CN108394928B - Preparation method of zinc oxide/zinc stannate core-shell structure heterojunction - Google Patents

Preparation method of zinc oxide/zinc stannate core-shell structure heterojunction Download PDF

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CN108394928B
CN108394928B CN201810252172.6A CN201810252172A CN108394928B CN 108394928 B CN108394928 B CN 108394928B CN 201810252172 A CN201810252172 A CN 201810252172A CN 108394928 B CN108394928 B CN 108394928B
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邹友生
刘舒婷
曾海波
刘佳欣
朱正峰
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Nanjing University of Science and Technology
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Abstract

本发明公开了一种氧化锌/锡酸锌核壳结构异质结的制备方法。本发明采用原子层沉积、液相激光烧蚀与溶剂热法相结合的方式,通过以柔性纤维状细金属丝为基底,在其表面垂直生长氧化锌纳米棒阵列,进而通过激光烧蚀浸没在溶液中的高纯金属锡靶,获得高活性溶剂热前驱体,并进一步采用溶剂热法在氧化锌阵列上生长出氧化锌/锡酸锌核壳结构异质结。本发明所采用的方法具有操作简单、反应条件温和、纯度高、无杂质元素和无表面活性剂添加等优点,制备的氧化锌/锡酸锌核壳结构异质结形貌尺寸均一,结晶性良好。本发明制备的氧化锌/锡酸锌核壳结构异质结可应用于柔性纤维状紫外光电探测器。

Figure 201810252172

The invention discloses a preparation method of a zinc oxide/zinc stannate core-shell structure heterojunction. The invention adopts the combination of atomic layer deposition, liquid-phase laser ablation and solvothermal method, and uses flexible fibrous thin metal wire as a substrate to vertically grow a zinc oxide nanorod array on its surface, and then immerse it in a solution by laser ablation. The high-purity metal tin target in the ZnO was obtained, and a highly active solvothermal precursor was obtained, and a ZnO/ZnStan core-shell structure heterojunction was further grown on the ZnO array by solvothermal method. The method adopted in the present invention has the advantages of simple operation, mild reaction conditions, high purity, no impurity elements and no addition of surfactants, etc. The prepared zinc oxide/zinc stannate core-shell structure heterojunction has uniform morphology and size, and has good crystallinity. good. The zinc oxide/zinc stannate core-shell structure heterojunction prepared by the invention can be applied to a flexible fiber-shaped ultraviolet photodetector.

Figure 201810252172

Description

一种氧化锌/锡酸锌核壳结构异质结的制备方法A kind of preparation method of zinc oxide/zinc stannate core-shell heterojunction

技术领域technical field

本发明涉及金属氧化物半导体纳米材料制备技术领域,特别是一种氧化锌/锡酸锌核壳结构异质结的制备方法。The invention relates to the technical field of preparation of metal oxide semiconductor nanomaterials, in particular to a preparation method of a zinc oxide/zinc stannate core-shell heterojunction.

背景技术Background technique

紫外光探测在平流层臭氧监测、火焰防护、消防领域和光通信等方面引起广泛研究与应用。而柔性纤维状紫外光电探测器由于具有柔性、360度探测、可编织和可穿戴等特点,所以可实现人体穿戴的同时探测紫外光,比平面的探测器具有更广的应用范围。目前,制备柔性纤维状紫外光电探测器的材料主要为氧化锌。而作为一种二元金属氧化物,氧化锌有着带隙不够宽(带隙约为3.37eV)难以探测到波长更短的紫外光等不足。与二元金属氧化物材料相比,三元金属氧化物锡酸锌具有电子迁移率高、电子传递快和响应速度快的优势。同时,锡酸锌是一种带隙约为3.64eV的重要的n型半导体材料,它可通过调节组分比以达到带隙展宽,避免了由于掺杂氧化锌带来的相分离,所以构筑氧化锌/锡酸锌核壳结构异质结可达到拓宽氧化锌探测范围,实现宽光谱响应。Ultraviolet light detection has caused extensive research and applications in stratospheric ozone monitoring, flame protection, fire protection, and optical communications. The flexible fiber-shaped UV photodetector has the characteristics of flexibility, 360-degree detection, woven and wearable, etc., so it can detect UV light while being worn by the human body, and has a wider application range than flat detectors. At present, the material for preparing flexible fiber-like UV photodetectors is mainly zinc oxide. As a binary metal oxide, zinc oxide has the disadvantage that the band gap is not wide enough (the band gap is about 3.37 eV), and it is difficult to detect ultraviolet light with a shorter wavelength. Compared with binary metal oxide materials, ternary metal oxide zinc stannate has the advantages of high electron mobility, fast electron transfer and fast response speed. At the same time, zinc stannate is an important n-type semiconductor material with a band gap of about 3.64 eV. It can widen the band gap by adjusting the composition ratio and avoid the phase separation caused by doping zinc oxide. The zinc oxide/zinc stannate core-shell heterojunction can broaden the detection range of zinc oxide and achieve a broad spectral response.

目前,对于氧化锌/锡酸锌异质结的制备已有一些文献报道。Sunghoon Park等人(Ceramics International,2013,39(4):3539-3545)通过热蒸发法以ZnO、SnO2及石墨粉末为原料合成Zn2SnO4纳米线,再通过原子层沉积技术在表面沉积ZnO,制备了锡酸锌(核)/氧化锌(壳)异质结,并将用于气体传感器,且与纯Zn2SnO4纳米线相比,对NO2气体的响应值提高了五倍。Cheng等人(ACS Applied Materials&Interfaces,2014,6(6):4057-62)通过溶胶-凝胶法以Zn(NO3)2·6H2O、SnCl2·2H2O、柠檬酸和乙二醇为原料制备出氧化锌/锡酸锌异质结纳米线。然而尚未见到结合液相激光烧蚀、原子层沉积和溶剂热的方法,制备可应用于可编织可穿戴柔性紫外光探测的氧化锌/锡酸锌核壳结构异质结。At present, there have been some literature reports on the preparation of zinc oxide/zinc stannate heterojunctions. Sunghoon Park et al. (Ceramics International, 2013, 39( 4 ): 3539-3545) synthesized Zn2SnO4 nanowires by thermal evaporation using ZnO, SnO2 and graphite powder as raw materials, and then deposited them on the surface by atomic layer deposition technology ZnO, a zinc stannate (core)/zinc oxide (shell) heterojunction has been prepared and will be used in gas sensors, and the response to NO gas is five times higher than that of pure Zn2SnO4 nanowires . Cheng et al. (ACS Applied Materials & Interfaces, 2014, 6(6):4057-62) by sol-gel method with Zn(NO 3 ) 2 .6H 2 O, SnCl 2 .2H 2 O, citric acid and ethylene glycol Zinc oxide/zinc stannate heterojunction nanowires were prepared as raw materials. However, a method combining liquid-phase laser ablation, atomic layer deposition, and solvothermal methods has not yet been seen to fabricate ZnO/ZnStanate core-shell heterojunctions that can be applied to woven and wearable flexible UV light detection.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种氧化锌/锡酸锌核壳结构异质结的制备方法。The purpose of the present invention is to provide a preparation method of a zinc oxide/zinc stannate core-shell structure heterojunction.

实现本发明目的的技术解决方案为:一种氧化锌/锡酸锌核壳结构异质结的制备方法,采用原子层沉积、液相激光烧蚀与溶剂热法相结合的方式,通过以柔性纤维状细金属丝为基底,在表面垂直生长氧化锌纳米棒阵列,进而通过激光烧蚀浸没在溶液中的高纯金属锡靶,获得高活性溶剂热前驱体,经过溶剂热法在氧化锌阵列上生长出氧化锌/锡酸锌核壳结构异质结。具体包括以下步骤:The technical solution to achieve the purpose of the present invention is: a preparation method of a zinc oxide/zinc stannate core-shell structure heterojunction, which adopts the combination of atomic layer deposition, liquid-phase laser ablation and solvothermal method. The thin metal wire is used as the substrate, and the zinc oxide nanorod array is vertically grown on the surface, and then the high-purity metal tin target immersed in the solution is obtained by laser ablation to obtain a highly active solvothermal precursor. A zinc oxide/zinc stannate core-shell heterojunction was grown. Specifically include the following steps:

步骤1、分别用去离子水、无水乙醇对金属丝超声清洗并干燥;Step 1. Use deionized water and absolute ethanol to ultrasonically clean and dry the metal wire respectively;

步骤2、用原子层沉积方法在金属丝表面沉积氧化锌薄膜作为种子层;Step 2, depositing a zinc oxide film on the surface of the metal wire by atomic layer deposition as a seed layer;

步骤3、用溶剂热法在种子层表面沿垂直方向生长氧化锌纳米棒阵列;Step 3, growing a ZnO nanorod array along the vertical direction on the surface of the seed layer by a solvothermal method;

步骤4、在反应容器中加入配制好的溶液,将锡靶置于溶液中,并使溶液浸过靶材表面;Step 4, adding the prepared solution into the reaction vessel, placing the tin target in the solution, and immersing the solution on the surface of the target;

步骤5、调节激光器的脉冲激光光束的光路,使激光光束聚焦在溶剂液面以下的靶材,选取适当的激光波长、频率及能量,开启脉冲激光,在液体环境中对锡靶进行烧蚀反应;在激光烧蚀过程中采用磁力搅拌器持续搅拌溶液直至烧蚀结束;Step 5. Adjust the optical path of the pulsed laser beam of the laser, so that the laser beam is focused on the target material below the liquid level of the solvent, select the appropriate laser wavelength, frequency and energy, turn on the pulsed laser, and ablate the tin target in a liquid environment. ; During the laser ablation process, a magnetic stirrer was used to continuously stir the solution until the end of the ablation;

步骤6、取出锡靶,向激光烧蚀后得到的前驱体溶液中加入碱性溶液,调节溶液成碱性;将前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至设定温度,并保温;Step 6, take out the tin target, add an alkaline solution to the precursor solution obtained after laser ablation, and adjust the solution to be alkaline; transfer the precursor solution and the zinc oxide nanorod array to a reaction kettle and heat up to a set temperature, and keep warm;

步骤7、反应结束后,反应体系随炉冷却至室温;Step 7, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤8、将纳米棒阵列取出,利用有机溶剂等清洗即可得到氧化锌/锡酸锌核壳结构异质结。Step 8. The nanorod array is taken out and cleaned with an organic solvent to obtain a zinc oxide/zinc stannate core-shell structure heterojunction.

本发明与现有技术相比,其显著优点为:1)本发明采用液相激光烧蚀制备的含Sn源的溶剂热前驱体具有超高活性,不会引入其他杂质元素,且产物纯净。2)利用本发明方法制备的氧化锌/锡酸锌核壳结构异质结形貌尺寸均一,结晶性良好,且拓宽了氧化锌的探测范围。同时以柔性纤维状金属丝为衬底,可应用于可编制可穿戴的紫外光探测。Compared with the prior art, the present invention has the following significant advantages: 1) The Sn source-containing solvothermal precursor prepared by liquid-phase laser ablation has ultra-high activity, no other impurity elements are introduced, and the product is pure. 2) The zinc oxide/zinc stannate core-shell structure heterojunction prepared by the method of the present invention has uniform morphology and size, good crystallinity, and broadens the detection range of zinc oxide. At the same time, the flexible fibrous metal wire is used as the substrate, which can be applied to woven and wearable ultraviolet light detection.

附图说明Description of drawings

图1为发明实例1制备的产物ZnO/Zn2SnO4核壳结构异质结的整体图。FIG. 1 is an overall view of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Inventive Example 1.

图2为发明实例1制备的中间产物ZnO的SEM图。FIG. 2 is a SEM image of the intermediate product ZnO prepared in Invention Example 1. FIG.

图3为发明实例1制备的产物ZnO/Zn2SnO4核壳结构异质结的高倍SEM图。3 is a high magnification SEM image of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Invention Example 1.

图4为发明实例1制备的产物ZnO/Zn2SnO4核壳结构异质结截面SEM图。4 is a cross-sectional SEM image of the ZnO/Zn 2 SnO 4 core-shell structure heterojunction of the product prepared in Invention Example 1.

图5为发明实例1制备的产物ZnO/Zn2SnO4核壳结构异质结的XRD图。FIG. 5 is the XRD pattern of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Inventive Example 1. FIG.

图6为发明实例2制备的产物ZnO/Zn2SnO4核壳结构异质结的SEM图。FIG. 6 is a SEM image of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Inventive Example 2. FIG.

图7为发明实例2制备的产物ZnO/Zn2SnO4核壳结构异质结的XRD图。FIG. 7 is the XRD pattern of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Inventive Example 2. FIG.

图8为发明实例3制备的产物ZnO/Zn2SnO4核壳结构异质结的SEM图。FIG. 8 is a SEM image of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Inventive Example 3. FIG.

图9为发明实例4制备的产物ZnO/Zn2SnO4核壳结构异质结的SEM图。FIG. 9 is a SEM image of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Inventive Example 4. FIG.

图10为发明实例5制备的产物ZnO/Zn2SnO4核壳结构异质结的SEM图。10 is a SEM image of the product ZnO/Zn 2 SnO 4 core-shell structure heterojunction prepared in Inventive Example 5.

具体实施方式Detailed ways

结合附图,本发明的一种氧化锌/锡酸锌核壳结构异质结的制备方法,包括以下步骤:With reference to the accompanying drawings, a method for preparing a zinc oxide/zinc stannate core-shell structure heterojunction of the present invention comprises the following steps:

步骤1、分别用去离子水、无水乙醇对柔性纤维状细金属丝超声清洗并干燥;所述金属丝包括钛丝或锌丝,直径为0.1~1mm。Step 1. Ultrasonic cleaning and drying of the flexible fibrous thin metal wire with deionized water and absolute ethanol respectively; the metal wire includes titanium wire or zinc wire, and the diameter is 0.1-1 mm.

步骤2、用原子层沉积方法在金属丝表面沉积氧化锌薄膜作为种子层;所述原子层沉积的氧化锌薄膜厚度为50~200nm。Step 2, depositing a zinc oxide film on the surface of the metal wire by atomic layer deposition as a seed layer; the thickness of the zinc oxide film deposited by the atomic layer deposition is 50-200 nm.

步骤3、用溶剂热法在种子层表面沿垂直方向生长氧化锌纳米棒阵列;所述溶剂热法设置的水热温度为90~120℃,水热时间为4~8h。Step 3, growing a zinc oxide nanorod array along the vertical direction on the surface of the seed layer by a solvothermal method; the hydrothermal temperature set by the solvothermal method is 90-120° C., and the hydrothermal time is 4-8 h.

步骤4、在反应容器中加入配制好的溶液,将锡源靶材置于溶液中,并使溶液浸过靶材表面;配制好的溶液为乙醇、去离子水和双氧水的混合液,其中乙醇与去离子水体积比为0:1~1:1,去离子水与双氧水的体积比为15:1~120:1,锡源靶材为纯度大于99.9%高纯金属锡靶。Step 4. Add the prepared solution to the reaction vessel, place the tin source target in the solution, and let the solution soak the surface of the target; the prepared solution is a mixture of ethanol, deionized water and hydrogen peroxide, wherein ethanol The volume ratio to deionized water is 0:1 to 1:1, the volume ratio of deionized water to hydrogen peroxide is 15:1 to 120:1, and the tin source target is a high-purity metal tin target with a purity greater than 99.9%.

步骤5、调节激光器的脉冲激光光束的光路,使激光光束聚焦在溶剂液面以下的锡源靶材,设置激光波长、频率及能量,开启脉冲激光,对反应容器中的锡源靶材进行烧蚀反应;在激光烧蚀过程中采用磁力搅拌器持续搅拌溶液直至烧蚀结束;激光器为Nd:YAG固体激光器,脉冲频率为5~10Hz,激光波长为1064nm,激光能量为80~120mJ,激光烧蚀时间为20~60min。Step 5. Adjust the optical path of the pulsed laser beam of the laser, so that the laser beam is focused on the tin source target below the solvent level, set the laser wavelength, frequency and energy, turn on the pulsed laser, and burn the tin source target in the reaction vessel. During the laser ablation process, a magnetic stirrer was used to continuously stir the solution until the end of the ablation; the laser was a Nd:YAG solid-state laser, the pulse frequency was 5-10 Hz, the laser wavelength was 1064 nm, and the laser energy was 80-120 mJ. Etching time is 20 to 60 minutes.

步骤6、取出锡源靶材,向激光烧蚀后得到的前驱体溶液中加入辅助剂;将前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至设定温度,并保温;辅助剂为浓度99.8%的乙醇胺,乙醇胺与总溶液体积比为1:6~1:12。所述设定温度为140~200℃,保温时间为4~15h。Step 6. Take out the tin source target material, add an auxiliary agent to the precursor solution obtained after laser ablation; transfer the precursor solution and the zinc oxide nanorod array to the reaction kettle and heat up to the set temperature, and keep the temperature; the auxiliary agent It is ethanolamine with a concentration of 99.8%, and the volume ratio of ethanolamine to the total solution is 1:6 to 1:12. The set temperature is 140-200°C, and the holding time is 4-15h.

步骤7、反应结束后,反应体系随炉冷却至室温;Step 7, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤8、将纳米棒阵列取出,利用有机溶剂清洗即可得到氧化锌/锡酸锌核壳结构异质结。Step 8. The nanorod array is taken out and washed with an organic solvent to obtain a zinc oxide/zinc stannate core-shell structure heterojunction.

下面进行更详细的描述:A more detailed description follows:

本发明的一种氧化锌/锡酸锌核壳结构异质结的制备方法,采用原子层沉积、液相激光烧蚀与溶剂热法相结合的方式,通过以细金属丝为基底,在其表面沿垂直方向生长氧化锌纳米棒阵列,进而通过激光烧蚀浸没在溶液中的高纯金属锡靶获得高活性溶剂热前驱体,经过溶剂热法在氧化锌阵列上生长出氧化锌/锡酸锌核壳结构异质结。通过改变激光烧蚀时间、去离子水和辅助剂(乙醇、双氧水、乙醇胺)添加量、反应温度、反应时间,得到不同尺寸和形貌的氧化锌/锡酸锌核壳结构异质结,具体包括以下步骤:The method for preparing a zinc oxide/zinc stannate core-shell heterojunction of the present invention adopts the combination of atomic layer deposition, liquid-phase laser ablation and solvothermal method, and uses fine metal wire as the substrate to make a surface ZnO nanorod arrays were grown along the vertical direction, and then a highly active solvothermal precursor was obtained by laser ablation of a high-purity metal tin target immersed in a solution, and ZnO/ZnStanate was grown on the ZnO array by a solvothermal method Core-shell heterojunction. By changing the laser ablation time, the addition amount of deionized water and auxiliary agents (ethanol, hydrogen peroxide, ethanolamine), the reaction temperature, and the reaction time, zinc oxide/zinc stannate core-shell heterojunctions with different sizes and morphologies were obtained. Include the following steps:

步骤1、取细金属丝,分别用去离子水、无水乙醇超声清洗30分钟并干燥,然后利用原子层沉积技术在细金属丝表面沉积厚度为50~200nm厚度的氧化锌薄膜。之后进一步通过溶剂热法在表面沿垂直方向生长氧化锌纳米棒阵列,设置的水热温度为90~120℃,水热时间为4~8h。Step 1. Take a thin metal wire, ultrasonically clean it with deionized water and absolute ethanol for 30 minutes and dry, and then use atomic layer deposition technology to deposit a zinc oxide film with a thickness of 50-200 nm on the surface of the thin metal wire. Then, ZnO nanorod arrays were further grown on the surface along the vertical direction by a solvothermal method, and the hydrothermal temperature was set at 90-120 °C, and the hydrothermal time was set at 4-8 h.

步骤2、在反应容器中加入配制好的溶液,将锡源靶材置于溶液中,并使溶液浸过靶材表面;所述配制好的溶液为去离子水与双氧水的体积比为15:1~120:1,锡源靶材为纯度大于99.9%高纯金属锡靶。Step 2, add the prepared solution in the reaction vessel, place the tin source target in the solution, and make the solution dip the surface of the target; the prepared solution is that the volume ratio of deionized water and hydrogen peroxide is 15: 1~120:1, the tin source target is a high-purity metal tin target with a purity greater than 99.9%.

步骤3、调节激光器的脉冲激光光束的光路,使激光光束聚焦在溶剂液面以下的靶材,选取适当的激光波长、频率及能量,开启脉冲激光,在液体环境中对锡源靶材进行烧蚀反应;在激光烧蚀过程中采用磁力搅拌器持续搅拌溶液直至烧蚀结束;所述激光器为Nd:YAG固体激光器,脉冲频率为5~10Hz,激光波长为1064nm,激光能量为80~120mJ,烧蚀时间为20~60min。Step 3. Adjust the optical path of the pulsed laser beam of the laser, so that the laser beam is focused on the target material below the solvent level, select the appropriate laser wavelength, frequency and energy, turn on the pulsed laser, and burn the tin source target material in a liquid environment. During the laser ablation process, a magnetic stirrer was used to continuously stir the solution until the end of the ablation; the laser was a Nd:YAG solid-state laser, the pulse frequency was 5-10 Hz, the laser wavelength was 1064 nm, and the laser energy was 80-120 mJ, The ablation time is 20 to 60 minutes.

步骤4、取出锡靶,加入碱性溶液使溶液呈碱性;所述碱性溶液为浓度99.8%的乙醇胺,乙醇胺与溶液体积比为1:6~1:12。Step 4, taking out the tin target, adding an alkaline solution to make the solution alkaline; the alkaline solution is ethanolamine with a concentration of 99.8%, and the volume ratio of ethanolamine to the solution is 1:6-1:12.

步骤5、将容器中的前驱体溶液转移至反应釜中升温至设定温度,并保温;所述设定的温度为160~180℃,保温时间为4~15h。Step 5. Transfer the precursor solution in the container to the reaction kettle and heat up to a set temperature, and keep the temperature; the set temperature is 160-180°C, and the holding time is 4-15h.

步骤6、反应结束后,反应体系随炉冷却至室温;Step 6, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤7、将纳米棒阵列取出,利用有机溶剂等清洗即可。所述清洗所用有机溶剂为乙醇或甲醇。Step 7. Take out the nanorod array and wash it with an organic solvent or the like. The organic solvent used in the cleaning is ethanol or methanol.

本发明采用的液相激光烧蚀制备的溶剂热前驱体具有超高的活性,溶剂热所需时间短温度低,且不会引入其他杂质元素,获得ZnO/Zn2SnO4核壳结构异质结纯度高、形貌尺寸均一。The solvothermal precursor prepared by liquid-phase laser ablation has ultra-high activity, short time required for solvothermal and low temperature, and no other impurity elements are introduced to obtain ZnO/Zn 2 SnO 4 core-shell heterogeneity. The junction has high purity and uniform shape and size.

下面结合实施例对本发明做进一步详细的描述。The present invention will be described in further detail below with reference to the embodiments.

实施例1Example 1

用原子层沉积、液相激光烧蚀和溶剂热法相结合的方式,通过原子层沉积与溶剂热法合成形貌尺寸均一的ZnO纳米棒阵列;进而通过激光烧蚀浸没在溶液中的高纯金属锡靶,获得高活性溶剂热前驱体;再经过溶剂热法以氧化锌阵列为基,在较温和条件下反应合成了尺寸形貌均一的ZnO/Zn2SnO4核壳结构异质结,具体步骤如下:By combining atomic layer deposition, liquid-phase laser ablation and solvothermal method, ZnO nanorod arrays with uniform morphology and size were synthesized by atomic layer deposition and solvothermal method; then high-purity metal immersed in solution was ablated by laser. A tin target was used to obtain a highly active solvothermal precursor; then a ZnO/ Zn2SnO4 core - shell heterojunction with uniform size and morphology was synthesized by a solvothermal method based on a zinc oxide array under mild conditions. Proceed as follows:

步骤1、取直径为0.5mm的锌丝,分别用去离子水、无水乙醇超声清洗30分钟并干燥,然后利用原子层沉积技术在金属锌丝表面沉积厚度为50nm的氧化锌薄膜。之后进一步通过溶剂热法在表面沿垂直方向生长氧化锌纳米棒阵列,设置的水热温度为90℃,水热时间为4h;Step 1. Take a zinc wire with a diameter of 0.5 mm, ultrasonically clean it with deionized water and anhydrous ethanol for 30 minutes and dry, and then use atomic layer deposition technology to deposit a zinc oxide film with a thickness of 50 nm on the surface of the metal zinc wire. Then, the ZnO nanorod arrays were further grown on the surface along the vertical direction by solvothermal method, the hydrothermal temperature was set to 90°C, and the hydrothermal time was set to 4h;

步骤2、在反应容器中加入60mL去离子水与1mL双氧水,将锡靶置于溶液中,并使溶液浸过靶材表面;Step 2. Add 60 mL of deionized water and 1 mL of hydrogen peroxide into the reaction vessel, place the tin target in the solution, and let the solution soak the surface of the target material;

步骤3、使用为Nd:YAG固体激光器,烧蚀浸没于溶液中的锡靶35min,脉冲频率为10Hz,激光波长为1064nm,激光能量为100mJ;Step 3, using Nd:YAG solid-state laser, ablating the tin target immersed in the solution for 35min, the pulse frequency is 10Hz, the laser wavelength is 1064nm, and the laser energy is 100mJ;

步骤4、取出金属锡靶,向溶液中加入7ml的乙醇胺;Step 4, take out the metal tin target, add 7ml of ethanolamine to the solution;

步骤5、将容器中的前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至160℃,并保温9h;Step 5. Transfer the precursor solution and the zinc oxide nanorod array in the container to the reaction kettle and heat up to 160°C, and keep the temperature for 9h;

步骤6、反应结束后,反应体系随炉冷却至室温;Step 6, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤7、将纳米棒阵列取出,利用乙醇和去离子水清洗即可得到ZnO/Zn2SnO4核壳结构异质结阵列。Step 7. The nanorod array is taken out and washed with ethanol and deionized water to obtain a ZnO/Zn 2 SnO 4 core-shell structure heterojunction array.

对制备的产物进行了表征分析,如图1-5所示。结果表明按照实施例1的工艺参数,可以获得ZnO/Zn2SnO4核壳结构异质结阵列。图1为制备的ZnO/Zn2SnO4核壳结构异质结的整体图,可以看出所获得的材料表面整洁完好。图2为中间产物ZnO阵列图。图3、图4可看出得到的ZnO/Zn2SnO4核壳结构异质结形貌尺寸均一,直径约为350nm。XRD图表明该核壳结构异质结为高纯的ZnO/Zn2SnO4The prepared products were characterized and analyzed, as shown in Figures 1-5. The results show that according to the process parameters of Example 1, a ZnO/Zn 2 SnO 4 core-shell heterojunction array can be obtained. Figure 1 is an overall view of the prepared ZnO/Zn 2 SnO 4 core-shell structure heterojunction. It can be seen that the surface of the obtained material is neat and intact. FIG. 2 is an image of the intermediate product ZnO array. Figures 3 and 4 show that the obtained ZnO/Zn 2 SnO 4 core-shell heterojunction has a uniform morphology and size, with a diameter of about 350 nm. XRD patterns show that the core-shell heterojunction is high-purity ZnO/Zn 2 SnO 4 .

实施例2Example 2

用原子层沉积、液相激光烧蚀和溶剂热法相结合的方式,通过原子层沉积与溶剂热法合成形貌尺寸均一的ZnO纳米棒阵列;进而通过激光烧蚀浸没在溶液中的高纯金属锡靶,获得高活性溶剂热前驱体;再经过溶剂热法以氧化锌阵列为基,在较温和条件下反应合成了尺寸形貌均一的ZnO/Zn2SnO4核壳结构异质结,具体步骤如下:By combining atomic layer deposition, liquid-phase laser ablation and solvothermal method, ZnO nanorod arrays with uniform morphology and size were synthesized by atomic layer deposition and solvothermal method; then high-purity metal immersed in solution was ablated by laser. A tin target was used to obtain a highly active solvothermal precursor; then a ZnO/ Zn2SnO4 core - shell heterojunction with uniform size and morphology was synthesized by a solvothermal method based on a zinc oxide array under mild conditions. Proceed as follows:

步骤1、取直径为0.1mm的钛丝,分别用去离子水、无水乙醇超声清洗30分钟并干燥,然后利用原子层沉积技术在金属钛丝表面沉积厚度为150nm的氧化锌薄膜。之后进一步通过溶剂热法在表面沿垂直方向生长氧化锌纳米棒阵列,设置的水热温度为95℃,水热时间为6h;Step 1. Take a titanium wire with a diameter of 0.1 mm, ultrasonically clean it with deionized water and anhydrous ethanol for 30 minutes and dry, and then use atomic layer deposition technology to deposit a zinc oxide film with a thickness of 150 nm on the surface of the metal titanium wire. Then, the ZnO nanorod arrays were further grown on the surface along the vertical direction by the solvothermal method. The hydrothermal temperature was set at 95 °C and the hydrothermal time was set at 6 h;

步骤2、在反应容器中加入60mL去离子水与1.5mL双氧水,将锡靶置于溶液中,并使溶液浸过靶材表面;Step 2. Add 60 mL of deionized water and 1.5 mL of hydrogen peroxide into the reaction vessel, place the tin target in the solution, and let the solution soak the surface of the target material;

步骤3、使用为Nd:YAG固体激光器,烧蚀浸没于溶液中的锡靶20min,脉冲频率为5Hz,激光波长为1064nm,激光能量为120mJ;Step 3. Use a Nd:YAG solid-state laser to ablate the tin target immersed in the solution for 20 minutes, the pulse frequency is 5Hz, the laser wavelength is 1064nm, and the laser energy is 120mJ;

步骤4、取出锡靶,向溶液中加入10ml的乙醇胺;Step 4, take out the tin target, add 10ml of ethanolamine to the solution;

步骤5、将容器中的前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至160℃,并保温15h;Step 5. Transfer the precursor solution and the zinc oxide nanorod array in the container to the reaction kettle and heat up to 160°C, and keep the temperature for 15h;

步骤6、反应结束后,反应体系随炉冷却至室温;Step 6, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤7、将纳米棒阵列取出,利用乙醇和去离子水清洗即可得到ZnO/Zn2SnO4核壳结构异质结阵列。Step 7. The nanorod array is taken out and washed with ethanol and deionized water to obtain a ZnO/Zn 2 SnO 4 core-shell structure heterojunction array.

对制备的产物进行了表征分析,如图6、图7所示。结果表明按照实施例2的工艺参数,可以获得长度为350nm左右的核壳结构异质结纳米棒阵列且形貌、尺寸均一,XRD图说明该核壳结构异质结为ZnO/Zn2SnO4The prepared products were characterized and analyzed, as shown in Figure 6 and Figure 7 . The results show that according to the process parameters of Example 2, a core-shell heterojunction nanorod array with a length of about 350 nm can be obtained with uniform morphology and size. The XRD pattern shows that the core-shell heterojunction is ZnO/Zn 2 SnO 4 .

实施例3Example 3

用原子层沉积、液相激光烧蚀和溶剂热法相结合的方式,通过原子层沉积与溶剂热法合成形貌尺寸均一的ZnO纳米棒阵列;进而通过激光烧蚀浸没在溶液中的高纯金属锡靶,获得高活性溶剂热前驱体;再经过溶剂热法以氧化锌阵列为基,在较温和条件下反应合成了尺寸形貌均一的ZnO/Zn2SnO4核壳结构异质结,具体步骤如下:By combining atomic layer deposition, liquid-phase laser ablation and solvothermal method, ZnO nanorod arrays with uniform morphology and size were synthesized by atomic layer deposition and solvothermal method; then high-purity metal immersed in solution was ablated by laser. A tin target was used to obtain a highly active solvothermal precursor; then a ZnO/ Zn2SnO4 core - shell heterojunction with uniform size and morphology was synthesized by a solvothermal method based on a zinc oxide array under mild conditions. Proceed as follows:

步骤1、取直径为1mm的锌丝,分别用去离子水、无水乙醇超声清洗30分钟并干燥,然后利用原子层沉积技术在金属锌丝表面沉积厚度为200nm的氧化锌薄膜。之后进一步通过溶剂热法在表面沿垂直方向生长氧化锌纳米棒阵列,设置的水热温度为95℃,水热时间为6h;Step 1. Take a zinc wire with a diameter of 1 mm, ultrasonically clean it with deionized water and anhydrous ethanol for 30 minutes and dry, and then use atomic layer deposition technology to deposit a zinc oxide film with a thickness of 200 nm on the surface of the metal zinc wire. Then, the ZnO nanorod arrays were further grown on the surface along the vertical direction by the solvothermal method. The hydrothermal temperature was set at 95 °C and the hydrothermal time was set at 6 h;

步骤2、在反应容器中加入60mL去离子水与3mL双氧水,将锡靶置于溶液中,并使溶液浸过靶材表面;Step 2. Add 60 mL of deionized water and 3 mL of hydrogen peroxide into the reaction vessel, place the tin target in the solution, and let the solution soak the surface of the target material;

步骤3、使用为Nd:YAG固体激光器,烧蚀浸没于溶液中的锡靶60min,脉冲频率为10Hz,激光波长为1064nm,激光能量为110mJ;Step 3, using a Nd:YAG solid-state laser, ablating the tin target immersed in the solution for 60min, the pulse frequency is 10Hz, the laser wavelength is 1064nm, and the laser energy is 110mJ;

步骤4、取出锡靶,向溶液中加入6ml的乙醇胺;Step 4, take out the tin target, add 6ml of ethanolamine to the solution;

步骤5、将容器中的前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至200℃,并保温4h;Step 5. Transfer the precursor solution and the zinc oxide nanorod array in the container to the reaction kettle and heat up to 200°C, and keep the temperature for 4h;

步骤6、反应结束后,反应体系随炉冷却至室温;Step 6, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤7、将纳米棒阵列取出,利用乙醇和去离子水清洗即可得到ZnO/Zn2SnO4核壳结构异质结阵列。Step 7. The nanorod array is taken out and washed with ethanol and deionized water to obtain a ZnO/Zn 2 SnO 4 core-shell structure heterojunction array.

对制备的产物进行了表征分析,如图8所示。结果表明按照实施例3的工艺参数,可以获得长度为350nm左右的核壳结构异质结纳米棒阵列,并且形貌、尺寸均一。The prepared products were characterized and analyzed, as shown in Figure 8. The results show that according to the process parameters of Example 3, a core-shell structure heterojunction nanorod array with a length of about 350 nm can be obtained, and the shape and size are uniform.

实施例4Example 4

用原子层沉积、液相激光烧蚀和溶剂热法相结合的方式,通过原子层沉积与溶剂热法合成形貌尺寸均一的ZnO纳米棒阵列;进而通过激光烧蚀浸没在溶液中的高纯金属锡靶,获得高活性溶剂热前驱体;再经过溶剂热法以氧化锌阵列为基,在较温和条件下反应合成了尺寸形貌均一的ZnO/Zn2SnO4核壳结构异质结,具体步骤如下:By combining atomic layer deposition, liquid-phase laser ablation and solvothermal method, ZnO nanorod arrays with uniform morphology and size were synthesized by atomic layer deposition and solvothermal method; then high-purity metal immersed in solution was ablated by laser. A tin target was used to obtain a highly active solvothermal precursor; then a ZnO/ Zn2SnO4 core - shell heterojunction with uniform size and morphology was synthesized by a solvothermal method based on a zinc oxide array under mild conditions. Proceed as follows:

步骤1、取直径为0.5mm的锌丝,分别用去离子水、无水乙醇超声清洗30分钟并干燥,然后利用原子层沉积技术在金属锌丝表面沉积厚度为100nm的氧化锌薄膜。之后进一步通过溶剂热法在表面沿垂直方向生长氧化锌纳米棒阵列,设置的水热温度为100℃,水热时间为6h;Step 1. Take a zinc wire with a diameter of 0.5 mm, ultrasonically clean it with deionized water and anhydrous ethanol for 30 minutes and dry, and then use atomic layer deposition technology to deposit a zinc oxide film with a thickness of 100 nm on the surface of the metal zinc wire. Then, the ZnO nanorod arrays were further grown on the surface along the vertical direction by the solvothermal method. The hydrothermal temperature was set to 100 °C and the hydrothermal time was set to 6 h;

步骤2、在反应容器中加入60mL去离子水与0.5mL双氧水,将锡靶置于溶液中,并使溶液浸过靶材表面;Step 2. Add 60 mL of deionized water and 0.5 mL of hydrogen peroxide into the reaction vessel, place the tin target in the solution, and let the solution soak the surface of the target material;

步骤3、使用为Nd:YAG固体激光器,烧蚀浸没于溶液中的锡靶50min,脉冲频率为10Hz,激光波长为1064nm,激光能量为80mJ;Step 3. Use a Nd:YAG solid-state laser to ablate the tin target immersed in the solution for 50 minutes, the pulse frequency is 10 Hz, the laser wavelength is 1064 nm, and the laser energy is 80 mJ;

步骤4、取出锡靶,向溶液中加入8ml的乙醇胺;Step 4, take out the tin target, add 8ml of ethanolamine to the solution;

步骤5、将容器中的前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至140℃,并保温12h;Step 5. Transfer the precursor solution and the zinc oxide nanorod array in the container to the reaction kettle and heat up to 140°C, and keep the temperature for 12h;

步骤6、反应结束后,反应体系随炉冷却至室温;Step 6, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤7、将纳米棒阵列取出,利用乙醇和去离子水清洗即可得到ZnO/Zn2SnO4核壳结构异质结阵列。Step 7. The nanorod array is taken out and washed with ethanol and deionized water to obtain a ZnO/Zn 2 SnO 4 core-shell structure heterojunction array.

对制备的产物进行了表征分析,如图9所示。结果表明按照实施例4的工艺参数,可以获得形貌、尺寸均一的核壳结构异质结纳米棒阵列。The prepared products were characterized and analyzed, as shown in Figure 9. The results show that according to the process parameters of Example 4, a core-shell structure heterojunction nanorod array with uniform morphology and size can be obtained.

实施例5Example 5

用原子层沉积、液相激光烧蚀和溶剂热法相结合的方式,通过原子层沉积与溶剂热法合成形貌尺寸均一的ZnO纳米棒阵列;进而通过激光烧蚀浸没在溶液中的高纯金属锡靶,获得高活性溶剂热前驱体;再经过溶剂热法以氧化锌阵列为基,在较温和条件下反应合成了尺寸形貌均一的ZnO/Zn2SnO4核壳结构异质结,具体步骤如下:By combining atomic layer deposition, liquid-phase laser ablation and solvothermal method, ZnO nanorod arrays with uniform morphology and size were synthesized by atomic layer deposition and solvothermal method; then high-purity metal immersed in solution was ablated by laser. A tin target was used to obtain a highly active solvothermal precursor; then a ZnO/ Zn2SnO4 core - shell heterojunction with uniform size and morphology was synthesized by a solvothermal method based on a zinc oxide array under mild conditions. Proceed as follows:

步骤1、取直径为0.5mm的锌丝,分别用去离子水、无水乙醇超声清洗30分钟并干燥,然后利用原子层沉积技术在金属锌丝表面沉积厚度为200nm的氧化锌薄膜。之后进一步通过溶剂热法在表面沿垂直方向生长氧化锌纳米棒阵列,设置的水热温度为120℃,水热时间为8h;Step 1. Take a zinc wire with a diameter of 0.5 mm, ultrasonically clean it with deionized water and absolute ethanol for 30 minutes and dry, and then use atomic layer deposition technology to deposit a zinc oxide film with a thickness of 200 nm on the surface of the metal zinc wire. Then, the ZnO nanorod arrays were further grown on the surface along the vertical direction by the solvothermal method, the hydrothermal temperature was set to 120 °C, and the hydrothermal time was set to 8 h;

步骤2、在反应容器中加入60mL去离子水与4mL双氧水,将锡靶置于溶液中,并使溶液浸过靶材表面;Step 2. Add 60 mL of deionized water and 4 mL of hydrogen peroxide into the reaction vessel, place the tin target in the solution, and let the solution soak the surface of the target material;

步骤3、使用为Nd:YAG固体激光器,烧蚀浸没于溶液中的锡靶40min,脉冲频率为5Hz,激光波长为1064nm,激光能量为90mJ;Step 3. Use a Nd:YAG solid-state laser to ablate the tin target immersed in the solution for 40 min, the pulse frequency is 5 Hz, the laser wavelength is 1064 nm, and the laser energy is 90 mJ;

步骤4、取出锡靶,向溶液中加入12ml的乙醇胺;Step 4, take out the tin target, add 12ml of ethanolamine to the solution;

步骤5、将容器中的前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至180℃,并保温6h;Step 5. Transfer the precursor solution and the zinc oxide nanorod array in the container to the reaction kettle and heat up to 180°C, and keep the temperature for 6h;

步骤6、反应结束后,反应体系随炉冷却至室温;Step 6, after the reaction finishes, the reaction system is cooled to room temperature with the furnace;

步骤7、将纳米棒阵列取出,利用乙醇和去离子水清洗即可得到ZnO/Zn2SnO4核壳结构异质结阵列。Step 7. The nanorod array is taken out and washed with ethanol and deionized water to obtain a ZnO/Zn 2 SnO 4 core-shell structure heterojunction array.

对制备的产物进行了表征分析,如图10所示。结果表明按照实施例5的工艺参数,可以获得形貌、尺寸均一的核壳结构异质结纳米棒阵列。The prepared products were characterized and analyzed, as shown in Figure 10. The results show that according to the process parameters of Example 5, a core-shell structure heterojunction nanorod array with uniform morphology and size can be obtained.

Claims (6)

1.一种氧化锌/锡酸锌核壳结构异质结的制备方法,其特征在于,包括以下步骤:1. a preparation method of zinc oxide/zinc stannate core-shell structure heterojunction, is characterized in that, comprises the following steps: 步骤1、分别用去离子水、无水乙醇对柔性纤维状细金属丝超声清洗并干燥;Step 1. Ultrasonic cleaning and drying of flexible fibrous thin metal wires with deionized water and absolute ethanol respectively; 步骤2、用原子层沉积方法在金属丝表面沉积氧化锌薄膜作为种子层;Step 2, depositing a zinc oxide film on the surface of the metal wire by atomic layer deposition as a seed layer; 步骤3、用溶剂热法在种子层表面沿垂直方向生长氧化锌纳米棒阵列;Step 3, growing a ZnO nanorod array along the vertical direction on the surface of the seed layer by a solvothermal method; 步骤4、在反应容器中加入配制好的溶液,将锡源靶材置于溶液中,并使溶液浸过靶材表面;所述配制好的溶液为乙醇、去离子水和双氧水的混合液,其中乙醇与去离子水体积比为0:1~1:1,去离子水与双氧水的体积比为15:1~120:1,锡源靶材为纯度大于99.9%高纯金属锡靶;Step 4. Add the prepared solution to the reaction vessel, place the tin source target in the solution, and let the solution soak the surface of the target; the prepared solution is a mixture of ethanol, deionized water and hydrogen peroxide, The volume ratio of ethanol to deionized water is 0:1 to 1:1, the volume ratio of deionized water to hydrogen peroxide is 15:1 to 120:1, and the tin source target is a high-purity metal tin target with a purity greater than 99.9%; 步骤5、调节激光器的脉冲激光光束的光路,使激光光束聚焦在溶液液面以下的锡源靶材,设置激光波长、频率及能量,开启脉冲激光,对反应容器中的锡源靶材进行烧蚀反应;在激光烧蚀过程中采用磁力搅拌器持续搅拌溶液直至烧蚀结束;Step 5. Adjust the optical path of the pulsed laser beam of the laser to focus the laser beam on the tin source target below the liquid level of the solution, set the laser wavelength, frequency and energy, turn on the pulsed laser, and burn the tin source target in the reaction vessel. During the laser ablation process, a magnetic stirrer was used to continuously stir the solution until the end of the ablation; 步骤6、取出锡源靶材,向激光烧蚀后得到的前驱体溶液中加入辅助剂;将前驱体溶液与氧化锌纳米棒阵列转移至反应釜中升温至设定温度,并保温;所述辅助剂为浓度99.8%的乙醇胺,乙醇胺与总溶液体积比为1:6~1:12;Step 6, take out the tin source target material, add auxiliary agent to the precursor solution obtained after laser ablation; transfer the precursor solution and the zinc oxide nanorod array to the reaction kettle and heat up to the set temperature, and keep the temperature; The adjuvant is ethanolamine with a concentration of 99.8%, and the volume ratio of ethanolamine to the total solution is 1:6 to 1:12; 步骤7、反应结束后,反应体系随炉冷却至室温;Step 7, after the reaction finishes, the reaction system is cooled to room temperature with the furnace; 步骤8、将纳米棒阵列取出,利用有机溶剂清洗即可得到氧化锌/锡酸锌核壳结构异质结。Step 8. The nanorod array is taken out and washed with an organic solvent to obtain a zinc oxide/zinc stannate core-shell structure heterojunction. 2.根据权利要求1所述的一种氧化锌/锡酸锌核壳结构异质结的制备方法,其特征在于,步骤1所述金属丝包括钛丝或锌丝,直径为0.1~1mm。2 . The method for preparing a zinc oxide/zinc stannate core-shell heterojunction according to claim 1 , wherein the metal wire in step 1 comprises titanium wire or zinc wire, and the diameter is 0.1-1 mm. 3 . 3.根据权利要求1所述的一种氧化锌/锡酸锌核壳结构异质结的制备方法,其特征在于,步骤2所述原子层沉积的氧化锌薄膜厚度为50~200nm。3 . The method for preparing a zinc oxide/zinc stannate core-shell heterojunction according to claim 1 , wherein the thickness of the zinc oxide film deposited by atomic layer deposition in step 2 is 50-200 nm. 4 . 4.根据权利要求1所述的一种氧化锌/锡酸锌核壳结构异质结的制备方法,其特征在于,步骤3所述溶剂热法设置的水热温度为90~120℃,水热时间为4~8h。4. The preparation method of a zinc oxide/zinc stannate core-shell heterojunction according to claim 1, wherein the hydrothermal temperature set by the solvothermal method in step 3 is 90-120°C, and the water The heating time is 4-8h. 5.根据权利要求1所述的一种氧化锌/锡酸锌核壳结构异质结的制备方法,其特征在于,步骤5中激光器为Nd:YAG固体激光器,脉冲频率为5~10Hz,激光波长为1064nm,激光能量为80~120mJ,激光烧蚀时间为20~60min。5. the preparation method of a kind of zinc oxide/zinc stannate core-shell heterojunction according to claim 1, is characterized in that, in step 5, the laser is Nd:YAG solid-state laser, and the pulse frequency is 5~10Hz, and the laser The wavelength is 1064nm, the laser energy is 80-120mJ, and the laser ablation time is 20-60min. 6.根据权利要求1所述的一种氧化锌/锡酸锌核壳结构异质结的制备方法,其特征在于,步骤6中设定温度为140~200℃,保温时间为4~15h。6 . The method for preparing a zinc oxide/zinc stannate core-shell heterojunction according to claim 1 , wherein in step 6, the set temperature is 140-200° C., and the holding time is 4-15 h. 7 .
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