CN108372040B - Nozzle switching mechanism that moisturizes - Google Patents
Nozzle switching mechanism that moisturizes Download PDFInfo
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- CN108372040B CN108372040B CN201611053171.6A CN201611053171A CN108372040B CN 108372040 B CN108372040 B CN 108372040B CN 201611053171 A CN201611053171 A CN 201611053171A CN 108372040 B CN108372040 B CN 108372040B
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- moisturizing
- nozzle
- box
- moisturizing box
- rubber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/02—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
- B05B12/04—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery for sequential operation or multiple outlets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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Abstract
The invention relates to the field of semiconductor production, in particular to a nozzle moisturizing switching mechanism which comprises a rotary electric cylinder, a nozzle assembly, a moisturizing box, a swing arm, a lifting cylinder, a rubber arm and a door opening cylinder, wherein the nozzle assembly is arranged in the moisturizing box, the rotary electric cylinder, the moisturizing box and the door opening cylinder are all arranged on the rubber arm, the nozzle assembly is provided with a rotary disk, a plurality of nozzles are arranged on the rotary disk, the rotary disk is driven to rotate by the rotary electric cylinder, the rubber arm is driven to lift by the lifting cylinder, the lifting cylinder is movably arranged on the swing arm, a rubber outlet is formed in the moisturizing box, a door is arranged at the bottom side of the moisturizing box, any nozzle is positioned above the rubber outlet during rubber outlet, and the door at the bottom of the moisturizing box is opened by the door opening cylinder. The invention can realize the functions of quick switching of the nozzle and moisturizing of the colloid, and effectively prevent the nozzle from being blocked.
Description
Technical Field
The invention relates to the field of semiconductor production, in particular to a nozzle moisturizing switching mechanism.
Background
In the semiconductor industry, a photoresist homogenizing process needs to use a plurality of photoresists with different viscosity properties, so that a corresponding number of pipelines are required for supplying photoresist, corresponding nozzles are selected according to different requirements and are moved to the upper part of a wafer for gluing, and a solvent of the photoresist is volatile, so that the nozzles are easy to block.
Disclosure of Invention
The invention aims to provide a nozzle moisturizing switching mechanism which can realize the functions of quick switching of a nozzle and moisturizing of colloid and effectively prevent the nozzle from being blocked.
The purpose of the invention is realized by the following technical scheme:
the utility model provides a nozzle switching mechanism that moisturizes, includes rotatory electric jar, nozzle assembly, moisturizing box, swing arm, lift cylinder, glues the arm and the cylinder that opens the door, wherein in nozzle assembly arranges the moisturizing box in, rotatory electric jar, moisturizing box and the cylinder that opens the door all set up on gluing the arm, nozzle assembly is equipped with the rotary disk be equipped with a plurality of nozzles on the rotary disk, just the rotary disk passes through rotatory electric jar drive is rotatory, it passes through to glue the arm lift cylinder drive, the lift cylinder movably set up in the swing arm be equipped with out the jiao kou in the moisturizing box, be equipped with in the moisturizing box bottom side and open the door, arbitrary nozzle is located when going out to glue go out jiao kou top, just it passes through to moisturize the box bottom door open the door cylinder and open the door.
The nozzle assembly comprises a rotating shaft, a rotating disk and a nozzle, wherein the upper end of the rotating shaft is connected with the rotating electric cylinder, and the lower end of the rotating shaft extends into the moisture preservation box and is connected with the rotating disk.
The nozzle comprises a rubber tube, a tube clamp and a pressing ring, the rubber tube sequentially penetrates the pressing ring and the tube clamp, the pressing ring is fixed on the rotating disk, and the tube clamp is pressed by the pressing ring.
The pipe clamp is of a conical structure, and the front end of the pipe clamp is provided with a groove.
The pressing ring is fixed on the rotating disc through the hole by a retainer ring.
The moisture preservation box is internally provided with a moisture preservation box inner cavity and a moisture preservation box outer cavity, wherein the rotating disc is arranged in the moisture preservation box inner cavity, the moisture preservation box inner cavity is communicated with the moisture preservation box outer cavity, and the volatile moisture preservation solvent is arranged in the moisture preservation box outer cavity.
The rotating disc is matched with the upper cover of the moisture preservation box by a stop.
A glue outlet is arranged in the inner cavity of the moisture preservation box, and a convex circular truncated cone is circumferentially arranged at the glue outlet.
And a fluid infusion port which can be opened and closed is arranged on the wall of the outer cavity of the moisture preservation box.
And a waste discharging box is arranged on the swing arm.
The invention has the advantages and positive effects that:
1. the invention is provided with the moisturizing box, can moisturize in the whole process of nozzle movement, effectively ensures that moisturizing liquid does not pollute the wafer, and also effectively prevents the nozzle from being blocked.
2. The invention is provided with the rotating disc to carry all the nozzles, can meet the requirement of nozzle switching applied to the RRC process, has simple switching mode, can complete the rapid switching of the nozzles and shortens the process time.
3. The invention is provided with the waste discharging box and the door opening cylinder for opening the moisturizing box, the pre-glue discharging is simple, and the waste collection is easy;
4. the invention is provided with the lifting cylinder, and can ensure that the height of the nozzle is in a proper range.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a nozzle rotating disk and nozzle assembly according to the present invention;
FIG. 3 is a schematic view of a moisturizing cartridge of the present invention;
fig. 4 is a working principle diagram of the present invention.
Wherein, 1 is rotatory electric jar, 2 is nozzle assembly, 3 is the box of moisturizing, 4 are the waste discharge box, 5 are the swing arm, 6 are the lift cylinder, 7 are gluey arm, 8 are the cylinder that opens the door, 201 is the pivot, 202 is the rotary disk, 203 is the rubber tube, 204 is the pipe clamp, 205 is the clamping ring, 301 is the box inner chamber of moisturizing, 302 is the box exocoel of moisturizing, 303 is out jiao kou.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the invention comprises a rotary electric cylinder 1, a nozzle assembly 2, a moisture retention box 3, a waste discharge box 4, a swing arm 5, a lifting cylinder 6, a rubber arm 7 and a door opening cylinder 8, wherein the nozzle assembly 2 is arranged in the moisture retention box 3, the rotary electric cylinder 1, the moisture retention box 3 and the door opening cylinder 8 are all arranged on the rubber arm 7, the nozzle assembly 2 is provided with a rotary disc 202, the rotary disc 202 is provided with a plurality of nozzles, the rotary disc 202 is driven to rotate by the rotary electric cylinder 1 to convert different nozzles, the rubber arm 7 is fixedly arranged on the lifting cylinder 6 and driven to lift by the lifting cylinder 6, the swing arm 5 is provided with a moving block, the lifting cylinder 6 is arranged on the moving block, the moving block is driven to move horizontally along the swing arm 5 by a driving device arranged on the swing arm 5, the driving device is a technology known in the art, a door is arranged at the bottom, when the glue needs to be discharged, the door is opened at the bottom side of the moisture preservation box 3 and is opened through the door opening cylinder 8, the waste discharging box 4 is arranged on the swing arm 5, and the waste discharging box 4 is used for discharging the glue in advance.
As shown in fig. 2, the nozzle assembly 2 includes a rotating shaft 201, a rotating disc 202 and nozzles, wherein the upper end of the rotating shaft 201 is connected to the rotating electric cylinder 1, the rotating disc 202 is disposed in the moisturizing box 3, the lower end of the rotating shaft 201 extends into the moisturizing box 3 to be connected to the rotating disc 202, and the rotating electric cylinder 1 drives the rotating disc 202 to rotate through the rotating shaft 201 to switch the nozzles. The nozzle includes rubber tube 203, pipe clamp 204 and clamping ring 205, rubber tube 203 passes in proper order clamping ring 205 and pipe clamp 204, wherein pipe clamp 204 is the taper structure, prevents rubber tube 203 downstream in the motion to it has the slot to open at the front end, realizes the clamping function, and clamping ring 205 compresses tightly pipe clamp 204, clamping ring 205 passes through the hole to be fixed on rotary disk 202 with the retaining ring, prevents taking out of rubber tube 203. In the process of rotating the switching nozzle, the pipe clamp 204 rotates a certain angle along with the rubber pipe 203 relative to the rotating disc 202, and the relative rotation solves the problem that the rubber pipe 203 generates torque to influence the service life.
As shown in fig. 3, a moisturizing box inner cavity 301 and a moisturizing box outer cavity 302 are arranged in the moisturizing box 3, wherein the rotating disc 202 is arranged in the moisturizing box inner cavity 301, the rotating disc 202 and the moisturizing box 3 upper cover form a seam allowance for matching to realize relative sealing of the box body, the volatile solvent completing the moisturizing function is arranged in the moisturizing box outer cavity 302, the moisturizing box inner cavity 301 is communicated with the moisturizing box outer cavity 302, so that the moisturizing box inner cavity 301 is filled with the solvent gas volatilized by the moisturizing box outer cavity 302 when the mechanism works, the moisturizing function is completed, and the moisturizing volatile solvent is a known technology in the art. The glue outlet 303 is arranged in the inner cavity 301 of the moisture preservation box, a convex circular truncated cone is arranged on the circumference of the glue outlet 303 to prevent glue from dripping into the cavity or solvent from condensing and dripping to directly flow out from the glue outlet 303 to cause wafer pollution, and a vacuum waste discharge port is arranged in the inner cavity 301 of the moisture preservation box to suck out solvent which may flow out of the outer cavity 302 of the moisture preservation box. The moisture preservation box outer cavity 302 contains a certain amount of solvent and is of an annular structure, backflow of liquid during movement can be effectively buffered, a liquid replenishing port capable of being opened and closed is arranged on the wall of the moisture preservation box outer cavity 302, and according to the characteristics of different solvents, a certain amount of solvent is periodically replenished into the moisture preservation box outer cavity 302 through the liquid replenishing port, so that the content of the solvent in the moisture preservation box 3 is ensured.
When the surface of the wafer is coated with the uniform glue, the corresponding nozzle 2 is positioned right above the glue outlet 303 in the moisture preservation box 3, the rubber tube 203 is concentric with the glue outlet 303, and the outer diameter of the rubber tube 203 is far smaller than the diameter of the glue outlet 303, so that the situation that the glue is hung and adhered cannot occur, and the glue can be coated on the wafer smoothly.
The working principle of the invention is as follows:
as shown in fig. 1 and 4, the rotating disc 202 is driven to rotate by the rotating electric cylinder 1 to convert different nozzles, after the nozzles are switched, the door opening cylinder 8 opens the door at the bottom side of the moisture retention box 3, so that the nozzles spray a certain amount of colloid into the waste discharge box 4 through the colloid outlet 303 to complete pre-discharging of the colloid, then the door opening is closed, the lifting cylinder 6 drives the colloid arm 7 to be lifted to a set height, the moving block on the swing arm 5 drives the colloid arm 7 to move towards the center of the wafer, the waste discharge vacuum port of the moisture retention box is opened during the movement, and the solvent which may flow out of the outer cavity is sucked out until the outer cavity returns to the initial position and then is closed; opening a door at the bottom side of the moisture preservation box 3 right above the wafer, discharging glue from a corresponding nozzle, enabling the glue solution to flow out of the coated wafer from a glue outlet 303 in an inner cavity 301 of the moisture preservation box, closing the door after the wafer is coated, returning the glue arm 7 to a starting position, returning the rotating disc 202 to a normal position after returning to the starting position, opening a liquid replenishing port of the moisture preservation box 3, replenishing a certain amount of moisture preservation liquid into an outer cavity 302 of the moisture preservation box, and finishing the switching moisture preservation process.
Claims (5)
1. A nozzle mechanism of moisturizing which characterized in that: comprises a rotary electric cylinder (1), a nozzle component (2), a moisturizing box (3), a swing arm (5), a lifting cylinder (6), a rubber arm (7) and a door opening cylinder (8), wherein the nozzle component (2) is arranged in the moisturizing box (3), the rotary electric cylinder (1), the moisturizing box (3) and the door opening cylinder (8) are all arranged on the rubber arm (7), the nozzle component (2) is provided with a rotary disk (202), the rotary disk (202) is provided with a plurality of nozzles, the rotary disk (202) is driven to rotate by the rotary electric cylinder (1), the rubber arm (7) is driven to lift by the lifting cylinder (6), the lifting cylinder (6) is movably arranged on the swing arm (5), a rubber outlet (303) is arranged in the moisturizing box (3), a door is arranged at the bottom side of the moisturizing box (3), and any nozzle is positioned above the rubber outlet (303) during rubber outlet, the bottom side of the moisture preservation box (3) is opened by the door opening cylinder (8);
a moisturizing box inner cavity (301) and a moisturizing box outer cavity (302) are arranged in the moisturizing box (3), the moisturizing box inner cavity (301) is communicated with the moisturizing box outer cavity (302), a volatile moisturizing solvent is arranged in the moisturizing box outer cavity (302), a glue outlet (303) is arranged in the moisturizing box inner cavity (301), a convex circular truncated cone is circumferentially arranged at the glue outlet (303), a vacuum waste discharge opening is arranged in the moisturizing box inner cavity (301), and a liquid replenishing opening capable of being opened and closed is arranged on the wall of the moisturizing box outer cavity (302);
nozzle assembly (2) are including pivot (201), rotary disk (202) and nozzle, wherein pivot (201) upper end links to each other with rotatory electric jar (1), rotary disk (202) set up in moisturizing box inner chamber (301), pivot (201) lower extreme stretch into to moisturizing box (3) in with rotary disk (202) link to each other, rotary disk (202) and moisturizing box (3) upper cover are the mouth cooperation.
2. The nozzle moisturizing switching mechanism of claim 1, wherein: the nozzle comprises a rubber tube (203), a tube clamp (204) and a pressing ring (205), the rubber tube (203) penetrates through the pressing ring (205) and the tube clamp (204) in sequence, the pressing ring (205) is fixed on the rotating disc (202), and the tube clamp (204) is pressed through the pressing ring (205).
3. The nozzle moisturizing switching mechanism of claim 2, wherein: the pipe clamp (204) is of a conical structure, and a groove is formed in the conical end attached to the rubber pipe (203).
4. The nozzle moisturizing switching mechanism of claim 2, wherein: the pressing ring (205) is fixed to the rotating disk (202) through a hole retainer ring.
5. The nozzle moisturizing switching mechanism of claim 1, wherein: and a waste discharging box (4) is arranged on the swing arm (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611053171.6A CN108372040B (en) | 2016-11-25 | 2016-11-25 | Nozzle switching mechanism that moisturizes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611053171.6A CN108372040B (en) | 2016-11-25 | 2016-11-25 | Nozzle switching mechanism that moisturizes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108372040A CN108372040A (en) | 2018-08-07 |
| CN108372040B true CN108372040B (en) | 2020-04-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611053171.6A Active CN108372040B (en) | 2016-11-25 | 2016-11-25 | Nozzle switching mechanism that moisturizes |
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| Country | Link |
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| CN (1) | CN108372040B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110164796B (en) * | 2019-05-27 | 2021-09-24 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Glue head moisturizing device and gluing equipment |
| CN114798264B (en) * | 2022-04-15 | 2023-02-17 | 智程半导体设备科技(昆山)有限公司 | Glue homogenizing nozzle moisturizing device and glue homogenizing equipment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1069389A (en) * | 1991-08-12 | 1993-03-03 | 李小秋 | A kind of open-type super-clean inocularot for edible fungus |
| US5765758A (en) * | 1996-07-23 | 1998-06-16 | Chu; Anna | Solvent sprayer for assembling the golf shaft and grip |
| CN103801478B (en) * | 2012-11-09 | 2016-05-11 | 沈阳芯源微电子设备有限公司 | Ultrasonic nozzle air exhausting device |
| JP6120582B2 (en) * | 2013-01-22 | 2017-04-26 | キヤノン株式会社 | Coating system and coating method |
| CN203974076U (en) * | 2014-07-11 | 2014-12-03 | 东莞中国科学院云计算产业技术创新与育成中心 | A kind of multiinjector 3D printer |
| CN106089545B (en) * | 2016-08-23 | 2019-10-25 | 苏永发 | Outer nozzle mouth device and application method are changed in nozzle of impulse water turbine mouth, increasing |
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| CN108372040A (en) | 2018-08-07 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Applicant before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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