CN105207518B - Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method - Google Patents
Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method Download PDFInfo
- Publication number
- CN105207518B CN105207518B CN201510729823.2A CN201510729823A CN105207518B CN 105207518 B CN105207518 B CN 105207518B CN 201510729823 A CN201510729823 A CN 201510729823A CN 105207518 B CN105207518 B CN 105207518B
- Authority
- CN
- China
- Prior art keywords
- pressure type
- type piezoelectric
- time
- piezoelectric
- laminate pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 47
- 239000000919 ceramic Substances 0.000 claims abstract description 52
- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 23
- 239000007787 solid Substances 0.000 claims abstract description 7
- 230000008569 process Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 238000013461 design Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 230000000644 propagated effect Effects 0.000 claims description 4
- 239000002305 electric material Substances 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 239000002356 single layer Substances 0.000 abstract description 2
- 230000003313 weakening effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 13
- 230000004044 response Effects 0.000 description 10
- 238000003475 lamination Methods 0.000 description 6
- 230000005611 electricity Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012163 sequencing technique Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention provides a rapid actuating method of a time-sharing sequential driving multilayer laminated piezoelectric driver, which sequentially drives single-layer piezoelectric materials in a time-sharing manner according to the physical characteristics of wave propagation in a solid, drives the maximum deformation of each piece of piezoelectric ceramic in the multilayer piezoelectric driver to be simultaneously transmitted to the top end for linear superposition, and reduces mutual weakening of waves during propagation coupling in each piece of piezoelectric ceramic, thereby driving the multilayer piezoelectric driver to rapidly reach the maximum deformation. The invention is composed of a multilayer piezoelectric ceramic driver (1), a time sequence control module (2), a driving power supply module (3) and a quick switch (4), wherein the time sequence control module (2) controls the quick switch (4) to apply the driving power supply (3) to a single piece of piezoelectric ceramic (1) in sequence, so that each piece of piezoelectric ceramic reaches the maximum deformation at a specific moment, and the whole multilayer piezoelectric driver is driven to actuate quickly. The invention does not need to change the structure of the traditional multilayer piezoelectric driver, and has the advantages of quick actuation, large actuation displacement, wide application range, simple driving circuit, easy realization and the like.
Description
Technical field
The present invention relates to the technical field that piezoelectric supersonic drives, drive multi-laminate pressure type pressure particularly to a kind of timesharing order
Electric drive fast actuating method.
Background technology
Piezoelectric has the advantages that fast response time, High power output, conversion efficiency height, control mode are relatively easy, often
It is used as micro-displacement actuator.Wherein fast response time is the most important advantage of piezoelectric actuator, also in fuel injector, printing
It is widely used in the devices such as machine.
Due to piezoelectric effect and inverse piezoelectric effect, applied voltage on the piezoelectric after polarization, piezoelectric can produce
Deformation, deformation becomes certain relation with institute's making alive thereon；Because monolithic piezoelectric material strain is little, will for some actuation speeds
Ask occasion high, that displacement is relatively large, such as piezoelectric pump, piezo electric valve etc., generally activated with piezoelectric pile, that is, adopt the side of Multi-stacking compaction
Method, simultaneously drives multi-disc piezoelectric deformation to obtain fast actuating.The control of multi-layer piezoelectric actuator is typically with electricity
Method in parallel, applies control signal on multi-disc piezoelectric simultaneously, produces after multi-disc piezoelectric signal driven simultaneously
Change shape, to reach quick and relatively large displacement actuating.Because the stacked piezoelectric of multi-disc deforms simultaneously, every layer material
Between deformation influence each other, the deformation of material can mutually weaken it is impossible to give full play to the performance of every sheet material.
Control method currently for multilayer layer stacked piezoelectric actuator is mainly concentrated in reducing the slow of Piezoelectric Driving
Stagnant and creep, improve Piezoelectric Driving displacement linear, improve the driving methods such as piezoelectric actuated displacement.These driving methods are most
It is the angle from electricity or Automatic Control Theory, higher driving has been reached with the signal of telecommunication compensating or fixing quantity drives linear
Degree or larger drive displacement.And analyze from physical characteristics, with the communication theory of ripple, the actuating of research raising Piezoelectric Driving
Speed has no related to the Piezoelectric Driving control method of displacement and reports for work.
Content of the invention
Part in view of the shortcomings of the prior art, the present invention proposes a kind of brand-new timesharing sequential driving method to drive
Piezoelectric actuator, obtains and faster responds and export bigger displacement.
The present invention is achieved through the following technical solutions：A kind of timesharing order drives multi-laminate pressure type piezoelectric ceramic actuator fast
Fast actuating method, the method is passed through by multi-laminate pressure type piezoelectric actuator, time-sequence control mode, high-speed switch and driving power supply mould
The system of block composition is realized it is characterised in that process of realizing comprises：
Step 1), select a general multi-laminate pressure type piezoelectric actuator, or design and produce there is ad hoc structure
Multi-laminate pressure type piezoelectric actuator, the wave differential equation propagated in solids by ripple：
Wherein, u is particle displacement vertically, and E is the elastic modelling quantity of material, and ρ is the density of material, and t is time variable,
X is particle position；
The spread speed of one-dimensional compressional wave in solid can be obtained：
Wherein, E is the elastic modelling quantity of material, and ρ is the density of material；
Step 2), the material behavior according to multilayer piezoelectric acutator and physical dimension, calculate the spread speed of ripple and its
The time of transmission in every layer of piezo-electric material, thus can obtain what ripple transmitted on each piezoelectric ceramics in multilayer piezoelectric acutator
Time difference；
Step 3), according on ripple each piezoelectric ceramics in multilayer piezoelectric acutator transmission time difference, design sequential control
Molding block, makes N number of output timing signal of time-sequence control mode control the closure of high-speed switch successively, high-speed switch closes rear-guard
Galvanic electricity source module is sequentially applied on multilayer piezoelectric acutator, so that each piezoelectric ceramics in multi-laminate pressure type piezoelectric actuator is produced
Displacement energy carry out linear superposition, thus realizing fast actuating, this multi-laminate pressure type piezoelectric actuator actuating method greatly promotes
Multilayer piezoelectric acutator actuation speed and actuating displacement.
Wherein, the described multilayer piezoelectric acutator with ad hoc structure is laminated by some layers of piezoelectric ceramic piece and forms, every
Potsherd edge laminates direction upper and lower end face and is coated with electrode simultaneously；After each potsherd polarization process, homophase end face connects, and constitutes structure string
Connection, electrical parallel.
Wherein, described time-sequence control mode is made up of N number of steady state trigger and frequency divider, N number of steady state trigger phase successively
Even, the outfan Q of a upper trigger is connected with the input D of next trigger, and the input of first trigger connects high electricity
Flat；The frequency that the clock signal clk of steady state trigger is inputted by signal source is the high frequency square wave of f, steady state trigger put 1 end S
Unification connects low level, by the characteristic of trigger, the outfan Q of N number of trigger0～QNConstitute a shift unit, each two sequence
The time difference, its value was the 1/f second by clock signal control.
Wherein, the commercially available conventional frequency divider of frequency divider in described time-sequence control mode, frequency is that the high-frequency square-wave signal of f passes through
Obtaining frequency after frequency divider frequency dividing is f/2nLow frequency signal, for controlling setting to 0 of all triggers to hold R, determines control signal
Frequency.
Wherein, in described high-speed switch module, N number of high-speed switch is commercially available metal-oxide-semiconductor, and performance suitable quick may also be employed
Electronic switching device.
The principle of the present invention is：The present invention is by propagating at it to the structure of multilayer piezoelectric ceramic driver and stress wave
Process analyses find, traditional direct driving method have ignored driver have multilayer piezoelectric ceramic layer constitute, to drive
Dynamic device has regarded an entirety as driver when encouraging a pulse signal.But actually because every lamination electroceramics distance drives
The distance on device top is different, and when all piezoceramics layers are excited simultaneously, they can produce stress deformation simultaneously, leads to each
Stress wave can not be concurrently propagated to driver top, there is phase contrast and stress wave refraction and reflection can occur between them.Therefore,
Conventional drive method can make the response speed of driver reduce, and Stress displacement can partial offset fail to be fully used.Point
When driving method then control power module to encourage corresponding piezoceramics layer in different moment by time-sequence control mode, make institute
There is the stress wave that ceramic layer produces to be concurrently propagated to driver top, carry out linear superposition.Not only may be used by timesharing driving method
Significantly to lift the response speed of multilayer piezoelectric ceramic driver, driver output displacement also can be made to be improved simultaneously.
Present invention advantage compared with prior art is：
(1), fast response time of the present invention, can reach maximum displacement output in shorter time；
(2), output displacement is big, and experimental result display output displacement is about the twice of prior art.
Brief description
Fig. 1 is laminated type multilayer piezoelectric acutator timesharing order driving principle figure, and wherein, 1 drives for multilayer piezoelectric ceramic
Device, 2 is time-sequence control mode, and 3 is driving power module, and 4 is high-speed switch；Time-sequence control mode 2 is according to ripple in piezoelectric
In transmission speed, be sequentially generated control signal control high-speed switch 4 break-make, high-speed switch 4 is by timing control signal control
In turn switch on, thus the driving power supply that driving power module 3 is produced is sequentially applied on each lamination electroceramics, drive piezoelectricity pottery
Porcelain fast actuating；
Fig. 2 is single group piezoelectric ceramics connected mode and 7 groups of piezoelectric ceramics connected mode schematic diagrams, and wherein, Fig. 2 (a) is single
Group piezoelectric ceramics method of attachment, by two panels piezoelectric ceramics according to polarised direction electrical parallel；Fig. 2 (b) be traditional control method with
Sequential control method line compares, and traditional control method is to connect all of piezoelectric ceramics electrical parallel, drives letter with same
Number control；Sequential control method is to apply driving voltage to every group of piezoelectric ceramic piece timesharing order；
Fig. 3 is laminated type multilayer piezoelectric ceramic sequential control circuit schematic diagram；Signal source produces clock signal and is respectively connected to
To the CLK end of DQ trigger group and the input of CLK frequency divider, the Q output of DQ trigger is connected to the grid of metal-oxide-semiconductor, sequentially
Control the break-make of each metal-oxide-semiconductor, thus controlling the driving voltage on every group of piezoelectric ceramics；
Fig. 4 is order hierarchical control sequential chart；
Fig. 5 is that experiment actual measurement timesharing sequential control controls driving to laminate multilayer piezoelectric ceramic carry-out bit with traditional control method
Move curve ratio relatively.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment further illustrates the present invention.
As shown in figure 1, the present invention provides a kind of timesharing order to drive multi-laminate pressure type piezoelectric actuator fast actuating method,
The method drives single layer of piezoelectric material, drives multilayer piezoelectric acutator according to the physical characteristics of solid medium wave propagation, timesharing order
In each piezoelectric ceramics largest deformation be simultaneously communicating to top and carry out linear superposition, and reduce ripple and propagate in every piezoelectric ceramics
Mutually weaken during coupling, thus driving multilayer piezoelectric acutator to be rapidly achieved largest deformation.The present invention is driven by multilayer piezoelectric ceramic
Dynamic device 1, time-sequence control mode 2, driving power module 3 and high-speed switch module 4 form, and time-sequence control mode 2 controls quickly to be opened
Closing 4 break-makes makes driving power supply 3 be sequentially applied on monolithic piezoelectric ceramic 1, makes every piezoelectric ceramics reach maximum in particular moment
Deformation, thus drive whole multilayer piezoelectric acutator fast actuating.
This timesharing order driving multi-laminate pressure type piezoelectric actuator fast actuating method implements process and includes walking as follows
Suddenly：
Step 1), the process of stress wave propagation in multilayer piezoelectric ceramic driver is analyzed, its wave equation is as follows：
Wherein, u is particle displacement vertically, and E is the elastic modelling quantity of material, and ρ is the density of material, and t is time variable,
X is particle position；
And in solid one-dimensional compressional wave spread speed：
Wherein, E is the elastic modelling quantity of material, and ρ is the density of material；
Step 2), the material behavior according to multilayer piezoelectric acutator and physical dimension, calculate the spread speed of ripple and its
The time △ t=d/c of transmission in every layer of piezo-electric material0；
Step 3), one sequential control circuit module of design, this module can produce a series of timing control signals, and adjacent
Time delay between time sequential pulse is equal to △ t, has the identical trailing edge moment；
Step 4), energy supply control module provide high direct voltage, by electrical switch be applied to every lamination electroceramics on；
Step 5), time-sequence control mode produce timing control signal pass through control respective switch determine voltage module produce
High pressure every lamination electroceramics on opening and closing.
Timesharing driving method relies primarily on time-sequence control mode, driving power module and multilayer piezoelectric ceramic driver to be come in fact
Existing.Taking the driver of 14 lamination electroceramics compositions as a example specifically introduce embodiments of the present invention below.
As shown in Fig. 2 Fig. 2 is single group piezoelectric ceramics connected mode and 7 groups of piezoelectric ceramics connected mode schematic diagrams, wherein,
Fig. 2 (a) is single group piezoelectric ceramics method of attachment, by two panels piezoelectric ceramics according to polarised direction electrical parallel；Fig. 2 (b) is tradition
Control method is compared with sequential control method line, and traditional control method is to connect all of piezoelectric ceramics electrical parallel, uses
Same drive signal controls；Sequential control method is to apply driving voltage to every group of piezoelectric ceramic piece timesharing order；Fig. 2 (b) is right
14 piezoelectric ceramics are divided into 7 groups by figure, and the polarised direction of adjacent two panels piezoelectric ceramics is contrary.Draw in the middle of every group of piezoelectric ceramics
Anelectrode, and upper and lower surface then draws negative electrode；The anelectrode of each group is required for individually connecting driving voltage, and all negative electrodes
Then unification is connected to power supply ground.
Stress wave is gone out by the Size calculation of wave equation, piezoelectric material properties and every group of piezoelectric ceramics and passes through often to be laminated electricity
Time △ t required for material, that is, the delay time between sequence circuit signal.
As shown in figure 3, because driver has 7 groups, therefore in requisition for 7 timing control signals of generation.Sequencing contro mould
Block requires to produce the time sequential pulse with time delay series, relies primarily on steady state trigger to realize.
Wherein 7 steady state triggers are sequentially connected, the input of the outfan Q of a upper trigger and next trigger
D is connected, and the input of first trigger connects high level；The clock signal clk of steady state trigger is f by the frequency that signal source inputs
High frequency square wave, steady state trigger put 1 end S unification connect low level.By the characteristic of trigger, the outfan Q of 7 triggers1
～Q7Constitute a shift unit, the time difference of each two sequence, its value was the 1/f second, arranges f=1/ △ t by clock signal control；Surely
Then by frequency, the high frequency square wave for f is converted into frequency for f/2 through frequency divider to the end R that sets to 0 of state triggernLow frequency signal control
System, determines that all time sequential pulses have the identical trailing edge moment, determines the frequency of pulse signal.
As shown in figure 3, driving power module is mainly made up of high-voltage DC power supply, high-speed switch is mainly by commercially available metal-oxide-semiconductor
Composition.High-voltage DC power supply is often laminated electroceramics by the D end excitation of corresponding metal-oxide-semiconductor, and 7 tools that time-sequence control mode produces
The pulse signal having difference of injection time then controls the G base of corresponding metal-oxide-semiconductor, determines the opening and closing of electrical switch；Driver output
Sequencing contro waveform is as shown in Figure 4.
The invention reside in encourage the often lamination electroceramics of multilayer piezoelectric ceramic driver by timesharing order, them are made to produce
Stress deformation can be simultaneously communicating to driver top, so can be carried out linear superposition；And during tradition direct drive, each layer
There is certain phase contrast it may occur that stress partial offset in the stress wave that piezoelectric ceramics produces, so that the response speed of driver
Reduce, and output displacement has also reduced.And timesharing drives and the stress that each layer produces then can be made rapid in a short period of time
Linear superposition, the significantly response speed of lifting driver and displacement, Fig. 5 show piezoelectric patches strain output waveform.
The concrete improvement of the present invention also resides in the length of response speed device no longer driven and the driving voltage height of driver
Low impact.No matter driver is formed by how much being laminated electroceramics, the stress that it can produce to each layer carry out linear superposition,
Do not change the response speed of whole driver, as shown in Figure 5.Additionally, the principle being driven according to timesharing, the response speed of driver
Will not change with the change of driving voltage.
Claims (5)
1. a kind of timesharing order drives multi-laminate pressure type piezoelectric ceramic actuator fast actuating method, and the method is passed through by multi-laminate
The system that pressure type piezoelectric actuator (1), time-sequence control mode (2), driving power module (3) and high-speed switch (4) form is realized,
It is characterized in that：The process of realization comprises：
Step 1), select general multi-laminate pressure type piezoelectric actuator (1), or design and produce there are the many of ad hoc structure
Stacking pressure type piezoelectric actuator (1), the wave differential equation propagated in solids by ripple：
Wherein, u is particle displacement vertically, and E is the elastic modelling quantity of material, and ρ is the density of material, and t is time variable, and x is
Particle position；
The spread speed of one-dimensional compressional wave in solid can be obtained：
Wherein, E is the elastic modelling quantity of material, and ρ is the density of material；
Step 2), the material behavior according to multi-laminate pressure type piezoelectric actuator and physical dimension, calculate the spread speed of ripple with
Its time transmitted in every layer of piezo-electric material, thus each piezoelectric ceramics in multi-laminate pressure type piezoelectric actuator for the ripple can be obtained
The time difference of upper transmission；
Step 3), according on ripple each piezoelectric ceramics in multi-laminate pressure type piezoelectric actuator transmission time difference, design sequential
Control module (2), makes N number of output timing signal of time-sequence control mode (2) control the closure of high-speed switch (4) successively, quickly
After switch (4) closure, driving power module (3) is sequentially applied on multi-laminate pressure type piezoelectric actuator, makes multi-laminate pressure type piezoelectricity
In driver (1), the displacement energy of each piezoelectric ceramics generation carries out linear superposition, thus realizing fast actuating, this multi-laminate pressure type
Piezoelectric actuator actuating method greatly promotes multi-laminate pressure type piezoelectric actuator actuation speed and actuating displacement.
2. a kind of timesharing order according to claim 1 drives multi-laminate pressure type piezoelectric ceramic actuator fast actuating side
Method it is characterised in that：Described multi-laminate pressure type piezoelectric actuator (1) with ad hoc structure is laminated by some layers of piezoelectric ceramic piece
Composition, every potsherd edge laminates direction upper and lower end face and is coated with electrode；After each potsherd polarization process, homophase end face connects, and constitutes
Structures in series, electrical parallel.
3. a kind of timesharing order according to claim 1 drives multi-laminate pressure type piezoelectric ceramic actuator fast actuating side
Method it is characterised in that：Described time-sequence control mode (2) is made up of N number of steady state trigger and frequency divider, N number of steady state trigger according to
Secondary connected, the outfan Q of a upper trigger is connected with the input D of next trigger, and the input of first trigger connects
High level；The frequency that the clock signal clk of steady state trigger is inputted by signal source is the high frequency square wave of f, steady state trigger put 1
End S unification connects low level, by the characteristic of trigger, the outfan Q of N number of trigger0～QNConstitute a shift unit, each two sequence
The time difference of row, its value was the 1/f second by clock signal control.
4. a kind of timesharing order according to claim 3 drives multi-laminate pressure type piezoelectric ceramic actuator fast actuating side
Method it is characterised in that：Described time-sequence control mode (2) medium frequency is that the high-frequency square-wave signal of f obtains after frequency divider frequency dividing
Frequency is f/2nLow frequency signal, for controlling setting to 0 of all triggers to hold R, determines the frequency of control signal.
5. a kind of timesharing order according to claim 3 drives multi-laminate pressure type piezoelectric ceramic actuator fast actuating side
Method it is characterised in that：In described high-speed switch (4), N number of high-speed switch is metal-oxide-semiconductor, and performance suitable swift electron may also be employed
Switching device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510729823.2A CN105207518B (en) | 2015-10-30 | 2015-10-30 | Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510729823.2A CN105207518B (en) | 2015-10-30 | 2015-10-30 | Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105207518A CN105207518A (en) | 2015-12-30 |
| CN105207518B true CN105207518B (en) | 2017-02-22 |
Family
ID=54955010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510729823.2A Expired - Fee Related CN105207518B (en) | 2015-10-30 | 2015-10-30 | Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105207518B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108448928B (en) * | 2018-05-07 | 2019-08-27 | 合肥工业大学 | A kind of more stacked piezoelectric actuator independence time-sharing driving devices and method |
| CN110632173A (en) * | 2018-06-22 | 2019-12-31 | 杨宗智 | Knocking detection device |
| CN111740641B (en) * | 2020-07-22 | 2021-05-04 | 合肥工业大学 | Alternating independent time-sharing driving method of multi-stack piezoelectric stack actuator |
| CN112260579B (en) * | 2020-09-12 | 2021-09-03 | 西安交通大学 | Time-sharing driving actuation method of piezoelectric actuator capable of keeping displacement in outage state |
| CN113238679B (en) * | 2021-05-27 | 2024-05-17 | 北京京东方技术开发有限公司 | Touch sensor, manufacturing method thereof, driving method thereof and electronic equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004312938A (en) * | 2003-04-09 | 2004-11-04 | Olympus Corp | Ultrasonic motor device |
| JP2012065454A (en) * | 2010-09-16 | 2012-03-29 | Toyota Industries Corp | Vibration actuator |
| CN102064732B (en) * | 2010-11-17 | 2013-03-06 | 北京理工大学 | Piezoelectric ceramic driving power supply and control method thereof |
| CN103973159B (en) * | 2014-04-26 | 2016-03-30 | 合肥工业大学 | Miniature Inchworm type Piezoelectric Driving rotary joint mechanism |
-
2015
- 2015-10-30 CN CN201510729823.2A patent/CN105207518B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN105207518A (en) | 2015-12-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105207518B (en) | Time-sharing sequential driving multi-layer laminated piezoelectric driver rapid actuating method | |
| EP2086031A3 (en) | Piezoelectric/electrostrictive film element and method manufacturing the same | |
| CN106198724B (en) | A kind of multistable ultrasound detection sensor | |
| CN104467524B (en) | Working method of plate type linear piezoelectric motor based on in-plane mode | |
| CN103943772B (en) | Monolithic piezoelectric transducer and preparation method thereof | |
| CN103000801A (en) | Energy converter and energy conversion module | |
| CN108448928B (en) | A kind of more stacked piezoelectric actuator independence time-sharing driving devices and method | |
| CN101596522A (en) | Inertial piezoelectric exciting device and implementation method | |
| CN108389958A (en) | Ultrasonic activation element and ultrasonic sensor | |
| CN105842348B (en) | PZT (piezoelectric transducer) and preparation method for encouraging and receiving non-disperse supersonic guide-wave | |
| CN101854153A (en) | Piezoelectric type high-frequency vibrating table | |
| WO2021043249A1 (en) | Piezoelectric drive apparatus and device | |
| CN105559820A (en) | Ultrasonic measurement device and ultrasonic imaging device | |
| CN201697936U (en) | Piezoelectric high-frequency vibration table | |
| CN204068758U (en) | Piezoelectric vibrator and comprise the precision displacement platform of this piezoelectric vibrator | |
| CN204348762U (en) | A kind of piezo-activator | |
| CN104538545B (en) | Ferroelastic domain switching based large actuating strain piezoelectric actuator | |
| CN103199733B (en) | Piezoelectric actuator and manufacturing method thereof | |
| CN101562409B (en) | Piezoelectric structure damping control object compensation method | |
| CN107070297A (en) | Laminated type flexure type piezoelectric ceramic actuator | |
| WO2007112741A1 (en) | A multilayer piezoelectric bender | |
| CN106423810A (en) | Performance parameter variable ultrasonic amplitude-change pole | |
| Ma et al. | Investigation on actuation performance of continuous fiber reinforced piezoelectric composite actuator | |
| CN202334863U (en) | Novel intelligent vibration isolation and noise reduction composite structure system | |
| CN108493324B (en) | Piezoelectric fiber composite material with double-wafer structure and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170222 Termination date: 20201030 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |