CN108330465A - A kind of boron nitride crucible production system - Google Patents
A kind of boron nitride crucible production system Download PDFInfo
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- CN108330465A CN108330465A CN201810294740.9A CN201810294740A CN108330465A CN 108330465 A CN108330465 A CN 108330465A CN 201810294740 A CN201810294740 A CN 201810294740A CN 108330465 A CN108330465 A CN 108330465A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/342—Boron nitride
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4402—Reduction of impurities in the source gas
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Engineering & Computer Science (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Filtering Materials (AREA)
Abstract
The present invention provides a kind of boron nitride crucible production systems, including：Raw material feed device, the required unstrpped gas of supply production；There is cvd furnace air inlet and exhaust outlet, the air inlet to be equipped with air inlet head, and the air inlet head is connect with the raw material feed device by air duct, and the air duct is equipped with the flow control valve for adjusting raw material flow；Emission-control equipment is connect by discharge duct with the exhaust outlet.Boron nitride crucible operation system structure provided by the invention is simple, floor space is small, and the quality produced is preferable.
Description
Technical field
The present invention relates to crucible production technical field more particularly to a kind of boron nitride crucible production systems.
Background technology
The present invention belongs to the relevant technologies related to the present invention for the description of background technology, be only used for explanation and just
In the invention content for understanding the present invention, it should not be construed as applicant and be specifically identified to or estimate applicant being considered of the invention for the first time
The prior art for the applying date filed an application.
Pyrolytic boron nitride (abbreviation PBN) has high purity, nontoxic, high temperature resistant, acid and alkali-resistance, salt tolerant and organic solvent-resistant, property
Matter is stablized；At high temperature with most molten metals, semi-conducting material is nonwetting, does not react；Electrical insulation capability is good and high temperature
Lower free from admixture volatilization；Thermal shock resistance is excellent, thermal conductance is good low with coefficient of thermal expansion；Resistance is high, dielectric strength is high, dielectric constant
Small, magnetic loss tangent it is low and with good microwave and infrared linear can etc. many advantages, such as.It is widely used as semiconductor
Monocrystalline and the crucible of III-V group compound synthesis, pedestal；Special-shaped crucible and abnormal graphite part coating；Annealing of wafer technique is with again
Close heater etc..
Pyrolytic boron nitride (abbreviation PBN) crucible is made of PBN, even if at high temperature, will not be reacted with raw material compound,
PBN crucibles purity is high (99.999%) simultaneously, and surface compact, high temperature resistant, coefficient of thermal expansion is small, and thermal conductivity is high, and has apparent
Anisotropy, infiltration angle it is big the advantages that.BN crucibles prepared by pyrolysismethod have itself purity height, higher high-temperature behavior etc. excellent
Point.
But the device or system of existing production BN crucibles are unsuitable for batch, continuous production.
Invention content
It is a primary object of the present invention to provide a kind of boron nitride crucible production systems simple in structure.
An embodiment of the present invention provides a kind of boron nitride crucible production systems, including：
Raw material feed device, the required unstrpped gas of supply production；
There is cvd furnace air inlet and exhaust outlet, the air inlet to be equipped with air inlet head, and the air inlet head is supplied with the raw material
It is connected by air duct to device, the air duct is equipped with the flow control valve for adjusting raw material flow；
Emission-control equipment is connect by discharge duct with the exhaust outlet.
Preferably, further include：
Flow sensor, the raw material flow of monitoring air duct conveying；
Control device connects flow sensor, the flow sensor transmitted traffic information to the control device；Wherein
The flow control valve is solenoid valve, and the flow control valve is connect with the control device, the control device
The open degree that flow control valve is controlled according to the flow information of reception, to which flow be adjusted.
Preferably, further include filter device, the filter device is set to emission-control equipment to the row between exhaust outlet
In feed channel, the particle that the filter device carries the gas in discharge duct is filtered.
Preferably, further include vacuum extractor, the vacuum means are set in the discharge duct in the filter device downstream
On, the vacuum extractor is by the discharge duct to the deposition stove evacuation.
Preferably, the vacuum means are arranged between filter device and emission-control equipment or the vacuum extractor
It is connect with the exhaust outlet of the emission-control equipment.
Preferably, the emission-control equipment is spray-absorption device.
Preferably, the filter device, including：
Shell is provided with accommodating cavity in the shell, has the air inlet for being connected to the accommodating cavity on the shell and goes out
Gas port；With
Filtering body, the filtering body are arranged in the accommodating cavity, and the air inlet and gas outlet is isolated in the filtering body,
And to being filtered by the gas of the accommodating cavity, the filtering body is entwined by filter wire.
Preferably, the filter device further includes holder, and the branch is set up in the accommodating cavity, and the holder is used for will
The filtering body is fixed in the accommodating cavity.
Preferably, the air inlet and the internal diameter of gas outlet are less than the internal diameter of the accommodating cavity.
Preferably, the lower end of the accommodating cavity is provided with collecting tank, and the collecting tank is located at the air inlet and the mistake
Between filter body, and the collecting tank is arranged adjacent to the filtering body.
The invention has the advantages that：Crucible life is formed by raw material feed device, cvd furnace and emission-control equipment
Production system, simple and reasonable for structure, floor space is small, can it is cost-effective, be conducive to improve crucible production quality, be suitable for batch
Amount, continuous production.
It should be understood that above general description and following detailed description is only exemplary and explanatory, not
It can the limitation present invention.
Description of the drawings
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described.
Fig. 1 is the structural schematic diagram of boron nitride crucible production system first embodiment of the present invention；
Fig. 2 is the structural schematic diagram of boron nitride crucible production system second embodiment of the present invention；
Fig. 3 is the structural schematic diagram of boron nitride crucible production system 3rd embodiment of the present invention；
Fig. 4 is the structural schematic diagram of boron nitride crucible production system fourth embodiment of the present invention；
Fig. 5 is the structural schematic diagram of the 5th embodiment of boron nitride crucible production system of the present invention.
Fig. 6 a are the schematic cross-sectional view of the first embodiment of filter device of the present invention；
Fig. 6 b are the schematic cross-sectional view of second of embodiment of filter device of the present invention；
Fig. 6 c are the schematic cross-sectional view of the third embodiment of filter device of the present invention；
Fig. 7 a are the schematic cross-sectional view of second of embodiment first state of filter device of the present invention；
Fig. 7 b are the schematic cross-sectional view of second of embodiment of filter device of the present invention, second state；
Fig. 8 a are the schematic cross-sectional view of the third embodiment first state of filter device of the present invention；
Fig. 8 b are the schematic cross-sectional view of the third the second state of embodiment of filter device of the present invention；
Fig. 9 is the schematic cross-sectional view of filter wire of the present invention；
Figure 10 is the structure division enlarged drawing of one embodiment of filter wire of the present invention.
Reference sign：1- raw material feed devices, 2- cvd furnaces, 3- emission-control equipments, 4- flow control valves, 5- into
Flow sensor, 6- control devices, 7- filter devices, 8- vacuum extractors, 10- shells, 11- air inlets, the gas outlets 12-, 13-
Accommodating cavity, 14- half shells, 20- filtering bodies, 21- filter wires, 30- holders, 40- cleaning apparatus for self, 50- collecting tanks, 60- sealings
Plate, 70- connecting tubes, 80- flanges.
Specific implementation mode
Following the discussion provides multiple embodiments of the present invention.It is wanted in crucible production system although each embodiment represents
The single combination of element, but the element in the crucible production system of different embodiments of the invention can replace, or merge combination,
Therefore the present invention is it is also contemplated that all comprising the element in crucible production system in recorded identical and/or different embodiment
It may combination.Thus, if one embodiment includes element A, B, C in production system, another embodiment includes that production is
The combination of element B and D in system, then the present invention also should be regarded as including one or more crucibles production system containing A, B, C, D
The embodiment of the every other possible combination of element in system defines although the embodiment may not have in the following contents
Literature record.
The present invention relates to a kind of boron nitride crucible production systems.
According to one embodiment of present invention, such as Fig. 1, the embodiment provides a kind of productions of boron nitride crucible to be
System, including：
Raw material feed device 1, the required unstrpped gas of supply production；
There is cvd furnace 2 air inlet and exhaust outlet, air inlet to be equipped with air inlet head, and air inlet head passes through with raw material feed device 1
Air duct connects, and air duct is equipped with the flow control valve 4 for adjusting raw material flow；
Emission-control equipment 3 is connect by discharge duct with exhaust outlet.
The boron nitride crucible of one embodiment of the invention is made of raw material feed device 1, cvd furnace 2, emission-control equipment 3
Production system will be used for the production of boron nitride crucible, relatively simple for structure, and flexible and convenient, be suitable for high-volume, continuous life
Production.In above-described embodiment pipeline connection it is relatively common, installation it is fairly simple, quick, can quickly put into production, and can save
About cost.In one embodiment, raw material feed device 1 includes at least one gas storage tanks, for producing different type, purposes
Crucible.In one embodiment, raw material feed device 1 includes three gas storage tanks, is respectively provided with nitrogen, boron chloride and ammonia
Gas, for producing boron nitride crucible.In one embodiment, cvd furnace 2 selects gaseous phase deposition stove, for realizing gas aggradation, gas
Phase cvd furnace is the core equipment for producing boron nitride crucible, can more safely and efficiently be produced using gaseous phase deposition stove.One
In a embodiment, the shell of cvd furnace 2 is made of Steel material, in order to reach the pyroreaction condition of pyrolytic boron nitride, it is ensured that system
Standby high-purity pyrolytic boron nitride crucible, the temperature in cvd furnace 2 can be continuously maintained in 1800~2000 DEG C, therefore cvd furnace 2
Shell is made of Steel material, on the one hand, the less expensive of steel is easy to get, and is not easy to get rusty, and can effectively reduce crucible
The shell of the cost of production system, another convenience, steel shell high temperature resistant, cvd furnace 2 is made of Steel material, and relatively safety can
It leans on.In other embodiments, if can meet the condition and effect in above-described embodiment, the shell of cvd furnace 2 can also use
Other high temperature resistant materials make.There is carbon fiber or the contour heat-insulated guarantor of performance of ceramics in one embodiment, in the shell of cvd furnace 2
The heat insulation layer that adiabator is constituted, steel casing is interior to be arranged heat insulation layer, and heat insulation layer is using carbon fiber or ceramic structure
Have the advantages that high temperature resistant, heat-insulated at, carbon fiber or ceramics, making heat insulation layer is constituted using carbon fiber or ceramics, it can
Ensure reaction temperature enough in 2 deposit cavity of cvd furnace, while also limiting the surface temperature of shell, avoids temperature excessively high and make
At safety accidents such as personnel's injury or equipment damages.Setting is with carbon fiber or the contour performance of ceramics in the shell of cvd furnace 2
The heat insulation layer that heat-insulating heat-preserving material is constituted, avoids the damage of the excessively high injury and cvd furnace 2 to operating personnel of temperature, has
Have the advantages that safe and reliable.It will be appreciated by those skilled in the art that in other embodiments, heat insulation layer can also
It is constituted using other high-performance heat-insulating heat-preserving materials, if can achieve the effect that above-described embodiment, this embodiment is also in the present invention
Protection domain within.In one embodiment, the shell of cvd furnace 2 is sandwich, in general, it is desirable that outside cvd furnace 2
Shell surface temperature is no more than 50 DEG C.Shell is set as sandwich, and entering recirculated cooling water in interlayer cools down, and has on shell
Recirculated cooling water entry and exit, are cooled down by the way of recirculated cooling water, can guarantee that cvd furnace 2 is not in crucible production process
It can be damaged because temperature is excessively high, avoid the injury of personnel therefore.The shell of cvd furnace 2 is set as sandwich, and use follows
Ring cooling water cools down, and can effectively inhibit the short-term warming caused by a variety of causes of cvd furnace 2, the shell setting of cvd furnace 2
It is relatively simple for structure for sandwich, it is easy to implement, and using effect is preferable.In one preferred embodiment, packet in cvd furnace 2
Die fixing device has been included, die fixing device is for fixed to a few mold, and mold is made more to stablize in the position of cvd furnace 2,
The course of work is more safe and reliable.It is also provided in one embodiment, on die fixing device between mold and air inlet
Baffle, the setting of baffle is that mold deposits excessive pyrolytic boron nitride on the position of air inlet and leads to earthenware in order to prevent
Crucible product uneven distribution.Certainly, in other embodiments, as long as mold can be made to be fixed on the other methods in cvd furnace 2
It is possible, for example, using axis connection mold and die fixing device, is not specifically limited herein.Die fixing device and baffle
Setting can be adjusted and select according to actual conditions with position, voluntarily be selected according to actual conditions by those skilled in the art
It selects, is not specifically limited herein, above example is only to provide some illustrative explanations.It can be sent out when being deposited due to multiple gases
Raw to react and generate exhaust gas, the boron nitride crucible production system in the embodiment of the present invention includes emission-control equipment 3, for handling
Exhaust gas, can environmental protection, prevent the pollution of the environment, be conducive to maintenance personnel safety.Boron nitride crucible in the embodiment of the present invention
In production system, air duct is equipped with the flow control valve 4 for adjusting raw material flow, and flow control valve 4 can be according to different
The flow and flow rate of control air inlet, effectively control is needed to produce, reduce cost.Boron nitride crucible life provided in an embodiment of the present invention
Production system has the advantages that simple in structure, floor space is small, easy to operate.
Boron nitride crucible production system in one preferred embodiment, such as Fig. 2 further include：
Flow sensor 5, the raw material flow of monitoring air duct conveying；
Control device 6 connects flow sensor 5,5 transmitted traffic information of flow sensor to control device 6；Wherein
Flow control valve 4 is solenoid valve, and flow control valve 4 connect with control device 6, and control device 6 is according to the stream of reception
The open degree for measuring information control flow adjustable valve 4, to which flow be adjusted.
The flow sensor 5 for including in the present embodiment is used to monitor the raw material flow of air duct conveying, and flow is believed
Breath makes control device 6 grasp accurately raw material flow information to control device 6, and production is monitored and is adjusted, effectively in production
Safe, the orderly progress of raising and the production of quality, be conducive to improve production efficiency, be conducive to production high-volume, continuously into
Row.In one embodiment, flow sensor 5 is suitably selected from vortex patern, paddle type, electromagnetic type, ultrasonic type and other types, this
A little type flow sensors 5 can measure the flow velocity and flow of raw material, and flow information is sent to control device 6, to control
Raw material flow processed.In these flow sensors 5, it is preferred to use vortex patern and paddle type.Flow control valve 4 is used for the flow to raw material
It is controlled and is adjusted with flow velocity, in one embodiment, flow control valve 4 is solenoid valve, can coordinate difference using solenoid valve
The case where production realize that the flow and flow rate to raw material is controlled and adjusted, and the precision and flexibility that control can
Ensure.Flow control valve 4 is connect with control device 6, and control device 6 controls flow control valve 4 according to the flow information of reception
Open degree has the advantages that convenient, fast to which flow be adjusted.In one embodiment, it is controlled by manual operation
Device 6, the operational order on control device 6, control device 6 control flow control valve 4 to adjust the flow and flow rate of raw material, make
Manually operation can observe and control in real time the flow and flow rate of air inlet, relatively safety, convenient for being adjusted at any time as needed
Save the flow and flow rate of raw material.In another embodiment, instruction is inputted on control device 6 in advance, within the preset time
By 6 intelligent control flow control valve 4 of control device, the flow and flow rate of raw material is adjusted, it is real not have to special manning
When operation adjust, have the advantages that it is intelligent, simplicity, save labour turnover.The boron nitride crucible production that above-described embodiment provides
System has the advantages that convenient, flexible, safe and efficient.
Further include filter device 7 such as Fig. 3 in one preferred embodiment, filter device 7 be set to emission-control equipment 3 to
On discharge duct between exhaust outlet, the particle that filter device 7 carries the gas in discharge duct is filtered.Cvd furnace 2
After interior gas reacts, dust and exhaust gas are will produce, these dust and exhaust gas enter filter device 7 by discharge duct, will
Filter device 7 is set on emission-control equipment 3 to the discharge duct between exhaust outlet, and filter device 7 can filter out exhaust gas
In the dust particles that contain, remove the exhaust gas after dust particles and carried out at purification into emission-control equipment 3 through filter device 7
Reason.Setting filter device 7 is, the effective efficiency that improves exhaust-gas treatment out of dust in order to filter, be follow up device use and
Program reduces the heavy burdens, and can environmental protection and personnel safety.
Further include vacuum extractor 8 in one preferred embodiment, vacuum extractor 8 is located at the exhaust in 7 downstream of filter device
On pipeline, vacuum extractor 8 is by discharge duct to depositing stove evacuation.In one embodiment, vacuum extractor 8 is vacuum
Pump, the effect of high temperature and external cooling water in cvd furnace 2 make the air pressure in cvd furnace 2 be less than external pressure, in cvd furnace 2
Flue gas be not easy to flow out, prolonged accumulation can make the insufficient space in cvd furnace 2, cause danger, in order to avoid this case,
Using the flue gas in vacuum pumped cvd furnace 2, it is then discharged out processing.In one embodiment, such as Fig. 4, vacuum extractor 8 is set
Between filter device 7 and emission-control equipment 3, the solid carried has been effectively removed by 7 filtered gas of filter device
Particle greatly reduces the damage to vacuum extractor 8.Vacuum extractor 8 extracts the flue gas in cvd furnace 2 out, and is sent into useless
Flash Gas Compression Skid System 3 carries out harmless treatment to exhaust gas.In another embodiment, such as Fig. 5, vacuum extractor 8 is filled with exhaust-gas treatment
3 exhaust outlet connection is set, vacuum extractor 8 is extracted out through 3 purified flue gas of emission-control equipment, is then discharged out, can effectively subtract
Few damage of the pernicious gas to vacuum extractor 8.In one embodiment, when the flue gas in cvd furnace 2 reaches a certain amount of, make
Periodically extract the flue gas in cvd furnace 2 out with vacuum extractor 8, the mode for taking timing to be evacuated is more cost-effective；In another reality
It applies in example, continuously extracts the flue gas in cvd furnace 2 out using vacuum extractor 8, avoid causing danger, and avoid more
Remaining flue gas influences pyrolytic deposition, influences the quality and using effect of the crucible produced.The working time of vacuum extractor 8 can
To be determined according to the needs of practical condition, above example does not limit uniquely.
In one preferred embodiment, emission-control equipment 3 is spray-absorption device, and spray-absorption device use can recycle
The slurries used carry out spray and react with exhaust gas, to generate the gas of environmental sound, then by purified gas
Discharge, it is simple in structure, easy to use, and spray-absorption device is with power of motor is relatively low, purchase cost is low, lasts a long time, cigarette
Gas purification efficiency is higher, can be effectively energy saving, cost-effective.In other embodiments, it can also use at the exhaust gas of other patterns
Device 3 is managed, as long as the effect of purification exhaust gas can be realized, above-described embodiment is only an exemplary example, not to this
The protection domain of invention is limited.
Filter device in the embodiment of the present invention is mainly that the solid particle carried to gas is filtered.One preferred real
It applies in example, as shown in Fig. 6 a to Fig. 8 b, filter device 7 includes：Shell 10 and filtering body 20.Specifically, it is provided in shell 10
Accommodating cavity 13 has air inlet 11 and the gas outlet 12 of connection accommodating cavity 13 on shell 10；Filtering body 20 is arranged in accommodating cavity 13
Interior, air inlet 11 and gas outlet 12 is isolated in filtering body 20, and to being filtered by the gas of accommodating cavity 13, filtering body 20 is by mistake
Filter wire 21 is entwined.
The filtering body 20 that filter device 7 provided by the invention uses is entwined by filter wire 21, on the one hand, filtering body 20
Structure is simple, ease of assembly, it is only necessary to filiform is made in material appropriate, arbitrarily winding can be obtained filtering body, and twine
Around mode be easy to get the filtering body of arbitrary shape and reduce the production system of product to improve the production efficiency of product
This is caused, and then increases the competitiveness of product in market, on the other hand, the filtering body that filter wire 21 is mutually wound mutually is handed over
The gap of mistake connection, the particle that can have not only been carried to gas are effectively intercepted, but also ensure that gas smooth can pass through, and are effectively carried
High filter effect and efficiency, increase the competitiveness of product in market.
In one embodiment of the invention, as shown in Fig. 6 a to Fig. 8 b, the thickness H1 of filtering body 20 be 10mm~
300mm；On the one hand, the thickness H1 for avoiding filtering body 20 is smaller, and the time of contact between gas and filtering body 20 is shorter, mistake
The bad problem of the filter effect of filter body 20, on the other hand, the thickness H1 for avoiding filtering body 20 is larger, and filtering body 20 is to gas
Resistance it is larger, the problem of the filter efficiency difference of filtering body 20, therefore, the thickness H1 of filtering body 20 in 10mm~300mm, protect
Abundant filtering of the filtering body 20 to gas has been demonstrate,proved, meanwhile, the filter effect of filtering body 20 is ensure that, to improve making for product
With comfort level, and then increase the competitiveness of product in market, it is preferable that the thickness H1 of filtering body 20 is 100mm-200mm.When
So, the present embodiment do not exclude the thickness of filtering body 20 can be smaller or larger, as the thickness of filtering body 20 can also be 5mm or
400mm etc..
In one embodiment of the invention, the cross-sectional area of filter wire 21 is 0.0007mm2-4mm2；As shown in figure 9, mistake
The shape of the cross section of filter wire 21 is rectangle, it is preferable that the cross-sectional area of filter wire is 0.15mm2, the width D of filter wire 21 is
0.5mm, the thickness H2 of filter wire 21 are 0.3mm, the width D of filter wire 21 be 0.5mm make gas and filter wire 21 have compared with
Large contact surface makes gas be come into full contact with filtering body 20, and then make gas to ensure that the contact area of filtering body 20 and gas
Dust in body is adequately filtered down by filtering body 20, ensure that the cleanliness factor of the gas blown out from gas outlet 12.Filter wire
21 thickness H2 is 0.3mm, and filter wire 21 is made to have higher mechanical strength, to ensure that the integral strength of filtering body 20,
And then the service life of product is extended, increase the competitiveness of product in market.In one embodiment of the invention, multiple mistakes
The mutually winding of filter wire 21 constitutes filtering body 20, and multiple filter wires 21 mutually wound are upwardly formed tiny gap in transverse and longitudinal side,
The gap for the interlaced connection of filtering body that filter wire is mutually wound, the particle that can have both been carried to gas are effectively blocked
It cuts, and ensures that gas smooth can pass through, effectively increase filter effect and efficiency, and then increase the market competition of product
Power；Certainly, the shape of the cross section of filter wire 21 is also circle, ellipse etc..
In one embodiment of the present of invention, filter wire can be made of the various metal materials such as copper wire, stainless steel wire, aluminium wire
Wire, filter wire made of metal material is more stable, is suitable for a variety of filtering situations, such as hot environment, low temperature environment, often
Warm environment, acid or alkali environment etc.；In another embodiment of the present invention, filter wire is the wood fibre filter wire (raw materials such as bamboo and wood
Be made), biological fiber filter wire made of the biological fibrous materials such as staple, filter wire made of such material has stronger suction
Attached power there is better filter effect, such filter wire to be suitable for normal temperature environment, low temperature ring the fine particle that gas carries
Border etc..Alternatively, the filter wire of the present embodiment is chemical fibre silk made of plastic or other material, this kind of filter wire
Raw material is easy to get, at low cost, easily fabricated.Certainly, can be used alone can also any combination for the filter wire of the various embodiments described above
It uses.When combined use, two or more filter wire can be wound filtering body jointly.As metal filtration silk with
Biological fiber filter wire or the mixing of chemical fibre filter wire or biological fiber filter wire and the mixing of chemical fibre filter wire, or
Person's metal filtration silk is mixed with biological fiber filter wire and chemical fibre filter wire, naturally it is also possible to be the difference of same class material
The mixing of filter wire, the filter wire as made of bamboo fibre are wound jointly with cotton fiber.The string diameter of metal filtration silk is small, than advantageous
In winding, such as cross-sectional area of metal filtration silk can be 0.0007-0.002mm2, it is thinner that metal filtration silk is not precluded certainly
(such as cross-sectional area is 0.0005mm2Deng) or more slightly (such as cross-sectional area is 0.2mm2Deng).In addition, biological fiber filter wire is more
Softness, and there is preferable adsorption capacity, thicker string diameter can be taken, as the cross-sectional area of biological fiber filter wire can be
0.01mm2-4mm2, equally, however not excluded that biological fiber filter wire is thinner, and (such as cross-sectional area is 0.001mm2Deng) or it is thicker (such as cross
Sectional area is 6mm2Deng).The cross-sectional shape of the filter wire of the embodiment of the present invention can be the shape of rule, can also be not advise
Then shape.Can be specifically the polygons such as circle, ellipse, triangle, quadrangle, hexagon.In addition, filter wire can be flat filament
(flat pattern) can also be round silk (approximate circle).
Preferably, the filtering body 20 in the present embodiment is wound one as above-described embodiment by helical filter wire 21
It forms.Such as the enlarged drawing that Figure 10 is a bit of spiral filter wire, the length of a spiral filter wire can be several meters,
Even tens of rice and hundreds of meters.Helical filter wire 21 collects together into bulk, it is ensured that obtained filtering body 20 has uniform
Gap, to make filtering body 20 that there is preferably ventilation capacity and filter effect.In the spiral formed as filter wire 21
Diameter does not limit herein, can be 1mm to 5mm, such as 2mm, 3.5mm and 4mm.1mm can certainly be less than or be more than
5mm, such as 0.8mm or 10mm.It, can be first by filter wire spirally-wound, then again by spiral when filtering body 20 is specifically prepared
The filter wire of shape is wound in filtering body.
In one embodiment of the invention, as shown in Fig. 6 a to Fig. 8 b, the shape of accommodating cavity can be various shapes, such as ellipse
Circle, rectangle, spherical shape or cylinder etc., those skilled in the art can be provided with appearance of different shapes according to specific circumstances
It sets chamber and meets different requirements.In one embodiment of the invention, shell can be made of or two half of shells by sealing plate
It is constituted with shell, the shell that those skilled in the art can be provided with different structure according to specific circumstances meets different want
It asks.
In one embodiment of the invention, as shown in Fig. 6 a to Fig. 8 b, the internal diameter of air inlet 11 and gas outlet 12 is less than
The internal diameter of accommodating cavity 13；On the one hand, gas enters accommodating cavity 13 from smaller air inlet 11, and gas is made to have faster flow velocity,
After gas enters larger accommodating cavity 13, the section of gas circulation becomes the flow velocity reduction of atmospheric, and gas is made to be filled with filtering body 20
Tap is touched, and to make the dust in gas adequately be filtered down by filtering body 20, and then be ensure that and is blown out from gas outlet 12
The cleanliness factor of gas, on the other hand, smaller air inlet 11 define the gas stream entered in the unit interval in accommodating cavity 13
Amount, makes filtering body 20 to being fully filtered to gas, the flow for avoiding gas is excessive, causes the flow velocity of gas is excessive to take away
The problem that dust in filtering body 20 causes filter effect bad occurs.
In one embodiment of the invention, as shown in Fig. 6 a to Fig. 8 b, the internal diameter of accommodating cavity 13 is air inlet 11 and goes out
2-5 times of the internal diameter of gas port 12；On the one hand, the ratio for avoiding 11 size of air inlet and accommodating cavity internal diameter size is too small, influences
Flow velocity and ventilation capacity lead to the problem that filter efficiency is low, on the other hand, avoid the size and accommodating cavity internal diameter of air inlet 11
The ratio of size is excessive, causes radially outermost filtering body that cannot participate in filtering, and increases cost on foot.Therefore, accommodating cavity 13
Internal diameter is 2-5 times of air inlet 11 and gas outlet 12, on the one hand, gas enters accommodating cavity 13 from smaller air inlet 11, makes gas
After there is body the flow velocity of faster flow rate of gas, gas to enter larger accommodating cavity 13, the flow area of gas becomes larger flow velocity drop
It is low, so that gas is come into full contact with filtering body 20, to make the dust in gas adequately be filtered down by filtering body 20, Jin Erbao
Demonstrate,proved the cleanliness factor of the gas blown out from gas outlet 12, on the other hand, smaller air inlet 11 define in the unit interval into
Enter the gas flow in accommodating cavity 13, makes filtering body 20 to being fully filtered to gas, the flow for avoiding gas is excessive, leads
Cause the excessive filtering dust effect taken away in filtering body 20 of flow velocity of gas bad.Certainly, the present invention does not exclude accommodating cavity 13
Internal diameter and 11 internal diameter of air inlet and 12 internal diameter of gas outlet there are other ratios.Such as the internal diameter and 11 internal diameter of air inlet of accommodating cavity 13
With 6 times, 7 times and 10 times etc. of 12 internal diameter of gas outlet, or be only 1 times.In addition, as the another preferred of the present invention, into
11 internal diameter of gas port can be less than 12 internal diameter of gas outlet, can further decrease the flow velocity for the gas for flowing through filtering body in this way, improve
Filter effect.
The shape of the accommodating cavity of the filter device 7 of the present invention can be suitable for filling the arbitrary shape of filtering body, such as Fig. 6 a
Shown in Fig. 8 b, such as spherical shape, elliposoidal, cuboid, cylinder.In one embodiment of the present of invention, the wall surface of accommodating cavity
Including two first surfaces, second curved surface opposite with first surface and the joint face for connecting first surface and the second curved surface.First
Curved surface and the second curved surface can be spherical surface, ellipsoid or ball kind curve etc..Joint face can be cylinder or by first surface and
Curved surface made of two surface extendings forms.In the present embodiment, air inlet 11 and gas outlet 12 can be opened in shell respectively
First surface side and the second curved surface side.
In the present invention, filtering body can be placed in accommodating cavity in several ways or be taken out from accommodating cavity.The one of the present invention
In a embodiment, filling hole is offered on shell 10, filling hole is closed with sealing cover, by filling hole that filtering body merging is accommodating
In chamber 13, hole closing will be filled with sealing cover.Need take out filtering body when, sealing cover is opened, you can by fill hole incited somebody to action
Filter body is taken out.In another embodiment of the invention, as fig. 6 c, shell is made of two half shells 14, two half shells
14 are connected as entire shell 10, and the merging of body 20 can be filtered after two half shells 14 separate or takes out operation.Two
Half shell 14 can be connected through a screw thread, and can also be to be connected by flange 80, i.e. be respectively equipped with method in two half shells 14
Orchid 80, after two 14 make-ups of half shell, you can be connected as one by flange 80.In the present embodiment, air inlet 11 and gas outlet
12 can be opened in respectively in two half shells 14.
Various ways may be used with the connection of upstream and downstream pipeline in the filter device 7 of the embodiment of the present invention.The present invention's
In one embodiment, be provided with screw thread on the inner wall of air inlet 11 and gas outlet 12, upstream and downstream pipeline respectively by screw thread with into
Gas port 11 and gas outlet 12 connect.In another embodiment of the present invention, as shown in Fig. 6 b and Fig. 6 c, filter device 7 includes
Two connecting tubes 70, air inlet and gas outlet distribution connect one end of a connecting tube 70, are arranged on the other end of connecting tube 70
There are connecting flange 80, attachment device to be connect with upstream and downstream pipeline by connecting flange 80.The setting of connecting tube 70 facilitates filtering to fill
It sets 7 to connect with other pipelines, to which the use for improving product is comfortable, flange 80 connects easy to use, can bear larger
Pressure to ensure that connecting tube 70 and other pipeline bonding strengths and tightness, and then ensure that the use reliability of product,
Increase the competitiveness of product in market.In the embodiment of the present invention, connecting tube 70 can be screw thread with air inlet 11 and gas outlet 12
Connection can also be to be welded to connect, or threaded connection and welding are combined.Can certainly be other modes, such as shell
It is integrally manufactured or integrally formed with connecting tube 70.
In one embodiment of the invention, as figures 8 a and 8 b show, the lower end of accommodating cavity 13 is provided with collecting tank 50,
Collecting tank 50 is located at air inlet 11 and crosses between filtering body 20, and collecting tank 50 is arranged adjacent to filtering body 20；From filtering body 20
The dust split away off can be fallen in accommodating cavity 13, and dust enters from accommodating cavity 13 in collecting tank 50, and dust is made all to assemble
At one, user is facilitated to clean, in one embodiment of the invention, as figures 8 a and 8 b show, the setting of collecting tank 50 is being held
The lowest point in chamber 13 is set, specifically, guiding surface is provided in accommodating cavity 13, dust is made to be easier to enter in collecting tank 50,
Facilitate user to clean, to improve the usage comfort of product, in one embodiment of the invention, is arranged at collecting tank 50
There is collection hole, collect hole and closed by sealing plate 60, when the dust in collecting tank 50 is more, user opens sealing plate 60, will receive
Collect the dust in slot 50 to be discharged from hole is collected, to improve the usage comfort of product.
In one embodiment of the invention, filter device 7 further includes:Sensor, control device and alarming device；Sensing
Device is arranged at gas outlet 12, the flow for detecting gas at gas outlet 12, concurrent electric signals；Control device and sensor
Connection, for receiving electric signal and sending control signal according to electric signal；Alarming device is connect with control device, and according to control
Signal sends out warning；Filter device 7 worked after a period of time, and more dust can be adsorbed in filtering body 20, and filtering body 20 is ventilated
Property be deteriorated, the flow of gas becomes smaller at gas outlet 12, and filter efficiency is poor, and the flow that sensor detects the gas at gas outlet 12 is low
In default value, sensor sends control signal, and alarming device receives control signal, and sends out information warning, prompt user and
Shi Genghuan filtering bodies 20 clean filtering body 20, to improve the usage comfort of product.
In one embodiment of the invention, alarming device includes buzzer and/or warning light；Alarming device is buzzing
Device, buzzer make a sound after receiving control control signal, and user is prompted to replace filtering body 20 in time or to filtering body 20
It is cleaned；Alarming device is warning light, and warning light receives control signal and shines, prompt user replace in time filtering body 20 or
Person cleans filtering body 20；Alarming device is buzzer and warning light, and buzzer is sent out after receiving control control signal
Sound, warning light receive control signal and shine, and being combined by sound and light can fully prompt timely user to replace filtering body
20 or filtering body 20 is cleaned；Certainly, the form of alarming device is more than above-mentioned several, does not just enumerate herein,
As long as the device that can play suggesting effect all should be within the scope of the present invention.
In one embodiment of the invention, as shown in Fig. 7 a to Fig. 8 b, filter device 7 further includes：Cleaning apparatus for self 40,
Cleaning apparatus for self 40 is connect with control device, and control device can control cleaning apparatus for self 40 and clean filtering body 20；Filter device 7
It works after a period of time, more dust can be accumulated in filtering body 20,20 aeration of filtering body is deteriorated, and filter efficiency is poor, works as heap
After accumulating to a certain extent, control device control cleaning apparatus for self 40 cleans filtering body 20, in the implementation of the present invention
In example, cleaning apparatus for self 40 is vibrating device, and vibrating device drives filtering body 20 to vibrate, dust is made to fall off from filtering body 20,
Restore the aeration of filtering body 20, certainly, cleaning apparatus for self 40 or scraper component, scraper component can be by dusts from filtering body
It is scraped off on 20；It should be appreciated by those skilled in the art cleaning apparatus for self 40 is more than above-mentioned several, does not just enumerate herein
As long as the device that can play the role of cleaning filtering body 20 all should be within the scope of the present invention.
In one embodiment of the invention, as figures 8 a and 8 b show, filter device 7 further includes：Holder 30, holder 30
In accommodating cavity 13, filtering body 20 is fixed on holder 30；Holder 30 plays supporting role to filtering body 20, ensure that
Filter body 20 just has preferable mechanical strength, to extend the service life of product, increases the competitiveness of product in market.The present invention
One embodiment in, holder 30 and 10 phase of shell are clamped, and are provided with buckle on holder 30, card slot is provided in shell 10, card
Button is matched with card slot, so that holder 30 is fixedly connected with shell 10, the connection type of clamping is simple in structure, easy for installation, from
And the production efficiency of product is improved, certainly, holder 30 also can pass through inserted sheet and slot cooperation, holder 30 and shell with shell 10
The modes such as 10 phases threaded connection achieve a fixed connection, and just do not enumerate herein.
The boron nitride crucible operation system structure of the embodiment of the present invention is simple and convenient to operate, can effectively improve production efficiency,
It is cost-effective, be conducive to high-volume, the continuous production of production.The boron nitride crucible production system of the embodiment of the present invention can also be used
Come make pyrolysis BN plectanes or other using product or boron nitride material product made of chemical vapor deposition, only need basis
The gas of product needed replacing in head tank, easy to operate, the good product effect prepared.
The above is only the specific implementation mode of the present invention, is made skilled artisans appreciate that or realizing this hair
It is bright.Various modifications to these embodiments will be apparent to one skilled in the art, as defined herein
General Principle can in other embodiments be realized in the case where not departing from design or the range of the present invention.Therefore the present invention
It is not intended to be limited to the embodiments shown herein, but is met consistent with the principles and novel features disclosed herein
Widest range.
Claims (10)
1. a kind of boron nitride crucible production system, which is characterized in that including：
Raw material feed device, the required unstrpped gas of supply production；
There is cvd furnace air inlet and exhaust outlet, the air inlet to be equipped with air inlet head, and the air inlet head is filled with raw material supply
It sets and is connected by air duct, the air duct is equipped with the flow control valve for adjusting raw material flow；
Emission-control equipment is connect by discharge duct with the exhaust outlet.
2. boron nitride crucible production system according to claim 1, which is characterized in that further include：
Flow sensor, the raw material flow of monitoring air duct conveying；
Control device connects flow sensor, the flow sensor transmitted traffic information to the control device；Wherein
The flow control valve is solenoid valve, and the flow control valve connect with the control device, the control device according to
The open degree of the flow information control flow control valve of reception, to which flow be adjusted.
3. boron nitride crucible production system according to claim 1, which is characterized in that further include filter device, the mistake
Filter device is set on emission-control equipment to the discharge duct between exhaust outlet, and the filter device is to the gas in discharge duct
The particle that body carries is filtered.
4. boron nitride crucible production system according to claim 3, which is characterized in that further include vacuum extractor, it is described
Vacuum means are set on the discharge duct in the filter device downstream, and the vacuum extractor is by the discharge duct to institute
State deposition stove evacuation.
5. boron nitride crucible production system according to claim 4, which is characterized in that the vacuum means are arranged in filtering
Between device and emission-control equipment or the vacuum extractor is connect with the exhaust outlet of the emission-control equipment.
6. boron nitride crucible production system according to claim 1, which is characterized in that the emission-control equipment is spray
Absorption plant.
7. boron nitride crucible production system according to claim 3, which is characterized in that the filter device includes：
Shell is provided with accommodating cavity in the shell, has the air inlet for being connected to the accommodating cavity and gas outlet on the shell；
With
Filtering body, the filtering body are arranged in the accommodating cavity, and the air inlet and gas outlet is isolated in the filtering body, and right
It is filtered by the gas of the accommodating cavity, the filtering body is entwined by filter wire.
8. boron nitride crucible production system according to claim 7, which is characterized in that the filter device further includes branch
Frame, the branch are set up in the accommodating cavity, and the holder is for the filtering body to be fixed in the accommodating cavity.
9. boron nitride crucible production system according to claim 7, which is characterized in that the air inlet and gas outlet it is interior
Diameter is less than the internal diameter of the accommodating cavity.
10. according to the boron nitride crucible production system described in claim 7, which is characterized in that the lower end of the accommodating cavity is provided with
Collecting tank, the collecting tank is between the air inlet and the filtering body, and the collecting tank is set adjacent to the filtering body
It sets.
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| CN201810294740.9A CN108330465A (en) | 2018-04-04 | 2018-04-04 | A kind of boron nitride crucible production system |
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| CN201810294740.9A CN108330465A (en) | 2018-04-04 | 2018-04-04 | A kind of boron nitride crucible production system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109594122A (en) * | 2018-12-29 | 2019-04-09 | 西安奕斯伟硅片技术有限公司 | Furnace body exhaust system, clean method and the crystal pulling furnace system with it |
| CN110923675A (en) * | 2019-12-27 | 2020-03-27 | 清华大学无锡应用技术研究院 | Digital twinning control method for fluid field of silicon carbide coating deposition furnace |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5158750A (en) * | 1990-06-06 | 1992-10-27 | Praxair S.T. Technology, Inc. | Boron nitride crucible |
| CN102021533A (en) * | 2010-11-22 | 2011-04-20 | 赵凤鸣 | Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products |
| CN201933151U (en) * | 2010-12-29 | 2011-08-17 | 戴煜 | Large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace |
| US20110258976A1 (en) * | 2008-10-08 | 2011-10-27 | KAPPA Filter Systems GmbH | Filter element for cleaning an air stream that is charged with particles and filter device that is equipped with said element |
| CN102796995A (en) * | 2012-08-27 | 2012-11-28 | 北京博宇半导体工艺器皿技术有限公司 | Vapor deposition furnace and method for preparing pyrolytic boron nitride product |
| JP2013021301A (en) * | 2011-06-16 | 2013-01-31 | Tokyo Electron Ltd | Deposition method and deposition apparatus |
| CN202786419U (en) * | 2012-08-27 | 2013-03-13 | 北京博宇半导体工艺器皿技术有限公司 | Gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets |
| CN202876638U (en) * | 2012-09-14 | 2013-04-17 | 东莞市联发铸造有限公司 | Tail gas treatment device |
| CN105039931A (en) * | 2015-08-31 | 2015-11-11 | 清远先导材料有限公司 | Chemical vapor deposition furnace and chemical vapor deposition system |
| CN106669300A (en) * | 2017-01-18 | 2017-05-17 | 王珏 | Gas purification and dust collection device based on textile/silk fabric |
| CN107281881A (en) * | 2017-07-26 | 2017-10-24 | 北京创昱科技有限公司 | A kind of exhaust gas processing device and method |
| CN208167095U (en) * | 2018-04-04 | 2018-11-30 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
-
2018
- 2018-04-04 CN CN201810294740.9A patent/CN108330465A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5158750A (en) * | 1990-06-06 | 1992-10-27 | Praxair S.T. Technology, Inc. | Boron nitride crucible |
| US20110258976A1 (en) * | 2008-10-08 | 2011-10-27 | KAPPA Filter Systems GmbH | Filter element for cleaning an air stream that is charged with particles and filter device that is equipped with said element |
| CN102021533A (en) * | 2010-11-22 | 2011-04-20 | 赵凤鸣 | Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products |
| CN201933151U (en) * | 2010-12-29 | 2011-08-17 | 戴煜 | Large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace |
| JP2013021301A (en) * | 2011-06-16 | 2013-01-31 | Tokyo Electron Ltd | Deposition method and deposition apparatus |
| CN102796995A (en) * | 2012-08-27 | 2012-11-28 | 北京博宇半导体工艺器皿技术有限公司 | Vapor deposition furnace and method for preparing pyrolytic boron nitride product |
| CN202786419U (en) * | 2012-08-27 | 2013-03-13 | 北京博宇半导体工艺器皿技术有限公司 | Gas phase depositing furnace used for preparing pyrolytic boron nitride products and provided with separated air inlets |
| CN202876638U (en) * | 2012-09-14 | 2013-04-17 | 东莞市联发铸造有限公司 | Tail gas treatment device |
| CN105039931A (en) * | 2015-08-31 | 2015-11-11 | 清远先导材料有限公司 | Chemical vapor deposition furnace and chemical vapor deposition system |
| CN106669300A (en) * | 2017-01-18 | 2017-05-17 | 王珏 | Gas purification and dust collection device based on textile/silk fabric |
| CN107281881A (en) * | 2017-07-26 | 2017-10-24 | 北京创昱科技有限公司 | A kind of exhaust gas processing device and method |
| CN208167095U (en) * | 2018-04-04 | 2018-11-30 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
Non-Patent Citations (1)
| Title |
|---|
| 银成继: "近代管式过滤器", 《化工设备与管道》, pages 49 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109594122A (en) * | 2018-12-29 | 2019-04-09 | 西安奕斯伟硅片技术有限公司 | Furnace body exhaust system, clean method and the crystal pulling furnace system with it |
| CN110923675A (en) * | 2019-12-27 | 2020-03-27 | 清华大学无锡应用技术研究院 | Digital twinning control method for fluid field of silicon carbide coating deposition furnace |
| CN110923675B (en) * | 2019-12-27 | 2022-05-24 | 清华大学无锡应用技术研究院 | Digital twinning control method for silicon carbide coating deposition furnace fluid field |
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