CN108453375A - A kind of solar battery thin film clear side processing unit (plant) and processing method - Google Patents
A kind of solar battery thin film clear side processing unit (plant) and processing method Download PDFInfo
- Publication number
- CN108453375A CN108453375A CN201810515374.5A CN201810515374A CN108453375A CN 108453375 A CN108453375 A CN 108453375A CN 201810515374 A CN201810515374 A CN 201810515374A CN 108453375 A CN108453375 A CN 108453375A
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- Prior art keywords
- laser
- focus
- thin film
- clear side
- side processing
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
Abstract
The invention discloses a kind of solar battery thin film clear side processing unit (plant)s, it includes the ultrafast laser for emitting laser, transmission direction along laser is equipped with laser beam expander, speculum group, flat field scanning mirror and focus lamp successively, the focus on light beam of the focus lamp outgoing acts in film workpiece to be processed, and clear side processing is carried out to solar battery thin film by the focus on light beam.The present invention uses the ultrafast laser of the very high high-peak power of transparent conductive film absorptivity, via expand, two-dimensional scan, after focal length focus lamp, laser is focused on into film workpiece surface, and then remove the film layer except substrate layer, make its direct gasification, not wounded substrate film layer simultaneously preferably realizes the large area clear side to flexible solar hull cell, and the advantageous effects such as the utilization rate with laser energy is high, heat affecting is small, edge quality is good, clear side efficiency is fast.
Description
Technical field
The present invention relates to the processing unit (plant) of flexible thin-film solar cell more particularly to a kind of solar battery thin film clear sides
Processing unit (plant) and processing method.
Background technology
Flexible thin-film solar cell is the emerging technology product of world's solar energy industry, it be flexible substrate material such as
Solar cell made of PI is upper, compared with the battery of glass substrate, its maximum feature is light-weight, foldable and not fragile
It is broken, therefore it is widely used.Last one of the technique of flexible thin-film solar cell is to carry out air-tight packaging to flexible base board,
Battery short circuit and better air-tight packaging in order to prevent, the film in the regions battery circumferential 10mm to 15mm are to need to be cleaned out
, referred to as clear side or side is swept in the industry, uses the method for sandblasting earliest, although at low cost, environmental pollution is serious, therefore by
Gradually it is eliminated.
Secondly, it is current popular method with laser light flexible substrate material direct boiling battery circumferential region.
The high power infrared laser of generally use 200W to 500W carries out laser clear side in the industry now, and this laser is due to being side pump
Multimode laser, energy consumption is very high, and the service life is not grown, and use cost is very high, easily causes to damage to flexible substrate material, and the short time is very
Hardly possible is universal to be used.During laser clear side, it is generally recognized that flexible solar film is the direct boiling under laser action, this
A little overall film thickness are no more than 5um, and the flexible solar film of most batteries is no more than 2um, and required energy can pass through
The heat of vaporization of associated materials calculates, but can affirm, it is clear to carry out laser using the high power infrared laser of 200w to 500w
Side, most energy are not absorbed, are directly slatterned, this is because flexible thin-film solar cell conductive film is to visible
Light is transparent, also has certain transmitance to infrared light, and easily cause to damage to flexible substrate material, it is obvious that using infrared
Clear side of the laser for flexible solar battery is not a good selection.
Invention content
The technical problem to be solved in the present invention is, in view of the deficiencies of the prior art, provides a kind of utilization of laser energy
The solar battery thin film clear side processing unit (plant) and processing method that rate is high, heat affecting is small, edge quality is good, clear side efficiency is fast.
In order to solve the above technical problems, the present invention adopts the following technical scheme that.
A kind of solar battery thin film clear side processing unit (plant) comprising the ultrafast laser of transmitting laser is useful for, along sharp
The transmission direction of light is equipped with laser beam expander, speculum group, flat field scanning mirror and focus lamp successively, and the focus lamp outgoing gathers
Defocused laser beam acts in film workpiece to be processed, and clear side processing is carried out to positive energy battery thin film by the focus on light beam.
Preferably, the ultrafast laser is the laser of pulse width≤15 picosecond.
Preferably, the laser beam expander is the laser beam expander of 6 multiplying powers.
Preferably, the speculum group includes the first speculum, the second speculum and third speculum.
Preferably, the focus lamp is telecentricity focus lamp.
Preferably, the focal length of the focus lamp is F=650mm.
Preferably, the focus on light beam has 50 μm of focal beam spot, and the energy density of the focus on light beam is 1J/cm.
A kind of solar battery thin film clear side processing method, this method realize that described device includes super based on a device
Fast laser, and it is equipped with laser beam expander, speculum group, flat field scanning mirror and focus lamp successively along the transmission direction of laser,
Described method includes following steps：Step S1, the ultrafast laser transmitting transmitting laser；Step S2, the laser beam expander
Incident laser is exported after being expanded to laser；Step S3, incident laser are transmitted to flat field scanning mirror by speculum group；Step
The laser of S4, the outgoing of flat field scanning mirror form focus on light beam after focus lamp；Step S5 drives focusing using flat field scanning mirror
Light beam scans in film workpiece, and clear side processing is carried out to positive energy battery thin film by the focus on light beam.
Preferably, in described device, the ultrafast laser is the laser of pulse width≤15 picosecond, and the laser expands
Beam device is the laser beam expander of 6 multiplying powers, and the speculum group includes the first speculum, the second speculum and third speculum,
The focus lamp is telecentricity focus lamp, and the focal length of the focus lamp is F=650mm.
Preferably, in the step S4, the focus on light beam of the focus lamp outgoing has 50 μm of focal beam spot, described poly-
The energy density of defocused laser beam is 1J/cm.
Solar battery thin film clear side processing unit (plant) disclosed by the invention, using ultrafast laser to flexible thin-film solar
The film of battery carries out clear side processing, and compared to existing technologies, the present invention is using the very high peak of transparent conductive film absorptivity
It is worth the ultrafast laser of power, via expanding, two-dimensional scan, after focal length focus lamp, laser is focused on film workpiece surface, in turn
The film layer except substrate layer is removed, makes its direct gasification, while not wounded substrate film layer, preferably realizes to the flexible sun
The large area clear side of energy hull cell, and the utilization rate with laser energy is high, heat affecting is small, edge quality is good, clear side efficiency
The advantageous effects such as fast.
Description of the drawings
Fig. 1 is the structural schematic diagram of solar battery thin film clear side processing unit (plant) of the present invention.
Specific implementation mode
The present invention is described in more detail with reference to the accompanying drawings and examples.
The invention discloses a kind of solar battery thin film clear side processing unit (plant)s, please refer to Fig. 1 comprising are useful for emitting
The ultrafast laser 1 of laser, the transmission direction along laser are equipped with laser beam expander 2, speculum group 3,4 and of flat field scanning mirror successively
Focus lamp 5, the focus on light beam that the focus lamp 5 is emitted acts in film workpiece 10 to be processed, by the focus on light beam pair
Positive energy battery thin film carries out clear side processing.
Above-mentioned solar battery thin film clear side processing unit (plant), using ultrafast laser to the thin of flexible thin-film solar cell
Film carries out clear side processing, and compared to existing technologies, the present invention is using the very high high-peak power of transparent conductive film absorptivity
Ultrafast laser, via expanding, two-dimensional scan, after focal length focus lamp, laser is focused on 10 surface of film workpiece, and then remove base
Film layer (ZnS/ZOM/AZO, CIGS, Mo) except plate film layer (PI), makes its direct gasification, while not wounded substrate film layer
(PI), the large area clear side to flexible solar hull cell is preferably realized, and the utilization rate with laser energy is high, heat
Influence the advantageous effects such as small, edge quality is good, clear side efficiency is fast.
In the present embodiment, the ultrafast laser 1 is the laser of pulse width≤15 picosecond.
Further, the laser beam expander 2 is the laser beam expander of 6 multiplying powers.
The speculum group 3 includes that the first speculum 30, the second speculum 31 and third are anti-as a preferred method,
Penetrate mirror 32.
In the present embodiment, the focus lamp 5 is telecentricity focus lamp.The focal length of the focus lamp 5 is F=650mm.It is described poly-
Defocused laser beam has 50 μm of focal beam spot, and the energy density of the focus on light beam is 1J/cm.
The present embodiment can form the focal beam spot for being about 50um in material surface, and energy density at this time is about 1J/cm,
Each film layer can either be effectively removed, and does not damage the laser parameter of substrate PI materials, if being more than the energy density, is easy to draw
The damage of base material is played, if being less than the energy density, the effect processed will be substantially reduced.In addition, the present invention can be obstructed
In the case of crossing other motion platforms auxiliary, realize that the clear side range of maximum 450mm*450mm, film only need scrolling, no
Other movements must be done.
Solar battery thin film clear side processing unit (plant) disclosed by the invention further relates to a kind of sun in actual application
Energy battery thin film clear side processing method, please refers to Fig. 1, and this method realizes that described device includes ultrafast laser based on a device
Device 1, and it is equipped with laser beam expander 2, speculum group 3, flat field scanning mirror 4 and focus lamp 5, institute successively along the transmission direction of laser
The method of stating includes the following steps：
Step S1, the transmitting transmitting laser of the ultrafast laser 1；
Step S2, the laser beam expander 2 export incident laser after being expanded to laser；
Step S3, incident laser are transmitted to flat field scanning mirror 4 by speculum group 3；
Step S4, the laser that flat field scanning mirror 4 is emitted form focus on light beam after focus lamp 5；
Step S5 drives focus on light beam to be scanned in film workpiece 10, by the focus on light beam pair using flat field scanning mirror 4
Positive energy battery thin film carries out clear side processing.
In the above method, the ultrafast laser 1 is the laser of pulse width≤15 picosecond, the laser beam expander 2
It is the laser beam expander of 6 multiplying powers, the speculum group 3 includes the first speculum 30, the second speculum 31 and third speculum
32, the focus lamp 5 is telecentricity focus lamp, and the focal length of the focus lamp 5 is F=650mm.
In the step S4 of the present embodiment, the focus on light beam that the focus lamp 5 is emitted has 50 μm of focal beam spot, described poly-
The energy density of defocused laser beam is 1J/cm.
Solar battery thin film clear side processing unit (plant) disclosed by the invention and processing method, make full use of transparent conductive film pair
The very high feature of ultrafast laser absorptivity so that ultrafast laser is coupled into galvanometer by outer light path original paper, then is coupled into through galvanometer
Flat field scanning lens so that for laser focused spot near solar energy film, galvanometer, which is repeatedly scanned with, can be completed clear side action, by
It is very high to the ultrafast laser absorptivity of peak power density in transparent conductive film, therefore there is higher capacity usage ratio, together
When heat affecting also smaller, the better quality of film edge, clear side efficiency is faster.
The above is preferred embodiments of the present invention, is not intended to restrict the invention, all technology models in the present invention
Interior done modification, equivalent replacement or improvement etc. are enclosed, should be included in the range of of the invention protect.
Claims (10)
1. a kind of solar battery thin film clear side processing unit (plant), which is characterized in that include the ultrafast laser for emitting laser
Device (1), the transmission direction along laser are equipped with laser beam expander (2), speculum group (3), flat field scanning mirror (4) and focus lamp successively
(5), the focus on light beam of focus lamp (5) outgoing acts in film workpiece to be processed (10), by the focus on light beam pair
Positive energy battery thin film carries out clear side processing.
2. solar battery thin film clear side processing unit (plant) as described in claim 1, which is characterized in that the ultrafast laser
(1) be pulse width≤15 picosecond laser.
3. solar battery thin film clear side processing unit (plant) as described in claim 1, which is characterized in that the laser beam expander
(2) be 6 multiplying powers laser beam expander.
4. solar battery thin film clear side processing unit (plant) as described in claim 1, which is characterized in that the speculum group (3)
Include the first speculum (30), the second speculum (31) and third speculum (32).
5. solar battery thin film clear side processing unit (plant) as described in claim 1, which is characterized in that the focus lamp (5) is
Telecentricity focus lamp.
6. solar battery thin film clear side processing unit (plant) as claimed in claim 5, which is characterized in that the focus lamp (5)
Focal length is F=650mm.
7. solar battery thin film clear side processing unit (plant) as described in claim 1, which is characterized in that the focus on light beam has
The energy density of 50 μm of focal beam spot, the focus on light beam is 1J/cm.
8. a kind of solar battery thin film clear side processing method, which is characterized in that this method is based on device realization, described device
Include ultrafast laser (1), and laser beam expander (2), speculum group (3), flat is equipped with successively along the transmission direction of laser
Field scan mirror (4) and focus lamp (5), described method includes following steps：
Step S1, ultrafast laser (1) the transmitting transmitting laser；
Step S2, the laser beam expander (2) export incident laser after being expanded to laser；
Step S3, incident laser are transmitted to flat field scanning mirror (4) by speculum group (3)；
The laser of step S4, flat field scanning mirror (4) outgoing form focus on light beam after focus lamp (5)；
Step S5 drives focus on light beam to be scanned in film workpiece (10), by the focus on light beam pair using flat field scanning mirror (4)
Positive energy battery thin film carries out clear side processing.
9. solar battery thin film clear side processing method as claimed in claim 8, which is characterized in that described in described device
Ultrafast laser (1) is the laser of pulse width≤15 picosecond, and the laser beam expander (2) is the laser beam expander of 6 multiplying powers,
The speculum group (3) includes the first speculum (30), the second speculum (31) and third speculum (32), the focus lamp
(5) it is telecentricity focus lamp, the focal length of the focus lamp (5) is F=650mm.
10. solar battery thin film clear side processing method as claimed in claim 8, which is characterized in that in the step S4, institute
The focus on light beam for stating focus lamp (5) outgoing has 50 μm of focal beam spot, and the energy density of the focus on light beam is 1J/cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810515374.5A CN108453375A (en) | 2018-05-25 | 2018-05-25 | A kind of solar battery thin film clear side processing unit (plant) and processing method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810515374.5A CN108453375A (en) | 2018-05-25 | 2018-05-25 | A kind of solar battery thin film clear side processing unit (plant) and processing method |
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| CN108453375A true CN108453375A (en) | 2018-08-28 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113649701A (en) * | 2021-08-13 | 2021-11-16 | 苏州迈为科技股份有限公司 | Solar cell laser edge cleaning method and device |
| CN114156364A (en) * | 2021-11-15 | 2022-03-08 | 邯郸中建材光电材料有限公司 | Preparation method of CdTe power generation glass and charging control system |
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| CN208391260U (en) * | 2018-05-25 | 2019-01-18 | 北京莱泽光电技术有限公司 | A kind of solar battery thin film clear side processing unit (plant) |
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Patent Citations (6)
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| CN113649701A (en) * | 2021-08-13 | 2021-11-16 | 苏州迈为科技股份有限公司 | Solar cell laser edge cleaning method and device |
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| CN114156364A (en) * | 2021-11-15 | 2022-03-08 | 邯郸中建材光电材料有限公司 | Preparation method of CdTe power generation glass and charging control system |
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