CN108425846B - Device and method for improving utilization rate of zone-melting vacuum pump - Google Patents
Device and method for improving utilization rate of zone-melting vacuum pump Download PDFInfo
- Publication number
- CN108425846B CN108425846B CN201810332647.2A CN201810332647A CN108425846B CN 108425846 B CN108425846 B CN 108425846B CN 201810332647 A CN201810332647 A CN 201810332647A CN 108425846 B CN108425846 B CN 108425846B
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- vacuum pump
- pipeline
- vacuum
- pump
- single crystal
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- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000004857 zone melting Methods 0.000 title abstract description 13
- 239000013078 crystal Substances 0.000 claims abstract description 24
- 230000003584 silencer Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 abstract description 6
- 230000008018 melting Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides a device and a method for improving the utilization rate of a zone-melting vacuum pump, wherein the device comprises at least three single crystal furnaces, the outlet of each single crystal furnace is connected with a pipeline, the pipelines are converged in parallel and are communicated with a vacuum pump pipeline, the other end of each vacuum pump pipeline is connected with the vacuum pump, the pipelines are connected with the single crystal furnace through first corrugated pipes, each pipeline is provided with a butterfly valve, the vacuum pump pipeline is connected with the vacuum pump through a second corrugated pipe, and the vacuum pump is further provided with a vacuum pump exhaust pipeline. According to the device and the method for improving the utilization rate of the zone-melting vacuum pump, the utilization rate of the vacuum pump can be improved through the one-to-many mode of the vacuum pump and the single crystal furnace and the corresponding control method, so that a good use effect is ensured, meanwhile, the occurrence of 'flow melting' accidents caused by evacuation is avoided, the stability is good, and convenience and practicability are realized.
Description
Technical Field
The invention belongs to the field of zone-melting vacuum pumps, and particularly relates to a device and a method for improving the utilization rate of a zone-melting vacuum pump.
Background
At present, each furnace is provided with one vacuum pump, and the vacuum pump is in an idle state most of the time, so that the cost is wasted due to the fact that each furnace is provided with one vacuum pump.
Disclosure of Invention
In view of the above, the invention aims to provide a device and a method for improving the utilization rate of a zone-melting vacuum pump, which can improve the utilization rate of the vacuum pump, ensure a better use effect, avoid the occurrence of 'flow melting' accidents caused by evacuation, and have better stability, convenience and practicability through a one-to-many mode of the vacuum pump and a single crystal furnace and a corresponding control method.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
the utility model provides a device and method for improving district melting vacuum pump utilization ratio, includes at least three single crystal growing furnace, every single crystal growing furnace export connection pipeline, the pipeline parallelly connected merges to communicate with the vacuum pump pipeline, the vacuum pump pipeline's the other end is connected the vacuum pump, the pipeline with connect through first bellows between the single crystal growing furnace, every be equipped with the butterfly valve on the pipeline, the vacuum pump pipeline with connect through the second bellows between the vacuum pump, still be equipped with vacuum pump exhaust pipe on the vacuum pump.
Furthermore, a pressure sensor is arranged on the vacuum pump pipeline, and a power failure air leakage device is also arranged on the vacuum pump pipeline.
Furthermore, a silencer is arranged on the vacuum pump exhaust pipeline, and an automatic air release valve is also arranged on the vacuum pump exhaust pipeline.
Further, the vacuum pump comprises a vacuum Roots pump and a mechanical pump, the vacuum Roots pump and the mechanical pump are connected through a third corrugated pipe, a vacuum pump pipeline is connected with the vacuum Roots pump, and a vacuum pump exhaust pipeline is connected with the mechanical pump.
Further, motors are arranged on the vacuum Roots pump and the mechanical pump respectively, and the motors, the butterfly valve, the power failure air leakage device, the automatic air release valve and the pressure sensor are all electrically connected with the control unit.
Furthermore, a working mode of one-to-many vacuum pumps is adopted, the pipelines of the vacuum pumps are respectively connected to a plurality of single crystal furnaces, controllable butterfly valves are designed on the pipelines extending out of the furnace body, and the butterfly valves can not be opened simultaneously through program interlocking control;
step two, controlling to open one butterfly valve, starting the vacuum pump to work in a closed state, evacuating air in the single crystal furnace through a pipeline, detecting that the mechanical pump stops working when the required preliminary vacuum degree is reached, and continuing to evacuate by the vacuum Roots pump until the vacuum degree of the furnace body reaches the process requirement of less than 0.02 bar;
step three: after the vacuum degree is reached, the vacuum pump stops working, whether other butterfly valves are opened or not is detected, if yes, the corresponding pipeline butterfly valves are closed, if not, whether the vacuum pump pipeline is at normal pressure is detected by a pressure sensor, if not, an automatic air release valve is opened, and the vacuum pump is re-detected until the normal pressure state is reached;
step four: closing an automatic air release valve, starting the vacuum pump to work, opening a corresponding butterfly valve to be operated, starting the operation, detecting whether the vacuum degree can meet the specified requirement in the specified time, closing the corresponding valve if possible, closing the vacuum pump, ending, otherwise, releasing air to the pressure in the furnace to normal pressure, and returning to the step of detecting whether the vacuum pump pipeline is normal pressure or not until the specified requirement is met.
Compared with the prior art, the device and the method for improving the utilization rate of the zone-melting vacuum pump have the following advantages:
(1) According to the device and the method for improving the utilization rate of the zone-melting vacuum pump, the utilization rate of the vacuum pump can be improved through the one-to-many mode of the vacuum pump and the single crystal furnace and the corresponding control method, so that a good use effect is ensured, meanwhile, the occurrence of 'flow melting' accidents caused by evacuation is avoided, the stability is good, and convenience and practicability are realized.
(2) According to the device and the method for improving the utilization rate of the zone-melting vacuum pump, disclosed by the invention, the cost can be saved, the utilization rate of equipment can be improved, the working efficiency can be improved, the stability is higher, the maintenance is convenient, and the stability is better through the structural form that one vacuum pump is connected with a plurality of single crystal furnaces and the corresponding structural changes and coordination.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a schematic diagram of a device for improving the utilization rate of a zone-melting vacuum pump according to an embodiment of the present invention;
FIG. 2 is a block diagram of a process flow of a device and method for improving the utilization rate of a vacuum pump for zone melting according to an embodiment of the invention。
Reference numerals illustrate:
1-a single crystal furnace; 2-butterfly valve; 3-a first bellows; 4-a pipeline; 5-a pressure sensor; 6-a power failure air leakage device; 7-a second bellows; 8-a vacuum pump; 9-a vacuum pump exhaust pipeline; 10-vacuum pump line.
Description of the embodiments
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
The device and the method for improving the utilization rate of the zone-melting vacuum pump shown in fig. 1 comprise at least three single crystal furnaces 1, wherein the outlet of each single crystal furnace 1 is connected with a pipeline 4, the pipelines 4 are connected in parallel and are converged to be communicated with a vacuum pump pipeline 10, the other end of the vacuum pump pipeline 10 is connected with a vacuum pump 8, the pipelines 4 are connected with the single crystal furnaces 1 through a first corrugated pipe 3, each pipeline 4 is provided with a butterfly valve 2, the vacuum pump pipeline 10 is connected with the vacuum pump 8 through a second corrugated pipe 7, and the vacuum pump 8 is also provided with a vacuum pump exhaust pipeline 9.
The vacuum pump pipeline 10 is provided with a pressure sensor 5, and the vacuum pump pipeline 10 is also provided with a power failure air leakage device 6.
Wherein, be equipped with the muffler on the vacuum pump exhaust pipe 9, still be equipped with automatic bleed valve on the vacuum pump exhaust pipe.
The vacuum pump 8 comprises a vacuum Roots pump and a mechanical pump, the vacuum Roots pump and the mechanical pump are connected through a third corrugated pipe, the vacuum pump pipeline 10 is connected with the vacuum Roots pump, and the vacuum pump exhaust pipeline 9 is connected with the mechanical pump.
The vacuum Roots pump and the mechanical pump are respectively provided with a motor, and the motors, the butterfly valves, the power failure air leakage device, the automatic air release valve and the pressure sensor 5 are all electrically connected with a control unit.
Firstly, adopting a one-to-many working mode of a vacuum pump 8, respectively connecting vacuum pump pipelines 10 to a plurality of single crystal furnaces 1, designing controllable butterfly valves 2 on pipelines 4 extending out of a furnace body, and controlling the butterfly valves 2 to be incapable of being opened simultaneously through program interlocking;
step two, controlling to open one butterfly valve 2, and the other butterfly valves in a closed state, starting to work a vacuum pump 8, evacuating air in the single crystal furnace 1 through a pipeline 4, stopping the mechanical pump when the required preliminary vacuum degree is detected, and continuing to evacuate by a vacuum Roots pump until the vacuum degree of the furnace body reaches the process requirement of less than 0.02 bar;
step three: after reaching the vacuum degree, the vacuum pump 8 stops working, and detects whether other butterfly valves 2 are opened, if yes, the corresponding pipeline butterfly valves 2 are closed, if not, the pressure sensor 5 detects whether the vacuum pump pipeline 10 is at normal pressure, if not, the automatic air release valve is opened, and the detection is carried out again until reaching the normal pressure state;
step four: closing the automatic air release valve, starting the vacuum pump 8 to work, opening the corresponding butterfly valve 2 to work, starting to work, detecting whether the vacuum degree can meet the specified requirement in the specified time, closing the corresponding valve if possible, closing the vacuum pump 8, ending, otherwise, discharging air to the normal pressure in the furnace, and returning to the step of detecting whether the vacuum pump pipeline 10 is at the normal pressure or not until the specified requirement is met.
Aiming at the fact that when other furnace platforms keep an equal diameter state, an absolute stable state is needed to ensure that a full melting zone cannot generate a 'flow melting' accident, the improvement of the method is that a stainless steel corrugated pipe with a proper diameter is added at the joint of each furnace body of a vacuum pump 8, and the influence caused by vibration is reduced to the greatest extent from the mechanical aspect by a soft connection method;
in the aspect of detection control, the sensing device of the pressure sensor 5 and the automatic air release valve is added, and when the vacuum pump 8 just works and the vacuum pump pipe 10 is still in a negative pressure state and vacuumizes other hearths again, the instantaneous opening of the valve of the vacuum pump 8 can drive the vibration of other hearths by the vacuum pump pipe 10, and the two devices are combined with the added benefit, so that the 'flow fusion' accident caused by evacuation can be avoided.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (1)
1. The utility model provides a device for improving district's melt vacuum pump utilization ratio which characterized in that: the single crystal furnace comprises at least three single crystal furnaces, wherein each single crystal furnace is provided with an outlet connecting pipeline which is connected in parallel and converged to be communicated with a vacuum pump pipeline, the other end of the vacuum pump pipeline is connected with a vacuum pump, the pipeline is connected with the single crystal furnaces through a first corrugated pipe, each pipeline is provided with a butterfly valve, the vacuum pump pipeline is connected with the vacuum pump through a second corrugated pipe, and the vacuum pump is also provided with a vacuum pump exhaust pipeline;
the vacuum pump pipeline is provided with a pressure sensor and is also provided with a power failure air leakage device;
the vacuum pump exhaust pipeline is provided with a silencer, and the vacuum pump exhaust pipeline is also provided with an automatic air release valve;
the vacuum pump comprises a vacuum Roots pump and a mechanical pump, the vacuum Roots pump and the mechanical pump are connected through a third corrugated pipe, the vacuum pump pipeline is connected with the vacuum Roots pump, and the vacuum pump exhaust pipeline is connected with the mechanical pump;
motors are respectively arranged on the vacuum Roots pump and the mechanical pump, and the motors, the butterfly valve, the power failure air leakage device, the automatic air release valve and the pressure sensor are all electrically connected with a control unit;
the method comprises the following steps:
step one, adopting a one-to-many working mode of a vacuum pump, respectively connecting vacuum pump pipelines to a plurality of single crystal furnaces, designing controllable butterfly valves on pipelines extending out of the furnace body, and controlling the butterfly valves to be incapable of being opened simultaneously through program interlocking;
step two, controlling to open one butterfly valve, starting the vacuum pump to work in a closed state, evacuating air in the single crystal furnace through a pipeline, detecting that the mechanical pump stops working when the required preliminary vacuum degree is reached, and continuing to evacuate by the vacuum Roots pump until the vacuum degree of the furnace body reaches the process requirement of less than 0.02 bar;
step three: after the vacuum degree is reached, the vacuum pump stops working, whether other butterfly valves are opened or not is detected, if yes, the corresponding pipeline butterfly valves are closed, if not, whether the vacuum pump pipeline is at normal pressure is detected by a pressure sensor, if not, an automatic air release valve is opened, and the vacuum pump is re-detected until the normal pressure state is reached;
step four: closing an automatic air release valve, starting the vacuum pump to work, opening a corresponding butterfly valve to be operated, starting the operation, detecting whether the vacuum degree can meet the specified requirement in the specified time, closing the corresponding valve if possible, closing the vacuum pump, ending, otherwise, releasing air to the pressure in the furnace to normal pressure, and returning to the step of detecting whether the vacuum pump pipeline is normal pressure or not until the specified requirement is met.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810332647.2A CN108425846B (en) | 2018-04-13 | 2018-04-13 | Device and method for improving utilization rate of zone-melting vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810332647.2A CN108425846B (en) | 2018-04-13 | 2018-04-13 | Device and method for improving utilization rate of zone-melting vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108425846A CN108425846A (en) | 2018-08-21 |
| CN108425846B true CN108425846B (en) | 2023-09-05 |
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| CN201810332647.2A Active CN108425846B (en) | 2018-04-13 | 2018-04-13 | Device and method for improving utilization rate of zone-melting vacuum pump |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114381796B (en) * | 2022-03-23 | 2022-05-31 | 广东高景太阳能科技有限公司 | Energy-saving control system and method capable of maintaining vacuum pump without stopping furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003278680A (en) * | 2002-03-26 | 2003-10-02 | Aisin Seiki Co Ltd | Multi-stage vacuum pump device |
| CN202195685U (en) * | 2011-08-25 | 2012-04-18 | 饶平县裕通永磁材料厂 | Rare earth permanent magnet vacuum sintering furnace |
| CN203958676U (en) * | 2014-06-20 | 2014-11-26 | 中磁科技股份有限公司 | A kind of pumped vacuum system of capper |
| CN206783817U (en) * | 2017-04-17 | 2017-12-22 | 西安创联新能源设备有限公司 | A kind of bleeding point pipe-line system of single crystal growing furnace four |
| CN208221094U (en) * | 2018-04-13 | 2018-12-11 | 天津中环领先材料技术有限公司 | A kind of device for improving area and melting vacuum pump utilization rate |
-
2018
- 2018-04-13 CN CN201810332647.2A patent/CN108425846B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003278680A (en) * | 2002-03-26 | 2003-10-02 | Aisin Seiki Co Ltd | Multi-stage vacuum pump device |
| CN202195685U (en) * | 2011-08-25 | 2012-04-18 | 饶平县裕通永磁材料厂 | Rare earth permanent magnet vacuum sintering furnace |
| CN203958676U (en) * | 2014-06-20 | 2014-11-26 | 中磁科技股份有限公司 | A kind of pumped vacuum system of capper |
| CN206783817U (en) * | 2017-04-17 | 2017-12-22 | 西安创联新能源设备有限公司 | A kind of bleeding point pipe-line system of single crystal growing furnace four |
| CN208221094U (en) * | 2018-04-13 | 2018-12-11 | 天津中环领先材料技术有限公司 | A kind of device for improving area and melting vacuum pump utilization rate |
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| Publication number | Publication date |
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| CN108425846A (en) | 2018-08-21 |
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Effective date of registration: 20240205 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Country or region before: China |