CN110767811A - Photoelectric detector of methylamine lead iodoperovskite single crystal nanowire and preparation method - Google Patents

Photoelectric detector of methylamine lead iodoperovskite single crystal nanowire and preparation method Download PDF

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CN110767811A
CN110767811A CN201911031392.7A CN201911031392A CN110767811A CN 110767811 A CN110767811 A CN 110767811A CN 201911031392 A CN201911031392 A CN 201911031392A CN 110767811 A CN110767811 A CN 110767811A
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single crystal
methylamine lead
nanowires
lead iodide
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崔艳霞
高芮
刘艳珍
李国辉
冀婷
王文艳
郝玉英
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Taiyuan University of Technology
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Abstract

本发明涉及微纳光电探测器设计与制备的技术领域,一种甲胺铅碘钙钛矿单晶纳米线光电探测器,该甲胺铅碘钙钛矿单晶纳米线光电探测器为处于玻璃衬底上的蒸镀有电极的直径在100至300 nm间,长度为100至200μm的甲胺铅碘钙钛矿纳米线。在金属纳米孤岛催化作用下利用化学气相沉积法生长一种一维碘化铅单晶纳米线,纳米线长为100至200微米、直径为100至300纳米,利用化学气相沉积法将碘化铅单晶纳米线转化为甲胺铅碘钙钛矿单晶纳米线,将甲胺铅碘钙钛矿纳米线转移至玻璃衬底,并蒸镀电极,制得甲胺铅碘钙钛矿纳米线光电探测器。本发明还涉及甲胺铅碘钙钛矿单晶纳米线光电探测器制备方法。

Figure 201911031392

The invention relates to the technical field of design and preparation of micro-nano photodetectors, a methylamine lead iodide perovskite single crystal nanowire photodetector, the methylamine lead iodide perovskite single crystal nanowire photodetector is in glass Evaporated on the substrate are methylamine lead iodide perovskite nanowires with electrodes ranging from 100 to 300 nm in diameter and 100 to 200 μm in length. A one-dimensional lead iodide single crystal nanowire with a length of 100 to 200 microns and a diameter of 100 to 300 nanometers was grown by chemical vapor deposition under the catalysis of metal nano-islands. The single crystal nanowires were converted into methylamine lead iodide perovskite single crystal nanowires, the methylamine lead iodide perovskite nanowires were transferred to a glass substrate, and electrodes were evaporated to obtain methylamine lead iodide perovskite nanowires Photodetector. The invention also relates to a method for preparing a methylamine lead iodide perovskite single crystal nanowire photodetector.

Figure 201911031392

Description

一种甲胺铅碘钙钛矿单晶纳米线的光电探测器及制备方法A kind of photodetector of methylamine lead iodide perovskite single crystal nanowire and preparation method

技术领域technical field

本发明涉及微纳光电探测器设计与制备的技术领域,特别是涉及一种金属卤化物钙钛矿单晶纳米线及其制造方法。The invention relates to the technical field of design and preparation of micro-nano photodetectors, in particular to a metal halide perovskite single crystal nanowire and a manufacturing method thereof.

背景技术Background technique

光电探测器是一种将特定波段的光信号转化为电信号的仪器,在光通信、导弹制导、夜视系统、生物传感等领域均有广泛的应用前景。因此,研制与开发实用化的微型探测器在国际上受到了广泛重视。有机/无机杂化金属卤化物钙钛矿材料具有优异的光电学性能:吸光系数高、吸收波谱覆盖从紫外到近红外的宽谱区域、激子寿命长、载流子传输距离长、高荧光产率以及波长可调谐等。报道的钙钛矿太阳能电池的能量转化效率已超过24%。并且,基于钙钛矿材料的LED、激光器、光电探测器、场效应晶体管等光电子器件也表现优异。特别地,以钙钛矿材料作为吸光层的探测器具有高强度、高稳定性以及易控制的优点。A photodetector is an instrument that converts optical signals in a specific band into electrical signals. It has wide application prospects in the fields of optical communication, missile guidance, night vision systems, and biological sensing. Therefore, the research and development of practical micro-detectors have received extensive attention in the world. Organic/inorganic hybrid metal halide perovskite materials have excellent optoelectronic properties: high absorption coefficient, absorption spectrum covering a broad spectral region from ultraviolet to near-infrared, long exciton lifetime, long carrier transport distance, high fluorescence Yield and wavelength tunable, etc. The reported energy conversion efficiency of perovskite solar cells has exceeded 24%. In addition, optoelectronic devices such as LEDs, lasers, photodetectors, and field-effect transistors based on perovskite materials also perform well. In particular, detectors using perovskite materials as light-absorbing layers have the advantages of high intensity, high stability, and easy control.

迄今为止,研究人员已经使用多种方法来生长钙钛矿纳米线结构。这些方法主要分为两类:溶液法与化学气相沉积法。化学气相沉积方法通过控制衬底位置、反应温度、反应时间、气流量和气流速度等,可以精细控制纳米线的长度、直径和结晶度等。而且相比于溶液法,气相沉积过程中减少了溶剂的掺入,有望进一步提高晶体的结晶质量。To date, researchers have used a variety of methods to grow perovskite nanowire structures. These methods are mainly divided into two categories: solution method and chemical vapor deposition method. The chemical vapor deposition method can finely control the length, diameter and crystallinity of nanowires by controlling the substrate position, reaction temperature, reaction time, gas flow rate and gas velocity. Moreover, compared with the solution method, the incorporation of solvent is reduced in the vapor deposition process, which is expected to further improve the crystallization quality of the crystal.

2015年,南洋理工大学熊启华小组利用化学气相沉积法在Si/SiO2(285纳米)衬底上生长了甲胺铅碘钙钛矿单晶纳米线(Nano letters, 2015, 15(7): 4571-4577.),根据论文中数据,甲胺铅碘钙钛矿单晶纳米线长大于20微米,直径为200纳米左右。甲胺铅碘钙钛矿单晶纳米线的制备方法为:步骤一,利用丙酮、乙醇、去离子水清洗衬底;步骤二,利用化学气相沉积法制备碘化铅纳米线:沉积温度380 ℃,沉积时间15分钟;步骤三,利用化学气相沉积法将碘化铅纳米线转化为甲胺铅碘钙钛矿单晶纳米线,但是该甲胺铅碘钙钛矿单晶纳米线密度小且长度短的问题,且生长的纳米线为垂直生长,转移时容易断裂,不利于后期光电器件的制备。In 2015, Xiong Qihua's group of Nanyang Technological University used chemical vapor deposition to grow methylamine lead iodide perovskite single crystal nanowires on Si/SiO 2 (285 nm) substrates (Nano letters, 2015, 15(7): 4571 -4577.), according to the data in the paper, methylamine lead iodide perovskite single crystal nanowires are longer than 20 microns and about 200 nanometers in diameter. The preparation method of methylamine lead iodide perovskite single crystal nanowires is as follows: step 1, use acetone, ethanol and deionized water to clean the substrate; step 2, use chemical vapor deposition method to prepare lead iodide nanowires: the deposition temperature is 380 ℃ , the deposition time is 15 minutes; in step 3, chemical vapor deposition method is used to convert the lead iodide nanowires into methylamine lead iodide perovskite single crystal nanowires, but the methylamine lead iodide perovskite single crystal nanowires have a low density and The problem of short length, and the grown nanowires are vertical growth, easy to break during transfer, which is not conducive to the preparation of later optoelectronic devices.

发明内容SUMMARY OF THE INVENTION

本发明所要解决的技术问题是:如何克服背景技术中的不足,提供一种水平生长,密度大且长度长的甲胺铅碘钙钛矿单晶纳米线制备甲胺铅碘钙钛矿单晶纳米线的光电探测器。The technical problem to be solved by the present invention is: how to overcome the deficiencies in the background technology, and provide a kind of horizontal growth, high density and long length of methylamine lead iodine perovskite single crystal nanowires to prepare methylamine lead iodide perovskite single crystal Photodetectors of nanowires.

本发明所采用的技术方案是:一种甲胺铅碘钙钛矿单晶纳米线光电探测器,该甲胺铅碘钙钛矿单晶纳米线光电探测器为处于玻璃衬底上的蒸镀有电极的直径在100至300nm间,长度为100至200 μm的甲胺铅碘钙钛矿纳米线。在金属纳米孤岛催化作用下利用化学气相沉积法生长一种一维碘化铅单晶纳米线,纳米线长为100至200微米、直径为100至300纳米,利用化学气相沉积法将碘化铅单晶纳米线转化为甲胺铅碘钙钛矿单晶纳米线,将甲胺铅碘钙钛矿纳米线转移至玻璃衬底,并蒸镀电极,制得甲胺铅碘钙钛矿纳米线光电探测器。The technical scheme adopted in the present invention is: a methylamine lead iodide perovskite single crystal nanowire photodetector, the methylamine lead iodide perovskite single crystal nanowire photodetector is a vapor deposition on a glass substrate There are methylamine lead iodide perovskite nanowires with electrodes between 100 and 300 nm in diameter and 100 to 200 μm in length. A one-dimensional lead iodide single crystal nanowire with a length of 100 to 200 microns and a diameter of 100 to 300 nanometers was grown by chemical vapor deposition under the catalysis of metal nano-islands. The single crystal nanowires are converted into methylamine lead iodide perovskite single crystal nanowires, the methylamine lead iodide perovskite nanowires are transferred to the glass substrate, and the electrodes are evaporated to obtain methylamine lead iodide perovskite nanowires Photodetector.

一种甲胺铅碘钙钛矿单晶纳米线光电探测器制备方法,按照如下的步骤进行A method for preparing a methylamine lead iodine perovskite single crystal nanowire photodetector, which is carried out according to the following steps

步骤一、真空热沉积法在载玻片上制备均匀分布的金纳米孤岛;Step 1. Prepare evenly distributed gold nano-islands on a glass slide by vacuum thermal deposition;

步骤二、将研成粉末的碘化铅药品放入石英舟,将石英舟放置入石英玻璃管内中心位置,将带金纳米孤岛的载玻片放置在石英玻璃管内,带金纳米孤岛的载玻片距离碘化铅药品中心8-10 cm,在Ar和H2体积比为10:1的混合气保护下,调节压强为0.02 MPa,加热到400℃保温20 min后自然冷却到室温,在载玻片上获得碘化铅单晶纳米线;Step 2: Put the powdered lead iodide medicine into the quartz boat, place the quartz boat in the center of the quartz glass tube, place the glass slide with gold nano-islands in the quartz glass tube, and place the glass slide with gold nano-islands in the quartz glass tube. The tablet is 8-10 cm away from the lead iodide drug center. Under the protection of a mixture of Ar and H 2 volume ratio of 10:1, the pressure is adjusted to 0.02 MPa, heated to 400 °C for 20 min, and then cooled to room temperature naturally. Lead iodide single crystal nanowires were obtained on glass slides;

步骤三、将甲基碘化铵药品放入石英舟,将石英舟放置入石英玻璃管内中心位置,将带碘化铅单晶纳米线的载玻片放置在石英玻璃管内,衬底位置距离药品中心6 cm,排除空气,在Ar气保护下,调节压强为0-0.01 MPa,加热到120℃保温90 min后自然冷却到室温,在载玻片上获得甲胺铅碘钙钛矿单晶纳米线;Step 3. Put the methyl ammonium iodide medicine into the quartz boat, place the quartz boat in the center of the quartz glass tube, place the glass slide with the lead iodide single crystal nanowires in the quartz glass tube, and place the substrate away from the medicine. The center is 6 cm, and the air is excluded. Under the protection of Ar gas, the pressure is adjusted to 0-0.01 MPa, heated to 120 °C for 90 min, and then cooled to room temperature naturally to obtain methylamine lead iodide perovskite single crystal nanowires on a glass slide. ;

步骤四、将载玻片上的甲胺铅碘钙钛矿单晶纳米线移动到玻璃衬底上;在甲胺铅碘钙钛矿单晶纳米线密集区域加载掩模板,然后利用真空热沉积法蒸镀金电极,蒸镀完成后去掉掩模板,获得甲胺铅碘钙钛矿单晶纳米线光电探测器。Step 4. Move the methylamine lead iodide perovskite single crystal nanowires on the glass slide to the glass substrate; load a mask in the dense area of the methylamine lead iodide perovskite single crystal nanowires, and then use the vacuum thermal deposition method A gold electrode is evaporated, and the mask is removed after the evaporation is completed to obtain a methylamine lead iodide perovskite single crystal nanowire photodetector.

步骤一中,选用0.1 Å/s的慢速沉积,沉积厚度为20 nm。此时,金纳米孤岛形貌为随机分布的岛状颗粒,未连成薄膜,实验证明在这种慢速的沉积速率下,金属膜在厚度不足时形貌为孤立的岛状,只有沉积厚度达到足够厚,这些孤立的岛才能连接成膜。In step 1, a slow deposition of 0.1 Å/s was used, and the deposition thickness was 20 nm. At this time, the morphology of the gold nano-islands is a random distribution of island-like particles, which are not connected to form a thin film. It is thick enough that these isolated islands can connect to form a film.

步骤四中,将载玻片上的甲胺铅碘钙钛矿单晶纳米线利用接触加压的方法移动到洁净的玻璃衬底上。In the fourth step, the methylamine lead iodide perovskite single crystal nanowires on the glass slide are moved to a clean glass substrate by means of contact pressure.

步骤四中,在甲胺铅碘钙钛矿单晶纳米线密集区域加载铜网掩模板,然后利用真空热沉积法蒸镀金电极,蒸镀速率控制为2 Å /s,厚度为50 nm,并蒸镀150 nm的铝膜加固金电极,铝电极的蒸镀速率为匀速2 Å /s,蒸镀完成后去掉铜网掩模板,获得甲胺铅碘钙钛矿单晶纳米线光电探测器。In step 4, a copper mesh mask is loaded on the dense area of methylamine lead iodide perovskite single crystal nanowires, and then the gold electrode is evaporated by vacuum thermal deposition method, the evaporation rate is controlled to 2 Å/s, the thickness is 50 nm, and the thickness is 50 nm. A 150 nm aluminum film was evaporated to reinforce the gold electrode, and the evaporation rate of the aluminum electrode was a constant rate of 2 Å/s. After the evaporation was completed, the copper mesh mask was removed to obtain a methylamine lead iodide perovskite single crystal nanowire photodetector.

本发明的有益效果是:在金属纳米孤岛的催化下化学气相沉积的碘化铅纳米线的长度有大幅度提高,且经由化学气相沉积转化成的甲胺铅碘钙钛矿纳米线长度也相应较长。本发明合成工艺操作简单、成功率高且易于控制、成本较低。金属纳米孤岛利用真空热沉积制备的,一次可制备大量衬底。载玻片易于切割清洗是一种经济的基底材料。化学气相沉积与金纳米孤岛结合生长的纳米线长为100至200微米、直径为100至300纳米,本发明步骤三将碘化铅单晶纳米线转化为甲胺铅碘钙钛矿单晶纳米线,得到了远长于文献报道的化学气相沉积合成的甲胺铅碘钙钛矿单晶纳米线。目前热蒸镀法结合图案化的掩模板制备电极技术广泛应用于光电子器件中,对于共面型光电探测器而言,纳米线长度太短不利与器件的电极制备,需要更加精细的掩模。而相对较长的纳米线在此方面提供了极大的便利,有利于光电探测器的制备,更有利于材料的实际应用。而且长的纳米线更易于实现单根纳米线上器件的集成,为器件的调控提供了更大的可能性。The beneficial effects of the invention are as follows: the length of the lead iodide nanowires deposited by chemical vapor deposition under the catalysis of the metal nano-island is greatly improved, and the length of the methylamine lead iodide perovskite nanowires converted by chemical vapor deposition is also corresponding longer. The synthesis process of the invention has the advantages of simple operation, high success rate, easy control and low cost. Metal nano-islands are prepared by vacuum thermal deposition, and a large number of substrates can be prepared at one time. Slides are easy to cut and clean and are an economical substrate material. The nanowires grown in combination with chemical vapor deposition and gold nano-islands are 100 to 200 microns in length and 100 to 300 nanometers in diameter. Step 3 of the present invention converts lead iodide single crystal nanowires into methylamine lead iodide perovskite single crystal nanowires Wires, and obtained methylamine lead iodide perovskite single crystal nanowires synthesized by chemical vapor deposition much longer than reported in the literature. At present, thermal evaporation combined with patterned masks to prepare electrodes is widely used in optoelectronic devices. For coplanar photodetectors, the nanowire length is too short, which is not conducive to the electrode preparation of the device, and requires a finer mask. The relatively long nanowires provide great convenience in this respect, which is beneficial to the preparation of photodetectors and is more beneficial to the practical application of materials. Moreover, long nanowires are easier to realize the integration of devices on a single nanowire, which provides greater possibilities for device regulation.

附图说明Description of drawings

图1:甲胺铅碘钙钛矿纳米线晶体的光学显微图和SEM图;Figure 1: Optical micrographs and SEM images of methylamine lead iodide perovskite nanowire crystals;

图2:碘化铅和甲胺铅碘钙钛矿纳米线晶体的吸收光谱和荧光光谱;Figure 2: Absorption and fluorescence spectra of lead iodide and methylamine lead iodide perovskite nanowire crystals;

图3:甲胺铅碘钙钛矿纳米线晶体的XRD衍射图;Figure 3: XRD diffraction pattern of methylamine lead iodide perovskite nanowire crystals;

图4:甲胺铅碘钙钛矿纳米线光电探测器的暗态及亮态电流-电压(I-V)曲线。Figure 4: Dark and bright state current-voltage (I-V) curves of methylamine lead iodide perovskite nanowire photodetectors.

具体实施方式Detailed ways

本发明所使用的材料有:碘化铅(碘化铅)、甲基碘化铵(CH3NH3I)、载玻片、乙醇、异丙醇、去离子水、氩气、氢气、洗洁精。其用量如下:The materials used in the present invention are: lead iodide (lead iodide), methylammonium iodide (CH 3 NH 3 I), glass slides, ethanol, isopropanol, deionized water, argon, hydrogen, washing detergent. The dosage is as follows:

碘化铅:0.15 g±0.001 gLead iodide: 0.15 g ± 0.001 g

CH3NH3I:0.15 g±0.001 gCH 3 NH 3 I: 0.15 g ± 0.001 g

乙醇:50 mL±5 mLEthanol: 50 mL ± 5 mL

异丙醇:50 mL±5 mLIsopropyl alcohol: 50 mL±5 mL

去离子水:100 mL±5 mLDeionized water: 100 mL±5 mL

洗洁精:2 mL±0.1 mLDishwashing liquid: 2 mL±0.1 mL

载玻片:10 mm×7 mmSlide: 10 mm × 7 mm

本发明为一种一维甲胺铅碘钙钛矿纳米线的制备方法,在用去离子水、乙醇、异丙醇清洗干净的载玻片上热蒸镀金纳米孤岛,利用化学气相沉积法在载玻片上生长一维碘化铅纳米线,利用化学气相沉积法将碘化铅纳米线转化为甲胺铅碘钙钛矿单晶纳米线。The invention relates to a preparation method of one-dimensional methylamine lead iodide perovskite nanowires. Gold nano-islands are thermally evaporated on a glass slide cleaned with deionized water, ethanol and isopropanol, and chemical vapor deposition One-dimensional lead iodide nanowires were grown on glass slides, and the lead iodide nanowires were transformed into methylamine lead iodide perovskite single crystal nanowires by chemical vapor deposition.

具体制备方法如下:The specific preparation method is as follows:

1.精选化学物质1. Selected chemicals

对制备所需的化学物质材料要进行精选,并进行质量、纯度、浓度、细度、精度控制:The chemical materials required for the preparation should be selected, and the quality, purity, concentration, fineness and precision should be controlled:

碘化铅:固态颗粒,纯度99. 999 %Lead iodide: solid particles, purity 99.999%

CH3NH3I:固态粉体,纯度99.5 %CH 3 NH 3 I: solid powder, purity 99.5 %

丙酮:液态液体,纯度99.8 %Acetone: liquid liquid, purity 99.8 %

乙醇:液态液体,分析纯Ethanol: liquid liquid, analytically pure

异丙醇:液态液体,纯度99.8 %Isopropyl alcohol: liquid liquid, purity 99.8 %

去离子水:18.2 MΩ*cmDeionized water: 18.2 MΩ*cm

载玻片:帆船牌载玻片Glass slides: Sailing glass slides

氩气:99.9 %Argon: 99.9%

氢气:99.9 %Hydrogen: 99.9%

2.载玻片的切割清洗2. Cutting and cleaning of slides

将载玻片切割成10 mm×7 mm大小,用洗洁精、去污粉超声清洗30分钟,搓洗正反面1分钟,用去离子水、乙醇、异丙醇分别超声清洗15分钟,保存在异丙醇溶液中待用。The slides were cut into 10 mm × 7 mm size, ultrasonically cleaned with detergent and decontamination powder for 30 minutes, scrubbed front and back for 1 minute, ultrasonically cleaned with deionized water, ethanol, and isopropanol for 15 minutes, respectively, and stored in Isopropanol solution for use.

3. 制备金属种子孤岛3. Preparation of metal seed islands

1) 检查真空热沉积设备运行是否正常,钨舟与电源接触是否良好;1) Check whether the vacuum thermal deposition equipment is running normally, and whether the tungsten boat is in good contact with the power supply;

2) 取干净的烘干的载玻片,用高温胶带贴于蒸镀掩模板下方;2) Take a clean dried glass slide and stick it under the evaporation mask with high temperature tape;

3) 打开真空热沉积设备,将掩模板固定于腔内顶部转盘上,注意放置过程,小心污染衬底;3) Turn on the vacuum thermal deposition equipment, fix the mask on the top turntable in the chamber, pay attention to the placement process, and be careful to contaminate the substrate;

4) 将金属放入腔内底部的待用钨舟上;4) Put the metal on the ready-to-use tungsten boat at the bottom of the cavity;

5) 检查腔内待用的石英晶振片探头是否正常使用,调节其位置使对准待沉积衬底;5) Check whether the quartz crystal probe to be used in the cavity is in normal use, and adjust its position to align with the substrate to be deposited;

6) 关闭腔门,操作真空热沉积设备自动抽真空,待腔内真空度到达6 ´ 10-4 Pa;6) Close the chamber door, operate the vacuum thermal deposition equipment to automatically evacuate, and wait until the vacuum degree in the chamber reaches 6 ´ 10 -4 Pa;

7) 开启转盘,使衬底随之旋转,确保膜层均匀;7) Turn on the turntable to rotate the substrate along with it to ensure that the film layer is uniform;

8) 开始加热钨舟,开启石英晶振片探头监测沉积速率,待速率稳定,打开大挡板,开始蒸镀;8) Start heating the tungsten boat, turn on the quartz crystal probe to monitor the deposition rate, and when the rate is stable, open the large baffle and start evaporation;

9) 膜厚监测达到所需厚度,蒸镀完成;9) When the film thickness monitoring reaches the required thickness, the evaporation is completed;

10) 取样品,用镊子小心地去除高温胶带,注意勿划伤膜层,影响之后的实验;10) Take the sample, carefully remove the high temperature tape with tweezers, be careful not to scratch the film layer, which will affect the subsequent experiments;

11) 将制备好的镀有金属种子层的衬底保存手套箱待用,目的是隔绝空气中的水、氧,防止金属种子层氧化。11) The prepared substrate plated with the metal seed layer is stored in a glove box for later use, in order to isolate water and oxygen in the air and prevent the oxidation of the metal seed layer.

4. 制备一维碘化铅纳米线4. Preparation of one-dimensional lead iodide nanowires

1) 取一根50 cm长、内径为2.54 cm的石英玻璃管进行清洗,然后放入烘干箱烘干(10min)。1) Take a quartz glass tube with a length of 50 cm and an inner diameter of 2.54 cm for cleaning, and then put it into a drying box to dry (10min).

2) 将烘干的石英玻璃管用氮气吹尘1 min,对石英玻璃管标记前端与末端。2) Blow the dried quartz glass tube with nitrogen for 1 min, and mark the front and end of the quartz glass tube.

3) 将具有金纳米孤岛的载玻片利用高温胶带固定在石英玻璃管气流下游位置(距离管末端8cm处)的顶部,金纳米孤岛表面朝下。3) Fix the glass slide with gold nano-islands on the top of the downstream position of the quartz glass tube (8cm from the end of the tube) with high-temperature tape, with the surface of the gold nano-islands facing down.

4) 称量0.15 g 纯度为99.999%的碘化铅药品,研碎为粉末状,将碘化铅药品放置于石英舟中,将石英舟推入石英玻璃管中央位置。4) Weigh 0.15 g lead iodide medicine with a purity of 99.999%, grind it into powder, place the lead iodide medicine in a quartz boat, and push the quartz boat into the center of the quartz glass tube.

5) 将装有药品与载玻片的石英玻璃管放入管式炉,石英玻璃管的前端与末端分别连接进口阀和出气阀,通过出气口对石英玻璃管抽真空(2 min),关闭出气阀,管内通入Ar+H2混合气(Ar 95%,H2 5%),待管内压力达到0.03MPa时,打开出气阀,将管内残余的微量空气排出。5) Put the quartz glass tube containing medicines and glass slides into the tube furnace. The front end and end of the quartz glass tube are connected to the inlet valve and the gas outlet valve respectively, and the quartz glass tube is evacuated through the gas outlet (2 min) and closed. Air outlet valve, Ar+H 2 mixed gas (Ar 95%, H 2 5%) is introduced into the tube. When the pressure in the tube reaches 0.03MPa, the air outlet valve is opened to discharge the residual trace air in the tube.

6) 加热石英玻璃管到400 ℃,恒温400 ℃保持20 min,设置气流速率Ar:30sscm、H2:3 sccm,通过调节出气阀调节管内压强为0.02 MPa。6) Heat the quartz glass tube to 400 °C, keep the constant temperature at 400 °C for 20 min, set the airflow rate Ar: 30 sscm, H 2 : 3 sccm, and adjust the pressure in the tube to 0.02 MPa by adjusting the air outlet valve.

7) 恒温阶段结束后,关闭进气阀,当管内压力降为0 MPa时,关闭出气阀,让石英玻璃管自然冷却到室温,便在载玻片上获得了沉积好的一维碘化铅纳米线晶体。7) After the constant temperature stage, close the inlet valve. When the pressure in the tube drops to 0 MPa, close the outlet valve and let the quartz glass tube cool to room temperature naturally, and the deposited one-dimensional lead iodide nanoparticles are obtained on the slide. Line crystals.

5. 碘化铅纳米线转化为甲胺铅碘钙钛矿纳米线5. Conversion of lead iodide nanowires to methylamine lead iodide perovskite nanowires

1) 用尺子、记号笔标记石英管中心位置(记为药品位置)、距离中心6 cm位置(记为样品位置);1) Use a ruler and a marker to mark the center position of the quartz tube (marked as the drug position) and the position 6 cm away from the center (marked as the sample position);

2) 将碘化铅纳米线样品用高温胶带粘贴于石英管内部相应位置;2) Paste the lead iodide nanowire sample on the corresponding position inside the quartz tube with high temperature tape;

3) 称量MAI药品0.15 g,放进石英舟中,将石英舟推入石英管中心位置;3) Weigh 0.15 g of MAI medicine, put it into the quartz boat, and push the quartz boat into the center of the quartz tube;

4) 将放有碘化铅纳米线样品与药品的石英管放入管式炉,使得药品正对加热区中心位置;4) Put the quartz tube with the lead iodide nanowire sample and the medicine into the tube furnace, so that the medicine is facing the center of the heating zone;

5) 固定并用法兰封闭石英管;5) Fix and seal the quartz tube with a flange;

6) 开始加热药品前需要抽真空2 min,然后通入惰性气体Ar气,流速30 sccm同时控制管内压强在0 Mpa至0.01 Mpa之间;6) Before heating the medicine, it needs to be vacuumed for 2 minutes, and then the inert gas Ar gas is introduced, the flow rate is 30 sccm, and the pressure in the tube is controlled between 0 Mpa and 0.01 Mpa;

7) 加热石英管到120 ℃,反应90 min后,停止气流,封闭石英管。7) Heat the quartz tube to 120 °C, after 90 min of reaction, stop the gas flow and seal the quartz tube.

8) 待石英管冷却至室温,取出样品。8) After the quartz tube has cooled to room temperature, take out the sample.

6. 甲胺铅碘钙钛矿纳米线光电探测器制备——电极制备6. Preparation of methylamine lead iodide perovskite nanowire photodetectors—electrode preparation

1) 将生长有的纳米线的衬底与洁净的玻璃衬底相互贴合,施加一定压力,然后分开两个衬底,这样部分纳米线就转移到了绝缘的玻璃衬底上;1) Attach the substrate of the grown nanowires to the clean glass substrate, apply a certain pressure, and then separate the two substrates, so that part of the nanowires are transferred to the insulating glass substrate;

2) 观察转移过来的玻璃衬底上纳米线的光学显微图,找到纳米线较为密集的位置,并在衬底反面做标记;2) Observe the optical micrograph of the nanowires on the transferred glass substrate, find the position where the nanowires are denser, and mark the reverse side of the substrate;

3) 取铜网掩模板放于纳米线密集的位置,利用高温胶带固定铜网掩模板,注意胶带不要覆盖电极的区域,且应小心粘贴,防止破坏单晶纳米线,多粘贴几个铜网,以作备用;3) Take the copper mesh mask and place it in a place where the nanowires are dense. Use high temperature tape to fix the copper mesh mask. Be careful not to cover the electrode area with the tape, and paste it carefully to prevent damage to the single crystal nanowires. Paste a few more copper meshes. , as a backup;

4) 利用真空热沉积设备为样品蒸镀金电极,蒸镀速率控制为2 Å /s,厚度为50 nm,并用厚度为150 nm的铝膜加固电极,铝电极的蒸镀速率也为匀速2 Å /s,注意蒸镀一种金属前将另一种金属源的小挡板关闭,以防污染金属源;4) Use vacuum thermal deposition equipment to evaporate gold electrodes for the samples, the evaporation rate is controlled to 2 Å/s, the thickness is 50 nm, and the electrodes are reinforced with an aluminum film with a thickness of 150 nm, and the evaporation rate of the aluminum electrodes is also a uniform rate of 2 Å /s, pay attention to closing the small baffle of another metal source before evaporating one metal to prevent contamination of the metal source;

5) 蒸镀完成,取出样品,用镊子小心地去掉铜网掩模板,过程中注意不要刮伤样品。5) After the evaporation is completed, take out the sample and carefully remove the copper mesh mask with tweezers, taking care not to scratch the sample during the process.

7. 检测、分析、表征7. Detection, Analysis, Characterization

对制备的一维甲胺铅碘钙钛矿纳米线晶体进行检测、分析和表征。用Hitachi SEM扫描电镜和尼康LV-150光学显微镜对碘化铅纳米线的外貌进行表征。用岛津UV-2600紫外-可见吸收光谱仪测试所制备碘化铅纳米线与甲胺铅碘钙钛矿纳米线的宏观吸收光谱。利用X射线衍射谱仪对碘化铅纳米线与甲胺铅碘钙钛矿纳米线的XRD图谱进行定性分析。利用半导体分析仪Agilent B1500A与THORLAB M375L4对甲胺铅碘钙钛矿纳米线光电探测器进行表征。The prepared one-dimensional methylamine lead iodide perovskite nanowire crystals were detected, analyzed and characterized. The appearance of lead iodide nanowires was characterized by Hitachi SEM scanning electron microscope and Nikon LV-150 optical microscope. The macroscopic absorption spectra of the prepared lead iodide nanowires and methylamine lead iodide perovskite nanowires were measured by Shimadzu UV-2600 ultraviolet-visible absorption spectrometer. The XRD patterns of lead iodide nanowires and methylamine lead iodide perovskite nanowires were qualitatively analyzed by X-ray diffraction spectrometer. The methylamine lead iodide perovskite nanowire photodetectors were characterized by semiconductor analyzer Agilent B1500A and THORLAB M375L4.

结论:图1(a)表征了所制备的甲胺铅碘钙钛矿纳米线的显微晶体形貌图,使用的是20 nm厚的金种子孤岛衬底,所获得的甲胺铅碘钙钛矿纳米线的长大于100 μm。图1(b)图为将甲胺铅碘钙钛矿纳米线从金种子孤岛衬底转移到玻璃衬底上,所获得的单根甲胺铅碘钙钛矿纳米线的SEM图,晶体形貌均一,线宽300 nm左右,结晶质量良好。图2表征了甲胺铅碘钙钛矿纳米线的紫外可见吸收光谱。图2中对比了碘化铅纳米线 与甲胺铅碘钙钛矿纳米线的吸收光谱,并给出了甲胺铅碘钙钛矿纳米线的稳态荧光光谱。相较碘化铅纳米线只在紫外到540 nm左右有吸收,甲胺铅碘钙钛矿纳米线的吸收光谱覆盖了从紫外到近红外的波段,截止波长为800 nm。甲胺铅碘钙钛矿纳米线在325 nm激光照射下的荧光光谱半峰全宽(FWHM)为44 nm,峰值位置为767 nm。图3表征了甲胺铅碘钙钛矿纳米线的XRD谱,可见晶体衍射峰在14.06°、20.08°、28.59°、31.92°、40.56°和43.21°,对应的晶面指数分别为(110)、(112)、(220)、(310)、(224)和(314),对应了正方结构的钙钛矿材料。我们用半导体分析仪Agilent B1500A以及红色LED(波长660 nm)作为光源测试了甲胺铅碘钙钛矿纳米线光电探测器的性能。如图4所示,为甲胺铅碘钙钛矿纳米线光电探测器在暗态I-V曲线以及入射光密度为127.3 mW/cm2下的亮态I-V曲线,可以得出在1V偏压下器件的亮暗电流比为56。Conclusion: Figure 1(a) characterizes the microscopic crystal morphology of the prepared methylamine lead iodide perovskite nanowires, using a 20 nm thick gold seed island substrate, and the obtained methylamine lead iodide calcium The length of the titanite nanowires is greater than 100 μm . Figure 1(b) is the SEM image of the single methylamine lead iodide perovskite nanowires obtained by transferring the methylamine lead iodide perovskite nanowires from the gold seed island substrate to the glass substrate. The appearance is uniform, the line width is about 300 nm, and the crystal quality is good. Figure 2 characterizes the UV-Vis absorption spectra of methylamine lead iodide perovskite nanowires. Figure 2 compares the absorption spectra of lead iodide nanowires and methylamine lead iodide perovskite nanowires, and gives the steady-state fluorescence spectrum of methylamine lead iodide perovskite nanowires. Compared with lead iodide nanowires that only absorb in the ultraviolet to about 540 nm, the absorption spectrum of methylamine lead iodide perovskite nanowires covers the wavelength range from ultraviolet to near-infrared, and the cut-off wavelength is 800 nm. The fluorescence spectrum full width at half maximum (FWHM) of methylamine lead iodide perovskite nanowires under 325 nm laser irradiation is 44 nm, and the peak position is 767 nm. Figure 3 characterizes the XRD spectrum of the methylamine lead iodide perovskite nanowires. It can be seen that the crystal diffraction peaks are at 14.06°, 20.08°, 28.59°, 31.92°, 40.56° and 43.21°, and the corresponding crystal plane indices are (110) , (112), (220), (310), (224) and (314), corresponding to the square-structured perovskite materials. We tested the performance of methylamine lead iodide perovskite nanowire photodetectors using a semiconductor analyzer Agilent B1500A and a red LED (wavelength 660 nm) as the light source. As shown in Figure 4, it is the dark state IV curve of the methylamine lead iodide perovskite nanowire photodetector and the bright state IV curve under the incident optical density of 127.3 mW/cm 2. It can be concluded that the device is under 1V bias. The bright-dark current ratio is 56.

本发明与背景技术相比具有明显的先进性。我们以金属纳米孤岛诱导化学气相沉积碘化铅纳米线,金属纳米孤岛催化纳米线定向生长为长100至200微米、直径100至300纳米且纵向均匀的线,接着利用化学气相沉积法将碘化铅纳米线转化为甲胺铅碘钙钛矿纳米线。与文献的制备工艺相比较,本方案增加了第一步,在第二步的反应过程金属纳米孤岛催化了碘化铅纳米线的生长,大大提高了单纯的无金属催化作用生长的纳米线的长度与密度,且第三步化学气相沉积将碘化铅纳米线有效的转化为甲胺铅碘钙钛矿纳米线。制备工艺增加了一步真空热蒸镀制备金属纳米孤岛,但是这种金属纳米孤岛衬底可以一次性大量制备,整体工艺简单,这种方法有利于一次沉积获得大量长度长达百微米量级的甲胺铅碘单晶纳米线。本发明为甲胺铅碘微型光电探测器实用化发展做出了贡献。Compared with the background art, the present invention has obvious advantages. We use metal nano-islands to induce chemical vapor deposition of lead iodide nanowires. The metal nano-islands catalyze the directional growth of the nanowires into 100-200 μm long, 100-300 nanometer diameter and longitudinally uniform wires. Lead nanowires are transformed into methylamine lead iodide perovskite nanowires. Compared with the preparation process in the literature, this scheme adds the first step. In the reaction process of the second step, the metal nano-islands catalyze the growth of lead iodide nanowires, which greatly improves the growth of nanowires simply without metal catalysis. length and density, and the third-step chemical vapor deposition effectively converts lead iodide nanowires into methylamine lead iodide perovskite nanowires. The preparation process adds a step of vacuum thermal evaporation to prepare metal nano-islands, but this metal nano-island substrate can be prepared in large quantities at one time, and the overall process is simple. Ammonium lead iodine single crystal nanowires. The invention contributes to the practical development of the methylamine lead iodine miniature photodetector.

Claims (5)

1. The methylamine lead iodoperovskite single crystal nanowire photoelectric detector is characterized in that: the methylamine lead perovskite single crystal nanowire photoelectric detector is a methylamine lead perovskite nanowire which is positioned on a glass substrate, is plated with an electrode, has the diameter of 100-300 nm and the length of 100-200 mu m.
2. A preparation method of a methylamine lead iodoperovskite single crystal nanowire photoelectric detector is characterized by comprising the following steps: the method comprises the following steps
Step one, preparing gold nanometer isolated islands which are uniformly distributed on a glass slide by a vacuum thermal deposition method;
putting the powdered lead iodide drug into a quartz boat, putting the quartz boat into the central position in a quartz glass tube, putting a glass slide with a gold nano island into the quartz glass tube, wherein the distance between the glass slide with the gold nano island and the center of the lead iodide drug is 8-10 cm between Ar and H2Under the protection of mixed gas with the volume ratio of 10:1, adjusting the pressure to be 0.02 MPa, heating to 400 ℃, preserving the temperature for 20 min, naturally cooling to room temperature, and obtaining lead iodide single crystal nanowires on a glass slide;
putting a methyl ammonium iodide drug into a quartz boat, putting the quartz boat into the central position in a quartz glass tube, putting a glass slide with lead iodide single crystal nanowires into the quartz glass tube, keeping the substrate position 6 cm away from the center of the drug, exhausting air, adjusting the pressure to 0-0.01 MPa under the protection of Ar gas, heating to 120 ℃, preserving the temperature for 90 min, naturally cooling to room temperature, and obtaining methylamine lead perovskite single crystal nanowires on the glass slide;
moving the methylamine lead perovskite monocrystal nanowire on the glass slide to a glass substrate; loading a mask plate in a dense region of the methylamine lead perovskite single crystal nanowire, then evaporating a gold electrode by using a vacuum thermal deposition method, and removing the mask plate after evaporation is finished to obtain the methylamine lead perovskite single crystal nanowire photoelectric detector.
3. The method for preparing the methylamine lead perovskite single crystal nanowire photoelectric detector as claimed in claim 2, wherein in the step one, the slow deposition of 0.1 Å/s is selected, and the deposition thickness is 20 nm.
4. The method for preparing the methylamine lead perovskite single crystal nanowire photoelectric detector as claimed in claim 2, wherein the method comprises the following steps: and in the fourth step, the methylamine lead perovskite monocrystal nanowire on the glass slide is moved to a clean glass substrate by a contact pressurization method.
5. The method for preparing the methylamine lead perovskite single crystal nanowire photoelectric detector as claimed in claim 2, wherein a copper mesh mask plate is loaded in a region where methylamine lead perovskite single crystal nanowires are dense, then a gold electrode is evaporated by a vacuum thermal deposition method, the evaporation rate is controlled to be 2 Å/s, the thickness is 50 nm, a 150 nm aluminum film reinforced gold electrode is evaporated, the evaporation rate of the aluminum electrode is 2 Å/s at a constant speed, and the copper mesh mask plate is removed after evaporation is completed, so that the methylamine lead perovskite single crystal nanowire photoelectric detector is obtained.
CN201911031392.7A 2019-10-28 2019-10-28 Photoelectric detector of methylamine lead iodoperovskite single crystal nanowire and preparation method Withdrawn CN110767811A (en)

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CN111883671A (en) * 2020-08-04 2020-11-03 中国科学院半导体研究所 Preparation method of novel organic-inorganic hybrid perovskite nanowire
CN112063358A (en) * 2020-07-29 2020-12-11 阜南县中信柳木工艺品有限公司 Processing method for improving bonding strength of wooden artware
CN113912105A (en) * 2021-11-23 2022-01-11 南京工业大学 Method for preparing and transferring ultrathin large-size lead iodide nanosheets
CN115896915A (en) * 2022-11-01 2023-04-04 南京工业大学 A method for preparing ultrathin lead iodide nanosheets and converting them into ultrathin perovskite nanosheets

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刘艳珍: ""MAPbI3纳米线光电探测器的研究"", 《中国优秀博硕士学位论文全文数据库(硕士) 信息科技辑》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112063358A (en) * 2020-07-29 2020-12-11 阜南县中信柳木工艺品有限公司 Processing method for improving bonding strength of wooden artware
CN111883671A (en) * 2020-08-04 2020-11-03 中国科学院半导体研究所 Preparation method of novel organic-inorganic hybrid perovskite nanowire
CN111883671B (en) * 2020-08-04 2022-04-22 中国科学院半导体研究所 Preparation method of organic-inorganic hybrid perovskite nanowire
CN113912105A (en) * 2021-11-23 2022-01-11 南京工业大学 Method for preparing and transferring ultrathin large-size lead iodide nanosheets
CN113912105B (en) * 2021-11-23 2022-07-05 南京工业大学 Method for preparing and transferring ultrathin large-size lead iodide nanosheets
CN115896915A (en) * 2022-11-01 2023-04-04 南京工业大学 A method for preparing ultrathin lead iodide nanosheets and converting them into ultrathin perovskite nanosheets

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