CN108490527A - A kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer - Google Patents
A kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer Download PDFInfo
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- CN108490527A CN108490527A CN201810298818.4A CN201810298818A CN108490527A CN 108490527 A CN108490527 A CN 108490527A CN 201810298818 A CN201810298818 A CN 201810298818A CN 108490527 A CN108490527 A CN 108490527A
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- G02B5/00—Optical elements other than lenses
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- G02B5/26—Reflecting filters
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Abstract
A kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer, belong to optical technical field, in order to overcome the problems, such as that prior art optical filter film layer aging falls off and absorb luminous energy, formed directly to delineate the poroid micro-structure of multilayer in glass or optical element surface；Its structure includes：Optical material substrate；The poroid micro-structure of multilayer is directly connected with optical material substrate, structure Mi Dui layer by layer, and every layer of poroid micro-structure is identical, and surface is uniformly arranged microcellular structure；Micropore is crock shape, and adjacent cells central point line is constituted hexagon by section successively at hemispherical shape；The present invention can overcome the problems, such as that film layer aging falls off；The poroid micro-structure of multilayer and optical element are same materials, can absorb luminous energy to avoid film layer itself；The poroid micro-nano structure of multilayer can be equivalent to the dielectric layer of a consecutive variations refractive index between air and matrix, possess more superior refraction performance compared to traditional film material.
Description
Technical field
The present invention relates to spike filter, more particularly to a kind of high poroid micro-structure of anti-multilayer in multiband narrowband filters
Piece belongs to optical technical field.
Background technology
Interferometric filter is that a bit of wave band is filtered out from wide spectrum using a kind of made of multiple-beam interference principle
Assembly of thin films, while allowing remaining shortwave and long wave cut-off function or the optical device of reflection.There are two types of common interferometric filters, a kind of
Referred to as all-dielectric interference filter：Two groups of quarter-wave membrane systems are plated on plate glass, two groups of membrane systems are considered as
Two groups of high-reflecting film sandwich, one wall；Another kind is metallic reflective coating interferometric filter：It is anti-that a floor height is plated on substrate
The silverskin for penetrating rate in plating deielectric-coating on silverskin, then plates the silverskin of a floor height reflectivity.The principle of two kinds of interferometric filters is
It is identical, it presss from both sides one layer of low-reflection film using two layers of highly reflecting films and realizes narrow-band high-reflectivity.
Bandpass filter only allows the light of relatively narrow wave-length coverage to pass through, it can be common that Fabry-Perot type optical filter, it is real
It is a Fabry-Perot etalon in matter.Concrete structure is：One layer of semi-transparent metal layer is applied in glass substrate, then applies one
Layer magnesium fluoride interlayer, then applies one layer of semi-transparent metal layer, and two metal layers constitute Fabry-Perot etalon two pieces are parallel
Plate.When the interval at the two poles of the earth and wavelength are with the order of magnitude, the interference peak of different wave length is very open in transmitted light, utilizes other suction
Receipts type optical filter can not allowing the light penetrated to filter, to obtain the bandpass filter of narrow passband, passband width more than
Regular absorbent type optical filter wants narrow.In addition it is gHLH to also have complete dielectric Fabry-Perot type optical filter, two kinds of typical structures
(LL) HLHa, gHLHL (HH) LHLHa.
So-called spike filter, is segmented from bandpass filter, and definition is identical as bandpass filter, that is,
This optical filter allows optical signal to pass through in specific wave band, and deviates two optical signals other than this wave band and be prevented from, narrow
Passband with optical filter is comparatively narrow, generally 5% or less centre wavelength value.Spike filter main function is to make
The light of specific wavelength passes through, allow other wavelength light reflection (or decaying) optical element.Half band-width is normally controlled in 20nm
Or smaller, it can be used in ultraviolet light, visible light, near-infrared, far infrared band.
By controlling spectral transmittance curve, interferometric filter can be divided into bandpass filter, by optical filter, trap filter
Mating plate etc. can also design spectral transmittance curve according to demand.The method of existing apodization thickness modulation, may be implemented more waves
Two kinds of different materials of refractive index height of film layer generally use of the reflection of long narrow-band, this interferometric filter are designed,
One floor height refraction materials and one layer of low-index material are one group, and one group of thicknesses of layers is fixed, two kinds of material thickness this disappear that
It is long.One group of film layer is a basic cycle, can also multigroup be a basic cycle, substantially, such method high refractive index layer
All do not change with the refractive index of low-index layer, change be every group of film layer thickness.
The method of existing apodization thickness modulation, it is difficult to every group of thicknesses of layers is accurately controlled, because using apodization thickness tune
Thicknesses of layers is changing always in every group after system, this just needs to accurately control the emitted doses of raw material in vapor deposition, and raw material
Systematic error when injection is difficult to cut down.
Interferometric filter is typically placed in the part of directional light in light path, cannot be positioned over before lens, is typically only capable to connect
Receive the light of vertical incidence.
The disadvantage of the prior art is exactly the film layer restricted lifetime being deposited, theca interna aging in usual 1 year to several years,
Embrittlement falls off, and at this moment needs to carry out pickling in optical surface, be deposited again, this process may generate cut in optical surface,
Optical surface flatness is destroyed, and then influence image quality or optical system works efficiency, optical system are also required to dismantle, then
Again adjustment, the optical instrument under some particular surroundings, as the optical instrument used in marine environment is no longer permitted once encapsulated
Perhaps it dismantles, the service life of film directly affects the service life of entire optical system.It can entirely be safeguarded with the optical system of demolition and maintenance
Journey is required for being carried out by professional under specific operating environment, and plated film and adjustment are two process procedures again, so safeguarding
Process is complicated, is bound to high costs, can also delay the normal use of optical system.
Second disadvantage, first, the centre wavelength transmitance of the passband of interferometric filter often 20%-90% it
Between, metallic reflective coating interferometric filter absorption is particularly acute, peak transmittance generally 30% hereinafter, two kinds of interferometric filters all
There is different degrees of optical energy loss.For all-dielectric interference filter, film layer quantity is bigger, and cut-off depth is deeper, but peak
Value wavelength transmitance is smaller, and film layer quantity is smaller, and peak wavelength transmitance can increase, but ends and penetrate the boundary line of wavelength again
It can become less precipitous, assembly of thin films can absorb a big chunk light energy, and film layer quantity is more, and optical energy loss is more serious.
Passband width is difficult to balance always by depth and peak wavelength transmitance.Secondly, assembly of thin films vapor deposition generally requires several small
When to a couple of days, time etc..Time is excessively tediously long, and step is excessively cumbersome.Interfere finally, for many multiwave all dielectrics
Optical filter reaches different filter effects generally for for different wave length, needs that a variety of film materials is selected to be combined, warp
The case where no appropriate index material can often be encountered.
Invention content
The present invention realizes that multiband is anti-to overcome the problems, such as that prior art optical filter film layer aging falls off and absorb luminous energy
It penetrates, proposes a kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer.
The technical scheme is that：
A kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer, characterized in that its be in glass or
Optical element surface is directly delineated the poroid micro-structure of multilayer and is formed；Its structure includes：Optical material substrate；The poroid micro-structure of multilayer
Directly it is connected with optical material substrate, structure Mi Dui layer by layer, and every layer of poroid micro-structure is identical, surface is uniformly arranged micropore
Structure；Micropore is crock shape, and adjacent cells central point line is constituted hexagon by section successively at hemispherical shape.
The number of plies of the poroid micro-structure of multilayer is S, and S >=1, the different number of plies of quantity influences different reflected wavebands.
Hemispherical radius R, depth h and the hole of the micropore are adjusted away from d characteristic parameter refractive index variation function in the heart
System, and then it is precisely controlled the wave band of reflection and each band center wavelength；
The variations in refractive index function formula is：N (f)=[(1-f) ni 2+fns 2]1/2, wherein niIt is air refraction, ns
Substrate refractive index, wherein f are duty ratio, and formula is f (θ)=(31/2d2-πsin2θR2)/31/2d2, wherein d be hole in the heart away from,
The relational expression of h and θ is：H (θ)=(1-cos θ) R, wherein θ be radius at hemispherical depth h towards hemispherical center of circle direction with
Vertical direction is formed by angle, and h initial values are 0, and with depth shallower, h values increase, and R is hemispherical radius.
The hemispherical radius R variation ranges of the micropore are 0.05-0.1 μm, and the variation range of depth h is 0.06-1.8 μ
M, the variation range away from d is 0.2-0.55 μm in the heart in hole.
Beneficial effects of the present invention：
The poroid micro-structure of multilayer is delineated in optical element own face, can overcome the problems, such as that film layer aging falls off；
The poroid micro-structure of multilayer and optical element are same materials, can absorb luminous energy to avoid film layer itself；The poroid micro-structure of multilayer
It is a kind of structure of characteristic size much smaller than effect optical wavelength, apparent diffraction effect will not be brought to influence imaging；Multilayer is poroid
Micro-nano structure can be equivalent to the dielectric layer of a consecutive variations refractive index between air and matrix, be gathered around compared to traditional film material
There is more superior refraction performance；It can be by the hemispherical radius of every layer of micropore of control, depth, hole in the heart away from refractive index becomes
Change function to be modulated, and then be precisely controlled the wave band of reflection and each band center wavelength, the different number of plies of quantity corresponds to different
Reflected waveband, while accomplishing accurate accurate, can effectively reduce reflection band bandwidth, be effectively increased peak wavelength reflectivity.
In 400-1500nm wavelength bands, multiband narrowband reflection, the poroid micro-structure of multilayer slightly larger angle can be received simultaneously
Incidence, incidence angle still have good reflecting effect within the scope of 10 °, and without generating other effects, bandwidth is controlled in peak wavelength
5% hereinafter, peak wavelength reflectivity is more than 99.99%.
Description of the drawings
Fig. 1 is a kind of structural representation of the reflective multiband pectination spike filter of the poroid micro-structure of multilayer of the present invention
Figure.
1, optical material substrate, 2, the poroid micro-structure of multilayer, 3, micropore.
Fig. 2 is one layer of poroid micro-structure variations in refractive index rule schematic diagram of the invention.
Fig. 3 is five wave bands i.e. 404-5/+3nm, 441-7/+6nm, 494-8/+6nm, 562-9/+9nm, 653-10/+
The reflectance spectrum of the reflective multiband pectination spike filter of the poroid micro-structure of multilayer of 12nm.
Specific implementation mode
The present invention is described in further details below in conjunction with the accompanying drawings.
As shown in Figure 1, a kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer, characterized in that should
Optical filter has the poroid micro-structure of multilayer comprising：Optical material substrate；S, the poroid micro-structure in S >=1 layer, the structure are close layer by layer
Heap, and being directly connected with optical material substrate, surface are uniformly arranged micropore, and micropore is crock shape, section at hemispherical shape, according to
It is secondary that adjacent cells central point line is constituted into hexagon；The poroid micro-structure of multilayer follows same parameters and arrangement, and super the half of micropore
Radius of a ball R variation ranges are 0.05-0.1 μm, and the variation range of depth h is 0.06-1.8 μm, and the variation range away from d is in the heart in hole
0.2-0.55μm.Every layer of poroid micro-structure is a basic cycle, and it is multiple that the poroid micro-structure of multilayer is equivalent to a basic cycle
Cycle；The hole heart consistency from top to bottom of the above-mentioned poroid micro-structure of multilayer；The reflective multiband pectination spike filter be in glass or
Optical element surface is directly delineated multigroup poroid micro-structure and is formed.
As shown in Fig. 2, one layer of poroid micro-structure variations in refractive index rule schematic diagram, one layer of poroid micro-structure can it is equivalent at
Number layer thickness is consistent but refractive index is inconsistent film layers, continue to segment, and can be equivalent to the basic of refractive index consecutive variations
Period.
The variations in refractive index function formula is：N (f)=[(1-f) ni 2+fns 2]1/2, wherein niIt is air refraction, ns
Substrate refractive index, wherein f are duty ratio, and formula is f (θ)=(31/2d2-πsin2θR2)/31/2d2, wherein d be hole in the heart away from,
The relational expression of h and θ is：H (θ)=(1-cos θ) R, wherein θ be radius at hemispherical depth h towards hemispherical center of circle direction with
Vertical direction is formed by angle, and h initial values are 0, and with depth shallower, h values increase, and R is hemispherical radius.
As shown in figure 3, with five wave bands, that is, 404-5/+3nm, 441-7/+6nm, 494-8/+6nm, 562-9/+9nm, 653-
It is real using six layers of poroid micro-structure for the reflective multiband pectination spike filter of the poroid micro-structure of multilayer of 10/+12nm
Existing five wave band narrowband reflections.Six layers of poroid micro-structure are to be recycled six basic cycles, and six layers of poroid micro-structure are close layer by layer
Heap, and be directly connected with optical material substrate.
Every layer of poroid micro-structure is characterized as：Micropore is at crock shape, and section is at hemispherical shape, the hemispherical radius R of micropore
It it is 0.07 μm, depth h is 1.2 μm, and hole is in the heart 0.35 μm away from d.Line between the heart of holes hole, which joins end to end, constitutes positive six side
Shape, the alignment of upper and lower six layers of hole heart.Each band center wavelength reflection is all higher than 99.99%, remaining wavelength reflection is in 5%
Below.
Claims (4)
1. a kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer, characterized in that it is in glass or light
Element surface is directly delineated the poroid micro-structure of multilayer and is formed；
Its structure includes：
Optical material substrate (1)；
The poroid micro-structure of multilayer (2) is directly connected with optical material substrate (1), structure Mi Dui layer by layer, and every layer poroid micro-
Structure is identical, and surface is uniformly arranged micropore (3) structure；
Micropore (3), is crock shape, and adjacent cells (3) central point line is constituted hexagon by section successively at hemispherical shape.
2. a kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer according to claim 1, special
Sign is, the number of plies of the poroid micro-structure of multilayer (2) is S, S >=1, and the different number of plies of quantity influences different reflected wavebands.
3. a kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer according to claim 1, special
Sign is that hemispherical radius R, depth h and the hole of the micropore (3) are carried out away from d characteristic parameter refractive index variation function in the heart
Modulation, and then it is precisely controlled the wave band of reflection and each band center wavelength；
The variations in refractive index function formula is：N (f)=[(1-f) ni 2+fns 2]1/2, wherein niIt is air refraction, nsSubstrate
Refractive index, wherein f are duty ratio, and formula is f (θ)=(31/2d2-πsin2θR2)/31/2d2, wherein d is hole in the heart away from h and θ
Relational expression be：H (θ)=(1-cos θ) R, wherein θ be radius at hemispherical depth h towards hemispherical center of circle direction with it is vertical
Direction is formed by angle, and h initial values are 0, and with depth shallower, h values increase, and R is hemispherical radius.
4. a kind of reflective multiband pectination spike filter of the poroid micro-structure of multilayer according to claim 1 or 3,
It is characterized in that, the hemispherical radius R variation ranges of the micropore (3) are 0.05-0.1 μm, and the variation range of depth h is 0.06-
1.8 μm, the variation range away from d is 0.2-0.55 μm in the heart in hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810298818.4A CN108490527B (en) | 2018-04-04 | 2018-04-04 | Reflective multiband comb-shaped narrow-band optical filter with multilayer porous microstructures |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810298818.4A CN108490527B (en) | 2018-04-04 | 2018-04-04 | Reflective multiband comb-shaped narrow-band optical filter with multilayer porous microstructures |
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| CN108490527A true CN108490527A (en) | 2018-09-04 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256536A (en) * | 2006-03-22 | 2007-10-04 | Ricoh Co Ltd | Optical control element and optical unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256536A (en) * | 2006-03-22 | 2007-10-04 | Ricoh Co Ltd | Optical control element and optical unit |
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