CN108465940A - Laser labelling detecting system and its control method - Google Patents
Laser labelling detecting system and its control method Download PDFInfo
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- CN108465940A CN108465940A CN201810250440.0A CN201810250440A CN108465940A CN 108465940 A CN108465940 A CN 108465940A CN 201810250440 A CN201810250440 A CN 201810250440A CN 108465940 A CN108465940 A CN 108465940A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The present invention provides the method and system of quality testing and the control of laser labelling, wherein the laser labelling is formed using laser etching device according to laser work parameter on said surface, method quality determining method includes：It reads at least part of numerical characteristics of the label and parameter is formed according to the surface of at least part of formation quality marked described in the numerical characteristics computational representation；Judge that the surface forms whether parameter meets threshold value, to verify the mark quality, wherein when surface formation parameter is unsatisfactory for the threshold value, then it is unqualified to verify the label.According to the present invention, the readable property amount of laser labelling can not only be quantified, it is realized convenient for machine and can in high volume repeat to detect, and erroneous judgement can be made to avoid the influence due to ambient light and to laser labelling quality, may be implemented more accurately to detect.
Description
Technical field
The present invention relates to laser labelling detection and control technologies.
Background technology
Present laser etching technique is used widely.Such as come in the semiconductor industry to product usually using laser
Surface is etched, to generate people or machine readable label, such as product ID number, style number, bar code or two on the surface
Tie up code etc..And these numbers or code are extremely important for product, it is therefore desirable to ensure that these labels are persistently clear readable.So
And actually have the readability that several factors influence these laser labellings, such as laser power, label where material or
The characteristic etc. of product.If laser labelling pattern is beaten too shallow, these, which are marked with, to desalinate over time.
Currently, generally use visually detects the quality and readability of the label of laser-induced thermal etching, it is apparent that naked eyes detection office
It is limited to everyone subjective judgement and can be by ambient light, the influence for checking angle etc..Therefore simultaneously using visual inspection
It is not objective also and unreliable.Although the careful generation quality for checking label also can be carried out by microscope, but still process is cumbersome, and
And it cannot still be detached from naked eyes and judge.
Invention content
The present invention provides a kind of method and system of the improved generation quality for checking laser labelling, passes through computational representation mark
The parameter of the formation quality of note simultaneously judges whether to meet preassigned to realize, microscope is judged or utilized so as to avoid naked eyes
The judgment bias of subjectivity and readability caused by judging.
And then the present invention provides a kind of method and system for the generation quality promoting laser labelling, it can be by means of calculating
Characterization label is formationed quality parameter, be unsatisfactory for predetermined standard time, may be adjusted for etching label laser-induced thermal etching fill
The parameter set, such as laser power or power density, to improve the quality of the label then etched.
According to one aspect of the present invention, a kind of method for examining the formation quality of laser labelling on product surface is provided,
The wherein described laser labelling is formed using laser etching device according to preset laser work parameter on said surface, packet
It includes：Read at least part of numerical characteristics of the label and according at least one marked described in the numerical characteristics computational representation
The surface for being partially forming quality forms parameter；And judge that the surface forms whether parameter meets threshold value, described in verification
It is unqualified then to verify the label wherein when surface formation parameter is unsatisfactory for the threshold value for mark quality.
According to one aspect of the present invention, a kind of system for examining the formation quality of laser labelling on product surface is provided,
The wherein described laser labelling is formed using laser etching device according to preset laser work parameter on said surface, packet
It includes：Measuring device, at least part of numerical characteristics for reading the label and according to the numerical characteristics computational representation institute
The surface for stating the formation quality of label forms parameter；Control device, for judging that the surface forms whether parameter meets threshold value,
To verify the mark quality, wherein when surface formation parameter is unsatisfactory for the threshold value, then verifies the label and do not conform to
Lattice.
According to one aspect of the present invention, a kind of method controlling the formation quality of laser labelling on product surface is provided,
The wherein described laser labelling irradiates the surface according to laser work parameter using laser etching device and is formed, this method packet
It includes：It reads the numerical characteristics of laser point at least part of the label and is marked according to described in the numerical characteristics computational representation
At least part of formation quality surface formed parameter；Judge that the surface forms whether parameter meets threshold value, when described
When surface formation parameter is unsatisfactory for the threshold value, then the laser work parameter is adjusted.
Preferably, the laser work parameter is related to the threshold value, includes the laser power for etching the label
Or power density, wherein power density refers to the laser power under unit area.
Preferably, the laser work parameter of the adjustment is generated under simulation model, wherein under the simulation model,
The table for meeting the threshold value is calculated by emulating one or two in the power and power density that adjust the laser
Face forms parameter；Using one or two in the power and power density of the laser through emulation adjustment.
In addition, this method also adjusts the laser work parameter further according to scheduled priority, and it is predetermined reaching
Switch adjustment modes when condition.Here priority orders could be provided as preferentially adjusting power, followed by adjust power density,
It is finally the two Mixed adjustment.Here predetermined condition includes：Maximum power limit value, the optical lens system of laser etching device
Attainable minimum light spot of institute etc..Wherein then stop adjusting power when adjusting power and reaching maximum power limit value, turns to adjustment
Power density；And then stop adjusting power density when power density adjustment reaches minimum light spot, and enter Mixed adjustment pattern.
According to one aspect of the present invention, a kind of system of control laser etching device is provided, which presses
According to laser work parameter, laser labelling is formed on product surface, which includes：Measuring device, for reading the label
At least part in laser point numerical characteristics and according at least one of laser labelling described in the numerical characteristics computational representation
The surface for the formation quality divided forms parameter；Controller is verified for judging that the surface forms parameter and whether meets threshold value
The quality of the label, and when surface formation parameter is unsatisfactory for the threshold value, then adjust the laser work parameter.
Description of the drawings
Fig. 1 is the laser labelling quality detecting system schematic diagram shown according to one embodiment；
Fig. 2 shows an illustrative laser labelling Electronic Speculum imaging schematic diagrams；
Fig. 3 shows the flow chart of laser labelling quality determining method；
Fig. 4 shows the laser etching device control system schematic diagram according to one embodiment；
Fig. 5 shows that the surface of an illustrative laser labelling forms the relationship of parameter and laser power and power density
Schematic diagram；
Fig. 6 shows the flow chart of the running parameter of the adjustment laser etching device according to one embodiment.
Specific implementation mode
The preferred embodiment of the disclosure is more fully described below with reference to accompanying drawings.Although showing the disclosure in attached drawing
Preferred embodiment, however, it is to be appreciated that may be realized in various forms the disclosure without the embodiment party that should be illustrated here
Formula is limited.On the contrary, these embodiments are provided so that the disclosure is more thorough and complete, and can be by the disclosure
Range is completely communicated to those skilled in the art.
In following discloses, for etching the ID that laser labelling such as set of number is constituted on semiconductor product surface
It is explained.It is that the laser dot-matrix that product surface is formed is irradiated to by laser facula using the label that laser etching device is etched
It constitutes, two-dimensional pattern feature of these dot matrix in addition to representing etched label, and these dot matrix also have depth characteristic.It is aobvious
So, the depth of each laser point then reflects the irradiation power of present laser hot spot in dot matrix, usually will be under unit area swash
Luminous power is referred to as power density.The present invention is using the feature realization of these dot matrix to the quality testing and realization of label to laser
The control of the running parameter of Etaching device, running parameter here includes laser power or power density.
【Mark quality inspection】
Mark quality detection scheme according to the ... of the embodiment of the present invention then fully utilizes the three-dimensional feature attribute of dot matrix, that is, fills
Consider the persistence and readable influence of laser dot-matrix density and depth to label, reticular density reflection here with dividing
The continuity of label.
Fig. 1 shows the schematic diagram of the laser labelling detecting system of one embodiment of the invention.As shown, the detecting system
Including measuring device 100, control device 200 and input interface 300 and output interface 400.
Measuring device 100 is used to carry out optical scanner to the laser labelling generated on product surface to be checked, to carry
Take the depth information of the upper each laser dot-matrix of label.Specifically, for the dedicated label of product, measuring device 100 can be with scanning strip
Scheduled region on markd surface, to extract at least part of depth characteristic of the label, which can
To be unit area or unit length, or arbitrary other areas or length, to obtain n numerical value Z1, Z2, Z3 ... ... Zn,
Wherein Z represents depth.It is readily appreciated that, the quantity of scanning numerical value n here depends on optical scanner precision.Such as utilizing
For the scanner of principle of optical interference, imaging precision is significantly larger than the size of laser facula, therefore each hot spot is shone
It penetrates for each laser point of generation, can scan to obtain multiple data Z, i.e., the quantity of numerical value n is much big in scheduled region
In the quantity of the laser point of the practical irradiation in the presumptive area；But for low optical scanner precision, it is understood that there may be
Quantity of the quantity of numerical value n close to the laser point of the practical irradiation in the presumptive area.Obvious n values are bigger, can more reflect mark
The continuity Characteristics of note.As an example, can using the interferometer based on laser interference principle as measuring device 100 come
Obtain these numerical value.
Then, measuring device 100 is configured to the formation matter of these labels of these sample magnitude computational representations
The parameter of amount calculates the root-mean-square value RMS of these numerical value in one embodiment of the invention.Here root mean square refers to passing through
Interferometer is scanned all laser point altitude informations in the region obtained in presumptive area and subtracts region all the points height
The root mean square of the difference of mean value is spent, which can effectively reflect that the fluctuating situation of the specific region laser labelling, such as overall depth connect
Continuous property etc., and effectively avoid the defect for only ignoring laser labelling continuity using only depth data to readability contribution.Assuming that
The average value of all point heights in the region is ZavgThe then RMS={ [(Z in the region1–Zavg)2+(Z2–Zavg)2+(Z3–Zavg)2+…+
(Zn–Zavg)2]/n}1/2。
Control device 200 determines the quality of the label using the RMS value that measuring device 100 is calculated.Specifically, it controls
The RMS value of calculating can be compared by device 100 with a threshold value T.When RMS is greater than or equal to T, then show the mark currently formed
Remember that quality is good, and when RMS is less than T, then show that the mark quality currently formed is poor.And then control device 200 can be by defeated
The output of outgoing interface 300 indicates the information of the quality of the label, such as sound or graphical representation etc..
Although in the present embodiment, surface forms parameter RMS and is calculated by measuring device 100, it is apparent that can also be by
Control device 200 receives scan data Z1, Z2, Z3 from measuring device ... Zn simultaneously completes corresponding parameter calculating.
In the example of the present invention, as the threshold value T of the quality of requirements, established using a reference mark by testing
Play the threshold value T that laser labelling readability surface forms parameter RMS value.Such as can choose either human eye still by machine all
It is clear readable laser labelling as reference mark, its RMS value can be calculated based on the reference mark, and using this value as testing
Demonstrate,prove the threshold value T of mark quality.
In addition it is also necessary to it is noted that due to product material, the factor of storage condition, the label etched may be with
The passage readability of time can be deteriorated.Such as usually etching the semiconductor product of label on it, semiconductor
Package substrate skin-material is mostly high molecular polymer, it is discontinuous if there is laser labelling situations such as, in storage temperature humidity
Under the action of variation, the readability of laser labelling can further be deteriorated.As shown in Figure 2 A, laser labelling shown in ' M ' is just
Scanning electron microscopic picture when etching is completed, it is clear that it is a good label, it can be in this, as reference mark.And for Fig. 2 B's
Label, then belong to undesirable laser labelling, and laser labelling therein shows as poor continuity, although for human eye and machine
It is read out, but as shown in Figure 2 C, the laser of Fig. 2 C is imprinted as scanning electron microscope (SEM) photograph of the label of Fig. 2 B after storing 3 months
The readability of piece, the laser labelling is excessively poor, and conventional machines vision and human eye are all unreadable.Therefore, laser labelling is carried
Material is different, environment is different, may cause the requirement to mark quality different, therefore be preferably also and want in given threshold T
In view of the influence of Material texture, environment (such as temperature or humidity etc.) etc..In addition, it can be appreciated that due to material etc., swash
The size for the laser point that the laser facula that photetching engraving device 600 is sent out is formed with practical irradiation is not identical, is here
Because laser causes material surface to deform, caused by laser point obscure boundary Chu of formation etc..
In addition, even with same material, there is the different quality demands to laser labelling in practice.Cause
For different quality requirements, different threshold value T is arranged in one embodiment of the invention in this.For example, for requiring to swash
No matter signal is good and the readable quality requirement not being decreased obviously is i.e. permanent readable in short term for a long time, it can be arranged and well may be used
The property read threshold value T1；For requiring laser labelling readable and long-term storage readability is declined but still readable quality requirement,
Long-term readable threshold value T2 can be set；And can become unreadable for storing laser labelling for a long time, then short-term readability can be set
Threshold value T3.Therefore, in force, different threshold value T can be selected for different quality requirement control devices 200.
Input interface 400 can be used for inputting user demand parameter for detecting system.User can be inputted by input interface 300
The desired qualities of the label of laser-induced thermal etching are needed, such as permanent readable, long-term readable or readable etc. in short term.Control device 200
Corresponding threshold value T is selected according to desired qualities input by user.Optionally, user can also be further by input interface 300
The product type of label to be etched is inputted, control device 200 is according to desired qualities input by user, product type come further true
Fixed corresponding threshold value T.
In one embodiment, alternative threshold value T can be stored in control device 200.In another embodiment
In, which can further comprise a database 500.It can will be for the threshold of not quality requirement, different product type
Value T and quality requirement, product type etc. are stored in association in database 500.Usual product type and the material with product
And storage or use environment it is directly related.Control device 200 can call database according to user's input, be retrieved from database
Go out matched threshold value T.It is easy to maintain to be stored in being advantageous in that for database 500.
Fig. 3 shows the flow chart of laser labelling quality determining method according to the above embodiment of the present invention.As shown,
In step 301, user's input is received with the product type of the quality requirement of determining laser labelling and current etch laser labelling.
In step 302, the quality standard for the laser labelling that current etch is determined according to the quality requirement and product type, i.e. threshold value
T。
Then in step 303, the product surface to being formed with laser labelling carries out optical scanner, to obtain the pre- of the label
Determine depth data Z1, Z2, the Z3 of the laser point in region ... Zn.
In step 304, the RMS value of the formation quality of these labels, the i.e. presumptive area are characterized based on these numerical computations
RMS={ [(Z1–Zavg)2+(Z2–Zavg)2+(Z3–Zavg)2+…+(Zn–Zavg)2]/n}1/2, wherein all point heights in the region
Average value be Zavg。
In step 305, the matter of the label is determined based on the RMS value calculated and threshold value T determining in step 302
Amount.When RMS is greater than or equal to T, then show that the mark quality currently formed is good, and when RMS is less than T, then show current
The mark quality of formation is poor.And export the information for the quality for indicating the label, such as sound or graphical representation etc. in step 306.
It is to be herein pointed out above steps and sequence are not necessarily all necessary.For example, for single product mark
Note or quality requirement, then step 301 be dispensed with 302, wherein threshold value can be stored in control device 200.Alternatively,
The step 302 of threshold value can also execute after the step 304.
Compared with the means of existing detection laser labelling quality, scheme according to the present invention not only can be to laser labelling
Readable property amount quantified, realized convenient for machine and can in high volume repeat to detect, and can be to avoid due to ambient light
The influence of line and erroneous judgement is made to laser labelling quality, therefore may be implemented more accurately to detect.
【Mark quality controls】
Scheme according to the present invention utilizes laser etching device 600 according to preset laser work parameter (P0, D0)
On product surface formed laser labelling after, if found in quality examination it is off quality, need to laser-induced thermal etching fill
It sets 600 to be adjusted, to generate qualified label.Here P0 represents the preset output general power of laser etching device 600, i.e.,
The output power of the light source of Etaching device 600；And D0 represents its preset power density.The work(of usual laser etching device 600
The size of the laser facula that rate density can send out by adjusting Etaching device 600 is adjusted, and laser facula is to pass through tune
Optical imagery-focusing system of whole Etaching device 600 is realized.It obviously can shadow by adjusting laser power and power density
The energy for being irradiated to the laser on product surface is rung, and then influences to be formed the quality of the laser point of label.Inspection according to the present invention
Examining system can be used for the quality control to laser labelling.Fig. 4 shows control system according to an embodiment of the invention
Schematic diagram.
The control system includes measuring device 100, control device 200, database 500 and input interface 400, for pair
The running parameter of laser etching device 600 is controlled, to realize the quality control to the laser labelling of formation.Wherein laser
Etaching device 600 forms laser labelling according to preset running parameter (P0, D0) on production discharge surface.When control device 200 is examined
Measure laser etching device 600 according to preset running parameter be formed by label it is off quality when, control device 200 is then
Output control signal, is adjusted the running parameter of laser etching device 600, running parameter as previously described includes laser-induced thermal etching
The transmission power P0 and power density D0 of device 600, and control signal and can be used for transmission power to laser etching device 600
Or one or two in power density is adjusted.
As previously mentioned, the transmission power of laser directly affects the depth for the laser point for constituting the label, and laser irradiation
Power density not only influence the depth of laser point, have an effect on the sharp keen degree of laser point.By the calculating function of RMS it is found that depth
Degree directly affects calculated RMS value.The laser mark formed on a semiconductor substrate measured in experiment is shown in figure below 5A
Remember the curve synoptic diagram of region RMS value and laser power, the laser labelling region RMS value measured in experiment is shown in figure below 5B
With the curve synoptic diagram of laser power density.
As can be seen from Figure 5A, being stepped up with laser power, the RMS value measured are in quick increased trend.Example
Such as, 0.85 is increased to from 0.75 for laser power, the RMS value calculated increases to about 0.5 from about 0.4, increasing degree
It is 0.1；And when laser power increases to 1 from 0.9, the RMS value calculated increases to about 0.8 from about slightly below 0.6, increases
Long amplitude is about 0.2.Meanwhile with the increase of laser power, corresponding quality requirement can be met step by step, as schemed institute
Show, short-term readable requirement can be substantially met when laser power is more than 0.65；It can when laser power is more than 0.85
To meet long-term readable requirement；Good readable requirement can be substantially met when laser power is more than 0.9.It is possible thereby to
See, the irradiation power of device 600 of the laser labelling is related to the threshold value for etching, i.e., according to different quality marks
Suitable laser power used by standard can differ.
As can be seen from Figure 5B, being stepped up with laser power density, the RMS value measured is equally in quickly increased
Trend.For example, increasing to 1.2 from 1.1 for laser power density, the RMS value calculated increases to about from about 0.37
0.42, increasing degree 0.05；And when laser power density increases to 1.5 from 1.4, the RMS value that is calculated is from about 0.57
Increase to about 0.7, increasing degree 0.13.Meanwhile with the increase of laser power density, can meet step by step corresponding
Quality requirement, as shown, short-term readable requirement can be substantially met when laser power density is more than 1；When laser work(
Rate density can meet long-term readable requirement when being more than 1.3；It can expire substantially when laser power density is more than 1.43
The good readable requirement of foot.Therefore, the power density of the device 600 for etching the laser labelling is related to the threshold value.
Therefore, control device 200 is by adjusting one or two in power and power density, so that it may form mark to improve
The dot matrix depth of note with, and then improve label formation quality.Laser etching device 600 is based on receiving from control device 200
The running parameter that is adjusted simultaneously is irradiated product surface to form label.It can then be scanned by measuring device 100
The label that laser etching device 600 is formed using the laser work parameter of adjustment, and gauging surface forms parameter RMS again.
The RMS value is compared by control device 200 with the threshold value T, to judge to utilize the laser work parameter being adjusted
Irradiation mark whether meet quality requirement.It here can be according to the amplitude being pre-designed, example to the adjustment of laser work parameter
Such as 0.05 watt of adjustment or density increase by 0.1 times to carry out every time every time.As another example, based on the figure measured in experiment
The curve of 5A, 5B are it is found that being stepped up with laser power, or being stepped up with laser power density, measure
RMS value is in quick increased trend.Therefore, the amplitude adjusted every time can be gradually reduced.For example, for adjusting laser power P
For, after by secondary adjustment totally 0.1 watt of power adjustment, if RMS value is adjusted close to threshold value T next time
When can set adjustment amplitude to 0.03 watt.Power density is adjusted, process is similar.
In a preferred embodiment of the invention, in order to improve the formation quality of label, control device 200 exports first
Signal is controlled to adjust laser emitting power P.The control signal can be power instruction value or power increasing degree value.But
If when transmission power is adjusted to maximum permissible value PIt is maximumWhen measured RMS value cannot still meet threshold value T, then control device 200
The control signal of output instruction adjustment power density.Laser etching device 600 controls signal to adjust it based on the power density
Internal optical lens system, reduces the size of laser facula, and for example hot spot reduces 0.1 times every time as described above, and reduces
Amplitude be alternatively arranged as gradually successively decreasing, until generating satisfactory label.
In above example, Etaching device 600 is calculated by way of adjusting laser power or power density step by step
Running parameter, finally to determine suitable running parameter, i.e. PIt calculatesWith DIt calculates.In another preferred embodiment of the present invention, it is
Real laser illumination is avoided passing through to detect whether the running parameter being adjusted can meet quality requirement, as shown in figure 4, this hair
Bright control device includes a simulation engine, and the laser work parameter for meeting quality requirement is determined under simulation model.This is imitative
True engine meets threshold value by emulating one or two in the power and power density that adjust the laser come simulation calculation
The surface forms parameter, and is supplied to laser to lose one or two in the power and power density of the laser being adjusted
Engraving device 600.
According to the preferred embodiment, simulation engine from measuring device 100 receive based on current operating parameters (power P 0 and
Power density D0) under measuring device 100 data Z1, the Z2 that obtain ... the RMS value that Zn and measuring device are calculated (is denoted as
RMS0).The current running parameter (P0, D0) of laser etching device 600 be with the quality requirement of label, product characteristic (such as
Material, storage environment etc.) it is stored in association in database 500.Simulation engine can be based on threshold value T and RMS0It determines
RMS0With the range-amplitude display of T, with Δ=T/RMS0It indicates.Subsequent simulation engine is configured to execute following calculating：
1, only Simulation of SAR power image pattern：
Simulation engine estimates that the output power in laser etching device 600 is improving the β times of point for forming label
Battle array data, i.e. the simulation data power P of laser etching device 600Emulation=β P0, β=k1 Δs here, parameter k1 can be with here
It is empirical value, can measures to obtain in practice, this is related with factors such as materials.Such as the product surface for the first material,
The practical RMS measured and T still has deviation when k1=1 is such as arranged, then using indicate the deviation coefficient k1 is modified, make
For the k1 values of the first material product.Different product materials has different k1 values.For the sake of simplicity, in the reality of the present invention
It applies in example, k1 is set as 1, i.e. β=Δ.Since laser point depth data Z is directly related with the output power of laser, it is
Simplify and calculate, each dot array data can be estimated as to Δ Z1, Δ Z2 ... Δs Zn.Due to only adjusting laser power at this time,
The data volume n that presumptive area scanning sample obtains is believed that and is remained unchanged.Subsequent simulation engine utilizes the data estimation estimated
Surface forms parameter RMSP, and judge the RMSPWhether value meets threshold value T.If it is satisfied, then recording current simulated power
PEmulation, power density D0 and parameter RMSP。
If conditions are not met, then to the output power P of emulationEmulationFurther weighting, with and estimate again surface formation parameter
RMSP, until meeting threshold value T.By above in conjunction with Fig. 5 A descriptions, it is found that due to the increase with laser power, RMS value will be quick
Ground increases.Therefore in the weighting coefficient of the output power of design and simulation, the increasing degree of the weighting coefficient of different level can be by
It is decrescence few.
2, only power density simulation model：
Simulation engine estimates the output power density D0 in laser etching device 600 in the hits for improving Δ times
According to.This can change the optical lens system of Etaching device 600 so as to adjust output laser by keeping laser power constant
The size of hot spot is realized.
In this mode, work as RMS0When range-amplitude display with T is Δ, hot spot can be reduced λ times.Here λ=k2 Δs.Light
Spot, which reduces λ times, necessarily causes power density to improve λ times, i.e. DEmulation=λ D0, therefore the sampling depth data value Z led can also be carried
It is λ times high.Meanwhile although hot spot becomes smaller, due to needing to etch the onesize label positioned at same region, to utilizing
The label that small light spot obtains is carried out the data volume that optical scanner obtains and carries out optical scanner with to the label obtained using large spot
Obtained data volume can remain essentially identical or in certain error range.The numerical value of k2 equally can be empirical data,
For simplicity, in this example, λ=Δ can be set.Further, since under the only pattern of adjustment laser output power P, same shadow
Ring power density D, thus k1, k2 here could be provided as it is identical.
The sample magnitude under this only power density simulation model in presumptive area is denoted as λ Z1, λ Z2 ... as a result,
λ·Zn。
Subsequent simulation engine utilizes emulation data λ Z1, λ Z2 ... λ Zn estimations surface forms parameter RMSD, and sentence
Break the RMSDWhether value meets threshold value T.If it is satisfied, then recording current simulated power P0, DEmulationWith parameter RMSD.If no
Meet, then to the output power density D of emulationEmulationFurther weighting, and estimate that surface forms parameter RMS againD, until meeting threshold
Value T.By above in conjunction with Fig. 5 B descriptions, it is found that due to the increase with laser power density, RMS value will rapidly increase.Therefore
In the weighting coefficient of the output power density of design and simulation, the increasing degree of the weighting coefficient of different level can gradually decrease.
3, hybrid simulation pattern：
As previously mentioned, being limited to laser output rated power, the real output of Etaching device 600 cannot infinitely increase
Greatly, even not up to rated power, but be limited to working environment, for example, under the conditions of not having sufficient air draft it is excessively high
Laser output power product surface during laser-induced thermal etching can be caused to carbonize, the adsorbing powder dust of generation is in the label just etched
On, therefore affect mark quality；And these dust cannot be discharged in time can also pollute optical lens system, and then affect
Laser activity plays.The excessively high temperature for also resulting in product surface generation of same power density is high, therefore there is damage product
It may.Therefore the hybrid simulation pattern of Joint regulation laser output power and laser facula is additionally provided in the present embodiment.It is imitative
True engine carries out preset minimum weight w1, w2 adjustment to initial output power P0 and to spot size simultaneously, is risen to be easy
See, w1w2=Δs can be set therefore, the sampled data under the hybrid simulation pattern can be estimated as Δ Z1, Δ Z2 ...
Δ·Zn。
Subsequent simulation engine to emulating data Δ Z1, Δ Z2 ... Δ Zn calculates RMSMixing, and judge the RMSMixingValue
Whether threshold value T is met.If the RMS calculatedMixingValue meets threshold value T, then records current simulated power PMixing=w1P0
And power density DMixing=w2D0 and parameter RMSMixing.If conditions are not met, then to the simulated power w1P0 and work(of emulation
Rate density w2D0 is further weighted, and estimates that surface forms parameter RMS againMixingTo meeting threshold value T.
Simulation engine can be further configured to that the priority orders of above-mentioned three kinds of simulation models are arranged, such as invest only work(
Rate simulation model is highest priority, and hybrid simulation pattern is lowest priority.Therefore, full in the simulation result of high priority
When sufficient quality requirement, simulation engine exports control signal to adjust laser work parameter, and after no longer executing to Etaching device 600
The simulation process in face.But meanwhile simulation engine also further monitors the execution of each simulation model, avoids the occurrence of excessively high power
P is exported or power density D.For this purpose, simulation engine setting maximum power PIt is maximumWith maximal density DIt is maximum.When under only power mode
Simulated power P reaches or close to PIt is maximumWhen, if RMS value does not reach T yet, stop that only power mode is handled and to enter only power close
Spend simulation model or hybrid simulation pattern.As an example, if the RMS value of simulation calculation under only power mode such as with
Threshold value T is then directly entered hybrid simulation pattern apart from larger.Under hybrid simulation pattern, it is maintained at imitative under only power mode
The P really calculatedEmulationIt is constant to adjust spot size.
The laser work parameter P and D that obtain meeting quality requirement under simulation model are supplied to laser-induced thermal etching by simulation engine
Device 600, and update the data the corresponding parameter in library 500 using the determining running parameter of emulation.Laser device 600
The simulation work parameter provided using simulation engine forms label on product surface.In an alternative embodiment, detection can be passed through
The quality of label determines whether the parameter of simulation model can meet quality requirement.
Fig. 6 shows the method flow diagram of the formation quality of the control laser labelling of the above embodiment of the present invention.
As shown in fig. 6, in step 601, control device 200 receives user by input interface 300 and inputs, user input
Including product type, desired qualities etc..Control device 200 inputs searching database 500 according to user, preset to extract
Running parameter, i.e. laser irradiation power P 0 and power density D0, and these running parameters are supplied to laser etching device 600.
In step 602, laser etching device 600 forms laser using preset running parameter P0 and D0 product irradiations surface
Label.As an example, the laser facula size of the output of laser etching device 600 can be set using power density D0.
In step 603, optical scanner is carried out to the laser labelling formed on product surface, is produced by interference imaging
At least part of sampling laser point depth data Z of the label on product surface in presumptive area1,Z2,Z3…Zn.Then,
Based on these data Z1,Z2,Z3…ZnThe surface for calculating the label forms parameter RMS.
In step 604, judge whether the RMS calculated in step 603 meets threshold value T.Work as if it is satisfied, then showing to utilize
The laser etching device 600 of preceding running parameter can generate the label to conform to quality requirements, then export in step 605 up-to-standard
Instruction.If the RMS calculated is unsatisfactory for threshold value T, the running parameter of laser etching device 600 is carried out in step 606
Adjustment.In one embodiment, the adjustment of the running parameter include based on RMS at a distance from threshold value T i.e. Δ, to calculate laser erosion
The output adjustment power P of engraving device 600It calculatesOr adjustment power density DIt calculates, wherein PIt calculates=P0+ Δs SP, wherein SPIndicate adjustable
Whole minimum radius；And laser facula can be reduced Δ times when adjusting power density.In another embodiment, the running parameter
Adjustment carry out the simulated power and spot size that simulation calculation meets threshold requirement including the use of simulation engine.In an example
In, update the data the respective record in library using the running parameter of calculating.
Preferably, step 606 further includes monitoring processing, for (including the power P of calculating to the output power of adjustmentIt calculatesOr
Simulated power PEmulation) and adjustment power density (including DIt calculatesWith DEmulation) be monitored, it is excessively high to avoid output power or power density
And damage the possibility of product.
The running parameter of laser etching device is adjusted using the control system of the present invention, laser etching device can be controlled
Generate and meet the laser labelling of quality requirement, thus avoid product quality from not conforming to format and return to and caused by waste.
Although being described by the present invention above by preferred embodiment, it can be appreciated that the present invention can also be by by machine
Device execution is stored on machine-readable media instruction, to implement according to the method for the present invention.In addition, detection system according to the present invention
System and the control system for adjusting laser etching device may include the storage system and use for storing executable instruction
In be configured to by execute described instruction come realize the present invention method processing system.Each operation or work(is described herein
In the degree of energy, they can be described or defined as software code, instruction, configuration and/or data.Implementation described herein
The software content of example can be provided via the product for wherein storing content.Machine readable storage medium can be such that machine executes
Described function or operation, and include any being stored as to be accessed by machine (for example, computing device, electronic system etc.)
The mechanism of the information of form, such as recordable/non-recordable medium is (for example, read-only memory (ROM), random access memory
(RAM), magnetic disk storage medium, optical storage media, flash memory device etc.).
In addition, the flow chart as shown in herein provides the example of the sequence of various processes action.Although with specific sequence
Row or order are shown, but unless point out, otherwise can adjust the order of action.Therefore, it is illustrated that embodiment should only be interpreted as
Example, and process can be performed in a different order, and some actions can be performed in parallel.In addition, in embodiments may be used
To omit one or more actions；Therefore, it is not to be required for all actions in each example.Other process streams are can
Can.
Each component described herein can be performed for the device of described operation or function.It is described herein
Each component includes software, hardware or these combination.Component can be implemented as software module, hardware module, specific use
It is hardware (for example, specialized hardware, application-specific integrated circuit (ASIC), digital signal processor (DSP) etc.), embedded controller, hard
Connection circuit etc..
It, can be in the case of without departing from the scope thereof to the implementation of present invention disclosed other than described herein
Example and realization carry out various modifications.Therefore, the diagram and example of this paper should be explained in the sense that exemplary and unrestricted.This
The range of invention only should refer to appended claims to weigh.
Claims (40)
1. a kind of method for examining the formation quality of laser labelling on product surface, wherein the laser labelling is lost using laser
Engraving device is formed on said surface according to preset laser work parameter, including：
It reads at least part of numerical characteristics of the label and is marked at least according to described in the numerical characteristics computational representation
The surface of the formation quality of a part forms parameter；And
Judge that the surface forms whether parameter meets threshold value, to verify the mark quality, wherein joining when the surface is formed
When number is unsatisfactory for the threshold value, then it is unqualified to verify the label.
2. method as claimed in claim 1, wherein the numerical characteristics include the depth for each laser point to form the label.
3. method as claimed in claim 2 wherein the laser work parameter is related to the threshold value, including is used to etch the mark
The output power and power density of the laser of note, wherein power density refer to the laser power under unit area.
4. method as claimed in claim 3, the method further includes：
A database is provided, for storing be mutually related threshold value, mark quality and product attribute, wherein the product category
Property includes the material of the product surface or the storage environment of product；
The method further includes based at least one of desired mark quality input by user and product attribute and from described
The threshold value is applied in selection in database.
5. such as the method for one of claim 2-4, wherein the surface forms root mean square (RMS) value that parameter is the depth.
6. method as claimed in claim 5, the read step reads at least one of the label including the use of interferometry
The depth information of each laser point in point, wherein each laser point provides one or more depth informations.
7. method as claimed in claim 6, wherein the wherein described threshold value is selected from least one of following：Corresponding to the label
It is the second best in quality first threshold, short-term readable corresponding to the long-term readable second threshold of the label and corresponding to the label
Third threshold value.
8. a kind of system for examining the formation quality of laser labelling on product surface, wherein the laser labelling is lost using laser
Engraving device is formed on said surface according to preset laser work parameter, including：
Measuring device, at least part of numerical characteristics for reading the label and according to the numerical characteristics computational representation institute
The surface for stating the formation quality of label forms parameter；
Control device, for judging that the surface forms whether parameter meets threshold value, to verify the mark quality, wherein working as institute
It states surface and forms parameter when being unsatisfactory for the threshold value, then it is unqualified to verify the label.
9. system as claimed in claim 8, wherein the numerical characteristics include the depth for each laser point to form the label.
10. system as claimed in claim 9 wherein the laser work parameter is related to the threshold value, including is used to etch described
The power and power density of the laser of label, wherein power density refer to laser power under unit area.
11. such as the system of claim 10, further comprise：
Database, for storing be mutually related threshold value, mark quality and product attribute, wherein the product attribute includes institute
State the material of product surface or the storage environment of product；
The control device is based at least one of desired mark quality input by user and product attribute and from the number
The threshold value is applied according to selection in library.
12. such as the system of one of claim 8-11, wherein the surface forms the root mean square (RMS) that parameter is the depth
Value.
13. such as the system of claim 12, measuring device therein is laser interferometry instrument, each in the label for measuring
The numerical characteristics of laser point, wherein each laser point provides one or more depth informations.
14. such as the system of claim 13, wherein the wherein described threshold value is selected from least one of following：Corresponding to the mark
Remember the second best in quality first threshold, in short term may be used corresponding to the long-term readable second threshold of the label and corresponding to the label
The third threshold value of reading.
15. a kind of method of the formation quality of laser labelling on control product surface, wherein the laser labelling is to utilize laser
Etaching device irradiates what the surface was formed according to laser work parameter, and this method includes：
It reads the numerical characteristics of laser point at least part of the label and is marked according to described in the numerical characteristics computational representation
The surface of at least part of formation quality of note forms parameter；
Judge that the surface forms whether parameter meets threshold value, when the surface, which forms parameter, is unsatisfactory for the threshold value, then adjusts
The whole laser work parameter.
16. such as the method for claim 15, wherein the numerical characteristics include the depth for each laser point to form the label.
17. such as the method for claim 16, wherein the laser work parameter is related to the threshold value, including it is used to etch described
The laser power or power density of label, wherein power density refer to the laser power under unit area.
18. such as claim 17 method, further comprise：
The laser work parameter of the adjustment is generated under simulation model, wherein under the simulation model, adjusted by emulating
One or two in the power and power density of the laser meets the surface of the threshold value and forms parameter to calculate；
Using one or two in the power and power density of the laser through emulation adjustment.
19. such as the method for claim 18, the method further includes：
One database is provided, for storing be mutually related laser work parameter, threshold value, mark quality and product attribute,
The wherein described product attribute includes the material of the product surface and the storage environment of product；
The method further includes being selected from the database based at least one of desired mark quality and product attribute
It selects using the laser work parameter, threshold value.
20. such as the method for claim 19, wherein updating the database using the laser work parameter being adjusted
In corresponding laser work parameter.
21. such as the method for one of claim 15-20, wherein the surface forms the root mean square (RMS) that parameter is the depth
Value.
22. such as the method for claim 21, wherein the threshold value is selected from least one of following：Corresponding to the mark quality
Good first threshold, corresponding to the long-term readable second threshold of the label and corresponding to the label short-term readable the
Three threshold values.
23. such as the method for claim 22, wherein scanning each laser at least part of the label using interferometry
The depth information of point, wherein each laser point provides one or more depth informations.
24. as claim 16 method, wherein adjust the laser work parameter include increase according to scheduled increment it is sharp
Luminous power or power density.
25. such as the method for claim 18, further comprise according to the scheduled priority adjustment laser work parameter, and
Switch simulation model when reaching predetermined condition.
26. a kind of system of control laser etching device, the laser etching device is according to laser work parameter, on product surface
Laser labelling is formed, which includes：
Measuring device, at least part by reading the label numerical characteristics of laser point and according to the numerical characteristics based on
The surface for calculating at least part of formation quality for characterizing the laser labelling forms parameter；
Controller verifies the quality of the label for judging that the surface forms parameter and whether meets threshold value, and works as institute
It states surface and forms parameter when being unsatisfactory for the threshold value, then adjust the laser work parameter.
27. such as the system of claim 26, wherein the numerical characteristics include the depth for each laser point to form the label.
28. such as the system of claim 27, wherein the laser work parameter is related to the threshold value, including it is used to etch described
The power and power density of the laser of label, wherein power density refer to the laser power under unit area.
29. such as the system of claim 28, wherein the control device further comprises a simulation engine, in emulation mould
The laser work parameter of the adjustment is generated under formula, wherein under the simulation model, the work(of the laser is adjusted by emulating
Rate carrys out the surface formation parameter that simulation calculation meets the threshold value with one or two in power density；
The wherein described control device provides one or two in the power and power density of the laser through emulation adjustment
To the laser etching device.
30. such as the system of one of claim 26-29, further comprise：
Input interface, for providing the desired qualities and product attribute information that stay in the label formed on product；
The desired qualities for the label that the wherein described control device is provided based on the input interface are determined with product attribute information
The laser work parameter and the threshold value.
31. such as claim 30 system, the system further comprises：
Database, for storing be mutually related laser work parameter, threshold value, mark quality and product attribute, wherein described
Product attribute includes the material of the product surface and the storage environment of product；
The wherein described control device based on the desired mark quality that is inputted by the input interface in product attribute extremely
Lack one and selects laser work parameter and threshold value from the database.
32. as claim 31 system, wherein the control device using the laser work parameter being adjusted come more
Corresponding laser work parameter in the new database.
33. such as the system of claim 32, wherein the surface forms root mean square (RMS) value that parameter is the depth.
34. such as the system of claim 32, wherein the threshold value is selected from least one of following：Corresponding to the mark quality
Good first threshold, corresponding to the long-term readable second threshold of the label and corresponding to the label short-term readable the
Three threshold values.
35. such as the system of claim 34, measuring device therein is laser interferometry instrument, each in the label for measuring
The numerical characteristics of laser point, wherein each laser point provides one or more depth informations.
36. such as the system of claim 29, wherein the control device adjusts the laser further according to scheduled priority
Running parameter, and switch simulation model when reaching predetermined condition.
37. a kind of laser labelling quality detecting system, including：
It is stored with the memory of readable instruction；
Processor, the method for being configured to realize one of claim 1-7 by executing described instruction.
38. a kind of machine readable media is stored thereon with instruction, want machine perform claim when wherein the instruction is executed by machine
The method for seeking one of 1-7.
39. a kind of laser labelling quality control system, including：
It is stored with the memory of readable instruction；
Processor, the method for being configured to realize one of claim 15-25 by executing described instruction.
40. a kind of machine readable media is stored thereon with instruction, want machine perform claim when wherein the instruction is executed by machine
The method for seeking one of 15-25.
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