CN108280824A - Laser speckle-shearing interferometry defect detecting system based on image registration and fusion - Google Patents

Laser speckle-shearing interferometry defect detecting system based on image registration and fusion Download PDF

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CN108280824A
CN108280824A CN201810049057.9A CN201810049057A CN108280824A CN 108280824 A CN108280824 A CN 108280824A CN 201810049057 A CN201810049057 A CN 201810049057A CN 108280824 A CN108280824 A CN 108280824A
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于海超
段宝妹
任超
白利兵
程玉华
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University of Electronic Science and Technology of China
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    • G06COMPUTING; CALCULATING OR COUNTING
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    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
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Abstract

本发明公开了一种基于图像配准及融合的激光剪切散斑干涉缺陷检测系统,包括:激光光源、扩束镜、分束镜、剪切器、相移器、图像采集器和集成图像处理算法和相移器控制算法的PC机;先利用双摄像头的图像采集器同时记录了被测物体在热加载前后的激光剪切散班干涉条纹图和原始图像,再通过图像处理算法和相移器控制算法对热加载前后的激光剪切散班干涉条纹图进行处理,得到相位差图像,最后将相位差图像与原始图像进行融合和配准,实现缺陷位置检测的快速精确定位。

The invention discloses a laser shearing speckle interference defect detection system based on image registration and fusion, comprising: a laser light source, a beam expander, a beam splitter, a cutter, a phase shifter, an image collector and an integrated image PC with processing algorithm and phase shifter control algorithm; first use the dual-camera image collector to simultaneously record the laser shearing interference fringe pattern and the original image of the measured object before and after thermal loading, and then through the image processing algorithm and phase shifter The shifter control algorithm processes the laser shearing scattered interference fringe pattern before and after thermal loading to obtain a phase difference image, and finally fuses and registers the phase difference image with the original image to realize fast and accurate positioning of defect position detection.

Description

基于图像配准及融合的激光剪切散斑干涉缺陷检测系统Laser Shear Speckle Interference Defect Detection System Based on Image Registration and Fusion

技术领域technical field

本发明属于缺陷检测技术领域,更为具体地讲,涉及一种基于图像配准及融合的激光剪切散斑干涉缺陷检测系统。The invention belongs to the technical field of defect detection, and more specifically relates to a laser shearing speckle interference defect detection system based on image registration and fusion.

背景技术Background technique

激光剪切散斑干涉技术具有全场、非接触、对环境抗干扰能力强、高精度,可直接测量被测物体由于内部脱粘等缺陷在热加载条件下激发的表面的位移导数,所以对环境要求比较低,这些特点使得激光剪切散班干涉技术能够走出实验室,广泛应用于航空航天的复合材料的脱粘等微小型内部缺陷。虽然无论从原理还是在实际实验和应用中,该技术被广泛应用于无损检测中,并且取得了很多创新性和突破性的进展,但是目前的研究尤其是在缺陷位置的精确定位方面几乎没有明确的进展,主要研究在缺陷的定性和定量检出以及应用领域方面。Laser shear speckle interferometry technology has full-field, non-contact, strong anti-interference ability to the environment, and high precision. It can directly measure the displacement derivative of the surface of the measured object due to defects such as internal debonding under thermal loading conditions. The environmental requirements are relatively low. These characteristics enable the laser shearing bulk interferometry technology to go out of the laboratory and be widely used in the debonding of aerospace composite materials and other tiny internal defects. Although this technology has been widely used in non-destructive testing in terms of principle or in practical experiments and applications, and has achieved many innovative and breakthrough progress, the current research, especially in the precise positioning of defect locations, has little clarity. The progress is mainly in the qualitative and quantitative detection of defects and application fields.

激光剪切散班干涉技术能直接测定物体位移的微分,对于应变非常有利.基本原理是结合了一般散斑干涉测量和剪切机理,在一般散斑干涉测量光路的透镜前加上错位元件,通过不同的剪切元件形成剪切散斑。以经典的迈克尔逊干涉仪为例,物体用相干激光照射,借助双折射晶体把一个物点分成像面上的两个像点,从而在照相机的图像传感器上产生一对侧向错位像,物体加载变形前后的两幅散斑图像经CCD采集数字化,经帧存体存入计算机,两幅散斑图相减形形成新的干涉条纹,从干涉条纹图的变化可以判断出物体的内部是否有缺陷。结合新型相移技术提取图像的相位信息,进一步处理可以实现自动快速的缺陷可视化检测。但是目前的研究只是局限于缺陷的检出,并没有在被测物体上实现精确的定位,而精确定位是对于材料结构健康管理预测和估计重要的衡量之一。Laser shear interferometry technology can directly measure the differential of object displacement, which is very beneficial to strain. The basic principle is to combine general speckle interferometry and shearing mechanism, and add a dislocation element before the lens of the general speckle interferometry optical path. The sheared speckle is formed by different shearing elements. Taking the classic Michelson interferometer as an example, the object is irradiated with coherent laser light, and an object point is divided into two image points on the imaging surface by means of a birefringent crystal, thereby generating a pair of lateral dislocation images on the image sensor of the camera. The two speckle images before and after loading deformation are collected and digitized by CCD, and stored in the computer through frame storage. The two speckle images are subtracted to form new interference fringes. From the change of the interference fringe images, it can be judged whether there is defect. Combined with the new phase shift technology to extract the phase information of the image, further processing can realize automatic and fast defect visual detection. However, the current research is only limited to the detection of defects, and has not achieved precise positioning on the measured object, and precise positioning is one of the important measures for the prediction and estimation of material structure health management.

1982年的《Optical Engineering》的第21卷3号“A new optical method forstrain measurement and nondestructive testing”一文中首次提出了将激光剪切散班干涉技术应用于应力检测和无损检测领域,其装置采用的是使用一个带有小楔角的棱镜放置在CCD摄像头前,棱镜大小刚好是CCD摄像头面积的一半,被测物体表面的反射光线经过棱镜形成错位和直接经过CCD摄像头的原像进行剪切干涉。该装置虽然简单,但缺点也非常明显,固定棱镜楔角直接关联剪切角的大小,不灵活,而且引入噪声非常大,灵敏度极低。In the article "A new optical method forstrain measurement and nondestructive testing" in Volume 21, No. 3 of "Optical Engineering" in 1982, it was proposed for the first time to apply the laser shearing bulk interferometry technology to the field of stress detection and nondestructive testing. The device used A prism with a small wedge angle is placed in front of the CCD camera. The size of the prism is just half of the area of the CCD camera. The reflected light on the surface of the measured object passes through the prism to form a dislocation and directly passes through the original image of the CCD camera for shear interference. Although the device is simple, its shortcomings are also very obvious. The fixed prism wedge angle is directly related to the size of the shear angle, which is inflexible, introduces a lot of noise, and has extremely low sensitivity.

1996年的《Optics and Laser in Engineering》的第24卷“Dual-beam phaseShift Shearography for Measurement of In-plane Strains”一文中介绍了一种基于迈克尔逊干涉仪的双光束对称光源单观测的激光剪切散班干涉装置,能够测出面位位移导数梯度,但对于缺陷精确定位的要求无法实现。In the article "Dual-beam phaseShift Shearography for Measurement of In-plane Strains" in Volume 24 of "Optics and Laser in Engineering" in 1996, a single-observation laser shearing of a dual-beam symmetric light source based on a Michelson interferometer was introduced. Scattered interferometric devices can measure the gradient of surface displacement derivatives, but the requirements for precise positioning of defects cannot be realized.

1999年的《Composites:Part B Engineering》的第30卷“Applications ofdigital shearography for testing of composite structures”一文中采用的基于经典的迈克尔逊干涉仪的单照射源单观测的剪切散班干涉装置,该装置简单易实现,但是只是结果检出,而且如果需要提取相位信息需要结合相移技术,就简单的该装置无法实现缺陷的在线自动实时缺陷检测。In the article "Applications of digital shearography for testing of composite structures" in the 30th volume of "Composites: Part B Engineering" in 1999, the single-irradiation-source single-observation shear bulk interferometer based on the classic Michelson interferometer was used. The device is simple and easy to implement, but it is only for result detection, and if phase information needs to be extracted and phase shifting technology is required, the simple device cannot realize online automatic real-time defect detection.

1997年的《Meas.Sci.Techno》的第8卷的“A compact dual-purpose camera forshearography and electronic speckle-pattern interferometry”一文中公布了一种组合电子散班干涉和剪切散班干涉装置的检测系统,该装置可以同时获得被测物体的散班干涉和剪切散班干涉信息,同时获得两种技术的信息,但最大的缺点之一是光路比较复杂,引入外界误差较大;同时光能利用率较低,要求激光器的能量高;另外,也无法实现缺陷位置的精确对比和定位。In the article "A compact dual-purpose camera forshearography and electronic speckle-pattern interferometry" in Volume 8 of "Meas.Sci.Techno" in 1997, a detection of a combined electronic speckle-pattern interferometry and shear speckle-pattern interferometry device was published. system, the device can simultaneously obtain the information of scattered interferometry and shear interferometric interference of the measured object, and obtain the information of the two technologies at the same time, but one of the biggest disadvantages is that the optical path is relatively complicated, and the external error is relatively large; at the same time, the light energy The utilization rate is low, and the energy of the laser is required to be high; in addition, the accurate comparison and positioning of the defect position cannot be realized.

1999年《Applied Optics》的第38卷第1号的“Multiwavelength shearographyfor quantitative measurements of two-dimensional strain distributions”、1999年的《Proceeding of SPIE》的第3744和第3745卷的“Time-division-multiplexed 3Dshearography”和“Compact shearography system for the measurement of 3Ddeformation”三篇文章中采用了三个正方形的三个顶点位置光源和单观测的基于迈克尔逊干涉仪的激光剪切散班干涉装置,用于检测物体面内位移梯度,使得各个方向的面内位移梯度都可以测出,但是该装置及其复杂,所以三个光源在照射物体的干涉条纹信息在后期很难做分离,引入的噪声信号也随之增多。"Multiwavelength shearography for quantitative measurements of two-dimensional strain distributions" in Volume 38, No. 1 of "Applied Optics" in 1999, "Time-division-multiplexed 3Dshearography in Volumes 3744 and 3745 of "Proceeding of SPIE" in 1999 " and "Compact shearography system for the measurement of 3Ddeformation" used three square light sources at three vertex positions and a single-observation laser shearing bulk interferometer based on Michelson interferometers to detect object planes The internal displacement gradient makes it possible to measure the in-plane displacement gradient in all directions, but the device is extremely complicated, so it is difficult to separate the interference fringe information of the three light sources illuminating the object in the later stage, and the noise signal introduced will also increase accordingly. .

1996年的《Applied Optics》的第5卷第313号的“Quantitative evaluation ofdigital shearing interferogram using the spatial carrier method”、2004年的《Optics and Lasers in Engineering》第42卷的“A new set-up for pulsed digitalshearography applied to defect detection in composite structures”一文中介绍了基于Mach-Zehnder干涉仪装置的激光剪切散班干涉检测系统,结合了空间载波技术,提高缺陷检测的精度,但在复合材料的缺陷准确定位技术上没有进展。"Quantitative evaluation of digital shearing interferogram using the spatial carrier method" in Volume 5, No. 313 of "Applied Optics" in 1996, "A new set-up for pulsed" in Volume 42 of "Optics and Lasers in Engineering" in 2004 digitalshearography applied to defect detection in composite structures” introduced the laser shear bulk interferometric detection system based on the Mach-Zehnder interferometer device, combined with the space carrier technology to improve the accuracy of defect detection, but in the accurate positioning of defects in composite materials No technical progress.

2008年的《Measurement Science and Technology》的第19卷的“Surface strainmeasurement of rotating objects using pulsed laser shearography with coherentfibre-optic imaging bundles”一文中采用了基于Mach-Zehnder干涉仪的四个相机镜头相干光纤成像检测系统,该系统采用四小的镜头从四个角度采集被测物图像,通过四个光缆同时输送给Mach-Zehnder干涉仪形成剪切干涉图像,最后融合至CCD摄像头的四个角落,再进行条纹图像的分析与处理,提取有用得信息。该装置提高了检测精度,但是缺点非常明显,首先系统建立非常复杂,费用比较昂贵。其次,通过CCD采集的干涉条纹图包含的信息非常复杂繁多,难以进行信号分离,同时也可能引入额外的噪声信息。In the article "Surface strain measurement of rotating objects using pulsed laser shearography with coherent fiber-optic imaging bundles" in Volume 19 of "Measurement Science and Technology" in 2008, four camera lenses based on Mach-Zehnder interferometer were used for coherent fiber imaging detection system, the system uses four small lenses to collect images of the measured object from four angles, and transmits them to the Mach-Zehnder interferometer through four optical cables at the same time to form a shear interference image, which is finally fused to the four corners of the CCD camera, and then fringe Image analysis and processing to extract useful information. This device improves the detection accuracy, but the disadvantages are very obvious. First, the system is very complicated to set up and the cost is relatively expensive. Secondly, the interference fringe pattern collected by the CCD contains very complex and various information, which makes it difficult to separate the signals, and may also introduce additional noise information.

2014年的博士论文“基于液晶空间光调制器的矢量光场调控研究”、2013年的《Journal of Optoelectronics Laser》第24卷第6期的“基于液晶空间光调制器的同步移相共光路干涉技术”、2006年的《Optical Engineering》的第45卷第10号的“Digitalspeckle shearing interferometer using a liquid-crystal spatial lightmodulator”这三篇文章都采用了基于空间光调制器的剪切散班干涉装置,该装置确实减少了相位信息获得的时间,提高了光的能量利用率和减少其他光对该系统的干扰,但是空间光调制器非常昂贵,而且在对于缺陷检测的准确定位上并没有涉及。Doctoral thesis "Research on Vector Light Field Control Based on Liquid Crystal Spatial Light Modulator" in 2014, "Synchronous Phase-shifting Common Optical Path Interference Based on Liquid Crystal Spatial Light Modulator" in "Journal of Optoelectronics Laser" Volume 24 Issue 6 in 2013 Technology", "Digitalsckle shearing interferometer using a liquid-crystal spatial lightmodulator" in Volume 45, No. 10 of "Optical Engineering" in 2006. The device does reduce the phase information acquisition time, improve the energy utilization of light and reduce the interference of other light to the system, but the spatial light modulator is very expensive, and it is not involved in the accurate positioning of defect detection.

发明内容Contents of the invention

本发明的目的在于克服现有技术的不足,提供一种基于图像配准及融合的激光剪切散斑干涉缺陷检测系统,通过图像融合、配准的方式实现缺陷位置信息的精确定位的可视化检测,具有光路简单、成本低、灵敏度高、检测精度高等特点。The purpose of the present invention is to overcome the deficiencies of the prior art, to provide a laser shearing speckle interference defect detection system based on image registration and fusion, and to realize the visual detection of precise positioning of defect position information through image fusion and registration , has the characteristics of simple optical path, low cost, high sensitivity and high detection accuracy.

为实现上述发明目的,本发明一种基于图像配准及融合的激光剪切散斑干涉缺陷检测系统,其特征在于,包括:激光光源、扩束镜、分束镜、剪切器、相移器、图像采集器和集成图像处理算法和相移器控制算法的PC机;In order to achieve the purpose of the above invention, the present invention provides a laser shearing speckle interference defect detection system based on image registration and fusion, which is characterized in that it includes: a laser light source, a beam expander, a beam splitter, a shear, a phase shifter device, image collector and PC with integrated image processing algorithm and phase shifter control algorithm;

所述的剪切器包括五五分束镜、相移反射镜和剪切反射镜;The shearer includes a 55-5 beam splitter, a phase-shifting mirror and a shearing mirror;

所述的图像采集器采用双CCD摄像头,其中CCD1摄像头用于采集原图像,CCD2摄像头用于采集激光剪切散班干涉条纹图像;Described image acquisition device adopts double CCD camera, and wherein CCD1 camera is used for collecting original image, and CCD2 camera is used for collecting laser shear scattered class interference fringe image;

被测物体在常温状态下,激光光源经过扩束镜扩束后,将激光照射至被测物体的表面,再将被测物体表面的反射光通过分束镜,使光线分成相同等光能量的两束光,其中一束光直接由CCD1摄像头记录,得到原始图像;另一束光进入剪切器的五五分束镜,五五分束镜将这束光分成两束同等光能量的两束光,再分别进入到连接相移器的相移反射镜和剪切反射镜,通过相移器控制相移反射镜的相移,通过剪切镜调节剪切量,从而形成物体表面图像和自身在某方向错位的剪切图像进行干涉,并由CCD2摄像头记录,得到常温状态下被测物表面的四幅具有已知相移信息的激光剪切散班干涉条纹图像;When the measured object is at normal temperature, the laser light source is expanded by the beam expander, and the laser light is irradiated to the surface of the measured object, and then the reflected light on the surface of the measured object is passed through the beam splitter, so that the light is divided into the same light energy. Two beams of light, one beam of light is directly recorded by the CCD1 camera to obtain the original image; the other beam of light enters the 55-5 beam splitter of the cutter, and the 55-5 beam splitter divides this beam of light into two beams of equal light energy. The light beam enters the phase-shifting mirror and the shearing mirror connected to the phase shifter respectively, the phase shifting of the phase-shifting mirror is controlled by the phase shifter, and the shearing amount is adjusted by the shearing mirror, thereby forming an object surface image and Interferes with the sheared image dislocated in a certain direction, and records it with the CCD2 camera to obtain four laser sheared discrete interference fringe images with known phase shift information on the surface of the measured object at room temperature;

被测物体在热加载状态下,激光光源同样经过扩束镜扩束后,将激光照射至被测物体的表面,再将被测物体表面的反射光通过分束镜,使光线分成相同等光能量的两束光,其中一束光直接由CCD1摄像头记录,得到原始图像;另一束光进入剪切器的五五分束镜,五五分束镜将这束光分成同等光能量的两束光,这两束光再分别进入到连接相移器的相移反射镜和剪切反射镜,通过相移器控制相移反射镜产生微小位移从而达到相位移动的目的,通过剪切镜调节剪切量,从而形成物体表面图像和自身在某方向错位的剪切图像进行干涉,并由CCD2摄像头记录,得到热加载状态下被测物表面的四幅具有已知相移信息的激光剪切散班干涉条纹图像;When the object under test is under thermal loading, the laser light source is also expanded by the beam expander, and the laser light is irradiated to the surface of the object under test, and then the reflected light on the surface of the object under test passes through the beam splitter, so that the light is divided into equal beams. Two beams of light with high energy, one of which is directly recorded by the CCD1 camera to obtain the original image; The two beams of light enter the phase shift mirror and the shear mirror connected to the phase shifter respectively, and the phase shift mirror is controlled by the phase shifter to produce a small displacement to achieve the purpose of phase shift, and the phase shift is adjusted by the shear mirror The amount of shearing, so as to form the surface image of the object and the shearing image dislocated in a certain direction for interference, and record it with the CCD2 camera to obtain four laser shearing images with known phase shift information on the surface of the measured object under thermal loading. Class interference fringe image;

CCD1摄像头分别将两种状态下得到的两幅图像以及CCD2摄像头分别在两种状态下得到的八幅图像,一共十幅图像全部传送给PC机,PC机通过自带的相移器控制算法精确控制相移器产生四个已知相移,通过四步相移算法提取两种状态下的激光剪切散班干涉条纹图像的相位图,然后做数值差得到相位差图像,再通过对相位差图像依次进行自适应阈值滤波和最小二乘法的解包裹算法处理,得到直接反应被测物表面形变位移梯度的激光剪切散班干涉条纹图像的相位差图像,最后随机挑选一幅由CCD1采集的原图像与上述的相位差图像按照CCD分辨率光路系统以及剪切量的比例运算进行配准、融合,实现缺陷检测的精确可视化定位。The CCD1 camera transmits the two images obtained in the two states and the eight images obtained by the CCD2 camera in the two states respectively, a total of ten images are sent to the PC, and the PC controls the algorithm accurately through the built-in phase shifter. Control the phase shifter to generate four known phase shifts, extract the phase diagrams of the laser shear scattering interference fringe images in the two states through the four-step phase shift algorithm, and then make a numerical difference to obtain the phase difference image, and then pass the phase difference The images are sequentially processed by the adaptive threshold filtering and the unwrapping algorithm of the least squares method to obtain the phase difference image of the laser shear discrete interference fringe image that directly reflects the surface deformation and displacement gradient of the measured object. Finally, a random image collected by the CCD1 is selected. The original image and the above-mentioned phase difference image are registered and fused according to the CCD resolution optical system and the proportional calculation of the shear amount, so as to realize the accurate visual positioning of defect detection.

本发明的发明目的是这样实现的:The purpose of the invention of the present invention is achieved like this:

本发明基于图像配准及融合的激光剪切散斑干涉缺陷检测系统,包括:激光光源、扩束镜、分束镜、剪切器、相移器、图像采集器和集成图像处理算法和相移器控制算法的PC机;先利用双摄像头的图像采集器同时记录了被测物体在热加载前后的激光剪切散班干涉条纹图和原始图像,再通过图像处理算法和相移器控制算法对热加载前后的激光剪切散班干涉条纹图进行处理,得到相位差图像,最后将相位差图像与原始图像进行融合和配准,实现缺陷位置检测的快速精确定位。The laser shearing speckle interference defect detection system based on image registration and fusion of the present invention includes: a laser light source, a beam expander, a beam splitter, a cutter, a phase shifter, an image collector, and an integrated image processing algorithm and phase PC with shifter control algorithm; first use the dual-camera image collector to simultaneously record the laser shear scattering interference fringe pattern and the original image of the measured object before and after thermal loading, and then use the image processing algorithm and phase shifter control algorithm Process the laser-sheared scattered interference fringe images before and after thermal loading to obtain a phase difference image, and finally fuse and register the phase difference image with the original image to realize fast and accurate positioning of defect position detection.

同时,本发明基于图像配准及融合的激光剪切散斑干涉缺陷检测系统还具有以下有益效果:At the same time, the laser shearing speckle interference defect detection system based on image registration and fusion of the present invention also has the following beneficial effects:

(1)、本发明基于经典的迈克尔逊干涉仪结合自动条纹相位信息获取的相移技术,采用双摄像头融合技术采集图像,其中,一条通道是经过集成了四步相移算法、基于自适应阈值滤波的平滑算法和改进的最小二乘法的解包裹算法的PC端处理之后图像再转化为透明图像,缺陷轮廓清晰可见,另一通道是与前者共光路的被测物表面的原始图像,两者根据CCD摄像头的分辨率以及光路的距离比例精确映射融合和配准,实现精确定位的快速缺陷可视化检测。(1), the present invention is based on the classic Michelson interferometer combined with the phase shift technology of automatic fringe phase information acquisition, and adopts dual camera fusion technology to collect images, wherein one channel is integrated with a four-step phase shift algorithm based on adaptive threshold After the smoothing algorithm of filtering and the improved least square method unwrapping algorithm are processed on the PC side, the image is converted into a transparent image, and the contour of the defect is clearly visible. Accurately map fusion and registration according to the resolution of the CCD camera and the distance ratio of the optical path to achieve fast defect visual detection with precise positioning.

(2)、本发明克服了光路复杂成本高和精度低的缺点,关键的是能实现缺陷直观的精确定位,直接在线实现缺陷的准备快速可视化检测,为复合材料的结构检测、健康管理和寿命估计做出突破性的贡献,尤其在对实际应用的大面积被测物进行检测时,该系统的有点尤其突出。(2), the present invention overcomes the shortcomings of complex optical path, high cost and low precision. The key is to realize intuitive and precise positioning of defects, and directly realize fast visual detection of defect preparation online, which provides structural detection, health management and life expectancy of composite materials. It is estimated to make a breakthrough contribution, especially when detecting large-area objects in practical applications, the system's advantages are particularly prominent.

附图说明Description of drawings

图1是本发明基于图像配准及融合的激光剪切散斑干涉缺陷检测系统原理图;Fig. 1 is a schematic diagram of the laser shearing speckle interference defect detection system based on image registration and fusion of the present invention;

图2是是本发明基于图像配准及融合的激光剪切散斑干涉缺陷检测系统平面图;Fig. 2 is a plan view of the laser shearing speckle interference defect detection system based on image registration and fusion of the present invention;

图3是物体表面的原始图;Figure 3 is the original image of the surface of the object;

图4是相位差图像经过自适应阈值滤波处理之后的图像;Fig. 4 is the image after the phase difference image is processed through adaptive threshold filtering;

图5是相位差图的经过最小二乘法的解包裹算法处理之后的图像;Fig. 5 is the image processed by the unwrapping algorithm of the least squares method of the phase difference map;

图6是图3和图5进行融合配准后的图像。Fig. 6 is the image after fusion and registration of Fig. 3 and Fig. 5 .

具体实施方式Detailed ways

下面结合附图对本发明的具体实施方式进行描述,以便本领域的技术人员更好地理解本发明。需要特别提醒注意的是,在以下的描述中,当已知功能和设计的详细描述也许会淡化本发明的主要内容时,这些描述在这里将被忽略。Specific embodiments of the present invention will be described below in conjunction with the accompanying drawings, so that those skilled in the art can better understand the present invention. It should be noted that in the following description, when detailed descriptions of known functions and designs may dilute the main content of the present invention, these descriptions will be omitted here.

实施例Example

图1是本发明基于图像配准及融合的激光剪切散斑干涉缺陷检测系统原理图。Fig. 1 is a schematic diagram of the laser shearing speckle interference defect detection system based on image registration and fusion of the present invention.

在本实施例中,如图1所示,本发明基于图像配准及融合的激光剪切散斑干涉缺陷检测系统,包括:激光光源、扩束镜、分束镜、剪切器、相移器、图像采集器和集成图像处理算法和相移器控制算法的PC机;In this embodiment, as shown in Figure 1, the laser shearing speckle interference defect detection system based on image registration and fusion of the present invention includes: laser light source, beam expander, beam splitter, shearer, phase shifter device, image collector and PC with integrated image processing algorithm and phase shifter control algorithm;

在本实施例中,激光光源选用氦氖激光器;剪切器包括五五分束镜、相移反射镜和剪切反射镜;相移器选用压电陶瓷相移器;图像采集器采用双CCD摄像头,其中,CCD1摄像头用于采集原图像,CCD2摄像头用于采集激光剪切散班干涉条纹图像;In this embodiment, the laser light source is a helium-neon laser; the cutter includes a five-fifth beam splitter, a phase shift mirror and a shear mirror; the phase shifter is a piezoelectric ceramic phase shifter; the image collector uses a double CCD Camera, wherein, the CCD1 camera is used to collect the original image, and the CCD2 camera is used to collect the laser shearing scattered interference fringe image;

图2是是本发明基于图像配准及融合的激光剪切散斑干涉缺陷检测系统平面图。Fig. 2 is a plan view of the laser shearing speckle interference defect detection system based on image registration and fusion according to the present invention.

在本实施例中,被测物体为内置有直径为10mm,20mm,30mm,50mm圆形涂蜡层和10x10mm、10x20mm、10x30mm的矩形涂蜡层,涂蜡层用于模拟多层复合材料的脱粘缺陷,该被测物大小为500mmx500mm的多层异质薄膜复合材料。In this embodiment, the object to be measured is a circular waxed layer with a diameter of 10mm, 20mm, 30mm, 50mm and a rectangular waxed layer of 10x10mm, 10x20mm, 10x30mm. The waxed layer is used to simulate the peeling off of multilayer composite materials. Adhesive defects, the size of the measured object is 500mmx500mm multi-layer heterogeneous film composite material.

被测物体2在常温状态下,激光光源3经过扩束镜4扩束后,将激光照射至被测物体2的表面,再将被测物体2表面的反射光通过分束镜6,使光线分成相同等光能量的两束光,其中一束光直接由CCD1摄像头记录,得到原始图像,如图3所示;另一束光进入剪切器的五五分束镜5,五五分束镜5将这束光分成两束同等光能量的两束光,再分别进入到连接相移器的相移反射镜1和剪切反射镜7,通过相移器控制相移反射镜1的相移,通过剪切反射镜7调节剪切量,从而形成物体表面图像和自身在某方向错位的剪切图像进行干涉,并由CCD2摄像头记录,得到常温状态下被测物表面的四幅具有已知相移信息的激光剪切散班干涉条纹图像;When the measured object 2 is at normal temperature, the laser light source 3 irradiates the laser beam to the surface of the measured object 2 after being expanded by the beam expander 4, and then the reflected light from the surface of the measured object 2 passes through the beam splitter 6 to make the light Divided into two beams of light with the same light energy, one of which is directly recorded by the CCD1 camera to obtain the original image, as shown in Figure 3; The mirror 5 divides this beam of light into two beams of equal light energy, and then respectively enters the phase shift mirror 1 and the shear mirror 7 connected to the phase shifter, and the phase shift mirror 1 is controlled by the phase shifter. The shearing amount is adjusted by the shearing mirror 7, so that the surface image of the object is formed to interfere with the shearing image dislocated in a certain direction, and is recorded by the CCD2 camera to obtain four images of the surface of the measured object at normal temperature with known Phase-shift information laser shear scattered class interference fringe image;

被测物体2在热加载状态下,激光光源3经过扩束镜4扩束后,将激光照射至被测物体2的表面,再将被测物体2表面的反射光通过分束镜6,使光线分成相同等光能量的两束光,其中一束光直接由CCD1摄像头记录,得到原始图像;另一束光进入剪切器的五五分束镜5,五五分束镜5将这束光分成两束同等光能量的两束光,再分别进入到连接相移器的相移反射镜1和剪切反射镜7,通过相移器控制相移反射镜1的相移,通过剪切反射镜7调节剪切量,从而形成物体表面图像和自身在某方向错位的剪切图像进行干涉,并由CCD2摄像头记录,得到热加载状态下被测物表面的四幅具有已知相移信息的激光剪切散班干涉条纹图像;When the measured object 2 is under thermal loading, after the laser light source 3 is expanded by the beam expander 4, the laser light is irradiated to the surface of the measured object 2, and then the reflected light on the surface of the measured object 2 passes through the beam splitter 6, so that The light is divided into two beams of light with the same light energy, one of which is directly recorded by the CCD1 camera to obtain the original image; The light is divided into two beams of light with the same light energy, and then respectively enter the phase shift mirror 1 and the shear mirror 7 connected to the phase shifter, and the phase shift of the phase shift mirror 1 is controlled by the phase shifter, and the phase shift mirror 1 is controlled by the phase shifter. The reflector 7 adjusts the shearing amount to form an image of the surface of the object to interfere with the shearing image dislocated in a certain direction, and is recorded by the CCD2 camera to obtain four images with known phase shift information on the surface of the measured object under thermal loading. Laser shear scattered interference fringe image;

双CCD摄像头分别将两种状态下得到的十幅图像全部传送给PC机,PC机发送指令给压电陶瓷相移器,使控制驱动电压从40v开始,每隔4v,相位变化π/2,从而在相移器控制算法精确控制下,压电陶瓷相移器产生0、90°、180°、270°四个已知相移。已知剪切散斑图像可以用方程(1.1)来表达,其中I为CCD上散斑图样的光强分布;其中I0是背景光强。μ是散斑图样的调制幅值。是随机相位角。The dual CCD cameras transmit all the ten images obtained in the two states to the PC, and the PC sends instructions to the piezoelectric ceramic phase shifter, so that the control driving voltage starts from 40v, and the phase changes by π/2 every 4v, Therefore, under the precise control of the phase shifter control algorithm, the piezoelectric ceramic phase shifter produces four known phase shifts of 0, 90°, 180°, and 270°. It is known that the sheared speckle image can be expressed by Equation (1.1), where I is the light intensity distribution of the speckle pattern on the CCD; where I 0 is the background light intensity. μ is the modulation amplitude of the speckle pattern. is the random phase angle.

通过对方程1.1所表示的剪切散斑图进行四步相移,可以产生以下四幅散斑图:By performing a four-step phase shift on the sheared speckle pattern represented by Equation 1.1, the following four speckle patterns can be generated:

四步相移算法每步增加π/2,可产生上述四幅剪切散斑图。,相位可由方程1.3确定,热加载后的图像重复上述四步相移算法可得到方程1.4,The four-step phase shift algorithm increases by π/2 in each step, and the above four sheared speckle patterns can be generated. , phase It can be determined by Equation 1.3, and the image after thermal loading can be obtained by repeating the above four-step phase shift algorithm to obtain Equation 1.4,

通过做数值差也就是将方程1.4减去方程1.3就可以得到由于被测物形变引起的相位差Δ,再将相位差图像通过PC机自带的图像处理算法:自适应阈值滤波和最小二乘法的解包裹算法进行依次处理处理,得到直接反应被测物表面形变位移梯度的激光剪切散班干涉条纹图像的相位差图像,其中,经过自适应阈值滤波处理之后的图像如图4所示,经过最小二乘法的解包裹算法处理之后的图像如图5所示;By doing numerical difference, that is, subtracting Equation 1.3 from Equation 1.4, you can get the phase difference Δ caused by the deformation of the measured object, and then pass the phase difference image through the image processing algorithm that comes with the PC: adaptive threshold filtering and least squares method The unwrapping algorithm is processed sequentially to obtain the phase difference image of the laser shear discrete interference fringe image that directly reflects the surface deformation and displacement gradient of the measured object. Among them, the image after adaptive threshold filtering is shown in Figure 4. The image processed by the unwrapping algorithm of the least squares method is shown in Figure 5;

最后随机挑选一幅由CCD1采集的原图像,即图3,与上述处理后的相位差图像,即图5,按照CCD分辨率光路系统以及剪切量的比例运算进行配准、融合,得到图6所示图像,从而实现缺陷检测的精确可视化定位。Finally, randomly select an original image collected by CCD1, that is, Figure 3, and the phase difference image after the above processing, that is, Figure 5, and perform registration and fusion according to the ratio calculation of the CCD resolution optical system and the shear amount to obtain the image 6, so as to realize the precise visual positioning of defect detection.

尽管上面对本发明说明性的具体实施方式进行了描述,以便于本技术领域的技术人员理解本发明,但应该清楚,本发明不限于具体实施方式的范围,对本技术领域的普通技术人员来讲,只要各种变化在所附的权利要求限定和确定的本发明的精神和范围内,这些变化是显而易见的,一切利用本发明构思的发明创造均在保护之列。Although the illustrative specific embodiments of the present invention have been described above, so that those skilled in the art can understand the present invention, it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, As long as various changes are within the spirit and scope of the present invention defined and determined by the appended claims, these changes are obvious, and all inventions and creations using the concept of the present invention are included in the protection list.

Claims (3)

1. a kind of laser speckle-shearing interferometry defect detecting system based on image registration and fusion, which is characterized in that including:Swash Radiant, beam expanding lens, beam splitter, clipper, phase-shifter, image acquisition device and integrated image processing algorithm and phase-shifter control are calculated The PC machine of method;
The clipper includes five or five beam splitters, phase shift reflection mirror and shearing speculum;
The image acquisition device is used using double CCD cameras, wherein CCD1 cameras for acquiring original image, CCD2 cameras Class's interference fringe image is dissipated in acquisition laser shearing;
Testee is under normal temperature state, and laser light source is after beam expanding lens expands, by the surface of laser irradiation to testee, Light is set to be divided into the two-beam of mutually same light energy, wherein light beam by beam splitter the reflected light on testee surface again It is directly recorded by CCD1 cameras, obtains original image image;Another light beam enters five or five beam splitters of clipper, five or five beam splitting This Shu Guang is divided into the two-beam of same light energy by mirror, then has respectively entered phase shift reflection mirror and the shearing reflection of connection phase-shifter Mirror, by phase-shifter control phase shift reflection mirror phase shift, by shear mirror adjust shearing displacement, to formed body surface image and Interfered from the clip image to misplace in certain direction, and recorded by CCD2 cameras, obtains measured object table under normal temperature state There is four width in face the laser shearing of known phase shift information to dissipate class's interference fringe image;
Testee is under hot stress state, and laser light source also passes through after beam expanding lens expands, by laser irradiation to testee Surface, then by the reflected light on testee surface by beam splitter, light is made to be divided into the two-beam of mutually same light energy, wherein Light beam is directly recorded by CCD1 cameras, obtains original image;Another light beam enters five or five beam splitters of clipper, five or five points This Shu Guang is divided into the two-beam of same light energy by Shu Jing, then is had respectively entered the phase shift reflection mirror of connection phase-shifter and sheared anti- Mirror is penetrated, controlling phase shift reflection mirror by phase-shifter generates micro-displacement to reach phase shift, adjusts and shears by shear mirror Amount to form body surface image and be interfered from the clip image to misplace in certain direction, and is remembered by CCD2 cameras There is the laser shearing of known phase shift information to dissipate class's interference fringe picture for record, four width for obtaining measured object surface under hot stress state Picture;
Double CCD cameras all send the eight width images obtained under two states to PC machine respectively, and PC machine passes through included phase It moves device control algolithm and accurately controls phase-shifter four known phase shifts of generation, normal temperature state is extracted by four-step phase-shifting algorithm and heat adds The phase diagram that the laser shearing under latter two state dissipates class's interference fringe image is carried, numerical difference is then done and obtains phase difference image, It is handled by carrying out the unwrapping algorithm of adaptive threshold filter and least square method to phase difference image, is directly reacted again The laser shearing of measured object surface deformation displacement gradient dissipates the phase difference image of class's interference fringe image, finally selects a width at random By the original image and above-mentioned phase difference image of CCD1 acquisitions according to CCD resolution ratio light path system and the scale operation of shearing displacement It is registrated, merged, realize the precise visualizationization positioning of defects detection.
2. the laser speckle-shearing interferometry defect detecting system according to claim 1 based on image registration and fusion, It is characterized in that, the image processing algorithm carried in the PC machine includes that the unpacking of adaptive threshold filter and least square method is calculated Method.
3. the laser speckle-shearing interferometry defect detecting system according to claim 1 based on image registration and fusion, Be characterized in that, phase-shifter control algolithm control phase-shifter generate four known phase shift values be 0,90 °, 180 °, 270.
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