CN108468024A - Anti-loose arc initiation device - Google Patents
Anti-loose arc initiation device Download PDFInfo
- Publication number
- CN108468024A CN108468024A CN201810528015.3A CN201810528015A CN108468024A CN 108468024 A CN108468024 A CN 108468024A CN 201810528015 A CN201810528015 A CN 201810528015A CN 108468024 A CN108468024 A CN 108468024A
- Authority
- CN
- China
- Prior art keywords
- striking
- cylinder rod
- striking needle
- positioning sleeve
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000977 initiatory effect Effects 0.000 title claims abstract description 16
- 239000013077 target material Substances 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000010891 electric arc Methods 0.000 description 2
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Abstract
Striking needle positioning sleeve is installed in the cylinder rod lower part of Anti-loose arc initiation device, striking cylinder, and striking needle positioning sleeve is welded as a whole with striking needle, and cylinder rod lower thread connects pressure cap；Cylinder rod is equipped with housing, and adjust pad is equipped between housing lower part and striking needle positioning sleeve, and striking cylinder lower part and cylinder rod upper outside are equipped with felt pad.The Anti-loose arc initiation device of the present invention, striking needle is adjustable with target relative distance and is not easy because the variation of target material surface high temperature causes striking needle to loosen, to ensure that the stability of arc ignition system.
Description
Technical field
The present invention relates to the multi arc sputtering source uses on vacuum coating equipment field more particularly to vacuum tool filming equipment
Arc initiation device.
Background technology
Currently, in technical field of vacuum plating, it is wide because multi arc sputtering source has the characteristics that rate of film build is high
It is general to be applied on the coating machine for tool plated film.
The operation principle in multi arc sputtering source is the arc discharge of target material surface under vacuum state.The target starting the arc uses striking needle
Carry out striking.When multi sphere works, arc discharge generation energy is very big, and the temperature in target material surface and target face direction is very high, more
After arc is stopped, because of effect of the water cooling system of multi sphere to target, the temperature of target material surface can reduce quickly, multi sphere
Start-stop causes changing greatly for multi sphere target surface temperature.Our well known arc initiation device striking needles are to be pressed in draw by bolt
On arc bar, the striking needle generation that the violent temperature change in target face direction often results in arc initiation device loosens phenomenon.
In order to solve the problems, such as that striking needle loosens, certain structures in such a way that striking needle is welded on arc ignition bar, though
This right mode solves the problems, such as loosening for striking needle, but can be thinning after multi sphere works long hours target consumption, the weldering of striking needle
It is connected on and causes the relative distance that can not adjust striking needle and target on arc ignition bar and striking needle can rotate on cylinder rod, when
Striking needle retraction causes to be unable to striking when not reaching target.
Invention content
For the striking needle pine for the arc initiation device that the multi arc sputtering source for solving to be applied on vacuum tool filming equipment uses
De- problem, the present invention provide a kind of arc initiation device for aiming at tool plated film vacuum equipment multi arc sputtering source and using.
Present invention technical solution used for the above purpose is：Anti-loose arc initiation device, the gas of striking cylinder
Striking needle positioning sleeve is installed in cylinder rod lower part, and cylinder rod lower part is D type structures, and striking needle positioning sleeve endoporus is to match with cylinder rod lower part
The D type holes of conjunction, striking needle positioning sleeve are welded as a whole with striking needle, and cylinder rod lower thread connects pressure cap；Cylinder rod is equipped with
Housing.
Adjust pad is equipped between the housing lower part and striking needle positioning sleeve.
Striking cylinder lower part and cylinder rod upper outside are equipped with felt pad.
The Anti-loose arc initiation device of the present invention, striking needle is adjustable with target relative distance and is not easy because of target material surface temperature
Degree acute variation causes striking needle to loosen, to ensure that the stability of arc ignition system.
Description of the drawings
Fig. 1 is Anti-loose arc initiation device main view section mechanism map of the present invention.
Fig. 2 is the A-A sectional views of Fig. 1.
In figure：1, striking cylinder, 2, felt pad, 3, target, 4, housing, 5, adjust pad, 6, striking needle positioning sleeve, 7,
Striking needle, 8, pressure cap, 9, cylinder rod.
Specific implementation mode
The Anti-loose arc initiation device structure of the present invention is as shown in Figure 1,9 upper outside of 1 lower part of striking cylinder and cylinder rod
Equipped with felt pad 2,9 lower part of the cylinder rod installation striking needle positioning sleeve 6 of striking cylinder 1,9 lower part of cylinder rod is D type structures, striking
6 endoporus of needle positioning sleeve is the D type holes coordinated with 9 lower part of cylinder rod, striking needle positioning sleeve 6 and striking needle（7）It is welded as a whole, gas
9 lower thread of cylinder rod connects pressure cap 8；It is located at felt pad lower part, 6 top of striking needle positioning sleeve on cylinder rod 9 and is equipped with housing 4,
Adjust pad 5 is equipped between 4 lower part of housing and striking needle positioning sleeve 6.
Striking cylinder 1 supplies, and the retraction of cylinder rod 9 drives striking needle 7 to contact 3 striking of target.After 3 thickness of target reduces,
Removing adjust pad 5 makes striking needle 7 with target 3 apart from reduction.6 endoporus of striking needle positioning sleeve is the D coordinated with 9 lower part of cylinder rod
Type hole prevents striking needle positioning sleeve 6 from being rotated on cylinder rod 9, and striking needle positioning sleeve 6 is fixed on by pressure cap 8 on cylinder rod, is made
Striking needle positioning sleeve 6 cannot slide on cylinder rod, and when striking action carries out, only there may be slightly thread off for 8 screw thread of pressure cap
Phenomenon, striking needle positioning sleeve 6 with cylinder rod because coordinating and will not be loosened by 8 fixation of pressure cap, striking needle 7 and the positioning of striking needle
Set 6 welds together, and makes striking needle 7 be not easy to loosen, to ensure that the stability of arc ignition system.
The present invention is described by embodiment, and those skilled in the art know, in the spirit for not departing from the present invention
In the case of range, various changes or equivalence replacement can be carried out to these features and embodiment.In addition, in the religion of the present invention
It leads down, can modify to these features and embodiment with the essence for adapting to particular situation and material without departing from the present invention
God and range.Therefore, the present invention is not limited to the particular embodiment disclosed, fallen with claims hereof
Embodiment in range belongs to protection scope of the present invention.
Claims (3)
1. Anti-loose arc initiation device, it is characterised in that：Striking cylinder（1）Cylinder rod（9）Lower part is installed by striking needle positioning sleeve
（6）, cylinder rod（9）Lower part is D type structures, striking needle positioning sleeve（6）Endoporus is and cylinder rod（9）The D type holes of lower part cooperation, draw
Arc needle positioning sleeve（6）With striking needle（7）It is welded as a whole, cylinder rod（9）Lower thread connects pressure cap（8）；Cylinder rod（9）On set
There is housing（4）.
2. Anti-loose arc initiation device according to claim 1, it is characterised in that：The housing（4）Lower part and striking
Needle positioning sleeve（6）Between be equipped with adjust pad（5）.
3. Anti-loose arc initiation device according to claim 1, it is characterised in that：Striking cylinder（1）Lower part and cylinder rod
（9）Upper outside is equipped with felt pad（2）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810528015.3A CN108468024A (en) | 2018-05-29 | 2018-05-29 | Anti-loose arc initiation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810528015.3A CN108468024A (en) | 2018-05-29 | 2018-05-29 | Anti-loose arc initiation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108468024A true CN108468024A (en) | 2018-08-31 |
Family
ID=63261717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810528015.3A Pending CN108468024A (en) | 2018-05-29 | 2018-05-29 | Anti-loose arc initiation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108468024A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110565055A (en) * | 2019-10-28 | 2019-12-13 | 北京泰科诺科技有限公司 | arc striking device for ion plating and ion plating device |
| CN110565055B (en) * | 2019-10-28 | 2024-05-03 | 北京泰科诺科技有限公司 | Arc striking device for ion plating and ion plating device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4448799A (en) * | 1983-04-21 | 1984-05-15 | Multi-Arc Vacuum Systems Inc. | Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems |
| CN206970708U (en) * | 2017-01-16 | 2018-02-06 | 天津职业技术师范大学 | A kind of arc ion plating power traction arc needle device |
| CN107740055A (en) * | 2017-11-30 | 2018-02-27 | 天津职业技术师范大学 | A kind of spring arc ion plating striking pin adjusting means |
| CN107815651A (en) * | 2017-11-30 | 2018-03-20 | 天津职业技术师范大学 | A kind of arc ion plating striking pin adjusting means with pooling feature |
| CN208218948U (en) * | 2018-05-29 | 2018-12-11 | 大连维钛克科技股份有限公司 | Anti-loose arc initiation device |
-
2018
- 2018-05-29 CN CN201810528015.3A patent/CN108468024A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4448799A (en) * | 1983-04-21 | 1984-05-15 | Multi-Arc Vacuum Systems Inc. | Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems |
| CN206970708U (en) * | 2017-01-16 | 2018-02-06 | 天津职业技术师范大学 | A kind of arc ion plating power traction arc needle device |
| CN107740055A (en) * | 2017-11-30 | 2018-02-27 | 天津职业技术师范大学 | A kind of spring arc ion plating striking pin adjusting means |
| CN107815651A (en) * | 2017-11-30 | 2018-03-20 | 天津职业技术师范大学 | A kind of arc ion plating striking pin adjusting means with pooling feature |
| CN208218948U (en) * | 2018-05-29 | 2018-12-11 | 大连维钛克科技股份有限公司 | Anti-loose arc initiation device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110565055A (en) * | 2019-10-28 | 2019-12-13 | 北京泰科诺科技有限公司 | arc striking device for ion plating and ion plating device |
| CN110565055B (en) * | 2019-10-28 | 2024-05-03 | 北京泰科诺科技有限公司 | Arc striking device for ion plating and ion plating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200930 Address after: 116600, No. seven, 13 street, Northeast Economic and Technological Development Zone, Liaoning, Dalian Applicant after: Dalian weitike nanotechnology Co., Ltd Address before: 116600 -A, B, 3-1 West Tieshan Road, Dalian economic and Technological Development Zone, Liaoning, China Applicant before: DALIAN VACUUM TECHNOLOGIES Inc. |
|
| TA01 | Transfer of patent application right | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |