CN201933151U - Large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace - Google Patents
Large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace Download PDFInfo
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- CN201933151U CN201933151U CN2010206877993U CN201020687799U CN201933151U CN 201933151 U CN201933151 U CN 201933151U CN 2010206877993 U CN2010206877993 U CN 2010206877993U CN 201020687799 U CN201020687799 U CN 201020687799U CN 201933151 U CN201933151 U CN 201933151U
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- vapour deposition
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Abstract
The utility model discloses a large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace which comprises a deposition gas circuit system, a tar collection and treatment system (21), a dust collecting, filtering and air cooling system (20) with a pulse back-flushing function, and a vacuum system (22). The deposition air circuit system is formed in the way that a plurality of horn-shaped top air inlet pipes, which are connected with a mixed gas supply pipeline (11), are uniformly distributed at the top of a deposition chamber (18), a plurality of horn-shaped exhaust pipes (4), which are connected with an exhaust pipeline (8), are uniformly distributed at the bottom of the deposition chamber (18); and the outlet of the exhaust pipeline (8) is connected with the tar collection and treatment system (21). The large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace is suitable for the vacuum chemical vapor deposition of large-scale materials or products, has uniform temperature in the furnace, a stable airflow field, uniform vapor phase deposition and a better effect of tar collection and treatment, can rapidly cool material and collect dusts in the furnace, is convenient to load and unload, reliable in running and simple to operate, and has low maintenance cost.
Description
Technical field
The utility model relates to a kind of large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace.
Background technology
The vacuum chemistry vapour deposition is a kind of processing method that is widely used in producing type material (as carbon-carbon composite).Because this processing method self has special requirement for cvd furnace, common cvd furnace or vacuum oven all can't satisfy its requirement.
At present, existingly can satisfy the cvd furnace that small-size materials or goods carry out the vacuum chemistry vapour deposition substantially.Along with development, the development of technology of society, numerous areas such as space flight, aviation, traffic have had higher requirement to the chemical vapour deposition material, and the size of material or goods is to large scale development.Because have that temperature homogeneity in the stove, vapour deposition homogeneity, tar are collected and handled, technological difficulties such as loading and unloading material and equipment serviceability, also do not have to satisfy the cvd furnace that large-scale material or goods carry out the vacuum chemistry vapour deposition at present.
Some material (as carbon-carbon composite) also need carry out graphitization processing after deposition is finished.Generally be in cvd furnace, to carry out chemical vapour deposition respectively at present, in graphitizing furnace, carry out graphitization processing.Obviously, this mode exists must be equipped with two different equipment, and investment is many, the shortcoming that floor space is also big.
The utility model content
The technical problems to be solved in the utility model provides a kind of large-scale material or goods of being applicable to and carries out the vacuum chemistry vapour deposition, and the uniform large-scale vacuum chemical vapour deposition of vapour deposition graphitization processing multifunctional furnace in the stove.
In order to address the above problem, the large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace that the utility model provides, comprise furnace shell, the sediment chamber, the deposition air-channel system, the tar collection processing system implementing, gather dust filtration and the air cooling system and the vacuum system of tape pulse blowing function, described deposition air-channel system is evenly to arrange at the top of described sediment chamber to be provided with a plurality of tubaeform top inlet pipe that are connected with the mixed gas supply air line, evenly arranging in the bottom of described sediment chamber is provided with a plurality of exhaust trumpets that are connected with exhaust line, and the outlet of described exhaust line is connected with described tar collection processing system implementing.
A plurality of described tubaeform tops inlet pipe adopts to rely closely evenly to arrange and is arranged on the top of described sediment chamber, and a plurality of described exhaust trumpets adopt to rely closely evenly to arrange and are arranged on the bottom of described sediment chamber.
Described tubaeform top inlet pipe is provided with little spiral slot.
The sidewall of described sediment chamber is provided with at least one tubaeform sidewall inlet pipe that is connected with described supply air line.
Be provided with little spiral slot in the described tubaeform sidewall inlet pipe.
But each described tubaeform top inlet pipe all is connected with the variable valve of independent regulation and control.
But each described tubaeform sidewall inlet pipe all is connected with the variable valve of independent regulation and control.
Each the described exhaust line that is connected with described exhaust trumpet is provided with absolute pressure transducer and motor-driven control valve.
Described furnace shell comprises furnace shell, is provided with flue in furnace shell, is provided with heating element in flue, is provided with the sediment chamber in heating element, is provided with water cooled electrode on furnace shell.
Described tar collection processing system implementing comprises the tar condensing capture tank, is located at the spiral coil cooling tube of tar condensing capture tank inner bottom part, the subcooling recycle pump that links to each other with spiral coil cooling tube.
The gathering dust of described tape pulse blowing function filtered and air cooling system comprises that scatterer, fly-ash separator, high pressure cooling blower, pipeline, valve and pressure differential detection instrument form.
Described vacuum system comprises vacuum pump, vacuum valve, strainer, vacuum-lines, be located at vacuumizing interface, be located at and vacuumize inlet mouth and air outlet on the tar condensing capture tank on the described furnace shell.
Described water-cooling system comprises pipeline, is located at valve, strainer, pressure detection instrument, flow sensor on the pipeline.
Described vehicle for loading and unloading stuff comprises vehicle frame, hydraulic lift, movable running roller guide rail, auxiliary stand, is installed on the guide rail on ground.
Described stokehold transformer places both sides, furnace shell top.
Described electric control system by electrical control cubicles, be located at electric elements, instrument in the electrical control cubicles, be located at that high low temperature on the described furnace shell detects automatic exchanger (comprising thermopair, thermopair running gear, two colorimetric infrared thermometer), is located at vacuum gauge on the described furnace shell, pressure detection instrument etc. forms.Described electrical control cubicles places the other appropriate location of furnace shell.Electrical control in the stove each independently the temperature of hot zone detect with PID and regulate, each vacuum pump, blower fan are controlled, the pressure in the sediment chamber is detected with PID regulates, the flow of deposition gases is detected with PID regulates.Electric control system has when overtemperature in the stove, the disconnected idol of thermopair, water coolant is under-voltage and carry out the function of sound and light alarm during electromotor overload.
Adopt the large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace of technique scheme, compare, the utlity model has following advantage with general vacuum chemistry gaseous phase deposition stove and graphitizing furnace:
1, flue and heating element fully satisfy the heat request that adds of large-scale material or goods, and temperature homogeneity is good in the stove.
2, adopt the deposition air-channel system that is applicable to large-scale chemical vapor deposition stove, fully satisfy the vapour deposition requirement of large-scale material or goods, airflow field is stable in the sediment chamber, and vapour deposition is even.
3, tar collection and treatment effect are good, cleaning and easy to maintenance.
4, being equipped with gathering dust of tape pulse blowing function filters and air cooling system, can effectively collect dust in the stove and prevent pollution environment, material is enhanced productivity in the cool furnace fast, and filtration unit in time cleans by the pulse backblowing of high pressure gas, the continuous reliability service of the system that guaranteed.
5, vehicle for loading and unloading stuff is simple in structure, and cost is lower, and is reliable, easy and simple to handle, is specially adapted to the loading and unloading of large-scale material or goods.
6, the level of automation height is easy and simple to handle, and labour intensity is low, and is reliable.
7, multi-use reduces investment, reduces floor space.
In sum, the utility model is that a kind of large-scale material or goods of being applicable to carry out the vacuum chemistry vapour deposition, and stable, the vapour deposition of even, the airflow field of temperature evenly in the stove, tar is collected and treatment effect better, can cool off material fast and collect dust in the stove, the loading and unloading material is convenient, reliable, simple to operate, maintenance cost is low large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace.
Description of drawings
Fig. 1 is a cross-sectional structure synoptic diagram of the present utility model.
Fig. 2 is a vertical section structure synoptic diagram of the present utility model.
Fig. 3 is the structural representation of deposition air-channel system of the present utility model.
Fig. 4 is that top of the present utility model inlet pipe is arranged synoptic diagram.
Fig. 5 is that vapor pipe of the present utility model is arranged synoptic diagram.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, be provided with sediment chamber 18 in the furnace shell 17, the top of sediment chamber 18 relies closely evenly to arrange and is provided with 12 tubaeform top inlet pipe 2 that are connected with mixed gas supply air line 11 respectively, be provided with little spiral slot 19 in the tubaeform top inlet pipe 2,18 bottom is adopted to rely closely evenly to arrange and is provided with 12 exhaust trumpets 4 that are connected with exhaust line 8 in the sediment chamber.The sidewall of sediment chamber 18 is provided with 4 tubaeform sidewall inlet pipe 3 that are connected with mixed gas supply air line 11, is provided with little spiral slot 19 in the tubaeform sidewall inlet pipe 3.Glass rotameter 14 is connected with gas mixing tank 16 by first supply air line 13 with manual modulation valve 15, the inlet end of glass rotameter 14 links to each other with the source of the gas (not shown) by first supply air line 13, the inlet end of mass flowmeter 12 is connected with gas mixing tank 16 by mixed gas supply air line 11, the exit end of mass flowmeter 12 is connected with the inlet end of magnetic valve 10 by mixed gas supply air line 11, the exit end of magnetic valve 10 by mixed gas supply air line 11 respectively be located at furnace shell 17 on top intake interface 1 be connected with sidepiece intake interface 9, the inlet end of motor-driven control valve 6 is connected with exhaust port 5 on being located at furnace shell 17 by exhaust line 8, the exit end of motor-driven control valve 6 captures with the tar of cvd furnace by exhaust line 8 and links to each other with the treatment unit (not shown), exhaust line 8 is provided with absolute pressure transducer 7, being located at the inlet end of the tubaeform top inlet pipe 2 on 18 tops, sediment chamber is connected with top intake interface 1 on being located at furnace shell 17, being located at the inlet end of the tubaeform sidewall inlet pipe 3 in the sediment chamber 18 is connected with sidepiece intake interface 9 on being located at furnace shell 17, being located at the exit end of the exhaust trumpet 4 in the sediment chamber 18 is connected with exhaust port 5 on being located at furnace shell 17, furnace shell 17 is connected with gathering dust of tape pulse blowing function and filters and air cooling system 20, the outlet of exhaust line 8 is connected with tar collection processing system implementing 21, and tar collection processing system implementing 21 is connected with vacuum system 22.
Tubaeform top inlet pipe 2, tubaeform sidewall inlet pipe 3 and exhaust trumpet 4 all adopt the graphite material manufacturing.
But each air inlet of deposition gas circuit and exhaust loop all are independent regulation and control.
Referring to Fig. 1 and Fig. 2, workpiece is loaded in the sediment chamber of furnace shell 17 with described vehicle for loading and unloading stuff (not drawing among the figure), to be evacuated to vacuum state in the furnace shell 17, the stove internal heating is warming up to the temperature of depositing operation regulation, intake interface and the tubaeform top inlet pipe 2 that is located at top, sediment chamber in the furnace shell 17 and the tubaeform sidewall inlet pipe 3 of sidepiece by furnace shell 17 tops and sidepiece, in sediment chamber 18, charge into deposition gases, post-depositional tail gas is by exhaust trumpet 4 that is located at 18 bottoms, sediment chamber and the exhaust port that is located at furnace shell 17 bottoms, be disposed to tar collection processing system implementing 21, tar in the tail gas is condensed in the condensing trapping jar of tar collection processing system implementing 21 and collects, and the strainer of the gas of having removed tar by vacuum system 22 filters the back and be evacuated to outdoor by the vacuum pump of vacuum system 22.
In the heat temperature raising process, furnace temperature adopts thermopair to detect temperature in the stove when low, when furnace temperature reaches the conversion temp that sets in advance, electric control system (not drawing among the figure) automatically switches to and adopts two colorimetric infrared thermometers to detect temperature in the stove, and by the thermopair running gear thermopair is shifted out the high-temperature zone to guarantee that thermopair is not burnt out automatically.
In carrying out chemical vapor deposition processes, ratio, all gases of regulating all gases by manual modulation valve 15 on the source of the gas supply air line of regulating the deposition air-channel system and glass rotameter 14 mix in the gas mixing tank 16 of deposition air-channel system.12 pairs of mass flowmeters that are located at the deposition air-channel system enter mixed gass in the sediment chamber 18 of furnace shell 17 to carry out PID and regulates, and guarantees that gas flow is stable.The absolute pressure transducer 7 that is located on each exhaust line 8 that deposits air-channel system detects each regional pressure in the sediment chambers 18, carry out PID by the pressure in the 6 pairs of sediment chambers of motor-driven control valve 18 that are located on the exhaust line 8 and regulate, keep each regional equalization of pressure and constant in the sediment chamber 18.
When carrying out the high temperature graphitization processing, will deposit the tubaeform top inlet pipe 2 of air-channel system, tubaeform sidewall inlet pipe 3 and exhaust trumpet 4 sealings with the insulation plug, the raising heat-insulating property reduces energy consumption.
After chemical vapor deposition method process or the end of graphitization processing technological process, can in furnace shell 17, charge into an amount of argon gas, start gathering dust of tape pulse blowing function then and filter and air cooling system 20.Argon gas and workpiece and flue etc. carry out heat exchange, gathering dust of tape pulse blowing function filter and the effect of the high pressure cooling blower of air cooling system 20 under, the argon gas of heat enters that gathering dust of tape pulse blowing function filtered and the scatterer of air cooling system 20 carries out heat exchange, cooled argon gas enters that gathering dust of tape pulse blowing function filtered and the fly-ash separator of air cooling system 20, filtering the argon gas of dust return in the furnace shell 17 by high pressure cooling blower and pipeline.So circulation is cooled to proper temperature and dust by emptying in furnace shell 17.In cooling and dust removal process, the pressure differential detection instrument of the gather dust filtration and the air cooling system 20 of tape pulse blowing function constantly detects the inlet end of fly-ash separator and the pressure difference of outlet side, when pressure difference during more than or equal to preset value electric control system send the sound and light alarm signal, prompting operation person adopts the method for high pressure gas pulse backblowing to remove the dust of having collected on the strainer.
Claims (8)
1. large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace, comprise furnace shell (17), sediment chamber (18), the deposition air-channel system, tar collection processing system implementing (21), gathering dust of tape pulse blowing function filtered and air cooling system (20) and vacuum system (22), it is characterized in that: described deposition air-channel system is evenly to arrange at the top of described sediment chamber (18) to be provided with a plurality of tubaeform top inlet pipe (2) that are connected with mixed gas supply air line (11), evenly arranging in the bottom of described sediment chamber (18) is provided with a plurality of exhaust trumpets (4) that are connected with exhaust line (8), and the outlet of described exhaust line (8) is connected with described tar collection processing system implementing (21).
2. large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace according to claim 1, it is characterized in that: a plurality of described tubaeform top inlet pipe (2) adopt to rely closely evenly to arrange and are arranged on the top of described sediment chamber (18), and a plurality of described exhaust trumpets (4) adopt to rely closely evenly to arrange and are arranged on the bottom of described sediment chamber (18).
3. large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace according to claim 1 and 2 is characterized in that: described tubaeform top inlet pipe (2) is provided with little spiral slot (19).
4. large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace according to claim 1 and 2 is characterized in that: the sidewall of described sediment chamber (18) is provided with at least one tubaeform sidewall inlet pipe (3) that is connected with described supply air line.
5. large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace according to claim 4 is characterized in that: be provided with little spiral slot (19) in the described tubaeform sidewall inlet pipe (3).
6. the deposition air-channel system that is applicable to large-scale chemical vapor deposition stove according to claim 1 and 2 is characterized in that: each described tubaeform top inlet pipe (2) but all be connected with the variable valve of independent regulation and control.
7. large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace according to claim 4 is characterized in that: each described tubaeform sidewall inlet pipe (3) but all be connected with the variable valve of independent regulation and control.
8. large-scale vacuum chemical vapour deposition graphitization processing multifunctional furnace according to claim 1 and 2 is characterized in that: each the described exhaust line (8) that is connected with described exhaust trumpet (4) is provided with absolute pressure transducer (7) and motor-driven control valve (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206877993U CN201933151U (en) | 2010-12-29 | 2010-12-29 | Large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206877993U CN201933151U (en) | 2010-12-29 | 2010-12-29 | Large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace |
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| Publication Number | Publication Date |
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| CN201933151U true CN201933151U (en) | 2011-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010206877993U Expired - Lifetime CN201933151U (en) | 2010-12-29 | 2010-12-29 | Large-scale multifunctional vacuum chemical vapor deposition graphitizing treatment furnace |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103343334A (en) * | 2013-07-18 | 2013-10-09 | 湖南顶立科技有限公司 | Vapor deposition method |
| CN104930856A (en) * | 2015-07-06 | 2015-09-23 | 上海汇森益发工业炉有限公司 | Differential pressure control system and method of vacuum furnace |
| CN106521456A (en) * | 2016-11-18 | 2017-03-22 | 北京大学 | Multifunctional large-sized chemical vapor deposition equipment with air inlet mode and pressure capable of being adjusted |
| CN108330465A (en) * | 2018-04-04 | 2018-07-27 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
| CN110514005A (en) * | 2019-07-09 | 2019-11-29 | 绵阳宸和电工科技有限公司 | A kind of cvd furnace of Hybrid Heating |
| CN111020530A (en) * | 2019-12-26 | 2020-04-17 | 湖南德智新材料有限公司 | Chemical vapor deposition furnace with air inlet at two ends |
| CN112725763A (en) * | 2020-12-24 | 2021-04-30 | 张家港迪源电子科技有限公司 | High-temperature chemical vapor deposition system and equipment |
| CN114481114A (en) * | 2022-01-24 | 2022-05-13 | 季华实验室 | Vacuum cold spraying system |
-
2010
- 2010-12-29 CN CN2010206877993U patent/CN201933151U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103343334A (en) * | 2013-07-18 | 2013-10-09 | 湖南顶立科技有限公司 | Vapor deposition method |
| CN104930856A (en) * | 2015-07-06 | 2015-09-23 | 上海汇森益发工业炉有限公司 | Differential pressure control system and method of vacuum furnace |
| CN106521456A (en) * | 2016-11-18 | 2017-03-22 | 北京大学 | Multifunctional large-sized chemical vapor deposition equipment with air inlet mode and pressure capable of being adjusted |
| CN108330465A (en) * | 2018-04-04 | 2018-07-27 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
| CN110514005A (en) * | 2019-07-09 | 2019-11-29 | 绵阳宸和电工科技有限公司 | A kind of cvd furnace of Hybrid Heating |
| CN111020530A (en) * | 2019-12-26 | 2020-04-17 | 湖南德智新材料有限公司 | Chemical vapor deposition furnace with air inlet at two ends |
| CN112725763A (en) * | 2020-12-24 | 2021-04-30 | 张家港迪源电子科技有限公司 | High-temperature chemical vapor deposition system and equipment |
| CN114481114A (en) * | 2022-01-24 | 2022-05-13 | 季华实验室 | Vacuum cold spraying system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: HUNAN DINGLI TECHNOLOGIES CO., LTD. Free format text: FORMER OWNER: DAI YU Effective date: 20130227 Free format text: FORMER OWNER: YANG JIANGAO TAN XINGLONG Effective date: 20130227 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20130227 Address after: 410118 Hunan province Changsha Zhongyi road two top technology park Muyun Industrial Zone Patentee after: Advanced Corporation for Materials & Equipments Co., Ltd. Address before: 410118 Hunan province Changsha Zhongyi road two top technology park Muyun Industrial Zone Patentee before: Dai Yu Patentee before: Yang Jiangao Patentee before: Tan Xinglong |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110817 |