CN108346673A - A kind of back side illumination image sensor and its manufacturing method and electronic device - Google Patents
A kind of back side illumination image sensor and its manufacturing method and electronic device Download PDFInfo
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- CN108346673A CN108346673A CN201710059033.7A CN201710059033A CN108346673A CN 108346673 A CN108346673 A CN 108346673A CN 201710059033 A CN201710059033 A CN 201710059033A CN 108346673 A CN108346673 A CN 108346673A
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
Abstract
The present invention relates to a kind of back side illumination image sensor and its manufacturing method and electronic devices.The method includes：Offer includes the first wafer of pixel region, and first wafer includes the first surface and second surface being oppositely arranged；Second wafer is provided and engages second wafer with the first surface of first wafer；The deep trench at several intervals is formed in the second surface opposite with the pixel region；Anti-reflecting layer is formed in the deep trench.Deep trench is formed at the back side of first wafer in the method, and anti-reflecting layer is formed in the deep trench, crosstalk and dark current can be reduced by the setting.
Description
Technical field
The present invention relates to technical field of semiconductors, in particular to a kind of back side illumination image sensor and its manufacturing method
And electronic device.
Background technology
In general, imaging sensor is the back side illumination image sensor that optical imagery is converted into electric signal.Imaging sensor
Including charge coupling device (CCD) and complementary metal oxide semiconductor (CMOS) imaging sensor.
Since cmos image sensor (CMOS image sensor, CIS) has improved manufacturing technology and characteristic, because
This semiconductor fabrication everyway concentrates on exploitation cmos image sensor.Cmos image sensor utilizes CMOS technology system
It makes, and there is lower power consumption, it is easier to it realizes highly integrated, produces smaller device, therefore, cmos image sensing
Device is widely used in various products, such as digital camera and digital camera etc..
Back side illumination image sensor (the Backside illumination CMOS image in multi-functional electronic equipment
Sensor, BSI CIS) it is widely used, wherein usually using melting bonding in the manufacturing process of the BSI CIS devices
Device wafers (device wafer) and carrying substrate (carrier wafer) are bonded on one by (Fusion bonding) method
It rises.
With the diminution of Pixel Dimensions, noise such as crosstalk will increase.In order to which preferably picture quality, cross-interference issue need
It is modified.There are three kinds of crosstalks in device at present：Spectra overlap (spectral crosstalk), optical crosstalk (optical
) and electrical crosstalk (electrical crosstalk) crosstalk.Wherein, spectra overlap (spectral crosstalk) is
Caused by misalignment by filter (color filter, CF).The optical crosstalk (optical crosstalk) is by light
Son is penetrated into caused by neighbouring photodiode.Electrical crosstalk (electrical crosstalk) is to drift to mistake by electronics
Pixel region caused by.
Spectra overlap (spectral crosstalk) and optical crosstalk (optical crosstalk) can be by that will filter
Look mirror, which is embedded into metal layer network, to be solved.Deep trench isolation (Deep trench isolation, DTI) structure can be with
Inhibit optical crosstalk (optical crosstalk) and electrical crosstalk (electrical crosstalk), but with silicon substrate thickness
The increase of degree, photodiode are difficult to realize by the isolation of individual ion implanting.Therefore, back side deep trench isolation (Deep
Trench isolation, DTI) structure can effectively enhance pixel isolation.
For back side illumination image sensor, backside structure do not have deep trench isolation (Deep trench isolation,
DTI) structure be can receive, but back side illumination image sensor pixel region and logic region by Si/ARC/ insulating layers/
The isostructural limitation of backside passivation layer.
Therefore, it is solution above-mentioned technical problem in the prior art, it is necessary to propose a kind of new back side illumination image sensing
Device and its manufacturing method and electronic device.
Invention content
A series of concept of reduced forms is introduced in Summary, this will in the detailed description section into
One step is described in detail.The Summary of the present invention is not meant to attempt to limit technical solution claimed
Key feature and essential features do not mean that the protection domain for attempting to determine technical solution claimed more.
In order to overcome the problems, such as that presently, there are an embodiment of the present invention provides a kind of manufacturers of back side illumination image sensor
Method, the method includes：
Offer includes the first wafer of pixel region, and first wafer includes the first surface being oppositely arranged and the second table
Face；
Second wafer is provided and engages second wafer with the first surface of first wafer；
The deep trench at several intervals is formed in the second surface opposite with the pixel region；
Anti-reflecting layer is formed in the deep trench.
Optionally, the refractive index of the anti-reflecting layer radially inwardly successively decreasing along the deep trench.
Optionally, the anti-reflecting layer includes having a kind of material of different refractivity or the different a variety of materials of refractive index
Material.
Optionally, first wafer includes substrate, and the deep trench is formed in the substrate, the depth of the deep trench
The half at least more than the substrate thickness is spent, the depth-to-width ratio of the deep trench is at least more than 5.
Optionally, the formation temperature of the anti-reflecting layer is less than 400 DEG C.
Optionally, the anti-reflecting layer covers the second surface and fills the deep trench, is forming the antireflection
The method further includes after layer：
Network is formed on the anti-reflecting layer, the network includes body layer and is set to the body layer
In several mesh openings, the mesh openings expose the anti-reflecting layer.
Optionally, wherein being embedded with filter in the mesh openings of the network.
Optionally, first wafer further includes the logic area positioned at the pixel region side, the shape in the logic area
At the metal interconnection layer and pad layer having in embedded dielectric layer.
Optionally, first wafer includes substrate, and the anti-reflective is formed in the substrate surface and the deep trench
After penetrating layer, forms the network foregoing description method and further include：
The anti-reflecting layer on the patterning substrate and the substrate opposite with the logic area, to form opening
And expose the dielectric layer；
On the anti-reflecting layer and the surface of the opening forms insulating layer；
The insulating layer in the opening and the dielectric layer are patterned, to form groove and expose the metal interconnection
Layer；
Form metal layer on the insulating layer, to cover the insulating layer, while filling the groove, with the gold
Belong to interconnection layer and forms connection.
Optionally, the method for forming the opening includes：
Photoresist layer is formed on the substrate and the anti-reflecting layer on the second surface；
To the photoresist layer pattern, to remove the photoresist layer above the logic area；
First wafer, second wafer and the photoresist layer are baked；
The substrate on first wafer after baking is etched, to form the opening.
Optionally, the temperature of the baking is 150 DEG C to 240 DEG C, and the baking time is 60 seconds to 300 seconds.
Optionally, the sidewall slope angle of the opening is less than 50 °, and the width of the opening is more than 50 μm.
Optionally, it is formed after the metal layer, the method further includes：
Patterned mask layer is formed on the metal layer；
Using the mask layer as mask etch metal layer, to form the grid knot of metal above the pixel region
Structure, while the metal layer above the insulating layer on the outside of the metal interconnection layer is removed, to expose the insulating layer.
Optionally, the method further includes after exposing the insulating layer：
The insulating layer above pad layer described in the logic area and the dielectric layer are patterned, is opened with forming pad
Mouth simultaneously exposes the pad layer.
Optionally, first wafer is device wafers, and second wafer is support wafer.
The present invention also provides a kind of back side illumination image sensor, the back side illumination image sensor includes：
The first wafer including pixel region, first wafer include the first surface and second surface being oppositely arranged；
Second wafer, second wafer are engaged with the first surface of first wafer；
Deep trench is located at the second surface of first wafer, and the deep trench is located at the top of the pixel region；
Anti-reflecting layer is filled in the deep trench.
Optionally, the refractive index of the anti-reflecting layer radially inwardly successively decreasing along the deep trench.
Optionally, the anti-reflecting layer includes having a kind of material of different refractivity or the different a variety of materials of refractive index
Material.
Optionally, at least formed with substrate on first wafer, the deep trench is formed in the substrate, described
The depth of deep trench is at least more than the half of the substrate thickness, and the depth-to-width ratio of the deep trench is at least more than 5.
Optionally, the anti-reflecting layer covers the second surface and fills the deep trench, and the back side illumination image passes
Sensor further includes：
Network is set to above the anti-reflecting layer, and the network includes body layer and is set to the master
Several mesh openings in body layer, the mesh openings expose the anti-reflecting layer.
Optionally, the back side illumination image sensor further includes：
Filter, the filter is embedded to be set in the mesh openings of the network.
Optionally, first wafer at least further includes the logic area positioned at the pixel region side, in the logic area
In be formed with metal interconnection layer and pad layer in embedded dielectric layer.
Optionally, the opening of the dielectric layer portions thickness is formed through in the logic area, in the opening
Surface is formed with insulating layer and the metal layer above the insulating layer, and the metal layer is connect with the metal interconnection layer.
Optionally, the sidewall slope angle of the opening is less than 50 °, and the width of the opening is more than 50 μm.
Optionally, bonding pad opening is formed in the dielectric layer in the logic area, the bonding pad opening exposes institute
State pad layer.
The present invention also provides a kind of electronic device, the electronic device includes above-mentioned back side illumination image sensor.
In conclusion the present invention provides a kind of back side illumination image sensing to solve the problems, such as current technique
The manufacturing method of device forms deep trench at the back side of first wafer in the method, and is formed in the deep trench
Anti-reflecting layer can reduce crosstalk and dark current by the setting.
It is also further formed network in the pixel region as a preferred method, it can be by inhibiting light
Learning crosstalk (optical crosstalk) enhances image property, and in addition it is automatically right that phase-detection may be implemented in the network
The camera function of burnt (Phase Detection Auto Focus, PDAF).
Further, the filter is embedded into the metal grill, the filter supplier need not be very smart
True patterning can enhance quantum efficiency (quantum efficiency).
The back side illumination image sensor of the present invention, as a result of above-mentioned manufacturing method, thus equally has the advantages that above-mentioned.
The electronic device of the present invention, as a result of above-mentioned back side illumination image sensor, thus equally has the advantages that above-mentioned.
Description of the drawings
The following drawings of the present invention is used to understand the present invention in this as the part of the present invention.Shown in the drawings of this hair
Bright embodiment and its description, principle used to explain the present invention.
In attached drawing：
Fig. 1 is a kind of schematic flow of the manufacturing method of back side illumination image sensor of one embodiment of the present of invention
Figure；
Fig. 2A-Fig. 2 F are a kind of correlation of the manufacturing method of back side illumination image sensor in another embodiment of the present invention
The sectional view for the structure that step is formed, wherein Fig. 2 E right figures are the vertical view of left side figure encircled portion；
Fig. 3 shows the schematic diagram of electronic device according to an embodiment of the present invention.
Specific implementation mode
In the following description, a large amount of concrete details are given in order to provide more thorough understanding of the invention.So
And it is obvious to the skilled person that the present invention may not need one or more of these details and be able to
Implement.In other examples, in order to avoid with the present invention obscure, for some technical characteristics well known in the art not into
Row description.
It should be understood that the present invention can be implemented in different forms, and should not be construed as being limited to propose here
Embodiment.Disclosure will be made thoroughly and complete on the contrary, providing these embodiments, and will fully convey the scope of the invention to
Those skilled in the art.In the accompanying drawings, for clarity, the size and relative size in the areas Ceng He may be exaggerated.From beginning to end
Same reference numerals indicate identical element.
It should be understood that when element or layer be referred to as " ... on ", " with ... it is adjacent ", " being connected to " or " being coupled to " it is other
When element or layer, can directly on other elements or layer, it is adjacent thereto, be connected or coupled to other elements or layer, or
There may be elements or layer between two parties by person.On the contrary, when element is referred to as " on directly existing ... ", " with ... direct neighbor ", " directly
It is connected to " or " being directly coupled to " other elements or when layer, then element or layer between two parties is not present.It should be understood that although can make
Various component, assembly units, area, floor and/or part are described with term first, second, third, etc., these component, assembly units, area, floor and/
Or part should not be limited by these terms.These terms be used merely to distinguish a component, assembly unit, area, floor or part with it is another
One component, assembly unit, area, floor or part.Therefore, do not depart from present invention teach that under, first element discussed below, portion
Part, area, floor or part are represented by second element, component, area, floor or part.
Spatial relationship term for example " ... under ", " ... below ", " below ", " ... under ", " ... it
On ", " above " etc., herein can for convenience description and being used describe an elements or features shown in figure with
The relationship of other elements or features.It should be understood that other than orientation shown in figure, spatial relationship term intention further includes making
With the different orientation with the device in operation.For example, if the device in attached drawing is overturn, then, it is described as " under other elements
Face " or " under it " or " under it " elements or features will be oriented in other elements or features "upper".Therefore, exemplary art
Language " ... below " and " ... under " it may include upper and lower two orientations.Device can additionally be orientated (be rotated by 90 ° or its
It is orientated) and spatial description language as used herein correspondingly explained.
The purpose of term as used herein is only that description specific embodiment and not as the limitation of the present invention.Make herein
Used time, " one " of singulative, "one" and " described/should " be also intended to include plural form, unless context is expressly noted that separately
Outer mode.It is also to be understood that term " composition " and/or " comprising ", when being used in this specification, determines the feature, whole
The presence of number, step, operations, elements, and/or components, but be not excluded for one or more other features, integer, step, operation,
The presence or addition of component, assembly unit and/or group.Herein in use, term "and/or" includes any of related Listed Items and institute
There is combination.
It describes to send out herein with reference to the cross-sectional view of the schematic diagram of the desirable embodiment (and intermediate structure) as the present invention
Bright embodiment.As a result, it is contemplated that due to caused by such as manufacturing technology and/or tolerance from the variation of shown shape.Therefore,
The embodiment of the present invention should not necessarily be limited to the specific shape in area shown here, but include due to for example manufacturing caused shape
Shape deviation.For example, be shown as the injection region of rectangle its edge usually there is circle or bending features and/or implantation concentration ladder
Degree, rather than the binary from injection region to non-injection regions changes.Equally, the disposal area can be led to by injecting the disposal area formed
Some injections in area between the surface passed through when injection progress.Therefore, the area shown in figure is substantially schematic
, their shape is not intended the true form in the area of display device and is not intended to limit the scope of the present invention.
In order to thoroughly understand the present invention, detailed step and detailed structure will be proposed in following description, so as to
Illustrate technical solution proposed by the present invention.Presently preferred embodiments of the present invention is described in detail as follows, however in addition to these detailed descriptions
Outside, the present invention can also have other embodiment.
Embodiment one
In the following, referring to Fig.1 and Fig. 2A to Fig. 2 F describes the back side illumination image sensor of proposition of the embodiment of the present invention
The detailed step of one illustrative methods of manufacturing method.Wherein, Fig. 1 is a kind of back side illumination image sensor of the embodiment of the present invention
Manufacturing method schematic flow chart, 2A to Fig. 2 F be the embodiment of the present invention a kind of back side illumination image sensor manufacturer
The sectional view for the structure that the correlation step of method is formed.
As shown in Figure 1, the manufacturing method specifically includes following steps：
Step S1：There is provided include pixel region the first wafer, first wafer include the first surface that is oppositely arranged with
Second surface；
Step S2：Second wafer is provided and engages second wafer with the first surface of first wafer；
Step S3：The deep trench at several intervals is formed in the second surface opposite with the pixel region；
Step S4：Anti-reflecting layer is formed in the deep trench.
The manufacturing method of the back side illumination image sensor of the present embodiment, specifically comprises the following steps：
First, step 1 is executed, provides the first wafer, first wafer includes the first surface being oppositely arranged and second
Surface, the first surface include at least pixel region.
Specifically, as shown in Figure 2 A, at least formed with substrate 203 on the first wafer, the substrate 203 is formed in described
On the first surface of one wafer, the substrate 203 can be following at least one of the material being previously mentioned：On silicon, insulator
Silicon (SSOI), stacking SiGe (S-SiGeOI), germanium on insulator SiClx on insulator are laminated on silicon (SOI), insulator
(SiGeOI) and germanium on insulator (GeOI) etc..
Wherein, the first surface of first wafer includes pixel region and logic area, wherein the pixel region is used for
The various elements and interconnection structure of imaging sensor are formed, the logic area is used to form various interconnection structures and encapsulation is tied
Structure, such as the metal interconnection layer 2022 and pad layer 2021 that are formed in the logic area in embedded dielectric layer.
Wherein, interconnection structure 2023 is also formed in the pixel region, the interconnection structure 2023 includes metal layer (example
Such as layers of copper or aluminium layer), metal plug or metal throuth hole, wherein the bottom metal layer of the interconnection structure is located at first wafer
The top on surface.
Wherein, the forming method of the interconnection structure can select conventional manufacturing method, such as form dielectric layer 202,
Then the dielectric layer is patterned, to form opening and conductive material is selected to fill the opening, is sequentially formed each
Metal layer and through-hole, to form the interconnection structure, the further dielectric layer after forming the metal layer at top, to cover
It covers the metal layer at top and planarizes, as shown in Figure 2 A.
Wherein, it can be chemistry that the metal layer at top, which selects the deposition method of metal material Al, the metal material Al,
The low pressure chemical phase of the formation such as (CVD) method of vapor deposition, physical vapour deposition (PVD) (PVD) method or atomic layer deposition (ALD) method is heavy
One kind in product (LPCVD), laser ablation deposition (LAD) and selective epitaxy growth (SEG), in the present invention preferably physics
(PVD) method of vapor deposition.
Optionally, other devices, such as passive device and radio-frequency devices etc. can also be formed in first wafer.
Optionally, the passive device may include metal-insulating layer-metal capacitor (MIM), spiral inductor etc..Make
For example, radio-frequency devices are also formed on the first surface of the first wafer.In the present embodiment, transistor is various for constituting
Circuit, radio-frequency devices are used to form radio frequency component or module, and interconnection structure is for connecting transistor, radio-frequency devices and preceding end-apparatus
Other assemblies in part.
Wherein, the concrete structure and forming method of the various components formed in first wafer, the technology of this field
Personnel can select with reference to the prior art according to actual needs, and details are not described herein again.
Then, step 2 is executed, provides the second wafer 201 and by the first table of second wafer and first wafer
Face engages.
As shown in Figure 2 A, the second wafer 201 is provided, in the present embodiment, the second wafer 201 is carrying substrate (carrier
Wafer), it is used to carry and protect front end in the technique and other subsequent techniques for subsequently carrying out the first wafer reduction processing
Device.
Optionally, the second wafer 201 can be common silicon substrate or other suitable substrates, not be defined herein.
Wherein, in second wafer 201 trapping layer (high is formed with in the first wafer bonding one side
Trap layer), to improve second wafer 201 and the first wafer bonding performance.
Optionally, the trapping layer includes polysilicon or unformed silicon.
The formation of the side of second wafer and the first wafer is had to side (i.e. the first table of front-end devices by bonding technology
Face) (bonding) is engaged, as shown in Figure 2 A.Wherein, bonding technology can be used any method well known to those skilled in the art into
Row, such as oxide fusion bonding technology etc..
Optionally, layer of bonding material is formed on first wafer in the method, then in second wafer
The layer of bonding material is mutually bonded, so that first wafer and institute by upper formation trapping layer in bonding with the trapping layer
It states the second wafer to engage, there are good Joint Properties between the trapping layer and the layer of bonding material, it is described to make
The bonding performance of first wafer and second wafer further increases, therefore improves the performance and yield of device.
Wherein, the first surface of first wafer is engaged with second wafer in this step, and is being engaged
Later by the wafer inversion, structure as shown in Figure 2 A is obtained, so that the second surface of first wafer is upward.
Then, from the second surface side opposite with the first surface of first wafer to first wafer into
Row reduction processing.
Specifically, as shown in Figure 2 A, from second surface side pair first wafer opposite with first surface of the first wafer
Carry out reduction processing.
Illustratively, which can be CMP (chemical mechanical grinding) or other suitable methods.
Step 3 is executed, forms the deep trench at several intervals in the second surface opposite with the pixel region.
Specifically, as shown in Figure 2 A, in this step in the second surface of first wafer, i.e., described first wafer
Hard mask layer is formed on the back side.
Wherein, the hard mask layer can select nitride hard mask layer and/or oxide hard-mask layer.
Then the hard mask layer is patterned, such as forms patterned photoresist layer on the hard mask layer, with
The photoresist layer is hard mask layer described in mask etch, is open with being formed in the hard mask layer.
Finally using the hard mask layer as the back side of substrate described in the first wafer described in mask etch, in the substrate
Form the deep trench.
Wherein, the depth of the deep trench is at least more than the half of the substrate thickness, and the depth-to-width ratio of the deep trench is extremely
It is more than 5 less.
Bosch etching (Bosch) technique of reactive ion is used to etch the substrate in this step, to form the depth
Groove.
Optionally, two steps of etching and passivation are divided into Bosch technique etching processes, such as first in disposed on sidewalls
One layer of passivating film, is passed through C4F8Gas, C4F8Ionic state CF is resolved under plasmoid2Base and activity F bases, wherein CF2
Base is reacted with the surfaces Si, forms (CF2) n macromolecule passivating films.
Then it performs etching, is passed through gas SF6, to increase F ion dissociation, passivating film is etched away, Si base materials are then carried out
Etching.In the step of etching, the partial sidewall polymer being attached on previous adhesive layer, in non-perpendicular ion collision side wall
Under the influence of, it is detached from side wall and moves again, adhere on deeper side wall again.In this way, the thin polymer film on side wall is continuous
Ground is driven downward attachment, to form the anisotropic etching of a part.
Bosch technologies are selected to realize Si deep etchings by passivation/etching alternately (TMDE) in this application.
Wherein, the side wall profile of the deep trench can be vertical or inclined, not limit.
Optionally, it is closed in this process with larger open with obtaining enough overetch to control the deep trench
Pulse function is closed, while controlling the time that etching period is slightly larger than passivation step.
By the etching of above-mentioned processing step, up-narrow and down-wide deep trench, and the side wall of the deep trench can be obtained
The angle formed between the horizontal surface of substrate is less than 85 °.
Since deep trench is shape wide at the top and narrow at the bottom, there is enough overetched amounts, to form larger opening, therefore
Can ensure in etching process will not be in the congregate polymer of the deep trench, while can also be in subsequent technique
Anti-reflecting layer can preferably be filled.
Wherein, the number of the deep trench is several, and the deep trench is set to each picture in the pixel region
Around element, but be not limited to that the setting.
Step 4 is executed, anti-reflecting layer is formed in the deep trench.
Specifically, after forming the deep trench, the hard mask layer is removed first, can select and have with the substrate
There is the method for larger etching selectivity to remove the hard mask layer, to expose the substrate.
Then wet chemical process step is executed after forming the removal hard mask layer, to eliminate on second surface
Damage.
Optionally, the wet chemical process step selects two kinds or more in hydrofluoric acid, nitric acid, acetic acid and hydrogen peroxide
Kind.
The method is still further comprised to the second surface and the depth after the wet chemical process step
The surface of groove executes oxidation step, to form oxide skin(coating) on the surface of the second surface and the deep trench, so that institute
The filling for stating anti-reflecting layer is more prone to.
It crosses in this step, the oxide skin(coating) is formed by wet processing or steam ambient technique.
Wherein, the thinner thickness of the oxide skin(coating), just to change surface property, such as on the 5 Izods right side.
Then anti-reflecting layer 205 is filled in the deep trench and covers the substrate, as shown in Figure 2 B.
Wherein, the refractive index of the anti-reflecting layer radially inwardly successively decreasing along the deep trench.Wherein, the diameter
To referring to direction from the side wall of the deep trench from outside to inside, such as the direction of arrow meaning in Fig. 2A.Such as the antireflection
The refractive index of layer is successively decreased from the side wall ecto-entad of the deep trench.For example, the refractive index of the anti-reflecting layer is from the zanjon
Side wall ecto-entad the successively decreasing at gradient of slot.
Optionally, the anti-reflecting layer includes having a kind of material of different refractivity or the different a variety of materials of refractive index
Material.
Optionally, the anti-reflecting layer include the zirconium oxide of high refractive index, titanium oxide, tantalum oxide, silicon nitride, hafnium oxide,
Germanium oxide, aluminium oxide, silicon oxynitride, the oxide rich in element silicon and doping the low silica of silica and refractive index and
Air.
Optionally, the formation temperature of the anti-reflecting layer is less than 400 DEG C.
It is still further comprised after depositing the anti-reflecting layer in this step and the anti-reflecting layer is planarized
The step of.
Deep trench is formed at the back side of first wafer, and anti-reflecting layer is formed in the deep trench, by described
Setting can reduce crosstalk and dark current.
Execute step 5, the antireflection on the patterning substrate and the substrate opposite with the logic area
Layer, to form opening 20 and expose the dielectric layer 202.
Specifically, as shown in Figure 2 C, formed it is described opening 20 method include：
Step 1：Substrate 203 on the patterning second surface opposite with the logic area and the anti-reflecting layer 205, with
It forms opening 20 and exposes the dielectric layer 202；
Step 2：On the anti-reflecting layer and the surface of the opening forms insulating layer.
The method for forming the opening includes forming photoresist, exposure, development and etching.
Optionally, the opening is up-narrow and down-wide tapered opening.
Optionally, the sidewall slope angle of the opening is less than 50 °, and the width of the opening is more than 50 μm.
In order to form the opening of the taper, following steps are executed：
Photoresist layer is formed on the substrate and the anti-reflecting layer on the second surface；
To the photoresist layer pattern, to remove the photoresist layer above the logic area；
First wafer, second wafer and the photoresist layer are baked；
The substrate on first wafer after baking is etched, to form the opening.
Wherein, the temperature of the baking is 150 DEG C to 240 DEG C, and the baking time is 60 seconds to 300 seconds.
Forming the tapered opening, remaining metal is most important on the side wall for removing, and can ensure without gold
Belong to residual, avoids the short circuit for causing circuit.
Wherein, the insulating layer can select SiN, but be not limited to the material.
Step 6 is executed, forms network on the anti-reflecting layer, the network includes body layer and setting
Several mesh openings in the body layer, the mesh openings expose the anti-reflecting layer.
Specifically, as shown in Figure 2 D, after forming the anti-reflecting layer, the formation network foregoing description method
Further include：
The insulating layer in the opening and the dielectric layer are patterned, to form groove and expose the metal interconnection
Layer 2022；
On the insulating layer formed metal layer 207, to cover the insulating layer, while filling the groove, with institute
It states metal interconnection layer and forms connection.
Wherein, the constituent material of the metal layer 207 can be tungsten (W), nickel (Ni) or titanium (Ti)；Conductive metal nitride
Nitride layer may include titanium nitride (TiN) layer；Conductive metal oxide layer may include yttrium oxide (IrO2) layer；Metal silicide layer can
Including titanium silicide (TiSi) layer.
The deposition method of the metal layer 207 can select molecular beam epitaxy (MBE), metal organic chemical vapor deposition
(MOCVD), one in low-pressure chemical vapor deposition (LPCVD), laser ablation deposition (LAD) and selective epitaxy growth (SEG)
Kind.
Then the metal layer 207 is patterned, to form metal mesh structure 2071, tool on the pixel region
Body：
Patterned mask layer is formed on the metal layer；
Using the mask layer as mask etch metal layer, to form several mesh openings, Jin Er in the metal layer
The metal mesh structure is formed above the pixel region, while being removed above the insulating layer on the outside of the metal interconnection layer
The metal layer, to expose the insulating layer.
Wherein, the metal mesh structure 2071 includes that body layer and several grids being set in the body layer are opened
Mouthful, as shown in Figure 2 E, wherein Fig. 2 E right figures are the vertical view of left side figure encircled portion.
The metal mesh structure formed in the pixel region can be by inhibiting optical crosstalk (optical
Crosstalk) enhance image property, in addition phase-detection auto-focusing (Phase may be implemented in the metal mesh structure
Detection Auto Focus, PDAF) camera function.
It should be noted that the network is not limited to metal mesh structure, the solid material of network is constituted
Material must can absorb light, have good conductive property simultaneously, it is desirable that the band structure of material, which possesses, largely can move freely
Electronics, therefore preferred metal materials, but may be part nonmetal solid material (such as graphite).
The metal layer above the insulating layer on the outside of the metal interconnection layer is removed in this step, is retained simultaneously
The part being connected with the metal interconnection layer.
Finally, as shown in Figure 2 F, the method further includes after exposing the anti-reflecting layer：
The anti-reflecting layer above pad layer described in the logic area and the dielectric layer are patterned, to form pad
Opening 30 simultaneously exposes the pad layer 2021.
In addition, being inlaid with filter in the metal grill, such as the filter is embedded into the network
The mesh openings in.In the metal grill, the filter supplier does not need point-device patterning, Ke Yizeng
Strong quantum efficiency (quantum efficiency).
The method still further comprises the step of forming backside passivation layer after forming the bonding pad opening 30, described
Region of the passivation layer formation except the bonding pad opening.
The passivation layer is selected from PESIN layers, PETEOS layers, one or more of SiN layer and TEOS layers, thickness
Evidence is not confined to a certain numberical range.
So far, the introduction of the committed step of the manufacturing method of the back side illumination image sensor of the present embodiment is completed.Pass through
Above-mentioned steps form the structure of two-sided thin SOI (silicon-on-insulator).It next can also be according to existing various methods come complete
At the manufacture of entire back side illumination image sensor.
In conclusion the present invention provides a kind of back side illumination image sensing to solve the problems, such as current technique
The manufacturing method of device forms deep trench at the back side of first wafer in the method, and is formed in the deep trench
Anti-reflecting layer can reduce crosstalk and dark current by the setting.
It is also further formed metal mesh structure in the pixel region as a preferred method, suppression can be passed through
Optical crosstalk (optical crosstalk) processed enhances image property, and in addition phase inspection may be implemented in the metal mesh structure
Survey the camera function of auto-focusing (Phase Detection Auto Focus, PDAF).
Further, the filter is embedded into the metal grill, the filter supplier need not be very smart
True patterning can enhance quantum efficiency (quantum efficiency).
Embodiment two
The embodiment of the present invention provides a kind of back side illumination image sensor, uses manufacturer's legal system in previous embodiment one
It is standby to obtain.The back side illumination image sensor can be the integrated circuit or integrated circuit intermediate products for including radio frequency (RF) device.
In the following, describing a kind of structure of the back side illumination image sensor of proposition of the embodiment of the present invention with reference to Fig. 2 F.Wherein,
Fig. 2 F are a kind of sectional view of the structure of the back side illumination image sensor of the embodiment of the present invention.
As shown in Figure 2 F, the back side illumination image sensor of the present embodiment includes：
The first wafer including pixel region, first wafer include the first surface and second surface being oppositely arranged；
Second wafer 203, second wafer are engaged with the first surface of first wafer；
Deep trench is located at the second surface of first wafer, and the deep trench is located at the top of the pixel region；
Anti-reflecting layer 205 is filled in the deep trench.
Specifically, at least formed with substrate 203 on the first wafer, the substrate 203 is formed in the of first wafer
On one surface, the substrate 203 can be following at least one of the material being previously mentioned：Silicon, silicon-on-insulator (SOI), absolutely
Silicon (SSOI), stacking SiGe (S-SiGeOI) on insulator, germanium on insulator SiClx (SiGeOI) and absolutely are laminated on edge body
Germanium (GeOI) etc. on edge body.
Wherein, the first surface of first wafer includes pixel region and logic area, wherein the pixel region is used for
The various elements and interconnection structure of imaging sensor are formed, the logic area is used to form various interconnection structures and encapsulation is tied
Structure, such as the metal interconnection layer 2022 and pad layer 2021 that are formed in the logic area in embedded dielectric layer.
Wherein, be also formed with interconnection structure in the pixel region, the interconnection structure include metal layer (such as layers of copper or
Aluminium layer), metal plug or metal throuth hole, wherein the bottom metal layer of the interconnection structure is located at the upper of first crystal column surface
Side.
Optionally, other devices, such as passive device and radio-frequency devices etc. can also be formed in first wafer.
Optionally, the passive device may include metal-insulating layer-metal capacitor (MIM), spiral inductor etc..Make
For example, radio-frequency devices are also formed on the first surface of the first wafer.In the present embodiment, transistor is various for constituting
Circuit, radio-frequency devices are used to form radio frequency component or module, and interconnection structure is for connecting transistor, radio-frequency devices and preceding end-apparatus
Other assemblies in part.
Wherein, the concrete structure and forming method of the various components formed in first wafer, the technology of this field
Personnel can select with reference to the prior art according to actual needs, and details are not described herein again.
Second wafer 201 is carrying substrate (carrier wafer), for subsequently the first wafer to be thinned
Front-end devices are carried and protected in the technique of processing and other subsequent techniques.
Second wafer 201 can be common silicon substrate or other suitable substrates, not be defined herein.
Wherein, in second wafer 201 trapping layer (high is formed with in the first wafer bonding one side
Trap layer), to improve second wafer 201 and the first wafer bonding performance.
Optionally, the trapping layer includes polysilicon or unformed silicon.
It is formed with deep trench in the substrate of first wafer.
Wherein, the depth of the deep trench is at least more than the half of the substrate thickness, and the depth-to-width ratio of the deep trench is extremely
It is more than 5 less.
The deep trench is shape wide at the top and narrow at the bottom, has enough overetched amounts, to form larger opening, therefore
Can ensure in etching process will not be in the congregate polymer of the deep trench, while can also be in subsequent technique
Anti-reflecting layer can preferably be filled.
Wherein, the refractive index of the anti-reflecting layer radially inwardly successively decreasing along the deep trench.Wherein, the diameter
To referring to direction from the side wall of the deep trench from outside to inside, such as the direction of arrow meaning in Fig. 2A.Such as the antireflection
The refractive index of layer is successively decreased from the side wall ecto-entad of the deep trench.For example, the refractive index of the anti-reflecting layer is from the zanjon
Side wall ecto-entad the successively decreasing at gradient of slot.
Optionally, the anti-reflecting layer includes having a kind of material of different refractivity or the different a variety of materials of refractive index
Material.
Optionally, the anti-reflecting layer include the zirconium oxide of high refractive index, titanium oxide, tantalum oxide, silicon nitride, hafnium oxide,
Germanium oxide, aluminium oxide, silicon oxynitride, the oxide rich in element silicon and doping the low silica of silica and refractive index and
Air.
Optionally, the formation temperature of the anti-reflecting layer is less than 400 DEG C.
Deep trench is formed at the back side of first wafer, and anti-reflecting layer is formed in the deep trench, by described
Setting can reduce crosstalk and dark current.
It is formed with the opening for extending to the dielectric layer in the logic area, insulation is formed on the surface of the opening
Layer and the metal layer above the insulating layer, the metal layer are connect with the metal interconnection layer.
Optionally, the opening is up-narrow and down-wide tapered opening.
Optionally, the sidewall slope angle of the opening is less than 50 °, and the width of the opening is more than 50 μm.
The formation being isolated on the anti-reflecting layer has network, wherein being embedded with filter in the network.
The network includes body layer and several mesh openings for being set in the body layer, described in the mesh openings are exposed
Anti-reflecting layer.
The network is metal mesh structure 2071 in the present invention.Wherein, the composition of the metal mesh structure
Material can be tungsten (W), nickel (Ni) or titanium (Ti)；Conductive metal nitride layer may include titanium nitride (TiN) layer；Conductive gold
Belong to oxide skin(coating) and may include yttrium oxide (IrO2) layer；Metal silicide layer may include titanium silicide (TiSi) layer.
It should be noted that the network is not limited to metal mesh structure, the solid material of network is constituted
Material must can absorb light, have good conductive property simultaneously, it is desirable that the band structure of material, which possesses, largely can move freely
Electronics, therefore preferred metal materials, but may be part nonmetal solid material (such as graphite).
The metal layer above the insulating layer on the outside of the metal interconnection layer is removed in this step, is retained simultaneously
The part being connected with the metal interconnection layer.
Finally, as shown in Figure 2 F, the method further includes after exposing the anti-reflecting layer：
The anti-reflecting layer above pad layer described in the logic area and the dielectric layer are patterned, to form pad
Opening 30 simultaneously exposes the pad layer 2021.
The metal mesh structure formed in the pixel region can be by inhibiting optical crosstalk (optical
Crosstalk) enhance image property, in addition phase-detection auto-focusing (Phase may be implemented in the metal mesh structure
Detection Auto Focus, PDAF) camera function.
In addition, being inlaid with filter in the metal grill, such as the filter is embedded into the network
The mesh openings in.In the metal grill, the filter supplier does not need point-device patterning, Ke Yizeng
Strong quantum efficiency (quantum efficiency).
Described image sensor further includes backside passivation layer, area of the passivation layer formation except the bonding pad opening
Domain.
The passivation layer is selected from PESIN layers, PETEOS layers, one or more of SiN layer and TEOS layers, thickness
Evidence is not confined to a certain numberical range.
The back side illumination image sensor of the present embodiment can be other circuits or module.Since the back side illumination image senses
The performance of device gets a promotion, thus can meet under more application environments the needs of to device performance.
Embodiment three
The embodiment of the present invention provides a kind of electronic device comprising electronic building brick and the back of the body being electrically connected with the electronic building brick
Illuminated image sensor.Wherein, the back side illumination image sensor includes the back side illumination image sensing according to embodiment one
The back side illumination image sensor of the manufacturing method manufacture of device, or including the back side illumination image sensor described in embodiment two.
The electronic device, can be mobile phone, tablet computer, laptop, net book, game machine, television set, VCD,
Any electronic product such as DVD, navigator, camera, video camera, recording pen, MP3, MP4, PSP or equipment, can also be to have
The intermediate products of above-mentioned back side illumination image sensor, such as：Cell phone mainboard etc. with the integrated circuit.
Wherein, Fig. 3 shows the example of mobile phone handsets.Mobile phone handsets 300, which are equipped with, to be included in shell 301
Display portion 302, operation button 303, external connection port 304, loud speaker 305, microphone 306 etc..
The wherein described mobile phone handsets include back side illumination image sensor above-mentioned, or the back of the body according to embodiment one
Back side illumination image sensor obtained by the manufacturing method of illuminated image sensor, the back side illumination image sensor include：Packet
The first wafer of pixel region is included, first wafer includes the first surface and second surface being oppositely arranged；Second wafer, it is described
Second wafer is engaged with the first surface of first wafer；Deep trench is located at the second surface of first wafer, and
The deep trench is located at the top of the pixel region；Anti-reflecting layer is filled in the deep trench.
The electronic device of the present invention, as a result of above-mentioned back side illumination image sensor, thus equally has the advantages that above-mentioned.
The present invention is illustrated by above-described embodiment, but it is to be understood that, above-described embodiment is only intended to
The purpose of citing and explanation, and be not intended to limit the invention within the scope of described embodiment.In addition people in the art
It is understood that the invention is not limited in above-described embodiment, introduction according to the present invention can also be made more kinds of member
Variants and modifications, these variants and modifications are all fallen within scope of the present invention.Protection scope of the present invention by
The appended claims and its equivalent scope are defined.
Claims (26)
1. a kind of manufacturing method of back side illumination image sensor, which is characterized in that the method includes：
Offer includes the first wafer of pixel region, and first wafer includes the first surface and second surface being oppositely arranged；
Second wafer is provided and engages second wafer with the first surface of first wafer；
The deep trench at several intervals is formed in the second surface opposite with the pixel region；
Anti-reflecting layer is formed in the deep trench.
2. according to the method described in claim 1, it is characterized in that, the refractive index of the anti-reflecting layer along the deep trench diameter
Successively decrease to inward direction.
3. according to the method described in claim 2, it is characterized in that, the anti-reflecting layer includes the one kind for having different refractivity
Material or the different multiple material of refractive index.
4. according to the method described in claim 1, it is characterized in that, first wafer includes substrate, the deep trench is formed
In the substrate, the depth of the deep trench is at least more than the half of the substrate thickness, and the depth-to-width ratio of the deep trench is extremely
It is more than 5 less.
5. according to the method described in claim 1, it is characterized in that, the formation temperature of the anti-reflecting layer is less than 400 DEG C.
6. according to the method described in claim 1, it is characterized in that, the anti-reflecting layer covers the second surface and fills institute
Deep trench is stated, the method further includes after forming the anti-reflecting layer：
Network is formed on the anti-reflecting layer, the network includes body layer and is set in the body layer
Several mesh openings, the mesh openings expose the anti-reflecting layer.
7. according to the method described in claim 6, it is characterized in that, embedded in the mesh openings of the wherein described network
There is filter.
8. according to the method described in claim 6, it is characterized in that, first wafer further includes being located at the pixel region side
Logic area, the metal interconnection layer and pad layer being formed in the logic area in embedded dielectric layer.
9. according to the method described in claim 8, it is characterized in that, first wafer includes substrate, in the substrate surface
With form the anti-reflecting layer in the deep trench after, form the network foregoing description method and further include：
The anti-reflecting layer on the patterning substrate and the substrate opposite with the logic area is open and reveals to be formed
Go out the dielectric layer；
On the anti-reflecting layer and the surface of the opening forms insulating layer；
The insulating layer in the opening and the dielectric layer are patterned, to form groove and expose the metal interconnection layer；
Metal layer is formed on the insulating layer, to cover the insulating layer, while filling the groove, with mutual with the metal
Join layer and forms connection.
10. according to the method described in claim 9, it is characterized in that, the method for forming the opening includes：
Photoresist layer is formed on the substrate and the anti-reflecting layer on the second surface；
To the photoresist layer pattern, to remove the photoresist layer above the logic area；
First wafer, second wafer and the photoresist layer are baked；
The substrate on first wafer after baking is etched, to form the opening.
11. according to the method described in claim 10, it is characterized in that, the temperature of the baking be 150 DEG C to 240 DEG C, it is described
Baking time is 60 seconds to 300 seconds.
12. according to the method described in claim 9, it is characterized in that, the sidewall slope angle of the opening be less than 50 °, it is described
The width of opening is more than 50 μm.
13. according to the method described in claim 9, it is characterized in that, being formed after the metal layer, the method further includes：
Patterned mask layer is formed on the metal layer；
Using the mask layer as mask etch metal layer, to form the network of metal above the pixel region, together
When remove the metal layer above the insulating layer on the outside of the metal interconnection layer, to expose the insulating layer.
14. according to the method for claim 13, which is characterized in that the method further includes after exposing the insulating layer：
The insulating layer above pad layer described in the logic area and the dielectric layer are patterned, to form bonding pad opening simultaneously
Expose the pad layer.
15. according to the method described in claim 1, it is characterized in that, first wafer be device wafers, second wafer
To support wafer.
16. a kind of back side illumination image sensor, which is characterized in that the back side illumination image sensor includes：
The first wafer including pixel region, first wafer include the first surface and second surface being oppositely arranged；
Second wafer, second wafer are engaged with the first surface of first wafer；
Deep trench is located at the second surface of first wafer, and the deep trench is located at the top of the pixel region；
Anti-reflecting layer is filled in the deep trench.
17. back side illumination image sensor according to claim 16, which is characterized in that the refractive index edge of the anti-reflecting layer
The deep trench is radially inwardly successively decreased.
18. back side illumination image sensor according to claim 17, which is characterized in that the anti-reflecting layer includes having not
The different multiple material with a kind of material or refractive index of refractive index.
19. back side illumination image sensor according to claim 16, which is characterized in that at least shape on first wafer
At thering is substrate, the deep trench to be formed in the substrate, one of depth at least more than the substrate thickness of the deep trench
Half, the depth-to-width ratio of the deep trench is at least more than 5.
20. back side illumination image sensor according to claim 16, which is characterized in that anti-reflecting layer covering described the
The deep trench is simultaneously filled in two surfaces, and the back side illumination image sensor further includes：
Network is set to above the anti-reflecting layer, and the network includes body layer and is set to the body layer
In several mesh openings, the mesh openings expose the anti-reflecting layer.
21. back side illumination image sensor according to claim 20, which is characterized in that the back side illumination image sensor is also
Including：
Filter, the filter is embedded to be set in the mesh openings of the network.
22. back side illumination image sensor according to claim 20, which is characterized in that first wafer at least further includes
Logic area positioned at the pixel region side, the metal interconnection layer and pad being formed in the logic area in embedded dielectric layer
Layer.
23. back side illumination image sensor according to claim 22, which is characterized in that be formed with and wear in the logic area
The opening for crossing the dielectric layer portions thickness is formed with insulating layer and above the insulating layer on the surface of the opening
Metal layer, the metal layer are connect with the metal interconnection layer.
24. back side illumination image sensor according to claim 23, which is characterized in that the sidewall slope angle of the opening
Less than 50 °, the width of the opening is more than 50 μm.
25. back side illumination image sensor according to claim 21, which is characterized in that being given an account of in the logic area
Bonding pad opening is formed in electric layer, the bonding pad opening exposes the pad layer.
26. a kind of electronic device, which is characterized in that the electronic device includes the back-illuminated type described in one of claim 16 to 25
Imaging sensor.
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|---|---|---|---|---|
| CN102067316A (en) * | 2008-07-09 | 2011-05-18 | 柯达公司 | Backside illuminated image sensor with backside trenches |
| CN103579270A (en) * | 2012-08-08 | 2014-02-12 | 索尼公司 | Image sensor, imaging apparatus, and apparatus and method for manufacturing image sensor |
| US8779484B2 (en) * | 2012-11-29 | 2014-07-15 | United Microelectronics Corp. | Image sensor and process thereof |
| CN104051478A (en) * | 2013-03-14 | 2014-09-17 | 台湾积体电路制造股份有限公司 | Backside structure for a BSI image sensor device |
| CN106298829A (en) * | 2016-11-08 | 2017-01-04 | 武汉新芯集成电路制造有限公司 | A kind of forming method of metal grate |
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- 2017-01-23 CN CN201710059033.7A patent/CN108346673B/en active Active
Patent Citations (5)
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|---|---|---|---|---|
| CN102067316A (en) * | 2008-07-09 | 2011-05-18 | 柯达公司 | Backside illuminated image sensor with backside trenches |
| CN103579270A (en) * | 2012-08-08 | 2014-02-12 | 索尼公司 | Image sensor, imaging apparatus, and apparatus and method for manufacturing image sensor |
| US8779484B2 (en) * | 2012-11-29 | 2014-07-15 | United Microelectronics Corp. | Image sensor and process thereof |
| CN104051478A (en) * | 2013-03-14 | 2014-09-17 | 台湾积体电路制造股份有限公司 | Backside structure for a BSI image sensor device |
| CN106298829A (en) * | 2016-11-08 | 2017-01-04 | 武汉新芯集成电路制造有限公司 | A kind of forming method of metal grate |
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