CN108546923A - A kind of online stepless adjustment device of magnetic field homogeneity - Google Patents
A kind of online stepless adjustment device of magnetic field homogeneity Download PDFInfo
- Publication number
- CN108546923A CN108546923A CN201810428400.0A CN201810428400A CN108546923A CN 108546923 A CN108546923 A CN 108546923A CN 201810428400 A CN201810428400 A CN 201810428400A CN 108546923 A CN108546923 A CN 108546923A
- Authority
- CN
- China
- Prior art keywords
- pedestal
- magnetic field
- magnet steel
- guide sleeve
- steering engine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of online stepless adjustment devices of magnetic field homogeneity, including magnet steel pedestal, guide post, guide sleeve, guide sleeve pedestal and catch, the lower section of pedestal is connect with guide post, and the outside of guide post is equipped with guide sleeve, guide sleeve is mounted on the inside of guide sleeve pedestal, and the bottom of guide post is connected with catch.The online stepless adjustment device of magnetic field homogeneity of the present invention has the following advantages：1, need not break vacancy reason can on-line tuning magnetic field size under vacuum conditions；Manpower and materials are saved, are a kind of energy saving and environment friendly technological break-through；2, it according to the Expenditure Levels of target, can be adjusted at any time；Meet the high requirement and process requirements of film thickness uniformity.Magnetic field performance can be soon adjusted using the present invention, reaches the requirement of vacuum magnetic-control sputtering film thickness uniformity；User can allow magnetic field automatic adjustment to ensure the constant of technique in the entire process cycle of target；It can effectively realize industrialized production demand, larger economic benefit will be generated.
Description
Technical field
The present invention relates to a kind of regulating device, specifically a kind of online stepless adjustment device of magnetic field homogeneity.
Background technology
Magnetron sputtering is physical vapour deposition (PVD)（Physical Vapor Deposition, PVD）One kind.It is general to splash
The method of penetrating can be used for preparing more materials such as metal, semiconductor, insulator, and with equipment is simple, easily controllable, plated film area is big
And the advantages that strong adhesive force, and the magnetron sputtering method that the 70's of last century grow up is even more to realize high speed, low temperature, low damage
Wound.Because being to carry out high-speed sputtering at low pressure, it is necessary to effectively improve the ionization level of gas.Magnetron sputtering passes through in target the moon
Pole surface introduces magnetic field, and plasma density is improved to the constraint of charged particle to increase sputtering raste using magnetic field.
Magnetron sputtering technique is commonly used currently on the market and carries out plated film, and magnetron sputtering plating refers to by coating material as target the moon
Pole generates cathodic sputtering using argon ion bombardment target, target atom is splashed to a kind of plated film that sedimentary is formed on workpiece
Technology.
The flux control of traditional matched cathode of magnetron sputtering plating line could be carried out under line；According to the film of institute's plated product
The uniform situation of layer waits for, the broken sky of vacuum equipment, magnet steel being removed from target cylinder and is manually adjusted；
This adjustment cannot carry out at any time, and the situation quality of adjustment will lean on abundant experience, may repeatedly adjust there are one ability
Expected results；And as the outer diameter of target consumes, from large to small, the magnetic field intensity of target surface is also changing, Bu Nengbao
Hold the relative constant of target surface magnetic field intensity, there is bigger influence to the stability of production technology, to product quality also by
It influences.
Invention content
The purpose of the present invention is to provide a kind of online stepless adjustment devices of magnetic field homogeneity, to solve above-mentioned background technology
The problem of middle proposition.
To achieve the above object, the present invention provides the following technical solutions：
A kind of online stepless adjustment device of magnetic field homogeneity, including magnet steel pedestal, guide post, guide sleeve, guide sleeve pedestal and catch, pedestal
Lower section connect with guide post, the outside of guide post is equipped with guide sleeve, and guide sleeve is mounted on the inside of guide sleeve pedestal, the bottom of guide post and catch
It is connected.
Further technical solution as the present invention：Magnet steel pedestal is equipped with magnet steel, and magnet steel is divided into multistage, each magnet steel
Section underneath is equipped with a set of servo driving component and two sets of guiding mechanisms,
Further technical solution as the present invention：Each magnet steel section length is 300mm.
Further technical solution as the present invention：Servo driving component includes magnet steel bottom plate, protection pipe, target cylinder, square
Shape pipe, steering engine pedestal, steering engine, nut and lead screw, the lower section of magnet steel bottom plate are connected with nut, and nut is engaged with lead screw, nut
On steering engine pedestal, rectangular tube and steering engine are also equipped on steering engine pedestal, protection pipe is rounded to be located at magnet steel bottom plate, rectangle
The outside of pipe, steering engine pedestal, steering engine, nut and lead screw, target cylinder are arranged in the outside of protection pipe.
Further technical solution as the present invention：The guide post, guide sleeve, guide sleeve pedestal and catch form driving machine
Structure.
Compared with prior art, the beneficial effects of the invention are as follows：The online stepless adjustment device tool of magnetic field homogeneity of the present invention
It has the advantage that：1, need not break vacancy reason can on-line tuning magnetic field size under vacuum conditions；Manpower and materials are saved, are
A kind of energy saving and environment friendly technological break-through；2, it according to the Expenditure Levels of target, can be adjusted at any time；Meet film thickness uniformity
High requirement and process requirements.Magnetic field performance can be soon adjusted using the present invention, reaches vacuum magnetic-control sputtering uniform film thickness
The requirement of property；User can allow magnetic field automatic adjustment to ensure the constant of technique in the entire process cycle of target；It can be effective
It realizes industrialized production demand, larger economic benefit will be generated.
Description of the drawings
Fig. 1 is the overall block diagram of the present invention.
Fig. 2 is the sectional view of servo driving component.
In figure：1- magnet steel pedestal, 2- guide posts, 3- guide sleeves, 4- guide sleeves pedestal, 5- catch, 6- servo drivings component, 7- magnet steel
Bottom plate, 8- protection pipes, 9- targets cylinder, 10- rectangular tubes, 11- steering engines pedestal, 12- steering engines, 13- nuts, 14- lead screws.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig.1-2, a kind of online stepless adjustment device of magnetic field homogeneity, including magnet steel pedestal 1, guide post 2, guide sleeve 3,
The lower section of guide sleeve pedestal 4 and catch 5, magnet steel pedestal 1 is connect with guide post 2, and the outside of guide post 2 is equipped with guide sleeve 3, and guide sleeve 3 is mounted on
The bottom of the inside of guide sleeve pedestal 4, guide post 2 is connected with catch 5.
Magnet steel pedestal 1 is equipped with magnet steel, and magnet steel is divided into multistage with every section of 300mm length, each magnet steel section underneath is equal
Equipped with a set of servo driving component 6 and two sets of guiding mechanisms,
Servo driving component 6 includes magnet steel bottom plate 7, protection pipe 8, target cylinder 9, rectangular tube 10, steering engine pedestal 11, steering engine 12, nut
13 and lead screw 14, the lower section of magnet steel bottom plate 7 be connected with nut 7, nut 13 is engaged with lead screw 14, nut 13 be mounted on steering engine bottom
On seat 11, rectangular tube 10 and steering engine 11 are also equipped on steering engine pedestal 11, protection pipe 8 is rounded to be located at magnet steel bottom plate 7, rectangular tube
10, the outside of steering engine pedestal 11, steering engine 12, nut 13 and lead screw 14, target cylinder 9 are arranged in the outside of protection pipe 8.
Guide post 2, guide sleeve 3, guide sleeve pedestal 4 and catch 5 form driving mechanism.
The present invention operation principle be：The online electrodeless adjustment technology of magnetic field homogeneity of the present invention is exactly by adjusting magnet
The distance between target surface is far and near, to change target surface magnitude of field intensity；Entire magnet steel is divided into several sections by this technology, often
Section 300mm long, each section of distance that can individually adjust magnet steel and target surface；Adjustable maximum distance amplitude is 10mm;It adopts
With the mode the segmentation adjustment of magnet steel, exactly enable the position for adjusting magnitude of field intensity is needed rapidly to change magnetic field strong
Size is spent, motionless is maintained for the position that need not be adjusted；Concrete structure is exactly the magnet steel of every section of 300mm long by a set of driving machine
Structure and two sets of guiding mechanism compositions；Driving mechanism by vacuum chamber outside control system manipulated, control the rotation of driving mechanism
Angle drives lead screw rotation, to realize the back-and-forth motion of magnet steel；Target surface magnitude of field intensity is changed into the movement of magnet,
Target as sputter rate size is exactly changed, to reach the requirement for adjusting film thickness uniformity.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, and do not carrying on the back
In the case of spirit or essential attributes from the present invention, the present invention can be realized in other specific forms.Therefore, no matter from which
From the point of view of a bit, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is wanted by appended right
Ask rather than above description limit, it is intended that by all changes that come within the meaning and range of equivalency of the claims
It is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (5)
1. a kind of online stepless adjustment device of magnetic field homogeneity, including magnet steel pedestal（1）, guide post（2）, guide sleeve（3）, guide sleeve pedestal
（4）And catch（5）, which is characterized in that the magnet steel pedestal（1）Lower section and guide post（2）Connection, guide post（2）Outside be equipped with
Guide sleeve（3）, guide sleeve（3）Mounted on guide sleeve pedestal（4）Inside, guide post（2）Bottom and catch（5）It is connected.
2. the online stepless adjustment device of a kind of magnetic field homogeneity according to claim 1, which is characterized in that the magnet steel bottom
Seat（1）It is equipped with magnet steel, magnet steel is divided into multistage, each magnet steel section underneath is equipped with a set of servo driving component（6）With two
Cover guiding mechanism.
3. the online stepless adjustment device of a kind of magnetic field homogeneity according to claim 2, which is characterized in that each magnet steel point
Segment length is 300mm.
4. the online stepless adjustment device of a kind of magnetic field homogeneity according to claim 2, which is characterized in that the steering engine drives
Dynamic component（6）Including magnet steel bottom plate（7）, protection pipe（8）, target cylinder（9）, rectangular tube（10）, steering engine pedestal（11）, steering engine（12）、
Nut（13）And lead screw（14）, magnet steel bottom plate（7）Lower section and nut（13）It is connected, nut（13）With lead screw（14）Engagement,
Nut（13）Mounted on steering engine pedestal（11）On, steering engine pedestal（11）On be also equipped with rectangular tube（10）And steering engine（11）, protection
Pipe（8）It is rounded to be located at magnet steel bottom plate（7）, rectangular tube（10）, steering engine pedestal（11）, steering engine（12）, nut（13）And lead screw
（14）Outside, target cylinder（9）It is arranged in protection pipe（8）Outside.
5. the online stepless adjustment device of a kind of magnetic field homogeneity according to claim 1, which is characterized in that the guide post
（2）, guide sleeve（3）, guide sleeve pedestal（4）And catch（5）Form driving mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810428400.0A CN108546923A (en) | 2018-05-07 | 2018-05-07 | A kind of online stepless adjustment device of magnetic field homogeneity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810428400.0A CN108546923A (en) | 2018-05-07 | 2018-05-07 | A kind of online stepless adjustment device of magnetic field homogeneity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108546923A true CN108546923A (en) | 2018-09-18 |
Family
ID=63513572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810428400.0A Pending CN108546923A (en) | 2018-05-07 | 2018-05-07 | A kind of online stepless adjustment device of magnetic field homogeneity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108546923A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101447274A (en) * | 2008-09-26 | 2009-06-03 | 东莞宏威数码机械有限公司 | Magnetic circuit mechanism, angstrom sciences therewith and production method thereof |
| CN103276364A (en) * | 2013-05-21 | 2013-09-04 | 绵阳市恒信磁性材料有限公司 | Rotary magnetron sputtering target permanent magnet magnetic field source structure |
| CN207176065U (en) * | 2017-07-14 | 2018-04-03 | 深圳市金耀玻璃机械有限公司 | A kind of magnet steel adjustable online |
-
2018
- 2018-05-07 CN CN201810428400.0A patent/CN108546923A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101447274A (en) * | 2008-09-26 | 2009-06-03 | 东莞宏威数码机械有限公司 | Magnetic circuit mechanism, angstrom sciences therewith and production method thereof |
| CN103276364A (en) * | 2013-05-21 | 2013-09-04 | 绵阳市恒信磁性材料有限公司 | Rotary magnetron sputtering target permanent magnet magnetic field source structure |
| CN207176065U (en) * | 2017-07-14 | 2018-04-03 | 深圳市金耀玻璃机械有限公司 | A kind of magnet steel adjustable online |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106756823B (en) | Liner positive bias conical pipe and the compound multi-stage magnetic field arc ions electroplating method of straight tube | |
| CN101792895B (en) | Cathodic vacuum arc source film depositing device and method for depositing film | |
| CN105839065B (en) | A kind of magnetic control sputtering film plating device and method, the preparation method of nano particle | |
| JP2002509988A (en) | Method and apparatus for depositing a biaxially textured coating | |
| CN106676482A (en) | Lining step tube and porous baffle composite type multi-level magnetic field arc ion plating method | |
| CN106756824B (en) | The multi-stage magnetic field arc ions electroplating method of liner positive bias stairstepping pipe | |
| CN106011745B (en) | A kind of device and method preparing amorphous carbon nitrogen film in silicon face | |
| CN102779711B (en) | Ion source with ultra-large ion beam divergence angle | |
| CN105925940A (en) | Multi-stage magnetic field arc ion plating method for lining positive bias straight pipe | |
| CN102453880A (en) | Method for improving uniformity of magnetron sputtering thin film | |
| CN108060400B (en) | Powder dispersing device for magnetron sputtering coating | |
| CN206553622U (en) | The liner positive bias taper pipe device of multi-stage magnetic field arc ion plating | |
| JP4660570B2 (en) | Vacuum film forming apparatus and film forming method | |
| CN108546923A (en) | A kind of online stepless adjustment device of magnetic field homogeneity | |
| CN109680250B (en) | Arc ion source and arc ion source coating method | |
| JP2021528815A (en) | Single beam plasma source | |
| KR102169507B1 (en) | Arc ion plating apparatus with filtering function | |
| CN109989016A (en) | A kind of combination field, compound tube and the compound vacuum coating method of perforated baffle | |
| CN101358329A (en) | Apparatus for improving electrical arc ion plating deposition film quality | |
| CN202705458U (en) | Ion source with oversized ion beam divergence angle | |
| CN209307480U (en) | A kind of hobboing cutter surface recombination coating apparatus that ionization level is high | |
| CN106756815A (en) | A kind of magnetic filter for cathodic arc ion plating | |
| CN206616268U (en) | Plasma enhancing magnetic control sputtering system | |
| CN214142516U (en) | Adjustable magnetic control coil device of physical vapor deposition cavity | |
| CN109989011A (en) | A kind of combination field and liner special pipe and the compound vacuum deposition method of perforated baffle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180918 |
|
| RJ01 | Rejection of invention patent application after publication |