CN208221094U - A kind of device for improving area and melting vacuum pump utilization rate - Google Patents
A kind of device for improving area and melting vacuum pump utilization rate Download PDFInfo
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- CN208221094U CN208221094U CN201820527059.XU CN201820527059U CN208221094U CN 208221094 U CN208221094 U CN 208221094U CN 201820527059 U CN201820527059 U CN 201820527059U CN 208221094 U CN208221094 U CN 208221094U
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- vacuum pump
- pipeline
- pump
- utilization rate
- vacuum
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- 238000002844 melting Methods 0.000 title claims abstract description 11
- 230000008018 melting Effects 0.000 title claims abstract description 11
- 239000013078 crystal Substances 0.000 claims abstract description 17
- 239000004577 thatch Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 9
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a kind of device of molten vacuum pump utilization rate in raising area, including at least three single crystal growing furnaces, every single crystal growing furnace outlet connecting pipe road, the pipeline parallel connection is converged to be connected to vacuum pump pipeline, the other end of the vacuum pump pipeline connects vacuum pump, it is connected between the pipeline and the single crystal growing furnace by the first bellows, each pipeline is equipped with butterfly valve, it is connected between the vacuum pump pipeline and the vacuum pump by the second bellows, is additionally provided with vacuum pump discharges pipeline on the vacuum pump.A kind of device for improving area and melting vacuum pump utilization rate described in the utility model, the structure type of more single crystal growing furnaces is connected by a vacuum pump, and the variation and cooperation of corresponding structure, it being capable of save the cost, the utilization rate for improving equipment, improves the efficiency of work, stability is stronger, convenient for safeguarding, stability is more preferable.
Description
Technical field
The utility model belongs to area and melts field of vacuum, and the dress of vacuum pump utilization rate is melted more particularly, to a kind of raising area
It sets.
Background technique
Now current equipment is all using every furnace with a vacuum pump, vacuum pump most of time be for idle state,
Every furnace causes the waste of cost with a vacuum pump, and the utility model proposes the dresses that vacuum pump utilization rate is melted in a kind of raising area
It sets, the structure type of more single crystal growing furnaces, and the variation and cooperation of corresponding structure is connected by a vacuum pump, can be saved
Cost improves the utilization rate of equipment, improves the efficiency of work, and stability is stronger, and convenient for safeguarding, stability is more preferable.
Utility model content
In view of this, the utility model is directed to a kind of device of molten vacuum pump utilization rate in raising area, it is true by one
The structure type of sky pump more single crystal growing furnaces of connection, and the variation and cooperation of corresponding structure, can save the cost, improve equipment
Utilization rate, improve the efficiency of work, stability is stronger, and convenient for safeguarding, stability is more preferable.
In order to achieve the above objectives, the technical solution of the utility model is achieved in that
A kind of device for improving area and melting vacuum pump utilization rate, including at least three single crystal growing furnaces, every monocrystalline outlet of still
Connecting line, the pipeline parallel connection is converged to be connected to vacuum pump pipeline, and the other end of the vacuum pump pipeline connects vacuum pump,
It is connected between the pipeline and the single crystal growing furnace by the first bellows, each pipeline is equipped with butterfly valve, the vacuum pump
It is connected between pipeline and the vacuum pump by the second bellows, is additionally provided with vacuum pump discharges pipeline on the vacuum pump.
Further, the vacuum pump pipeline is equipped with pressure sensor, is additionally provided with power failure on the vacuum pump pipeline and lets out
Device of air.
Further, the vacuum pump discharges pipeline is equipped with muffler, is additionally provided on the vacuum pump discharges pipeline certainly
Dynamic vent valve.
Further, the vacuum pump includes Vacuum Roots pump and mechanical pump, is connected between the two by third bellows,
The vacuum pump pipeline is connect with the Vacuum Roots pump, and the vacuum pump discharges pipeline is connected on the mechanical pump.
Further, be respectively equipped with motor on the Vacuum Roots pump and the mechanical pump, the motor, the butterfly valve,
The power failure air releasing device, the automatic blow off valve valve air relief and the pressure sensor are electrically connected with control unit.
Compared with the existing technology, the device of vacuum pump utilization rate is melted with following in a kind of area of improving described in the utility model
Advantage:
(1) it is described in the utility model it is a kind of improve area melt vacuum pump utilization rate device and method, by vacuum pump with
The one-to-many form of single crystal growing furnace and corresponding control method can be improved the utilization rate of vacuum pump, guarantee preferably using effect
Fruit, while avoiding the occurrence of because evacuating " stream the is molten " accident occurred, stability is preferable, convenient and practical.
(2) a kind of device for improving area and melting vacuum pump utilization rate described in the utility model, is connected by a vacuum pump
The structure type of more single crystal growing furnaces, and the variation and cooperation of corresponding structure, can save the cost, improve the use of equipment
Rate improves the efficiency of work, and stability is stronger, and convenient for safeguarding, stability is more preferable.
Detailed description of the invention
The attached drawing for constituting a part of the utility model is used to provide a further understanding of the present invention, this is practical new
The illustrative embodiments and their description of type are not constituteed improper limits to the present invention for explaining the utility model.?
In attached drawing:
Fig. 1 is a kind of device connection schematic diagram of the molten vacuum pump utilization rate in raising area described in the utility model embodiment；
Fig. 2 is a kind of device and method technique stream of the molten vacuum pump utilization rate in raising area described in the utility model embodiment
Journey block diagram.
Description of symbols:
1- single crystal growing furnace；2- butterfly valve；The first bellows of 3-；4- pipeline；5- pressure sensor；6- power failure air releasing device；7-
Two bellowss；8- vacuum pump；9- vacuum pump discharges pipeline；10- vacuum pump pipeline.
Specific embodiment
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result,
Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another
It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition
State the concrete meaning of term in the present invention.
The utility model will be described in detail below with reference to the accompanying drawings and embodiments.
As shown in Figure 1, including at least three single crystal growing furnaces 1, every 1 outlet connecting pipe road 4 of single crystal growing furnace, the pipeline 4
Parallel connection is converged to be connected to vacuum pump pipeline 10, and the other end of the vacuum pump pipeline 10 connects vacuum pump 8, the pipeline 4 with
It is connected between the single crystal growing furnace 1 by the first bellows 3, each pipeline 4 is equipped with butterfly valve 2, the vacuum pump pipeline 10
It is connect between the vacuum pump 8 by the second bellows 7, is additionally provided with vacuum pump discharges pipeline 9 on the vacuum pump 8.
Wherein, the vacuum pump pipeline 10 is equipped with pressure sensor 5, is additionally provided with power failure on the vacuum pump pipeline 10 and lets out
Device of air 6.
Wherein, the vacuum pump discharges pipeline 9 is equipped with muffler, is additionally provided on the vacuum pump discharges pipeline and puts automatically
Air valve.
Wherein, the vacuum pump 8 includes Vacuum Roots pump and mechanical pump, is connected between the two by third bellows, institute
It states vacuum pump pipeline 10 to connect with the Vacuum Roots pump, the vacuum pump discharges pipeline 9 is connected on the mechanical pump.
Wherein, it is respectively equipped with motor on the Vacuum Roots pump and the mechanical pump, it is the motor, the butterfly valve, described
Power failure air releasing device, the automatic blow off valve valve air relief and the pressure sensor 5 are electrically connected with control unit.
Wherein, vacuum-pump line 10 is coupled with multiple lists using the working method that vacuum pump 8 is one-to-many by step 1
On brilliant furnace 1, controllable butterfly valve 2 is designed on the pipeline 4 that furnace body stretches out, these butterfly valves 2 can not by the mutual lock control of program
It opens simultaneously；
One of butterfly valve 2 is opened in step 2, control, other are in closed state, and vacuum pump 8 is started to work, passed through
Pipeline 4 evacuates air in single crystal growing furnace 1, detects when reaching required preliminary vacuum degree, mechanical pump stops working, by vacuum sieve
Thatch pump continues to vacuumize, until furnace body vacuum degree is less than the technique requirement of 0.02bar；
Step 3: after above-mentioned vacuum degree to be achieved, vacuum pump 8 stops working, and has detected whether that other butterfly valves 2 are opened, such as
Fruit has, and closes respective line butterfly valve 2, if no, then detects whether vacuum-pump line 10 is normal pressure by pressure sensor 5, no
If, automatic blow off valve valve air relief is opened, is detected again, until reaching normal pressure state；
Step 4: closing automatic blow off valve valve air relief, and vacuum pump 8 is started to work, and the corresponding butterfly valve 2 accordingly to be worked is opened, and opens
Beginning work, can vacuum degree reach prescribed requirement before the deadline for detection, can close respective valves if, close true
Sky pump 8, terminates, and otherwise, is deflated to furnace pressure to normal pressure, come back to detect in vacuum-pump line 10 whether be normal pressure step
Suddenly, until reaching prescribed requirement.
Wherein for when other tables keep isometrical state, absolute stable state is needed just to make full melting zone not
It will appear the generation of " stream is molten " accident, the improvement of this method is all added suitable straight in the junction of each furnace body of vacuum pump 8
Diameter " corrugated stainless steel tubing ", utmostly reducing vibration bring from mechanical aspects with the method for " being flexible coupling " influences；
In terms of detecting control, the sensing device of pressure sensor 5 and automatic blow off valve valve air relief joined, be that vacuum pump 8 is rigid
Just work terminates, and vacuum pump line 10 is also under negative pressure state, when being vacuumized again for other burner hearths, 8 valve of vacuum pump
The moment of door opens the vibration that other tables can be driven by vacuum-pump line 10, both devices combine the benefit being added can avoid
Occur because evacuating " stream the is molten " accident occurred.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (5)
1. a kind of device for improving area and melting vacuum pump utilization rate, it is characterised in that: including at least three single crystal growing furnaces, every list
Brilliant outlet of still connecting line, the pipeline parallel connection is converged to be connected to vacuum pump pipeline, and the other end of the vacuum pump pipeline connects
Vacuum pump is connect, is connected between the pipeline and the single crystal growing furnace by the first bellows, each pipeline is equipped with butterfly valve, institute
It states and is connected between vacuum pump pipeline and the vacuum pump by the second bellows, be additionally provided with vacuum pump discharges pipe on the vacuum pump
Road.
2. a kind of device for improving area and melting vacuum pump utilization rate according to claim 1, it is characterised in that: the vacuum pump
Pipeline is equipped with pressure sensor, is additionally provided with power failure air releasing device on the vacuum pump pipeline.
3. a kind of device for improving area and melting vacuum pump utilization rate according to claim 2, it is characterised in that: the vacuum pump
Exhaust pipe is equipped with muffler, is additionally provided with automatic blow off valve valve air relief on the vacuum pump discharges pipeline.
4. a kind of device for improving area and melting vacuum pump utilization rate according to claim 3, it is characterised in that: the vacuum pump
It including Vacuum Roots pump and mechanical pump, is connected between the two by third bellows, the vacuum pump pipeline and vacuum sieve
Thatch pump connection, the vacuum pump discharges pipeline are connected on the mechanical pump.
5. a kind of device for improving area and melting vacuum pump utilization rate according to claim 4, it is characterised in that: vacuum sieve
Motor is respectively equipped on thatch pump and the mechanical pump, and the motor, the power failure air releasing device, described is put the butterfly valve automatically
Air valve and the pressure sensor are electrically connected with control unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820527059.XU CN208221094U (en) | 2018-04-13 | 2018-04-13 | A kind of device for improving area and melting vacuum pump utilization rate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820527059.XU CN208221094U (en) | 2018-04-13 | 2018-04-13 | A kind of device for improving area and melting vacuum pump utilization rate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208221094U true CN208221094U (en) | 2018-12-11 |
Family
ID=64529064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820527059.XU Active CN208221094U (en) | 2018-04-13 | 2018-04-13 | A kind of device for improving area and melting vacuum pump utilization rate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208221094U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108425846A (en) * | 2018-04-13 | 2018-08-21 | 天津中环领先材料技术有限公司 | A kind of device and method for improving area and melting vacuum pump utilization rate |
-
2018
- 2018-04-13 CN CN201820527059.XU patent/CN208221094U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108425846A (en) * | 2018-04-13 | 2018-08-21 | 天津中环领先材料技术有限公司 | A kind of device and method for improving area and melting vacuum pump utilization rate |
| CN108425846B (en) * | 2018-04-13 | 2023-09-05 | 天津中环领先材料技术有限公司 | Device and method for improving utilization rate of zone-melting vacuum pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191225 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring road No. 12 in Haitai) Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |