CN108375333A - 用于位置测量的传感器 - Google Patents

用于位置测量的传感器 Download PDF

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CN108375333A
CN108375333A CN201810089637.0A CN201810089637A CN108375333A CN 108375333 A CN108375333 A CN 108375333A CN 201810089637 A CN201810089637 A CN 201810089637A CN 108375333 A CN108375333 A CN 108375333A
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metallic object
face
layer
area
printed circuit
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CN108375333B (zh
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L.里辛格
M.O.蒂曼
A.弗兰克
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John Nei Si Heidenhain Doctor Co Ltd
Dr Johannes Heidenhain GmbH
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24Housings ; Casings for instruments
    • G01D11/245Housings for sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • GPHYSICS
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    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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    • G01D5/16Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
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    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
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    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • GPHYSICS
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    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50Fixed connections
    • H01R12/59Fixed connections for flexible printed circuits, flat or ribbon cables or like structures
    • H01R12/63Fixed connections for flexible printed circuits, flat or ribbon cables or like structures connecting to another shape cable
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
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    • H01ELECTRIC ELEMENTS
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    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
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    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
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    • H01R4/30Clamped connections, spring connections utilising a screw or nut clamping member
    • H01R4/34Conductive members located under head of screw
    • HELECTRICITY
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K1/02Details
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/165Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed inductors
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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Abstract

本发明涉及一种用于相对于传感器可运动的构件(7)的位置测量的传感器,其中,传感器具有印刷电路板(1;1')和金属体(2;2')。印刷电路板(1;1')具有第一区域(1.1)和第二区域(1.2),在第一区域中布置有探测器(1.12),在第二区域中布置有电子结构元件(1.21),其与探测器(1.12)电气地相连接。金属体(2;2')具有带有第一面(S21)的第一层(2.1)以及带有第二面(S22)的第二层(2.2,2.2')。印刷电路板(1;1')的第一区域(1.1)固定在第一面(S21)上,且印刷电路板(1;1')的第二区域(1.2)固定在第二面(S22)上。金属体(2;2')的第一层(2.1)和第二层(2.2,2.2')布置在印刷电路板(1;1')的第一区域(1.1)与第二区域(1.2)之间,使得第一区域(1.1)布置在第一平面(E11)中而第二区域(1.2)布置在第二平面(E12)中。

Description

用于位置测量的传感器
技术领域
本发明涉及一种根据权利要求1的用于例如角度或长度测量装置的位置测量的传感器。
背景技术
角度测量装置例如用作用于确定可相对彼此旋转的两个机械零件的角度位置的旋转传感器。此外已知一种长度测量装置,在其中测量可相对彼此移位的两个机械零件的线性位移。角度测量装置和长度测量装置通常具有传感器,其扫描可相对于传感器运动的构件、例如角度刻度或长度刻度或码尺,并且产生位置相关的信号。
在感应的测量装置的情况中,常常将励磁管线和接收器管线例如以导线轨道的形式施用在感应的传感器的共同的印刷电路板上,其例如与旋转传感器的定子紧固地相连接。角度刻度位于与该印刷电路板相对,在该角度刻度上以周期性的间距交替地施用电气可导的和不可导的面或接片以及作为分割结构的空隙。角度刻度例如与旋转传感器的转子抗扭地相连接。当在励磁管线或励磁线圈处施加随时间变化的电气励磁电流时,在相对运动期间在接收器管线或线圈中产生与位置相关的信号。该信号于是在感应式传感器的评估电子设备中被进一步处理。
在光学测量装置的情况中通常将光源和光探测器(Fotodetektor)安装在光学传感器的印刷电路板上。光学刻度以空气间隙与印刷电路板相对而置。于是,根据已知的原理可产生位置相关的信号。
通常将这种类型的测量装置或测量设备用于电气驱动部以用于确定相应的机械零件的相对运用或相对位置。在该情况中,将所产生的位置值输送给顺序电子设备(Folgeelektronik)以用于经由相应的接口组件操控驱动部。
在文献DE 103 07 674 A1中说明了一种角度测量装置,在其中所涉及的传感器具有两个夹层式地接合在一起的印刷电路板。
发明内容
本发明所基于的目的在于实现一种传感器,其相对于外部影响可实现坚固耐用的运行特性并且可相对经济地来制造。
该目的根据本发明通过权利要求1的特征来实现。
用于可相对于传感器运动的结构元件的位置测量的传感器包括印刷电路板和金属体。印刷电路板具有第一区域和第二区域,在第一区域中布置有探测器,在第二区域中布置有电子结构元件。结构元件与探测器电气地相连接、尤其通过印刷电路板上的导线轨道。金属体至少构建成两层式,其中,第一层可关联有第一面或第一表面,而第二层可关联有第二面或第二表面。金属体相应地具有带有第一面的第一层以及带有第二面的第二层。印刷电路板的第一区域固定在第一面上,且印刷电路板的第二区域固定在第二面上。金属体的第一层与第二层布置在印刷电路板的第一区域与印刷电路板的第二区域之间,从而印刷电路板的第一区域布置在第一平面中而印刷电路板的第二区域布置在第二平面中。
在本发明的另外的设计方案中,在金属体的第一层与第二层之间布置有粘结间隙、即利用粘结材料填充的间隙。金属体的层因此通过粘结接合材料配合地相互连接。
备选地,金属体的层可相互熔焊,从而尤其在金属体的第一层与第二层之间可布置有钎焊材料。备选地,金属体的层还可相互焊接。
然而,本发明还包括一种备选的结构方式,在其中在金属体的第一层与第二层之间不存在粘结间隙,并且在其中金属体的层通过尤其利用塑料或利用硅材料的注塑包封相互保持在一起。于是在该结构方式中,金属体可通过折叠与印刷电路板一同制成并且可以该状态来注塑包封。
金属体的第一层尤其具有第三面或第三表面,并且金属体的第二层具有第四面或第四表面。第三面或第四面面向彼此布置。金属体的第一层的第一面和第三面尤其彼此相对而置。相应地关联于金属体的第二层的第二面和第四面同样彼此相对而置。
如果存在粘结间隙,则第三面和第四面尤其通过粘结间隙彼此间隔开。粘结间隙于是尤其布置在第三面与第四面之间。
金属体的第一面、第二面、第三面和第四面或金属体的层有利地彼此平行布置。
此外,金属体有利地具有用用于将传感器机械地固定在机械零件处的固定器件。根据另一设计方案,固定器件设计成穿过金属体的第一层和/或第二层的钻孔。于是,金属体尤其不仅可以是印刷电路板的承载部,而且同时还满足法兰功能。例如突出的压板可设置有钻孔,其用于将传感器固定在机械零件处。
在金属体的第一层与第二层之间可设置热绝缘的隔层(Schicht)。尤其在该结构方式的情况中仅第一层或仅第二层可具有固定器件。当在印刷电路板的第一区域中的部件例如相对地对温度不敏感时,则可将第一层固定在相对高温的构件处,其中,可通过绝缘的隔层来防止至第二层且由此到在印刷电路板的第二区域上的尽可能对温度更敏感的结构元件上的热流。
此外,金属可如此来设计,使得其具有如下轮廓,该轮廓机械地加工并且其可用作用于准确适配地安装到机械零件处的参考或止挡部。
传感器有利地包括带有保护罩的线缆,其与金属体电气传导地相连接。由此金属体还可实现传感器的物质连结(Masseanbindung)。在此,保护罩例如可利用卡箍和螺纹连接或铆钉连接与金属体相连接。
备选地,金属体例如可如此来设计,使得其具有模制在金属体处的接触件、例如卡箍带,其在制造传感器的情况中与保护罩相连接,例如通过挤压。这样的卡箍带可设置成金属体的集成的组成部分。接触件有利地模制在金属体的第二层处、尤其仅仅在第二层处,从而在该情况中,第一层不具有模制的接触件。
印刷电路板有利地设计成灵活且一件式的,其中,印刷电路板此外在第一区域与第二区域之间具有弯曲的连接接片。印刷电路板有利地构建成多层式的。尤其有利的是,印刷电路板包括聚酰亚胺或环氧化物材料。在本发明的有利的设计方案中,印刷电路板具有小于200μm、尤其小于120μm的厚度,其中,这里尤其参照印刷电路板的基材的厚度并且绝不参照安装在印刷电路板上的结构元件的高度。
在本发明的另外的设计方案中,金属体一件式的设计并且具有灵活的接片,其弯曲地伸延并且使第一层与第二层相连接。
金属体的布置在印刷电路板的第一与第二区域之间的区段有利地具有大于0.5mm、尤其大于0.8mm或大于1.0mm的厚度。换句话说,在印刷电路板的第一区域与印刷电路板的第二区域之间的间距尤其等于金属体在所述区段中的厚度。此外,金属体可如此构建,使得第一层与第二层分别具有相同的厚度。在印刷电路板的第一和第二区域之间的金属体有利地具有至少5倍于、尤其至少8倍或至少10倍于印刷电路板或印刷电路板的基材的厚度的厚度。金属体构造成刚性体并且形成用于薄的灵活的印刷电路板的机械承载部。因此,概念金属体接下来不包括灵活的金属膜。
传感器例如还可基于光学原理,从而探测器于是可以光探测器或光探测器阵列的形式来构造。备选地,传感器可基于磁性原理,其中,探测器于是可以一个或多个抗磁元件或霍尔元件的形式来构造。本发明同样还包括基于电容原理的传感器。传感器有利地基于感应测量原理,其中,探测器于是可以接收器线圈的形式来构造。在该情况中,传感器可被称为感应式传感器。
尤其当传感器基于感应测量原理时,当金属体由铁磁、尤其软磁钢制成时,是有利的。备选地,还可例如将铝用作用于金属体的材料。
在基于感应式测量原理的传感器的情况中,在印刷电路板的第一区域中有利地布置有励磁线圈。于是尤其在第二区域中可布置有电子结构元件,其电气地与励磁线圈相连接,使得由所涉及的结构元件产生的励磁电流可被传递到励磁线圈中。
通过传感器的特别的结构方式可使用如下制造方法,在其中,首先使金属板涂层或涂覆以灵活的、尤其多层式的印刷电路板的基材,从而以该方式将印刷电路板固定在金属板的表面上。印刷电路板在金属板上的覆层构建可有利地来进行,从而于是不使用预制的带有基材和导线结构的印刷电路板。而是在该变型的情况中进行所需的(例如光化学)的过程步骤来用于将尤其多层式的印刷电路板构造在金属板上。
之后可将各个金属件与印刷电路板或基材一同分开。在折叠且必要时粘结之后制造金属体。电子结构元件可例如在折叠之前和/或在折叠之后安装在印刷电路板上。导线板的基材可作为弧形部(Bogen)被施用到金属板上并且可与金属板一同分开或分离。备选地,还可将各个印刷电路板固定或粘上在金属板上,使得金属板围绕这些印刷电路板被分割或分开。
根据另一方面,本发明包括位置测量装置,其包括传感器和可相对于此运动的带有刻度的构件,其中,传感器构造且确定用于扫描刻度,从而通过传感器可产生信号,其包含关于在传感器与构件之间的相对位置的信息。位置测量传感器可设计成用于测量相对线性位移的线性位置测量装置或者但是也可设计成用于测量相对角度位置的角度测量装置。
本发明的有利的构造方案由从属权利要求获悉。
附图说明
根据本发明的传感器的另外的细节和优点由接下来根据附图对实施例的说明来得出,其中:
图1显示出传感器在早期的装备阶段中的俯视图,
图2显示了传感器的透视图,
图3显示了传感器的部分区域的截面图,
图4显示了传感器的透视性部分视图,
图5显示传感器连同装配的线缆的透视图,
图6显示了传感器连同可相对于此运动的构件的另一透视图,
图7显示了根据第二实施例的传感器在早期的装备阶段中的俯视图,
图8显示了用于根据第三实施例的传感器的金属体的透视性部分视图,
图9显示了用于根据第三实施例的传感器的金属体连同装配的线缆的透视性部分视图。
具体实施方式
在制造根据当前实施例的感应式传感器的情况中,首先提供一种金属板,其在所介绍的实施例中具有1.0mm的厚度并且由软磁钢(这里铁氧体的不锈钢)制成。在该金属板上根据规定的图案固定、尤其粘上多个灵活的印刷电路板1。印刷电路板1的每个具有相对薄的(这里0.1mm)例如由聚酰亚胺构成的基材,使得其自身是灵活的。
在图1中示出了一种多层式构建的灵活的印刷电路板1。其是一件式的且具有第一区域1.1,其在第一近似方案(Naehrung)中设计成环形的。此外,印刷电路板1具有第二区域1.2,其在第一近似方案中同样设计成环形的。在第一区域1.1与第二区域1.2之间,印刷电路板1具有第三区域1.3,其设计成接片并且是在第一区域1.1与第二区域1.2之间的连接。
在根据图1的制造状态中,可识别出印刷电路板1的导线图。相应地在第一区域1.1中设置有所谓的励磁线圈1.11和以接收器线圈形式的探测器1.12,其作为导线轨道构造在薄的基材上。在所推荐的实施例中,探测器1.12或接收器线圈关联有两个线圈。在印刷电路板1的第二区域1.2中示出了导线轨道和衬垫。在印刷电路板1的第三区域1.3中同样施用有导线轨道1.31,其用于使在印刷电路板1的第一区域1.1中部件与第二区域1.2中的部件电气地相连接。
在将多个灵活的印刷电路板1根据规定的图案粘上到金属板上之后,在接下来的制造步骤中从金属板中沿着轮廓K分离出金属体2、例如通过铣削过程或激光切割过程或水射流切割过程。金属体2这里设计成一件式的,其中,金属体2的接片2.3布置在印刷电路板1的第三区域1.3下面。此外,固定器件2.4以钻孔2.41的形式设置在压板2.42中,如同螺纹钻孔2.6。此外,金属体2的接片2.3如此加工,使得其至少部分地具有减小的厚度D23(图3)。
接下来现在可将电子结构元件1.21安装在第二区域1.2上,其在所推荐的实施例中还包括ASIC模块1.211。
随后将粘结剂涂覆到金属体2的底侧上并且使印刷电路板1和金属体2共同地如此折叠,使得钻孔2.41的各一对达到彼此相叠(参见图2或图4)。
在图3中示出了在金属体2的接片2.3的区域中穿过传感器的部分截面。传感器相应地包括经折叠的金属体2,其具有带有第一面S21的第一层2.1以及带有第二面S22的第二层2.2。印刷电路板1的第一区域1.1被粘上在第一面S21上,而印刷电路板1的第二区域1.2被粘上在第二面S22上。金属体2的第一层2.1和第二层2.2布置在印刷电路板1的第一区域1.1与第二区域1.2之间,使得第一区域1.1布置在第一平面E11中,而第二区域1.2布置在第二平面E12中。在金属体2的第一层2.1与第二层2.2之间存在粘结间隙3。第一平面E11和第二平面E12在所推荐的实施例中彼此平行地布置。
此外,金属体2的第一层2.1具有第三面S23,而金属体2的第二层2.2具有第四面S24。第三面S23和第四面S24面向彼此地布置并且通过粘结间隙3彼此间隔开。
由于金属体2的接片2.3具有减少的厚度D23,因此其是灵活的,从而可容易地将金属体2与灵活的印刷电路板1或印刷电路板1的接片1.3一同弯曲。在所推荐的实施例中,第一层2.1的1.0mm的厚度D21刚好与第二层2.2的厚度D22一样大。第三层2.3的厚度D23这里为0.1mm。印刷电路板1或印刷电路板1的基材这里具有0.05mm或50μm的厚度d11。在粘结间隙3为大约0.05mm厚之后,得出大约2.05mm的金属体的总厚度,从而于是在印刷电路板1的第一与第二区域1.1,1.2之间的金属体2具有厚度D,其大约为印刷电路板1或印刷电路板1的基材的厚度d11的41倍。
在制造过程的进一步的连续过程中,安装具有保护罩4.1(参见图5)的多芯线缆4。为了该目的,使芯线的端部接触、尤其熔焊在为此设置的布置在印刷电路板1的第二区域1.2中的衬垫中。此外,卡箍2.7围绕保护罩4.1放置并且借助于螺纹钻孔2.6和螺栓2.8固定在金属体2处。由此不仅在金属体2与线缆4之间建立机械连接,而且还在金属体2与保护罩4.1之间建立电气连接。
根据图2中的布置的传感器现在例如可利用电气绝缘的材料来注塑包封,从而保护电子结构元件1.21以及线缆4的联接部不受外部影响。在该情况中,注塑包封还可同时用作用于线缆4的拉力卸载(Zugentlastung)。
备选地,还可在沿着轮廓K将金属体2从金属板分离出来之前已经进行了电子结构元件1.21的注塑包封或浇铸,以便于在该局面中已经保护电气结构元件1.21不受外部影响。
传感器现在可例如固定在机械零件处、例如在发动机壳体处。对于该目的而言尤其有利的是带有以在压板2.42中的钻孔2.41形式的固定器件2.4的金属体2的设计方案,该金属体充当法兰。此外,准确地加工的轮廓K可至少局部地充当止挡面,从而传感器的装配工仅须将压板2.42以其轮廓K带到止挡在机械零件的相应预加工的面处,并且紧接着通过钻孔2.41将螺栓旋入机械零件螺纹钻孔中。以该方式可实现传感器的简单且精确的安装。
在图6中示出了测量系统的原理图,其包括根据本发明的传感器和可相对于此运动(这里可相对于传感器旋转)的构件7,其在所推荐的实施例中构造成角度刻度。构件7由基材7.3构成,其在所示出的实施例中由环氧树脂制成,并且在其上布置有两个分度轨迹7.1,7.2。分度轨迹7.1,7.2构造成环形的并且关于旋转轴线A对中地以不同的直径布置在基材7.3上。两个分度轨迹7.1,7.2相应地由交替地布置的电气可导的分度区域7.11,7.12和不可导的分度区域7.12,7.22的周期性顺序构成。作为用于电气可导的分度区域7.11,7.21的材料在所示示例中将铜施用到基材7.3上。在不可导的分度区域7.12,7.22中相反地不涂层基材7.3。
内部的分度轨迹7.1在所示出的实施形式中由带有电气可导的材料的三个分度区域7.11以及三个在其中没有布置可导材料的分度区域7.12构成。
第二分度轨迹7.2径向相邻于第一分度轨迹7.1地位于基材7.3上,其中,两个分度轨迹7.2也由多个电气可导的分度区域7.21以及布置在其间的不可导的分度区域7.22构成。不同的分度区域7.21,7.22根据材料在此与第一分度轨迹7.1的分度区域7.11,7.12相同地来构造。在所示出的实施例中,第二分度轨迹7.2总地来说包括十六个周期性布置的电气可导的分度区域7.21以及相应地十六个布置在其间的不可导的分度区域7.22。
构件7或角度刻度通常充当转子并且被固定在可绕旋转轴线A旋转的机械零件处。于是,传感器相对地形成设计成角度测量装置的位置测量装置的定子,使得其固定在静止的机械零件处。在位置测量装置的组装状态中,构件7和传感器以相对较小的空隙相对而置,其中,空隙比在图6中示出的原理图更小。旋转轴线A伸延穿过构件7或角度刻度的中心,其中,在构件7与传感器之间的相对旋转的情况中,在印刷电路板1中可通过感应效应产生与相应的角度位置相关的信号。
安装在印刷电路板1上的ASIC模块1.211不仅作为评估元件来工作,而且还作为励磁控制元件来工作,在该励磁元件的控制下产生之后流动穿过励磁线圈1.11的励磁电流。通过励磁电流在探测器1.12中感应出与构件7的角度位置或角度刻度相关的电压,其中,该电压或信号通过安装在印刷电路板1的第二区域1.2中的结构元件1.21来强化、解调并且转换成数字信号。在逻辑电路中在ASIC模块1.211的数字零件上测定或计算由各个分度轨迹7.1,7.2的扫描引起的位置值。位置值可经由线缆4传递到顺序电子设备中、例如机械的数码控制部处。装备有传感器的角度测量装置相应地用于检测在传感器(其可固定在机械零件处)与带有可固定在第二机械零件、例如轴处的角度刻度的构件7之间的角度位置。
根据图7说明了传感器的一备选的设计方案。在该变型中将多层式印刷电路板1'构建在金属板上。相应地在此直接在金属板上进行印刷电路板1'的多层式的构建。在根据图7的变型中,在使用光化学或薄膜技术的工序的情况下构建带有由聚酰亚胺构成的基材的印刷电路板1',其中,固定器件2.4或压板2.42保持不被涂层,如同围绕充当保护罩连结部的螺纹钻孔2.6的区域。
根据图8和9阐述了本发明的另一备选的设计方案,在其中在金属体2'处模制有作为金属体2'的集成的组成部分的接触件2.9。在所推荐的实施例中,接触件2.9仅模制在金属体2'的第二层2.2'处。在图8中示出了在与线缆4的保护罩4.1触点接通之前的制造阶段中的所涉及的金属体2'。接触件2.9设计成带或卡箍带,其通过挤压在塑性形变下与根据图9的保护罩4.1相连接,从而建立保护罩4.1与金属体2'的可靠的电气触点接通。通常在传感器的运行中由一些电子结构元件1.21产生热。通过传感器的特别的构建可在给出的热产生的情况中使运行温度保持相对较低。对此的原因在于,所产生的热可通过金属体2,2'以相对较少的热阻流出并且尤其可经由压板2.42更确切地说给出到机械零件处。
此外,通过所推荐的结构方式可提供一种传感器,其在来自外部的电磁场的影响方面不敏感,因为尤其与线缆4的保护罩4.1电气连接的金属体2自身屏蔽地起作用。

Claims (16)

1.一种用于相对于传感器可运动的构件(7)的位置测量的传感器,其中,所述传感器具有印刷电路板(1;1')和金属体(2;2'),其中,所述印刷电路板(1;1')具有第一区域(1.1)和第二区域(1.2),在所述第一区域中布置有探测器(1.12),而在所述第二区域中布置有电子结构元件(1.21),其与所述探测器(1.12)电气地相连接;所述金属体(2;2')具有带有第一面(S21)的第一层(2.1)以及带有第二面(S22)的第二层(2.2,2,2'),其中,所述印刷电路板(1;1')的第一区域(1.1)固定在所述第一面(S21)上而所述印刷电路板(1;1')的第二区域(1.2)固定在所述第二面(S22)上,其中,所述金属体(2;2')的第一层(2.1)和第二层(2.2,2.2')布置在所述印刷电路板(1;1')的第一区域(1.1)与第二区域(1.2)之间,使得所述第一区域(1.1)布置在第一平面(E11)中,而所述第二区域(1.2)布置在第二平面(E12)中。
2.根据权利要求1所述的传感器,其中,在所述金属体(2;2')的第一层(2.1)和所述第二层(2.2,2.2')之间布置有粘结间隙(3)。
3.根据前述权利要求中任一项所述的传感器,其中,所述金属体(2;2')另外具有用于将所述传感器机械地固定在机械零件处的固定器件(2.4)。
4.根据权利要求3所述的传感器,其中,所述固定器件(2.4)设计成穿过所述金属体(2;2')的第一层(2.1)和/或第二层(2.2,2.2')的钻孔(2.41)。
5.根据前述权利要求中任一项所述的传感器,其中,所述金属体(2;2')具有如下轮廓(K),其机械地加工并且可用作用于准确适配地安装到机械零件处的参考。
6.根据前述权利要求中任一项所述的传感器,其中,所述传感器包括带有保护罩(4.1)的线缆(4),并且所述保护罩(4.1)与所述金属体(2;2')电气传导地相连接。
7.根据权利要求6所述的传感器,其中,在所述金属体(2')处模制有接触件(2.9)来作为所述金属体(2')的集成的组成部分,其与所述保护罩(4.1)通过挤压相连接。
8.根据前述权利要求中任一项所述的传感器,其中,所述印刷电路板(1;1')设计成灵活的且一件式的并且在所述第一区域(1.1)与所述第二区域(1.2)之间具有弯曲的连接接片(1.3)。
9.根据前述权利要求中任一项所述的传感器,其中,所述金属体(2;2')设计成一件式的并且具有灵活的接片(2.3),其弯曲地伸延并且使所述第一层(2.1)与所述第二层(2.2,2.2')相连接。
10.根据前述权利要求中任一项所述的传感器,其中,所述金属体具有大于0.5mm的厚度。
11.根据前述权利要求中任一项所述的传感器,其中,所述金属体(2;2')的第一层(2.1)具有第三面(S23),并且所述金属体(2;2')的第二层(2.2,2.2')具有第四面(S24),其中,所述第三面(S23)和所述第四面(S24)面向彼此地布置。
12.根据前述权利要求中任一项所述的传感器,其中,所述金属体(2;2')的第一层(2.1)具有第三面(S23),并且所述金属体(2;2')的第二层(2.2,2.2')具有第四面(S24),其中,所述第一面(S21)、第二面(S22)、第三面(S23)和第四面(S23)彼此平行地布置。
13.根据前述权利要求中任一项所述的传感器,其中,所述传感器基于感应的测量原理,并且所述探测器以接收器线圈(1.12)的形式来构造。
14.根据前述权利要求中任一项所述的传感器,其中,所述金属体(2;2')由软磁钢制成。
15.根据权利要求13或14中任一项所述的传感器,其中,在所述印刷电路板(1;1')的第一区域(1.1)中布置有励磁线圈(1.11)。
16.根据权利要求15所述的传感器,其中,在所述第二区域(1.2)中布置有电子结构元件(1.21),其与所述励磁线圈(1.11)电气地相连接。
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111322929A (zh) * 2018-11-20 2020-06-23 约翰内斯·海德汉博士有限公司 传感器单元和带有该传感器单元的位置测量机构

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107864552B (zh) * 2017-11-09 2019-12-06 京东方科技集团股份有限公司 柔性电路板及其组装方法以及显示装置
SE542616C2 (en) 2018-09-27 2020-06-16 Leine & Linde Ab Rotary encoder and method for manufacturing a rotary encoder
DE102018216663A1 (de) * 2018-09-27 2020-04-02 Continental Automotive Gmbh Sensoreinrichtung
EP3702737B1 (de) 2019-03-01 2021-05-12 Dr. Johannes Heidenhain GmbH Abtasteinheit zur abtastung einer winkelskala sowie winkelmesseinrichtung mit dieser abtasteinheit
DE102019106525A1 (de) * 2019-03-14 2020-09-17 Minebea Mitsumi Inc. Kapazitiver Drehwinkelsensor
DE102020203275A1 (de) * 2020-03-13 2021-09-16 Robert Bosch Gesellschaft mit beschränkter Haftung Induktive Rotorlagesensoreinrichtung, Antriebseinrichtung
US10855303B1 (en) 2020-03-16 2020-12-01 Semiconductor Components Industries, Llc Propagation delay compensation and interpolation filter
DE102020205027A1 (de) * 2020-04-21 2021-10-21 Robert Bosch Gesellschaft mit beschränkter Haftung Steuergerät zum Ansteuern einer elektrischen Maschine, Sensoranordnung zur Bestimmung einer Rotorposition einer elektrischen Maschine
DE102020214235A1 (de) * 2020-11-12 2022-05-12 Robert Bosch Gesellschaft mit beschränkter Haftung Induktive Positionssensoreinrichtung, Antriebseinrichtung
EP4012349B1 (de) * 2020-12-08 2023-03-15 Dr. Johannes Heidenhain GmbH Abtastelement und induktive positionsmesseinrichtung mit diesem abtastelement
FR3128067A1 (fr) * 2021-10-08 2023-04-14 Sc2N Capteurs de position
EP4230967B1 (de) * 2022-02-22 2024-04-10 Dr. Johannes Heidenhain GmbH Abtastelement und induktive positionsmesseinrichtung mit diesem abtastelement
EP4273507B1 (de) * 2022-05-05 2024-07-10 Dr. Johannes Heidenhain GmbH Abtastelement und induktive positionsmesseinrichtung mit diesem abtastelement
CN115096175B (zh) * 2022-06-21 2023-05-16 河北航天晟达精密机械有限公司 一种集成式霍尔测角装调系统
DE102023202516A1 (de) 2022-08-09 2024-02-15 Renesas Electronics America Inc. Induktive Sensoranordnung
EP4336148B1 (de) * 2022-09-06 2024-07-10 Dr. Johannes Heidenhain GmbH Abtastelement und induktive positionsmesseinrichtung mit diesem abtastelement
EP4369116A1 (de) 2022-11-08 2024-05-15 B&R Industrial Automation GmbH Verfahren zur stillstandsregelung eines mehrkörpersystems

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03277158A (ja) * 1990-03-26 1991-12-09 Aiwa Co Ltd 偏平型ブラシレスモータ
WO2000033020A1 (en) * 1998-11-27 2000-06-08 The United States Of America, Represented By The Administrator Of The National Aeronautics And Space Administration (Nasa) Position sensor with integrated signal-conditioning electronics on a printed wiring board
US20020011839A1 (en) * 2000-07-24 2002-01-31 Toshiharu Miyata Relative-displacement detecting unit and relative-displacement detecting device
CN1550750A (zh) * 2003-05-09 2004-12-01 Լ����˹���Ǻ�����ʿ�ɷ����޹�˾ 感应式旋转角度传感器和以此配备的自动同步发送机
CN1800788A (zh) * 2005-01-07 2006-07-12 安捷伦科技有限公司 光学编码器
KR200439157Y1 (ko) * 2007-06-28 2008-03-25 대성전기공업 주식회사 조향휠 각도 감지장치
WO2014140298A2 (en) * 2013-03-14 2014-09-18 Carl Zeiss Smt Gmbh Position sensor, sensor arrangement and lithography apparatus comprising position sensor
CN205231264U (zh) * 2014-12-02 2016-05-11 福特环球技术公司 用于车辆的电气接地组件以及紧固件

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59116552A (ja) * 1982-12-24 1984-07-05 Aisin Seiki Co Ltd 回転センサ
JP4001989B2 (ja) * 1996-11-29 2007-10-31 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 位置測定装置の走査部材
JP2002031545A (ja) * 2000-07-13 2002-01-31 Mitsutoyo Corp 相対変位検出ユニット
DE10307674A1 (de) 2003-02-21 2004-09-02 Dr. Johannes Heidenhain Gmbh Induktiver Sensor und damit ausgestatteter Drehgeber
DE102007009994A1 (de) * 2007-03-01 2008-09-04 Robert Bosch Gmbh Induktiver Sensor
DE102007045535B4 (de) * 2007-09-24 2021-04-29 Asm Automation Sensorik Messtechnik Gmbh Winkelsensor
IT1394791B1 (it) * 2009-05-20 2012-07-13 Metallux Sa Sensore di pressione
JP5718081B2 (ja) 2011-02-14 2015-05-13 日本電産サンキョー株式会社 磁気センサユニットおよびエンコーダ付きモータ

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03277158A (ja) * 1990-03-26 1991-12-09 Aiwa Co Ltd 偏平型ブラシレスモータ
WO2000033020A1 (en) * 1998-11-27 2000-06-08 The United States Of America, Represented By The Administrator Of The National Aeronautics And Space Administration (Nasa) Position sensor with integrated signal-conditioning electronics on a printed wiring board
US20020011839A1 (en) * 2000-07-24 2002-01-31 Toshiharu Miyata Relative-displacement detecting unit and relative-displacement detecting device
CN1550750A (zh) * 2003-05-09 2004-12-01 Լ����˹���Ǻ�����ʿ�ɷ����޹�˾ 感应式旋转角度传感器和以此配备的自动同步发送机
CN1800788A (zh) * 2005-01-07 2006-07-12 安捷伦科技有限公司 光学编码器
KR200439157Y1 (ko) * 2007-06-28 2008-03-25 대성전기공업 주식회사 조향휠 각도 감지장치
WO2014140298A2 (en) * 2013-03-14 2014-09-18 Carl Zeiss Smt Gmbh Position sensor, sensor arrangement and lithography apparatus comprising position sensor
CN205231264U (zh) * 2014-12-02 2016-05-11 福特环球技术公司 用于车辆的电气接地组件以及紧固件

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
P. ARPAIA: "Rotating-coil calibration in a reference quadrupole, considering roll-angle misalignment and higher-order harmonics", 《MEASUREMENT》 *
徐汉斌,贾安礼,赵吴广: "电感式角度传感器电磁耦合敏感元件的研究", 《机电工程》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111322929A (zh) * 2018-11-20 2020-06-23 约翰内斯·海德汉博士有限公司 传感器单元和带有该传感器单元的位置测量机构
CN111322929B (zh) * 2018-11-20 2023-10-10 约翰内斯·海德汉博士有限公司 传感器单元和带有该传感器单元的位置测量机构

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