CN108445293A - A kind of quantum chip port impedance test device and measurement method - Google Patents
A kind of quantum chip port impedance test device and measurement method Download PDFInfo
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- CN108445293A CN108445293A CN201810528267.6A CN201810528267A CN108445293A CN 108445293 A CN108445293 A CN 108445293A CN 201810528267 A CN201810528267 A CN 201810528267A CN 108445293 A CN108445293 A CN 108445293A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/08—Measuring resistance by measuring both voltage and current
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Abstract
The invention discloses a kind of quantum chip port impedance test device and measurement methods, belong to quantum regime.Accurately easily quantum chip port impedance test device includes lock-in amplifier, relay array switching circuit, quantum chip, MCU controllers, host computer to the present invention, relay array switching circuit is every to be connected with each port of quantum chip all the way, relay array switching circuit includes dpdt relay, dpdt relay connects MCU controllers, and MCU controllers connect host computer.The test method of the present invention includes that the output of lock-in amplifier signal is adjusted to minimum voltage, the signal output of lock-in amplifier is adjusted to test voltage value, open the communication program of host computer, it in turn switches on quantum chip and needs the port measured, utilize the lock-in amplifier programmed acquisition voltage and current data of host computer.Apparatus of the present invention and measurement method have the advantages that measurement efficiency it is high, it is easy to operate, avoid quantum chip puncture.
Description
Technical field
The present invention relates to a kind of quantum chip field, more particularly to a kind of quantum chip port impedance test device and measurement
Method.
Background technology
In quantum chip field, quantum chip port impedance is an important external table of quantum chip device performance parameters
Sign.The method of current measurement resistance is not fully appropriate for measuring quantum chip, because quantum chip measurement is needed with minimum
Voltage.General voltmeter cannot be tested directly, be measured again after amplification, and influence of noise is also very big.If universal using tradition
The sub- chip of multimeter directly measured quantities can directly puncture quantum chip certain port.If using general electric bridge instrument, also can
There is the uncertain voltage for quantum chip pressure resistance, the resistance of conducting wire can be brought to miss again using general resistance measurement with voltammetry
Difference.Since quantum chip measurement is needed with minimum voltage, it is meant that the electric current for flowing through chip is also smaller.Traditionally, it simulates
After switch is commonly used to channel switching, but analog switch is closed, the channel of closing also has certain small leakage current, exactly because
Electric current when for this leakage current close to measurement quantum chip, can cause error, therefore traditional analog switchs the amount of being also not suitable for
Sub- chip impedance Measurement channel switching.This, which means that, needs to realize switching with mechanical switch, but general relay electromagnetism is dry
It disturbs relatively by force, there is also pulse this problems that switch is closed moment, and quantum chip can be caused breakdown.Now conventional is anti-
Its protection voltage of the ESD devices such as surge device such as TVS diode, varistor, gas-discharge tube is relative to some quantum chips
Measurement voltage it is all too high, do not have protective effect.
In addition, the prior art mainly adopts the methods manually tested, but the method for artificial manual test is on the one hand
It is inefficient, on the other hand, since the electrostatic of human body in operating process or artificial misoperation are easy to punch through damage quantum
Chip, by taking a 16 port chip ports as an example, if as soon as between two two-ports impedance be required to test time, number reaches
It is 120 times, cumbersome.
Therefore, how not only to meet quantum chip port impedance low-voltage, high-precision measurement request, but also avoid quantum
Chip be damaged in measurement process be in the prior art urgent need to resolve the technical issues of.
Invention content
1, it to solve the problems, such as
Device and method measuring accuracy to measuring quantum chip impedance in the prior art is low, quantum chip be easy it is breakdown
And the problem that manual testing's efficiency is low, the present invention provide a kind of really easily quantum chip port impedance test device and measurement
Method.The present invention carries out small signal using lock-in amplifier and exports weak-signal measurement, using dpdt relay permutation hard
It is realized on part and measures circuit any switching laws between multiport, greatly improve measurement accuracy, electromagnetic security and test effect
Rate avoids quantum wafer damage.
2, technical solution
The present invention is to solve above-mentioned technical problem by the following technical programs：
A kind of quantum chip port impedance test device, including lock-in amplifier, relay array switching circuit, quantum core
Piece, MCU controllers, host computer, the output end of the lock-in amplifier connect the input terminal of the relay array switching circuit,
The output end of the relay array switching circuit connects the input terminal of the lock-in amplifier, the relay array switching electricity
Per being connected all the way with each port of quantum chip, the relay array switching circuit includes dpdt relay on road,
The dpdt relay connects the MCU controllers, and the MCU controllers connect host computer.
Preferably, the relay array switching circuit is connected per dpdt relay all the way with single channel filter, institute
Single channel filter is stated with the quantum chip single port to be connected.
Preferably, the relay array switching circuit further includes hilted broadsword relay, and the dpdt relay passes through
The hilted broadsword relay is connected to the quantum chip port.
Preferably, the coil both ends of the dpdt relay and the hilted broadsword relay be respectively equipped with filter capacitor and
Diode, common end are equipped with filter, filter capacitor are connected between contact.
Preferably, the lock-in amplifier connects PC machine by cable, and there is the PC machine display reading locking phase to put
The data outputting module of the electric current of big device output end and the voltage of lock-in amplifier input terminal.
Preferably, the lock-in amplifier passes through BNC cable connections with the relay array switching circuit.
Preferably, the MCU controllers connect toggle switch.
Preferably, the MCU controllers are connected to host computer by USB interface or UART interface.
Preferably, further include circuit board, the MCU controllers, relay array, USB interface or UART serial ports and control
The toggle switch for making the relay array switching circuit is set on circuit board.
Preferably, the present invention also provides a kind of measurement methods of quantum chip port impedance test device, including following step
Suddenly：
1) output of the signal of the lock-in amplifier is adjusted to 0V；
2) lock-in amplifier, relay array switching circuit, quantum chip are linked together；
3) output of the signal of the lock-in amplifier is adjusted to test voltage value, the test voltage value is less than quantum core
The breakdown voltage value of piece；
4) communication program for opening the host computer, opens the lock-in amplifier program of the host computer；
5) sent instructions to the MCU controllers by the communication program of the host computer and control the relay array switching
Circuit in turn switches on the quantum chip and needs the port measured；
6) using the lock-in amplifier programmed acquisition voltage and current data of the host computer, the voltage data is locking phase
The voltage value of amplifier in, the current data are the current value of lock-in amplifier output end, voltage value and current value
Ratio is port resistive.
3, advantageous effect
Compared with the prior art, beneficial effects of the present invention are：
(1) present invention is measured using the small voltage that lock-in amplifier provides, can be breakdown to avoid quantum chip, and locking phase is put
Big influence of the device to noise has outstanding inhibiting effect, has not only improved the safety of measurement but also has improved the accuracy of measurement, has adopted
Realize that measure circuit switches between quantum chip multiport, utilizes the man-machine friendship of MCU microcontrollers with dpdt relay array
Mutually the method that impedance measures between several ports is completed to measuring circuit-switched control so that measure more square
Just quick, to improve testing efficiency, reduce wafer damage rate.
(2) relay array switching circuit of the invention is with single channel filter per being connected all the way, the single channel filter and
The quantum chip single port is connected, and the filter between relay and quantum chip can eliminate extraneous and relay and be opened and closed band
The voltage wave come reduces voltage surge between quantum chip port using filter and carries out drop EMI processing, reduction to relay
Chip breakdown probability.
(3) dpdt relay and single-pole single-throw(SPST relay assembly of the present invention, which closes selection, can provide quantum chip high electricity
Flat, low level, high-impedance state tri-state, the scope of application are wider.
(4) present invention is equipped with filter capacitor and fly-wheel diode at dpdt relay coil both ends, and common end is equipped with
Filter, filter capacitor is connected between contact, and realization has carried out drop EMI processing to relay, greatly improved measurement accuracy, electricity
Magnetic safety.
(5) test instrumentation of the invention can connect PC machine using lock-in amplifier by cable, when test chip impedance
The voltage of the electric current and input terminal of lock-in amplifier output end can be directly read in PC machine, therefore can online hind computation
Port Impedance greatly improves testing efficiency.
(6) lock-in amplifier of the invention is equivalent to out with the relay array switching circuit by BNC cable connections
The literary measuring resistance method of that, eliminates the influence of test line resistance superposition, improves test accuracy.
(7) present invention uses two kinds of man-machine interaction modes of serial ports and toggle switch, greatly facilitates tester so that operation
It is more flexible.
(8) MCU controllers of the invention are connected to PC machine by USB interface or UART interface, and connection type is more various
Flexibly, easy to operation.
(9) the invention also includes circuit board, the MCU controllers, relay array, USB interface or UART serial ports and
The toggle switch for controlling the relay array switching circuit is set on circuit board, and circuit board has reserved cutting for a variety of current potential ground
It changes selection or does not connect, easily facilitate operating personnel and select, it is more convenient.
(10) measurement method of the invention is for testing efficient, easy to operate, measurement standard when quantum chip port impedance
Really, safe, quantum chip will not be caused to puncture.
Description of the drawings
Fig. 1 is the principle schematic of quantum chip port impedance test device of the present invention；
Fig. 2 is the relay array switching circuit structural schematic diagram of the present invention；
Fig. 3 is the filter construction schematic diagram of the present invention.
Specific implementation mode
In order to clearly describe the present invention, the present invention is described in detail below in conjunction with the accompanying drawings.
The present invention is further described below with reference to specific embodiment.
Embodiment 1
With reference to figure 1 and Fig. 2, a kind of quantum chip port impedance test device, including lock-in amplifier, relay array are cut
Circuit, quantum chip, MCU controllers, host computer are changed, the output end of lock-in amplifier connects the defeated of relay array switching circuit
Enter end, the input terminal of the output end connection lock-in amplifier of relay array switching circuit provides small electricity using lock-in amplifier
It presses output and small voltage to measure, the needs of extremely low and raising measuring accuracy is wanted for meeting test voltage between quantum chip port.
Relay array switching circuit realizes locking phase per being connected all the way with each port of quantum chip, using relay array switching circuit
Amplifier voltage output end and voltage detecting end to each quantum chip port channel switching, instead of manually dismounting joint one by one
The workload of port switching.Relay array switching circuit includes dpdt relay, and dpdt relay connects MCU controls
Device processed, MCU controllers connect host computer.In addition, there is power-supply system to be connect with MCU controllers, relay array switching circuit, USB
Mouth chip connection.Wherein lock-in amplifier with being connected by cable between host computer, believe by the voltage and current that lock-in amplifier measures
Breath reaches host computer, can be obtained by lock-in amplifier upper computer software.
In addition, with reference to figure 1, relay array switching circuit, toggle switch, MCU controllers, USB interface conversion chip with
And power-supply system is integrated and is made on one piece of circuit board, and for the ease of replacing quantum chip to be measured, quantum chip is positioned over one
In tooling, it is connected on circuit board by tooling FPC connectors, FPC lines, then is connected with filter.In this example, the lock of use
The model SR830 of phase amplifier, host computer use PC machine.
When work, the operation principle of the present apparatus is：Lock-in amplifier measure after data transmission to PC machine, MCU controllers
The state of each dpdt relay in relay array is controlled, PC machine is referred to by USB interface to the transmission of MCU controllers
It enables.The output of lock-in amplifier signal is adjusted to 0V first, according still further to the upper connection type, all parts are connected,
Then the output of lock-in amplifier signal is adjusted to test voltage value, the test voltage value is less than the breakdown voltage of quantum chip
Value, due to technique difference, the breakdown voltage value of different quantum chips is also different.PC machine communication program is opened, PC machine lock is opened
Phase amplifier program sends instructions to MCU controllers by PC machine communication program and controls relay array, and it is double that corresponding double-pole is arranged
Throw relay on-off.Using PC machine lock-in amplifier software collection voltage and current data, voltage data inputs for lock-in amplifier
The voltage at end, current data are the electric current of lock-in amplifier output end, and the ratio of voltage and current is port resistive.For example,
Some quantum chip port impedances are mainly wherein several to there is certain resistance value between any two, are to open between remaining several port
It road only need to be by the first dpdt relay by taking the impedance between measuring 1 port of quantum chip and 9 ports of 16 ports as an example
One of them is connected on high potential (+) another connects low potential (-) with the 9th dpdt relay, other double-pole double throw relays
Device connects low potential (-), and using PC machine lock-in amplifier software collection voltage and current data, voltage data inputs for lock-in amplifier
The voltage at end, current data are the electric current of lock-in amplifier output end, and the ratio of voltage and current is port resistive.
For using that the device measures as a result, the current value and lock-in amplifier voltage of lock-in amplifier voltage output end
The voltage value of detection input can be directly obtained directly by lock-in amplifier upper computer software, convenient for record and processing meter
It calculates.There are two types of the modes for switching several ports of quantum chip to be measured：One is being arranged by toggle switch, MCU controllers are swept
The state for retouching corresponding toggle switch position achievees the purpose that reconfigurable circuit to control the state of corresponding relay, so as to
Measure the impedance between corresponding several ports；Second is by being communicated with PC machine, and operating personnel are soft by PC machine host computer
Part sends instructions to MCU controllers, and MCU controllers control the state of corresponding relay according to the instruction received, reach reconstruct
The purpose of circuit, so as to measure the impedance between corresponding several ports of quantum chip.The state of each relay has
One indicator light, for the correctness of operating personnel's confirmation operation.The mode for switching several ports of quantum chip to be measured, is reduced
The number that artificial replacement measures access, is in direct contact quantum chip and contact with test device is imitated to improve test
Rate reduces wafer damage rate.
Quantum chip port impedance test device of the present invention is measured using the small voltage that lock-in amplifier provides, can be to avoid
Quantum chip is breakdown, and influence of the lock-in amplifier to noise has outstanding inhibiting effect, not only improved the safety of measurement but also
The accuracy for improving measurement realizes that measure circuit switches between quantum chip multiport using dpdt relay array,
Using the human-computer interaction of MCU controllers the impedance progress between several quantum chip ports is completed to measuring circuit-switched control
The method of measurement so that measurement enhanced convenience is quick, to improve testing efficiency, reduces wafer damage rate.
Embodiment 2
With reference to figure 2, with embodiment 1 the difference is that the relay array switching circuit is per double-pole double throw relay all the way
Device is connected with single channel filter, and the single channel filter is connected with the quantum chip single port.
Be filter construction and connection type as shown in the figure with reference to figure 3, relay array switching circuit per all the way with single channel
Filter is connected, and the single channel filter is connected with the quantum chip single port.Single-pole single-throw(SPST relay and quantum chip
Filter form between port is the fertile hereby low pass LC filter of 3 grades of Barts, by 10uF capacitance C1,22uH inductance L, 10uF capacitances
C2 and 22uF capacitances C3 is constituted.The ground terminal of filter should be connected to the low potential (-) of lock-in amplifier output end, the filter
Access have a good inhibition to the electromagnetic interference of relay and the surge of switching moments, 22uF capacitances C3 need to be arranged by
Nearly quantum chip port, for preventing the induced voltage of opening and closing moment inductance from damaging chip.
Filter between the relay and quantum chip of the present invention can eliminate extraneous and relay and be opened and closed the voltage brought
Wave reduces voltage surge between quantum chip port using filter and carries out drop EMI processing to relay, reduces chip quilt
The probability of breakdown.
Embodiment 3
In the present embodiment, circuit structure is essentially identical with above-described embodiment, the difference is that, relay array switching
Circuit further includes hilted broadsword relay, and relay array is made of multiple dpdt relays and single-pole single-throw(SPST relay, quantum
Each port of chip corresponds to a dpdt relay and a single-pole single-throw(SPST relay, dpdt relay warp respectively
It crosses the hilted broadsword relay and is connected to the quantum chip port.Can be provided in this way for each quantum chip port high level,
Low level and hanging high-impedance state, the more convenient impedance flexibly tested between several ports.
The connection of the connection type, relay array and filter of lock-in amplifier and relay array is shown in Fig. 2
Mode, the connection type of filter and quantum chip and relay permutation building form.Each quantum chip port passes through successively
Wave filter, single-pole single-throw(SPST relay, dpdt relay, lock-in amplifier are connected.
Specifically, by taking some quantum chip port as an example, quantum chip port is connected with filter, filter and hilted broadsword list
It throws relay to be connected, the terminal short circuit of dpdt relay common end two is connected with single-pole single-throw(SPST relay again.Double-pole double throw
Relay includes two groups of contacts：One group of contact is normally opened contact, and another group of contact is normally-closed contact, and all there are two ends for every group of contact
Son.Lock-in amplifier voltage output end and voltage detecting input terminal are bnc interface, by BNC cable connections to circuit board,
BNC cable inner conductors are labeled as high level (+), and BNC cable outer conductors are labeled as low level (-), and lock-in amplifier voltage is defeated
The high level (+) of the high level of outlet+and lock-in amplifier voltage detecting input terminal is connected on respectively on two normally opened contact terminals,
The low level (-) of the low level (-) of lock-in amplifier voltage output end and lock-in amplifier voltage detecting input terminal is connect respectively
On two normally-closed contact terminals, by the way that corresponding relay on-off reconfigurable measurement channel is arranged, when single-pole single-throw(SPST relay is disconnected
When opening, then corresponding quantum chip port is hanging high-impedance state.When single-pole single-throw(SPST relay is closed, coupled double-pole is double
Throwing relay, there are two types of states, and one is connecing to measure level high level (+), then quantum chip port connects high level (+)；Second
It is to connect the low level (-) for measuring level, then quantum chip port connects low level (-)；To measure several quantum chip ports and
Port Impedance between several quantum chip ports by corresponding several quantum chip ports it is necessary to connecing high level (+) and several
Corresponding several quantum chip ports connect low level (-).For example, 1 port of quantum chip, which connects, measures level high level (+), 2 ports
It connecing 1 port and connects measurement level low level (-), other ports are hanging, then the result measured impedance between 1 and 2 port, with
This analogizes, can also survey a port between multiple ports impedance and multiple ports with the impedance between multiple ports.
It should be noted that the quantity of dpdt relay and the quantity of single-pole single-throw(SPST relay should be greater than or equal to
The quantity of quantum die terminals port, in the present embodiment, the quantity of dpdt relay and the quantity of single-pole single-throw(SPST relay,
The quantity of quantum die terminals port is equal.
The hilted broadsword relay that the present invention is connected between dpdt relay and quantum chip port is also applied for free end
Mouth is external, and the scope of application is wider.
Embodiment 4
With reference to figure 2, a kind of quantum chip port impedance test device of the present embodiment, circuit structure and 1 base of embodiment
This is identical, and application artificially solves the problems, such as drop EMI, at the coil both ends of the dpdt relay and the hilted broadsword relay
It is respectively equipped with filter capacitor and diode, common end is equipped with filter, filter capacitor is connected between contact.
Coil both ends when parallel connection 10uF capacitances are used for slowing down control break-make between two terminals of each relay control coil
The speed of voltage change, to reduce the EMI of relay.Parallel diode between two terminals of each relay control coil,
The cathode of diode will be connected with the high point of power-supply system, and induced current when being powered off suddenly for coil in this way provides access,
To reduce induced voltage, reduce the damage to power-supply system, reduces relay coil electromagnetic interference, reduce EMI.
Each parallel connection 10uF capacitances equal between relay common end and normally-open normally-close terminal contacts are used to absorb voltage pulse when being closed, and reduce
Relay switch is closed the amplitude of momentary pulse, effectively prevents the influence of relay breakdown quantum chip.
The quantum chip port impedance test device of the present invention is equipped with filter capacitor at dpdt relay coil both ends
And fly-wheel diode, common end are equipped with filter, and filter capacitor is connected between contact, realization has carried out drop EMI processing to relay,
Greatly improve measurement accuracy, electromagnetic security and testing efficiency.
Embodiment 5
A kind of quantum chip port impedance test device of the present embodiment, structure is substantially the same manner as Example 1, more into one
Step：Lock-in amplifier can connect PC machine by cable, and when test chip impedance can directly read locking phase in PC machine and put
The voltage of the electric current and lock-in amplifier input terminal of big device output end.
The ratio of the voltage of lock-in amplifier input terminal and the electric current of lock-in amplifier output end is quantum chip port
Impedance, in this way since can online hind computation port Impedance, greatly improve testing efficiency.
Embodiment 6
With reference to figure 1, the lock-in amplifier in a kind of quantum chip port impedance test device of the present embodiment and institute
It states relay array switching circuit and passes through BNC cable connections.The lock-in amplifier of the present invention and relay array switching electricity
Road is equivalent to Kelvin's measuring resistance method by BNC cable connections, eliminates the influence of test line resistance superposition.This quantum chip
Port Impedance test device is hindered by a pair of of BNC connector between several ports using relay array reconfigurable measurement access
The anti-method measured realizes that it is to test to complete the impedance of several ports between any two not have to hand disassembly BNC.At other
In embodiment, other paired cables can also be used to replace BNC cables.
Embodiment 7
With reference to figure 1 and Fig. 2, in order to enable tester's operation is more convenient, in the present embodiment, connect in the MCU controllers
Connect toggle switch.The present invention uses two kinds of man-machine interaction modes of serial ports and toggle switch, greatly facilitates tester so that operation
It is more flexible.
The reconstruct of the relay array switching circuit array of the present apparatus is controlled by MCU controllers, the man-machine friendship of MCU controllers
Mutual two ways：One is being arranged by toggle switch, then MCU controllers are controlled by scanning the state of toggle switch
The state of relay processed.Second is by being communicated with host computer, such as PC machine host computer, and operating personnel pass through PC machine host computer
Software sends instructions to MCU controllers, and MCU controllers control the state of corresponding relay according to the instruction received.
There are two kinds of modes of operation of serial communication and manual toggle switch based on the control of MCU controllers and human-computer interaction, to grasp
Make relay array reconfigurable measurement circuit, reduce the number that human body is contacted with test device, had both avoided manual operations and replaced respectively
The electrostatic and maloperation that the BNC connector of a measurement port is brought, and measurement efficiency is improved, and toggle switch digit should be greater than
Or it is equal to quantum chip port number.
Embodiment 8
With reference to figure 1, quantum chip port impedance test device of the present invention further includes circuit board, the MCU controllers, relay
Device array, USB interface or UART serial ports and the toggle switch of the control relay array switching circuit are set to circuit board
On.In the present embodiment, relay array switching circuit, toggle switch, MCU controllers, USB interface conversion chip and power supply system
System is integrated to be done on circuit boards.Quantum chip is positioned in tooling, and circuit board is connected to by FPC connectors, the FPC lines in tooling
On, then be connected with filter, it is conveniently replaceable quantum chip to be measured.
Wherein, MCU controllers are connected to PC machine by USB interface or UART interface, and host computer is by USB interface to MCU
Controller send instructions.In other embodiments, can also USB interface be substituted using network interface, RS2 interfaces etc. or UART connects
Mouthful, but network interface hardware and development cost are preferably high, and applicability is not strong.
The MCU controllers of the present invention are connected to PC machine by USB interface or UART interface, easy to connect using USB interface,
It is easy to operation, need another circumscribed USB to turn UART interface module using UART interface, connection type is more flexible and varied.
Further, opening for the toggle switch for controlling relay, UART serial ports or USB interface is also reserved on circuit board
Disconnected, test board has been reserved the switching selection on a variety of current potential ground or has not been connect, and easily facilitates operating personnel and selects, more just
It is prompt.
Embodiment 9
With reference to figure 1-3, the present invention provides a kind of measurement method of quantum chip port impedance test device, including following step
Suddenly：
1) output of the signal of the lock-in amplifier is adjusted to 0V.In this example, the type of the lock-in amplifier of use
Number be SR830.
2) lock-in amplifier, relay array switching circuit, quantum chip are linked together.Specifically, will lock
The output end of phase amplifier connects the input terminal of the relay array switching circuit, the relay array switching circuit it is defeated
Outlet connects the input terminal of the lock-in amplifier, and the relay array switching circuit is per each with the quantum chip all the way
Port is connected, and the relay array switching circuit includes dpdt relay, described in the dpdt relay connection
MCU controllers, the MCU controllers connect host computer.
3) output of the signal of the lock-in amplifier is adjusted to test voltage value, test voltage value is less than quantum chip
Breakdown voltage value, due to technique difference, the breakdown voltage value of different quantum chips is also different.
4) communication program for opening the host computer, opens the lock-in amplifier program of the host computer, for control pair
MCU controllers, which send instructions, controls relay array, controls corresponding relay on-off.
5) sent instructions to the MCU controllers by the communication program of the host computer and control the relay array switching
Circuit in turn switches on the quantum chip and needs the port measured.Specifically, when single-pole single-throw(SPST relay disconnects, then accordingly
Quantum chip port be hanging high-impedance state；When single-pole single-throw(SPST relay is closed, coupled dpdt relay packet
Two states are included, one is connecing to measure level high potential, then quantum chip port connects high potential；Second is to connect measurement level
Low potential, then quantum chip port connect low potential.If should be noted that measure several quantum chip ports and dry measure
Port Impedance between sub- chip port just has electric current to flow through because to there is pressure difference, so by corresponding quantum chip port
One termination high level, another termination low level of quantum chip port.
It 6), in the present embodiment, can be with using the lock-in amplifier programmed acquisition voltage and current data of the host computer
It is connected with host computer using cable and is communicated.Wherein, the voltage data is the voltage value of lock-in amplifier input terminal, described
Current data is the current value of lock-in amplifier output end, and the ratio of voltage value and current value is port resistive.
It is real according to quantum chip for the output of the signal of the lock-in amplifier is adjusted to test voltage value in step 3)
Border minimum breakdown value setting test voltage is being worth, and test voltage value should be less than the minimum breakdown voltage value of quantum chip, otherwise measure
Sub- chip can be breakdown, test voltage value is generally set as 1/2 minimum breakdown voltage value, but test voltage value can not be too small,
Otherwise more noises can be introduced, cause resultant error bigger than normal.In the present embodiment, quantum chip minimum breakdown voltage value is only
5mV, it is 2mV that setting, which measures voltage value, 2mV voltages is exported from lock-in amplifier voltage output end, using the resistance of BNC cables
Loss, voltage is less than 2mV between being added in quantum chip port, but since cable and quantum chip are concatenated, so locking phase is put
The electric current that big device voltage output end is measured is accurate.
The principle of the measurement method of this quantum chip port impedance test device：Lock-in amplifier voltage output end passes through company
It connects cable and exports a small voltage, small voltage is added between several ports of quantum chip, forms faint electric current, at this time locking phase
Amplifier voltage output end can automatic read current value.Meanwhile lock-in amplifier voltage detecting end also connecting cable, the cable
Other one is also added between several ports of the quantum chip, in this way, the small voltage between several ports of quantum chip is logical
It crosses the cable and transmits one to lock-in amplifier voltage detecting end, it is small that lock-in amplifier voltage detecting end can accurately measure this
Voltage, the ratio of voltage and the automatic read current of lock-in amplifier voltage output end energy that lock-in amplifier voltage detecting end is measured
Value is the impedance value of corresponding several ports of quantum chip.Wherein, cable uses BNC cables in this example.
The measurement method of the present invention provides small signal output and weak-signal measurement using lock-in amplifier, for meeting quantum
Test voltage wants extremely low demand and raising measuring accuracy, efficiency when for testing quantum chip port impedance between chip port
It is high, easy to operate, measure it is accurate, safe, will not cause quantum chip puncture.
Schematically the invention and embodiments thereof are described above, description is not limiting, attached drawing
Shown in also be the invention one of embodiment, actual structure is not limited to this.So if this field
Those of ordinary skill enlightened by it, in the case where not departing from this creation objective, not inventively design and the technology
The similar frame mode of scheme and embodiment, should all belong to the protection domain of this patent.
Claims (10)
1. a kind of quantum chip port impedance test device, which is characterized in that including lock-in amplifier, relay array switching electricity
The output end of road, quantum chip, MCU controllers, host computer, the lock-in amplifier connects the relay array switching circuit
Input terminal, the output end of the relay array switching circuit connects the input terminal of the lock-in amplifier, the relay
For array switching circuit per being connected all the way with each port of quantum chip, the relay array switching circuit includes that double-pole is double
Relay is thrown, the dpdt relay connects the MCU controllers, and the MCU controllers connect host computer.
2. quantum chip port impedance test device according to claim 1, which is characterized in that the relay array switching
Circuit is connected per dpdt relay all the way with single channel filter, the single channel filter and the quantum chip single port
It is connected.
3. quantum chip port impedance test device according to claim 2, which is characterized in that the relay array switching
Circuit further includes hilted broadsword relay, and the dpdt relay is connected to the quantum die terminals by the hilted broadsword relay
Mouthful.
4. quantum chip port impedance test device according to claim 3, which is characterized in that the dpdt relay
It is respectively equipped with filter capacitor and diode with the coil both ends of the hilted broadsword relay, common end is equipped with filter, connects between contact
Connect filter capacitor.
5. quantum chip port impedance test device according to claim 1, which is characterized in that the lock-in amplifier passes through
Cable connects PC machine, and the PC machine has the electric current and lock-in amplifier input terminal that the lock-in amplifier output end is read in display
Voltage data outputting module.
6. quantum chip port impedance test device according to claim 1, which is characterized in that the lock-in amplifier and institute
It states relay array switching circuit and passes through BNC cable connections.
7. according to claim 1 or 6 quantum chip port impedance test devices, which is characterized in that the MCU controllers connection is dialled
Code switch.
8. according to claim 7 quantum chip port impedance test device, which is characterized in that the MCU controllers are connect by USB
Mouth or UART interface are connected to host computer.
9. quantum chip port impedance test device according to claim 8, which is characterized in that further include circuit board, it is described
MCU controllers, relay array, USB interface or UART serial ports and the dial-up of the control relay array switching circuit are opened
Pass is set on circuit board.
10. a kind of using a kind of any one of claim 1-9 measurement methods of quantum chip port impedance test device, packet
Include following steps：
1) output of the signal of the lock-in amplifier is adjusted to 0V；
2) lock-in amplifier, relay array switching circuit, quantum chip are linked together；
3) output of the signal of the lock-in amplifier is adjusted to test voltage value, the test voltage value is less than quantum chip
Breakdown voltage value；
4) communication program for opening the host computer, opens the lock-in amplifier program of the host computer；
5) sent instructions to the MCU controllers by the communication program of the host computer and control the relay array switching electricity
Road in turn switches on the quantum chip and needs the port measured；
6) using the lock-in amplifier programmed acquisition voltage and current data of the host computer, the voltage data amplifies for locking phase
The voltage value of device input terminal, the current data are the current value of lock-in amplifier output end, the ratio of voltage value and current value
As port resistive.
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