CN108465940B - Laser labelling detection system and its control method - Google Patents
Laser labelling detection system and its control method Download PDFInfo
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- CN108465940B CN108465940B CN201810250440.0A CN201810250440A CN108465940B CN 108465940 B CN108465940 B CN 108465940B CN 201810250440 A CN201810250440 A CN 201810250440A CN 108465940 B CN108465940 B CN 108465940B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The present invention provides the method and system of quality testing and the control of laser labelling, wherein the laser labelling is formed on the surface according to laser work parameter using laser etching device, and method quality determining method includes: the surface formation parameter of at least part of numerical characteristics for reading the label and at least part of formation quality of the label according to the numerical characteristics computational representation；Judge that the surface forms whether parameter meets threshold value, to verify the mark quality, wherein it is unqualified then to verify the label when surface formation parameter is unsatisfactory for the threshold value.According to the present invention, the readable property amount of laser labelling can not only be quantified, it can repeat convenient for machine realization and in high volume to detect, and erroneous judgement can be made to avoid the influence due to ambient light and to laser labelling quality, more accurate detection may be implemented.
Description
Technical field
The present invention relates to laser labelling detection and control technologies.
Background technique
Present laser etching technique is used widely.Such as come in the semiconductor industry usually using laser to product
Surface is etched, to generate people or machine readable label, such as product ID number, style number, bar code or two on the surface
Tie up code etc..And these numbers or code are extremely important for product, it is therefore desirable to guarantee that these labels are persistently clear readable.So
And actually have the readability that several factors influence these laser labellings, such as laser power, label where material or
The characteristic etc. of product.If laser labelling pattern is beaten too shallow, these, which are marked with, to desalinate over time.
Currently, generalling use naked eyes to detect the quality and readability of the label of laser-induced thermal etching, it is apparent that naked eyes detection office
The influence for being limited to everyone subjective judgement and will receive ambient light, checking angle etc..Therefore simultaneously using visual inspection
It is not objective also and unreliable.Although the careful generation quality for checking label can also be carried out by microscope, but still process is cumbersome, and
And it cannot still be detached from naked eyes and judge.
Summary of the invention
The present invention provides a kind of method and system of improved generation quality for checking laser labelling, passes through computational representation mark
The parameter of the formation quality of note simultaneously judges whether to meet preassigned to realize, microscope is judged or utilized so as to avoid naked eyes
The judgment bias of subjectivity brought by judging and readability.
And then the present invention provides a kind of method and system of generation quality for promoting laser labelling, it can be by means of calculating
Characterization label is formationed quality parameter, be unsatisfactory for predetermined standard time, may be adjusted for etching label laser-induced thermal etching fill
The parameter set, such as laser power or power density, to improve the quality of the label then etched.
According to one aspect of the present invention, a kind of method for examining the formation quality of laser labelling on product surface is provided,
Wherein the laser labelling is, packet formed on the surface according to preset laser work parameter using laser etching device
It includes: reading at least the one of at least part of numerical characteristics of the label and the label according to the numerical characteristics computational representation
The surface for being partially forming quality forms parameter；And judge that the surface forms whether parameter meets threshold value, described in verifying
Mark quality, wherein it is unqualified then to verify the label when surface formation parameter is unsatisfactory for the threshold value.
According to one aspect of the present invention, a kind of system for examining the formation quality of laser labelling on product surface is provided,
Wherein the laser labelling is, packet formed on the surface according to preset laser work parameter using laser etching device
It includes: measuring device, for reading at least part of numerical characteristics of the label and according to the numerical characteristics computational representation institute
The surface for stating the formation quality of label forms parameter；Control device, for judging that the surface forms whether parameter meets threshold value,
To verify the mark quality, wherein then verifying the label when surface formation parameter is unsatisfactory for the threshold value and not conforming to
Lattice.
According to one aspect of the present invention, a kind of method controlling the formation quality of laser labelling on product surface is provided,
Wherein the laser labelling irradiates the surface according to laser work parameter using laser etching device and is formed, this method packet
It includes: reading the numerical characteristics of laser point and the label according to the numerical characteristics computational representation at least part of the label
At least part of formation quality surface formed parameter；Judge that the surface forms whether parameter meets threshold value, when described
When surface formation parameter is unsatisfactory for the threshold value, then the laser work parameter is adjusted.
Preferably, the laser work parameter is related to the threshold value, including the laser power for etching the label
Or power density, wherein power density refers to the laser power under unit area.
Preferably, the laser work parameter of the adjustment is generated under simulation model, wherein under the simulation model,
One or two in the power and power density of the laser is adjusted by emulation to calculate the table for meeting the threshold value
Face forms parameter；Using one or two in the power and power density of the laser through emulation adjustment.
In addition, this method also adjusts the laser work parameter further according to scheduled priority, and predetermined reaching
Switch adjustment modes when condition.Here priority orders can be set to preferentially adjust power, followed by adjust power density,
It is finally the two Mixed adjustment.Here predetermined condition includes: maximum power limit value, the optical lens system of laser etching device
Attainable minimum light spot of institute etc..Wherein then stop adjusting power when adjusting power and reaching maximum power limit value, turns to adjustment
Power density；And then stop adjusting power density when power density adjustment reaches minimum light spot, and enter Mixed adjustment mode.
According to one aspect of the present invention, a kind of system for controlling laser etching device is provided, which presses
According to laser work parameter, laser labelling is formed on product surface, which includes: measuring device, for reading the label
At least part in laser point numerical characteristics and at least one of the laser labelling according to the numerical characteristics computational representation
The surface for the formation quality divided forms parameter；Controller is verified for judging that the surface forms parameter and whether meets threshold value
The quality of the label, and when surface formation parameter is unsatisfactory for the threshold value, then adjust the laser work parameter.
Detailed description of the invention
Fig. 1 is the laser labelling quality detecting system schematic diagram shown according to one embodiment；
Fig. 2 shows an illustrative laser labelling Electronic Speculum imaging schematic diagrams；
Fig. 3 shows the flow chart of laser labelling quality determining method；
Fig. 4 shows the laser etching device control system schematic diagram according to one embodiment；
The surface that Fig. 5 shows an illustrative laser labelling forms the relationship of parameter and laser power and power density
Schematic diagram；
Fig. 6 shows the flow chart of the running parameter of the adjustment laser etching device according to one embodiment.
Specific embodiment
The preferred embodiment of the disclosure is more fully described below with reference to accompanying drawings.Although showing the disclosure in attached drawing
Preferred embodiment, however, it is to be appreciated that may be realized in various forms the disclosure without the embodiment party that should be illustrated here
Formula is limited.On the contrary, these embodiments are provided so that this disclosure will be more thorough and complete, and can be by the disclosure
Range is fully disclosed to those skilled in the art.
In following discloses, for etching the ID that laser labelling such as set of number is constituted on semiconductor product surface
It is explained.It is the laser dot-matrix for being irradiated to product surface by laser facula and being formed using the label that laser etching device is etched
It constitutes, two-dimensional pattern feature of these dot matrix in addition to representing etched label, and these dot matrix also have depth characteristic.It is aobvious
So, the depth of each laser point then reflects the irradiation power of present laser hot spot in dot matrix, will usually swash under unit area
Optical power is referred to as power density.The present invention is using the feature realization of these dot matrix to the quality testing and realization of label to laser
The control of the running parameter of Etaching device, running parameter here include laser power or power density.
[mark quality inspection]
Mark quality detection scheme according to an embodiment of the present invention then fully utilizes the three-dimensional feature attribute of dot matrix, that is, fills
Consider laser dot-matrix density and depth with dividing to the persistence of label and readable influence, reticular density here reflects
The continuity of label.
Fig. 1 shows the schematic diagram of the laser labelling detection system of one embodiment of the invention.As shown, the detection system
Including measuring device 100, control device 200 and input interface 300 and output interface 400.
Measuring device 100 is used to carry out optical scanner to the laser labelling generated on product surface to be checked, to mention
Take the depth information for marking upper each laser dot-matrix.Specifically, label dedicated for product, measuring device 100 can be with scanning strips
Scheduled region on markd surface, to extract at least part of depth characteristic of the label, which can
To be unit area or unit length, or arbitrary other areas or length, so that n numerical value Z1, Z2, Z3 ... ... Zn is obtained,
Wherein Z represents depth.It is readily appreciated that, the quantity of scanning numerical value n here depends on optical scanner precision.Such as utilizing
For the scanner of principle of optical interference, imaging precision is significantly larger than the size of laser facula, therefore each hot spot is shone
It penetrates for each laser point of generation, can scan to obtain multiple data Z, i.e., the quantity of numerical value n is much big in scheduled region
In the quantity of the laser point of the practical irradiation in the presumptive area；But for low optical scanner precision, it is understood that there may be
The quantity of numerical value n close to the practical irradiation in the presumptive area laser point quantity.Obvious n value is bigger, can more reflect mark
The continuity Characteristics of note.As an example, can use the interferometer based on laser interference principle as measuring device 100 come
Obtain these numerical value.
Then, measuring device 100 is configured to the formation matter of these labels of these sample magnitude computational representations
The parameter of amount calculates the root-mean-square value RMS of these numerical value in one embodiment of the invention.Here root mean square, which refers to, to be passed through
Interferometer is scanned all laser point altitude informations in the region obtained in presumptive area and subtracts region all the points height
The root mean square of the difference of mean value is spent, which can effectively reflect that the fluctuating situation of the specific region laser labelling, such as overall depth connect
Continuous property etc., and effectively avoid that only depth data is used only and ignores laser labelling continuity to the defect of readability contribution.Assuming that
The average value of all point heights in the region is ZavgThe then RMS={ [(Z in the region1–Zavg)2+(Z2–Zavg)2+(Z3–Zavg)2+…+
(Zn–Zavg)2]/n}1/2。
Control device 200 determines the quality of the label using the RMS value calculated of measuring device 100.Specifically, it controls
The RMS value of calculating can be compared by device 100 with a threshold value T.When RMS is greater than or equal to T, then show the mark currently formed
Remember that quality is good, and when RMS is less than T, then show that the mark quality currently formed is poor.And then control device 200 can be by defeated
The output of outgoing interface 300 indicates the information of the quality of the label, such as sound or graphical representation etc..
Although in the present embodiment, surface, which forms parameter RMS, is calculated by measuring device 100, it is apparent that can also be by
Control device 200 receives scan data Z1, Z2, Z3 from measuring device ... Zn simultaneously completes corresponding parameter calculating.
In example of the invention, as the threshold value T of the quality of requirements, established using a reference mark by experiment
Play the threshold value T that laser labelling readability surface forms parameter RMS value.Such as either human eye can be chosen and still pass through machine all
It is clear readable laser labelling as reference mark, can calculates its RMS value based on the reference mark, and using this value as testing
Demonstrate,prove the threshold value T of mark quality.
In addition it is also necessary to it is noted that due to product material, the factor of storage condition, the label etched may be with
The passage readability of time can be deteriorated.Such as usually etching the semiconductor product of label on it, semiconductor
Situations such as package substrate skin-material is mostly high molecular polymer, discontinuous if there is laser labelling, in storage temperature humidity
Under the action of variation, the readability of laser labelling can further be deteriorated.As shown in Figure 2 A, laser labelling shown in ' M ' is just
Scanning electron microscopic picture when etching is completed, it is clear that it is a good label, it can be in this, as reference mark.And for Fig. 2 B's
Label, then belong to undesirable laser labelling, and laser labelling therein shows as poor continuity, although for human eye and machine
It is read out, but as shown in Figure 2 C, the laser of Fig. 2 C is imprinted as scanning electron microscope (SEM) photograph of the label of Fig. 2 B after storage 3 months
The readability of piece, the laser labelling is excessively poor, and conventional machines vision and human eye are all unreadable.Therefore, laser labelling is carried
Material is different, environment is different, the requirement that may cause to mark quality is different, therefore is preferably also and wants in given threshold T
In view of the influence of Material texture, environment (such as temperature or humidity etc.) etc..In addition, it can be appreciated that being swashed due to material etc.
The size of the laser point of laser facula and practical irradiation formation that photetching engraving device 600 issues be not it is identical, be here
Because laser causes material surface to deform, caused by laser point obscure boundary Chu of formation etc..
In addition, there is the different quality demands to laser labelling in practice even with same material.Cause
For different quality requirements, different threshold value T is arranged in one embodiment of the invention in this.For example, for requiring to swash
No matter signal is good and the readable quality requirement not being decreased obviously is i.e. permanent readable in short term for a long time, settable well
The property read threshold value T1；For requiring laser labelling readable and long-term storage readability is declined but still readable quality requirement,
Settable long-term readable threshold value T2；And can become unreadable for storing laser labelling for a long time, then settable short-term readability
Threshold value T3.Therefore, in an implementation, different threshold value T can be selected for different quality requirement control devices 200.
Input interface 400 can be used for inputting user demand parameter for detection system.User can be inputted by input interface 300
The desired qualities of the label of laser-induced thermal etching are needed, such as permanent readable, long-term readable or readable etc. in short term.Control device 200
Corresponding threshold value T is selected according to the desired qualities of user's input.Optionally, user can also be further by input interface 300
The product type of label to be etched is inputted, desired qualities that control device 200 is inputted according to user, product type are come further really
Fixed corresponding threshold value T.
In one embodiment, alternative threshold value T can be stored in control device 200.In another embodiment
In, which can further comprise a database 500.It can will be for not quality requirement, the threshold of different product type
Value T and quality requirement, product type etc. are stored in association in database 500.Usual product type and the material with product
And storage or use environment it is directly related.Control device 200 can call database according to user's input, retrieve from database
Matched threshold value T out.It is easy to maintain to be stored in being advantageous in that for database 500.
Fig. 3 shows the flow chart of laser labelling quality determining method according to the above embodiment of the present invention.As shown,
In step 301, user's input is received with the product type of the quality requirement of determining laser labelling and current etch laser labelling.
In step 302, the quality standard for the laser labelling that current etch is determined according to the quality requirement and product type, i.e. threshold value
T。
Then in step 303, optical scanner is carried out to the product surface for being formed with laser labelling, to obtain the pre- of the label
Determine depth data Z1, Z2, the Z3 of the laser point in region ... Zn.
In step 304, based on the RMS value of these formation quality marked of these numerical value computational representations, the i.e. presumptive area
RMS={ [(Z1–Zavg)2+(Z2–Zavg)2+(Z3–Zavg)2+…+(Zn–Zavg)2]/n}1/2, wherein all point heights in the region
Average value be Zavg。
In step 305, the matter of the label is determined with determining threshold value T in step 302 based on RMS value calculated
Amount.When RMS is greater than or equal to T, then show that the mark quality currently formed is good, and when RMS is less than T, then show current
The mark quality of formation is poor.And the information for indicating the quality of the label, such as sound or graphical representation etc. are exported in step 306.
It is to be herein pointed out above steps and sequence are not necessarily all necessary.For example, for single product mark
Note or quality requirement, then step 301 is dispensed with 302, and wherein threshold value can store in control device 200.Alternatively,
The step 302 of threshold value can also execute after the step 304.
It, according to the solution of the present invention not only can be to laser labelling compared with the means of existing detection laser labelling quality
Readable property amount quantified, realized convenient for machine and can in high volume repeat to detect, and can be to avoid due to environment light
The influence of line and erroneous judgement is made to laser labelling quality, therefore more accurate detection may be implemented.
[mark quality control]
According to the solution of the present invention, according to preset laser work parameter (P0, D0), laser etching device 600 is utilized
On product surface formed laser labelling after, if found in quality examination it is off quality, need to laser-induced thermal etching fill
It sets 600 to be adjusted, to generate qualified label.Here P0 represents the preset output general power of laser etching device 600, i.e.,
The output power of the light source of Etaching device 600；And D0 represents its preset power density.The function of usual laser etching device 600
The size for the laser facula that rate density can issue by adjusting Etaching device 600 is adjusted, and laser facula is to pass through tune
Optical imagery-focusing system of whole Etaching device 600 is realized.It obviously can shadow by adjusting laser power and power density
The energy for the laser being irradiated on product surface is rung, and then influences to be formed the quality of the laser point of label.Inspection according to the present invention
Examining system can be used for the quality control to laser labelling.Fig. 4 shows control system according to an embodiment of the invention
Schematic diagram.
The control system includes measuring device 100, control device 200, database 500 and input interface 400, for pair
The running parameter of laser etching device 600 is controlled, and is controlled to realize the quality of the laser labelling of formation.Wherein laser
Etaching device 600 forms laser labelling on producing discharge surface according to preset running parameter (P0, D0).When control device 200 is examined
Measure laser etching device 600 according to preset running parameter be formed by label it is off quality when, control device 200 is then
Output control signal, is adjusted the running parameter of laser etching device 600, running parameter as previously described includes laser-induced thermal etching
The transmission power P0 and power density D0 of device 600, and control signal and can be used for transmission power to laser etching device 600
Or one or two in power density is adjusted.
As previously mentioned, the transmission power of laser directly affects the depth for constituting the laser point of the label, and laser irradiation
Power density not only influence the depth of laser point, have an effect on the sharp keen degree of laser point.By the calculating function of RMS it is found that depth
Degree directly affects RMS value calculated.The laser mark formed on a semiconductor substrate measured in experiment is shown in following figure 5A
Remember the curve synoptic diagram of region RMS value and laser power, the laser labelling region RMS value measured in experiment is shown in following figure 5B
With the curve synoptic diagram of laser power density.
As can be seen from Figure 5A, being stepped up with laser power, the RMS value measured are in the trend quicklyd increase.Example
Such as, 0.85 is increased to from 0.75 for laser power, RMS value calculated increases to about 0.5 from about 0.4, increasing degree
It is 0.1；And when laser power increases to 1 from 0.9, RMS value calculated increases to about 0.8 from about slightly below 0.6, increases
Long amplitude is about 0.2.Meanwhile with the increase of laser power, corresponding quality requirement can be met step by step, as schemed institute
Show, short-term readable requirement can be substantially met when laser power is greater than 0.65；It can when laser power is greater than 0.85
To meet long-term readable requirement；Good readable requirement can be substantially met when laser power is greater than 0.9.It is possible thereby to
See, the irradiation power of device 600 of the laser labelling is related to the threshold value for etching, i.e., according to different quality marks
Suitable laser power can not be identical used by standard.
As can be seen from Figure 5B, being stepped up with laser power density, the RMS value measured are equally in quickly increase
Trend.For example, increasing to 1.2 from 1.1 for laser power density, RMS value calculated increases to about from about 0.37
0.42, increasing degree 0.05；And when laser power density increases to 1.5 from 1.4, RMS value calculated is from about 0.57
Increase to about 0.7, increasing degree 0.13.Meanwhile with the increase of laser power density, can meet step by step corresponding
Quality requirement, as shown, short-term readable requirement can be substantially met when laser power density is greater than 1；When laser function
Rate density can meet long-term readable requirement when being greater than 1.3；It can expire substantially when laser power density is greater than 1.43
The good readable requirement of foot.Therefore, related to the threshold value for etching the power density of the device 600 of the laser labelling.
Therefore, control device 200 is by adjusting one or two in power and power density, so that it may improve and form mark
The dot matrix depth of note with, and then improve label formation quality.Laser etching device 600 is based on received from control device 200
The running parameter that is adjusted simultaneously is irradiated product surface to form label.It can then be scanned by measuring device 100
The label that laser etching device 600 is formed using the laser work parameter of adjustment, and gauging surface forms parameter RMS again.
The RMS value is compared by control device 200 with the threshold value T, to judge to utilize the laser work parameter being adjusted
Irradiation mark whether meet quality requirement.It here can be according to the amplitude being pre-designed, example to the adjustment of laser work parameter
As 0.05 watt of adjustment or density increase by 0.1 times every time to carry out every time.As another example, based on the figure measured in experiment
The curve of 5A, 5B are it is found that being stepped up with laser power, or being stepped up with laser power density, measure
RMS value is in the trend quicklyd increase.Therefore, the amplitude adjusted every time can be gradually reduced.For example, for adjusting laser power P
For, after by secondary adjustment totally 0.1 watt of power adjustment, if RMS value is adjusted close to threshold value T next time
When can set adjustment amplitude to 0.03 watt.Power density is adjusted, process is similar.
In a preferred embodiment of the invention, in order to improve the formation quality of label, control device 200 exports first
Signal is controlled to adjust laser emitting power P.The control signal can be power instruction value or power increasing degree value.But
If when transmission power is adjusted to maximum permissible value PIt is maximumWhen measured RMS value be not able to satisfy threshold value T still, then control device 200
The control signal of output instruction adjustment power density.Laser etching device 600 controls signal based on the power density to adjust it
Internal optical lens system, reduces the size of laser facula, for example hot spot reduces 0.1 times every time as described above, and reduces
Amplitude be alternatively arranged as gradually successively decreasing, until generating satisfactory label.
In above example, Etaching device 600 is calculated by way of adjusting laser power or power density step by step
Running parameter, finally to determine suitable running parameter, i.e. PIt calculatesWith DIt calculates.In another preferred embodiment of the invention, it is
Real laser illumination is avoided passing through to detect whether the running parameter being adjusted is able to satisfy quality requirement, as shown in figure 4, this hair
Bright control device includes a simulation engine, and the laser work parameter for meeting quality requirement is determined under simulation model.This is imitative
One or two in power and power density that true engine passes through the emulation adjustment laser meets threshold value come simulation calculation
The surface forms parameter, and one or two in the power and power density of the laser being adjusted is supplied to laser erosion
Engraving device 600.
According to the preferred embodiment, simulation engine from measuring device 100 receive based on current operating parameters (power P 0 and
Power density D0) under measuring device 100 obtain data Z1, Z2 ... Zn and measuring device RMS value calculated (are denoted as
RMS0).The current running parameter (P0, D0) of laser etching device 600 be with the quality requirement of label, product characteristic (such as
Material, storage environment etc.) it is stored in association in database 500.Simulation engine can be based on threshold value T and RMS0It determines
RMS0With the range-amplitude display of T, with Δ=T/RMS0It indicates.Subsequent simulation engine is configured to execute following calculating:
1, only Simulation of SAR power image mode:
Simulation engine is estimated to form the point of label when improving β times in the output power of laser etching device 600
Battle array data, i.e. the simulation data power P of laser etching device 600Emulation=β P0, β=k1 Δ here, parameter k1 can be with here
It is empirical value, can measures to obtain in practice, this is related with factors such as materials.Such as the product surface for the first material,
When k1=1 is such as set actual measurement to RMS and T still have deviation, then using indicate the deviation coefficient k1 is modified, make
For the k1 value of the first material product.Different product materials has different k1 values.For the sake of simplicity, in a reality of the invention
It applies in example, sets 1 for k1, i.e. β=Δ.Since laser point depth data Z is directly related with the output power of laser, it is
Simplify and calculate, each dot array data can be estimated as to Δ Z1, Δ Z2 ... Δ Zn.Due to only adjusting laser power at this time,
The data volume n that presumptive area scanning sample obtains is believed that and is remained unchanged.Subsequent simulation engine utilizes the data estimation estimated
Surface forms parameter RMSP, and judge the RMSPWhether value meets threshold value T.If it is satisfied, then recording current simulated power
PEmulation, power density D0 and parameter RMSP。
If conditions are not met, then to the output power P of emulationEmulationFurther weighting, with and again estimate surface formation parameter
RMSP, until meeting threshold value T.By describing above in conjunction with Fig. 5 A it is found that due to the increase with laser power, RMS value will be quick
Ground increases.Therefore in the weighting coefficient of the output power of design and simulation, the increasing degree of the weighting coefficient of different level can be by
It is decrescence few.
2, only power density simulation model:
Simulation engine estimates the hits in the output power density D0 of laser etching device 600 when improving Δ times
According to.This can be by keeping the constant optical lens system for changing Etaching device 600 of laser power so as to adjust output laser
The size of hot spot is realized.
In this mode, work as RMS0When range-amplitude display with T is Δ, hot spot can be reduced λ times.Here λ=k2 Δ.Light
Spot, which reduces λ times, necessarily causes power density to improve λ times, i.e. DEmulation=λ D0, therefore the sampling depth data value Z led can also be mentioned
It is λ times high.Meanwhile although hot spot becomes smaller, due to needing to etch the onesize label positioned at same region, to utilization
The label that small light spot obtains is carried out the data volume that optical scanner obtains and carries out optical scanner with to the label obtained using large spot
Obtained data volume can remain essentially identical or in certain error range.The numerical value of k2 equally can be empirical data,
For simplicity, in this example, settable λ=Δ.Further, since under the mode for only adjusting laser output power P, same shadow
Ring power density D, therefore k1, k2 here can be set to it is identical.
The sample magnitude under this only power density simulation model in presumptive area is denoted as λ Z1, λ Z2 ... as a result,
λ·Zn。
Subsequent simulation engine utilizes emulation data λ Z1, λ Z2 ... λ Zn estimates that surface forms parameter RMSD, and sentence
Break the RMSDWhether value meets threshold value T.If it is satisfied, then recording current simulated power P0, DEmulationWith parameter RMSD.If no
Meet, then to the output power density D of emulationEmulationFurther weighting, and estimate that surface forms parameter RMS againD, until meeting threshold
Value T.By describing above in conjunction with Fig. 5 B it is found that due to the increase with laser power density, RMS value will rapidly increase.Therefore
In the weighting coefficient of the output power density of design and simulation, the increasing degree of the weighting coefficient of different level can be gradually decreased.
3, hybrid simulation mode:
As previously mentioned, being limited to laser output rated power, the real output of Etaching device 600 cannot infinitely increase
Greatly, even not up to rated power, but be limited to working environment, for example, under the conditions of not having sufficient air draft it is excessively high
Laser output power will lead to product surface during laser-induced thermal etching and carbonize, the adsorbing powder dust of generation is in the label just etched
On, therefore affect mark quality；And these dust cannot be discharged in time can also pollute optical lens system, and then affect
Laser activity plays.The excessively high temperature for also resulting in product surface generation of same power density is high, therefore there is damage product
It may.Therefore the hybrid simulation mode of Joint regulation laser output power and laser facula is additionally provided in the present embodiment.It is imitative
True engine carries out preset minimum weight w1, w2 adjustment to initial output power P0 and to spot size simultaneously, rises to be easy
See, therefore, the sampled data under the hybrid simulation mode can be estimated as Δ Z1, Δ Z2 ... to settable w1w2=Δ
Δ·Zn。
Subsequent simulation engine to emulation data Δ Z1, Δ Z2 ... Δ Zn calculates RMSMixing, and judge the RMSMixingValue
Whether threshold value T is met.If RMS calculatedMixingValue meets threshold value T, then records current simulated power PMixing=w1P0
And power density DMixing=w2D0 and parameter RMSMixing.If conditions are not met, then to the simulated power w1P0 and function of emulation
Rate density w2D0 is further weighted, and estimates that surface forms parameter RMS againMixingTo meeting threshold value T.
Simulation engine can be further configured to that the priority orders of above-mentioned three kinds of simulation models are arranged, such as invest only function
Rate simulation model is highest priority, and hybrid simulation mode is lowest priority.Therefore, full in the simulation result of high priority
When sufficient quality requirement, simulation engine exports control signal to Etaching device 600 to adjust laser work parameter, and after no longer executing
The simulation process in face.But meanwhile simulation engine also further monitors the execution of each simulation model, avoids the occurrence of excessively high power
P output or power density D.For this purpose, maximum power P is arranged in simulation engineIt is maximumWith maximal density DIt is maximum.When under only power mode
Simulated power P reaches or approaches PIt is maximumWhen, if RMS value does not reach T yet, stop that only power mode is handled and to enter only power close
Spend simulation model or hybrid simulation mode.As an example, if the RMS value of the simulation calculation under only power mode such as with
Threshold value T is then directly entered hybrid simulation mode apart from larger.Under hybrid simulation mode, it is maintained at imitative under only power mode
The P really calculatedEmulationIt is constant to adjust spot size.
The laser work parameter P and D that obtain meeting quality requirement under simulation model are supplied to laser-induced thermal etching by simulation engine
Device 600, and utilize the corresponding parameter in the determining running parameter more new database 500 of emulation.Laser device 600
Label is formed on product surface using the simulation work parameter that simulation engine provides.In an alternative embodiment, detection can be passed through
The quality of label determines whether the parameter of simulation model is able to satisfy quality requirement.
Fig. 6 shows the method flow diagram of the formation quality of the control laser labelling of the above embodiment of the present invention.
As shown in fig. 6, control device 200 receives user's input, user input by input interface 300 in step 601
Including product type, desired qualities etc..Control device 200 inputs searching database 500 according to user, to extract preset
Running parameter, i.e. laser irradiation power P 0 and power density D0, and these running parameters are supplied to laser etching device 600.
In step 602, laser etching device 600 forms laser using preset running parameter P0 and D0 product irradiation surface
Label.As an example, the laser facula size of the output of laser etching device 600 can be set using power density D0.
In step 603, optical scanner is carried out to the laser labelling formed on product surface, is produced by interference imaging
At least part of sampling laser point depth data Z of the label on product surface in presumptive area1,Z2,Z3…Zn.Then,
Z based on these data1,Z2,Z3…ZnThe surface for calculating the label forms parameter RMS.
In step 604, judge whether the RMS calculated in step 603 meets threshold value T.Work as if it is satisfied, then showing to utilize
The laser etching device 600 of preceding running parameter can generate the label to conform to quality requirements, then export in step 605 up-to-standard
Instruction.If RMS calculated is unsatisfactory for threshold value T, carried out in running parameter of the step 606 to laser etching device 600
Adjustment.In one embodiment, the adjustment of the running parameter include based on RMS at a distance from threshold value T i.e. Δ, to calculate laser erosion
The output adjustment power P of engraving device 600It calculatesOr adjustment power density DIt calculates, wherein PIt calculates=P0+ Δ SP, wherein SPIndicate adjustable
Whole minimum radius；And laser facula can be reduced Δ times when adjusting power density.In another embodiment, the running parameter
Adjustment carry out the simulated power and spot size that simulation calculation meets threshold requirement including the use of simulation engine.In an example
In, using the running parameter of calculating come the respective record in more new database.
Preferably, step 606 further includes monitoring processing, for the output power (power P including calculating to adjustmentIt calculatesOr
Simulated power PEmulation) and adjustment power density (including DIt calculatesWith DEmulation) be monitored, it is excessively high to avoid output power or power density
And damage the possibility of product.
The running parameter that laser etching device is adjusted using control system of the invention, can control laser etching device
Generate and meet the laser labelling of quality requirement, thus avoid product quality from not conforming to format and return to and caused by waste.
Although being described by above by preferred embodiment to the present invention, it can be appreciated that the present invention can also be by by machine
Device execution is stored on machine-readable media instruction, to implement according to the method for the present invention.In addition, detection system according to the present invention
System and the control system for adjusting laser etching device may include the storage system and use for storing executable instruction
In being configured to realize the processing system of method of the invention by executing described instruction.Each operation or function is described herein
In the degree of energy, they can be described or defined as software code, instruction, configuration and/or data.Implementation described herein
The software content of example can be provided via the product for wherein storing content.Machine readable storage medium can be such that machine executes
Described function or operation, and be stored as can be by machine (for example, calculating equipment, electronic system etc.) access including any
The mechanism of the information of form, such as recordable/non-recordable medium is (for example, read-only memory (ROM), random access memory
(RAM), magnetic disk storage medium, optical storage media, flash memory device etc.).
In addition, the flow chart as shown in herein provides the example of the sequence of various processes movement.Although with specific sequence
Column or order are shown, but unless point out, otherwise can adjust the order of movement.Therefore, the embodiment of diagram should be only interpreted as
Example, and process can be performed in a different order, and some movements can be performed in parallel.In addition, in embodiments may be used
To omit one or more movements；It therefore, is not to require all movements in each example.Other process streams are can
Can.
Each component described herein can be the device for executing described operation or function.It is described herein
Each component includes software, hardware or these combination.Component can be implemented as software module, hardware module, specific use
It is hardware (for example, specialized hardware, specific integrated circuit (ASIC), digital signal processor (DSP) etc.), embedded controller, hard
Connection circuit etc..
It, can be in the case where without departing from the scope thereof to the implementation of present invention disclosed other than described herein
Example and realization carry out various modifications.Therefore, the diagram and example of this paper should be explained in the sense that exemplary rather than limitation.This
The range of invention should refer to appended claims only to measure.
Claims (32)
1. a kind of method for examining the formation quality of laser labelling on product surface, wherein the laser labelling is lost using laser
Engraving device is formed on the surface according to preset laser work parameter, comprising:
Read at least part of numerical characteristics of the label and the label according to the numerical characteristics computational representation at least
The surface of the formation quality of a part forms parameter, wherein the numerical characteristics include forming the depth of each laser point of the label
Degree；And
Judge that the surface forms whether parameter meets threshold value, to verify the mark quality, wherein joining when the surface is formed
Number is when being unsatisfactory for the threshold value, then it is unqualified to verify the label,
Wherein the threshold value be desired mark quality based on user's input and at least one of product attribute and from data
It is selected in library, the database is for storing be mutually related threshold value, mark quality and product attribute, wherein the product category
Property includes the material of the product surface or the storage environment of product.
2. method as claimed in claim 1, wherein the laser work parameter is related to the threshold value, including for etching the mark
The output power and power density of the laser of note, wherein power density refers to the laser power under unit area.
3. such as the method for claims 1 or 2, wherein the surface forms root mean square (RMS) value that parameter is the depth.
4. method as claimed in claim 3, the read step reads at least one of the label including the use of interferometry
The depth information of each laser point in point, wherein each laser point provides one or more depth informations.
5. method as claimed in claim 4, wherein wherein the threshold value is selected from least one of following: corresponding to the label
The second best in quality first threshold, corresponding to the long-term readable second threshold of the label and to correspond to the label short-term readable
Third threshold value.
6. a kind of system for examining the formation quality of laser labelling on product surface, wherein the laser labelling is lost using laser
Engraving device is formed on the surface according to preset laser work parameter, comprising:
Measuring device, for reading at least part of numerical characteristics of the label and according to the numerical characteristics computational representation institute
The surface for stating the formation quality of label forms parameter, wherein the numerical characteristics include forming the depth of each laser point of the label
Degree；
Control device, for judging that the surface forms whether parameter meets threshold value, to verify the mark quality, wherein working as institute
It states surface and forms parameter when being unsatisfactory for the threshold value, then it is unqualified to verify the label；
Database, for storing be mutually related threshold value, mark quality and product attribute, wherein the product attribute includes institute
State the material of product surface or the storage environment of product；
At least one of desired mark quality that wherein control device is inputted based on user and product attribute and from institute
It states selection in database and applies the threshold value.
7. system as claimed in claim 6, wherein the laser work parameter is related to the threshold value, including for etching the mark
The power and power density of the laser of note, wherein power density refers to laser power under unit area.
8. such as the system of claim 6 or 7, wherein the surface forms root mean square (RMS) value that parameter is the depth.
9. system as claimed in claim 8, measuring device therein is laser interferometry instrument, each sharp in the label for measuring
The numerical characteristics of luminous point, wherein each laser point provides one or more depth informations.
10. system as claimed in claim 9, wherein wherein the threshold value is selected from least one of following: corresponding to the label
The second best in quality first threshold, corresponding to the long-term readable second threshold of the label and to correspond to the label short-term readable
Third threshold value.
11. a kind of method of the formation quality of laser labelling on control product surface, wherein the laser labelling is to utilize laser
Etaching device irradiates what the surface was formed according to laser work parameter, this method comprises:
Read the numerical characteristics of laser point and the mark according to the numerical characteristics computational representation at least part of the label
The surface of at least part of formation quality of note forms parameter, wherein the numerical characteristics include forming each of the label to swash
The depth of luminous point；
Judge that the surface forms whether parameter meets threshold value, when the surface, which forms parameter, is unsatisfactory for the threshold value, then adjusts
The whole laser work parameter；
Wherein the laser work parameter, threshold value are at least one of mark quality based on expectations and product attribute and from numbers
According to what is selected in library, the database is for storing be mutually related laser work parameter, threshold value, mark quality and product category
Property, wherein the product attribute includes the material of the product surface and the storage environment of product.
12. such as the method for claim 11, wherein the laser work parameter is related to the threshold value, including described for etching
The laser power or power density of label, wherein power density refers to the laser power under unit area.
13. further comprising such as claim 12 method:
The laser work parameter of the adjustment is generated under simulation model, wherein under the simulation model, adjust by emulation
One or two in the power and power density of the laser meets the surface of the threshold value and forms parameter to calculate；
Using one or two in the power and power density of the laser through emulation adjustment.
14. such as the method for claim 11, wherein updating the database using the laser work parameter being adjusted
In corresponding laser work parameter.
15. such as the method for one of claim 11-14, wherein the surface forms the root mean square (RMS) that parameter is the depth
Value.
16. such as the method for claim 15, wherein the threshold value is selected from least one of following: corresponding to the mark quality
Good first threshold, corresponding to the long-term readable second threshold of the label and corresponding to the label short-term readable the
Three threshold values.
17. such as the method for claim 16, wherein scanning each laser at least part of the label using interferometry
The depth information of point, wherein each laser point provides one or more depth informations.
18. as claim 11 method, wherein adjust the laser work parameter include increase according to scheduled increment it is sharp
Optical power or power density.
19. such as the method for claim 13, further comprise the laser work parameter is adjusted according to scheduled priority, and
Switch simulation model when reaching predetermined condition.
20. a kind of system for controlling laser etching device, the laser etching device is according to laser work parameter, on product surface
Laser labelling is formed, which includes:
Measuring device, at least part by reading the label numerical characteristics of laser point and according to the numerical characteristics based on
The surface for calculating at least part of formation quality for characterizing the laser labelling forms parameter, wherein the numerical characteristics include shape
At the depth of each laser point of the label；
Control device is verified the quality of the label for judging that the surface forms parameter and whether meets threshold value, and is worked as
When the surface formation parameter is unsatisfactory for the threshold value, then the laser work parameter is adjusted；
Database, for storing be mutually related laser work parameter, threshold value, mark quality and product attribute, wherein described
Product attribute includes the material of the product surface and the storage environment of product；
Wherein at least one of control device mark quality based on expectations and product attribute and from the database
Select laser work parameter and threshold value.
21. such as the system of claim 20, wherein the laser work parameter is related to the threshold value, including described for etching
The power and power density of the laser of label, wherein power density refers to the laser power under unit area.
22. such as the system of claim 21, wherein the control device further comprises a simulation engine, in emulation mould
The laser work parameter of the adjustment is generated under formula, wherein under the simulation model, the function of the laser is adjusted by emulation
One or two in rate and power density is carried out the surface formation parameter that simulation calculation meets the threshold value；
Wherein the control device provides one or two in the power and power density of the laser through emulation adjustment
To the laser etching device.
23. further comprising such as the system of one of claim 20-22:
Input interface, for providing the desired qualities and product attribute information that stay in the label formed on product.
24. such as the system of claim 20, wherein the control device is using the laser work parameter being adjusted come more
Corresponding laser work parameter in the new database.
25. such as the system of claim 24, wherein the surface forms root mean square (RMS) value that parameter is the depth.
26. such as the system of claim 25, wherein the threshold value is selected from least one of following: corresponding to the mark quality
Good first threshold, corresponding to the long-term readable second threshold of the label and corresponding to the label short-term readable the
Three threshold values.
27. such as the system of claim 26, measuring device therein is laser interferometry instrument, each in the label for measuring
The numerical characteristics of laser point, wherein each laser point provides one or more depth informations.
28. such as the system of claim 22, wherein the control device adjusts the laser further according to scheduled priority
Running parameter, and switch simulation model when reaching predetermined condition.
29. a kind of laser labelling quality detecting system, comprising:
It is stored with the memory of readable instruction；
Processor, the method for being configured to realize one of claim 1-5 by executing described instruction.
30. a kind of machine readable media is stored thereon with instruction, want machine perform claim when wherein the instruction is executed by machine
The method for seeking one of 1-5.
31. a kind of laser labelling quality control system, comprising:
It is stored with the memory of readable instruction；
Processor, the method for being configured to realize one of claim 11-19 by executing described instruction.
32. a kind of machine readable media is stored thereon with instruction, want machine perform claim when wherein the instruction is executed by machine
The method for seeking one of 11-19.
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