CN105207518B - Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method - Google Patents

Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method Download PDF

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CN105207518B
CN105207518B CN201510729823.2A CN201510729823A CN105207518B CN 105207518 B CN105207518 B CN 105207518B CN 201510729823 A CN201510729823 A CN 201510729823A CN 105207518 B CN105207518 B CN 105207518B
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laminated piezoelectric
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piezoelectric ceramic
piezoelectric
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CN105207518A (en
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刘永斌
冯志华
巴学杰
潘巧生
陈建
李伟
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Anhui University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves

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Abstract

The invention provides a rapid actuating method of a time-sharing sequential driving multilayer laminated piezoelectric driver, which sequentially drives single-layer piezoelectric materials in a time-sharing manner according to the physical characteristics of wave propagation in a solid, drives the maximum deformation of each piece of piezoelectric ceramic in the multilayer piezoelectric driver to be simultaneously transmitted to the top end for linear superposition, and reduces mutual weakening of waves during propagation coupling in each piece of piezoelectric ceramic, thereby driving the multilayer piezoelectric driver to rapidly reach the maximum deformation. The invention is composed of a multilayer piezoelectric ceramic driver (1), a time sequence control module (2), a driving power supply module (3) and a quick switch (4), wherein the time sequence control module (2) controls the quick switch (4) to apply the driving power supply (3) to a single piece of piezoelectric ceramic (1) in sequence, so that each piece of piezoelectric ceramic reaches the maximum deformation at a specific moment, and the whole multilayer piezoelectric driver is driven to actuate quickly. The invention does not need to change the structure of the traditional multilayer piezoelectric driver, and has the advantages of quick actuation, large actuation displacement, wide application range, simple driving circuit, easy realization and the like.

Description

一种分时顺序驱动多层叠压式压电驱动器快速致动方法A fast actuation method for time-sharing and sequential driving of multilayer laminated piezoelectric actuators

技术领域technical field

本发明涉及压电超声驱动的技术领域,特别涉及一种分时顺序驱动多层叠压式压电驱动器快速致动方法。The invention relates to the technical field of piezoelectric ultrasonic drive, in particular to a fast actuation method for time-sharing sequentially driving a multilayer laminated piezoelectric driver.

背景技术Background technique

压电材料具有响应速度快、输出力大、换能效率高、控制方式相对简单等优点,常被用作微位移致动器。其中响应速度快是压电驱动器最重要的一个优点,也在喷油器、打印机等装置中得到了广泛的应用。Piezoelectric materials have the advantages of fast response speed, large output force, high energy conversion efficiency, and relatively simple control methods, and are often used as micro-displacement actuators. Among them, fast response speed is the most important advantage of piezoelectric actuators, and they are also widely used in fuel injectors, printers and other devices.

由于压电效应与逆压电效应,在极化后的压电材料上施加电压,压电材料会产生变形,变形与其上所加电压成一定的关系;由于单片压电材料应变小,对于一些致动速度要求高、位移相对较大的场合,如压电泵、压电阀等,通常用压电堆致动,即采用多层叠压的方法,同时驱动多片压电材料形变以获得快速致动。多层压电致动器的控制通常是采用电学并联的方法,即在多片压电材料上同时施加控制信号,多片压电材料受驱动信号后同时产生变形,以达到快速与相对较大位移的致动。由于多片层叠式压电材料同时变形,每层材料之间的变形相互影响,材料的变形会相互削弱,不能充分发挥每片材料的性能。Due to the piezoelectric effect and the inverse piezoelectric effect, when a voltage is applied to the polarized piezoelectric material, the piezoelectric material will deform, and the deformation has a certain relationship with the applied voltage; due to the small strain of the single-piece piezoelectric material, for Some occasions that require high actuation speed and relatively large displacement, such as piezoelectric pumps, piezoelectric valves, etc., are usually actuated by piezoelectric stacks, that is, the method of multi-layer lamination is used to simultaneously drive the deformation of multiple piezoelectric materials to obtain Quick actuation. The control of multilayer piezoelectric actuators usually adopts the method of electrical parallel connection, that is, a control signal is applied to multiple piezoelectric materials at the same time, and multiple piezoelectric materials are simultaneously deformed by the driving signal to achieve fast and relatively large Displacement actuation. Since multiple sheets of laminated piezoelectric materials are deformed at the same time, the deformations of each layer of materials affect each other, and the deformations of the materials will weaken each other, so that the performance of each sheet of material cannot be fully utilized.

目前,对于多层层叠式压电驱动器的控制方法主要集中在如何减小压电驱动的迟滞与蠕变,提高压电驱动位移的线性、提高压电致动的位移等驱动方法。这些驱动方法大多是从电学或自动控制原理的角度,以补偿或定量控制驱动的电信号已达到较高的驱动线性度或是较大的驱动位移。而从物理特性上分析,用波的传播理论,研究提高压电驱动的致动速度与位移的压电驱动控制方法未见相关报到。At present, the control methods for multilayer stacked piezoelectric actuators mainly focus on how to reduce the hysteresis and creep of the piezoelectric drive, improve the linearity of the displacement of the piezoelectric drive, and improve the displacement of the piezoelectric actuation. Most of these driving methods are from the perspective of electrical or automatic control principles to compensate or quantitatively control the driving electrical signal to achieve a higher driving linearity or a larger driving displacement. From the analysis of physical characteristics, there is no relevant report on the piezoelectric drive control method for improving the actuation speed and displacement of the piezoelectric drive by using the wave propagation theory.

发明内容Contents of the invention

针对现有技术存在的不足之处,本发明提出一种全新的分时顺序驱动方法来驱动压电驱动器,获得更快速的响应和输出更大的位移。Aiming at the deficiencies in the prior art, the present invention proposes a brand-new time-sharing sequential driving method to drive the piezoelectric driver, so as to obtain faster response and larger output displacement.

本发明通过以下技术方案实现:一种分时顺序驱动多层叠压式压电陶瓷驱动器快速致动方法,该方法通过由多层叠压式压电驱动器、时序控制模块、快速开关和驱动电源模块组成的系统实现,其特征在于实现过程包含:The present invention is realized through the following technical solutions: a time-sharing sequentially driving multilayer laminated piezoelectric ceramic driver fast actuation method, the method is composed of a multilayer laminated piezoelectric driver, a timing control module, a fast switch and a driving power supply module The system implementation of is characterized in that the implementation process includes:

步骤1)、选用一个通用的多层叠压式压电驱动器,或是设计制作具有特定结构的多层叠压式压电驱动器,由波在固体中传播的波动微分方程:Step 1), select a general-purpose multi-layer laminated piezoelectric driver, or design and manufacture a multi-layer laminated piezoelectric driver with a specific structure, the wave differential equation for wave propagation in a solid:

其中,u为质点沿轴向的位移,E为材料的弹性模量,ρ为材料的密度,t为时间变量,x为质点位置;Among them, u is the displacement of the particle along the axial direction, E is the elastic modulus of the material, ρ is the density of the material, t is the time variable, and x is the position of the particle;

可得固体中一维纵波的传播速度:The propagation velocity of one-dimensional longitudinal wave in solid can be obtained as:

其中,E为材料的弹性模量,ρ为材料的密度;Wherein, E is the modulus of elasticity of the material, and ρ is the density of the material;

步骤2)、根据多层压电驱动器的材料特性和结构尺寸,计算出波的传播速度与其在每层压电材料中传递的时间,从而可得波在多层压电驱动器中的各片压电陶瓷上传递的时间差;Step 2), according to the material properties and structural dimensions of the multilayer piezoelectric driver, calculate the propagation velocity of the wave and the time it travels in each layer of piezoelectric material, so as to obtain the pressure of each sheet of the wave in the multilayer piezoelectric driver The time difference transmitted on the electroceramic;

步骤3)、按照波在多层压电驱动器中各片压电陶瓷上传递的时间差,设计时序控制模块,使时序控制模块的N个输出时序信号依次控制快速开关的闭合,快速开关闭合后驱动电源模块依次施加在多层压电驱动器上,使多层叠压式压电驱动器中各片压电陶瓷产生的位移能进行线性叠加,从而实现快速致动,该多层叠压式压电驱动器致动方法大大提升多层压电驱动器致动速度与致动位移。Step 3), according to the time difference of waves transmitted on each piece of piezoelectric ceramic in the multilayer piezoelectric driver, design a timing control module, so that the N output timing signals of the timing control module control the closing of the fast switch in turn, and drive the fast switch after it is closed. The power module is sequentially applied to the multilayer piezoelectric driver, so that the displacements generated by the piezoelectric ceramics in the multilayer laminated piezoelectric driver can be linearly superimposed, thereby realizing fast actuation. The multilayer laminated piezoelectric driver actuates The method greatly improves the actuation speed and actuation displacement of the multilayer piezoelectric actuator.

其中,所述具有特定结构的多层压电驱动器由若干层压电陶瓷片叠压组成,每片陶瓷片沿叠压方向上下端面镀有电极并;各陶瓷片极化处理后同相端面相接,构成结构串联,电学并联。Wherein, the multilayer piezoelectric actuator with a specific structure is composed of several laminated piezoelectric ceramic sheets, and the upper and lower end surfaces of each ceramic sheet are plated with electrodes along the lamination direction; each ceramic sheet is connected to the same phase end surface after polarization treatment , forming a structural series connection and an electrical parallel connection.

其中,所述时序控制模块由N个稳态触发器和分频器组成,N个稳态触发器依次相连,上一个触发器的输出端Q与下一个触发器的输入端D相连,第一个触发器的输入接高电平;稳态触发器的时钟信号CLK由信号源输入的频率为f的高频方波,稳态触发器的置1端S统一接低电平,由触发器的特性,N个触发器的输出端Q0~QN构成一个移位器,每两个序列的时差由时钟信号控制,其值为1/f秒。Wherein, the timing control module is composed of N steady-state flip-flops and frequency dividers, and the N steady-state flip-flops are connected sequentially, the output terminal Q of the previous flip-flop is connected with the input terminal D of the next flip-flop, and the first The input of each flip-flop is connected to a high level; the clock signal CLK of the steady-state flip-flop is a high-frequency square wave with a frequency f input by the signal source, and the 1 terminal S of the steady-state flip-flop is connected to a low level uniformly, and the flip-flop The characteristics of N flip-flops Q 0 ~ Q N constitute a shifter, the time difference between each two sequences is controlled by the clock signal, and its value is 1/f second.

其中,所述时序控制模块中分频器市售常用分频器,频率为f的高频方波信号经过分频器分频后得到频率为f/2n低频信号,用来控制所有触发器的置0端R,决定了控制信号的频率。Wherein, the frequency divider in the timing control module is a commercially available common frequency divider, and the high-frequency square wave signal with a frequency of f is divided by the frequency divider to obtain a low-frequency signal with a frequency of f/2 n , which is used to control all triggers The set 0 terminal R determines the frequency of the control signal.

其中,所述快速开关模块中N个快速开关为市售MOS管,也可采用性能相当的快速电子开关器件。Wherein, the N fast switches in the fast switch module are commercially available MOS transistors, and fast electronic switching devices with equivalent performance can also be used.

本发明的原理在于:本发明通过对多层压电陶瓷驱动器的结构和应力波在其传播的过程分析发现,传统的直接驱动方法忽略了驱动器是有多层压电陶瓷层构成的,在对驱动器激励一个脉冲信号时把驱动器看成了一个整体。但实际上由于每层压电陶瓷距离驱动器顶端的距离不同,当所有压电陶瓷层被同时激励时,它们会同时产生应力变形,导致各个应力波不能同时传播到驱动器顶端,它们间存在相位差且会发生应力波折射和反射。因此,传统驱动方法会使驱动器的响应速度降低,且应力位移会部分抵消未能得到充分利用。分时驱动方法则通过时序控制模块控制电源模块在不同的时刻激励相应的压电陶瓷层,使所有陶瓷层产生的应力波同时传播到驱动器顶端,进行线性叠加。通过分时驱动方法不仅可以大幅度提升多层压电陶瓷驱动器的响应速度,同时也能使驱动器输出位移得到提高。The principle of the present invention is that: the present invention finds through the analysis of the structure of the multilayer piezoelectric ceramic driver and the process of stress wave propagation in it, the traditional direct drive method ignores that the driver is composed of multilayer piezoelectric ceramic layers. When the driver excites a pulse signal, the driver is regarded as a whole. But in fact, because the distance between each layer of piezoelectric ceramics and the top of the driver is different, when all the piezoelectric ceramic layers are excited at the same time, they will produce stress and deformation at the same time, so that each stress wave cannot propagate to the top of the driver at the same time, and there is a phase difference between them. And stress wave refraction and reflection will occur. Therefore, the traditional driving method will reduce the response speed of the driver, and the partial offset of the stress displacement will not be fully utilized. In the time-sharing driving method, the timing control module controls the power module to excite the corresponding piezoelectric ceramic layers at different times, so that the stress waves generated by all ceramic layers propagate to the top of the driver at the same time, and perform linear superposition. The time-sharing driving method can not only greatly improve the response speed of the multilayer piezoelectric ceramic driver, but also improve the output displacement of the driver.

本发明与现有技术相比的优点在于:The advantage of the present invention compared with prior art is:

(1)、本发明响应速度快,可在更短时间内达到最大位移输出;(1), the present invention has fast response speed and can reach the maximum displacement output in a shorter time;

(2)、输出位移大,实验结果显示输出位移约为现有技术的两倍。(2) The output displacement is large, and the experimental results show that the output displacement is about twice that of the prior art.

附图说明Description of drawings

图1为叠压式多层压电驱动器分时顺序驱动原理图,其中,1为多层压电陶瓷驱动器,2为时序控制模块,3为驱动电源模块,4为快速开关;时序控制模块2根据波在压电材料中的传递速度,依次产生控制信号控制快速开关4的通断,快速开关4由时序控制信号控制依次接通,从而将驱动电源模块3产生的驱动电源依次施加在各层压电陶瓷上,驱动压电陶瓷快速致动;Figure 1 is a schematic diagram of the time-sharing sequential drive of the laminated multilayer piezoelectric driver, where 1 is the multilayer piezoelectric ceramic driver, 2 is the timing control module, 3 is the driving power module, and 4 is the fast switch; the timing control module 2 According to the transmission speed of the wave in the piezoelectric material, the control signal is sequentially generated to control the on-off of the fast switch 4, and the fast switch 4 is sequentially turned on by the timing control signal, so that the driving power generated by the driving power module 3 is applied to each layer in sequence On the piezoelectric ceramic, the piezoelectric ceramic is driven to actuate quickly;

图2为单组压电陶瓷连接方式和7组压电陶瓷连接方式示意图,其中,图2(a)为单组压电陶瓷连接方法,将两片压电陶瓷按照极化方向电学并联;图2(b)为传统控制方法与时序控制方法连线比较,传统控制方法是将所有的压电陶瓷电学并联连接,用同一驱动信号控制;时序控制方法是对每组压电陶瓷片分时顺序施加驱动电压;Fig. 2 is a schematic diagram of a single-group piezoelectric ceramic connection method and a 7-group piezoelectric ceramic connection method, wherein Fig. 2 (a) is a single-group piezoelectric ceramic connection method, and two piezoelectric ceramics are electrically connected in parallel according to the polarization direction; Fig. 2(b) is the connection comparison between the traditional control method and the timing control method. The traditional control method is to connect all the piezoelectric ceramics in parallel and control them with the same driving signal; apply drive voltage;

图3为叠压式多层压电陶瓷时序控制电路原理图;信号源产生时钟信号分别接入到DQ触发器组的CLK端和CLK分频器的输入端,DQ触发器的Q输出端接到MOS管的栅极,顺序控制各个MOS管的通断,从而控制每组压电陶瓷上的驱动电压;Figure 3 is a schematic diagram of the laminated multilayer piezoelectric ceramic timing control circuit; the clock signal generated by the signal source is respectively connected to the CLK terminal of the DQ flip-flop group and the input terminal of the CLK frequency divider, and the Q output terminal of the DQ flip-flop is connected to To the gate of the MOS tube, sequentially control the on-off of each MOS tube, thereby controlling the driving voltage on each group of piezoelectric ceramics;

图4为顺序分层控制时序图;Fig. 4 is a sequential hierarchical control sequence diagram;

图5为实验实测分时顺序控制与传统控制方法控制驱动叠压多层压电陶瓷输出位移曲线比较。Figure 5 is a comparison of output displacement curves of laminated multilayer piezoelectric ceramics driven by time-sharing sequence control and traditional control method.

具体实施方式detailed description

下面结合附图以及具体实施例进一步说明本发明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

如图1所示,本发明提供一种分时顺序驱动多层叠压式压电驱动器快速致动方法,该方法根据固体中波传播的物理特性,分时顺序驱动单层压电材料,驱动多层压电驱动器中各片压电陶瓷最大形变同时传递到顶端进行线性叠加,并减小波在每片压电陶瓷中传播耦合时相互削弱,从而驱动多层压电驱动器快速达到最大形变。本发明由多层压电陶瓷驱动器1、时序控制模块2、驱动电源模块3和快速开关模块4组成,时序控制模块2控制快速开关4通断使驱动电源3依次施加在单片压电陶瓷1上,使每片压电陶瓷在特定时刻达到最大形变,从而驱动整个多层压电驱动器快速致动。As shown in Figure 1, the present invention provides a time-sharing and sequential driving method for fast actuation of multi-layer laminated piezoelectric actuators. According to the physical characteristics of medium-wave propagation in solids, the method drives single-layer piezoelectric materials in time-sharing and sequential driving to drive multiple The maximum deformation of each piece of piezoelectric ceramic in the multilayer piezoelectric actuator is transmitted to the top for linear superposition at the same time, and the wave weakens each other when propagating and coupling in each piece of piezoelectric ceramic, thereby driving the multilayer piezoelectric actuator to quickly reach the maximum deformation. The present invention is composed of a multilayer piezoelectric ceramic driver 1, a timing control module 2, a driving power supply module 3 and a fast switch module 4. The timing control module 2 controls the switching of the fast switch 4 so that the driving power supply 3 is sequentially applied to the monolithic piezoelectric ceramic 1 On the other hand, each piece of piezoelectric ceramic reaches the maximum deformation at a specific moment, thereby driving the entire multilayer piezoelectric actuator to actuate rapidly.

该分时顺序驱动多层叠压式压电驱动器快速致动方法具体实现过程包括如下步骤:The specific implementation process of the time-sharing sequentially driving the fast actuation method of the multi-layer laminated piezoelectric driver includes the following steps:

步骤1)、对多层压电陶瓷驱动器中应力波传播的过程进行分析,其波动方程如下:Step 1), analyzing the process of stress wave propagation in the multilayer piezoelectric ceramic driver, the wave equation is as follows:

其中,u为质点沿轴向的位移,E为材料的弹性模量,ρ为材料的密度,t为时间变量,x为质点位置;Among them, u is the displacement of the particle along the axial direction, E is the elastic modulus of the material, ρ is the density of the material, t is the time variable, and x is the position of the particle;

以及固体中一维纵波的传播速度:and the propagation velocity of a 1D longitudinal wave in a solid:

其中,E为材料的弹性模量,ρ为材料的密度;Wherein, E is the modulus of elasticity of the material, and ρ is the density of the material;

步骤2)、根据多层压电驱动器的材料特性和结构尺寸,计算出波的传播速度与其在每层压电材料中传递的时间△t=d/c0Step 2), according to the material properties and structural dimensions of the multilayer piezoelectric driver, calculate the propagation velocity of the wave and the time Δt=d/c 0 it transmits in each layer of piezoelectric material;

步骤3)、设计一个时序控制电路模块,该模块能产生一系列时序控制信号,且相邻时序脉冲间的延时等于△t,具有相同的下降沿时刻;Step 3), designing a timing control circuit module, which can generate a series of timing control signals, and the delay between adjacent timing pulses is equal to Δt, and has the same falling edge moment;

步骤4)、电源控制模块提供直流高压,通过电子开关施加在每层压电陶瓷上;Step 4), the power supply control module provides DC high voltage, which is applied to each layer of piezoelectric ceramics through electronic switches;

步骤5)、时序控制模块产生的时序控制信号通过控制相应开关决定电压模块产生的高压在每层压电陶瓷上的开启和关闭。Step 5), the timing control signal generated by the timing control module determines the on and off of the high voltage generated by the voltage module on each layer of piezoelectric ceramics by controlling the corresponding switch.

分时驱动方法主要依靠时序控制模块、驱动电源模块和多层压电陶瓷驱动器来实现。下面以14层压电陶瓷组成的驱动器为例具体介绍本发明的实施方式。The time-sharing driving method mainly relies on a timing control module, a driving power supply module and a multilayer piezoelectric ceramic driver to realize it. In the following, an embodiment of the present invention will be described in detail by taking a driver composed of 14 layers of piezoelectric ceramics as an example.

如图2所示,图2为单组压电陶瓷连接方式和7组压电陶瓷连接方式示意图,其中,图2(a)为单组压电陶瓷连接方法,将两片压电陶瓷按照极化方向电学并联;图2(b)为传统控制方法与时序控制方法连线比较,传统控制方法是将所有的压电陶瓷电学并联连接,用同一驱动信号控制;时序控制方法是对每组压电陶瓷片分时顺序施加驱动电压;图2(b)右图中将14片压电陶瓷分为7组,相邻两片压电陶瓷的极化方向相反。每组压电陶瓷中间引出正电极,而上下表面则引出负电极;各组的正电极都需要单独连接驱动电压,而所有负电极则统一连接到电源地。As shown in Figure 2, Figure 2 is a schematic diagram of a single-group piezoelectric ceramic connection method and a 7-group piezoelectric ceramic connection method. The electrical parallel connection of the chemical direction; Fig. 2(b) is a connection comparison between the traditional control method and the sequential control method. The traditional control method is to connect all the piezoelectric ceramics in parallel and control them with the same driving signal; the sequential control method is to control each group of piezoelectric ceramics. The driving voltage is applied sequentially to the electric ceramics in time-sharing; in the right figure of Figure 2(b), 14 piezoelectric ceramics are divided into 7 groups, and the polarization directions of two adjacent piezoelectric ceramics are opposite. The positive electrode is drawn from the middle of each group of piezoelectric ceramics, and the negative electrode is drawn from the upper and lower surfaces; the positive electrodes of each group need to be connected to the driving voltage separately, and all the negative electrodes are connected to the power ground uniformly.

通过波动方程、压电材料特性和每组压电陶瓷的尺寸计算出应力波通过每层压电材料所需要的时间△t,也就是时序电路信号间的延时时间。The time Δt required for the stress wave to pass through each layer of piezoelectric material is calculated by the wave equation, the characteristics of the piezoelectric material and the size of each group of piezoelectric ceramics, which is the delay time between the sequential circuit signals.

如图3所示,由于驱动器有7组,因此相应需要产生7个时序控制信号。时序控制模块要求能够产生具有延时系列的时序脉冲,主要依靠稳态触发器来实现。As shown in Figure 3, since there are 7 groups of drivers, 7 timing control signals need to be generated correspondingly. The timing control module requires the ability to generate timing pulses with a delay series, which is mainly realized by steady-state triggers.

其中7个稳态触发器依次相连,上一个触发器的输出端Q与下一个触发器的输入端D相连,第一个触发器的输入接高电平;稳态触发器的时钟信号CLK由信号源输入的频率为f的高频方波,稳态触发器的置1端S统一接低电平。由触发器的特性,7个触发器的输出端Q1~Q7构成一个移位器,每两个序列的时差由时钟信号控制,其值为1/f秒,设置f=1/△t;稳态触发器的置0端R则由频率为f的高频方波经过分频器转化为频率为f/2n的低频信号控制,决定所有时序脉冲具有相同的下降沿时刻,决定了脉冲信号的频率。Among them, seven steady-state flip-flops are connected sequentially, the output terminal Q of the previous flip-flop is connected with the input terminal D of the next flip-flop, and the input of the first flip-flop is connected to high level; the clock signal CLK of the steady-state flip-flop is controlled by The signal source inputs a high-frequency square wave with a frequency of f, and the 1-setting terminal S of the steady-state trigger is uniformly connected to a low level. According to the characteristics of the flip-flop, the output terminals Q 1 ~ Q 7 of the seven flip-flops constitute a shifter, and the time difference between each two sequences is controlled by the clock signal, and its value is 1/f second, setting f=1/△t ; The 0-setting terminal R of the steady-state trigger is controlled by a high-frequency square wave with a frequency of f and converted into a low-frequency signal with a frequency of f/2 n through a frequency divider, which determines that all timing pulses have the same falling edge time, which determines The frequency of the pulse signal.

如图3所示,驱动电源模块主要由高压直流电源组成,快速开关主要由市售MOS管组成。高压直流电源通过相应MOS管的D端激励每层压电陶瓷,而时序控制模块产生的7个具有时序差的脉冲信号则控制相应MOS管的G基,决定电子开关的开启和关闭;驱动器输出的时序控制波形如图4所示。As shown in Figure 3, the driving power module is mainly composed of high-voltage DC power supply, and the fast switch is mainly composed of commercially available MOS tubes. The high-voltage DC power supply excites each layer of piezoelectric ceramics through the D terminal of the corresponding MOS tube, and the seven pulse signals with timing difference generated by the timing control module control the G base of the corresponding MOS tube to determine the opening and closing of the electronic switch; the driver outputs The timing control waveform is shown in Figure 4.

本发明在于通过分时顺序激励多层压电陶瓷驱动器的每层压电陶瓷,使它们产生的应力变形能同时传递到驱动器顶端,这样就可以进行线性叠加;而传统直接驱动时,各层压电陶瓷产生的应力波存在一定相位差,会发生应力部分抵消,从而使驱动器的响应速度降低,且输出位移也有所减少。而分时驱动则可以使各层产生的应力在很短的时间内迅速线性叠加,大幅度提升驱动器的响应速度与位移,图5所示为压电片应变输出波形。The present invention is to stimulate each layer of piezoelectric ceramics of the multilayer piezoelectric ceramic driver in time-sharing order, so that the stress and deformation generated by them can be transmitted to the top of the driver at the same time, so that linear superposition can be performed; There is a certain phase difference in the stress wave generated by the electroceramic, and the stress will be partially offset, so that the response speed of the driver is reduced, and the output displacement is also reduced. The time-sharing drive can make the stress generated by each layer linearly superimpose quickly in a short period of time, greatly improving the response speed and displacement of the driver. Figure 5 shows the output waveform of the piezoelectric sheet strain.

本发明的具体改进还在于驱动器的响应速度不再受驱动器的长度和驱动电压高低的影响。不论驱动器由多少层压电陶瓷组成,它都可以对各层产生的应力进行线性叠加,不改变整个驱动器的响应速度,如图5所示。此外,根据分时驱动的原理,驱动器的响应速度不会随驱动电压的改变而变化。The specific improvement of the present invention is that the response speed of the driver is no longer affected by the length of the driver and the level of the driving voltage. No matter how many layers of piezoelectric ceramics the driver consists of, it can linearly superimpose the stress generated by each layer without changing the response speed of the whole driver, as shown in Figure 5. In addition, according to the principle of time-sharing driving, the response speed of the driver will not change with the change of the driving voltage.

Claims (5)

1.一种分时顺序驱动多层叠压式压电陶瓷驱动器快速致动方法,该方法通过由多层叠压式压电驱动器(1)、时序控制模块(2)、驱动电源模块(3)和快速开关(4)组成的系统实现,其特征在于:实现过程包含:1. A fast actuation method for time-sharing and sequentially driving a multilayer laminated piezoelectric ceramic driver, the method is composed of a multilayer laminated piezoelectric driver (1), a timing control module (2), a driving power supply module (3) and The system realization that fast switch (4) forms is characterized in that: realization process comprises: 步骤1)、选用一个通用的多层叠压式压电驱动器(1),或是设计制作具有特定结构的多层叠压式压电驱动器(1),由波在固体中传播的波动微分方程:Step 1), select a general-purpose multi-layer laminated piezoelectric driver (1), or design and manufacture a multi-layer laminated piezoelectric driver (1) with a specific structure, the wave differential equation for wave propagation in a solid: 其中,u为质点沿轴向的位移,E为材料的弹性模量,ρ为材料的密度,t为时间变量,x为质点位置;Among them, u is the displacement of the particle along the axial direction, E is the elastic modulus of the material, ρ is the density of the material, t is the time variable, and x is the position of the particle; 可得固体中一维纵波的传播速度:The propagation velocity of one-dimensional longitudinal wave in solid can be obtained as: 其中,E为材料的弹性模量,ρ为材料的密度;Wherein, E is the modulus of elasticity of the material, and ρ is the density of the material; 步骤2)、根据多层叠压式压电驱动器的材料特性和结构尺寸,计算出波的传播速度与其在每层压电材料中传递的时间,从而可得波在多层叠压式压电驱动器中的各片压电陶瓷上传递的时间差;Step 2), according to the material properties and structural dimensions of the multilayer laminated piezoelectric driver, calculate the propagation speed of the wave and the time it travels in each layer of piezoelectric material, so that the wave in the multilayer laminated piezoelectric driver The time difference transmitted on each piece of piezoelectric ceramic; 步骤3)、按照波在多层叠压式压电驱动器中各片压电陶瓷上传递的时间差,设计时序控制模块(2),使时序控制模块(2)的N个输出时序信号依次控制快速开关(4)的闭合,快速开关(4)闭合后驱动电源模块(3)依次施加在多层叠压式压电驱动器上,使多层叠压式压电驱动器(1)中各片压电陶瓷产生的位移能进行线性叠加,从而实现快速致动,该多层叠压式压电驱动器致动方法大大提升多层叠压式压电驱动器致动速度与致动位移。Step 3), according to the time difference of waves transmitted on each piece of piezoelectric ceramic in the multilayer laminated piezoelectric driver, design the timing control module (2), so that the N output timing signals of the timing control module (2) control the fast switch in sequence (4) is closed, and after the fast switch (4) is closed, the driving power supply module (3) is sequentially applied to the multi-layer laminated piezoelectric driver, so that each piece of piezoelectric ceramic in the multi-layer laminated piezoelectric driver (1) produces The displacement can be linearly superimposed, thereby realizing fast actuation, and the actuation method of the multilayer laminated piezoelectric actuator greatly improves the actuation speed and actuation displacement of the multilayer laminated piezoelectric actuator. 2.根据权利要求1所述的一种分时顺序驱动多层叠压式压电陶瓷驱动器快速致动方法,其特征在于:所述具有特定结构的多层叠压式压电驱动器(1)由若干层压电陶瓷片叠压组成,每片陶瓷片沿叠压方向上下端面镀有电极;各陶瓷片极化处理后同相端面相接,构成结构串联,电学并联。2. A time-sharing sequentially driving multilayer laminated piezoelectric ceramic driver fast actuation method according to claim 1, characterized in that: the multilayer laminated piezoelectric driver (1) with a specific structure consists of several It is composed of laminated piezoelectric ceramic sheets, each ceramic sheet is plated with electrodes on the upper and lower end surfaces along the lamination direction; each ceramic sheet is connected to the same phase end surface after polarization treatment, forming a structural series connection and an electrical parallel connection. 3.根据权利要求1所述的一种分时顺序驱动多层叠压式压电陶瓷驱动器快速致动方法,其特征在于:所述时序控制模块(2)由N个稳态触发器和分频器组成,N个稳态触发器依次相连,上一个触发器的输出端Q与下一个触发器的输入端D相连,第一个触发器的输入 接高电平;稳态触发器的时钟信号CLK由信号源输入的频率为f的高频方波,稳态触发器的置1端S统一接低电平,由触发器的特性,N个触发器的输出端Q0~QN构成一个移位器,每两个序列的时差由时钟信号控制,其值为1/f秒。3. A time-sharing sequentially driving multilayer laminated piezoelectric ceramic driver fast actuation method according to claim 1, characterized in that: the timing control module (2) consists of N steady-state triggers and frequency division N steady-state flip-flops are connected sequentially, the output terminal Q of the previous flip-flop is connected to the input terminal D of the next flip-flop, and the input of the first flip-flop is connected to high level; the clock signal of the steady-state flip-flop CLK is a high-frequency square wave with frequency f input by the signal source, and the 1-setting terminal S of the steady-state flip-flop is uniformly connected to a low level. According to the characteristics of the flip-flop, the output terminals Q 0 ~ Q N of N flip-flops form a The shifter, the time difference between each two sequences is controlled by a clock signal with a value of 1/f seconds. 4.根据权利要求3所述的一种分时顺序驱动多层叠压式压电陶瓷驱动器快速致动方法,其特征在于:所述时序控制模块(2)中频率为f的高频方波信号经过分频器分频后得到频率为f/2n低频信号,用来控制所有触发器的置0端R,决定了控制信号的频率。4. A time-sharing sequentially driving multilayer laminated piezoelectric ceramic driver fast actuation method according to claim 3, characterized in that: the high-frequency square wave signal with a frequency of f in the timing control module (2) After the frequency division by the frequency divider, the frequency is f/2 n low-frequency signal, which is used to control the 0 terminal R of all flip-flops, which determines the frequency of the control signal. 5.根据权利要求3所述的一种分时顺序驱动多层叠压式压电陶瓷驱动器快速致动方法,其特征在于:所述快速开关(4)中N个快速开关为MOS管,也可采用性能相当的快速电子开关器件。5. A time-sharing sequentially driving multilayer laminated piezoelectric ceramic driver fast actuation method according to claim 3, characterized in that: the N fast switches in the fast switches (4) are MOS tubes, and can also be Fast electronic switching devices with comparable performance are used.
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