CN108417525A - A kind of mask plate and the display screen with trough body structure and its manufacturing method - Google Patents
A kind of mask plate and the display screen with trough body structure and its manufacturing method Download PDFInfo
- Publication number
- CN108417525A CN108417525A CN201810189805.3A CN201810189805A CN108417525A CN 108417525 A CN108417525 A CN 108417525A CN 201810189805 A CN201810189805 A CN 201810189805A CN 108417525 A CN108417525 A CN 108417525A
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- Prior art keywords
- mask plate
- slotted zones
- display screen
- underlay substrate
- covering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Abstract
The invention discloses a kind of mask plate and the display screen with trough body structure and its manufacturing method, the method includes：After covering mask plate on underlay substrate, the Bamboo that organic material is carried out to the underlay substrate is plated；It will be designed as the part removal of slotted zones on the underlay substrate, forms the display screen with trough body structure；Wherein, the space of a whole page that the mask plate corresponds to the slotted zones includes the full etching region of the half-etched areas and the covering slotted zones rest part at the covering slotted zones frame.The bad generation of colour mixture of the display screen caused by mask plate deformation can be not only reduced using the present invention, but also mask plate was cleaned convenient for the later stage.
Description
Technical field
The present invention relates to display technology field, particularly relate to a kind of mask plate and display screen with trough body structure and its
Manufacturing method.
Background technology
With the rapid development of the development of electronic product, especially mobile terminal, the display of full screen has become movement
The mainstream of terminal, most full frame equipment realize the man-machine communication between user and equipment using touch manner.OLED is shown
Screen is to utilize display screen made of organic electroluminescent LED, due to being provided simultaneously with self-luminous organic electric exciting light-emitting diode,
Be not required to backlight, contrast are high, thickness is thin, visual angle is wide, reaction speed is fast, can be used for flexibility panel, use temperature range extensively,
The excellent characteristics such as construction and processing procedure are simpler, are widely used in flat-panel screens technology.And AMOLED (Active-
Matrix organic light emitting diode, active matrix organic light-emitting diode) display screen is because of its integrated touch
Technology is allowed to more frivolous, is applied on high-end, the intelligent type of full screen.
When producing OLED or AMOLED display screens, channel design need to be carried out to the receiver and camera of intelligent machine, so as to
Slotted zones are removed to form trough body structure before ultimately forming product, to assemble receiver or camera in slot.It is main at present
It includes the following two kinds that mask plate design method, which is deposited,：
A kind of mode is that the part mask plate coverings etched partially of slotted zones, Ran Hou Bamboo platings will be designed as on underlay substrate
Organic material, as shown in Figure 1.Due to etching partially blocking for mask plate, Bu Hui Bamboo are plated organic material by slotted zones；Later, exist
The part for being designed as slotted zones is removed to the display screen to form trough body structure in subsequent technique.However, this hair in practical applications
Bright inventor has found, since the slotted zones size being commonly designed is bigger, it is respectively used for half quarter of covering slotted zones
The area for losing mask plate also can be bigger, when carrying out You Ji Cai Liao Bamboo platings, (80 DEG C or so) larger area at relatively high temperatures
The adverse effect for etching partially mask plate and being more prone to Metal Deformation and thermal expansion metal, cause mask plate to be more also easy to produce shape
Become, the dislocation of evaporation material, to finally generate organic luminous layer dislocation mixed color phenomenon.
Another way is then still to use the mask plate of full etching to cover the part for being designed as slotted zones on underlay substrate, so
It covers one layer of open Mask (universal metal mask plate) again on the mask plate above slotted zones afterwards, then is coated with into row Bamboo
Machine material；Due to blocking for open Mask, slotted zones Bu Hui Bamboo plate organic material；Later, it will be designed as in the subsequent process
The part of slotted zones removes the display screen to form trough body structure.Method herein, due to not etching partially mask plate using large area,
Deformation is led to the problem of at high temperature so as to avoid mask plate, but needs to cover two layers of mask plate, operation in operating process
It is cumbersome；In addition, after Bamboo platings, because part is the overlay regions FMM and Open mask thus, there are gaps, clear so as to cause the later stage
Wash the problem of mask plate is not easy.
Invention content
In view of this, it is an object of the invention to propose a kind of mask plate and the display screen with trough body structure and its system
Method is made, has not only reduced the bad generation of colour mixture of the display screen caused by mask plate deformation, but also carried out clearly to mask plate convenient for the later stage
It washes.
A kind of manufacturing method of the display screen with trough body structure is provided based on the above-mentioned purpose present invention, including：
After covering mask plate on underlay substrate, the Bamboo that organic material is carried out to the underlay substrate is plated；
It will be designed as the part removal of slotted zones on the underlay substrate, forms the display screen with trough body structure；
Wherein, the space of a whole page that the mask plate corresponds to the slotted zones includes etching partially at the covering slotted zones frame
Region and the full etching region for covering the slotted zones rest part.
Preferably, described remove the part for being designed as slotted zones on the underlay substrate, specifically include：
It is cut by laser along the frame of non-Bamboo plating organic materials.
The present invention also provides a kind of mask plates, for covering display screen before You Ji Cai Liao Bamboo platings, wherein the mask plate
Include corresponding to the space of a whole page for being designed as slotted zones on the display screen：
It covers the half-etched areas at the slotted zones frame and covers the full etching region of the slotted zones rest part.
The present invention also provides a kind of display screens with trough body structure, for what is be made by above-mentioned mask plate.
In the technical solution of the embodiment of the present invention, since mask plate is designed as the version of slotted zones on corresponding to underlay substrate
The full etching area of half-etched areas and the covering slotted zones rest part on face, including at the covering slotted zones frame
Domain；And the half-etched areas area at frame is much smaller than the mask plate that etches partially used in the prior art for blocking slotted zones,
When carrying out You Ji Cai Liao Bamboo platings, the adverse effect for etching partially Metal Deformation and thermal expansion metal caused by mask plate is limited,
To reduce the bad generation of colour mixture of the display screen caused by mask plate deformation.In addition, the covering present invention provides on a display screen
Mask plate, and Bamboo plate organic material before, no longer need to covering one layer of open Mask, also avoid because open Mask's
Block, cause the later stage caused by the gap of the overlay regions FMM and Open mask not easy cleaning mask plate the problem of.
Description of the drawings
Fig. 1 is the prior art to etch partially the mask plate design method schematic diagram that mask plate blocks slotted zones；
Fig. 2 is blocking the mask plates of slotted zones to etch partially the mask plate being combined with full etching and setting for the embodiment of the present invention
Count schematic diagram；
Fig. 3 is a kind of manufacturing method flow chart of display screen with trough body structure of the embodiment of the present invention.
Specific implementation mode
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and is only used for explaining the present invention, and is not construed as limiting the claims.
Those skilled in the art of the present technique are appreciated that unless expressly stated, singulative " one " used herein, " one
It is a ", " described " and "the" may also comprise plural form.Wording "and/or" used herein includes one or more associated
List items whole or any cell and all combine.
It should be noted that all statements for using " first " and " second " are for differentiation two in the embodiment of the present invention
The non-equal entity of a same names or non-equal parameter, it is seen that " first " " second " only for the convenience of statement, does not answer
It is interpreted as the restriction to the embodiment of the present invention, subsequent embodiment no longer illustrates this one by one.
The present inventor is designed as the version of slotted zones in view of providing a kind of mask plate on corresponding to underlay substrate
The full etching area of half-etched areas and the covering slotted zones rest part on face, including at the covering slotted zones frame
Domain.Due to the half-etched areas area at frame much smaller than it is used in the prior art block slotted zones etch partially mask
Version, when carrying out You Ji Cai Liao Bamboo platings, the adverse effect for etching partially Metal Deformation and thermal expansion metal caused by mask plate has
Limit, to reduce the bad generation of colour mixture of the display screen caused by mask plate deformation.In addition, the covering present invention carries on a display screen
The mask plate of confession, and before Bamboo plates organic material, no longer need to one layer of open Mask of covering, also avoid because of open Mask
Block caused by the later stage not easy cleaning mask plate the problem of.
The technical solution for embodiment that the invention will now be described in detail with reference to the accompanying drawings.
The mask plate of covering underlay substrate, such as Fig. 2 before a kind of Bamboo platings for You Ji Cai Liao provided in an embodiment of the present invention
It is shown, include corresponding to the space of a whole page and other spaces of a whole page for being designed as slotted zones on the underlay substrate.
The space of a whole page that slotted zones are designed as on corresponding to the underlay substrate includes：It covers at the slotted zones frame
Half-etched areas and the full etching region for covering the slotted zones rest part.
Preferably, the hole of mask plate can be netted, it is of course also possible to be strip.Mask plate can be specifically
Fine metal mask (FMM).
Above-mentioned half-etched areas and full etching region is connected in one, that is to say, that above-mentioned half-etched areas
Belong to same mask plate with full etching region, is one of the forming.
In addition, above-mentioned mask plate is in addition to the space of a whole page corresponding to the slotted zones, further include the other portions of corresponding substrate substrate
The other spaces of a whole page divided, other spaces of a whole page can be the space of a whole page of full etching, i.e., the hole of described other spaces of a whole page is full etching state,
For full through hole, so that in the Qi of underlay substrate, its Fen Bamboo plates organic material.
Wherein, it is to etch partially state to cover the hole in the half-etched areas at the slotted zones frame, that is to say, that this
Some holes gap is not penetrating hole.When carrying out You Ji Cai Liao Bamboo platings, organic material can not be arrived by etching partially the hole of state
It is designed as at the frame of slotted zones up to underlay substrate；To underlay substrate be designed as Bu Hui Bamboo at the frame of slotted zones plate it is organic
Material.
It is full etching region corresponding to the slotted zones rest part in the space of a whole page of the slotted zones, is covered；That is,
It is full etching region to cover inside the slotted zones.Cover the hole in the full etching region of the slotted zones rest part
For full etching state, for full through hole.When carrying out You Ji Cai Liao Bamboo platings, organic material can pass through full etching state
Hole reach underlay substrate and be designed as the inside of slotted zones；To which the inside Ke Yi Bamboo that underlay substrate is designed as slotted zones are plated
Organic material.
By above-mentioned mask plate, the display screen with trough body structure of the embodiment of the present invention can be made.Specifically, have
There is the flow of the manufacturing method of the display screen of trough body structure, as shown in figure 3, including the following steps：
S301：Mask plate is covered on underlay substrate.
Specifically, above-mentioned mask plate provided in an embodiment of the present invention is covered on underlay substrate.The mask plate corresponds to institute
It states and is designed as the spaces of a whole page of slotted zones on underlay substrate and includes：Cover the half-etched areas at the slotted zones frame and covering institute
State the full etching region of slotted zones rest part.That is, the hole in the half-etched areas at the covering slotted zones frame is half
Etching state, that is to say, that these holes are not penetrating hole；In the full etching region for covering the slotted zones rest part
Hole be full etching state, for full through hole.
In addition, the space of a whole page of the mask plate corresponding substrate substrate other parts, can be the space of a whole page of full etching.That is, mask plate
Hole in the space of a whole page of corresponding substrate substrate other parts is full etching state, for full through hole.
S302：Organic material Bamboo platings are carried out to the underlay substrate.
In this step, the underlay substrate to being covered with mask plate carries out organic material Bamboo platings.After Bamboo platings, due to covering
The hole in half-etched areas at the slotted zones frame is to etch partially state, that is to say, that these holes are not penetrating
Hole, therefore, when carrying out You Ji Cai Liao Bamboo platings, organic material can not be set by etching partially the hole arrival underlay substrate of state
It is calculated as at the frame of slotted zones；It is described to be designed as non-Bamboo platings organic material at the frame of slotted zones in the display screen obtained from.
The hole in full etching region due to covering the slotted zones rest part is full etching state, for full through
Hole；Therefore, when carrying out You Ji Cai Liao Bamboo platings, organic material can reach underlay substrate by the hole of full etching state
It is designed as the inside of slotted zones；To which the inside Ke Yi Bamboo that underlay substrate is designed as slotted zones plate organic material.
In addition, the space of a whole page of the mask plate corresponding substrate substrate other parts is the space of a whole page of full etching, i.e., mask plate corresponds to lining
Hole in the space of a whole page of substrate other parts is full etching state, for full through hole；Therefore, organic material is being carried out
When Bamboo is plated, organic material can cover underlay substrate other parts by the hole of full etching state so that underlay substrate is other
Part Ke Yi Bamboo plate organic material.
S303：It will be designed as the part removal of slotted zones on the underlay substrate, forms the display screen with trough body structure.
Specifically, organic material is plated due to being designed as non-Bamboo at the frame of slotted zones, organic material can be plated along non-Bamboo
It is cut by laser at the frame of material, forms the display screen with trough body structure.Since the non-Bamboo in cut place plates organic material, because
This, can protect the organic material of the Bu Fen Suo Bamboo platings to connect with slotted zones in display screen well, without causing harm.
In the technical solution of the embodiment of the present invention, since mask plate is designed as the version of slotted zones on corresponding to underlay substrate
The full etching area of half-etched areas and the covering slotted zones rest part on face, including at the covering slotted zones frame
Domain；And the half-etched areas area at frame is much smaller than the mask plate that etches partially used in the prior art for blocking slotted zones,
When carrying out You Ji Cai Liao Bamboo platings, the adverse effect for etching partially Metal Deformation and thermal expansion metal caused by mask plate is limited,
To reduce the bad generation of colour mixture of the display screen caused by mask plate deformation.In addition, the covering present invention provides on a display screen
Mask plate, and Bamboo plate organic material before, no longer need to covering one layer of open Mask, also avoid because open Mask's
Block, cause the later stage caused by the gap of the overlay regions FMM and Open mask not easy cleaning mask plate the problem of.
Those skilled in the art of the present technique are appreciated that in the various operations crossed by discussion in the present invention, method, flow
Steps, measures, and schemes can be replaced, changed, combined or be deleted.Further, each with having been crossed by discussion in the present invention
Other steps, measures, and schemes in kind operation, method, flow may also be alternated, changed, rearranged, decomposed, combined or deleted.
Further, in the prior art to have and step, measure, the scheme in various operations, method, flow disclosed in the present invention
It may also be alternated, changed, rearranged, decomposed, combined or deleted.
Those of ordinary skills in the art should understand that：The discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under the thinking of the present invention, above example
Or can also be combined between the technical characteristic in different embodiments, step can be realized with random order, and be existed such as
Many other variations of the different aspect of the upper present invention, for simplicity, they are not provided in details.Therefore, it is all
Within the spirit and principles in the present invention, any omission, modification, equivalent replacement, improvement for being made etc. should be included in the present invention's
Within protection domain.
Claims (10)
1. a kind of manufacturing method of the display screen with trough body structure, which is characterized in that including：
After covering mask plate on underlay substrate, the Bamboo that organic material is carried out to the underlay substrate is plated；
It will be designed as the part removal of slotted zones on the underlay substrate, forms the display screen with trough body structure；
Wherein, the space of a whole page that the mask plate corresponds to the slotted zones includes the half-etched areas at the covering slotted zones frame
With the full etching region for covering the slotted zones rest part.
2. according to the method described in claim 1, it is characterized in that, the portion that slotted zones will be designed as on the underlay substrate
Divide removal, specifically includes：
It is cut by laser along the frame of non-Bamboo plating organic materials.
3. according to the method described in claim 1, it is characterized in that, the hole of the mask plate is netted or strip.
4. according to any methods of claim 1-3, which is characterized in that the half-etched areas and full etching region are to connect
It is connected to integrated.
5. a kind of mask plate, for covering display screen before You Ji Cai Liao Bamboo platings, which is characterized in that the mask plate corresponds to institute
It states and is designed as the spaces of a whole page of slotted zones on underlay substrate and includes：
It covers the half-etched areas at the slotted zones frame and covers the full etching region of the slotted zones rest part.
6. mask plate according to claim 5, which is characterized in that the hole of the mask plate is netted or strip.
7. mask plate according to claim 5, which is characterized in that the mask plate is specially fine metal mask.
8. mask plate according to claim 5, which is characterized in that the half-etched areas and full etching region are to be connected to
One.
9. mask plate according to claim 5, which is characterized in that in addition to corresponding to the slotted zones in the mask plate
The space of a whole page, other spaces of a whole page are the space of a whole page of full etching.
10. a kind of display screen with trough body structure, which is characterized in that pass through the mask as described in claim 5-9 is any
What version was made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810189805.3A CN108417525B (en) | 2018-03-08 | 2018-03-08 | Mask plate, display screen with groove body structure and manufacturing method of display screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810189805.3A CN108417525B (en) | 2018-03-08 | 2018-03-08 | Mask plate, display screen with groove body structure and manufacturing method of display screen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108417525A true CN108417525A (en) | 2018-08-17 |
| CN108417525B CN108417525B (en) | 2021-10-29 |
Family
ID=63130387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810189805.3A Active CN108417525B (en) | 2018-03-08 | 2018-03-08 | Mask plate, display screen with groove body structure and manufacturing method of display screen |
Country Status (1)
| Country | Link |
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| CN (1) | CN108417525B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020107741A1 (en) * | 2018-11-28 | 2020-06-04 | 武汉华星光电半导体显示技术有限公司 | Mask plate assembly for evaporation deposition |
| CN113481468A (en) * | 2021-06-29 | 2021-10-08 | 京东方科技集团股份有限公司 | Mask plate |
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| US9847484B2 (en) * | 2015-05-19 | 2017-12-19 | Samsung Display Co., Ltd. | Mask and method of manufacturing display device by using the same |
| CN107770309A (en) * | 2017-10-18 | 2018-03-06 | 苏州大学 | Application of the near-infrared luminous pixel in OLED screen curtain mobile terminal structure |
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| CN104762590A (en) * | 2015-03-20 | 2015-07-08 | 京东方科技集团股份有限公司 | Vapor-plating masking plate |
| US9847484B2 (en) * | 2015-05-19 | 2017-12-19 | Samsung Display Co., Ltd. | Mask and method of manufacturing display device by using the same |
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| WO2020107741A1 (en) * | 2018-11-28 | 2020-06-04 | 武汉华星光电半导体显示技术有限公司 | Mask plate assembly for evaporation deposition |
| CN113481468A (en) * | 2021-06-29 | 2021-10-08 | 京东方科技集团股份有限公司 | Mask plate |
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| Publication number | Publication date |
|---|---|
| CN108417525B (en) | 2021-10-29 |
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