CN108448928B - A kind of more stacked piezoelectric actuator independence time-sharing driving devices and method - Google Patents
A kind of more stacked piezoelectric actuator independence time-sharing driving devices and method Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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Abstract
The present invention provides a kind of more stacked piezoelectric actuator independence time-sharing driving devices and method, it is related to applying and is independently driven in precision displacement platform field, including each piezo-electric actuators；Driving signal according to etc. voltage spaces rule be separated into the connected subsignal of timing；The signal on each layer of separate piezoelectric actuator is applied to as amplified subsignal respectively；Voltage at equal intervals realized by demultiplexing circuit by rule；Driving signal can be the signal of any needs.Piezo electric stack relative to more stacked piezoelectric actuator parallel connections, it is cumulative that driving method shown in through the invention can effectively eliminate its sluggishness as caused by parallel drive, it is carved with when same and the presence of only piezo-electric actuators sluggishness, effectively reduce the sluggishness in more stacked piezoelectric actuator displacement process, motion positions precision is improved, while having the characteristics that easy to operate, cost is relatively low.
Description
Technical field
The present invention relates to apply in precision micro-displacement platform field, and in particular to a kind of more stacked piezoelectric actuators independently divide
When driving device and method, for by realizing that more stacked piezoelectric actuator independence timesharing drive, and then realizing that reduce displacement slow
Stagnant method.
Background technique
In precision displacement platform field, it usually needs nano-precision.Piezoceramic material has small in size, resolution ratio
The feature high, frequency response is fast, noise is low and bearing capacity is big.But piezoelectric ceramics itself has lagging characteristics and creep
Characteristic etc., these characteristics will limit its precision when piezoelectric ceramics carries out accurate displacement, and wherein piezoelectric ceramics sluggishness is to precision
It influences maximum.Therefore, the lagging characteristics for how improving or reducing piezoelectric ceramics become required one solved at present and extremely weigh
The problem of wanting.
Currently, common hysteresis compensation method has charge driving to replace voltage driving method, the feed forward open loop control based on model
Preparation method and feedforward and closed loop phase including PID complex controll, self application complex controll, NN complex controll and fuzzy compound controller
In conjunction with co-operated control etc..But all there is control complexity, the defects of higher cost for these methods.
Summary of the invention
The present invention is that it is only to provide a kind of more stacked piezoelectric actuators to avoid above-mentioned existing deficiencies in the technology
Vertical time-sharing driving device and method, to which effectively reducing more piezo electric stack driving processes, there are may be used also while braking problems
To reduce cost.
To achieve the goals above, the technical solution adopted by the present invention are as follows:
A kind of more stacked piezoelectric actuator independence time-sharing driving devices, the device working method are as follows: each piezo-electric actuators
Independent driving；Driving signal according to etc. voltage spaces rule be separated into the connected subsignal of timing；It is applied to each layer of independent pressure
Signal on electric actuator is the amplified subsignal of difference；Voltage at equal intervals realized by demultiplexing circuit by rule；Driving
Signal can be the signal of any needs.
The connected subsignal of the timing is that driving signal passes through the timing close alignment generated after demultiplexing circuit
Driving signal.
The signal being applied on each layer of separate piezoelectric actuator is that each layer of piezo electric stack is all corresponding unique
Amplified subsignal all the way.
Rule is by voltage according to piezoelectric actuator number of plies equal part to the voltage at equal intervals.
The independent time-sharing driving device includes demultiplexing circuit, and demultiplexing circuit includes cut-point voltage electricity
Road, four part of voltage comparator circuit, sampling hold circuit and subtraction circuit.
Be first delivered to after driving signal entering signal split circuit the road n voltage compare on sampling hold circuit；Segmentation
Driving signal amplitude is divided voltage according to piezoelectricity number of plies n etc. minutes output road n by point potential circuit；It is logical per voltage comparator circuit all the way
It crosses and exports square wave control signal compared with corresponding cut-point voltage；Sampling hold circuit passes through the control pair of square wave control signal
The driving signal of input carries out sampling holding；Output signal does subtraction with corresponding cut-point voltage by subtraction circuit and carries out signal
Minimum voltage is zeroed and exports.
A kind of more stacked piezoelectric actuator independence timesharing driving methods, this method driving method are as follows: each piezo-electric actuators
Independent driving；Driving signal according to etc. voltage spaces rule be separated into the connected subsignal of timing；It is applied to each layer of independent pressure
Signal on electric actuator is the amplified subsignal of difference；Voltage at equal intervals realized by demultiplexing circuit by rule；Driving
Signal can be the signal of any needs.
Its specific work process are as follows:
Step 1, driving signal generate the separation subsignal of the amplitudes such as the road n after demultiplexing circuit；
Step 2, the road n separation subsignal carry out being coupled with n-layer piezoelectric actuator after accordingly amplifying by voltage amplifier
On；
Step 3, when driving more stacked piezoelectric actuators, for boost process, add just to the 1st piezo-electric actuators first
Voltage, as the 1st piezo-electric actuators of raising of voltage extend output displacement, the displacement of entire more stacked piezoelectric actuators increases
Amount is the incremental displacement value of the 1st piezo-electric actuators, and the voltage on remaining piezo-electric actuators is 0 at this time；When the 1st lamination is electroluminescent
When voltage on dynamic device reaches the maximum value of timing 1, keep its voltage invariable in entire pressure process；The 2nd layer at this time
Piezoelectric actuator starts plus positive voltage, with the raising of voltage, the elongation of the 2nd piezo-electric actuators and output displacement, and the 1st layer at this time
Voltage on piezoelectric actuator remains unchanged, and the voltage of remaining piezo-electric actuators remains 0 constant, entire more stacked piezoelectrics causes
The output displacement of dynamic device is the displacement of output displacement and 2nd piezo-electric actuators of the 1st piezo-electric actuators in maximum voltage
The sum of incrementss are kept on the 2nd piezo-electric actuators when voltage reaches the maximum value of timing 2 on the 2nd piezo-electric actuators
Voltage remains unchanged in entire pressure process；The 3rd piezo-electric actuators start plus positive voltage at this time, with the raising the of voltage
3 piezo-electric actuators start output displacement, and the output displacement of entire more stacked piezoelectric actuators is the cause of layers 1 and 2 piezoelectricity
Dynamic output displacement and 3rd piezo-electric actuators incremental displacement value the sum of of the device in maximum voltage, when on the 3rd piezo-electric actuators
Voltage reach timing 3 on maximum value when, keep the 1st piezo-electric actuators, the 2nd piezo-electric actuators and the 3rd lamination it is electroluminescent
The voltage of dynamic device is constant, and remainder layer voltage is 0, is then followed successively by subsequent piezoelectric actuator according to same manner and pressurizes；Wherein, institute
The timing maximum voltage value stated is the maximum voltage value through the amplified constant amplitude subsignal of voltage amplifier；Signal sequence is wanted
It asks and guarantees relative time axis close alignment, is i.e. the n-th layer piezoelectric actuator when the (n-1)th piezo-electric actuators reach maximum voltage value
Pressurization should be got started；
Step 4, for pressure reduction, first to n-th layer piezoelectric actuator be depressured, when voltage on n-th layer piezoelectric actuator
When voltage is reduced to 0, gets started and be depressured to the (n-1)th piezo-electric actuators, when (n-1)th layer of voltage is reduced to 0, started to n-th -2
Then layer decompression is followed successively by subsequent piezoelectric actuator decompression until all piezoelectric actuated layer voltages are all 0 according to same manner.
Compared with the prior art, the invention has the advantages that:
1, as shown in figure 5, driving method shown in through the invention can effectively eliminate it since parallel drive causes
Sluggishness it is cumulative, be carved with when same and the presence of only piezo-electric actuators sluggishness, effectively reduce more lamination pressures
Sluggishness in electric actuator displacement process.
2, driving method shown in the present invention improves motion positions precision, while having the spies such as easy to operate, cost is relatively low
Point.
Detailed description of the invention
Fig. 1 is whole control scheme of the present invention signal；
Fig. 2 is n stacked piezoelectric actuator piezo electric stack bonding mode；
Fig. 3 is n stacked piezoelectric actuator signal control sequential figure；
Fig. 4 is the structural schematic diagram of demultiplexing circuit；
Fig. 5 is result schematic diagram；
Fig. 6 is three stacked piezoelectric actuator independence timesharing drivings and parallel drive measurement result, wherein Fig. 6 (a) is to use
The piezoelectric actuator hysteresis curve of parallel drive, Fig. 6 (b) are the piezoelectric actuator hysteresis curve using independent timesharing driving.
Specific embodiment
With reference to the accompanying drawing and specific embodiment further illustrates the present invention.
This example uses the triangular signal generated by signal generator as driving signal.Using n-layer piezoelectric actuator
Head and the tail bonding is at structure shown in Fig. 2.Whole control scheme is attached according to scheme shown in Fig. 1.
As shown in Fig. 1,2,4, for more stacked piezoelectric actuator independence time-sharing driving devices, working method are as follows: driving
Be first delivered to after signal entering signal split circuit the road n voltage compare on sampling hold circuit.Cut-point potential circuit will
Driving signal amplitude divides voltage according to piezoelectricity number of plies n etc. points of output roads n.Per voltage comparator circuit all the way by dividing with corresponding
The comparison of point voltage exports square wave control signal.Sampling hold circuit believes the driving of input by the control of square wave control signal
Number carry out sampling holding.Output signal does subtraction with corresponding cut-point voltage by subtraction circuit and carries out signal minimum voltage zero
And it exports.
As shown in figure 3, for more stacked piezoelectric actuator independence timesharing driver' s timing control methods, the course of work are as follows:
Step 1, driving signal generate the separation subsignal of the amplitudes such as the road n, 3 left side of corresponding diagram after demultiplexing circuit
N way signal timing diagram.
Step 2, the road n separation subsignal carry out being coupled with n-layer pressure after accordingly amplifying by voltage amplifier shown in FIG. 1
On electric actuator.
Step 3, when driving more stacked piezoelectric actuators, for boost process, add just to the 1st piezo-electric actuators first
Voltage, as the 1st piezo-electric actuators of raising of voltage extend output displacement, the displacement of entire more stacked piezoelectric actuators increases
Amount is the incremental displacement value of the 1st piezo-electric actuators, and the voltage on remaining piezo-electric actuators is 0 at this time；When the 1st lamination is electroluminescent
When voltage on dynamic device reaches the maximum value of timing 1, keep its voltage invariable in entire pressure process；The 2nd layer at this time
Piezoelectric actuator starts plus positive voltage, with the raising of voltage, the elongation of the 2nd piezo-electric actuators and output displacement, and the 1st layer at this time
Voltage on piezoelectric actuator remains unchanged, and the voltage of remaining piezo-electric actuators remains 0 constant, entire more stacked piezoelectrics causes
The output displacement of dynamic device is the displacement of output displacement and 2nd piezo-electric actuators of the 1st piezo-electric actuators in maximum voltage
The sum of incrementss are kept on the 2nd piezo-electric actuators when voltage reaches the maximum value of timing 2 on the 2nd piezo-electric actuators
Voltage remains unchanged in entire pressure process；The 3rd piezo-electric actuators start plus positive voltage at this time, with the raising the of voltage
3 piezo-electric actuators start output displacement, and the output displacement of entire more stacked piezoelectric actuators is the cause of layers 1 and 2 piezoelectricity
Dynamic output displacement and 3rd piezo-electric actuators incremental displacement value the sum of of the device in maximum voltage, when on the 3rd piezo-electric actuators
Voltage reach timing 3 on maximum value when, keep the 1st piezo-electric actuators, the 2nd piezo-electric actuators and the 3rd lamination it is electroluminescent
The voltage of dynamic device is constant, and remainder layer voltage is 0, is then followed successively by subsequent piezoelectric actuator according to same manner and pressurizes；Herein,
The timing maximum voltage value is the maximum voltage value through the amplified constant amplitude subsignal of voltage amplifier；For signal sequence
It is required that guaranteeing relative time axis close alignment, i.e., when the (n-1)th piezo-electric actuators reach maximum voltage value, n-th layer is piezoelectric actuated
Device should get started pressurization.
Step 4, as shown in Fig. 3 timing diagram, for pressure reduction, first to n-th layer piezoelectric actuator be depressured, work as n-th layer
Piezoelectric actuator power on piezoelectricity pressure drop be 0 when, get started give the (n-1)th piezo-electric actuators decompression, when (n-1)th layer of voltage is reduced to
When 0, start to be depressured to the n-th -2 layers, is then followed successively by subsequent piezoelectric actuator decompression until all piezoelectricity cause according to same manner
Dynamic layer voltage is all 0.
The independent timesharing driving of embodiment one and the measurement of parallel drive sluggishness
Experiment uses piezoelectric actuator to drive for the AL 1.65*1.65*5D-4F of Japanese NEC Corporation with three laminated piezoelectrics
The triangular signal that dynamic signal amplitude is 0-6V is tested under unlike signal frequency.Independent timesharing is driven, according to Fig. 1
Shown structure connects experimental provision.0-6V triangular wave driving signal is input to independent time-sharing driving device (Signal separator electricity
Road), the three way signals that amplitude is 0-2V will be automatically separated out by the circuit signal.Three way signals are passed through corresponding three
Road voltage amplifier is output in corresponding piezo electric stack after amplifying 45 times.For parallel drive, 0-6V triangular wave is driven and is believed
Each lamination voltage input end is connected in parallel to after number directly amplifying 15 times.
When given driving signal frequency is 10Hz, experimental result is as shown in Figure 6.For the piezoelectric actuated of parallel drive
Device, sluggishness be 1.1102 μm, and for using independent timesharing driving method piezoelectric actuator, sluggishness for 0.4617 μm compared with
Parallel drive sluggishness reduces 58.4%.It follows that sluggishness can be eliminated compared with parallel drive using independent timesharing driving method
It is cumulative, effectively reduce sluggishness when piezoelectric actuator back and forth movement.
The experimental results are shown inthe following table for remaining frequency:
Wherein, S1Sluggishness when being driven using independent timesharing；S2Sluggishness when for using parallel drive；K is sluggish reduces
Value.
Claims (7)
1. a kind of more stacked piezoelectric actuator independence time-sharing driving devices, it is characterized in that: the device working method are as follows: each lamination electricity
Actuator independently drives；According to voltage, rule is separated into the connected subsignal of timing to driving signal at equal intervals；It is applied to each layer
Signal on separate piezoelectric actuator is the amplified subsignal of difference；Rule passes through demultiplexing circuit reality to voltage at equal intervals
It is existing；Driving signal can be the signal of any needs, and rule is by driving signal voltage according to piezoelectricity to the voltage at equal intervals
Actuator number of plies equal part.
2. a kind of more stacked piezoelectric actuator independence time-sharing driving devices according to claim 1, it is characterized in that: described
The connected subsignal of timing is that driving signal passes through the driving signal of the timing close alignment generated after demultiplexing circuit.
3. a kind of more stacked piezoelectric actuator independence time-sharing driving devices according to claim 1, it is characterized in that: described
The signal being applied on each layer of separate piezoelectric actuator is all corresponding unique son amplified all the way of each layer of piezo electric stack
Signal.
4. a kind of more stacked piezoelectric actuator independence time-sharing driving devices according to claim 1, it is characterized in that: described
Independent time-sharing driving device includes demultiplexing circuit, demultiplexing circuit include cut-point potential circuit, voltage comparator circuit,
Four part of sampling hold circuit and subtraction circuit.
5. a kind of more stacked piezoelectric actuator independence time-sharing driving devices according to claim 4, it is characterized in that: driving letter
Be first delivered to after number entering signal split circuit the road n voltage compare on sampling hold circuit；Cut-point potential circuit will drive
Dynamic signal amplitude divides voltage according to piezoelectricity number of plies n etc. points of output roads n；Per voltage comparator circuit all the way by with corresponding cut-point
The comparison of voltage exports square wave control signal；Sampling hold circuit passes through driving signal of the control to input of square wave control signal
Carry out sampling holding；Output signal does subtraction with corresponding cut-point voltage by subtraction circuit and carries out signal minimum voltage zero simultaneously
Output.
6. a kind of more stacked piezoelectric actuator independence timesharing driving methods, it is characterized in that: this method driving method are as follows: each lamination electricity
Actuator independently drives；According to voltage, rule is separated into the connected subsignal of timing to driving signal at equal intervals；It is applied to each layer
Signal on separate piezoelectric actuator is the amplified subsignal of difference；Rule passes through demultiplexing circuit reality to voltage at equal intervals
It is existing；Driving signal can be the signal of any needs, and rule is by driving signal voltage according to piezoelectricity to the voltage at equal intervals
Actuator number of plies equal part.
7. a kind of more stacked piezoelectric actuator independence timesharing driving methods according to claim 6, it is characterized in that: it is specific
The course of work are as follows:
Step 1, driving signal generate the separation subsignal of the amplitudes such as the road n after demultiplexing circuit；
Step 2, the road n separation subsignal be coupled on n-layer piezoelectric actuator after accordingly amplifying by voltage amplifier；
Step 3, when driving more stacked piezoelectric actuators, for boost process, add positive electricity to the 1st piezo-electric actuators first
Pressure, as the 1st piezo-electric actuators of raising of voltage extend output displacement, the incremental displacement value of entire more stacked piezoelectric actuators
For the incremental displacement value of the 1st piezo-electric actuators, the voltage on remaining piezo-electric actuators is 0 at this time；When the 1st lamination electric actuation
When voltage on device reaches the maximum value of timing 1, keep its voltage invariable in entire pressure process；2nd lamination at this time
Electric actuator starts plus positive voltage, with the raising of voltage, the elongation of the 2nd piezo-electric actuators and output displacement, and the 1st lamination at this time
Voltage on electric actuator remains unchanged, and the voltage of remaining piezo-electric actuators remains 0 constant, entire more stacked piezoelectric actuatings
The output displacement of device is that the displacement of output displacement and 2nd piezo-electric actuators of the 1st piezo-electric actuators in maximum voltage increases
The sum of dosage keeps the electricity on the 2nd piezo-electric actuators when voltage reaches the maximum value of timing 2 on the 2nd piezo-electric actuators
It is pressed in entire pressure process and remains unchanged；The 3rd piezo-electric actuators start to add positive voltage at this time, with the raising the 3rd of voltage
Piezo-electric actuators start output displacement, and the output displacement of entire more stacked piezoelectric actuators is that layers 1 and 2 is piezoelectric actuated
Output displacement and 3rd piezo-electric actuators incremental displacement value the sum of of the device in maximum voltage, when on the 3rd piezo-electric actuators
When voltage reaches the maximum value in timing 3, the 1st piezo-electric actuators, the 2nd piezo-electric actuators and the 3rd lamination electric actuation are kept
The voltage of device is constant, and remainder layer voltage is 0, is then followed successively by subsequent piezoelectric actuator according to same manner and pressurizes；Wherein, described
Timing maximum voltage value be the maximum voltage value through the amplified constant amplitude subsignal of voltage amplifier；For signal sequence requirement
Guarantee relative time axis close alignment, i.e., n-th layer piezoelectric actuator is answered when the (n-1)th piezo-electric actuators reach maximum voltage value
Get started pressurization；
Step 4, for pressure reduction, first to n-th layer piezoelectric actuator be depressured, when on n-th layer piezoelectric actuator voltage drop be 0
When, it gets started and is depressured to the (n-1)th piezo-electric actuators, when (n-1)th layer of voltage is reduced to 0, start to be depressured to the n-th -2 layers, so
Subsequent piezoelectric actuator decompression is followed successively by until all piezoelectric actuator voltages are all 0 according to same manner afterwards.
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| CN110601595B (en) * | 2019-08-22 | 2022-05-27 | 南京理工大学 | Real-time control method for piezoelectric driver hysteresis nonlinear compensation |
| CN111740641B (en) * | 2020-07-22 | 2021-05-04 | 合肥工业大学 | Alternating independent time-sharing driving method of multi-stack piezoelectric stack actuator |
| CN112260579B (en) * | 2020-09-12 | 2021-09-03 | 西安交通大学 | Time-sharing driving actuation method of piezoelectric actuator capable of keeping displacement in outage state |
| CN112720790B (en) * | 2020-12-25 | 2021-11-05 | 南京航空航天大学 | High-precision press system for ceramic preparation based on piezoelectric structure |
| CN115106143A (en) * | 2022-06-29 | 2022-09-27 | 合肥瀚海星点生物科技有限公司 | High-precision electric micro-liquid pipettor |
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| JPH0588640A (en) * | 1991-09-12 | 1993-04-09 | Nec Corp | Method for driving display device |
| JP5485518B2 (en) * | 2008-03-24 | 2014-05-07 | シチズンホールディングス株式会社 | Ferroelectric liquid crystal device |
| CN105207518A (en) * | 2015-10-30 | 2015-12-30 | 安徽大学 | Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method |
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