CN108280824A - Laser speckle-shearing interferometry defect detecting system based on image registration and fusion - Google Patents
Laser speckle-shearing interferometry defect detecting system based on image registration and fusion Download PDFInfo
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- CN108280824A CN108280824A CN201810049057.9A CN201810049057A CN108280824A CN 108280824 A CN108280824 A CN 108280824A CN 201810049057 A CN201810049057 A CN 201810049057A CN 108280824 A CN108280824 A CN 108280824A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/30—Determination of transform parameters for the alignment of images, i.e. image registration
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30168—Image quality inspection
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Abstract
The invention discloses a kind of laser speckle-shearing interferometry defect detecting system based on image registration and fusion, including：The PC machine of laser light source, beam expanding lens, beam splitter, clipper, phase-shifter, image acquisition device and integrated image processing algorithm and phase-shifter control algolithm；Testee is had recorded simultaneously first with the image acquisition device of dual camera dissipates class's interference fringe picture and original image in the front and back laser shearing of heat load, class's interference fringe picture is dissipated by the laser shearing front and back to heat load of image processing algorithm and phase-shifter control algolithm again to handle, obtain phase difference image, finally phase difference image is merged and is registrated with original image, realizes quickly being accurately positioned for defective locations detection.
Description
Technical field
The invention belongs to defect detecting technique fields, more specifically, are related to a kind of based on image registration and fusion
Laser speckle-shearing interferometry defect detecting system.
Background technology
Laser speckle-shearing interferometry technology has the whole audience, non-contact, strong to environment interference, high-precision, can be direct
The displacement derivatives for measuring the surface that the defects of testee is due to internal unsticking excites under hot loading environment, so being wanted to environment
Ask relatively low, these features enable the scattered class's interference technique of laser shearing to walk out laboratory, are widely used in aerospace
The microminiatures internal flaw such as unsticking of composite material.Although no matter from principle or in actual experiment and application, the technology quilt
It is widely used in non-destructive testing, and achieves many innovative and breakthrough progress, but current research is especially
Be accurately positioned aspect in defective locations almost without specific progress, main research defect it is qualitative and quantitative detect and
In terms of application field.
Laser shearing, which dissipates class's interference technique, can directly measure the differential of ohject displacement, substantially former for straining highly beneficial
Reason is combined with general speckle interference measurement and shear polymer, plus dislocation member before the lens of general speckle interference optical path
Part forms cutting speckle by different shearing elements.By taking classical Michelson's interferometer as an example, object is shone with coherent laser
It penetrates, one object point is divided into two picture points in image planes by birefringece crystal, to be produced on the imaging sensor of camera
Raw a pair of lateral picture that misplaces, two width speckle images before and after object load deflection are acquired through CCD to be digitized, and body deposit meter is deposited through frame
Calculation machine, two width speckle patterns subtract each other shape and form new interference fringe, and the inside of object is may determine that from the variation of interference fringe picture
It is whether defective.The phase information that image is extracted in conjunction with novel phase-shifting technique is further processed and may be implemented quickly to lack automatically
Fall into Visual retrieval.But current research is only limited to the detection of defect, it is accurate there is no being realized on testee
Positioning, and it is that important one of measurement is predicted and estimated for material structure health control to be accurately positioned.
Nineteen eighty-two《Optical Engineering》Volume 21 3 " A new optical method for
It has been put forward for the first time to shear laser in a strain measurement and nondestructive testing " texts and has dissipated class
Interference technique is applied to stress mornitoring and field of non destructive testing, and device is put using the prism for using one to carry the small angle of wedge
It sets before CCD camera, prism size is just the half of CCD camera area, and the reflection light on testee surface is passed through
Prism forms dislocation and the preimage progress shear interference for being directly over CCD camera.Although the device is simple, disadvantage is also very
Obviously, the fixed prism angle of wedge is directly linked the size of the angle of shear, dumb, and introducing noise is very big, and sensitivity is extremely low.
1996《Optics and Laser in Engineering》" the Dual-beam phase of volume 24
It is described in a Shift Shearography for Measurement of In-plane Strains " texts a kind of based on advanced in years
The laser shearing of the dual-beam symmetrical light sources list observation of Ke Erxun interferometers dissipates class's interference device, can measure face Bit Shift derivative
Gradient, but the requirement for precise defect location cannot achieve.
1999《Composites:Part B Engineering》" the Applications of of volume 30
Used in a digital shearography for testing of composite structures " texts based on classics
The shearing of single irradiation source list observation of Michelson's interferometer dissipate class interference device, which simply easily realizes, but only
As a result it detects, and needs to combine phase-shifting technique if necessary to extraction phase information, defect cannot achieve with regard to the simple device
On-line automatic real-time defects detection.
1997《Meas.Sci.Techno》" the A compact dual-purpose camera for of volume 8
A kind of group is disclosed in a shearography and electronic speckle-pattern interferometry " texts
The detecting system that electronics dissipates class's interference and shearing dissipates class's interference device is closed, the scattered class which can obtain testee simultaneously is dry
It relates to and shears and dissipate class's interference information, while obtaining the information of two kinds of technologies, but maximum one of disadvantage is that light path is more complicated, is drawn
It is larger to enter extraneous error；The efficiency of light energy utilization is relatively low simultaneously, it is desirable that the energy of laser is high；In addition, also cannot achieve defective locations
It is accurate comparison and positioning.
1999《Applied Optics》Volume 38 the 1st " Multiwavelength shearography
For quantitative measurements of two-dimensional strain distributions ", 1999
's《Proceeding of SPIE》" the Time-division-multiplexed 3D of volume 3744 and the 3745th
Shearography " and " Compact shearography system for the measurement of 3D
Three square three vertex position light sources are used in three articles of deformation " and singly observe based on Michael
The laser shearing of inferior interferometer dissipates class's interference device, is used for detection object in-plane displacement gradient so that position in the face of all directions
Moving gradient can measure, but the device and its complexity, so three light sources are irradiating the interference fringe information of object rear
Phase is difficult to detach, and the noise signal of introducing also increases therewith.
1996《Applied Optics》Volume 5 the 313rd " Quantitative evaluation of
Digital shearing interferogram using the spatial carrier method ", 2004
《Optics and Lasers in Engineering》" the A new set-up for pulsed digital of volume 42
It is described in a shearography applied to defect detection in composite structures " texts
Laser shearing based on Mach-Zehnder interferometers dissipates class and interferes detecting system, combines spatial carrier technology, improves
The precision of defects detection, but be not in progress in the defect accurate positionin technology of composite material.
2008《Measurement Science and Technology》" the Surface strain of volume 19
measurement of rotating objects using pulsed laser shearography with coherent
Four camera lens based on Mach-Zehnder interferometers are used in a fibre-optic imaging bundles " texts
Coherent optical-fiber image-forming detecting system, the system are tested object image from four angle acquisitions using four small camera lenses, pass through four light
Cable is conveyed to Mach-Zehnder interferometers and forms shear interference image simultaneously, is finally fused to four corners of CCD camera,
The analysis and processing of stripe pattern are carried out again, and extraction is useful to obtain information.The arrangement increases accuracy of detection, but disadvantage is very bright
Aobvious, system is established extremely complex first, and expense is more expensive.Secondly, the information for including by the CCD interference fringe pictures acquired is non-
It is often complicated various, it is difficult to carry out Signal separator, while additional noise information may also be introduced.
Doctoral thesis " the vectorial field study on regulation based on LCD space light modulator " in 2014,2013
《Journal of Optoelectronics Laser》" the synchronous shifting based on LCD space light modulator of the 6th phase of volume 24
Phase interference with common path technology ", 2006《Optical Engineering》Volume 45 the 10th " Digital
speckle shearing interferometer using a liquid-crystal spatial light
This three articles of modulator " all use the shearing based on spatial light modulator and dissipate class's interference device, which is reduced really
The time that phase information obtains improves the capacity usage ratio of light and reduces interference of other light to the system, but space
Optical modulator is very expensive, and is not related in the accurate positionin for defects detection.
Invention content
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of laser based on image registration and fusion to cut
Speckle interference defect detecting system is cut, realizes that the pinpoint of defective locations information can by way of image co-registration, registration
It is detected depending on changing, has the characteristics that simple light path, at low cost, high sensitivity, accuracy of detection are high.
For achieving the above object, a kind of laser speckle-shearing interferometry defect based on image registration and fusion of the present invention
Detecting system, which is characterized in that including：Laser light source, beam expanding lens, beam splitter, clipper, phase-shifter, image acquisition device sum aggregate
At the PC machine of image processing algorithm and phase-shifter control algolithm；
The clipper includes five or five beam splitters, phase shift reflection mirror and shearing speculum；
The image acquisition device is using double CCD cameras, and wherein CCD1 cameras are for acquiring original image, CCD2 camera shootings
Head dissipates class's interference fringe image for acquiring laser shearing；
Testee is under normal temperature state, and laser light source is after beam expanding lens expands, by laser irradiation to testee
Surface, then so that light is divided into the two-beam of mutually same light energy, wherein one by beam splitter the reflected light on testee surface
Beam light is directly recorded by CCD1 cameras, obtains original image；Another light beam enters five or five beam splitters of clipper, five or five beam splitting
This Shu Guang is divided into the two-beam of the same light energy of two beams by mirror, then has respectively entered phase shift reflection mirror and the shearing of connection phase-shifter
Speculum controls the phase shift of phase shift reflection mirror by phase-shifter, shearing displacement is adjusted by shear mirror, to form body surface figure
Picture and the clip image to misplace certainly in certain direction are interfered, and are recorded by CCD2 cameras, obtain being tested under normal temperature state
There is four width on object surface the laser shearing of known phase shift information to dissipate class's interference fringe image；
Under hot stress state, laser light source also passes through after beam expanding lens expands testee, by laser irradiation to tested
The surface of object, then so that light is divided into the two-beam of mutually same light energy by beam splitter the reflected light on testee surface,
Wherein light beam is directly recorded by CCD1 cameras, obtains original image；Another light beam enters five or five beam splitters of clipper, and five
This Shu Guang is divided into the two-beam of same light energy by five beam splitters, and the phase shift that this two-beam has respectively entered connection phase-shifter again is anti-
Mirror and shearing speculum are penetrated, by phase-shifter control phase shift reflection mirror generation micro-displacement to achieve the purpose that phase shift,
Shearing displacement is adjusted by shear mirror, to form body surface image and be done from the clip image to misplace in certain direction
It relates to, and is recorded by CCD2 cameras, four width for obtaining measured object surface under hot stress state have the laser of known phase shift information
Shearing dissipates class's interference fringe image；
CCD1 cameras are respectively by the two images obtained under two states and CCD2 cameras respectively in two states
Under obtained eight width images, altogether ten width images all send PC machine to, PC machine is accurate by included phase-shifter control algolithm
It controls phase-shifter and generates four known phase shifts, the scattered class of laser shearing under two states is extracted by four-step phase-shifting algorithm and interferes item
Then the phase diagram of print image does numerical difference and obtains phase difference image, then by carrying out adaptive thresholding successively to phase difference image
Value filtering and the processing of the unwrapping algorithm of least square method, the laser for obtaining directly reacting measured object surface deformation displacement gradient are cut
The phase difference image of scattered class's interference fringe image is cut, finally selects a width at random by the CCD1 original images acquired and above-mentioned phase
Difference image is registrated according to the scale operation of CCD resolution ratio light path system and shearing displacement, is merged, and realizes the essence of defects detection
Really visualization positioning.
What the goal of the invention of the present invention was realized in：
The present invention is based on the laser speckle-shearing interferometry defect detecting systems of image registration and fusion, including：Laser light source,
The PC of beam expanding lens, beam splitter, clipper, phase-shifter, image acquisition device and integrated image processing algorithm and phase-shifter control algolithm
Machine；Testee is had recorded simultaneously first with the image acquisition device of dual camera dissipates class's interference in the front and back laser shearing of heat load
Bar graph and original image, then class is dissipated by the laser shearing front and back to heat load of image processing algorithm and phase-shifter control algolithm
Interference fringe picture is handled, and phase difference image is obtained, and finally phase difference image is merged and is registrated with original image, real
Existing defective locations detection is quickly accurately positioned.
Meanwhile the present invention is based on the laser speckle-shearing interferometry defect detecting systems of image registration and fusion also with following
Advantageous effect：
(1), the present invention is based on the phase-shifting technique that classical Michelson's interferometer combines automatic fringe phase acquisition of information,
Image is acquired using dual camera integration technology, wherein a channel is by being integrated with four-step phase-shifting algorithm, based on adaptive
Image is then converted to after the processing of the ends PC of the smoothing algorithm of threshold filter and the unwrapping algorithm of improved least square method
Bright image, defect profile is high-visible, and another channel is the original image that the measured object surface of light path is total to the former, the two according to
The distance proportion Precision Mapping fusion of the resolution ratio and light path of CCD camera and registration, realize pinpoint fast weak
Visual retrieval.
(2), the present invention overcomes the complicated disadvantages low with precision of high cost of light path, it is critical that can realize that defect is intuitive
Be accurately positioned, direct-on-line realizes the preparation quick visualization detection of defect, be the structure detection of composite material, health control and
Breakthrough contribution is made in life estimation, and especially when the large area measured object to practical application is detected, which has
Point is especially prominent.
Description of the drawings
Fig. 1 is the laser speckle-shearing interferometry defect detecting system schematic diagram the present invention is based on image registration and fusion；
Fig. 2 is the laser speckle-shearing interferometry defect detecting system plan view the present invention is based on image registration and fusion；
Fig. 3 is the original graph of body surface；
Fig. 4 is image of the phase difference image after adaptive threshold filter processing；
Fig. 5 is the image after the unwrapping algorithm processing by least square method of phase difference figure；
Fig. 6 is that Fig. 3 and Fig. 5 carries out the image after fusion registration.
Specific implementation mode
The specific implementation mode of the present invention is described below in conjunction with the accompanying drawings, preferably so as to those skilled in the art
Understand the present invention.Requiring particular attention is that in the following description, when known function and the detailed description of design perhaps
When can desalinate the main contents of the present invention, these descriptions will be ignored herein.
Embodiment
Fig. 1 is the laser speckle-shearing interferometry defect detecting system schematic diagram the present invention is based on image registration and fusion.
In the present embodiment, as shown in Figure 1, the present invention is based on the laser speckle-shearing interferometry defects of image registration and fusion
Detecting system, including：Laser light source, beam expanding lens, beam splitter, clipper, phase-shifter, image acquisition device and integrated image procossing are calculated
The PC machine of method and phase-shifter control algolithm；
In the present embodiment, laser light source selects He-Ne laser；Clipper include five or five beam splitters, phase shift reflection mirror and
Shear speculum；Phase-shifter selects piezoelectric ceramics phase-shifter；Image acquisition device is using double CCD cameras, wherein CCD1 cameras
For acquiring original image, CCD2 cameras dissipate class's interference fringe image for acquiring laser shearing；
Fig. 2 is the laser speckle-shearing interferometry defect detecting system plan view the present invention is based on image registration and fusion.
In the present embodiment, testee is to be built-in with a diameter of 10mm, 20mm, 30mm, 50mm circles apply wax layer and
The rectangle of 10x10mm, 10x20mm, 10x30mm apply wax layer, apply the debonding defect that wax layer is used to simulate multilayer materials, the quilt
Survey the heterogeneous multi-layer film composite material that object size is 500mmx500mm.
Testee 2 is under normal temperature state, and laser light source 3 is after beam expanding lens 4 expands, by laser irradiation to testee
2 surface, then so that light is divided into the two-beam of mutually same light energy by beam splitter 6 reflected light on 2 surface of testee,
Wherein light beam is directly recorded by CCD1 cameras, obtains original image, as shown in Figure 3；Another light beam enters the five of clipper
This Shu Guang is divided into the two-beam of the same light energy of two beams by five beam splitters, 5,55 beam splitter 5, then has respectively entered connection phase shift
The phase shift reflection mirror 1 and shearing speculum 7 of device, the phase shift of phase shift reflection mirror 1 are controlled by phase-shifter, by shearing speculum 7
Shearing displacement is adjusted, to form body surface image and be interfered from the clip image to misplace in certain direction, and by CCD2
Camera records, and there is four width for obtaining measured object surface under normal temperature state the laser shearing of known phase shift information to dissipate class's interference item
Print image；
Testee 2 is under hot stress state, and laser light source 3 is after beam expanding lens 4 expands, by laser irradiation to measured object
The surface of body 2, then so that light is divided into two beams of mutually same light energy by beam splitter 6 reflected light on 2 surface of testee
Light, wherein light beam are directly recorded by CCD1 cameras, obtain original image；Another light beam enters five or five beam splitters of clipper
This Shu Guang is divided into the two-beam of the same light energy of two beams by 5,55 beam splitters 5, then has respectively entered the phase shift of connection phase-shifter
Speculum 1 and shearing speculum 7, the phase shift of phase shift reflection mirror 1 is controlled by phase-shifter, and shearing is adjusted by shearing speculum 7
Amount to form body surface image and be interfered from the clip image to misplace in certain direction, and is remembered by CCD2 cameras
There is the laser shearing of known phase shift information to dissipate class's interference fringe picture for record, four width for obtaining measured object surface under hot stress state
Picture；
Double CCD cameras all send the ten width images obtained under two states to PC machine respectively, and PC machine sends instruction
Piezoelectric ceramics phase-shifter is given, makes control driving voltage since 40v, every 4v, phase change pi/2, to be controlled in phase-shifter
Algorithm accurately controls down, and piezoelectric ceramics phase-shifter generates 0,90 °, 180 °, 270 ° of four known phase shifts.Known cutting speckle image
It can be expressed with equation (1.1), wherein I is the light distribution of speckle pattern on CCD；Wherein I0It is background light intensity.μ is speckle
The modulation amplitude of pattern.It is random phase angle.
By carrying out four-step phase-shifting to the cutting speckle figure represented by equation 1.1, following four width speckle pattern can be generated：
Four-step phase-shifting algorithm, which often walks, increases pi/2, can generate above-mentioned four width cutting speckle figure., phaseIt can be true by equation 1.3
Fixed, the image after heat load repeats above-mentioned four-step phase-shifting algorithm and equation 1.4 can be obtained,
Equation 1.4 is namely subtracted equation 1.3 by doing numerical difference to can be obtained by caused by measured object deformation
Phase difference, then phase difference image is passed through into the included image processing algorithm of PC machine：Adaptive threshold filter and least square method
Unwrapping algorithm carry out successively processing handle, obtain directly react measured object surface deformation displacement gradient laser shearing dissipate class
The phase difference image of interference fringe image, wherein by adaptive threshold filter processing after image as shown in figure 4, by
Image after the unwrapping algorithm processing of least square method is as shown in Figure 5；
Finally the original image that a width is acquired by CCD1, i.e. Fig. 3 are selected at random, and treated phase difference image, i.e.,
Fig. 5 is registrated according to the scale operation of CCD resolution ratio light path system and shearing displacement, is merged, and image shown in Fig. 6 is obtained, from
And realize the precise visualizationization positioning of defects detection.
Although the illustrative specific implementation mode of the present invention is described above, in order to the technology of the art
Personnel understand the present invention, it should be apparent that the present invention is not limited to the range of specific implementation mode, to the common skill of the art
For art personnel, if various change the attached claims limit and determine the spirit and scope of the present invention in, these
Variation is it will be apparent that all utilize the innovation and creation of present inventive concept in the row of protection.
Claims (3)
1. a kind of laser speckle-shearing interferometry defect detecting system based on image registration and fusion, which is characterized in that including：Swash
Radiant, beam expanding lens, beam splitter, clipper, phase-shifter, image acquisition device and integrated image processing algorithm and phase-shifter control are calculated
The PC machine of method；
The clipper includes five or five beam splitters, phase shift reflection mirror and shearing speculum；
The image acquisition device is used using double CCD cameras, wherein CCD1 cameras for acquiring original image, CCD2 cameras
Class's interference fringe image is dissipated in acquisition laser shearing；
Testee is under normal temperature state, and laser light source is after beam expanding lens expands, by the surface of laser irradiation to testee,
Light is set to be divided into the two-beam of mutually same light energy, wherein light beam by beam splitter the reflected light on testee surface again
It is directly recorded by CCD1 cameras, obtains original image image；Another light beam enters five or five beam splitters of clipper, five or five beam splitting
This Shu Guang is divided into the two-beam of same light energy by mirror, then has respectively entered phase shift reflection mirror and the shearing reflection of connection phase-shifter
Mirror, by phase-shifter control phase shift reflection mirror phase shift, by shear mirror adjust shearing displacement, to formed body surface image and
Interfered from the clip image to misplace in certain direction, and recorded by CCD2 cameras, obtains measured object table under normal temperature state
There is four width in face the laser shearing of known phase shift information to dissipate class's interference fringe image；
Testee is under hot stress state, and laser light source also passes through after beam expanding lens expands, by laser irradiation to testee
Surface, then by the reflected light on testee surface by beam splitter, light is made to be divided into the two-beam of mutually same light energy, wherein
Light beam is directly recorded by CCD1 cameras, obtains original image；Another light beam enters five or five beam splitters of clipper, five or five points
This Shu Guang is divided into the two-beam of same light energy by Shu Jing, then is had respectively entered the phase shift reflection mirror of connection phase-shifter and sheared anti-
Mirror is penetrated, controlling phase shift reflection mirror by phase-shifter generates micro-displacement to reach phase shift, adjusts and shears by shear mirror
Amount to form body surface image and be interfered from the clip image to misplace in certain direction, and is remembered by CCD2 cameras
There is the laser shearing of known phase shift information to dissipate class's interference fringe picture for record, four width for obtaining measured object surface under hot stress state
Picture；
Double CCD cameras all send the eight width images obtained under two states to PC machine respectively, and PC machine passes through included phase
It moves device control algolithm and accurately controls phase-shifter four known phase shifts of generation, normal temperature state is extracted by four-step phase-shifting algorithm and heat adds
The phase diagram that the laser shearing under latter two state dissipates class's interference fringe image is carried, numerical difference is then done and obtains phase difference image,
It is handled by carrying out the unwrapping algorithm of adaptive threshold filter and least square method to phase difference image, is directly reacted again
The laser shearing of measured object surface deformation displacement gradient dissipates the phase difference image of class's interference fringe image, finally selects a width at random
By the original image and above-mentioned phase difference image of CCD1 acquisitions according to CCD resolution ratio light path system and the scale operation of shearing displacement
It is registrated, merged, realize the precise visualizationization positioning of defects detection.
2. the laser speckle-shearing interferometry defect detecting system according to claim 1 based on image registration and fusion,
It is characterized in that, the image processing algorithm carried in the PC machine includes that the unpacking of adaptive threshold filter and least square method is calculated
Method.
3. the laser speckle-shearing interferometry defect detecting system according to claim 1 based on image registration and fusion,
Be characterized in that, phase-shifter control algolithm control phase-shifter generate four known phase shift values be 0,90 °, 180 °, 270.
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| CN109000580A (en) * | 2018-09-29 | 2018-12-14 | 北京信息科技大学 | A kind of strain measurement method and device |
| CN110487171A (en) * | 2019-05-30 | 2019-11-22 | 北京工业大学 | Multi-functional speckle interference device imaging system |
| WO2020051779A1 (en) * | 2018-09-11 | 2020-03-19 | 合刃科技（深圳）有限公司 | Defect detection method and detection system for curved surface object |
| CN111344559A (en) * | 2018-12-26 | 2020-06-26 | 合刃科技（深圳）有限公司 | Defect detection method and defect detection system |
| CN111578844A (en) * | 2020-05-15 | 2020-08-25 | 上海工程技术大学 | High vibration resistance electronic speckle interferometry system and method |
| CN111751383A (en) * | 2020-07-17 | 2020-10-09 | 盐城工学院 | Defect depth detection method integrating speckle interference and shearing speckle interference |
| CN112362700A (en) * | 2020-09-30 | 2021-02-12 | 成都飞机工业（集团）有限责任公司 | Detection sensitivity calibration method for laser dislocation speckle equipment based on thermal loading method |
| CN112414941A (en) * | 2020-11-26 | 2021-02-26 | 青岛理工大学 | Complex surface nondestructive detection system and method based on shearing speckle interference technology |
| CN114485448A (en) * | 2022-01-25 | 2022-05-13 | 上海大学 | Self-adaptive speckle interferometry method and system |
| CN115266759A (en) * | 2022-05-25 | 2022-11-01 | 上海航天化工应用研究所 | Online automatic identification method for debonding defect of explosive column based on shearing speckle interference |
| WO2023087839A1 (en) * | 2021-11-18 | 2023-05-25 | 北京卫星制造厂有限公司 | Online calibration method and device for phase shifter |
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