CN107281881A - A kind of exhaust gas processing device and method - Google Patents
A kind of exhaust gas processing device and method Download PDFInfo
- Publication number
- CN107281881A CN107281881A CN201710616568.XA CN201710616568A CN107281881A CN 107281881 A CN107281881 A CN 107281881A CN 201710616568 A CN201710616568 A CN 201710616568A CN 107281881 A CN107281881 A CN 107281881A
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- cooling
- chamber
- exhaust gas
- settling chamber
- processing device
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Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000001816 cooling Methods 0.000 claims abstract description 97
- 239000002245 particle Substances 0.000 claims abstract description 36
- 238000004140 cleaning Methods 0.000 claims abstract description 28
- 238000001914 filtration Methods 0.000 claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 230000008021 deposition Effects 0.000 claims abstract description 13
- 244000007853 Sarothamnus scoparius Species 0.000 claims description 15
- 229910001220 stainless steel Inorganic materials 0.000 claims description 10
- 239000010935 stainless steel Substances 0.000 claims description 9
- 238000004781 supercooling Methods 0.000 claims description 7
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 abstract description 22
- 238000000151 deposition Methods 0.000 abstract description 12
- 238000001556 precipitation Methods 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 3
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 55
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 239000013618 particulate matter Substances 0.000 description 8
- 239000002826 coolant Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000002939 deleterious effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000011553 magnetic fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
Abstract
The invention discloses a kind of exhaust gas processing device and method, for metal organic chemical vapor deposition（MOCVD）The processing of equipment tail gas, the device includes inlet chamber, cooling settling chamber and discharge chamber successively from the bottom to top, inlet chamber is located at cooling settling chamber's side-lower, cool down deposition chamber interior and be provided with cooling cylinder, deposit cavity is formed between the outer wall of cooling cylinder and the inwall for cooling down settling chamber, one or more particle cleaning mechanisms are provided with deposit cavity, discharge chamber is provided with least first level filtering device, and collection portion below cooling settling chamber with connecting；While the exhaust gas treating method of the present invention is cooled down to tail gas, deposited using cooling settling chamber, deposited particles thing is cleared up, collected, tail gas is filtered.The present invention can realize that deposited particles thing quickly cools down precipitation, and cooling, deposition, cleaning, collection and filtering are integrated into an equipment and carried out simultaneously, realizes that floor space is small, cleaning is convenient, the deposited particles thing of collection MOCVD device tail gas is not shut down.
Description
Technical field
The present invention relates to tail gas disposal technique field, more particularly to a kind of exhaust gas processing device and method.
Background technology
In LED, semiconductor manufacturing, area of solar cell fast-developing today, metal organic chemical vapor deposition
（MOCVD）Technique is as the technology of production high-quality semiconductor thin-film material, and it is more and more extensive using scope.But MOCVD works
Skill is largely directed to using toxic material, equipment of Flammable and Explosive Materials and Corrosive Materia, and the tail gas of MOCVD device discharge
, can severe contamination environment containing inflammable, explosive and harmful by-products.
Tail gas disposal technique common at present is to carry out multistage filtering, universal mistake as shown in Figure 1 to the tail gas of discharge
Filter is filter common on domestic market, and the tail gas of MOCVD device is passed through universal after high temperature reaction stove discharge
In the inlet pipeline 1 of filter, 4~6 stainless steel filter cores 4 are installed in general purpose filter shell 2, stainless steel filter core 4 leads to
Cross pressing plate 9 and filter core mounting board 5 is sealingly clamped in filter chamber cup 3.MOCVD tail gas containing particle is first in filter chamber cup
Deposited in 3, post-depositional gas and then the filter material part by stainless steel filter core 4, into the core 8 of filter core, after filtering
Gas is converged in filter chamber rear chamber 7 again, is then discharged by discharge line 6.The filter core of filter can change polyester filter core into
Or glass fibre filter core, filtering accuracy can select according to different filtering accuracy filter cores.General purpose filter is both can mistake
Filtrate body can also filter the integrated filter of gas, but general purpose filter typically only has by-pass filtration precision, that is to say, that
It is only capable of, from the same filter core of filtering accuracy, just can guarantee that all filter cores reach the predetermined service life cycle together every time.
In addition, general purpose filter does not have refrigerating function, can not when the discharge exhaust temperature of MOCVD device is high and carries amount of heat
Quick cooling gas, and then can not effectively realize quick precipitation and the deposition of deleterious sedimentation particulate matter.
Chinese invention patent CN103203135B discloses the exhaust particulate filtration system and method for a kind of MOCVD device,
The tail gas of discharge is cooled down and multi-stage absorption filtering, although have water cooling function, but also increase many gas pipelines and connect
Head, adds disclosure risk；And with the extension of time, filtration system is blocked, equipment needs maintenance shut-downs and manual cleaning,
Many process times are occupied, the exposure of operating personnel is also increased.
The content of the invention
For the shortcoming of prior art described above, it is an object of the invention to provide a kind of exhaust gas processing device and side
Method, precipitation and deposition can not be quickly cooled down for solving the tail gas deleterious sedimentation particulate matter of MOCVD device and other depositing devices
The problem of collection.
In order to achieve the above objects and other related objects, the invention provides a kind of exhaust gas processing device, the vent gas treatment
Device includes inlet chamber, cooling settling chamber and discharge chamber successively from the bottom to top, and inlet chamber is located at cooling settling chamber's side-lower, cold
But deposition chamber interior is provided with cooling cylinder, is formed between the outer wall of cooling cylinder and the inwall for cooling down settling chamber in deposit cavity, deposit cavity
Particle cleaning mechanism provided with one or more cleaning cooling drum outer walls and cooling chamber walls.
Further, particle cleaning mechanism is rotary broom, rotary broom upper end and/or lower end and up carrier and/or descending
Carrier is connected, and up carrier and/or descending carrier can drive rotary broom to do planetary motion.
Further, rotary broom is wire cylinders brush, wire cylinders brush and up carrier or descending carrier by bearing or
Axle sleeve is connected.
Further, particle cleaning mechanism is to be arranged on the blower mechanism above deposit cavity.
Further, the inwall and/or outer wall of cooling settling chamber are additionally provided with cooling jacket.
Further, at least first level filtering device is also included in discharge chamber, filter is connected with cooling settling chamber top,
And filter is that stainless steel filters silk screen.
Further, the exhaust gas processing device also includes the collection portion connected with below cooling settling chamber.
Further, collection portion includes collecting chamber and collecting vessel successively from top to bottom, and provided with collecting chamber valve and collection
Bucket valve, wherein, collecting chamber is infundibulate.
Further, present invention also offers a kind of exhaust gas treating method, including：Tail gas is carried out using settling chamber is cooled down
Cooling, deposition, while clearing up deposited particles thing；And collect cleaning using the collection portion with being connected below cooling settling chamber
Deposited particles thing.
Further, while clearing up deposited particles thing, the filtering with being connected above cooling settling chamber is utilized
Device is filtered to the tail gas deposited through supercooling.
As described above, exhaust gas processing device of the present invention and method, can be applied to the tail gas of MOCVD device etc., its
One of at least have the advantages that：
1st, MOCVD device tail gas enters cooling settling chamber, under the cooling effect of cooling chamber walls and cooling deposition cylinder,
Precipitation particulate matter can be quickly cooled down, then cleaning is realized by particle cleaning mechanism；Further, it is also possible in cooling settling chamber
Wall and/or outer wall set cooling jacket, under the dual-cooled effect of cooling cylinder and cooling jacket so that the cooling analysis of particulate matter
Go out more efficiently, and cooling, deposition and the cleaning of MOCVD device tail gas can be made to be realized in set of device.
2nd, the particle cleaning mechanism wire cylinders brush of settling chamber is cooled down, both can be with up carrier and/or descending carrier
Revolution, can also be connected with planet carrier by bearing or axle sleeve and realize rotation, so as to the outer wall by cooling cylinder is deposited to
Clean out with the deposited particles thing on the inwall of cooling jacket, realize efficiently cleaning and collect deposited particles thing, it is to avoid use
Filter brings the trouble of cleaning.
3rd, filter and collection portion are set respectively above and below the cooling settling chamber of exhaust gas processing device so that heavy
Product particulate matter is directly dropped in funnel shaped collecting chamber, further into collecting vessel, so as to will cool down, and deposit, clear up, receive
An equipment is integrated into, equipment interface is reduced, has saved occupation area of equipment.
4th, tail gas enters cooling settling chamber, and the particulate matter deposited through supercooling, which is cleaned, enters collection portion, meanwhile, utilized
Filter device is filtered to the tail gas deposited through supercooling so that cooling, deposition, cleaning, collection and filter synchronous are carried out, and are realized
Do not shut down the deposited particles thing for collecting MOCVD device tail gas.
Brief description of the drawings
Fig. 1 is the general purpose filter operation principle schematic diagram of prior art；
Fig. 2 is that the exhaust gas processing device of the embodiment of the present invention cools down the schematic cross-section of settling chamber；
Fig. 3 is the overall structure diagram of the exhaust gas processing device of the embodiment of the present invention；
In figure, 1- inlet pipelines, 2- filter housings, 3- filter chamber cups, 4- stainless steel filter cores, 5- filter core mounting boards, 6- rows
Go out pipeline, 7- filter chamber rear chambers, 8- cores, 9- pressing plates, 10- collecting vessels, 11- collecting vessel valves, 12- collecting chamber valves, 13- is received
Collection chamber, 14- deposit cavities, 15- inlet chambers, the water inlets of 16- first, the descending carrier of 17-, 18- cooling jackets, 19- wire cylinders brushes,
20- cooling cylinders, the up carrier of 21-, 22- rotate gears, 23- magnetic fluids, 24- belt conveyers, 25- stepper motors, 26-
Two water inlets, the delivery ports of 27- second, 28- discharge chamber epicoeles, 29- discharge chambers, 30- stainless steels filtering silk screen, the water outlets of 31- first
Mouthful, 32- cooling jacket inwalls, 33- cooling drum outer walls, 34- coolings settling chamber, 35- collection portions.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the invention are illustrated：
Embodiment 1
The present embodiment is related to a kind of exhaust gas processing device, as Figure 2-3, the exhaust gas processing device include successively from the bottom to top into
Air cavity 15, cooling settling chamber 34 and discharge chamber 29, inlet chamber 15 are located in the cooling side-lower of settling chamber 34, cooling settling chamber 34
Portion is provided with cooling cylinder 20, is formed and is provided with deposit cavity 14, deposit cavity 14 between cooling drum outer wall 33 and the cooling inwall of settling chamber 34
The particle cleaning mechanism of one or more cleaning cooling drum outer walls 33 and the cooling inwall of settling chamber 34.
Preferably, the particle cleaning mechanism in the present embodiment is rotary broom 19, and the upper end of rotary broom 19 connects with up carrier 21
Connect, stepper motor 25 controls up carrier 21 to drive roller by belt conveyer 24, magnetic fluid 23, axle and rotate gear 22
Brush 19 does planetary motion, and the lower end of rotary broom 19 is connected with descending carrier 17, and drives it to do planetary motion, prevents only one end fortune
Dynamic to bring the problem of rocking, in other embodiments of the invention, rotary broom can also be fixedly connected with certain one end planet carrier, be done
Planetary motion.
Preferably, in the present embodiment, rotary broom uses wire cylinders brush 19, and the quantity of wire cylinders brush 19 is 4, steel wire
Rotary broom 19 is connected with up carrier 21 by bearing, therefore, and wire cylinders brush 19 is doing planetary motion with up carrier 21
While, can also the rotation under rubbing action of the steel wire with cooling drum outer wall 33 and the cooling inwall of settling chamber 34.In the present invention
Other embodiment in, wire cylinders brush 19 can also be connected by axle sleeve with up carrier 21 or descending carrier 17.In addition,
Grain cleaning mechanism can be Plastic rotary broom, and be not limited to do planetary motion, such as can be provided in the top of deposit cavity 14
Blower mechanism or spraying mechanism, as long as the quantity and motion mode of particle cleaning mechanism disclosure satisfy that the particulate matter of deposition
Cleaning out can use.
Preferably, in the present embodiment, the outer wall of the cooling settling chamber 34 of exhaust gas processing device is additionally provided with cooling jacket 18,
The cooling medium of cooling jacket 18 is to be provided with the first water inlet 16 and the first delivery port 31 on water, cooling jacket.Therefore, tail gas
After into the deposit cavity 14 of cooling settling chamber 34, heat exchange is carried out with the cooling medium of cooling jacket 18 and cooling cylinder 20, it is cold
But the deposited particles thing separated out be deposited on cooling jacket inwall 32 and cooling drum outer wall 33, the rotation of wire cylinders brush 19 and with
Up carrier 21 will clean out above-mentioned deposited particles thing during revolving round the sun.In other embodiments of the invention, also may be used
Cooling jacket is set with the inwall in cooling settling chamber 34.
Preferably, in the present embodiment, at least first level filtering device is also included in discharge chamber 29, filter is deposited with cooling
The top of room 34 is connected.In the present embodiment, filter is that stainless steel filters silk screen 30, and stainless steel filtering silk screen 30 can be by air-flow band
Further filtering is 14 in deposit cavity for the deposited particles thing walked, and the tail gas for filtering the filtering of silk screen 30 by stainless steel converges in exhaust
Chamber epicoele 28 is simultaneously discharged.In the other embodiment of the present invention, in order to improve filter efficiency, reach satisfied filter effect, also may be used
To use Multistage filtering device, metal filtration twine etc. other there is the filter of filtering function can use.
In the present embodiment, the cooling medium of cooling cylinder 20 is also water, and the second water inlet of cooling cylinder 20 injects water into cold
But the bottom of cylinder 20, water of the top of cooling cylinder 20 Jing Guo heat exchange can then be discharged from the second delivery port 27, realize circulating cooling function.
It should be appreciated that either cooling cylinder 20 or cooling jacket 18, cooling medium includes but is not limited to water, and the type of cooling can be with
Using circulating cooling, to realize efficiently quick cooling.
The exhaust gas processing device of the present embodiment can by single part or integration to MOCVD tail gas treatment devices,
Use, can also pass through as an autonomous device close with MOCVD device offgas outlet as a part for tail gas treatment device
Envelope is connected to the exhaust pipe road of MOCVD device, tail gas is cooled down and deposited particles thing online collection.
Embodiment 2
The present embodiment is related to a kind of exhaust gas processing device, the device base of the exhaust gas processing device of the present embodiment in previous embodiment 1
On plinth, collection portion 35 is provided with below cooling settling chamber 34, collection portion 35 is connected with cooling down the lower section of settling chamber 34, that is, collected
Portion 35 is located at the lower section of deposit cavity 14, realizes the online collection of deposited particles thing.
Preferably, in the present embodiment, collection portion 35 includes collecting chamber 13 and collecting vessel 10 successively from top to bottom, and provided with receipts
Collect chamber valve 12 and collecting vessel valve 11, and collecting chamber 13 is infundibulate, deposited particles thing falls into the oblique of infundibulate collecting chamber 13
Face, will enter collecting vessel 10, exist while not resulting in accumulation, collecting chamber valve 12 and collecting vessel valve 11 and it also avoid
Leakage is caused when changing collecting vessel 10.In other embodiments of the invention, it can also be set between collecting chamber 13 and collecting vessel 10
Connecting portion is equipped with, passes through connecting and closing for one or more Valve controlling collecting chambers 13 on connecting portion and collecting vessel 10.
The exhaust gas processing device of the present embodiment can by single part or integration to MOCVD tail gas treatment devices,
Use, can also pass through as an autonomous device close with MOCVD device offgas outlet as a part for tail gas treatment device
Envelope is connected to the exhaust pipe road of MOCVD device, tail gas is cooled down and deposited particles thing online collection.
Embodiment 3
The present embodiment is related to a kind of exhaust gas treating method, tail gas is cooled down, deposited using settling chamber is cooled down, while to deposition
Particulate matter is cleared up；And the deposited particles thing of cleaning is collected using the collection portion with being connected below cooling settling chamber.
Preferably, while clearing up deposited particles thing, the filtering connected with above cooling settling chamber is also utilized
Device is filtered to the tail gas deposited through supercooling.
Specifically, MOCVD device tail gas enters after cooling settling chamber, and under the cooling effect of cooling settling chamber, tail gas
Deposited particles thing separate out, and be cleaned to the collection portion that connects below cooling settling chamber, meanwhile, the tail deposited through supercooling
Gas enters the filter connected with above cooling settling chamber, and filter is filtered to the tail gas deposited through supercooling.Should
In method, tail gas enters after cooling settling chamber, cools down, deposits, clearing up, collecting and filter synchronous is carried out, it is possible to achieve not stopping
Machine collects the deposited particles thing of MOCVD device tail gas online.
The merely exemplary explanation present invention of above-described embodiment, not for the limitation present invention.The ordinary skill people of this area
Member can also make various changes and replacement on the basis of the above description to the present invention.These changes and replacement are still in this hair
Among the scope of bright protection.
Claims (10)
1. a kind of exhaust gas processing device, it is characterised in that described device include successively from the bottom to top inlet chamber, cooling settling chamber and
Discharge chamber, the inlet chamber is located at cooling settling chamber side-lower, and the cooling deposition chamber interior is provided with cooling cylinder, described cold
But formed between the outer wall of cylinder and the inwall of the cooling settling chamber and one or more cleanings are provided with deposit cavity, the deposit cavity
The particle cleaning mechanism of the cooling drum outer wall and the cooling chamber walls.
2. exhaust gas processing device as claimed in claim 1, it is characterised in that the particle cleaning mechanism is rotary broom, described
Rotary broom upper end and/or lower end are connected with up carrier and/or descending carrier, the up carrier and/or the descending carrier
The rotary broom can be driven to do planetary motion.
3. exhaust gas processing device as claimed in claim 2, it is characterised in that the rotary broom is wire cylinders brush, and described
Wire cylinders brush is connected with the up carrier or the descending carrier by bearing or axle sleeve.
4. exhaust gas processing device as claimed in claim 1, it is characterised in that the particle cleaning mechanism is described heavy to be arranged on
Blower mechanism above product chamber.
5. exhaust gas processing device as claimed in claim 1, it is characterised in that the inwall and/or outer wall of the cooling settling chamber
It is additionally provided with cooling jacket.
6. exhaust gas processing device as claimed in claim 1, it is characterised in that also include at least by-pass filtration in the discharge chamber
Device, the filter above the cooling settling chamber with connecting, and the filter is that stainless steel filters silk screen.
7. the exhaust gas processing device as described in claim 1 to 6 any one, it is characterised in that the exhaust gas processing device is also
Including the collection portion with being connected below the cooling settling chamber.
8. exhaust gas processing device as claimed in claim 7, it is characterised in that the collection portion includes collecting from top to bottom successively
Chamber and collecting vessel, and provided with collecting chamber valve and collecting vessel valve, and the collecting chamber is infundibulate.
9. a kind of exhaust gas treating method, it is characterised in that methods described includes：Using cool down settling chamber tail gas is cooled down,
Deposition, while clearing up deposited particles thing；And collect cleaning using the collection portion with being connected below the cooling settling chamber
Deposited particles thing.
10. exhaust gas treating method according to claim 9, it is characterised in that methods described also includes：To deposited particles
While thing is cleared up, the tail gas deposited through supercooling is entered using the filter with being connected above the cooling settling chamber
Row filtering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710616568.XA CN107281881A (en) | 2017-07-26 | 2017-07-26 | A kind of exhaust gas processing device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710616568.XA CN107281881A (en) | 2017-07-26 | 2017-07-26 | A kind of exhaust gas processing device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107281881A true CN107281881A (en) | 2017-10-24 |
Family
ID=60102610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710616568.XA Pending CN107281881A (en) | 2017-07-26 | 2017-07-26 | A kind of exhaust gas processing device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107281881A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108330465A (en) * | 2018-04-04 | 2018-07-27 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
| CN111359250A (en) * | 2020-03-30 | 2020-07-03 | 常州翊翔炭材科技有限公司 | Carbon/carbon composite material chemical vapor deposition high-temperature tail gas condensation filtering structure |
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| CN101992196A (en) * | 2010-11-04 | 2011-03-30 | 桂林漓佳金属有限责任公司 | Long pipe outer wall washing and cleaning device |
| CN201815207U (en) * | 2010-04-29 | 2011-05-04 | 杭州富通半导体设备科技有限公司 | Filter of vacuum system of single-crystal furnace |
| CN103157359A (en) * | 2011-12-13 | 2013-06-19 | 无锡华润华晶微电子有限公司 | Exhaust gas purifying device of CVD process |
| CN103316545A (en) * | 2013-05-20 | 2013-09-25 | 中国电子科技集团公司第四十八研究所 | Multilevel particle filter used in MOCVD device |
| EP2818224A1 (en) * | 2013-06-24 | 2014-12-31 | Linari Engineering S.r.l. | Device for the reduction of emissions |
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2017
- 2017-07-26 CN CN201710616568.XA patent/CN107281881A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201815207U (en) * | 2010-04-29 | 2011-05-04 | 杭州富通半导体设备科技有限公司 | Filter of vacuum system of single-crystal furnace |
| CN101992196A (en) * | 2010-11-04 | 2011-03-30 | 桂林漓佳金属有限责任公司 | Long pipe outer wall washing and cleaning device |
| CN103157359A (en) * | 2011-12-13 | 2013-06-19 | 无锡华润华晶微电子有限公司 | Exhaust gas purifying device of CVD process |
| CN103316545A (en) * | 2013-05-20 | 2013-09-25 | 中国电子科技集团公司第四十八研究所 | Multilevel particle filter used in MOCVD device |
| EP2818224A1 (en) * | 2013-06-24 | 2014-12-31 | Linari Engineering S.r.l. | Device for the reduction of emissions |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108330465A (en) * | 2018-04-04 | 2018-07-27 | 博宇（朝阳）半导体科技有限公司 | A kind of boron nitride crucible production system |
| CN111359250A (en) * | 2020-03-30 | 2020-07-03 | 常州翊翔炭材科技有限公司 | Carbon/carbon composite material chemical vapor deposition high-temperature tail gas condensation filtering structure |
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Address after: 102209, A129-1, Zhongxing Road, 10 Changping District science and Technology Park, Beijing Applicant after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. Address before: 102209, A129-1, Zhongxing Road, 10 Changping District science and Technology Park, Beijing Applicant before: BEIJING CHUANGYU TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20210122 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Applicant after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Applicant before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
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Application publication date: 20171024 |
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