CN108398101A - A kind of measurement method and system of workpiece topography - Google Patents
A kind of measurement method and system of workpiece topography Download PDFInfo
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- CN108398101A CN108398101A CN201710069138.0A CN201710069138A CN108398101A CN 108398101 A CN108398101 A CN 108398101A CN 201710069138 A CN201710069138 A CN 201710069138A CN 108398101 A CN108398101 A CN 108398101A
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- 238000012876 topography Methods 0.000 title claims abstract description 52
- 238000000691 measurement method Methods 0.000 title claims abstract description 12
- 238000005259 measurement Methods 0.000 claims abstract description 273
- 238000000034 method Methods 0.000 claims abstract description 25
- 238000013519 translation Methods 0.000 claims description 50
- 238000009826 distribution Methods 0.000 claims description 48
- 238000003384 imaging method Methods 0.000 claims description 39
- 238000012545 processing Methods 0.000 claims description 21
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- 238000001514 detection method Methods 0.000 claims description 11
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- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/46—Indirect determination of position data
- G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
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- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of measurement method of workpiece topography and system, this method includes：The surface of workpiece for measurement is scanned using laser range finder, measures the range data of each point and reference position on the surface of workpiece for measurement；According to the range data of each point and reference position on the surface of the workpiece for measurement, the surface topography of workpiece for measurement is reconstructed.This programme is by the measurement of the range information for each point being refined as the measurement of the surface topography of workpiece for measurement on the surface for workpiece for measurement, it solves the problems, such as integrally to measure workpiece for measurement difficulty big, and the laser range finder of the measurement for carrying out range information has the characteristics that high certainty of measurement, helps to obtain the measurement result of accurate workpiece surface appearance.
Description
Technical field
The present invention relates to technical field of high-precision measurement more particularly to the measurement methods and system of a kind of workpiece topography.
Background technology
In the prior art, usually realize that the measurement of workpiece topography, projection imaging are also known as using the technology of projection imaging
Sciagraphy, sciagraphy be can only to prolong straightline propagation this principle by light, and that designs is imaged object external outline
The imaging precision of measurement method, simple sciagraphy (not using any numerical value processing procedure) theoretically comes at 11 μm or more
It says, sciagraphy cannot achieve 11 μm of imagings below.That is, cannot achieve the workpiece to stock size based on the prior art
Surface topography measurement, cannot be satisfied the detection measurement demand for workpiece topography in existing industrial production.
Invention content
In view of the above problems, the present invention provides a kind of measurement method of workpiece topography and systems, to solve the above problems
Or it solves the above problems at least partly.
One side according to the present invention provides a kind of measurement method of workpiece topography, including：
The surface of workpiece for measurement is scanned using laser range finder, measures each point and benchmark on the surface of workpiece for measurement
The range data of position；
According to the range data of each point and reference position on the surface of workpiece for measurement, the surface shape of workpiece for measurement is reconstructed
Looks.
Optionally, the surface of workpiece for measurement is scanned using laser range finder, is measured each on the surface of workpiece for measurement
Point and the range data of reference position include：
Laser range finder is installed on motion platform, laser is realized by the rotation and/or translation of controlled motion platform
Rangefinder is scanned the surface of workpiece for measurement, obtains the laser of each point and laser range finder on the surface of workpiece for measurement and exports
The distance between plane data；
According on the surface of workpiece for measurement each the distance between point and laser output plane of laser range finder data, with
And the position relationship of the motion platform and reference position where laser range finder, obtain the point and the base on the surface of workpiece for measurement
The range data that level is set.
Optionally, point and the range data of reference position include each of on the surface of workpiece for measurement：The number of coordinates of the point
According to this and the distance between the point and reference position；
Then according to the range data of each point and reference position on the surface of workpiece for measurement, the surface shape of workpiece for measurement is reconstructed
Looks include：According to the coordinate data of each point on the surface of workpiece for measurement and accordingly the distance between with reference position, obtain
Relative depth between difference；According to the coordinate data and relative depth of each point on the surface of workpiece for measurement, reconstructs and wait for
Survey the distribution of each point and corresponding relative depth, the surface topography as workpiece for measurement on the surface of workpiece.
Optionally, when laser range finder is multiple, laser range finder is installed on motion platform, controlled motion is passed through
The rotation of platform and/or translation realize laser range finder to the surface of workpiece for measurement be scanned including：
Multiple laser range finders are respectively arranged on different motion platforms, by the rotation for controlling each motion platform
And/or translation realizes that multiple laser range finders are carried out at the same time scanning to the different surfaces of workpiece for measurement respectively.
Optionally, before being scanned to the surface of workpiece for measurement using laser range finder, this method further comprises：
Imaging detection is carried out to the surface of workpiece for measurement using imaging sensor, obtains the X-Y scheme on the surface of workpiece for measurement
Picture；
According to the two dimensional image on the surface of workpiece for measurement, the corresponding scanning logic in surface of workpiece for measurement is obtained；
Then using laser range finder to the surface of workpiece for measurement be scanned including：It is corresponding according to the surface of workpiece for measurement
Scanning logic controls the rotation and/or translation of the motion platform where laser range finder, realizes laser range finder to workpiece for measurement
Surface scanning.
Optionally, workpiece for measurement is electric connector, and the surface of workpiece for measurement is the connecting end surface of electric connector；
According to the two dimensional image on the surface of the workpiece for measurement, the corresponding scanning logic packet in surface of workpiece for measurement is obtained
It includes：
According to the two dimensional image of the connecting end surface of electric connector, distribution, the connecting end surface of the connecting end surface are calculated
In stitch or pin hole region distribution and stitch in the connecting end surface or pin hole region in point of stitch or pin hole
Cloth size and distribution density；
According to the distribution of stitch or pin hole region in the distribution of the connecting end surface and the connecting end surface,
Determine the scanning range and/or scanning accuracy of the peripheral region of the connecting end surface；
According to the distribution of stitch or pin hole region in the connecting end surface and and the connecting end surface in stitch
Or in pin hole region stitch or pin hole distributed dimension and distribution density, determine stitch in the connecting end surface or pin hole region
Scanning range and/or scanning accuracy.
Other side according to the present invention provides a kind of measuring system of workpiece topography, including：Pedestal, at data
Manage device and at least one laser range finder；
Articles holding table is provided on pedestal, articles holding table is for placing workpiece for measurement；
Laser range finder is measured for being scanned to the surface of the workpiece for measurement on articles holding table on the surface of workpiece for measurement
The range data of each point and reference position is simultaneously sent to data processing equipment；
Data processing equipment is for handling the range data of each point and reference position on the surface of workpiece for measurement, weight
Structure goes out the surface topography of workpiece for measurement.
Optionally, at least one motion platform is additionally provided on pedestal；Each motion platform includes turntable and translation stage；
Each laser range finder is installed on a motion platform；
Laser range finder can by the rotation of motion platform and/or translation to the surface of the workpiece for measurement on articles holding table into
Row scanning, obtains the distance between laser output plane of each point and laser range finder Data Concurrent on the surface of workpiece for measurement and send
To data processing equipment；
Data processing equipment is used for according to the laser output plane each put on the surface of workpiece for measurement with laser range finder
The distance between data and motion platform and reference position where laser range finder position relationship, obtain workpiece for measurement
Surface on the point and reference position range data.
Optionally, point and the range data of reference position include each of on the surface of workpiece for measurement：The number of coordinates of the point
According to this and the distance between the point and reference position；
Data processing equipment be used for according to the coordinate data of each point on the surface of workpiece for measurement and accordingly with benchmark position
The distance between set, obtain the relative depth between difference；According to the coordinate data of each point on the surface of workpiece for measurement and
Relative depth reconstructs the distribution of each point and corresponding relative depth, the table as workpiece for measurement on the surface of workpiece for measurement
Face pattern.
Optionally, when the system includes multiple laser range finders,
Multiple laser range finders are separately mounted on different motion platforms, and each laser range finder can be flat by each movement
The rotation and/or translation of platform are carried out at the same time scanning to the different surfaces of the workpiece for measurement on articles holding table.
Optionally, which further comprises：Imaging sensor and image processor；
Imaging sensor is used for before laser range finder is scanned the surface of workpiece for measurement, to the table of workpiece for measurement
Face carries out imaging detection, obtains the two dimensional image on the surface of workpiece for measurement and is sent to image processor；
Image processor is used for the two dimensional image on the surface according to the workpiece for measurement, and the surface for obtaining workpiece for measurement corresponds to
Scanning logic and the motion platform that is sent to where laser range finder；
Motion platform is rotated and/or is translatable according to the scanning logic received.
Optionally, workpiece for measurement is electric connector, and the surface of workpiece for measurement is the connecting end surface of electric connector；
Imaging sensor can carry out imaging detection to the surface of electric connector, obtain the two of the connecting end surface of electric connector
Dimension image is simultaneously sent to image processor
Image processor is used for the two dimensional image of the connecting end surface according to electric connector, calculates the distribution model of the connecting end surface
It encloses, in the distribution in the stitch in the connecting end surface or pin hole region and stitch in the connecting end surface or pin hole region
The distributed dimension and distribution density of stitch or pin hole；According to the needle in the distribution of the connecting end surface and the connecting end surface
The distribution in foot or pin hole region determines the scanning range and/or scanning accuracy of the peripheral region of the connecting end surface；According to this
The distribution of stitch or pin hole region in connecting end surface and and the stitch in the connecting end surface or pin hole region in needle
The distributed dimension and distribution density of foot or pin hole, determine the stitch or pin hole region in the connecting end surface scanning range and/or
Scanning accuracy.
It can be seen from the above, technical solution provided by the invention surveys the scanning on the surface of workpiece for measurement by laser range finder
It measures to realize the reconstruct of the surface topography for workpiece for measurement, specifically, the workpiece for measurement obtained according to laser range finder measurement
Surface on the range data answered of each pair of point each of can know on the surface of workpiece for measurement the shape characteristic put, it is each
The shape characteristic of point has collectively constituted the shape characteristic on the surface of workpiece for measurement.This programme will be for the surface topography of workpiece for measurement
Measurement be refined as each point on the surface for workpiece for measurement range information measurement, solve whole for workpiece for measurement
Body measures the big problem of difficulty, and the laser range finder of the measurement for carrying out range information has the spy of high certainty of measurement
Point helps to obtain the measurement result of accurate workpiece surface appearance.
Description of the drawings
Fig. 1 shows a kind of flow chart of the measurement method of workpiece topography according to an embodiment of the invention；
Fig. 2 shows a kind of flow charts of the measurement method of workpiece topography in accordance with another embodiment of the present invention；
Fig. 3 shows a kind of schematic diagram of the measuring system of workpiece topography according to an embodiment of the invention；
Fig. 4 shows a kind of structure chart of the measuring system of workpiece topography according to an embodiment of the invention；
Fig. 5 A show the measuring system of workpiece topography according to an embodiment of the invention in the table for determining workpiece for measurement
The structure chart when scanning logic in face；
Fig. 5 B show the measuring system of workpiece topography according to an embodiment of the invention on the surface to workpiece for measurement
Structure chart when being scanned.
Specific implementation mode
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to embodiment party of the present invention
Formula is described in further detail.
Fig. 1 shows a kind of flow chart of the measurement method of workpiece topography according to an embodiment of the invention.Such as Fig. 1 institutes
Show, this method includes：
Step S110 is scanned the surface of workpiece for measurement using laser range finder, measures on the surface of workpiece for measurement
The range data of each point and reference position.
In this step, the density degree of the point measured by laser range finder depends on the scanning accuracy of laser range finder,
This is not limited.Reference position can need to carry out calibration selection according to measurement, remain unchanged in same measurement process,
This is not also limited.
Step S120 reconstructs workpiece for measurement according to the range data of each point and reference position on the surface of workpiece for measurement
Surface topography.
As it can be seen that method shown in FIG. 1 by laser range finder to the scanning survey on the surface of workpiece for measurement come realize for
The reconstruct of the surface topography of workpiece for measurement, it is specifically, every on the surface for the workpiece for measurement that foundation laser range finder measurement obtains
The corresponding range data of a point each of can know on the surface of workpiece for measurement the shape characteristic put, the shape characteristic of each point
The shape characteristic on the surface of workpiece for measurement is collectively constituted.The measurement of surface topography for workpiece for measurement is refined as by this programme
Measurement for the range information of each point on the surface of workpiece for measurement, solves and integrally measures difficulty for workpiece for measurement
Big problem is spent, and the laser range finder of the measurement for carrying out range information has the characteristics that high certainty of measurement, contributes to
To the measurement result of accurate workpiece surface appearance.
In one embodiment of the invention, laser range finder used by this programme is installed on motion platform, movement
The rotation and/or translation of platform drive the rotation and/or translation of the laser range finder being mounted thereon, pass through controlled motion platform
Rotation and/or translation realize scanning of the laser range finder to the surface of workpiece for measurement, the stepping accuracy of motion platform determines
The scanning accuracy of laser range finder.Laser range finder includes：Laser, picture signal sensor and image-signal processor.
The operation principle of laser range finder is：At any in the laser irradiation to the surface of workpiece for measurement of laser output, in the point
Place is reflected, and picture signal sensor receives corresponding reflected light and forms corresponding picture signal；Image-signal processor energy
Enough picture signals export to imaging sensor are handled, between acquisition laser output plane and laser reflection position away from
From.
Based on above description, then step S110 utilizes surface of the laser range finder to workpiece for measurement in method shown in FIG. 1
It is scanned, measuring the specific implementation process of the range data of each point and reference position on the surface of workpiece for measurement is：1, will swash
Optar is installed on motion platform, carries out following scanning process：The rotation and/or translation of controlled motion platform so that swash
Optar output laser irradiation to the surface of workpiece for measurement on a bit, it is corresponding apart from number that laser range finder measures the point
According to；The rotation and/or translation of controlled motion platform again so that the laser irradiation of laser range finder output to the surface of workpiece for measurement
On another point, laser range finder measures the corresponding range data ... ... of point, repeats this process until scanning through workpiece for measurement
Surface range.I.e. by the rotation of controlled motion platform and/or translation realize laser range finder to the surface of workpiece for measurement into
Row scanning, obtains the distance between laser output plane of each point and laser range finder data on the surface of workpiece for measurement.2, root
According to each the distance between point and the laser output plane of laser range finder data and laser ranging on the surface of workpiece for measurement
The position relationship of motion platform and reference position where instrument, obtain the point on the surface of workpiece for measurement and reference position away from
From data.Specifically, in measurement process, each stationary intervals of the motion platform where laser range finder correspond to Laser Measuring
Distance meter is for the measurement of any on the surface of workpiece for measurement, then in static of each of motion platform where laser range finder
Every knowing position between the two with the reference position in advance demarcated according to the current location of the motion platform where laser range finder
Relationship is set, further according to the motion platform where laser range finder and the position relationship between reference position and laser ranging
The laser output plane of laser range finder and the position relationship of reference position are known in the position of instrument on the moving platform；And then
It obtains after each putting the distance between laser output plane of laser range finder relationship on the surface of workpiece for measurement, auxiliary is to swash
The laser output plane of optar and the position relationship of reference position each of can be obtained on the surface of workpiece for measurement point with
Distance between reference position.
In one embodiment of the invention, the range data packet with reference position is put each of on the surface of workpiece for measurement
It includes：The coordinate data of the point and the distance between the point and reference position；Then the step S120 of method shown in Fig. 1 is according to be measured
The range data of each point and reference position on the surface of workpiece, the surface topography for reconstructing workpiece for measurement include：According to work to be measured
The coordinate data of each point and accordingly the distance between with reference position on the surface of part obtains relatively deep between difference
Degree；According to the coordinate data and relative depth of each point on the surface of workpiece for measurement, each point on the surface of workpiece for measurement is reconstructed
Distribution and corresponding relative depth, the surface topography as workpiece for measurement.
Further, in order to improve the measurement efficiency of workpiece surface appearance, multiple laser range finders may be used in this programme
Measurement concurrently is scanned to the different surfaces of workpiece for measurement.In one embodiment of the invention, when laser range finder is
It is above-mentioned that laser range finder is installed on motion platform when multiple, it is realized and is swashed by the rotation and/or translation of controlled motion platform
Optar to the surface of workpiece for measurement be scanned including：Multiple laser range finders are respectively arranged in different motion platforms
On, realize multiple laser range finders respectively to the different tables of workpiece for measurement by the rotation and/or translation that control each motion platform
Face is carried out at the same time scanning.For example, workpiece for measurement has the surfaces a and the surfaces b, two laser range finders are respectively arranged in two fortune
On moving platform, scanning of the laser range finder to the surfaces a thereon is realized by the rotation and/or translation of motion platform, is led to
Cross scanning of the laser range finder to the surfaces b of the rotation and/or translation realization of another motion platform thereon, two motion platforms
Movement do not interfere with each other independently of each other, the measurement process of two laser range finders is not interfere with each other independently of each other, can be fast and effective
Complete the reconstruct on the surfaces a and the surfaces b of workpiece for measurement in ground.In other embodiments, workpiece for measurement can also be positioned over to one
On motion platform, the rotation of motion platform and/or the rotation and/or translation of translation drive workpiece for measurement, and turn of workpiece for measurement
Dynamic and/or translation can be as the movement of the motion platform where laser range finder compensation or auxiliary, realization is to workpiece for measurement
Surface scanning.
Fig. 2 shows a kind of flow charts of the measurement method of workpiece topography in accordance with another embodiment of the present invention.Such as Fig. 2
Shown, this method includes：
Step S210 carries out imaging detection to the surface of workpiece for measurement using imaging sensor, obtains the table of workpiece for measurement
The two dimensional image in face.
In this step, CCD photoelectric coupling detectors may be used as imaging sensor.This programme pacifies imaging sensor
Loaded on motion platform, the movement of imaging sensor, specifically, control are driven by the rotation and/or translation of controlled motion platform
The movement of motion platform processed enable imaging sensor receive workpiece for measurement surface scattering light, and then can be to be measured
The surface of workpiece is imaged, and corresponding two dimensional image is obtained.Alternatively, imaging sensor is stationary, workpiece for measurement is placed in fortune
On moving platform, the movement of workpiece for measurement is driven by the rotation and/or translation of controlled motion platform, specifically, controlled motion is flat
Workpiece for measurement is moved to the scattering on the surface that certain position enables imaging sensor to receive workpiece for measurement by the movement of platform
Light, and then the surface of workpiece for measurement can be imaged, obtain corresponding two dimensional image.
Step S220, according to the two dimensional image on the surface of workpiece for measurement, the corresponding scanning in surface for obtaining workpiece for measurement is patrolled
Volume.
The corresponding scanning logic in surface of the workpiece for measurement obtained in this step indicates the scanning on the surface of workpiece for measurement
The information such as range and/or scanning accuracy, different surfaces adapt to different scanning logics.
Step S230, the motion platform where the corresponding scanning logic control laser range finder in the surface of workpiece for measurement
Rotation and/or translation, realize that scanning of the laser range finder to the surface of workpiece for measurement, measurement obtain on the surface of workpiece for measurement
The range data of each point and reference position.
Step S240 reconstructs workpiece for measurement according to the range data of each point and reference position on the surface of workpiece for measurement
Surface topography.
As it can be seen that on the basis of method shown in Fig. 1, method shown in Fig. 2 first pass through in advance treat the surface for surveying workpiece into
The mode that row is taken pictures obtains the two dimensional image on the surface of workpiece for measurement, can know work to be measured for the analyzing processing of two dimensional image
The rough distributed intelligence on the surface of part, and then can determine the scanning logic for adapting to the surface, laser range finder foundation should
Scanning logic is scanned the surface of workpiece for measurement, can effectively improve scan efficiency and scanning result utilization rate, reduces
Invalid scanning, coincidence measurement demand.
For example, workpiece for measurement is electric connector, the surface of workpiece for measurement is the connecting end surface of electric connector, passes through electrical connection
More special structure possessed by the connecting end surface of device illustrates method shown in Fig. 2.Specifically, imaging sensor is being utilized
After the two dimensional image for carrying out the connecting end surface that imaging detection obtains electric connector to the connecting end surface of electric connector, according to electrical connection
The two dimensional image of the connecting end surface of device calculates distribution, the stitch in the connecting end surface or the pin hole region of the connecting end surface
Distribution and stitch in the connecting end surface or pin hole region in the distributed dimension and distribution density of stitch or pin hole；
According to the distribution of stitch or pin hole region in the distribution of the connecting end surface and the connecting end surface, the company is determined
The scanning range and/or scanning accuracy of the peripheral region of contact surface；According to point of stitch or pin hole region in the connecting end surface
Cloth range and and the stitch in the connecting end surface or pin hole region in the distributed dimension and distribution density of stitch or pin hole,
Determine the stitch in the connecting end surface or the scanning range and/or scanning accuracy in pin hole region.Wherein, the connecting pin of electric connector
The distributed dimension of stitch or pin hole embodies the position of each stitch or pin hole and each needle in the stitch in face or pin hole region
The distribution density of the sectional dimension of foot or pin hole, such as diameter, stitch or pin hole embody between stitch and stitch or pin hole with
The size of space between pin hole can determine two kinds of scanning accuracies when determining the scanning accuracy of stitch or pin hole region, right
When point on the section of each stitch or pin hole is scanned, scanning accuracy is less than the diameter of stitch or pin hole, to stitch with
When interval between stitch or between pin hole and pin hole is scanned, scanning accuracy is less than the size of space.
Fig. 3 shows a kind of schematic diagram of the measuring system of workpiece topography according to an embodiment of the invention.Such as Fig. 3 institutes
Show, the measuring system of the workpiece topography includes：Pedestal 100, data processing equipment 200 and at least one laser range finder
300。
Articles holding table 110 is provided on pedestal 100, articles holding table 110 is for placing workpiece for measurement；Laser range finder 300 is used for
The surface of workpiece for measurement on articles holding table 110 is scanned, measure each point and reference position on the surface of workpiece for measurement away from
It is sent to data processing equipment 200 from Data Concurrent；Data processing equipment 200 be used for each point on the surface of the workpiece for measurement with
The range data of reference position is handled, and the surface topography of workpiece for measurement is reconstructed.
As it can be seen that scanning of the measuring system of workpiece topography shown in Fig. 3 by laser range finder to the surface of workpiece for measurement
It measures to realize the reconstruct of the surface topography for workpiece for measurement, specifically, the work to be measured obtained according to laser range finder measurement
The range data that each pair of point on the surface of part is answered each of can know on the surface of workpiece for measurement the shape characteristic put, respectively
The shape characteristic of a point has collectively constituted the shape characteristic on the surface of workpiece for measurement.This programme will be for the surface shape of workpiece for measurement
The measurement of looks is refined as the measurement of the range information of each point on the surface for workpiece for measurement, solves for workpiece for measurement
Entirety measures the big problem of difficulty, and the laser range finder of the measurement for carrying out range information has high certainty of measurement
Feature helps to obtain the measurement result of accurate workpiece surface appearance.
In one embodiment of the invention, it is additionally provided at least one motion platform on pedestal 100；Each motion platform
Including turntable and translation stage；Each laser range finder 300 is installed on a motion platform；Laser range finder 300 can lead to
The rotation and/or translation for crossing motion platform are scanned the surface of the workpiece for measurement on articles holding table 110, obtain workpiece for measurement
The distance between each point and the laser output plane of laser range finder 300 Data Concurrent are sent to data processing equipment 200 on surface；
Data processing equipment 200 be used for according on the surface of workpiece for measurement each point and the laser output plane of laser range finder 300 it
Between range data and motion platform and reference position where laser range finder 300 position relationship, obtain workpiece for measurement
Surface on the point and reference position range data.
Wherein, point and the range data of reference position include each of on the surface of workpiece for measurement：The coordinate data of the point
And the distance between the point and reference position；Data processing equipment 200 is used for the seat according to each point on the surface of workpiece for measurement
It marks data and accordingly the distance between with reference position, obtains the relative depth between difference；According to workpiece for measurement
The coordinate data and relative depth of each point on surface reconstruct the distribution of each point and corresponding phase on the surface of workpiece for measurement
To depth, the surface topography as workpiece for measurement.
In one embodiment of the invention, when the measuring system of the workpiece topography includes multiple laser range finders 300,
Multiple laser range finders 300 are separately mounted on different motion platforms, and each laser range finder 300 can pass through each motion platform
Rotation and/or translation scanning is carried out at the same time to the different surfaces of the workpiece for measurement on articles holding table 110.
On the basis of the above, further, in one embodiment of the invention, the measuring system of the workpiece topography is also wrapped
It includes：Imaging sensor and image processor；Imaging sensor is for sweeping the surface of workpiece for measurement in laser range finder 300
Before retouching, imaging detection is carried out to the surface of workpiece for measurement, the two dimensional image on the surface of workpiece for measurement is obtained and is sent to image
Processor；Image processor is used for the two dimensional image on the surface according to the workpiece for measurement, and the surface for obtaining workpiece for measurement corresponds to
Scanning logic and the motion platform that is sent to where laser range finder 300；Motion platform according to the scanning logic received into
Row rotation and/or translation.
Fig. 4 shows a kind of structure chart of the measuring system of workpiece topography according to an embodiment of the invention, such as Fig. 4 institutes
Show, the measuring system of the workpiece topography includes：It pedestal 100, two laser range finders 300, imaging sensors 400 and does not mark
The data processing equipment and image processor shown, wherein data processing equipment are connect with laser range finder 300 respectively, at image
Reason device is connect with imaging sensor 400, and it can also be two that data processing equipment, which can be the same device with image processor,
Different devices, is not limited herein.
Using as shown in the figure perpendicular to paper direction inwards as x-axis direction, the horizontal direction to the left on paper is y-axis side
To the direction straight up on paper is z-axis direction, and x-axis, y-axis and z-axis constitute right-handed coordinate system.It is provided on pedestal 100
Articles holding table 110, articles holding table 110 is for placing workpiece for measurement, and in the present embodiment, articles holding table 110 includes：X-axis electronic control translation stage
111, y-axis direction electronic control translation stage 112, and electric controlled rotating platform 113, workpiece for measurement is positioned over electric controlled rotating platform 113 when measurement
On, x-axis electronic control translation stage 111 and y-axis direction electronic control translation stage 112 in articles holding table 110 wait for for realizing on articles holding table 110
Movement of the workpiece on the horizontal plane of pedestal 100 is surveyed, the electric controlled rotating platform 113 in articles holding table 110 is for realizing to articles holding table 110
On workpiece for measurement rotation, to adjust the placement angle of workpiece for measurement, to realize 360 degree of measurement of full field.It is also set on pedestal 100
It is equipped with z-axis electronic control translation stage 120, is installed on the side of pedestal 100, for realizing the movement of vertical direction.
Laser range finder 300 is fixed on z-axis electronic control translation stage 120, and main function is the table for measuring workpiece for measurement
Face shape characteristic, in order to be fully described by workpiece for measurement surface whole shape characteristics, the measuring system of the workpiece topography matches
For two laser range finders 300, and placement situation of two laser range finders 300 on z-axis electronic control translation stage 120 makes two
The exit direction of the output laser of a laser range finder 300 is mutually perpendicular to, and all independent acquisitions of each laser range finder 300 are apart from number
According to not interfereing with each other.
As shown in figure 4, imaging sensor 400 also is secured on z-axis electronic control translation stage 120, imaging sensor 400 uses
CCD photoelectric coupling detectors, main function are that the two dimensional image on the surface of workpiece for measurement is imaged and is recorded, follow-up logical
Image recognition and the analysis for crossing image processor, the scanning logic in such a way that acquisition adapts to best scanning motion.
Illustrate the workflow of the measuring system of workpiece topography shown in Fig. 4 with specific example.In this example,
Workpiece for measurement is electric connector, and the surface of workpiece for measurement is the connecting end surface of electric connector.Before carrying out the measurements, it will be electrically connected
Device is positioned on electric controlled rotating platform 113 so that the connecting end surface of electric connector is upward perpendicular to z-axis direction.Control y-axis direction electricity
Controlling translation stage 112 drives electric connector to be moved to negative direction of the y-axis, and being moved to imaging sensor 400 can be to the company of electric connector
Contact surface carries out the position of imaging detection.Imaging sensor 400 takes pictures to the connecting end surface of electric connector, is electrically connected
The two dimensional image of the connecting end surface of device is simultaneously sent to image processor；Image processor is used for the connecting end surface according to electric connector
Two dimensional image, calculate the distribution of the connecting end surface, the distribution of the stitch in the connecting end surface or pin hole region, with
And the distributed dimension and distribution density of stitch or pin hole in stitch in the connecting end surface or pin hole region；According to the connecting end surface
Distribution and stitch or pin hole region in the connecting end surface distribution, determine the external zones of the connecting end surface
The scanning range and/or scanning accuracy in domain；According to the distribution of stitch or pin hole region in the connecting end surface and and
The distributed dimension and distribution density of stitch or pin hole in stitch or pin hole region in the connecting end surface, determine in the connecting end surface
Stitch or pin hole region scanning range and/or scanning accuracy；It is determined that the corresponding scanning logic of connecting end surface, Fig. 5 A are shown
The measuring system of workpiece topography according to an embodiment of the invention is gone out in the scanning logic on the surface for determining workpiece for measurement
Structure, in figure dotted line frame acceptance of the bid show that y-axis direction electronic control translation stage 112 drives workpiece for measurement to be moved to suitable for image sensing
The position that device 400 is taken pictures.
After the corresponding scanning logic of connecting end surface for determining electric connector, 112 band of control y-axis direction electronic control translation stage
Dynamic electric connector is moved to positive direction of the y-axis, and electric connector is sent into the scanning ranging region of laser range finder 300, and Fig. 5 B are shown
Structure of the measuring system of workpiece topography according to an embodiment of the invention when the surface to workpiece for measurement is scanned
Scheme, dotted line frame, which is got the bid, in figure shows that y-axis direction electronic control translation stage 112 drives workpiece for measurement to be moved to suitable for laser range finder
300 are scanned the position of ranging.At this point, according to fixed scanning logic, by control x-axis direction electronic control translation stage 111,
The translation of y-axis direction electronic control translation stage 112, electric controlled rotating platform 113 and z-axis direction electronic control translation stage 120 is mutually tied with rotation
It closes, realizes detailed scanning of the laser range finder 300 to the surface of workpiece for measurement.According to this principle, multiple electronic control translation stages and
The Union Movement of electric controlled rotating platform can realize the quick scanning to five surfaces of workpiece for measurement.For surface texture difference
Workpiece for measurement, using different scanning logics, based on two-colour laser distancemeter scanning machinery as a result, can ensure scanning speed
Degree and precision realize multi-dimensional scanning.In the above example, the corresponding scanning logic in the surface of workpiece for measurement also can be according to electrical connection
The stitch of the connecting end surface of device or the density of pin hole and height/depth determines, and uses the main of two laser range finders 300
Purpose is to carry out multi-panel scanning parallel and ensures the positive determination of system local Coordinate System, mutually orthogonal laser range finder
300 with motion guide rail cooperate, the scanning survey of six-freedom degree may be implemented, further, it is possible to use one or
More than two laser range finders 300, are not limited herein.
Wherein, each component in Fig. 5 A and Fig. 5 B is indicated completely the same with Fig. 4, only because the fortune of articles holding table 110
Variation that is dynamic and producing position, Fig. 5 A and Fig. 5 B are intended for illustrating the situation of change of position, therefore are not repeated that mark is each
Partial Digital ID.
In one embodiment of the invention, the mechanical control part of the measuring system of above-mentioned workpiece topography is acquired with data
Part can be controlled by the same program and be realized, the restructuring procedure of the surface topography of workpiece for measurement needs individual program control real
Existing, the scanning accuracy of the system can be controlled in 10 microns or smaller.
It should be noted that each embodiment pair of each embodiment of Fig. 3-systems shown in fig. 5 and method shown in Fig. 1-Fig. 2
Answer identical, the part being above described in detail hereinafter repeats no more.
In conclusion technical solution provided by the invention by laser range finder to the scanning survey on the surface of workpiece for measurement
Realize the reconstruct of the surface topography for workpiece for measurement, specifically, the workpiece for measurement obtained according to laser range finder measurement
The range data that each pair of point on surface is answered each of can know on the surface of workpiece for measurement the shape characteristic put, Ge Gedian
Shape characteristic collectively constituted workpiece for measurement surface shape characteristic.This programme will be for the surface topography of workpiece for measurement
The measurement for measuring the range information for being refined as each point on the surface for workpiece for measurement is solved for workpiece for measurement entirety
The big problem of difficulty is measured, and the laser range finder of the measurement for carrying out range information has the spy of high certainty of measurement
Point helps to obtain the measurement result of accurate workpiece surface appearance.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Any modification, equivalent replacement, improvement and so within the spirit and principles in the present invention, are all contained in protection scope of the present invention
It is interior.
Claims (10)
1. a kind of measurement method of workpiece topography, which is characterized in that including：
The surface of workpiece for measurement is scanned using laser range finder, measures each point and reference position on the surface of workpiece for measurement
Range data；
According to the range data of each point and reference position on the surface of the workpiece for measurement, the surface shape of workpiece for measurement is reconstructed
Looks.
2. the method as described in claim 1, which is characterized in that described to be carried out to the surface of workpiece for measurement using laser range finder
Scanning, measuring the range data of each point and reference position on the surface of workpiece for measurement includes：
Laser range finder is installed on motion platform, laser ranging is realized by the rotation and/or translation of controlled motion platform
Instrument is scanned the surface of workpiece for measurement, obtains the laser output plane of each point and laser range finder on the surface of workpiece for measurement
The distance between data；
According to each the distance between point and laser output plane of laser range finder data and swashing on the surface of workpiece for measurement
The position relationship of motion platform and reference position where optar obtains the point on the surface of workpiece for measurement and benchmark position
The range data set.
3. method as claimed in claim 2, which is characterized in that each of on the surface of workpiece for measurement point and reference position away from
Include from data：The coordinate data of the point and the distance between the point and reference position；
Then on the surface according to the workpiece for measurement each point and reference position range data, reconstruct the table of workpiece for measurement
Face pattern includes：According to the coordinate data of each point on the surface of workpiece for measurement and accordingly the distance between with reference position,
Obtain the relative depth between difference；According to the coordinate data and relative depth of each point on the surface of workpiece for measurement, reconstruct
Go out the distribution of each point and corresponding relative depth, the surface topography as workpiece for measurement on the surface of workpiece for measurement.
4. method as claimed in claim 2, which is characterized in that described by laser range finder when laser range finder is multiple
It is installed on motion platform, table of the laser range finder to workpiece for measurement is realized by the rotation and/or translation of controlled motion platform
Face be scanned including：
Multiple laser range finders are respectively arranged on different motion platforms, by control each motion platform rotation and/or
Translation realizes that multiple laser range finders are carried out at the same time scanning to the different surfaces of workpiece for measurement respectively.
5. method as claimed in claim 2, which is characterized in that it is described using laser range finder to the surface of workpiece for measurement into
Before row scanning, this method further comprises：
Imaging detection is carried out to the surface of workpiece for measurement using imaging sensor, obtains the two dimensional image on the surface of workpiece for measurement；
According to the two dimensional image on the surface of the workpiece for measurement, the corresponding scanning logic in surface of workpiece for measurement is obtained；
Then it is described using laser range finder to the surface of workpiece for measurement be scanned including：According to the surface pair of the workpiece for measurement
The rotation and/or translation of motion platform where the scanning logic control laser range finder answered, realize laser range finder to be measured
The scanning on the surface of workpiece.
6. method as claimed in claim 5, which is characterized in that workpiece for measurement is electric connector, and the surface of workpiece for measurement is electricity
The connecting end surface of connector；
The two dimensional image on the surface according to the workpiece for measurement obtains the corresponding scanning logic packet in surface of workpiece for measurement
It includes：
According to the two dimensional image of the connecting end surface of electric connector, calculate in the distribution of the connecting end surface, the connecting end surface
The distribution ruler of stitch or pin hole in the distribution in stitch or pin hole region and the stitch in the connecting end surface or pin hole region
Very little and distribution density；
According to the distribution of stitch or pin hole region in the distribution of the connecting end surface and the connecting end surface, determine
The scanning range and/or scanning accuracy of the peripheral region of the connecting end surface；
According to the distribution of stitch or pin hole region in the connecting end surface and and the connecting end surface in stitch or needle
The distributed dimension and distribution density of stitch or pin hole in bore region determine the stitch in the connecting end surface or the scanning in pin hole region
Range and/or scanning accuracy.
7. a kind of measuring system of workpiece topography, which is characterized in that including：Pedestal, data processing equipment and it is at least one swash
Optar；
Articles holding table is provided on pedestal, articles holding table is for placing workpiece for measurement；
Laser range finder measures each point on the surface of workpiece for measurement for being scanned to the surface of the workpiece for measurement on articles holding table
With the range data of reference position and be sent to data processing equipment；
Data processing equipment is for handling the range data of each point and reference position on the surface of the workpiece for measurement, weight
Structure goes out the surface topography of workpiece for measurement.
8. system as claimed in claim 7, which is characterized in that be additionally provided at least one motion platform on pedestal；Each fortune
Moving platform includes turntable and translation stage；
Each laser range finder is installed on a motion platform；
Laser range finder can sweep the surface of the workpiece for measurement on articles holding table by the rotation and/or translation of motion platform
It retouches, obtains the distance between laser output plane of each point and laser range finder Data Concurrent on the surface of workpiece for measurement and send to number
According to processing unit；
Data processing equipment be used for according on the surface of workpiece for measurement each point the laser output plane of laser range finder between
Range data and laser range finder where motion platform and reference position position relationship, obtain the table of workpiece for measurement
The range data of the point and reference position on face.
9. system as claimed in claim 8, which is characterized in that the system further comprises：Imaging sensor and image procossing
Device；
Imaging sensor is used for before laser range finder is scanned the surface of workpiece for measurement, to the surface of workpiece for measurement into
Row imaging detection obtains the two dimensional image on the surface of workpiece for measurement and is sent to image processor；
Image processor is used for the two dimensional image according to the surface of the workpiece for measurement, and the surface for obtaining workpiece for measurement corresponding is swept
The motion platform retouched logic and be sent to where laser range finder；
Motion platform is rotated and/or is translatable according to the scanning logic received.
10. system as claimed in claim 9, which is characterized in that workpiece for measurement is electric connector, and the surface of workpiece for measurement is electricity
The connecting end surface of connector；
Imaging sensor can carry out imaging detection to the surface of electric connector, obtain the X-Y scheme of the connecting end surface of electric connector
Picture is simultaneously sent to image processor
Image processor is used for the two dimensional image according to the connecting end surface of electric connector, calculate the connecting end surface distribution,
Stitch in the distribution of stitch or pin hole region and the stitch in the connecting end surface or pin hole region in the connecting end surface
Or the distributed dimension and distribution density of pin hole；According in the distribution of the connecting end surface and the connecting end surface stitch or
The distribution in pin hole region determines the scanning range and/or scanning accuracy of the peripheral region of the connecting end surface；According to the connection
The distribution of stitch or pin hole region in end face and and the stitch in the connecting end surface or pin hole region in stitch or
The distributed dimension and distribution density of pin hole determine the stitch in the connecting end surface or scanning range and/or the scanning in pin hole region
Precision.
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