CN107740055A - A kind of spring arc ion plating striking pin adjusting means - Google Patents
A kind of spring arc ion plating striking pin adjusting means Download PDFInfo
- Publication number
- CN107740055A CN107740055A CN201711244612.5A CN201711244612A CN107740055A CN 107740055 A CN107740055 A CN 107740055A CN 201711244612 A CN201711244612 A CN 201711244612A CN 107740055 A CN107740055 A CN 107740055A
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- CN
- China
- Prior art keywords
- pin
- striking pin
- striking
- hole section
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Working Measures On Existing Buildindgs (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a kind of spring arc ion plating striking pin adjusting means, including outer sleeve, regulation stud, alignment pin, spring and striking pin, smooth straight hole section and internal thread hole section are provided with outer sleeve, straight hole section and internal thread hole section coaxial communication, internal thread hole section are arranged on the outside of straight hole section；Alignment pin and spring are arranged in straight hole section, and the regulation stud is by being threadably mounted in the internal thread hole section of outer sleeve；Groove is further opened with outer sleeve stack shell, the vertical section of the striking pin is arranged in groove, and striking pin is fixed between regulation stud and alignment pin.When need to adjust striking pin and target surface apart from when, turn regulation stud, regulation stud promotes striking pin, and along groove length to slip, striking pin drives alignment pin to make spring-compressed, so as to realize the continuous adjustment of striking pin position.
Description
Technical field
The invention belongs to arc ion plating (aip) field, and in particular to a kind of spring arc ion plating striking pin regulation dress
Put.
Background technology
In arc ion plating film device coating process, target is touched by striking pin and produces electric discharge progress striking.Plated film
During, striking pin position and target material surface hypotelorism, striking pin tip temperature constantly raise, and continue the electric arc of ablation and can make
Tip portion fuse, cause arc extinguishing and can not the starting the arc again, interrupt coating process；Striking pin position and target hypertelorism,
Discharged between arc pin and target insufficient, can not the starting the arc.With the continuous consumption of target, the distance between target and striking pin exist
Constantly change, this just needs the position of constantly adjustment striking pin, makes the fully smoothly starting the arc and not of being discharged between arc pin and target
Can be fused arc pin, and because each target consumption degree is difficult to measure, the adjustment to striking pin position adds very big difficulty, this
With regard to needing a kind of spring arc ion plating striking pin adjusting means for being easy to regulation.
The content of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of spring arc ion plating for being easy to regulation
Striking pin adjusting means.The position of striking pin can be conveniently adjusted by the device.
The present invention is achieved by the following technical solutions：
A kind of spring arc ion plating striking pin adjusting means, including outer sleeve, regulation stud, alignment pin, spring and
Striking pin,
There is one section of solid construction in the outer sleeve, the side of the solid construction of outer sleeve is blind screw hole structure,
The blind screw hole is used to connect cylinder motion end；The opposite side of the solid construction of outer sleeve is provided with smooth straight hole section and interior
Screw thread hole section, straight hole section and internal thread hole section coaxial communication, internal thread hole section are arranged on the outside of straight hole section；
The alignment pin and spring are arranged in straight hole section, wherein, alignment pin is slidably installed with straight hole section, and spring is arranged on
Between alignment pin and solid construction；The regulation stud is by being threadably mounted in the internal thread hole section of outer sleeve；
Groove is further opened with the stack shell of the internal thread hole section of outer sleeve, the vertical section of the striking pin is arranged on groove
In, striking pin along the length of groove to slip, can offer the first groove and of positional symmetry in the vertical section of striking pin
Two grooves, the first groove are used to coordinate with alignment pin outer end, and the second groove is used to coordinate with regulation stud terminal, in spring force
In the presence of, alignment pin outer end heads into the first groove of striking pin, and regulation stud terminal heads into the second groove of striking pin, from
And realize striking pin and be fixed between regulation stud and alignment pin.
The application method of the spring arc ion plating striking pin adjusting means：
The present apparatus is fixed on by the blind screw hole of outer sleeve one end on the take-off lever of the actuating cylinder of coating machine, by
Cylinder drives the present apparatus of reciprocating vibration, striking pin touching target is produced electric discharge and carries out striking, in the course of the work, spring has
Enough elastic force, it can ensure that striking pin is fixed between regulation stud and alignment pin；
When need to adjust striking pin and target surface apart from when, turn regulation stud, regulation stud promotes striking pin, striking pin
Alignment pin is driven to make spring-compressed, so as to realize the continuous adjustment of striking pin position.
In the above-mentioned technical solutions, the striking pin includes vertical section, bending transition and horizontal segment, vertical section, bending
Transition and horizontal segment are integral type structure, material is stainless steel, are embedded with the terminal of horizontal segment for being contacted with target
The contact pin of molybdenum materials matter.
In the above-mentioned technical solutions, length of the groove along outer sleeve axial direction is 1.5-3cm.
The advantages of the present invention are：
The present invention is simple in construction, reasonable in design, in use, being fixed the present apparatus by the blind screw hole of outer sleeve one end
On the take-off lever of the actuating cylinder of coating machine, drive the present apparatus of reciprocating vibration by cylinder, produce striking pin touching target and put
Electricity carries out striking, and in the course of the work, using the elastic force of spring, alignment pin outer end heads into the first groove of striking pin, and adjusts
Stud terminal heads into the second groove of striking pin, so as to realize that striking pin is fixed between regulation stud and alignment pin；When need
Adjust striking pin and target surface apart from when, turn regulation stud, regulation stud promotes striking pin along groove length to (i.e. along overcoat
Cylinder is axially) slide, striking pin drives alignment pin to make spring-compressed, so as to realize the continuous adjustment of striking pin position, in striking pin
During position adjustments, under the elastic force effect of spring, it can ensure that striking pin is fixed on regulation stud and determined in real time all the time
Between the pin of position, pin danger will not be fallen.
The present invention is easy to use, only need to adjust regulation stud, you can realize the position adjustments of striking pin.
The striking pin of the present invention includes vertical section, bending transition and horizontal segment, vertical section, bending transition and horizontal segment
For integral type structure, material is stainless steel, and the contact pin of the molybdenum materials matter for being contacted with target is embedded with the terminal of horizontal segment.
It is in order that striking pin that section parallel with target surface avoids temperature mistake away from target surface by the structure that striking pin makes this bending
Height causes the softening of striking pin, can also effectively slow down deposition, the buildup of material that target evaporates on arc pin in addition.This
Outside, the contact pin of striking pin uses molybdenum materials matter, because the fusing point of molybdenum is higher, the electric arc that can prevent from continuing ablation is stainless
Steel striking pin melts, if striking pin integrally all makes of molybdenum filament, cost is higher, while molybdenum filament fragility is big, is not easy brake forming,
And stainless steel plasticity is preferable, flexible shaping.
Brief description of the drawings
Fig. 1 is the structural representation of type of the present invention.
Fig. 2 is the structural representation of regulation striking pin position after target loss.
Embodiment
Technical scheme is further illustrated with reference to specific embodiment.
The invention discloses a kind of spring arc ion plating striking pin adjusting means, and referring to accompanying drawing, the device includes outer
Sleeve 1, regulation stud 2, alignment pin 3, spring 4 and striking pin 5,
There is one section of solid construction 1-1 in the outer sleeve 1, the right side of the solid construction of outer sleeve is blind screw hole 1-
2 structures, blind screw hole 1-2 are used to connect cylinder motion end；It is provided with the left of the solid construction of outer sleeve smooth straight
Hole section 1-3 and internal thread hole section 1-4, straight hole section and internal thread hole section coaxial communication, internal thread hole section 1-4 are arranged on straight hole section 1-
3 outsides；
The alignment pin 3 and spring 4 are arranged in straight hole section 1-3, wherein, alignment pin 3 is slidably installed with straight hole section 1-3,
Spring 4 is arranged between alignment pin 3 and solid construction 1-1；The regulation stud 2 is by being threadably mounted at the internal thread of outer sleeve
In hole section 1-4；
The striking pin 5 include vertical section 5-1, bending transition 5-2 and horizontal segment 5-3, vertical section, bending transition and
Horizontal segment is integral type structure, and material is stainless steel, is embedded with the terminal of horizontal segment for the molybdenum materials matter that is contacted with target 6
Contact pin 5-4.By striking pin make this bending structure be in order that striking pin that section parallel with target surface is away from target surface,
The too high softening for causing striking pin of temperature is avoided, it is heavy on arc pin can also effectively to slow down the material that target evaporates in addition
Product, buildup.In addition, the contact pin of striking pin uses molybdenum materials matter, because the fusing point of molybdenum is higher, can prevent from continuing ablation
Electric arc melts stainless steel striking pin, if striking pin integrally all makes of molybdenum filament, cost is higher, while molybdenum filament fragility is big, no
Flexible shaping, and stainless steel plasticity is preferable, flexible shaping.
Groove 1-5 is further opened with the stack shell of the internal thread hole section of outer sleeve, length of the groove along outer sleeve axial direction is
1.5-3cm, the vertical section 5-1 of the striking pin are arranged in groove 1-5, and the groove width of groove is straight slightly larger than the vertical section of striking pin
Footpath, slide so that striking pin can be grown along groove 1-5 to (i.e. along axial along outer sleeve), offered in the vertical section of striking pin
First groove 5-11 of positional symmetry and the second groove 5-12, the first groove are used to coordinate with alignment pin outer end, and the second groove is used
Coordinate in regulation stud terminal, in the presence of spring force, alignment pin outer end heads into the first groove 5-11 of striking pin, and
Regulation stud terminal heads into the second groove 5-12 of striking pin, so as to realize the fixation of striking pin；
In use, the present apparatus is fixed on to the output of the actuating cylinder of coating machine by the blind screw hole of outer sleeve right-hand member
On bar, coating machine is opened, drives the present apparatus of reciprocating vibration by cylinder, striking pin touching target 6 is produced electric discharge and carries out striking,
In the course of work, because spring has enough elastic force, it can be ensured that striking pin 5 is fixed on regulation stud 2 and positioning
Between pin 3.When need to adjust striking pin and target surface apart from when, referring to accompanying drawing 2, turn regulation stud 2, promote striking pin 5 to make
The contracting of spring pressure 4, it is possible to realize the continuous adjustment of striking pin position.
Exemplary description has been done to the present invention above, it should explanation, in the situation for the core for not departing from the present invention
Under, any simple deformation, modification or other skilled in the art can not spend the equivalent substitution of creative work equal
Fall into protection scope of the present invention.
Claims (4)
- A kind of 1. spring arc ion plating striking pin adjusting means, it is characterised in that：Including outer sleeve, regulation stud, positioning Pin, spring and striking pin,There is one section of solid construction in the outer sleeve, the side of the solid construction of outer sleeve is blind screw hole structure, and this is interior Tapped blind hole is used to connect cylinder motion end；The opposite side of the solid construction of outer sleeve is provided with smooth straight hole section and internal thread Hole section, straight hole section and internal thread hole section coaxial communication, internal thread hole section are arranged on the outside of straight hole section；The alignment pin and spring are arranged in straight hole section, wherein, alignment pin is slidably installed with straight hole section, and spring is arranged on positioning Between pin and solid construction；The regulation stud is by being threadably mounted in the internal thread hole section of outer sleeve；Groove is further opened with the stack shell of the internal thread hole section of outer sleeve, the vertical section of the striking pin is arranged in groove, Striking pin along the length of groove to slip, can offer the first groove of positional symmetry and second recessed in the vertical section of striking pin Groove, the first groove are used to coordinate with alignment pin outer end, and the second groove is used to coordinate with regulation stud terminal, in the work of spring force Under, alignment pin outer end heads into the first groove of striking pin, and regulation stud terminal heads into the second groove of striking pin, so as to real Existing striking pin is fixed between regulation stud and alignment pin.
- A kind of 2. spring arc ion plating striking pin adjusting means according to claim 1, it is characterised in that：It is described to draw Arc pin includes vertical section, bending transition and horizontal segment, and vertical section, bending transition and horizontal segment are integral type structure, material For stainless steel, the contact pin of the molybdenum materials matter for being contacted with target is embedded with the terminal of horizontal segment.
- A kind of 3. spring arc ion plating striking pin adjusting means according to claim 1, it is characterised in that：Groove edge The length of outer sleeve axial direction is 1.5-3cm.
- 4. the application method of the spring arc ion plating striking pin adjusting means as described in one of claim 1-3, its feature It is：The present apparatus is fixed on by the blind screw hole of outer sleeve one end on the take-off lever of the actuating cylinder of coating machine, by cylinder Drive the present apparatus of reciprocating vibration, striking pin touching target is produced electric discharge and carry out striking, in the course of the work, spring has enough Elastic force, can ensure that striking pin is fixed between regulation stud and alignment pin；When need to adjust striking pin and target surface apart from when, turn regulation stud, regulation stud promotes striking pin, and striking pin drives Alignment pin makes spring-compressed, so as to realize the continuous adjustment of striking pin position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711244612.5A CN107740055B (en) | 2017-11-30 | 2017-11-30 | A kind of spring arc ion plating striking needle regulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711244612.5A CN107740055B (en) | 2017-11-30 | 2017-11-30 | A kind of spring arc ion plating striking needle regulating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107740055A true CN107740055A (en) | 2018-02-27 |
| CN107740055B CN107740055B (en) | 2019-11-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711244612.5A Active CN107740055B (en) | 2017-11-30 | 2017-11-30 | A kind of spring arc ion plating striking needle regulating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107740055B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108468024A (en) * | 2018-05-29 | 2018-08-31 | 大连维钛克科技股份有限公司 | Anti-loose arc initiation device |
| CN111705298A (en) * | 2020-05-15 | 2020-09-25 | 温州职业技术学院 | Ion plating rotation straight line combined type arc striking device and ion plating device |
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| CN202595251U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Electric arc target structure of multi arc ion film plating machine |
| CN202595252U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Multi-arc target arc striking needle |
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| CN106756822A (en) * | 2017-01-16 | 2017-05-31 | 天津职业技术师范大学 | Arc target arc-striking needle fixing device with continuously adjustable position |
| CN207581913U (en) * | 2017-11-30 | 2018-07-06 | 天津职业技术师范大学 | Spring arc ion plating striking needle regulating device |
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2017
- 2017-11-30 CN CN201711244612.5A patent/CN107740055B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201427990Y (en) * | 2009-06-25 | 2010-03-24 | 深圳市振恒昌实业有限公司 | Novel hot cathodic arc device |
| CN202595251U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Electric arc target structure of multi arc ion film plating machine |
| CN202595252U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Multi-arc target arc striking needle |
| CN203855786U (en) * | 2014-05-28 | 2014-10-01 | 温州海蓝工业设计有限公司 | Presser foot device for sewing machine |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108468024A (en) * | 2018-05-29 | 2018-08-31 | 大连维钛克科技股份有限公司 | Anti-loose arc initiation device |
| CN111705298A (en) * | 2020-05-15 | 2020-09-25 | 温州职业技术学院 | Ion plating rotation straight line combined type arc striking device and ion plating device |
| CN111705298B (en) * | 2020-05-15 | 2022-06-24 | 温州职业技术学院 | Ion plating rotation straight line combined type arc striking device and ion plating device |
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| Publication number | Publication date |
|---|---|
| CN107740055B (en) | 2019-11-01 |
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