CN108417525B - Mask plate, display screen with groove body structure and manufacturing method of display screen - Google Patents
Mask plate, display screen with groove body structure and manufacturing method of display screen Download PDFInfo
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- CN108417525B CN108417525B CN201810189805.3A CN201810189805A CN108417525B CN 108417525 B CN108417525 B CN 108417525B CN 201810189805 A CN201810189805 A CN 201810189805A CN 108417525 B CN108417525 B CN 108417525B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The invention discloses a mask, a display screen with a groove structure and a manufacturing method thereof, wherein the method comprises the following steps: after a substrate is covered with a mask plate, carrying out steaming and plating on an organic material on the substrate; removing the part designed as the slotted area on the substrate base plate to form a display screen with a slot body structure; the layout of the mask corresponding to the slotting region comprises a half-etching region covering the frame of the slotting region and a full-etching region covering the rest part of the slotting region. The invention can reduce the bad color mixing of the display screen caused by the deformation of the mask and is convenient for cleaning the mask at the later stage.
Description
Technical Field
The invention relates to the technical field of display, in particular to a mask, a display screen with a groove body structure and a manufacturing method of the display screen.
Background
With the development of electronic products, especially the rapid development of mobile terminals, full-screen displays have become the mainstream of mobile terminals, and most full-screen devices implement human-computer communication between users and devices in a touch manner. The OLED display is a display made of organic electroluminescent diodes, and has the excellent characteristics of no need of a backlight source, high contrast, thin thickness, wide viewing angle, fast response speed, applicability to flexible panels, wide temperature range, simple structure and process, and the like, because of the self-luminous organic electroluminescent diodes, and is widely applied to the flat panel display technology. An AMOLED (Active-matrix organic light emitting diode) display screen is thinner and lighter due to its integrated touch technology, and is applied to a high-end full-screen smart phone.
When an OLED or AMOLED display screen is produced, a receiver and a camera of the intelligent machine need to be subjected to grooving design, so that a grooving area is removed to form a groove body structure before a product is finally formed, and the receiver or the camera is assembled in a groove. At present, the main design modes of the evaporation mask comprise the following two modes:
one way is to cover the portion of the substrate base plate designed as the notched region with a half-etched mask plate and then to deposit the organic material by a vapor deposition method, as shown in FIG. 1. Because of the shielding of the half-etching mask plate, the grooving area is not washed with the organic material; and then, removing the part designed into the slotted area in the subsequent process to form the display screen of the slot body structure. However, in practical applications, the inventor of the present invention found that, because the size of the usually designed trench area is relatively large, the area of the half-etching mask used for covering the trench area is also relatively large, and when performing the trench deposition of the organic material, the half-etching mask with a relatively large area is more likely to generate adverse effects of metal deformation and metal thermal expansion at a relatively high temperature (about 80 ℃), so that the mask is more likely to generate deformation, and the deposited material is dislocated, thereby finally generating the phenomenon of dislocation and color mixing of the organic light emitting layer.
The other method is that the part of the substrate designed as the slotted area is still covered by a fully etched Mask, then an open Mask (universal metal Mask) is covered on the Mask positioned above the slotted area, and then the substrate is steamed and plated with the machine material; because of the shielding of the open Mask, the slotting area can not be washed with the organic materials; and then, removing the part designed into the slotted area in the subsequent process to form the display screen of the slot body structure. According to the method, a large-area semi-etching mask is not adopted, so that the problem that the mask deforms at high temperature is solved, but two layers of masks need to be covered in the operation process, and the operation is complicated; in addition, after the step of plating by the bowl, since the part is an overlapped region of the FMM and the Open mask, a gap exists, so that the problem that the mask is difficult to clean in a later period is caused.
Disclosure of Invention
In view of the above, the present invention is directed to a mask, a display screen with a slot structure and a manufacturing method thereof, which not only reduce the occurrence of poor color mixing of the display screen caused by the deformation of the mask, but also facilitate the cleaning of the mask at a later stage.
The invention provides a method for manufacturing a display screen with a groove structure, which comprises the following steps:
after a substrate is covered with a mask plate, carrying out steaming and plating on an organic material on the substrate;
removing the part designed as the slotted area on the substrate base plate to form a display screen with a slot body structure;
the layout of the mask corresponding to the slotting region comprises a half-etching region covering the frame of the slotting region and a full-etching region covering the rest part of the slotting region.
Preferably, the removing the portion of the substrate base plate designed as the notch area specifically includes:
and carrying out laser cutting along the frame which is not plated with the organic material by pouring.
The invention also provides a mask used for covering the display screen before the cake deposition of the organic material, wherein the mask corresponding to the layout designed as the slotted area on the display screen comprises:
and the half etching area covers the frame of the slotting area, and the full etching area covers the rest part of the slotting area.
The invention also provides a display screen with a groove body structure, which is manufactured by the mask.
In the technical scheme of the embodiment of the invention, the mask is arranged on the layout corresponding to the slotted zone on the substrate and comprises a half etching zone covering the frame of the slotted zone and a full etching zone covering the rest part of the slotted zone; and the area of the half etching area at the frame is far smaller than that of the half etching mask used for shielding the slotting area in the prior art, when the organic material is subjected to the steaming and plating, the adverse effects of metal deformation and metal thermal expansion generated by the half etching mask are limited, so that the bad color mixing of the display screen caused by the deformation of the mask is reduced. In addition, the Mask provided by the invention is covered on the display screen, and before the cake is plated with the organic material, an Open Mask does not need to be covered, so that the problem that the Mask is difficult to clean in the later period caused by a gap between FMM and Open Mask overlapped areas due to the shielding of the Open Mask is solved.
Drawings
FIG. 1 is a schematic diagram of a mask design method for masking a slotted region with a half-etching mask in the prior art;
FIG. 2 is a schematic diagram of a mask design method for masking the open trench area by a mask combining half etching and full etching according to an embodiment of the present invention;
fig. 3 is a flowchart of a method for manufacturing a display screen with a slot structure according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative only and should not be construed as limiting the invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
It should be noted that all expressions using "first" and "second" in the embodiments of the present invention are used for distinguishing two entities with the same name but different names or different parameters, and it should be noted that "first" and "second" are merely for convenience of description and should not be construed as limitations of the embodiments of the present invention, and they are not described in any more detail in the following embodiments.
The inventor of the invention considers that a mask plate is provided, and on a layout corresponding to a substrate designed as a slotted zone, the mask plate comprises a half etching area covering the frame of the slotted zone and a full etching area covering the rest part of the slotted zone. Because the area of the half-etching area at the frame is far smaller than that of the half-etching mask used for shielding the slotting area in the prior art, when the organic material is subjected to the steaming and plating, the adverse effects of metal deformation and metal thermal expansion generated by the half-etching mask are limited, so that the bad color mixing of the display screen caused by the deformation of the mask is reduced. In addition, the Mask provided by the invention is covered on the display screen, and before the cake is plated with the organic material by steaming, an open Mask does not need to be covered, so that the problem that the Mask is difficult to clean in the later period caused by the shielding of the open Mask is avoided.
The technical solution of the embodiments of the present invention is described in detail below with reference to the accompanying drawings.
The mask used for covering the substrate before the cake deposition of the organic material, as shown in fig. 2, comprises a layout corresponding to a slotted area on the substrate and other layouts.
The layout corresponding to the groove area designed on the substrate base plate comprises: and the half etching area covers the frame of the slotting area, and the full etching area covers the rest part of the slotting area.
Preferably, the apertures of the mask are in the shape of a net, but may also be in the shape of a strip. The mask may specifically be a Fine Metal Mask (FMM).
The half etching area and the full etching area are connected into a whole, that is, the half etching area and the full etching area belong to the same mask and are integrally formed.
In addition, the mask plate also comprises other layout surfaces corresponding to other parts of the substrate except the layout surface corresponding to the grooving area, and the other layout surfaces can be fully etched layout surfaces, namely, the holes of the other layout surfaces are in a fully etched state and are completely through holes so as to be convenient for steaming and plating organic materials on other parts of the substrate.
The holes in the half-etching area covering the frame of the grooved area are in a half-etching state, that is, the holes are not through holes. When the organic material is subjected to steaming and plating, the organic material cannot reach the frame of the substrate base plate designed as the slotted area through the semi-etching-state pores; therefore, the substrate base plate is designed to be a frame of the grooving area, and the organic material cannot be washed away.
In the layout corresponding to the slotting region, the rest part covering the slotting region is a full etching region; that is, it is the fully etched area that covers the inside of the grooved area. Namely, the pores in the fully-etched area covering the rest part of the grooved area are in a fully-etched state and are completely through pores. When the organic material is subjected to steaming and plating, the organic material can reach the inner part of the substrate designed as the slotted area through the pores in the full etching state; so that the interior of the substrate base plate designed as the grooved region can be wet-plated with the organic material.
Through the mask, the display screen with the groove body structure can be manufactured. Specifically, the process of the manufacturing method of the display screen with the slot structure, as shown in fig. 3, includes the following steps:
s301: and covering a mask plate on the substrate base plate.
Specifically, the mask provided by the embodiment of the invention is covered on the substrate base plate. The mask plate corresponding to the layout designed as the slotting region on the substrate comprises: and the half etching area covers the frame of the slotting area, and the full etching area covers the rest part of the slotting area. That is, the pores in the half-etching area covering the frame of the grooved area are in a half-etching state, that is, the pores are not through pores; and the pores in the fully-etched area covering the rest part of the grooved area are in a fully-etched state and are completely through pores.
In addition, the mask plate can be a fully etched plate corresponding to the plate of the other part of the substrate base plate. That is, the holes in the layout of the mask corresponding to the other parts of the substrate are in a full-etching state and are completely through holes.
S302: and (4) carrying out cake plating of the organic material on the substrate base plate.
In this step, the substrate covered with the mask plate is subjected to cake deposition of the organic material. After the step of steaming and plating, because the pores in the half-etching area covering the frame of the slotting area are in a half-etching state, that is, the pores are not through pores, when the step of steaming and plating the organic material is carried out, the organic material cannot reach the frame of the substrate base plate designed as the slotting area through the pores in the half-etching state; and finally, non-steaming and plating the organic materials at the frame designed as the grooving area in the obtained display screen.
The pores in the fully-etched area covering the rest part of the slotted area are in a fully-etched state and are completely through pores; therefore, when the organic material is subjected to cake-and-cake plating, the organic material can reach the inner part of the substrate designed as the slotted zone through the pores in the full etching state; so that the interior of the substrate base plate designed as the grooved region can be wet-plated with the organic material.
In addition, the layout of the mask corresponding to the other part of the substrate is a fully etched layout, i.e. the pores in the layout of the mask corresponding to the other part of the substrate are in a fully etched state and are completely through pores; therefore, when the organic material is subjected to the dry etching plating, the organic material can cover other parts of the substrate through the pores in the full etching state, so that the other parts of the substrate can be subjected to the dry etching plating with the organic material.
S303: and removing the part designed as the slotted area on the substrate base plate to form the display screen with the slot body structure.
Specifically, because the organic material is not steamed and plated at the frame designed as the grooved area, laser cutting can be carried out along the frame which is not steamed and plated with the organic material, and the display screen with the groove structure is formed. Because the organic materials are not steamed and plated at the cutting position, the organic materials steamed and plated at the part of the display screen connected with the slotting area can be well protected and cannot be damaged.
In the technical scheme of the embodiment of the invention, the mask is arranged on the layout corresponding to the slotted zone on the substrate and comprises a half etching zone covering the frame of the slotted zone and a full etching zone covering the rest part of the slotted zone; and the area of the half etching area at the frame is far smaller than that of the half etching mask used for shielding the slotting area in the prior art, when the organic material is subjected to the steaming and plating, the adverse effects of metal deformation and metal thermal expansion generated by the half etching mask are limited, so that the bad color mixing of the display screen caused by the deformation of the mask is reduced. In addition, the Mask provided by the invention is covered on the display screen, and before the cake is plated with the organic material, an Open Mask does not need to be covered, so that the problem that the Mask is difficult to clean in the later period caused by a gap between FMM and Open Mask overlapped areas due to the shielding of the Open Mask is solved.
Those of skill in the art will appreciate that various operations, methods, steps in the processes, acts, or solutions discussed in the present application may be alternated, modified, combined, or deleted. Further, various operations, methods, steps in the flows, which have been discussed in the present application, may be interchanged, modified, rearranged, decomposed, combined, or eliminated. Further, steps, measures, schemes in the various operations, methods, procedures disclosed in the prior art and the present invention can also be alternated, changed, rearranged, decomposed, combined, or deleted.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to these examples; within the idea of the invention, also features in the above embodiments or in different embodiments may be combined, steps may be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity. Therefore, any omissions, modifications, substitutions, improvements and the like that may be made without departing from the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. A manufacturing method of a display screen with a groove structure is characterized by comprising the following steps:
after a substrate is covered with a mask plate, carrying out steaming and plating on an organic material on the substrate;
removing the part designed as the slotted area on the substrate base plate to form a display screen with a slot body structure;
the layout of the mask corresponding to the slotting region comprises a half-etching region covering the frame of the slotting region and a full-etching region covering the rest part of the slotting region.
2. The method according to claim 1, wherein the removing of the portion of the substrate base plate designed as the notched area comprises:
and carrying out laser cutting along the frame which is not plated with the organic material by pouring.
3. The method of claim 1, wherein the apertures of the reticle are in the shape of a mesh or a stripe.
4. A method according to any one of claims 1 to 3, wherein the half-etch area and the full-etch area are connected in one piece.
5. The utility model provides a mask version for cover the display screen before organic material is sent out and is plated in order to form and have the cell body structure the display screen, its characterized in that, the cell body structure is located earphone and camera and is in place region on the display screen, the mask version includes for the space of a whole page in fluting district corresponding to the design on the substrate base plate:
covering a half etching area at the frame of the slotting region and a full etching area covering the rest part of the slotting region;
wherein, the slotted zone corresponds to the slot structure.
6. The mask according to claim 5, wherein the apertures of the mask are in the shape of a net or a strip.
7. The mask according to claim 5, wherein the mask is a fine metal mask.
8. The reticle of claim 5, wherein the half-etch region and the full-etch region are integrally connected.
9. The mask according to claim 5, wherein the other printing plates except the printing plate corresponding to the grooving area are full-etched printing plates.
10. A display screen with a slot structure, which is manufactured by the mask as claimed in any one of claims 5 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810189805.3A CN108417525B (en) | 2018-03-08 | 2018-03-08 | Mask plate, display screen with groove body structure and manufacturing method of display screen |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810189805.3A CN108417525B (en) | 2018-03-08 | 2018-03-08 | Mask plate, display screen with groove body structure and manufacturing method of display screen |
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| Publication Number | Publication Date |
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| CN108417525A CN108417525A (en) | 2018-08-17 |
| CN108417525B true CN108417525B (en) | 2021-10-29 |
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| CN201810189805.3A Active CN108417525B (en) | 2018-03-08 | 2018-03-08 | Mask plate, display screen with groove body structure and manufacturing method of display screen |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306450B (en) * | 2018-11-28 | 2020-04-28 | 武汉华星光电半导体显示技术有限公司 | Mask plate set for vapor deposition |
| CN113481468A (en) * | 2021-06-29 | 2021-10-08 | 京东方科技集团股份有限公司 | Mask plate |
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| CN104762590A (en) * | 2015-03-20 | 2015-07-08 | 京东方科技集团股份有限公司 | Vapor-plating masking plate |
| CN105839052A (en) * | 2016-06-17 | 2016-08-10 | 京东方科技集团股份有限公司 | Mask board and assembling method of mask board |
| CN106086785A (en) * | 2016-07-29 | 2016-11-09 | 京东方科技集团股份有限公司 | Mask plate and preparation method thereof, mask assembly |
| CN205954096U (en) * | 2016-08-19 | 2017-02-15 | 信利半导体有限公司 | Mask plate and OLED that OLED coating by vaporization was used |
| CN107435131A (en) * | 2017-09-29 | 2017-12-05 | 上海天马微电子有限公司 | Mask device, evaporation equipment and mask device preparation method |
| US9847484B2 (en) * | 2015-05-19 | 2017-12-19 | Samsung Display Co., Ltd. | Mask and method of manufacturing display device by using the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107770309A (en) * | 2017-10-18 | 2018-03-06 | 苏州大学 | Application of near-infrared light-emitting pixels in O L ED screen mobile terminal structure |
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2018
- 2018-03-08 CN CN201810189805.3A patent/CN108417525B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104762590A (en) * | 2015-03-20 | 2015-07-08 | 京东方科技集团股份有限公司 | Vapor-plating masking plate |
| US9847484B2 (en) * | 2015-05-19 | 2017-12-19 | Samsung Display Co., Ltd. | Mask and method of manufacturing display device by using the same |
| CN105839052A (en) * | 2016-06-17 | 2016-08-10 | 京东方科技集团股份有限公司 | Mask board and assembling method of mask board |
| CN106086785A (en) * | 2016-07-29 | 2016-11-09 | 京东方科技集团股份有限公司 | Mask plate and preparation method thereof, mask assembly |
| CN205954096U (en) * | 2016-08-19 | 2017-02-15 | 信利半导体有限公司 | Mask plate and OLED that OLED coating by vaporization was used |
| CN107435131A (en) * | 2017-09-29 | 2017-12-05 | 上海天马微电子有限公司 | Mask device, evaporation equipment and mask device preparation method |
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| CN108417525A (en) | 2018-08-17 |
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