CN103801478B - Ultrasonic nozzle air exhausting device - Google Patents
Ultrasonic nozzle air exhausting device Download PDFInfo
- Publication number
- CN103801478B CN103801478B CN201210448427.9A CN201210448427A CN103801478B CN 103801478 B CN103801478 B CN 103801478B CN 201210448427 A CN201210448427 A CN 201210448427A CN 103801478 B CN103801478 B CN 103801478B
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- CN
- China
- Prior art keywords
- exhaust hood
- ultrasonic nozzle
- air draft
- ferrule
- hood assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
- B05B12/18—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area using fluids, e.g. gas streams
Landscapes
- Special Spraying Apparatus (AREA)
Abstract
The invention belongs to field of semiconductor devices, specifically a kind of ultrasonic nozzle air exhausting device. Comprise exhaust hood assembly and air draft pipeline, wherein exhaust hood assembly is arranged on ultrasonic nozzle, and described exhaust hood assembly is connected with air draft place of equipment by air draft pipeline. Described exhaust hood assembly comprises exhaust hood and ferrule fitting, wherein exhaust hood is sheathed on ultrasonic nozzle, described ultrasonic nozzle is contained in exhaust hood, the lower end of described exhaust hood is open type, upper end is provided with two ferrule fittings, described ferrule fitting is positioned at ultrasonic nozzle both sides and is symmetrical arranged, and described two ferrule fittings are connected with air draft pipeline. The present invention does not contact any chemical agent, have Non-energy-consumption, noiseless, life-span long, unlubricated, without advantages such as chemical contaminations, be specially adapted in full-automatic running device, vacuum, the particular surroundings such as ultra-clean.
Description
Technical field
The invention belongs to field of semiconductor devices, specifically a kind of ultrasonic nozzle air exhausting device.
Background technology
At present, along with the variation of manufacture of semiconductor, PROCESS FOR TREATMENT a lot of in equipment become increasingly complex,The requirement of the accurate supply to required chemicals in manufacture process is very high, meeting essentialization in processing procedureLearn under the prerequisite of medicament supply, should save as far as possible corresponding chemical medicament.
Ultrasonic wave atomizing nozzle is to utilize electronics high frequency oscillation, and liquid molecular structure is broken up and producedWhat naturally fly away is vaporific, and do not need heating or add other chemical agent, and wafing in air of formingFloating is vaporific, is by supersonic generator and nozzle in semiconductor spray-bonding craft, and photoresist is carried outAtomization, above wafer, form vaporific, now wafer by vacuum suction on upper heat dish, when hot dish cartWhen face is warmed to 70-80 DEG C, in the time that vaporific photoresist particle is fallen on crystal column surface, also not at crystalline substanceCircular surfaces scatters (gravity reason), due to temperature reason photoresist by instantaneous solidification at crystal column surface, fromAnd on crystal column surface, form the uniform photoresist glued membrane of one deck, complete corresponding spray-bonding craft.
Although, spray-bonding craft with respect to the equal adhesive process of tradition because adopted nozzle atomization technology to savePhotoresist. But the atomizing effect of ultrasonic nozzle is not fine, thereby cause the waste of chemical agent.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide a kind of ultrasonic nozzle air exhausting device. This is superSound wave nozzle air exhausting device is saved photoresist, is applicable to carry out the equipment of application of liquid, is particularly useful for halfThe air draft of chemical agent coating place in conductor processing procedure.
To achieve these goals, the present invention is by the following technical solutions:
A kind of ultrasonic nozzle air exhausting device, comprises exhaust hood assembly and air draft pipeline, wherein exhaust hood groupPart is arranged on ultrasonic nozzle, and described exhaust hood assembly is connected with air draft place of equipment by air draft pipeline.
Described exhaust hood assembly comprises exhaust hood and ferrule fitting, and wherein exhaust hood is sheathed on ultrasonic nozzleUpper, described ultrasonic nozzle is contained in exhaust hood, and the lower end of described exhaust hood is open type, and establish upper endHave two ferrule fittings, described ferrule fitting is positioned at ultrasonic nozzle both sides and is symmetrical arranged, and described twoIndividual ferrule fitting is connected with air draft pipeline.
Described air draft pipeline comprises connecting hose I, triplet card bell and spigot joint and two connecting hose II, described inTwo ferrule fittings are connected with two joints of triplet card bell and spigot joint by connecting hose II respectively, described inThe 3rd joint of triplet card bell and spigot joint is connected with air draft place of equipment by connecting hose I.
Advantage of the present invention and beneficial effect are:
1, the present invention utilizes exhaust hood to be arranged on ultrasonic nozzle, and respective row airduct one end is connected to air draftFactory business interface on, one end connects on exhaust hood, simple in structure, convenient disassembly.
2, the present invention is arranged on the air exhausting device on ultrasonic nozzle by mechanical type, makes at this deviceUsed time does not contact any chemical agent, have Non-energy-consumption, noiseless, life-span long, unlubricated, without chemistryThe advantages such as pollution, are specially adapted in full-automatic running device, vacuum, the particular surroundings such as ultra-clean.
3, the present invention's performance rational in infrastructure is stable, and maintenance and easy to loading and unloading, can meet kinds of processes processing procedure,Be applicable to the occasion that various use atomizers carry out medicament sprayed coating.
Brief description of the drawings
Fig. 1 is that the present invention is arranged on the perspective view on ultrasonic wave glue spraying unit;
Fig. 2 is I place enlarged drawing in Fig. 1;
Fig. 3 is the structural representation that the present invention is arranged on ultrasonic nozzle place;
Fig. 4 is the top view of Fig. 3;
Wherein: 1 is glue spraying base plate, 2 is electric cylinder, and 3 is heat dish, and 4 is exhaust hood assembly, and 5 is ultrasonic wave sprayMouth, 6 is exhaust hood, and 7 is ferrule fitting, and 8 is triplet card bell and spigot joint, and 9 is connecting hose I, 10 for connectingMeet flexible pipe II.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.
As Figure 1-4, the present invention includes exhaust hood assembly 4 and air draft pipeline, wherein exhaust hood assembly 4Comprise exhaust hood 6 and ferrule fitting 7, wherein exhaust hood 6 is sheathed on ultrasonic nozzle 5, ultrasonic wave sprayMouth 5 is contained in exhaust hood 6, and the lower end of exhaust hood 6 is open type, and upper end is provided with two ferrule fittings 7,Ferrule fitting 7 is positioned at ultrasonic nozzle 5 both sides and is symmetrical arranged, two ferrule fittings 7 and exhaust ductRoad connects. Described air draft pipeline comprises connecting hose I9, triplet card bell and spigot joint 8 and two connecting hose II10, two ferrule fittings 7 are respectively by two joints of connecting hose II10 and triplet card bell and spigot joint 8Connect, the 3rd joint of triplet card bell and spigot joint 8 is connected with air draft place of equipment by connecting hose I9,Thereby form the air draft at ultrasonic nozzle 5 places, to reach the distribution that improves ultrasonic nozzle 5 place's air-flows.Connecting hose I9 adopts flexible fluororesin flexible pipe, has flexible and pliability preferably.
The course of work of the present invention is:
In the time that equipment carries out sprayed coating chemical agent, electric cylinder 1 drives ultrasonic nozzle 5 and exhaust hood assembly 4 to enterThe horizontal and vertical movement of row, chemical agent is through the atomization of ultrasonic nozzle 5, and sprayed coating is at crystal column surface,Now on equipment, open the air draft at exhaust hood 6 places, the air draught of ultrasonic nozzle 5 tops is madeBecome impact, make the atomizing effect of chemical agent more desirable, because air draft direction is that ultrasonic nozzle 5 spraysThe opposite direction of chemical agent, makes the atomization area of chemical agent on wafer upper surface amid a sharp increase, makes chemistryThe more uniform sprayed coating of product on wafer, because of the increase of sprayed coating area identical in the situation that, so can be simultaneouslyCan reach the effect of saving chemical agent.
By adjusting the air draught at ultrasonic nozzle 5 places, the photoresist of wafer top is formed betterAtomizing effect, to reach better glue spraying effect, and the object that can save corresponding chemical medicament.
In the present embodiment, ultrasonic nozzle is commercial product, purchases the company in SONO-TEK, and model is120-2-16-11-230-030; Air draft place connecting hose I selects flexible fluororesin flexible pipe, purchase inMISUMI company, model is HOJFRR9-2.2-LBS-RBS.
Claims (2)
1. a ultrasonic nozzle air exhausting device, is characterized in that: comprise exhaust hood assembly (4) and rowAir pipe line, wherein exhaust hood assembly (4) is arranged on ultrasonic nozzle (5) above, described exhaust hood assembly(4) be connected with air draft place of equipment by air draft pipeline;
Described exhaust hood assembly (4) comprises exhaust hood (6) and ferrule fitting (7), wherein exhaust hood (6)Be sheathed on ultrasonic nozzle (5) upper, described ultrasonic nozzle (5) is contained in exhaust hood (6), instituteThe lower end of stating exhaust hood (6) is open type, and upper end is provided with two ferrule fittings (7), described ferrule fitting(7) be positioned at ultrasonic nozzle (5) both sides and be symmetrical arranged, described two ferrule fittings (7) and rowAir pipe line connects.
2. by ultrasonic nozzle air exhausting device claimed in claim 1, it is characterized in that: described exhaust ductRoad comprises connecting hose I (9), triplet card bell and spigot joint (8) and two connecting hose II (10), described inTwo ferrule fittings (7) are two with triplet card bell and spigot joint (8) by connecting hose II (10) respectivelyJoint connects, and the 3rd joint of described triplet card bell and spigot joint (8) is by connecting hose I (9)Be connected with air draft place of equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210448427.9A CN103801478B (en) | 2012-11-09 | 2012-11-09 | Ultrasonic nozzle air exhausting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210448427.9A CN103801478B (en) | 2012-11-09 | 2012-11-09 | Ultrasonic nozzle air exhausting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103801478A CN103801478A (en) | 2014-05-21 |
| CN103801478B true CN103801478B (en) | 2016-05-11 |
Family
ID=50699145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210448427.9A Active CN103801478B (en) | 2012-11-09 | 2012-11-09 | Ultrasonic nozzle air exhausting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103801478B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108372040B (en) * | 2016-11-25 | 2020-04-17 | 沈阳芯源微电子设备股份有限公司 | Nozzle switching mechanism that moisturizes |
| CN111804498B (en) * | 2020-06-24 | 2022-05-06 | 沈阳芯源微电子设备股份有限公司 | Nozzle device and spraying method for high-aspect-ratio deep-hole structure wafer or thin glue spraying wafer |
| CN114904692B (en) * | 2022-05-27 | 2023-07-28 | 苏州光宝科技股份有限公司 | High-precision wafer spraying equipment with self-distinguishing and self-detecting effects |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201120351Y (en) * | 2007-10-16 | 2008-09-24 | 陈兆红 | Exhaust gas purifying device for spray painting workshop |
| CN102020234A (en) * | 2009-09-18 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | Glue spraying processing device used in semiconductor manufacturing |
| CN201915240U (en) * | 2010-12-07 | 2011-08-03 | 东丽纤维研究所（中国）有限公司 | Fabric aerosol processing device |
| CN102259074A (en) * | 2011-01-19 | 2011-11-30 | 沈阳芯源微电子设备有限公司 | Spraying mechanism and spraying method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004087336A2 (en) * | 2003-03-28 | 2004-10-14 | Ultrasonic Systems Inc. | Ultrasonic spray coating system |
| DE10327429A1 (en) * | 2003-06-18 | 2005-01-05 | Abb Patent Gmbh | Ultrasonic stationary wave atomizer for generating varnish spray for painting workpiece, has varnish nozzle with varnish disk positioned in space formed between sonotrode and reflector, atomizing varnish from the nozzle |
-
2012
- 2012-11-09 CN CN201210448427.9A patent/CN103801478B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201120351Y (en) * | 2007-10-16 | 2008-09-24 | 陈兆红 | Exhaust gas purifying device for spray painting workshop |
| CN102020234A (en) * | 2009-09-18 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | Glue spraying processing device used in semiconductor manufacturing |
| CN201915240U (en) * | 2010-12-07 | 2011-08-03 | 东丽纤维研究所（中国）有限公司 | Fabric aerosol processing device |
| CN102259074A (en) * | 2011-01-19 | 2011-11-30 | 沈阳芯源微电子设备有限公司 | Spraying mechanism and spraying method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103801478A (en) | 2014-05-21 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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