CN108422286A - A kind of processing method and its positioning tool of Si meter Te roof prisms - Google Patents

A kind of processing method and its positioning tool of Si meter Te roof prisms Download PDF

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Publication number
CN108422286A
CN108422286A CN201810298280.7A CN201810298280A CN108422286A CN 108422286 A CN108422286 A CN 108422286A CN 201810298280 A CN201810298280 A CN 201810298280A CN 108422286 A CN108422286 A CN 108422286A
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China
Prior art keywords
meter
locating piece
roof prisms
prism
face
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CN201810298280.7A
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CN108422286B (en
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金正彬
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MA'ANSHAN JIANGNAN OPTICAL CO Ltd
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MA'ANSHAN JIANGNAN OPTICAL CO Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a kind of processing methods and its positioning tool of Si meter Te roof prisms, belong to optical prism technical field.In the positioning tool with by body positioning surface one by body locating piece one and with by the upper surface for being fixed on substrate by body locating piece two of body positioning surface two, by body positioning surface one and by body positioning surface two perpendicular to the upper surface of substrate;Prism side locating piece is located above substrate, the prism side-locating face with vertical substrate upper surface.The process steps are:The first side of prism is first processed, then is positioned by above-mentioned positioning tool and processes prism second side;Then, again by positioning tool positioning and two ridge faces of preparatory processing;Finally, it is ground another reference plane on the basis of one of ridge face, makes ridge angular accuracy 1 " within.Present invention optimize technique step on the basis of not changing existing process equipment ensures processing backhouse roof-angle precision 1 " within, and each face precision is higher, technology requires relatively low, productivity height.

Description

A kind of processing method and its positioning tool of Si meter Te roof prisms
Technical field
The invention belongs to optical prism processing technique fields, more specifically to a kind of adding for Si meter Te roof prisms Work method and its positioning tool.
Background technology
The prism that prism is made of optical material, the plane of refraction and reflecting surface of all prisms are referred to as working face, two works The intersection for making face is known as rib, and the section of vertical rib is known as main cross section.Prism plays many different effects, rib in optics The combination of mirror may be used as beam splitter, polarizer etc., but in most applications, only use the dispersion function of prism, or make The function that the direction of picture, direction of beam propagation change.Dispersion function makes prism as dispersion element, such as in spectrometer, take the photograph Prism in spectrometer, monochromator is exactly to play dispersion interaction.
Prism is not only high to the required precision of working face itself, and angle precision between working face require nor Chang Gao, this two aspect directly determine prism quality.Currently, prism ensures each working face of prism generally using primary batch production Parameter (finish, flatness, angle etc.) reaches design accuracy requirement, is that each process technology scheme has to one solved Key problem, because every procedure in the fabrication process may all influence final finished precision, the control to machining accuracy System also requires the method that should all have solution to the influence factor of every procedure always through entire manufacturing process.It is existing In the production process of prism, the faulty materials that Product Precision does not reach requirement can be produced often, to find out its cause, often processed The vertical control in the upper disk side of prism is bad in journey, and the vertical control in side is most universal, and the way most easily realized is to pass through frock clamp It realizes.So the reasonability of Fixture designing and the accuracy of manufacture are to ensure entire manufacturing process high efficiency production and make Product keeps the essential condition of high qualification rate.
With scientific and technological economic fast development, efficient, the high-precision epoch are already striden into, higher is proposed to the precision of prism Requirement, and how higher production energy reached by existing equipment, is that enterprise endeavours always the direction studied intensively.Such as Fig. 1 Shown in Si meter Te roof prisms (non-chamfering state), main body is by processing two on prism wherein a side A Ridge face B is formed, and institute's angulation is ridge angle between two ridge face B, generally 90 °, is controlled in production ridge angular accuracy More stringent, precision prescribed reaches 1 at present " within, this just greatly improves difficulty of processing, and existing processing technology is opposite More fall behind, reaches this precision production efficiency and be greatly reduced, yield rate is also relatively low, increases production cost.
The applicant previously applies and has authorized entitled:A kind of Si meter Te roof prisms polishing process, patent Number it is:The patent of invention of ZL 201210275232.9 is exactly the improvement in terms of Si meter Te roof prisms control ridge angle.The party Case includes prism blank ontology and its corresponding pattern, and face one and the angle in face two on prism blank ontology, pattern are 45 °, face three and the angle in face four are 90 °, and face five is mutually parallel with face six, and the surface optics of prism blank ontology and pattern is cold Optical cement technique in processing technology is glued, is polished processing to the face one of prism blank ontology, face two, face three, face four respectively. In process by the observation and measuring and calculating to product interference fringe, with polishing method adjustment product surface flatness with it is parallel Difference, to ensure the angular accuracy of product.The program is relatively coarse, can only also ensure ridge angle 2 ", and largely By the experimental technology of worker, production efficiency is relatively low.
In order to meet the production requirement of high-volume scale, it is necessary to be carried out to the processing technology of Si meter Te roof prisms excellent Change design, under the premise of meeting ridge angular accuracy, improves production efficiency, qualification rate, reduce production cost.
Invention content
1, it to solve the problems, such as
The present invention provides a kind of processing methods of Si meter Te roof prisms, and its object is to solve existing Si meter Te ridges Prism production in ridge angular accuracy be difficult to control 1 " within the problem of.The processing method is in the base for not changing existing process equipment Optimize technique step on plinth ensures processing backhouse roof-angle precision 1 " within, and each face precision is also relatively high;The processing method pair The requirement of worker's technology is relatively low, about 1.6 times of production efficiencys can be improved, product qualification rate is 99% or more.
The present invention also provides a kind of positioning tools of Si meter Te roof prisms, and above-mentioned processing method is specially coordinated to use, Si meter Te roof prisms are positioned, to ensure precision when processing.
2, technical solution
To solve the above problems, the present invention adopts the following technical scheme that.
A kind of positioning tool of Si meter Te roof prisms, including substrate, by body locating piece one, lean on body locating piece two and prism Side positioning block;The upper surface leaned on body locating piece one and be fixed on substrate by body locating piece two, has by body locating piece one and leans on Body positioning surface one has by body locating piece two and leans on body positioning surface two, by body positioning surface one and by body positioning surface two perpendicular to substrate Upper surface, for being positioned by body;The prism side locating piece is located above substrate, with vertical substrate upper surface Prism side-locating face, for being positioned to Si meter Te roof prisms.
As a further improvement, further including limited block;The limited block is set on substrate, with confined planes, limit Face is used for perpendicular to the prism side-locating face of prism side locating piece from other side limitation Si meter Te roof prisms position.
As a further improvement, further including supporting block, the supporting block lower end is glued on substrate, prism side locating piece glue It closes in supporting block.
As a further improvement, the substrate has benchmark inclined-plane, by body locating piece one and it is located at base by body locating piece two On quasi- inclined-plane.
As a further improvement, the finish on the substrate fiducials inclined-plane is 40~20, surface aperture is 1/8 λ;It is fixed by body Plane one, by the surface smoothness of body positioning surface two and prism side-locating face be 20~10, aperture be 1/8 λ, it is oblique with substrate fiducials The vertical precision in face is 10 " within;Angular accuracy by body positioning surface one and between body positioning surface two is 10 " within.
A kind of processing method of Si meter Te roof prisms, operating procedure are:
One, first side is processed
Take 90 ° of precision 20 " within square brick lean on body one, an end face of Si meter Te roof prisms blank to be processed is led to It crosses optical cement and is glued to square brick on body one, be ground and polishing treatment, one side of processing control its surface aperture 1/ Within 12 λ, finish is within 20~10, side vertical 1 ';
Two, second side is processed
A takes with Si meter Te roof prisms same shape to be processed by body, uses CaCO3The surface of body is leaned in aqueous solution wiping, The mixed liquor essence of ether and ethyl alcohol is used to wipe again;
B wipes the polishing powder solution of 400~500 mesh of the side of the Si meter Te roof prism blanks handled through step 1 It wipes, then dips the mixed liquor wiping of ether and ethyl alcohol with dust-free paper;
C is using the positioning tool of above-mentioned Si meter Te roof prisms by the machined side light of Si meter Te roof prisms to be processed Glue navigates on body;
D will be glued to by optical cement on optical cement plate in step c by body, the other side of grinding and polishing Si meter Te roof prisms Face;
Three, ridge face preliminary working
Using method identical with above-mentioned steps two, two ridge faces of Si meter Te roof prisms are processed;
Four, ridge face finishes
1. prepare 90 ° of precision 0.5 " within square brick lean on body two, surface dust-free paper wiped clean;Prepare one flat plate Dust-free paper wiped clean is used in combination in 1/4 λ in 40-20, aperture in glass, surface smoothness;
2. first square brick is placed on by body two on plate glass, and visible interference fringes;Again by obtained through step 3 this One ridge face optical cement of the special roof prism of rice leans on body two to square brick so that from another ridge face, it can be seen that interference Striped, and ensure that two interference fringes are in the same plane;
3. Si meter Te roof prisms are removed by body two from plate glass together with square brick, and square brick is arrived by two optical cement of body On optical cement plate, it is ground and polishes, until ridge angular accuracy is 1 " within.
As a further improvement, using the positioning tool of Si meter Te roof prisms by Si meter Te to be processed in the step 2 The process that roof prism blank navigates on body is:First, it will be placed by body by body locating piece one and lean on body locating piece two Between substrate on, and two side is made to be adjacent to respectively by body locating piece one by body positioning surface one and by body locating piece two By body positioning surface two;Then, Si meter Te roof prisms are placed on body, the prism of the tight prism side locating piece of face paste to be processed Side-locating face, and make the machined surface of Si meter Te roof prisms and lean on body optical cement glued.
As a further improvement, the Si meter Te roof prisms are sent into oven, at 92 DEG C~100 DEG C with after body optical cement At a temperature of heat 8~8.2 hours.
As a further improvement, in the step 4, grinding is divided into rough lapping and smooth grinding, and sand grains diameter exists when rough lapping 320~350 mesh are ground 78~82 revs/min of rotating speed, 8~10mm/min of feed speed;Smooth grinding sand grains diameter is 500~520 Mesh is ground 63~67 revs/min of rotating speed, 6~7mm/min of feed speed;Polishing is divided into rough polishing and fine polishing, when rough polishing, It is ground using 400~460 mesh polishing powder circle swings, is ground 55~60 revs/min of rotating speed, and apply 4~5Kg pressure;Essence is thrown Light time is ground using 500~550 mesh polishing powder solution circle swings, 45~50 revs/min of rotating speed of grinding, and application 2~ 2.5Kg pressure.
As a further improvement, when the grinding, within 0.001mm, flatness exists control machined surface straightness Within 0.0005mm;When finishing polish, pure water is added in discontinuity on burnishing surface, and detects the machined surface of Si meter Te roof prisms The aperture of aperture and optical cement plate when no striped difference, stops processing when the two aperture is consistent.
3, advantageous effect
Compared with the prior art, beneficial effects of the present invention are:
(1) positioning tool of Si meter Te roof prisms of the present invention specially coordinates above-mentioned processing method to use, to the rooms Si meter Te Ridge prism is positioned, to ensure that following process ridge angle can reach 1 " required precision;It is by leaning on one He of body locating piece By body locating piece two to being positioned by body, then with prism side locating piece Si meter Te roof prisms to be processed are positioned, is protected The accuracy for demonstrate,proving Si meter Te roof prisms optical cement relative position to after on body, required machined surface and grinding when so as to following process Face is in approximately the same plane;It is simple and fast using the tool locating, it can reduce to the requirement of operator's technology, improve positioning speed Degree.
(2) positioning tool of Si meter Te roof prisms of the present invention is non-to Si meter Te roof prisms too necessary by limited block Position is limited, and prevents its sideslip too many, is conducive to subsequently go up disk arrangement, a batch machining.
(3) positioning tool of Si meter Te roof prisms of the present invention limits the flatness and angle precision of each locating piece It is fixed, ensure positioning accuracy reliability, meets following process demand.
(4) processing method of Si meter Te roof prisms of the present invention, optimizes work on the basis of not changing existing process equipment Skill step ensures processing backhouse roof-angle precision 1 " within, and each face precision is also relatively high;The processing method wants worker's technology It asks relatively low, about 1.6 times of production efficiencys can be improved, product qualification rate is 99% or more.
(5) processing method of Si meter Te roof prisms of the present invention, Si meter Te roof prisms are sent into and are baked with after body optical cement Case heats 8~8.2 hours at a temperature of 92 DEG C~100 DEG C, increase pentaprism and between body optical cement adhesion strength, can have Effect avoids prism in grinding process from loosening or fall, and ensures grinding stability and precision.
(6) processing method of Si meter Te roof prisms of the present invention, when being limited to the operation principle of equipment, grinding and polishing, mill Bevel is horizontal plane, and prism optical cement is on body, after disk on body, prism with lean on contact level non-horizontal surface, but it is perpendicular It faces directly, there is downward active force to prism in grinding process, be easy to cause the loosening that prism is combined with by body, or even de- It falls;Therefore, inventor gropes to summarize by long-term practice, grinding is divided into grinding and polishing, and twice grinding process is all divided to two Road, i.e. grinding are divided into rough lapping and smooth grinding, and polishing is also classified into rough polishing and fine polishing, and using polishing process is inverted, simultaneously Sand when stringent control grinding and polishing powder grain size, grinding rotating speed, feed speed and pressure, ensure prism with by body optical cement can Under the premise of, the resultant effect for reaching grinding speed, grinding surface surface smoothness and angle precision is very good.
(7) processing method of Si meter Te roof prisms of the present invention can under the premise of the parameter of stringent control grinding and polishing Ensureing that machined surface straightness can be controlled within 0.001mm when grinding, flatness is prepared within 0.0005mm for polishing, And in finishing polish, pure water is added in discontinuity on burnishing surface, the polishing powder solution being sustained in grinding surface, and polishing essence can be improved Degree, and it is consistent with the aperture of optical cement plate in the machined surface aperture of detection Si meter Te roof prisms, when no striped difference, that is, reach room Roof-angle 1 " required precision.
Description of the drawings
Fig. 1 is the stereochemical structure view of the non-chamfering state of Si meter Te roof prisms;
Fig. 2 is the stereochemical structure view of the positioning tool of Si meter Te roof prisms of the present invention;
Fig. 3 is Status view when the positioning tool of Si meter Te roof prisms of the present invention positions prism.
In figure:1, substrate;2, body locating piece one is leaned on;3, body locating piece two is leaned on;4, prism side locating piece;5, limited block;6、 Secured adjusted block;7, supporting block;8, body is leaned on.
Specific implementation mode
The present invention is further described below with reference to specific embodiments and the drawings.
Embodiment 1
As shown in Fig. 2, a kind of positioning tool of Si meter Te roof prisms of the present embodiment, exclusively for Si meter Te roof prisms The grinding control positioning of ridge face angle designed by, i.e. the ridge face B of Si meter Te roof prisms shown in Fig. 1 (before each non-chamfering of rib) 90 ° of angles, precision controlling is 1 " within.The structure of the tooling is illustrated below in conjunction with the accompanying drawings.
The positioning tool of the present embodiment includes substrate 1, further includes by body locating piece 1, by body locating piece 23, prism side Locating piece 4, limited block 5, secured adjusted block 6 and supporting block 7.Wherein, substrate 1 is used as support base, by body locating piece 1, leans on Body locating piece 23, limited block 5, secured adjusted block 6 and supporting block 7 are fixed on substrate 1 by optical cement, and substrate 1 is upper Inclined-plane on the basis of surface portion is located at this benchmark by body locating piece 1, by body locating piece 23, secured adjusted block 6 and supporting block 7 On inclined-plane, when this is to will subsequently lean on body 8 to be put by body locating piece 1 and between body locating piece 23, by body 8 in gravity It can be preferably bonded with by body locating piece 1 and by body locating piece 23 under effect, improve positioning accurate parasexuality.
Here, it leans on body locating piece 1 to have and leans on body positioning surface one, have by body locating piece 23 and lean on body positioning surface two, lean on body Positioning surface one and by body positioning surface two perpendicular to the upper surface of substrate 1, for leaning on body 8 to position.7 lower end of supporting block is glued On substrate 1, prism side locating piece 4 is glued in supporting block 7 so that prism side locating piece 4 is located at 1 top of substrate, prism side Locating piece 4 has the prism side-locating face of 1 upper surface of vertical substrate, for being positioned to Si meter Te roof prisms.Limited block 5 It is fixed on substrate 1 also by optical cement, with confined planes, prism side positioning of the confined planes perpendicular to prism side locating piece 4 Face, for limiting Si meter Te roof prisms position from the other side.It should be noted that being directly anchored to base by body locating piece 1 On plate 1, and secured adjusted block 6 is resisted against the rear side by body locating piece 23, and it is opposite by body positioning to be conveniently adjusted secured adjusted block 6 The position of block 1.To lean on body positioning surface two, prism by body positioning surface one, by body locating piece 23 by body locating piece 1 The confined planes of the prism side-locating face of side positioning block 4 and limited block 5 are surrounded into a limit space, to prism and lean on body when use 8 relative position is limited, and follow-up high-precision process requirements are met.
It should be noted that due to positioning accuracy request height, the required precision of ridge rib after following process, institute just can guarantee It is also relatively high with the required precision to each component of positioning tool itself.Specifically, the finish on 1 benchmark inclined-plane of substrate be 40~ 20, surface aperture is 1/8 λ;By body positioning surface one, by the surface smoothness of body positioning surface two and prism side-locating face be 20~ 10, aperture is 1/8 λ, and the vertical precision with 1 benchmark inclined-plane of substrate is 10 " within;By body positioning surface one and by body positioning surface two it Between angular accuracy 10 " within.
In the present embodiment, above-mentioned parameter is selected as:The finish on 1 benchmark inclined-plane of substrate is 30, and surface aperture is 1/8 λ; It is 15 by body positioning surface one, by the surface smoothness of body positioning surface two and prism side-locating face, aperture is 1/8 λ, with 1 base of substrate The vertical precision on quasi- inclined-plane is 10 " within;Angular accuracy by body positioning surface one and between body positioning surface two is 10 " within.
The positioning tool of the present embodiment Si meter Te roof prisms specially coordinates above-mentioned processing method to use, to the rooms Si meter Te Ridge prism is positioned, to ensure that following process ridge angle can reach 1 " required precision;It is by leaning on one 2 He of body locating piece It positions by body 8 for 23 pairs by body locating piece, then Si meter Te roof prisms to be processed is positioned with prism side locating piece 4, Ensure Si meter Te roof prisms optical cement to relative position after on body 8 accuracy, when so as to following process required machined surface with Grinding surface is in approximately the same plane;It is simple and fast using the tool locating, it can reduce to the requirement of operator's technology, improve positioning Speed.
Embodiment 2
The present embodiment provides a kind of processing methods of Si meter Te roof prisms, for the Si meter Te roof prisms to semi-finished product Blank is processed, that is, is ground side A and ridge face B, and ensure ridge angular accuracy 1 " within.The rooms Si meter Te mentioned here Ridge prism blank refers to having had preliminary shape, and only each face is hair side, and general each face surplus is within 0.2mm.
The concrete operation step of the processing method of the Si meter Te roof prisms is:
One, first side is processed
Take 90 ° of precision 20 " within square brick lean on body one, surface dust-free paper wiped clean, by the rooms Si meter Te to be processed One end face of ridge prism blank is glued to square brick on body one by 417# optical cements, and a square brick can paste 4 by body one Part prism, 40 disks are uniform to be arranged on the glass plate of diameter 300mm, good with 417# optics gluing knot, normally into Row grinding and polishing treatment, process first side A, control its surface aperture within 1/12 λ, and finish is 20~10, side Within vertical 1 '.
Two, second side is processed
A takes leans on the body 8, but big 10mm of shape or so to use CaCO with Si meter Te roof prisms same shape to be processed3It is water-soluble Liquid wiping is by each surface of body 8, removal surface dirt, oil stain print, part watermark, mouth of a river circle etc., then presses 3 with ether and ethyl alcohol:1 Mixed liquor essence wipe, thoroughly it is de-watermarked;It should be noted that by the use of body 8 and Si meter Te roof prisms same shape to be processed, Consider the prism side A positioning requirements different with ridge face B, the same positioning tool can be used to complete positioning, and be ground side A Using the respective side by body 8, using by 8 corresponding ridge face of body when being ground ridge face B;This is higher to leaning on 8 required precision of body, Each face type error is within 0.001mm, and each angular error is 20 " within, each face finish is with 6 times of magnifying glass detections in 40-20 Within, aperture is detected with ZYGO interferometers within 1/10 λ, no cut, without broken rib phenomenon;
B wipes the polishing powder solution of 400 mesh of the side of the Si meter Te roof prism blanks handled through step 1, then uses Dust-free paper dips ether and ethyl alcohol by 3:1 mixed liquor wiped clean;
C uses the positioning tool of Si meter Te roof prisms in embodiment 1 by the machined of Si meter Te roof prisms to be processed Side A optical cements navigate in the corresponding side surface of body 8;Glued Si meter Te roof prisms are removed from tooling and lean on body 8, are sent into Oven heats 8.2 hours at a temperature of 92 DEG C.
40 disks of d will be glued to by optical cement on the optical cement plate of diameter 300 in step c by body 8, normal grinding and throwing The another side A of light Si meter Te roof prisms.
Here, the positioning tool of Si meter Te roof prisms navigates to Si meter Te roof prisms blank to be processed in step c Process on body 8 is:First, it will be placed by body 8 on the substrate 1 by body locating piece 1 and between body locating piece 23, And so that two side is adjacent to respectively and lean on body positioning surface by body positioning surface one and by body locating piece 23 by body locating piece 1 Two;Then, Si meter Te roof prisms are placed on body 8, the prism side positioning of the tight prism side locating piece of face paste to be processed 4 Face, and make the machined surface of Si meter Te roof prisms with by body 8 optical cement gluing, the Si meter Te roof prisms other side is limited block 5 Confined planes limiting displacement.
Three, ridge face preliminary working
Using method identical with above-mentioned steps two, two ridge face B of Si meter Te roof prisms are processed;In this step, Corresponding positioning surface only is replaced by body 8, localization method is identical with grinding step, and which is not described herein again.
Four, ridge face finishes
1. prepare 90 ° of precision 0.5 " within square brick lean on body 2 10, surface dust-free paper wiped clean;Prepare one piece Dust-free paper wiped clean is used in combination in 1/4 λ in 40-20, aperture in the plate glass of diameter 100mm, surface smoothness;
2. first square brick is placed on by body two on plate glass, and visible interference fringes;Again by obtained through step 3 this One ridge face B optical cement of the special roof prism of rice is to square brick on body two so that from another ridge face, it can be seen that dry Striped is related to, and ensures that two interference fringes are in the same plane, machined surface and the optical cement plate reference plane depth of parallelism are completely the same at this time;
3. Si meter Te roof prisms are removed by body two from plate glass together with square brick, and 10 square bricks are leaned on into two light of body On glue to the optical cement plate of diameter 300mm, it is ground and polishes, until ridge angular accuracy is 1 " within.
When being limited to the operation principle of equipment, grinding and polishing, grinding surface is horizontal plane, and prism optical cement leans on body in square brick On two, on the body after disk, prism and square brick lean on two contact surface non-horizontal surface of body, but vertical plane, to prism in grinding process With down force, it is easy to cause prism and leans on the loosening that body two is combined with square brick, or even fall off, therefore, it is necessary to control grinding Parameter.Step 3. in, grinding is divided into rough lapping and smooth grinding, and sand grains diameter is ground 78 revs/min of rotating speed in 320 mesh when rough lapping Clock, feed speed 8mm/min;Smooth grinding sand grains diameter is ground 63 revs/min of rotating speed, feed speed 6mm/min in 500 mesh;Polishing It is divided into rough polishing and fine polishing, when rough polishing, is ground using 400 mesh polishing powder circle swings, is ground 55 revs/min of rotating speed, and Apply 4Kg pressure;It when finishing polish, is ground using 500 mesh polishing powder solution circle swings, is ground 45 revs/min of rotating speed, and apply 2Kg pressure.And when grinding, control machined surface straightness is within 0.001mm, and flatness is within 0.0005mm;Finishing polish When, pure water is added in discontinuity on burnishing surface, and detects the aperture of the machined surface aperture and optical cement plate of Si meter Te roof prisms, When the two aperture is consistent, when no striped difference, expression has been machined into position, stops processing.
40 finished product Si meter Te roof prisms after processing are detected, ridge angle is 1 " within, each machined surface light Cleanliness is in 40-20, and aperture is within 1/10 λ, and the consistency of each prism dimensions is preferable.
Embodiment 3
It is substantially the same manner as Example 2 the present embodiment provides a kind of processing method of Si meter Te roof prisms, it is different It is:It is in the B processes of step 2 that the side of the Si meter Te roof prism blanks handled through step 1 is molten with the polishing powder of 500 mesh Liquid wipes, then dips ether and ethyl alcohol by 3 with dust-free paper:1 mixed liquor wiped clean;Si meter Te ridge ribs in c processes Mirror and by body 8 be sent into oven, heated 8 hours at a temperature of 100 DEG C;
The process of step 3 3. in, grinding is divided into rough lapping and smooth grinding, and sand grains diameter turns in 330 mesh, grinding when rough lapping 80 revs/min of speed, feed speed 9mm/min;Smooth grinding sand grains diameter is ground 65 revs/min of rotating speed, feed speed in 510 mesh 6.5mm/min;Polishing is divided into rough polishing and fine polishing, when rough polishing, is ground using 450 mesh polishing powder circle swings, grinding turns 58 revs/min of speed, and apply 4.5Kg pressure;It when finishing polish, is ground using 530 mesh polishing powder solution circle swings, is ground rotating speed 47 revs/min, and apply 2.3Kg pressure.
Finished product Si meter Te roof prisms after processing are detected, ridge angle is 1 " within, each machined surface finish In 40-20, aperture is within 1/10 λ, and the consistency of each prism dimensions is preferable.
Embodiment 4
It is substantially the same manner as Example 2 the present embodiment provides a kind of processing method of Si meter Te roof prisms, it is different It is:It is in the B processes of step 2 that the side of the Si meter Te roof prism blanks handled through step 1 is molten with the polishing powder of 450 mesh Liquid wipes, then dips ether and ethyl alcohol by 3 with dust-free paper:1 mixed liquor wiped clean;Si meter Te ridge ribs in c processes Mirror and by body 8 be sent into oven, heated 8.1 hours at a temperature of 96 DEG C.
The process of step 3 3. in, grinding is divided into rough lapping and smooth grinding, and sand grains diameter turns in 350 mesh, grinding when rough lapping 82 revs/min of speed, feed speed 10mm/min;Smooth grinding sand grains diameter is ground 67 revs/min of rotating speed, feed speed in 520 mesh 7mm/min;Polishing is divided into rough polishing and fine polishing, when rough polishing, is ground using 460 mesh polishing powder circle swings, is ground rotating speed 60 revs/min, and apply 5Kg pressure;It when finishing polish, is ground using 550 mesh polishing powder solution circle swings, is ground rotating speed 50 Rev/min, and apply 2.5Kg pressure.
Finished product Si meter Te roof prisms after processing are detected, ridge angle is 1 " within, each machined surface finish In 40-20, aperture is within 1/10 λ, and the consistency of each prism dimensions is preferable.
Example of the present invention is only that the preferred embodiment of the present invention is described, not to present inventive concept and Range is defined, under the premise of not departing from design philosophy of the present invention, technology of this field engineers and technicians to the present invention The various modifications and improvement that scheme is made, should all fall into protection scope of the present invention.

Claims (10)

1. a kind of positioning tool of Si meter Te roof prisms, including substrate (1), it is characterised in that:Further include leaning on body locating piece one (2), body locating piece two (3) and prism side locating piece (4) are leaned on;It is described to be fixed by body locating piece one (2) and by body locating piece two (3) Upper surface in substrate (1) has by body locating piece one (2) and leans on body positioning surface one, has by body locating piece two (3) and is positioned by body Face two, by body positioning surface one and by body positioning surface two perpendicular to the upper surface of substrate (1), for leaning on body (8) to position;Institute State prism side locating piece (4) to be located above substrate (1), the prism side-locating face with vertical substrate (1) upper surface, for pair Si meter Te roof prisms are positioned.
2. a kind of positioning tool of Si meter Te roof prisms according to claim 1, it is characterised in that:It further include limited block (5);The limited block (5) is set on substrate (1), with confined planes, rib of the confined planes perpendicular to prism side locating piece (4) Mirror side-locating face, for limiting Si meter Te roof prisms position from the other side.
3. a kind of positioning tool of Si meter Te roof prisms according to claim 1 or 2, it is characterised in that:It further include branch Bracer (7), supporting block (7) lower end are glued on substrate (1), and prism side locating piece (4) is glued in supporting block (7).
4. a kind of positioning tool of Si meter Te roof prisms according to claim 1 or 2, it is characterised in that:The substrate (1) there is benchmark inclined-plane, be located at benchmark inclined-plane on by body locating piece one (2) and by body locating piece two (3).
5. a kind of positioning tool of Si meter Te roof prisms according to claim 4, it is characterised in that:The substrate (1) The finish on benchmark inclined-plane is 40~20, and surface aperture is 1/8 λ;By body positioning surface one, lean on body positioning surface two and prism side positioning The surface smoothness in face is 20~10, and aperture is 1/8 λ, and the vertical precision with substrate (1) benchmark inclined-plane is 10 " within;It is fixed by body Plane one and angular accuracy between body positioning surface two are 10 " within.
6. a kind of processing method of Si meter Te roof prisms, operating procedure are:
One, first side is processed
Take 90 ° of precision 20 " within square brick lean on body one, an end face of Si meter Te roof prisms blank to be processed is passed through into light It learns glue glued adhesion to lean on body one to square brick, is ground and polishing treatment, one side of processing control its surface aperture in 1/12 λ Within, finish is within 20~10, side vertical 1 ';
Two, second side is processed
A takes with Si meter Te roof prisms same shape to be processed by body (8), uses CaCO3The surface of body (8) is leaned in aqueous solution wiping, The mixed liquor essence of ether and ethyl alcohol is used to wipe again;
B wipes the polishing powder solution of 400~500 mesh of the side of the Si meter Te roof prism blanks handled through step 1, then The mixed liquor wiping of ether and ethyl alcohol is dipped with dust-free paper;
C is using the positioning tool of Si meter Te roof prisms described in claim 5 by the machined of Si meter Te roof prisms to be processed Side optical cement navigates on body (8);
D will be glued to by optical cement on optical cement plate in step c by body (8), the other side of grinding and polishing Si meter Te roof prisms Face;
Three, ridge face preliminary working
Using method identical with above-mentioned steps two, two ridge faces of Si meter Te roof prisms are processed;
Four, ridge face finishes
1. prepare 90 ° of precision 0.5 " within square brick lean on body two, surface dust-free paper wiped clean;Prepare one flat plate glass Dust-free paper wiped clean is used in combination in 1/4 λ in 40-20, aperture in glass, surface smoothness;
2. first square brick is placed on by body two on plate glass, and visible interference fringes;The Si meter Te that will be obtained again through step 3 One ridge face optical cement of roof prism leans on body two to square brick so that from another ridge face, it can be seen that interference fringe, And ensure that two interference fringes are in the same plane;
3. Si meter Te roof prisms are removed by body two from plate glass together with square brick, and by square brick by two optical cement of body to optical cement On plate, it is ground and polishes, until ridge angular accuracy is 1 " within.
7. a kind of processing method of Si meter Te roof prisms according to claim 6, it is characterised in that:In the step 2 Si meter Te roof prisms blank to be processed is navigated to using the positioning tool of Si meter Te roof prisms by the process on body (8) For:First, body (8) will be leaned on to be placed on the substrate (1) by body locating piece one (2) and between body locating piece two (3), and make it Two sides are adjacent to respectively leans on body positioning surface two by body locating piece one (2) by body positioning surface one and by body locating piece two (3); Then, Si meter Te roof prisms are placed on body (8), the prism side positioning of the tight prism side locating piece (4) of face paste to be processed Face, and make the machined surface of Si meter Te roof prisms and lean on body (8) optical cement glued.
8. a kind of processing method of Si meter Te roof prisms according to claim 7, it is characterised in that:The rooms Si meter Te Ridge prism is sent into oven, is heated 8~8.2 hours at a temperature of 92 DEG C~100 DEG C with after body (8) optical cement.
9. a kind of processing method of Si meter Te roof prisms according to claim 6, it is characterised in that:The step 4 In, grinding is divided into rough lapping and smooth grinding, and sand grains diameter is ground 78~82 revs/min of rotating speed in 320~350 mesh when rough lapping, into Give speed 8~10mm/min;Smooth grinding sand grains diameter is ground 63~67 revs/min of rotating speed in 500~520 mesh, and feed speed 6~ 7mm/min;Polishing is divided into rough polishing and fine polishing, when rough polishing, is ground using 400~460 mesh polishing powder circle swings, grinding 55~60 revs/min of rotating speed, and apply 4~5Kg pressure;When finishing polish, using 500~550 mesh polishing powder solution circle swings Grinding is ground 45~50 revs/min of rotating speed, and applies 2~2.5Kg pressure.
10. a kind of processing method of Si meter Te roof prisms according to claim 9, it is characterised in that:When the grinding, Machined surface straightness is controlled within 0.001mm, flatness is within 0.0005mm;When finishing polish, the discontinuity on burnishing surface Pure water is added, and detects the aperture of the machined surface aperture and optical cement plate of Si meter Te roof prisms, when the two aperture is consistent, no item When line difference, stop processing.
CN201810298280.7A 2018-03-30 2018-03-30 Machining method of Stent roof prism and positioning tool thereof Active CN108422286B (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109249296A (en) * 2018-11-06 2019-01-22 西安北方光电科技防务有限公司 Small-bore prism of corner cube optical manufacturing method
CN109623559A (en) * 2018-12-04 2019-04-16 天津津航技术物理研究所 Suitable for laser gyro cavity optical surface processing auxiliary block design method
CN109807696A (en) * 2019-04-08 2019-05-28 苏州大学 A kind of processing method of low centering error meniscus lens
CN111958839A (en) * 2020-08-27 2020-11-20 马鞍山市江南光学有限公司 Complete set of tool for machining ridge prism
CN111958396A (en) * 2020-08-27 2020-11-20 马鞍山市江南光学有限公司 Roof prism processing technology
CN112692679A (en) * 2020-12-31 2021-04-23 昆明云锗高新技术有限公司 High-precision prism bonding device and processing method
CN112720080A (en) * 2020-12-22 2021-04-30 北京航天时代激光导航技术有限责任公司 Special processing method for multiple surface mount devices of triangular laser gyroscope
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CN115847230A (en) * 2022-10-20 2023-03-28 张家港市光学仪器有限公司 Grinding processing method of roof prism

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743508A (en) * 1993-07-27 1995-02-14 Sano Fuji Koki Kk Production of prism assembly
DE102008042271A1 (en) * 2007-12-03 2009-06-04 Carl Zeiss Smt Ag Optical element's e.g. mirror, surface processing method for microlithography, involves radiating fluid in form of fluid beam on surface of optical element which is processed, and moving fluid beam and surface freely in area
CN201552481U (en) * 2009-08-26 2010-08-18 阿石托隆(福建)光学科技有限公司 Positioning assembly device for processing optical prisms
WO2011092748A1 (en) * 2010-01-29 2011-08-04 有限会社コジマエンジニアリング Lens spherical surface grinding method using dish-shaped grindstone
CN202207940U (en) * 2011-07-07 2012-05-02 陈小青 Precision grinding machine used for processing solar prism
CN102794686A (en) * 2012-08-03 2012-11-28 马鞍山市江南光学有限公司 Smit roof prism polishing and machining technology
CN202684693U (en) * 2012-04-17 2013-01-23 马鞍山市江南光学有限公司 Profiling mould for repairing prism upper plate
CN104668988A (en) * 2015-01-09 2015-06-03 南阳市百施特光电有限公司 Tool clamp for machining prism and application method of tool clamp
CN204725165U (en) * 2015-05-19 2015-10-28 江苏普世祥光电技术有限公司 The pyramid right-angle surface clamp for machining of a kind of Φ 10 ~ Φ 30mm
CN204740392U (en) * 2015-06-29 2015-11-04 南阳市英锐光学仪器有限公司 Roof prism waits to process sub -assembly veneer device
CN204735967U (en) * 2015-05-19 2015-11-04 江苏普世祥光电技术有限公司 Big face of 10- phi of phi 30mm pyramid adds clamping apparatus
CN105965325A (en) * 2016-07-21 2016-09-28 马鞍山市江南光学有限公司 Ridge prism cemented component production technology and fixture thereof
CN205799140U (en) * 2016-07-21 2016-12-14 马鞍山市江南光学有限公司 A kind of half pentagonal prism processing tool
CN106249328A (en) * 2016-07-21 2016-12-21 马鞍山市江南光学有限公司 A kind of Abbe roof prism production technology
CN107520781A (en) * 2014-12-31 2017-12-29 马鞍山市江南光学有限公司 The application of the vertical frock in disk control side on a kind of small prism
CN107639497A (en) * 2017-11-06 2018-01-30 扬州霞光光电有限公司 A kind of adjustable fine-grinding and polishing accessory of isosceles roof prism
CN208005361U (en) * 2018-03-30 2018-10-26 马鞍山市江南光学有限公司 A kind of positioning tool of Si meter Te roof prisms

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743508A (en) * 1993-07-27 1995-02-14 Sano Fuji Koki Kk Production of prism assembly
DE102008042271A1 (en) * 2007-12-03 2009-06-04 Carl Zeiss Smt Ag Optical element's e.g. mirror, surface processing method for microlithography, involves radiating fluid in form of fluid beam on surface of optical element which is processed, and moving fluid beam and surface freely in area
CN201552481U (en) * 2009-08-26 2010-08-18 阿石托隆(福建)光学科技有限公司 Positioning assembly device for processing optical prisms
WO2011092748A1 (en) * 2010-01-29 2011-08-04 有限会社コジマエンジニアリング Lens spherical surface grinding method using dish-shaped grindstone
CN202207940U (en) * 2011-07-07 2012-05-02 陈小青 Precision grinding machine used for processing solar prism
CN202684693U (en) * 2012-04-17 2013-01-23 马鞍山市江南光学有限公司 Profiling mould for repairing prism upper plate
CN102794686A (en) * 2012-08-03 2012-11-28 马鞍山市江南光学有限公司 Smit roof prism polishing and machining technology
CN107520781A (en) * 2014-12-31 2017-12-29 马鞍山市江南光学有限公司 The application of the vertical frock in disk control side on a kind of small prism
CN104668988A (en) * 2015-01-09 2015-06-03 南阳市百施特光电有限公司 Tool clamp for machining prism and application method of tool clamp
CN204725165U (en) * 2015-05-19 2015-10-28 江苏普世祥光电技术有限公司 The pyramid right-angle surface clamp for machining of a kind of Φ 10 ~ Φ 30mm
CN204735967U (en) * 2015-05-19 2015-11-04 江苏普世祥光电技术有限公司 Big face of 10- phi of phi 30mm pyramid adds clamping apparatus
CN204740392U (en) * 2015-06-29 2015-11-04 南阳市英锐光学仪器有限公司 Roof prism waits to process sub -assembly veneer device
CN105965325A (en) * 2016-07-21 2016-09-28 马鞍山市江南光学有限公司 Ridge prism cemented component production technology and fixture thereof
CN205799140U (en) * 2016-07-21 2016-12-14 马鞍山市江南光学有限公司 A kind of half pentagonal prism processing tool
CN106249328A (en) * 2016-07-21 2016-12-21 马鞍山市江南光学有限公司 A kind of Abbe roof prism production technology
CN107457619A (en) * 2016-07-21 2017-12-12 马鞍山市江南光学有限公司 Roof prism gluing part production labor fills
CN107639497A (en) * 2017-11-06 2018-01-30 扬州霞光光电有限公司 A kind of adjustable fine-grinding and polishing accessory of isosceles roof prism
CN208005361U (en) * 2018-03-30 2018-10-26 马鞍山市江南光学有限公司 A kind of positioning tool of Si meter Te roof prisms

Cited By (15)

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Publication number Priority date Publication date Assignee Title
CN109249296B (en) * 2018-11-06 2023-06-13 西安北方光电科技防务有限公司 Optical processing method for small-caliber pyramid prism
CN109249296A (en) * 2018-11-06 2019-01-22 西安北方光电科技防务有限公司 Small-bore prism of corner cube optical manufacturing method
CN109623559B (en) * 2018-12-04 2021-08-06 天津津航技术物理研究所 Design method of auxiliary block suitable for laser gyroscope cavity optical surface machining
CN109623559A (en) * 2018-12-04 2019-04-16 天津津航技术物理研究所 Suitable for laser gyro cavity optical surface processing auxiliary block design method
CN109807696B (en) * 2019-04-08 2020-11-03 苏州大学 Method for processing low-eccentricity meniscus lens
CN109807696A (en) * 2019-04-08 2019-05-28 苏州大学 A kind of processing method of low centering error meniscus lens
CN111958396A (en) * 2020-08-27 2020-11-20 马鞍山市江南光学有限公司 Roof prism processing technology
CN111958839A (en) * 2020-08-27 2020-11-20 马鞍山市江南光学有限公司 Complete set of tool for machining ridge prism
CN112720080A (en) * 2020-12-22 2021-04-30 北京航天时代激光导航技术有限责任公司 Special processing method for multiple surface mount devices of triangular laser gyroscope
CN112720080B (en) * 2020-12-22 2022-05-24 北京航天时代激光导航技术有限责任公司 Special processing method for multiple surface mount devices of triangular laser gyroscope
CN112692679A (en) * 2020-12-31 2021-04-23 昆明云锗高新技术有限公司 High-precision prism bonding device and processing method
CN113084682A (en) * 2021-03-22 2021-07-09 北京航天时代激光导航技术有限责任公司 Rapid disc loading device and method for polishing cavity of unconventional laser gyroscope
CN113084682B (en) * 2021-03-22 2022-04-22 北京航天时代激光导航技术有限责任公司 Rapid disc loading device and method for polishing cavity of unconventional laser gyroscope
CN115847230A (en) * 2022-10-20 2023-03-28 张家港市光学仪器有限公司 Grinding processing method of roof prism
CN115847230B (en) * 2022-10-20 2023-11-21 张家港市光学仪器有限公司 Grinding processing method of roof prism

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