CN108444624A - All-welded fibre optic compression sensor and preparation method thereof - Google Patents
All-welded fibre optic compression sensor and preparation method thereof Download PDFInfo
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- CN108444624A CN108444624A CN201810499943.1A CN201810499943A CN108444624A CN 108444624 A CN108444624 A CN 108444624A CN 201810499943 A CN201810499943 A CN 201810499943A CN 108444624 A CN108444624 A CN 108444624A
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- 239000000835 fiber Substances 0.000 title claims abstract description 78
- 230000006835 compression Effects 0.000 title claims abstract description 38
- 238000007906 compression Methods 0.000 title claims abstract description 38
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 98
- 239000010453 quartz Substances 0.000 claims abstract description 88
- 239000003708 ampul Substances 0.000 claims abstract description 66
- 239000011521 glass Substances 0.000 claims abstract description 65
- 239000013307 optical fiber Substances 0.000 claims abstract description 44
- 230000003287 optical effect Effects 0.000 claims abstract description 37
- 238000003466 welding Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 21
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 238000000227 grinding Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 7
- 239000004575 stone Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention provides all-welded fibre optic compression sensor and preparation method thereof.The all-welded fibre optic compression sensor includes incident optical, glass capillary, capillary quartz ampoule, reflection subassembly；Wherein：The incident optical is welded in the glass capillary, and the glass capillary is welded in one end of the capillary quartz ampoule；The reflection subassembly is welded in the other end of the capillary quartz ampoule；The end face of the incident optical and the end face of the reflection subassembly form F P chambers, the variation for measuring extraneous parameter.The present invention selects glass to weld, and processing temperature is low, easily realizes, is easy to weld together optical fiber and capillary quartz ampoule under the premise of not damaging optical fiber and capillary quartz ampoule；Using pure welding procedure, sensor stability is good, can bear very high pressure；F P chambers are formed by capillary quartz ampoule and optical fiber, temperature sensitivity is reduced, solves pressure and Temperature cross-over sensitive issue.
Description
Technical field
The present invention relates to fibre optic compression sensors, and in particular to all-welded fibre optic compression sensor and preparation method thereof.
Background technology
Optical fiber Fabry-Perot (abbreviation F-P) sensor is the sensing formed using the F-P cavity of optical fiber and capillary structure
Device, wherein extrinsic type F-P sensors (Extrinsic Fabry-Perot Interferometer, EFPI) are to utilize two light
The air gap between fine end face constitutes the microcavity of an a length of L of chamber, such sensor is one kind that performance is best, most widely used
Sensor.When coherent beam is incident on this microcavity along optical fiber, optical fiber microcavity both ends of the surface reflection after along backtracking simultaneously
Superposition generates interference, wherein interference output signal is related to the length of this F-P cavity.When extraneous parameter (temperature, pressure etc.) acts on
When on to the F-P cavity, it will so that the long L of its chamber is changed, respective change also occurs for the interference signal so as to cause its output.Cause
This, the variation of the long L of chamber is obtained to obtain the variable quantity of extraneous parameter (temperature, pressure etc.) by the variation of interference signal.
In traditional F-P sensor production methods, usually two sections of optical fiber are inserted into from the both ends of capillary respectively, and really
F-P cavity is formed between two fiber end faces of guarantor, then capillary and optical fiber are fixed together by viscose glue or the method for welding.
Incident optical and mirror based fiber optica are inserted into glass capillary by patent CN103335949A, then use the method for laser welding will
The two welds together, to form an EFPI sensor.
In the conventional technology, in order to solve sensitivity of the F-P pressure sensors to temperature, capillary generally use material and
The identical quartz ampoule of optical fiber material because the fusion temperature of quartz ampoule is identical as optical fiber, therefore is difficult by stone using burning-on method
English pipe and optical fiber weld together, or both be welded on together and internal optical fiber has been damaged.It is used in addition, also having
The method of gluing, but the pressure sensor that this method makes can not bear hyperbaric environment, and due to the coefficient of thermal expansion of glue with
Quartz material is different, and the sensibility for also resulting in sensor for temperature increases.
Invention content
The shortcomings that in order to overcome traditional fiber pressure sensor, the present invention is quasi- provide all-welded fibre optic compression sensor and
Preparation method, the sensor are easy to make, and very low to the sensibility of temperature.
The present invention provides a kind of all-welded fibre optic compression sensor, which is characterized in that the all-welded optical fiber pressure
Sensor includes incident optical, glass capillary, capillary quartz ampoule, reflection subassembly, wherein：
Incident optical is welded in glass capillary；
The glass capillary is welded in one end of capillary quartz ampoule；
Reflection subassembly is welded in the other end of the capillary quartz ampoule；The end face of the reflection subassembly and the incident light
Fine end face keeps suitable distance, forms F-P cavity, the variation for measuring extraneous parameter.
The technical solution that the present invention uses is：The reflection subassembly includes mirror based fiber optica, capillary, the mirror based fiber optica
It is welded in the capillary, for the capillary weld in the other end of the capillary quartz ampoule, the capillary material is quartz
Or lower melting-point glass.
Another technical solution that the present invention uses is：The reflection subassembly includes reflective film, the reflective film welding
In the other end of the capillary quartz ampoule.
Further, the incident optical, one kind that the mirror based fiber optica is single mode optical fiber or multimembrane optical fiber.
Further, the material of the incident optical, the mirror based fiber optica, the reflective film, the capillary quartz ampoule
It is silica.
Further, the glass capillary material is lower melting-point glass.
The present invention also provides the preparation methods of all-welded fibre optic compression sensor, which is characterized in that the method includes
Following steps：
It cuts flat with one end of incident optical to form end face；
The incident optical is inserted into glass capillary；
The glass capillary is inserted into one end of capillary quartz ampoule, is advanced to suitable position, institute is directed at using bonding machine
The glass capillary stated in capillary quartz ampoule is welded；
Reflection subassembly is inserted into the other end of the capillary quartz ampoule, is welded and fixed so that the reflection subassembly and described
The end face of incident optical forms F-P cavity, forms all-welded fibre optic compression sensor.
Further, when the reflection subassembly welding, the bonding machine is directed at the capillary quartz ampoule internal reflection component
Middle part or tail portion.
The technical solution that the present invention uses is：The preparation method of the reflection subassembly includes the following steps：
It cuts flat with one end of mirror based fiber optica to form end face；
The mirror based fiber optica is inserted into capillary, reflection subassembly is formed.
Another technical solution that the present invention uses is：The preparation method of the reflection subassembly includes the following steps：
One end of the identical quartz pushrod of outer diameter and the capillary quartz ampoule is welded together；
The thickness that thin grinding erodes to needs is cut to the quartz pushrod, forms reflection subassembly.
The advantageous effect that the present invention obtains：
Selection glass is welded, and processing temperature is low, it is easy to accomplish, under the premise of not damaging optical fiber and capillary quartz ampoule
It is easy to weld together optical fiber and capillary quartz ampoule；
Using pure welding procedure, sensor stability is good, can bear very high pressure；
F-P cavity is formed by capillary quartz ampoule and optical fiber, reduces the temperature sensitivity of sensor, solves pressure and temperature
The problem of spending cross sensitivity.
Description of the drawings
Fig. 1 is 1 fibre optic compression sensor structural schematic diagram of the embodiment of the present invention；
Fig. 2 is 2 fibre optic compression sensor structural schematic diagram of the embodiment of the present invention；
Fig. 3 is 3 fibre optic compression sensor structural schematic diagram of the embodiment of the present invention.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below with reference to drawings and examples,
To the specific implementation mode of technical solution of the present invention carry out in further detail, clear explanation.However, specific implementations described below
Mode and embodiment are for illustrative purposes only, rather than limiting the invention.It only contains a part of the invention and implements
Example, instead of all the embodiments, the other embodiment that those skilled in the art obtain the various change of the present invention all belongs to
In the scope of protection of the invention.
All-welded fibre optic compression sensor, as shown in Figure 1, Fig. 1 is 1 sensor structure schematic diagram of the embodiment of the present invention.
The sensor includes incident optical 1, capillary quartz ampoule 6, glass capillary 7, reflection subassembly；Wherein：It is described enter
It penetrates optical fiber 1 and is welded in the glass capillary 7, the glass capillary 7 is welded in one end of the capillary quartz ampoule 6；It is described
Reflection subassembly is welded in the other end of the capillary quartz ampoule 6, the end face of the reflection subassembly and 3 shape of end face of incident optical 1
At F-P cavity, the variation for measuring extraneous parameter.
In one embodiment of the present of invention, the reflection subassembly includes mirror based fiber optica 2, capillary 8；The mirror based fiber optica 2
It is welded in the capillary 8, forms reflection subassembly, the end face of the reflection subassembly is the end face 4 of the mirror based fiber optica 2, described
The material of capillary 8 is quartz or lower melting-point glass.
In an alternative embodiment of the invention, the reflection subassembly includes reflective film 12, and the reflective film 12 welds
In the other end of the capillary quartz ampoule 6, the end face of the reflection subassembly is the end face 13 of the reflective film 12.
The incident optical 1, one kind that the mirror based fiber optica 2 is single mode optical fiber or multimembrane optical fiber.The incident optical 1,
The mirror based fiber optica 2, the reflective film 12, the capillary quartz ampoule 6 material be silica.The glass capillary
7 material is lower melting-point glass.
The present invention also provides the preparation methods of all-welded fibre optic compression sensor described above, and the method includes such as
Lower step：
One end of incident optical 1 is cut flat with to form end face 3；
The incident optical 1 is inserted into glass capillary 7；
The glass capillary 7 is inserted into one end of capillary quartz ampoule 6, suitable position is advanced to, is aligned using bonding machine
The capillary quartz ampoule 6 welds；
Reflection subassembly is inserted into the other end of the capillary quartz ampoule 6, is welded and fixed so that the reflection subassembly and described
The end face 3 of incident optical 1 forms F-P cavity, forms all-welded fibre optic compression sensor.
When the reflection subassembly welding, the bonding machine is directed at middle part or the tail of 6 internal reflection component of the capillary quartz ampoule
Portion.
In one embodiment of the invention, the preparation method of the reflection subassembly includes the following steps：By the one of mirror based fiber optica
End cuts flat with to form end face；The mirror based fiber optica is inserted into capillary 8, reflection subassembly is formed.
In another embodiment of the present invention, the preparation method of the reflection subassembly includes the following steps：Outer diameter is identical
One end of quartz pushrod and capillary quartz ampoule is welded together；The thickness that thin grinding erodes to needs is cut to the quartz pushrod, is formed
Reflection subassembly.
Single mode optical fiber or multimembrane optical fiber, the end face 3, which may be selected, in the optical fiber can select plated film, can also select not
Plated film.Glass capillary 7, capillary 8 can intercept two segment glass capillaries, and material is the lower melting-point glass such as borosilicate
Glass or other solders.The material of the capillary quartz ampoule 6 is silica (SO2), bonding machine 9 can be selected electric arc, laser,
The forms such as flame alignment glass capillary is welded.
The hot processing temperature of quartz is 1750~2050 DEG C, and the hot processing temperature of Pyrex is 1220 DEG C, it can be seen that
The processing temperature of Pyrex is more much lower than quartz, therefore can make the F-P pressure sensors with lower temperature.
The temperature can make glass melting, while will not be damaged to optical fiber and capillary quartz ampoule again.In addition, glass capillary in the invention
It is only used for pad, rest part is SO2, therefore it is very low to the sensitivity of temperature, it eliminates temperature and intersecting for pressure is quick
Sense.
The F-P cavity is the microcavity for being constituted an a length of L of chamber using the air gap between two fiber end faces, works as phase
When dry light beam is incident on this microcavity along optical fiber, optical fiber is after the both ends of the surface reflection of microcavity along backtracking and to be superimposed generation dry
It relates to, wherein interference output signal is related to the length of this F-P cavity.When extraneous parameter is applied in the F-P cavity, it will make its chamber
Long L changes, and respective change also occurs for the interference signal so as to cause its output.Therefore, changing by interference signal
To the variation of the long L of chamber to obtain the variable quantity of extraneous parameter, external world's parameter includes temperature, pressure etc..
Embodiment 1
The present embodiment 1 provides a kind of structure of full welding fibre optic compression sensor, as shown in Figure 1, Fig. 1 is implementation of the present invention
1 fibre optic compression sensor structural schematic diagram of example.
The sensor includes incident optical 1, capillary quartz ampoule 6, glass capillary 7, reflection subassembly；Wherein：It is described enter
It penetrates optical fiber 1 and is welded in the glass capillary 7, the glass capillary 7 is welded in one end of the capillary quartz ampoule 6；It is described
Reflection subassembly includes mirror based fiber optica 2, capillary 8；The mirror based fiber optica 2 is welded in the capillary 8, and the capillary 8 welds
In the other end of the capillary quartz ampoule 6, the end face 4 of the mirror based fiber optica 2 and the end face 3 of incident optical 1 form F-P cavity, use
In the variation for measuring extraneous parameter.
The preparation method of the all-welded fibre optic compression sensor of the present embodiment, includes the following steps：
One end of incident optical 1, mirror based fiber optica 2 is cut flat with to form end face 3,4；
The incident optical 1 is inserted into glass capillary 7；
The glass capillary 7 is inserted into one end of capillary quartz ampoule 6, suitable position is advanced to, is aligned using bonding machine
Glass capillary 7 in capillary quartz ampoule 6 welds；
The mirror based fiber optica 2 is inserted into capillary 8, reflection subassembly is formed；
Reflection subassembly is inserted into the other end of capillary quartz ampoule 6 so that the end face 4 of the mirror based fiber optica 2 and the incidence
The end face 3 of optical fiber 1 forms F-P cavity, is welded, is formed complete using the middle part of the reflection subassembly in bonding machine alignment capillary quartz ampoule 6
The fibre optic compression sensor of welding.
Embodiment 2
The present embodiment 2 provides a kind of structure of full welding fibre optic compression sensor, as shown in Fig. 2, Fig. 2 is implementation of the present invention
2 fibre optic compression sensor structural schematic diagram of example.
The sensor includes incident optical 1, capillary quartz ampoule 6, glass capillary 7, reflection subassembly；Wherein：It is described enter
It penetrates optical fiber 1 and is welded in the glass capillary 7, the glass capillary 7 is welded in one end of the capillary quartz ampoule 6；It is described
Reflection subassembly includes mirror based fiber optica 2, capillary 11；The mirror based fiber optica 2, capillary 11 are welded in the capillary quartz ampoule together
6 other end, the end face 3 of the incident optical 1 and the end face 4 of the mirror based fiber optica 2 form F-P cavity, for measuring extraneous ginseng
The variation of amount.
The preparation method of the all-welded fibre optic compression sensor of the present embodiment, includes the following steps：
One end of incident optical 1, mirror based fiber optica 2 is cut flat with to form end face 3,4；
The incident optical 1 is inserted into glass capillary 7；
The glass capillary 7 for being cased with the incident optical 1 is inserted into one end of capillary quartz ampoule 6, it is suitable to be advanced to
Position is welded using the glass capillary 7 in bonding machine alignment capillary quartz ampoule 6；
The mirror based fiber optica 2 is inserted into capillary 11, reflection subassembly is formed；
Reflection subassembly is inserted into the other end of capillary quartz ampoule 6 so that the end face 4 of the mirror based fiber optica 2 and the incidence
The end face 3 of optical fiber 1 forms F-P cavity, directly welds together 2,6,11 tail portion using bonding machine, forms all-welded optical fiber
Pressure sensor.
Since reflex is played in the only end face 4 of mirror based fiber optica 2, so if the welding damage tail end of mirror based fiber optica 2, right
F-P cavity can't have an impact.In Fig. 2, mirror based fiber optica 2 is firstly inserted into capillary 11, and the material of capillary 11 can be stone
English may be glass or other materials, then directly welds together 2,6,11 tail portion with bonding machine 10, welds herein
Connecing can be with very high energy until 2,6,11 are welded together.
The sensor of embodiment 2, capillary 11 is due to that can use very high energy directly and mirror based fiber optica 2, capillary stone
English pipe 6 welds together, so its material is different from the 8 of embodiment 1,8 be low-melting glass, and the material of capillary 11 can be with
It is quartz, glass or other materials.
Embodiment 3
The present embodiment 3 provides a kind of structure of full welding fibre optic compression sensor, as shown in figure 3, Fig. 3 is implementation of the present invention
3 fibre optic compression sensor structural schematic diagram of example.
The sensor includes incident optical 1, capillary quartz ampoule 6, glass capillary 7, reflection subassembly；Wherein：It is described enter
It penetrates optical fiber 1 and is welded in the glass capillary 7, the glass capillary 7 is welded in one end of the capillary quartz ampoule 6；It is described
Reflection subassembly includes reflective film 12；The reflective film 12 is welded in the other end of the capillary quartz ampoule 6, the incident light
The end face 3 of fibre 1 and the medial surface 13 of the reflective film 12 form F-P cavity, the variation for measuring extraneous parameter.
The preparation method of the all-welded fibre optic compression sensor of the present embodiment, includes the following steps：
One end of incident optical 1 is cut flat with to form end face 3；
The incident optical 1 is inserted into glass capillary 7；
The glass capillary 7 is inserted into one end of capillary quartz ampoule 6, suitable position is advanced to, is aligned using bonding machine
Glass capillary 7 in capillary quartz ampoule 6 welds；
The other end of the identical quartz pushrod of outer diameter and capillary quartz ampoule 6 is welded together；Thin grind is cut to the quartz pushrod
Mill erodes to the thickness of needs, forms reflective film；So that the medial surface 13 and the incident optical 1 of the reflective film 12
End face 3 forms F-P cavity, forms all-welded fibre optic compression sensor.
The capillary quartz ampoule 6 of one section of appropriate length is intercepted, material is silica, intercepts one section of outer diameter and the capillary stone
6 identical quartz pushrod of English pipe, the capillary quartz ampoule 6 and the quartz pushrod are welded together, then to the quartz pushrod into
Row cuts the thin thickness for grinding and eroding to needs, forms film 12,12 surface coating of film or not plated film.The quartz pushrod can be with
It is replaced with optical fiber.
7 material of the glass capillary is lower melting-point glass or other solders such as borosilicate, 9 optional electricity consumption of bonding machine
The forms such as arc, laser, flame alignment glass capillary 7 is welded.
The present invention is welded together capillary quartz ampoule and optical fiber by glass, since the hot processing temperature of glass is far below
Quartz, therefore sensor making easy to process.Traditional is directly extremely low with the process yield of optical fiber welding by quartz ampoule,
And the damage for easily causing optical fiber, to destroy the light field in optical fiber.The sensor that the present invention realizes is low due to welding temperature
In SO2Hot processing temperature, therefore optical fiber will not be caused to damage, ensure that the quality of fiber middle light signal.Institute in the present invention
Glass capillary exists only at solder joint, and the rest part of sensor is SO2, therefore the moisture sensitivity of the sensor
It is very low, solve the problems, such as temperature and pressure cross sensitivity.
It should be noted that each embodiment above by reference to described in attached drawing be only to illustrate the present invention and unrestricted
The range of invention, it will be understood by those of ordinary skill in the art that, it is right under the premise without departing from the spirit and scope of the present invention
The modification or equivalent replacement that the present invention carries out, should all cover within the scope of the present invention.In addition, signified unless the context
Outside, the word occurred in the singular includes plural form, and vice versa.In addition, unless stated otherwise, then any embodiment
All or part of is used in combination with all or part of of any other embodiment.
Claims (10)
1. a kind of all-welded fibre optic compression sensor, which is characterized in that including incident optical, glass capillary, capillary quartz
Pipe, reflection subassembly, wherein：
The incident optical is welded in the glass capillary；
The glass capillary is welded in one end of the capillary quartz ampoule；
The reflection subassembly is welded in the other end of the capillary quartz ampoule；The end face of the reflection subassembly and the incident light
Fine end face keeps suitable distance, forms F-P cavity, the variation for measuring extraneous parameter.
2. all-welded fibre optic compression sensor according to claim 1, which is characterized in that the reflection subassembly includes reflection
Optical fiber, capillary, the mirror based fiber optica are welded in the capillary, and the capillary weld is another in the capillary quartz ampoule
End, the capillary material are quartz or lower melting-point glass.
3. all-welded fibre optic compression sensor according to claim 1, which is characterized in that the reflection subassembly includes reflection
Film, the reflective film are welded in the other end of the capillary quartz ampoule.
4. all-welded fibre optic compression sensor according to claim 1 or claim 2, which is characterized in that the incident optical, described
Mirror based fiber optica is one kind of single mode optical fiber or multimembrane optical fiber.
5. according to all-welded fibre optic compression sensor described in Claims 2 or 3, which is characterized in that the incident optical, described
Mirror based fiber optica, the reflective film, the capillary quartz ampoule material be silica.
6. all-welded fibre optic compression sensor according to claim 1, which is characterized in that the glass capillary material is
Lower melting-point glass.
7. the preparation method of all-welded fibre optic compression sensor, which is characterized in that described method includes following steps：
It cuts flat with one end of incident optical to form end face；
The incident optical is inserted into glass capillary；
The glass capillary is inserted into one end of capillary quartz ampoule, is advanced to suitable position, the hair is directed at using bonding machine
The glass capillary in fine quartz pipe is welded；
Reflection subassembly is inserted into the other end of the capillary quartz ampoule, is welded and fixed so that the reflection subassembly and the incidence
The end face of optical fiber forms F-P cavity, forms all-welded fibre optic compression sensor.
8. the preparation method of all-welded fibre optic compression sensor according to claim 7, which is characterized in that the reflection
When components welding, the bonding machine is directed at the middle part or tail portion of the capillary quartz ampoule internal reflection component.
9. the preparation method of all-welded fibre optic compression sensor according to claim 7, which is characterized in that the reflection
The preparation method of component includes the following steps：
It cuts flat with one end of mirror based fiber optica to form end face；
The mirror based fiber optica is inserted into capillary, reflection subassembly is formed.
10. the preparation method of all-welded fibre optic compression sensor according to claim 7, which is characterized in that described anti-
The preparation method for penetrating component includes the following steps：
One end of the identical quartz pushrod of outer diameter and the capillary quartz ampoule is welded together；
The thickness that thin grinding erodes to needs is cut to the quartz pushrod, forms reflection subassembly.
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Cited By (3)
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| CN110044398A (en) * | 2019-04-03 | 2019-07-23 | 西北工业大学 | High-temp strain test device and its installation method based on F-P fibre optical sensor |
| CN113188691A (en) * | 2021-04-21 | 2021-07-30 | 上海大学 | Optical fiber Fabry-Perot sealed cavity pressure sensor and preparation method thereof |
| CN114459515A (en) * | 2022-02-17 | 2022-05-10 | 山东飞博赛斯光电科技有限公司 | High-fineness all-quartz optical fiber F-P cavity sensor and manufacturing method thereof |
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| CN104614104A (en) * | 2015-01-19 | 2015-05-13 | 中北大学 | Optical fiber fabry-perot pressure sensor and manufacturing method thereof |
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