CN108344386A - Body surface flatness method for fast measuring - Google Patents
Body surface flatness method for fast measuring Download PDFInfo
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- CN108344386A CN108344386A CN201810154981.3A CN201810154981A CN108344386A CN 108344386 A CN108344386 A CN 108344386A CN 201810154981 A CN201810154981 A CN 201810154981A CN 108344386 A CN108344386 A CN 108344386A
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- image data
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
Abstract
Body surface flatness method for fast measuring of the present invention belongs to the technical fields such as industry, production, machinery, optics, detection, test.This method adjusts measured object first, then the burnt imaging time of the standard of setting imaging sensor, defocus imaging time, non-imaged time and first threshold and second threshold, the position of moving mass and actuation time are adjusted again, then rotary electric machine, motor is set to complete to rotate for N weeks, imaging sensor obtains (k+1) × N number of image data, write as matrix form, image data maximum value and image data minimum value are found out from the non-the first row in matrix, and judges whether noise meets detection environmental requirement；Finally in the case where noise meets detection environmental requirement, measured object upper table surface evenness is evaluated；The present invention can not only carry out qualitative detection to body surface flatness, and operating process is simple, and operating method is easy, and can noise be filtered out or be monitored, and testing result is accurate.
Description
Technical field
Body surface flatness method for fast measuring of the present invention belongs to the skills such as industry, production, machinery, optics, detection, test
Art field.
Background technology
The measurement of planeness refers to variation of the tested actual surface to its ideal plane.
Flatness error is to be compared tested actual surface with ideal plane, and line value distance between the two is flat
Face degree error amount；If or by measuring the relative height differential done in actual surface, then the flatness mistake indicated with line value that converts
Difference.
The common method that flatness error measures has following several：
1, optical flat interferometry：Ideal plane is embodied with the working face of optical parallel, directly with the bending degree of interference fringe
Determine the flatness error value of measured surface.
2, table mensuration is beaten：It is that tested part and micrometer are placed on dressing plate to beat table mensuration, with dressing plate
It is point-by-point or measured along several rectilinear directions along actual surface with micrometer as measurement datum.
3, fluid level method：Fluid level method is to use fluid level as measurement datum, and fluid level is by the liquid level in " connection tank "
It constitutes, is then measured with sensor.This method is mainly used for measuring the flatness error of big plane.
4, beam plane method：Beam plane method is measured using quasi- value telescope and aiming target mirror, and practical table is selected
Measurement datum of the beam plane that three points of lie farthest away are formed on face as flatness error.
5, laser planeness measuring instrument：Laser planeness measuring instrument is used to measure the flatness error of large-scale plane.
6, the method for measuring flatness error using data collecting instrument connection dial gauge.
Above method technology maturation can realize accurate measurement, but theoretical foundation is excessively professional, need professional person into
Row operation and measurement, moreover, for the noise in measurement process, lack effective inhibition means, also influence to a certain extent
Measurement accuracy.
Invention content
In view of the above-mentioned problems, the invention discloses a kind of body surface flatness method for fast measuring, it can not only be to object
Body surface surface evenness carries out qualitative detection, and operating process is simple, and operating method is easy, and can be filtered out to noise
Or monitoring, testing result are accurate.
The object of the present invention is achieved like this：
A kind of body surface flatness rapid measurement device, is made of illumination image-forming module and motion；
The illumination image-forming module is made of lighting system and imaging system；In the illumination system, along light propagation side
To setting gradually laser, spectroscope, object lens and measured object；The object lens are carried by objective table, are moved along optical axis direction；Institute
It states measured object to be carried by two-dimension translational platform, the two dimensional motion in the plane of vertical optical axis；The light beam that laser is sent out, passes through successively
Cross spectroscope and object lens transmission, accurate burnt or defocus to measured object surface；In imaging systems, it is set successively along the light direction of propagation
Set measured object, object lens, spectroscope, attenuator, pin hole and imaging sensor；The light beam of measured object reflection, and pass through object
Mirror transmits, spectroscope reflection, attenuator transmission, in accurate burnt or defocus to pin hole；
The motion is turned by upper fixing end, upper boom, moving mass, lower beam, lower fixing end, motor, shaft joint, T-type
Disk and limit protrusion composition；Fixed end is linear bearing, and linear guide rail structure is combined into upper boom；The lower fixing end
For linear bearing, linear guide rail structure is combined into lower beam；The top of the moving mass connects upper boom, the lower section connection of moving mass
Lower beam, moving mass are the slab construction with straight slot, and the straight slot includes a minor arc straight slot and is symmetricly set on minor arc straight slot
The width of the direct through groove at both ends, minor arc straight slot and direct through groove is equal, and the distance between direct through groove is not less than corresponding to minor arc straight slot
The diameter of circumference；The relative position of the motor, upper fixing end and lower fixing end is fixed, and the T shapes turntable is stretched including cylinder
Go out structure and disk-like structure, the shaft of motor connects the cylindrical of T shape turntables by shaft coupling and stretches out structure, rotates and make in motor
Under, the disk-like structure of T shape turntables is provided with section in the plane internal rotation of motor vertical shaft in the end of disk-like structure
For circular limit protrusion, the limit protrusion is inserted into the straight slot of moving mass, and under motor rotary action, moving mass carries out
Reciprocating intermittent movement；
Moving mass is under dead state, and the quasi- coke of light beam that laser is sent out arrives measured object surface, measured object reflection
On the quasi- coke to pin hole of light beam.
Above-mentioned body surface flatness rapid measurement device, the time for exposure of the imaging sensor and the loading
The dead time of platform is identical.
A kind of body surface flatness realized on above-mentioned body surface flatness rapid measurement device quickly measures dress
Method is set, is included the following steps：
Step a, measured object is adjusted, a certain position of the measured object upper surface is made to be located at the focus position of the object lens
It sets, and limit protrusion is required to be located at the minimum point moved in minor arc straight slot in the block, limit protrusion is located at its movement locus most
Low spot；
Step b, the imaging time t of imaging sensor is set1, non-imaged time t2With threshold value t, wherein
L is the movement minor arc straight slot length in the block, and ω is the angular velocity of rotation of the motor, and r is the moving mass
In minor arc straight slot radius, π is pi；
Step c, the imaging time t of imaging sensor is adjusted1It is located at the limit protrusion and moves minor arc straight slot in the block
In and moving mass static time overlap；
Step d, rotary electric machine makes motor complete to rotate for N weeks, in limit protrusion is located at and moves minor arc straight slot in the block and
When moving mass is static, the two-dimension translational platform is static, in remaining time, is moved in the horizontal plane in two-dimension translational platform；Image passes
Sensor obtains N number of image data, respectively fig1,fig2,...,figN；
Step e, maximizing fig in N number of image data is obtained from imaging sensormaxWith minimum value figmin；
Step f, measured object upper table surface evenness is evaluated, if：
Measured object upper table surface evenness is unsatisfactory for requiring；
Measured object upper table surface evenness is unsatisfactory for requiring.
A kind of body surface flatness rapid measurement device, is made of illumination image-forming module and motion；
The illumination image-forming module is made of lighting system and imaging system；In the illumination system, along light propagation side
To setting gradually laser, spectroscope, object lens and measured object；The object lens are carried by objective table, are moved along optical axis direction；Institute
It states measured object to be carried by two-dimension translational platform, the two dimensional motion in the plane of vertical optical axis；The light beam that laser is sent out, passes through successively
Cross spectroscope and object lens transmission, accurate burnt or defocus to measured object surface；In imaging systems, it is set successively along the light direction of propagation
Set measured object, object lens, spectroscope, attenuator, pin hole and imaging sensor；The light beam of measured object reflection, and pass through object
Mirror transmits, spectroscope reflection, attenuator transmission, in accurate burnt or defocus to pin hole；
The motion is turned by upper fixing end, upper boom, moving mass, lower beam, lower fixing end, motor, shaft joint, T-type
Disk and limit protrusion composition；Fixed end is linear bearing, and linear guide rail structure is combined into upper boom；The lower fixing end
For linear bearing, linear guide rail structure is combined into lower beam；The top of the moving mass connects upper boom, the lower section connection of moving mass
Lower beam, moving mass are the slab construction with straight slot, and the straight slot includes a minor arc straight slot and is symmetricly set on minor arc straight slot
The width of the direct through groove at both ends, minor arc straight slot and direct through groove is equal, and the distance between direct through groove is not less than corresponding to minor arc straight slot
The diameter of circumference；The relative position of the motor, upper fixing end and lower fixing end is fixed, and the T shapes turntable is stretched including cylinder
Go out structure and disk-like structure, the shaft of motor connects the cylindrical of T shape turntables by shaft coupling and stretches out structure, rotates and make in motor
Under, the disk-like structure of T shape turntables is provided with section in the plane internal rotation of motor vertical shaft in the end of disk-like structure
For circular limit protrusion, the limit protrusion is inserted into the straight slot of moving mass, and under motor rotary action, moving mass carries out
Reciprocating intermittent movement；
Moving mass is under motion state, light beam defocus that laser is sent out to measured object surface, measured object reflection
In light beam defocus to pin hole.
Above-mentioned body surface flatness rapid measurement device, the time for exposure of the imaging sensor and the loading
The dead time of platform is identical.
A kind of body surface flatness realized on above-mentioned body surface flatness rapid measurement device quickly measures dress
Method is set, is included the following steps：
Step a, measured object is adjusted, a certain position of the measured object upper surface is made to be located at the focus position of the object lens
It sets, and limit protrusion is required to be located at the minimum point moved in minor arc straight slot in the block, limit protrusion is located at its movement locus most
High point；
Step b, the burnt imaging time t of the standard of setting imaging sensor1, defocus imaging time t2, non-imaged time t3With first
Threshold value t1' and second threshold t2', wherein
L is the movement minor arc straight slot length in the block, and ω is the angular velocity of rotation of the motor, and r is the moving mass
In minor arc straight slot radius, k is number, and π is pi；
Step c, adjustment limit protrusion is located at the minimum point moved in minor arc straight slot in the block, and limit protrusion is located at its movement
At the time of the peak of track and the burnt imaging time t of the standard of imaging sensor1Intermediate time overlap；And the company of imaging sensor
Continue k defocus imaging time t2It is located at the time weight that in movement minor arc straight slot in the block and moving mass is static with the limit protrusion
It closes；
Step d, rotary electric machine makes motor complete to rotate for N weeks, in accurate burnt imaging time t1With defocus imaging time t2, described
Two-dimension translational platform is static, in non-imaged time t3, moved in the horizontal plane in two-dimension translational platform；Imaging sensor obtains (k+1)
× N image data, being write as matrix form is：
Each image data for being classified as one rotation period of motor and obtaining；Accurate burnt imaging in each rotation period of first behavior
Time t1Under image data；
Step e, image data maximum value fig is found out from following matrix1maxWith image data minimum value fig1min；
If step f,：
Noise is unsatisfactory for detection environmental requirement, improves measuring environment, reacquires data；
Noise meets detection environmental requirement, into next step；
Step g, image data maximum value fig is found out from following matrix2maxWith image data minimum value fig2min；
(fig1,1 fig1,2 … fig1,N)
If step h,：
Measured object upper table surface evenness is unsatisfactory for requiring；
Measured object upper table surface evenness is unsatisfactory for requiring.
Advantageous effect：
The first, the present invention can not only carry out qualitative detection to body surface flatness, and operating process is simple, operation
Method is easy, and can noise be filtered out or be monitored, and testing result is accurate.
The second, under the special construction of motion of the present invention, especially moving mass, motor uniform rotation can be realized,
The reciprocating intermittent movement of moving mass reduces the complexity of motor control.
Third, under the special construction of motion of the present invention, especially moving mass, moving mass movement and static switching
Directly determined by the structure of moving mass, and any change does not occur for the rotating manner of motor, i.e., need not change any control
Parameter, it is achieved that the slitless connection between component movement and stopping two states.
4th, under the special construction of motion of the present invention, especially moving mass, as long as the problems such as motor throws switch not shadow
The problems such as sound motor rotary state, especially rotating speed, moving mass can complete reciprocating intermittent movement naturally, therefore motor throws switch is just
It can be ignored, accurately controlled there is no need to motor to ensure the kinematic accuracy of parts, it is complicated that this also reduces controls
Property.
Description of the drawings
Fig. 1 is the illumination image-forming module schematic diagram in body surface flatness rapid measurement device of the present invention.
Fig. 2 is the motion structural schematic diagram in body surface flatness rapid measurement device of the present invention.
Fig. 3 is the structural schematic diagram of moving mass.
In figure：1-1 lasers, 1-2 spectroscopes, 1-3 objective tables, 1-4 object lens, 1-5 two-dimension translationals platform, 1-6 measured objects,
Under 1-7 attenuators, 1-8 pin holes, 1-9 imaging sensors, 2-1 upper fixing ends, 2-2 upper booms, 2-3 moving mass, 2-4 lower beams, 2-5
Fixing end, 2-6 motors, 2-7 shaft joints, 2-8T types turntable, 2-9 limit protrusions.
Description of the drawings
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
Specific embodiment one
The present embodiment is body surface flatness rapid measurement device embodiment of the present invention.
The body surface flatness rapid measurement device of the present embodiment, is made of illumination image-forming module and motion；Its
In, the schematic diagram of image-forming module is illuminated as shown in Figure 1, the structural schematic diagram of motion is as shown in Figure 2.
The illumination image-forming module is made of lighting system and imaging system；In the illumination system, along light propagation side
To setting gradually laser 1-1, spectroscope 1-2, object lens 1-4 and measured object 1-6；The object lens 1-4 is held by objective table 1-3
It carries, is moved along optical axis direction；The measured object 1-6 is carried by two-dimension translational platform 1-5, two maintenance and operations in the plane of vertical optical axis
It is dynamic；The light beam that laser 1-1 is sent out passes through spectroscope 1-2 and object lens 1-4 transmissions, accurate burnt or defocus to measured object 1-6 successively
Surface；In imaging systems, measured object 1-6, object lens 1-4, spectroscope 1-2, attenuator are set gradually along the light direction of propagation
1-7, pin hole 1-8 and imaging sensor 1-9；The light beam of measured object 1-6 reflections, and by object lens 1-4 transmissions, spectroscope 1-
2 reflections, attenuator 1-7 are transmitted, in accurate burnt or defocus to pin hole 1-8；
The motion is by upper fixing end 2-1, upper boom 2-2, moving mass 2-3, lower beam 2-4, lower fixing end 2-5, electricity
Machine 2-6, shaft joint 2-7, T-type turntable 2-8 and limit protrusion 2-9 compositions；Fixed end 2-1 is linear bearing, with upper boom
2-2 is combined into linear guide rail structure；The lower fixing end 2-5 is linear bearing, and linear guide rail structure is combined into lower beam 2-4；
The top of the moving mass 2-3 connects upper boom 2-2, and the lower section of moving mass 2-3 connects lower beam 2-4, and moving mass 2-3 is with straight slot
Slab construction, the straight slot includes a minor arc straight slot and is symmetricly set on the direct through groove at minor arc straight slot both ends, minor arc straight slot
It is equal with the width of direct through groove, diameter of the distance between the direct through groove not less than circumference corresponding to minor arc straight slot；The motor 2-
6, the relative position of upper fixing end 2-1 and lower fixing end 2-5 are fixed, and the T shapes turntable 2-8 includes cylindrical stretching structure and disk
The shaft of shape structure, motor 2-6 stretches out structure by the cylindrical of shaft coupling 2-7 connection T shape turntables 2-8, is rotated in motor 2-6
Under effect, the disk-like structure of T shape turntables 2-8 motor vertical 2-6 shafts plane internal rotation, in the end of disk-like structure, if
It is circular limit protrusion 2-9 to be equipped with section, and the limit protrusion 2-9 is inserted into the straight slot of moving mass 2-3, in motor 2-6
Under rotary action, moving mass 2-3 carries out reciprocating intermittent movement；
For moving mass 2-3 under dead state, the light beam that laser 1-1 is sent out is accurate burnt to the surfaces measured object 1-6, measured object
On the quasi- coke to pin hole 1-8 of light beam of part 1-6 reflections.
Specific embodiment two
The present embodiment is body surface flatness rapid measurement device embodiment of the present invention.
The body surface flatness rapid measurement device of the present embodiment further limits on the basis of specific embodiment one
It is fixed：The time for exposure of the imaging sensor 1-9 is identical as the dead time of objective table 1-3.
Specific embodiment three
The present embodiment is body surface flatness method for fast measuring embodiment of the present invention.
The body surface flatness method for fast measuring of the present invention of the present embodiment, in specific embodiment one or specific embodiment
It is realized on body surface flatness rapid measurement device described in two.
The body surface flatness method for fast measuring of the present invention of the present embodiment, includes the following steps：
Step a, measured object 1-6 is adjusted, a certain position of the upper surfaces the measured object 1-6 is made to be located at the object lens 1-
4 focal position, and require the minimum point in the minor arc straight slot that limit protrusion 2-9 is located in moving mass 2-3, limit protrusion 2-9
Positioned at the minimum point of its movement locus；
Step b, the imaging time t of setting imaging sensor 1-91, non-imaged time t2With threshold value t, wherein
L is the minor arc straight slot length in the moving mass 2-3, and ω is the angular velocity of rotation of the motor 2-6, and r is described
The radius of minor arc straight slot in moving mass 2-3, π are pi；
Step c, the imaging time t of adjustment imaging sensor 1-91It is located in moving mass 2-3 with the limit protrusion 2-9
In minor arc straight slot and time that moving mass 2-3 is static overlaps；
Step d, rotary electric machine 2-6 makes motor 2-6 complete to rotate for N weeks, is located in moving mass 2-3 in limit protrusion 2-9
In minor arc straight slot and when moving mass 2-3 is static, the two-dimension translational platform 1-5 is static, in remaining time, in two-dimension translational platform 1-5
It moves in the horizontal plane；Imaging sensor 1-9 obtains N number of image data, respectively fig1,fig2,...,figN；
Step e, maximizing fig in N number of image data is obtained from imaging sensor 1-9maxWith minimum value figmin；
Step f, measured object 1-6 upper table surface evennesses are evaluated, if：
Measured object 1-6 upper table surface evennesses are unsatisfactory for requiring；
Measured object 1-6 upper table surface evennesses are unsatisfactory for requiring.
Under the collective effect of specific embodiment one and specific embodiment three, or in specific embodiment two and specific embodiment
Under three collective effect, the burnt information of the standard on the surfaces measured object 1-6 can be converted to intensity signal by imaging sensor 1-9, if
There are noises during light is propagated or during opto-electronic conversion, since noise meets Gaussian Profile, and image sensing
The imaging time of device 1-9 is located in the minor arc straight slot in moving mass 2-3 with the limit protrusion 2-9 and moving mass 2-3 is static
Time overlaps, i.e., there are one very long imaging times for tool, therefore can be averaged to noise, and realization filters out noise, carries
High measurement accuracy, and long imaging time can be completed to measure under conditions of low-light signal, improve the robustness of measurement.
Specific embodiment four
The present embodiment is body surface flatness rapid measurement device embodiment of the present invention.
A kind of body surface flatness rapid measurement device, is made of illumination image-forming module and motion；Wherein, it illuminates
The schematic diagram of image-forming module is as shown in Figure 1, the structural schematic diagram of motion is as shown in Figure 2.
The illumination image-forming module is made of lighting system and imaging system；In the illumination system, along light propagation side
To setting gradually laser 1-1, spectroscope 1-2, object lens 1-4 and measured object 1-6；The object lens 1-4 is held by objective table 1-3
It carries, is moved along optical axis direction；The measured object 1-6 is carried by two-dimension translational platform 1-5, two maintenance and operations in the plane of vertical optical axis
It is dynamic；The light beam that laser 1-1 is sent out passes through spectroscope 1-2 and object lens 1-4 transmissions, accurate burnt or defocus to measured object 1-6 successively
Surface；In imaging systems, measured object 1-6, object lens 1-4, spectroscope 1-2, attenuator are set gradually along the light direction of propagation
1-7, pin hole 1-8 and imaging sensor 1-9；The light beam of measured object 1-6 reflections, and by object lens 1-4 transmissions, spectroscope 1-
2 reflections, attenuator 1-7 are transmitted, in accurate burnt or defocus to pin hole 1-8；
The motion is by upper fixing end 2-1, upper boom 2-2, moving mass 2-3, lower beam 2-4, lower fixing end 2-5, electricity
Machine 2-6, shaft joint 2-7, T-type turntable 2-8 and limit protrusion 2-9 compositions；Fixed end 2-1 is linear bearing, with upper boom
2-2 is combined into linear guide rail structure；The lower fixing end 2-5 is linear bearing, and linear guide rail structure is combined into lower beam 2-4；
The top of the moving mass 2-3 connects upper boom 2-2, and the lower section of moving mass 2-3 connects lower beam 2-4, and moving mass 2-3 is with straight slot
Slab construction, the straight slot includes a minor arc straight slot and is symmetricly set on the direct through groove at minor arc straight slot both ends, minor arc straight slot
It is equal with the width of direct through groove, diameter of the distance between the direct through groove not less than circumference corresponding to minor arc straight slot；The motor 2-
6, the relative position of upper fixing end 2-1 and lower fixing end 2-5 are fixed, and the T shapes turntable 2-8 includes cylindrical stretching structure and disk
The shaft of shape structure, motor 2-6 stretches out structure by the cylindrical of shaft coupling 2-7 connection T shape turntables 2-8, is rotated in motor 2-6
Under effect, the disk-like structure of T shape turntables 2-8 motor vertical 2-6 shafts plane internal rotation, in the end of disk-like structure, if
It is circular limit protrusion 2-9 to be equipped with section, and the limit protrusion 2-9 is inserted into the straight slot of moving mass 2-3, in motor 2-6
Under rotary action, moving mass 2-3 carries out reciprocating intermittent movement；
Moving mass 2-3 is under motion state, light beam defocus that laser 1-1 is sent out to the surfaces measured object 1-6, measured object
In the light beam defocus to pin hole 1-8 of part 1-6 reflections.
Specific embodiment five
The present embodiment is body surface flatness rapid measurement device embodiment of the present invention.
The body surface flatness rapid measurement device of the present embodiment further limits on the basis of specific embodiment four
It is fixed：The time for exposure of the imaging sensor 1-9 is identical as the dead time of objective table 1-3.
Specific embodiment six
The present embodiment is body surface flatness method for fast measuring embodiment of the present invention.
The body surface flatness method for fast measuring of the present invention of the present embodiment, in specific embodiment four or specific embodiment
It is realized on body surface flatness rapid measurement device described in five.
The body surface flatness method for fast measuring of the present invention of the present embodiment, includes the following steps：
Step a, measured object 1-6 is adjusted, a certain position of the upper surfaces the measured object 1-6 is made to be located at the object lens 1-
4 focal position, and require the minimum point in the minor arc straight slot that limit protrusion 2-9 is located in moving mass 2-3, limit protrusion 2-9
Positioned at the peak of its movement locus；
Step b, the burnt imaging time t of the standard of setting imaging sensor 1-91, defocus imaging time t2, non-imaged time t3With
First threshold t1' and second threshold t2', wherein
L is the minor arc straight slot length in the moving mass 2-3, and ω is the angular velocity of rotation of the motor 2-6, and r is described
The radius of minor arc straight slot in moving mass 2-3, k are number, and π is pi；
Step c, adjustment limit protrusion 2-9 is located at the minimum point in the minor arc straight slot in moving mass 2-3, limit protrusion 2-9
At the time of positioned at the peak of its movement locus with the burnt imaging time t of the standard of imaging sensor 1-91Intermediate time overlap；And
The continuous k defocus imaging time t of imaging sensor 1-92It is logical to be located at the minor arc in moving mass 2-3 with the limit protrusion 2-9
In slot and time that moving mass 2-3 is static overlaps；
Step d, rotary electric machine 2-6 makes motor 2-6 complete to rotate for N weeks, in accurate burnt imaging time t1With defocus imaging time
t2, the two-dimension translational platform 1-5 is static, in non-imaged time t3, moved in the horizontal plane in two-dimension translational platform 1-5；Image sensing
Device 1-9 obtains (k+1) × N number of image data, is write as matrix form and is：
Each image data for being classified as mono- rotation period of motor 2-6 and obtaining；It is accurate burnt in each rotation period of first behavior
Imaging time t1Under image data；
Step e, image data maximum value fig is found out from following matrix1maxWith image data minimum value fig1min；
If step f,：
Noise is unsatisfactory for detection environmental requirement, improves measuring environment, reacquires data；
Noise meets detection environmental requirement, into next step；
Step g, image data maximum value fig is found out from following matrix2maxWith image data minimum value fig2min；
(fig1,1 fig1,2 …fig1,N)
If step h,：\
Measured object 1-6 upper table surface evennesses are unsatisfactory for requiring；
Measured object 1-6 upper table surface evennesses are unsatisfactory for requiring.
Under the collective effect of specific embodiment four and specific embodiment six, or in specific embodiment five and specific embodiment
Under six collective effect, the defocus information on the surfaces measured object 1-6 and accurate burnt information can be converted into light by imaging sensor 1-9
Strong information can be converted if there are noises during light is propagated or during opto-electronic conversion in accurate burnt information
Embodied in multiple light intensity, realize and detection environment is monitored, meet detect environmental requirement in the case of, i.e. noise shadow
The factor of sound can be ignored or there is no the light intensity in the case of noise jamming, converted by comparing defocus information, you can complete
To the qualitative detection of measured object 1-6 surface smoothness.
Claims (1)
1. body surface flatness rapid measurement device method, is, includes the following steps：
Step a, adjustment measured object (1-6), makes a certain position of the upper surface the measured object (1-6) be located at the object lens
The focal position of (1-4), and the minimum point in the minor arc straight slot that limit protrusion (2-9) is located in moving mass (2-3) is required, limit
Raised (2-9) is located at the peak of its movement locus；
Step b, the burnt imaging time t of the standard of setting imaging sensor (1-9)1, defocus imaging time t2, non-imaged time t3With
One threshold value t1' and second threshold t2', wherein
L is the minor arc straight slot length in the moving mass (2-3), and ω is the angular velocity of rotation of the motor (2-6), and r is described
The radius of minor arc straight slot in moving mass (2-3), k are number, and π is pi；
Step c, adjustment limit protrusion (2-9) is located at the minimum point in the minor arc straight slot in moving mass (2-3), limit protrusion (2-
9) the burnt imaging time t of standard at the time of being located at the peak of its movement locus with imaging sensor (1-9)1Intermediate time weight
It closes；And the continuous k defocus imaging time t of imaging sensor (1-9)2It is located at moving mass (2-3) with the limit protrusion (2-9)
In minor arc straight slot in and moving mass (2-3) static time overlap；
Step d, rotary electric machine (2-6) makes motor (2-6) complete to rotate for N weeks, in accurate burnt imaging time t1With defocus imaging time
t2, the two-dimension translational platform (1-5) is static, in non-imaged time t3, moved in the horizontal plane in two-dimension translational platform (1-5)；Image
Sensor (1-9) obtains (k+1) × N number of image data, is write as matrix form and is：
Each image data for being classified as rotation period of motor (2-6) and obtaining；In each rotation period of first behavior it is accurate burnt at
As time t1Under image data；
Step e, image data maximum value fig is found out from following matrix1maxWith image data minimum value fig1min；
If step f,：
Noise is unsatisfactory for detection environmental requirement, improves measuring environment, reacquires data；
Noise meets detection environmental requirement, into next step；
Step g, image data maximum value fig is found out from following matrix2maxWith image data minimum value fig2min；
(fig1,1 fig1,2 … fig1,N)
If step h,：
Measured object (1-6) upper table surface evenness is unsatisfactory for requiring；
Measured object (1-6) upper table surface evenness is unsatisfactory for requiring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| WO2022116564A1 (en) * | 2020-12-01 | 2022-06-09 | 强一半导体（苏州）有限公司 | Mems probe laser etching method |
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