 and sample 93 apart from dg.As schemed
Shown in 7, due to the surface of sample 93 exist it is concavo-convex, even therefore sample 93 correct thickness d, also regard dw as sample 93
Thickness is calculated.
In this regard, in the measurer for thickness of embodiment of the present invention, transparent substrates 61 have surface 65.Transparent substrates 62
It is oppositely arranged with transparent substrates 61 and with surface 66.Lens 57 are via surface 65 to positioned at transparent substrates 61 and transparent substrates 62
Between sample 151 irradiate the light from light source 4.Lens 57 receive the reflected light from surface 65, and are connect via surface 65
Receive the reflected light from light sample 151.Lens 58 irradiate the light from light source 4 via surface 66 to sample 151.Lens 58
The reflected light from surface 66 is received, and the reflected light from sample 151 is received via surface 66.Also, 3 pairs of spectrum part by
Reflected light and light splitting is carried out by the reflected light that lens 58 are received that lens 57 are received.
So, via both sides irradiation light from surface 65,66 to sample 151, so as to make the table from the both sides of sample 151 respectively
The reflected light in face 81,82 interferes with the reflected light from surface 65,66 and carries out the structure of light splitting, even if so that sample
There is concavo-convex or sample 151 and exist deformed or bent in 151 surface 81,82, also can calculate examination respectively based on light splitting result
The surface 81,82 of the both sides of sample 151 and surface 65, the distance between 66 d1, d2.Also, for example, according to calculated apart from d1,
Distance between the surface da between d2 and surface 65,66 and the thickness for calculating sample 151 exactly.Thus, it is possible to accurate measurement
Go out sample thickness.
In addition, in the measurer for thickness of embodiment of the present invention, spectrum part 3 has an optical splitter 41.Also, light
System 5 is guided by the light received from lens 57 and from the light that lens 58 are received to optical splitter 41.
By using the structure of this optical system 5, the quantity of the optical splitter 41 of costliness can be reduced, therefore, it is possible to reduce
The manufacturing cost of measurer for thickness 101.
In addition, in the measurer for thickness of embodiment of the present invention, being irradiated from lens 57 via surface 65 to sample 151
Light light projector light beam 71 axle, axle, the lens of the light projector light beam 72 of the light irradiated from lens 58 via surface 66 to sample 151
The reflected beams 75 of the axle of the reflected beams 73 of 57 reflected lights from surface 65 received and the reflected light from sample 151
Axle and the axle of the reflected beams 74 of the reflected light from surface 66 that is received of lens 58 and the reflection from sample 151
The axle of the reflected beams 76 of light is carried over each other.
According to this structure, even if surface 65,66 is configured or sample 151 is relative to surface 65,66 such as non-parallelly
Set not parallelly in the case of, sample thickness can be also accurately measured.
For example, as shown in Fig. 2 when sample 151 along reference axis 70 with speed v to when being moved close to the direction on surface 65,
Problems with may be produced.That is, when the reflected light from surface 81 is to the time T1 reached needed for optical splitter 41 and from table
The reflected light in face 82 to the time T2 reached needed for optical splitter 41 it is poor, i.e. (T1-T2) is Δ T when, sample 151 is in time Δ T
During close to surface 65 distance only be v × Δ T.So as to which operational part 6 is based on the reflected light from surface 82 and from table
The reflected light in face 66 and calculate apart from d2, on the other hand, based on the reflected light from surface 81 and the reflected light from surface 65
And calculate distance (d1+v × Δ T).That is, in measurer for thickness 101, the accurate thickness for calculating sample 151 can have difficulties.
In addition, for example, it is also possible to consider following method.That is, prepare to carry out the reflected light received by lens 57 the of light splitting
One optical splitter and the second optical splitter that light splitting is carried out to the reflected light received by lens 58, make the first optical splitter enter reflected light
The time of row light splitting carries out the time delay Δ T of light splitting than the second optical splitter to reflected light, so as to calculate sample 151 exactly
Thickness.However, because the control of the light splitting time to each optical splitter is complicated, therefore be not preferred.
In this regard, in the measurer for thickness of embodiment of the present invention, spectrum part 3 includes an optical splitter 41.Optical system
System 5 is guided by the light received from lens 57 and from the light that lens 58 are received to optical splitter 41.Moreover, being set to, make from sample 151
Propagated to via surface 65, lens 57 and optical system 5 reflected light of optical splitter 41 path optical distance with from sample
151 propagated to via surface 66, lens 58 and optical system 5 path of the reflected light of optical splitter 41 optical distance it is identical.
By this structure, because the light that can make to reflect on the surface 81,82 of the both sides of sample 151 respectively reaches optical splitter
Time needed for 41 is almost identical, therefore, it is possible to make almost to be split with the reflected light of identical time reflex on surface 81,82
The light splitting of device 41.Thus, it is moved even in sample 151, sample 151 can be also accurately measured by easy structure
Thickness.
In addition, in the measurer for thickness of embodiment of the present invention, light splitting result of the operational part 6 based on spectrum part 3, meter
Calculate the distance between surface 65 and sample 151 d1 and the distance between surface 66 and sample 151 d2.Also, operational part 6 leads to
The distance between the surface da crossed between surface 65 and surface 66 subtracts apart from d1 and d2 to calculate the thickness of sample 151.
So, sample 151 is calculated for the measurement result of the exterior space of sample 151, i.e. each distance by basis
The structure of thickness, is that opaque material can also calculate the thickness of sample 151 even if sample 151.In addition, without recognizing sample
The physics values such as 151 refractive index, also can easily calculate the thickness of sample 151.
In addition, the method for measuring thickness of embodiment of the present invention is the method for measuring thickness using measurer for thickness 101,
The method for measuring thickness includes：The distance between light splitting outcome measurement surface 65 and sample 151 based on spectrum part 3 d1, with
And the step of the distance between surface 66 and sample 151 d2；Subtracted by the distance between the surface da between surface 65 and surface 66
The step of going to calculate the thickness of sample 151 apart from d1 and d2.
So, by via both sides irradiation light from surface 65,66 to sample 151, and respectively make come from the both sides of sample 151
Reflected light and the reflected light from surface 65,66 on surface 81,82 interfere and carry out the structure of light splitting, even if so that examination
Be present concavo-convex or sample 151 and exist deformed or bent in the surface 81,82 of sample 151, also can respectively be calculated based on light splitting result
The surface 81,82 of the both sides of sample 151 and surface 65, the distance between 66 d1, d2.Moreover, can according to calculated apart from d1,
Distance between the surface da between d2 and surface 65 and surface 66 and the thickness for calculating sample 151 exactly.Thus, it is possible to accurate
Ground calculates sample thickness.In addition, calculating sample 151 according to the measurement result for the exterior space of sample 151, i.e. each distance
Thickness, even if thus sample 151 is opaque material, can also calculate the thickness of sample 151.In addition, without recognizing sample
The physics values such as 151 refractive index, also can easily calculate the thickness of sample 151.
In addition, in the measurer for thickness of embodiment of the present invention, in the state of sample 151 is not provided with, from lens 57
The light from light source 4 is irradiated to surface 66 via surface 65, and the reflected light from surface 65 is received by lens 57, and come
Received from the reflected light on surface 66 via surface 65 by lens 57.Moreover, the method for measuring thickness of embodiment of the present invention enters one
Step includes：In the state of sample 151 is not provided with, carried out based on 3 pairs of reflected lights received by lens 57 of spectrum part after light splitting
Light splitting result and the step of computational chart distance between the surface da.
By this structure, using the computational methods identical method apart from d1, d2 that calculates come can be between gauging surface
Apart from da, therefore, it is possible to carry out computational chart distance between the surface with the high computational accuracy with the computational accuracy same degree apart from d1, d2
da.Thus, for example, can be more accurately compared with the other method poor using precision is come computational chart distance between the surface da situation
Calculate the thickness of sample 151.
For above-mentioned embodiment, it should be understood that all aspects are to illustrate and be not progress limit processed.The present invention
Scope represented by claims rather than described above, and including the institute in the meaning and scope that are equal with claims
Have altered.
Claims (7)
1. a kind of measurer for thickness, wherein, have：
First transmissive member, with the first reference plane；
Second transmissive member, is oppositely arranged with first transmissive member, with the second reference plane；
First light-projecting portion, via described first with reference to towards be arranged on first transmissive member and second transmissive member it
Between sample irradiation the light from light source；
First light accepting part, receives the reflected light from first reference plane, and come from via first reference plane reception
The reflected light of the sample；
Second light-projecting portion, the light from light source is irradiated via described second with reference to towards the sample；
Second light accepting part, receives the reflected light from second reference plane, and come from via second reference plane reception
The reflected light of the sample；
Spectrum part, is divided the reflected light received by first light accepting part and the reflected light received by second light accepting part
Light.
2. measurer for thickness according to claim 1, wherein,
The spectrum part includes an optical splitter,
The measurer for thickness further has optical system, and the optical system is used to be received by first light accepting part
Light and from second light accepting part receive light guided to the optical splitter.
3. measurer for thickness according to claim 1 or 2, wherein,
From first light-projecting portion via described first with reference to the axle of the light beam of the light irradiated towards the sample, from described second
What axle, first light accepting part of the light beam for the light that light-projecting portion irradiates via the described second reference towards the sample were received comes
From the axle of the light beam of the reflected light of first reference plane and the reflected light from the sample light beam axle, described second by
The light beam of the axle of the light beam for the reflected light from second reference plane that light portion is received and the reflected light from the sample
Axle carry over each other [m1].
4. measurer for thickness according to any one of claim 1 to 3, wherein,
The spectrum part includes an optical splitter,
The measurer for thickness further has optical system, the light that the optical system will be received by first light accepting part
Guided with the light received from second light accepting part to the optical splitter,
It is set to, is propagated from the sample via first reference plane, first light accepting part and the optical system
To the optical distance in the path of the reflected light of the optical splitter and from the sample via second reference plane, described second
Light accepting part and the optical system and the optical distance in the path of the reflected light that propagates to the optical splitter is identical.
5. measurer for thickness according to any one of claim 1 to 4, wherein,
The measurer for thickness further has operational part, and light splitting result of the operational part based on the spectrum part is calculated
Between the distance between first reference plane and the sample, i.e., the first distance and second reference plane and the sample
Distance, i.e. second distance,
The operational part from the distance between first reference plane and second reference plane by subtracting first distance
The thickness of the sample is calculated with the second distance.
6. a kind of method for measuring thickness, it is the method that thickness is measured using measurer for thickness,
The measurer for thickness includes：
First transmissive member, with the first reference plane,
Second transmissive member, is oppositely arranged with first transmissive member, with the second reference plane,
First light-projecting portion, via described first with reference to towards be arranged on first transmissive member and second transmissive member it
Between sample irradiation the light from light source,
First light accepting part, receives the reflected light from first reference plane, and come from via first reference plane reception
The reflected light of the sample,
Second light-projecting portion, the light from light source is irradiated via described second with reference to towards the sample,
Second light accepting part, receives the reflected light from second reference plane, and come from via second reference plane reception
The reflected light of the sample,
Spectrum part, is divided the reflected light received by first light accepting part and the reflected light received by second light accepting part
Light；
The method for measuring thickness includes：
Light splitting result based on the spectrum part, calculate the distance between first reference plane and the sample, i.e. first away from
From and the distance between second reference plane and the sample, i.e. second distance the step of,
From the distance between first reference plane and second reference plane, i.e. distance between the surface subtract first distance and
The second distance and the step of calculate the thickness of the sample.
7. method for measuring thickness according to claim 6, wherein,
In the state of the sample is not provided with, from first light-projecting portion via described first with reference to towards second reference
The light from light source is irradiated in face, and the reflected light from first reference plane is received by first light accepting part, and from institute
The reflected light for stating the second reference plane is received via first reference plane by first light accepting part,
The method for measuring thickness further comprises,
In the state of the sample is not provided with, the reflected light received by first light accepting part is entered based on the spectrum part
Light splitting result after row light splitting and the step of calculate the distance between the surface.
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| CN108955549A (en) * | 2018-09-11 | 2018-12-07 | 深圳立仪科技有限公司 | A kind of two-sided measuring thickness device of translucent material |
| CN110500963A (en) * | 2018-05-18 | 2019-11-26 | 大塚电子株式会社 | Optical detecting device and method of optically measuring |
| CN110500964A (en) * | 2018-05-18 | 2019-11-26 | 大塚电子株式会社 | Apparatus for measuring thickness and thickness measuring method |
| CN113251897A (en) * | 2021-05-17 | 2021-08-13 | 东北大学秦皇岛分校 | Gauge block measuring device and method based on white light interference |
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Also Published As
| Publication number | Publication date |
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| CN114325734A (en) | 2022-04-12 |
| TWI733722B (en) | 2021-07-21 |
| CN107037437B (en) | 2022-01-18 |
| JP6725988B2 (en) | 2020-07-22 |
| JP2017133869A (en) | 2017-08-03 |
| TW201727188A (en) | 2017-08-01 |
| KR20170089403A (en) | 2017-08-03 |
| KR102229048B1 (en) | 2021-03-16 |
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